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Annual Report 2014 FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB Content Annual Report 2014 ANNUAL REPORT Fraunhofer Institute for Integrated Systems and Device Technology IISB Fraunhofer Institute for Integrated Systems and Device Technology 2014 Content Imprint Published by: Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB Schottkystrasse 10 91058 Erlangen, Germany Editors: Thomas Richter Lothar Frey Layout and Setting: Thomas Richter Mariya Hristova Jana Köppen Helen Kühn Printed by: Frank UG Grafik – Druck – Werbung, Höchstadt Cover Photo: Monolithically integrated RC snubber for power electronic applications sintered on direct copper bond and bonded to adjacent pad. © Fraunhofer IISB, Erlangen 2015 All rights reserved. Reproduction only with express written authorization. ACHIEVEMENTS AND RESULTS ANNUAL REPORT 2014 ContentContent FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB Director: Prof. Dr. rer. nat. Lothar Frey Schottkystrasse 10 91058 Erlangen, Germany Phone: +49 (0) 9131 761-0 Fax: +49 (0) 9131 761-390 E-Mail: [email protected] Web: www.iisb.fraunhofer.de PREFACE 1 ContentContent In 2014, semiconductor materials, devices, and electronic systems for energy 1 Prof. Dr. rer. nat. Lothar Frey, supply kept characterizing the research work of Fraunhofer IISB. Appropriately, director of Fraunhofer IISB. the institute started a close collaboration within the Campus “Future Energy © M. Heyde / Fraunhofer Systems” initiated by Siemens. Together with Fraunhofer IIS and the University of Erlangen-Nuremberg, we prepared the new “Leistungszentrum Elektronik- systeme”, which was finally launched in January 2015. Moreover, our energy research project SEEDs, which aims for a sustainable energy infrastructure under the special boundary conditions of medium-sized industrial environments, has been suc- cessfully continued. The results of SEEDs and other Bavarian energy research projects were pre- sented at our Energy Technology Symposium in October under attendance of the Bavarian State Minister of Economic Affairs and Media, Energy and Technology, Ilse Aigner. Our research activities on local DC grids for efficient energy supply have been significantly ex- tended and have drawn considerable attention. In this area, IISB develops innovative compo- nents, such as DC grid managers, switch modules for lighting applications, DC connector sys- tems, or DC fast charging solutions for electric vehicles. In the field of power converters for energy technology and electromobility, one of the special competencies of IISB, new benchmarks were set, e.g., by the development of a 200 kW DC/DC converter with a power density of more than 140 kW/l, which was introduced at PCIM Europe in Nuremberg in May. But also for the steps prior to system integration, IISB offers high-class RD. Our -Fab service offer for prototype fabrication of electron devices and process development in silicon and sili- con carbide technologies has been further expanded. Our branch lab in Freiberg, the Technol- ogy Center for Semiconductor Materials THM, was successfully evaluated in a Fraunhofer audi- tion procedure. Fraunhofer IISB has increased its annual budget to well above 20 million Euros with a staff of 230. I would like to take this opportunity to thank all my colleagues at IISB for their successful work in the past year. I extend my gratitude to our partners at the Friedrich-Alexander-Universität of Erlangen-Nuremberg (FAU) and in industry. I also thank our funding authorities, especially the Bavarian Ministry of Economic Affairs and Media, Energy and Technology, and the German Fed- eral Ministry of Education and Research (BMBF) for their support. Prof. Dr. Lothar Frey Erlangen, April 2015 2 3 CONTENT FRAUNHOFER IISB AT A GLANCE NAMES AND DATA Profile ...................................................................7 Guest Scientists ...........................................................92 History...................................................................7 Patents .................................................................92 Research Areas and Organization...............................................9 Participation in Committees ..................................................93 Locations ................................................................11 Conferences, Workshops, Fairs, and Exhibitions ...................................97 Network and Partners ......................................................12 Chair of Electron Devices (LEB), University of Erlangen-Nuremberg .....................13 SCIENTIFIC PUBLICATIONS Staff Development, Investments, and Budget .....................................16 Publications .............................................................100 