Springer Handbooks

Springer Handbook of Nanotechnology

Bearbeitet von Bharat Bhushan

1. Auflage 2010. Buch. xlviii, 1964 S. ISBN 978 3 642 02524 2 Format (B x L): 19,3 x 24,2 cm

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About the Authors

Chong H. Ahn Chapter B.18 Authors

University of Cincinnati Dr. Chong H. Ahn is a Professor of Electrical and Computer Engineering at the Department of Electrical University of Cincinnati. He obtained his PhD from the School of Electrical and Computer Engineering Engineering, Georgia Institute of Technology in 1993. Prior to joining the University Cincinnati, OH, USA of Cincinnati, he worked as a Post-Doctoral Fellow at IBM T. J. Watson Research [email protected] Center, NY, USA. His research interests include all aspects of design, fabrication, and characterization of microfluidic devices, polymer lab-on-a-chip, point-of-care testing (POCT) clinical diagnostics, biosensors and bioelectronics, BioMEMS devices, and self-assembled nanostructures. He is currently an Editor of the IEEE/ASME Journal of MEMS, and also serving as an Editorial Board Member of JMM, and the Journal of Microfluidics and Nanofluidics. He is the founder of Siloam Biosciences Inc. in Cincinnati, Ohio, USA.

Boris Anczykowski Chapter C.26 nanoAnalytics GmbH Dr. Boris Anczykowski is a physicist with an extensive research background in the Münster, Germany field of dynamic scanning force microscopy. He co-invented the Q-control technique [email protected] and received the Innovation Award Münsterland for Science and Economy in 2001 for this achievement. He is a Managing Director and co-founder of nanoAnalytics GmbH, a company specialized in the characterization of surfaces and interfaces on the micro and nanometer scale.

W. Robert Ashurst Chapter H.48

Auburn University W. Robert Ashurst is currently an Assistant Professor of Chemical Department of Chemical Engineering Engineering at Auburn University. His research focuses on design of Auburn, AL, USA molecular precursors for advanced monolayer films, tribology at the [email protected] micro and nanoscale, and the influence of surface chemical treatments on micro and nanoscale devices. Dr. Ashurst completed his PhD in Chemical Engineering from the University of California at Berkeley in 2003 and remained at U.C. Berkeley as a post-doctoral researcher until the Fall of 2004 when he joined the faculty at Auburn University.

Massood Z. Atashbar Chapter A.8

Western Michigan University Professor Massood Z. Atashbar received the BSc degree in electrical Department of Electrical engineering from the Isfahan University of Technology, Tehran, Iran, and Computer Engineering the MSc degree in Electrical Engineering from the Sharif University of Kalamazoo, MI, USA Technology, Tehran, and the PhD degree from the Department of [email protected] Communication and Electronic Engineering, RMIT University, Melbourne, Australia, in 1998. From 1998 to 1999, he was a Postdoctoral Fellow at the Center for Electronic Engineering and Acoustic Materials, The Pennsylvania State University, University Park. He is now an Assistant Professor with the Electrical and Computer Engineering Department, Western Michigan University, Kalamazoo. His research interests include physical and chemical microsensors development, wireless sensors, and applications of nanotechnology in sensors, digital electronics, advanced signal processing, and engineering education. 1888 About the Authors

Wolfgang Bacsa Chapter A.3

University of Toulouse III (Paul Sabatier) Professor Wolfgang Bacsa is an expert in the emerging field of nanooptics and carbon Laboratoire de Physique des Solides nanotubes. He has a PhD from the Swiss Federal Institute of Technology (ETH) (LPST),UMR 5477 CNRS Zurich in Physics and has extensive experience in condensed matter physics, optics, Toulouse, France microscopy, synthesis of ultrathin films and nanostructured carbon. Professor Bacsa [email protected]; worked at the ETH Zürich, PennState University and EPFL Lausanne. [email protected] Authors

Kelly Bailey Chapter B.17

University of Adelaide Kelly Bailey received a BS in Nanotechnology from Flinders University, South CSIRO Human Nutrition Australia in 2004. She is currently pursuing a PhD in the Department of Biochemistry Adelaide, SA, Australia with the University of Adelaide and CSIRO Molecular and Health Technologies in [email protected] Adelaide, South Australia. Her current research focuses on assay and array technologies for G-protein coupled receptors and their associated G-proteins. Her project specifically looks at fluorescent signal transduction mechanisms using time-resolved fluorescence resonance energy transfer as well as surface display technologies for GPCRs. Applications for this work include biosensing and microarray platforms in the area of drug discovery and diagnostics.