Advisory Board (December 2014) ..............................................18 Presentations ............................................................116 Fraunhofer IISB Contact Information ...........................................19 PhD Theses .............................................................135 Diploma and Master Theses .................................................136 FRAUNHOFER-GESELLSCHAFT Bachelor Theses ..........................................................138 The Fraunhofer-Gesellschaft..................................................21 SIMULATION ............................................................22 Pushing SiC MOSFETs to Their Limits and Beyond..................................24 MATERIALS .............................................................28 Improved Quality Control of Silicon Carbide Wafers ................................32 TECHNOLOGY AND MANUFACTURING .......................................36 -Fab: Customized Prototype Fabrication and Device-related Services...................39 Measurement for Microchips – Precise to a Hair ...................................32 DEVICES AND RELIABILITY .................................................48 Increasing Lifetime at High Temperature.........................................50 ENERGY ELECTRONICS ....................................................60 Smart Battery Systems ......................................................63 ENERGY TECHNOLOGIES – Project SEEDs ......................................68 EVENTS Fraunhofer IISB Shows New Developments at PCIM Europe 2014 in Nuremberg. 75 Electric Cars Run Smoothly – Innovation Price for Microelectronics .....................77 Energy Technology in Transformation – Bavarian Research Projects Give Impetus . 79 Bavarian Joint Research on E-Mobility – FORELMO Presented Itself at CoFAT 2014 . 58 DRIVE-E Study Prizes Awarded – Scientific work on the Electric Drive Train ...............82 Orientation Guide to Solar Cells – Award-winning Research on Multicrystalline Silicon . 84 Electronics for Energy Supply – Strategic Cooperation between Siemens and IISB. 87 Fraunhofer Results Press Conference 2014 with Examples from Power Electronics . .89 BMBF State Secretary Stefan Müller Learns about Electronic Systems ...................91 4 5 FRAUNHOFER IISB AT A GLANCE ContentContent Profie 1 Building of Fraunhofer IISB in Erlangen with test center for The Fraunhofer Institute for Integrated Systems and Device Technology IISB conducts applied re- electric vehicles and clean- search and development in the field of electronic systems for application in, e.g., electric vehicles room; behind: cleanroom or energy technology. In this connection, the IISB extensively covers the complete value chain laboratory and building of from basic materials to entire power electronic systems. With its two business areas, semicon- the Chair of Electron Devices ductors and power electronics, the institute provides innovation and solutions in materials devel- of the University of Erlangen- opment, semiconductor technology and manufacturing, devices and modules, as well as in sys- Nuremberg. tem development for vehicle power electronics, energy electronics, and energy infrastructures. © K. Fuchs / Fraunhofer IISB This is supplemented by broad activities in reliability, simulation, characterization, and metrology. The headquarters of the IISB is located in Erlangen, Germany. The institute has two branches in Nuremberg and one in Freiberg. As one of the 66 institutes of the Fraunhofer-Gesellschaft, the IISB does contract research for industry and public authorities. Moreover, it closely cooperates with the University of Erlangen-Nuremberg. The IISB has about 230 employees plus numerous students working as research assistants. The institute is equipped with high-class laboratories, such as a test center for electric cars and an application center for DC grid technology. Together with the University, it operates 1500 m2 of cleanroom area for semiconductor technology on sili- con and silicon carbide. The IISB is a close partner of national and international industry. Its main objective is to provide excellent research to its customers and to set technological benchmarks as one of the leading research institutions in electronic systems. Cooperation includes research and development proj- ects, prototyping, consultancy, licensing, and studies. History The Fraunhofer Institute for Integrated Systems and Device Technology IISB in Erlangen is an im- portant center of applied R&D for electronic systems, power electronics, semiconductor technol- ogy, and materials development in the Nuremberg metropolitan region, Germany and Europe. It was founded in 1985 as the Electron Devices department AIS-B of
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