William Sims Bainbridge Chapter I.53

National Science Foundation William Sims Bainbridge earned his doctorate from Harvard University. Division of Information, He is the author of 11 books, 4 textbook-software packages, and about Science and Engineering 180 shorter publications in information science, social science of Arlington, VA, USA technology, and the sociology of culture. His software employed [email protected] innovative techniques to teach theory and methodology: Experiments in Psychology, Sociology Laboratory, Survey Research, and Social Research Methods and Statistics. He is the editor of the Berkshire Encyclopedia of Human-Computer Interaction and author of the forthcoming God from the Machine, a study using artificial intelligence techniques to understand religious belief. At the National Science Foundation since 1992, he represented the social and behavioral sciences on five advanced technology initiatives: High Performance Computing and Communications, Knowledge and Distributed Intelligence, Digital Libraries, Information Technology Research, and Nanotechnology, before joining the staff of the Directorate for Computer and Information Science and Engineering. Currently, he is director of NSF’s Science and Engineering Informatics program, after having directed the Sociology, Human Computer Interaction, and Artificial Intelligence programs, and a member of the faculty of George Mason University.

Antonio Baldi Chapter A.8

Institut de Microelectronica de Barcelona Professor Antonio Baldi is a Ramon y Cajal researcher at the (IMB) CNM-IMB, Spain. He received his BS degree in telecommunication Centro National Microelectrónica engineering from the Universitat Politècnica de Catalunya, (1996) and (CNM-CSIC) his PhD degree on electronics engineering from the Universitat Barcelona, Spain [email protected] Autònoma de Barcelona in 2001. From 2001 to 2003 he was at the University of Minnesota working in the field of bioMEMS as a postdoctoral fellow. In the summer of 2003 he joined the Chemical Transducers Group (GTQ), at the Centro Nacional de Microelectrónica, where he works on the development of microsystems and instrumentation for chemical and biochemical sensing. About the Authors 1889

Wilhelm Barthlott Chapter F.41

University of Bonn Dr. Wilhelm Barthlott is a Professor of Botany and head of a Nees Institute for Biodiversity of Plants Biodiversity Institute and Director of the Botanical Garden of the Bonn, Germany University of Bonn. Since his post doc time at the University of [email protected] Heidelberg he has been interested in biodiversity research and in scanning electron and atomic force microscopy of biological surfaces. His discovery of self-cleaning surfaces in the 1970s (Lotus-Effekt) led Authors to an innovation in surface technologies. His interest in biomimetic transfer concentrates currently on air retaining surfaces for ship hulls.

Roland Bennewitz Chapter D.30

INM – Leibniz Institute for New Materials Roland Bennewitz studied physics in Freiburg and Berlin, Germany, Saarbrücken, Germany where he received his PhD. He leads the Nanotribology Group at the [email protected] INM – Leibniz Institute for New Materials. He is also Honorary Professor in the Physics Department of Saarland University. His scientific interests include the mechanical properties of surfaces at small scales and the development of new materials with dedicated mechanical properties. Before coming to Saarbrücken, he was at McGill University in Montreal (Canada) and at the University of Basel (Switzerland).

Bharat Bhushan Chapters 1, B.16, C.21, D.28, D.33, D.34, D.37, E.38, E.39, E.40, F.41, F.42, F.44, H.47

Ohio State University Dr. Bharat Bhushan is an Ohio Eminent Scholar and The Howard D. Winbigler Nanoprobe Laboratory for Bio- and Professor in the Professor in the College of Engineering, and the Director of the Nanotechnology and Biomimetics (NLB²) Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics (NLB2)atthe Columbus, OH, USA Ohio State University, Columbus, Ohio. He holds two MS, a PhD in mechanical [email protected] engineering/mechanics, an MBA, and three semi-honorary and honorary doctorates. His research interests include fundamental studies with a focus on scanning probe techniques in the interdisciplinary areas of bio/nanotribology, bio/nanomechanics and bio/nanomaterials characterization, and applications to bio/nanotechnology and biomimetics. He has authored 6 scientific books, more than 90 handbook chapters, more than 700 scientific papers (h factor – 45+; ISI Highly Cited in Materials Science, since 2007), and more than 60 scientific reports, edited more than 45 books, and holds 17 US and foreign patents. He is co-editor of Springer NanoScience and Technology Series and Microsystem Technologies. He has organized various international conferences and workshops. He is the recipient of numerous prestigious awards and international fellowships including the Alexander von Humboldt Research Prize for Senior Scientists, Max Planck Foundation Research Award for Outstanding Foreign Scientists, and the Fulbright Senior Scholar Award. He is a member of various professional societies, including the International Academy of Engineering (Russia). He has previously worked for various research labs including IBM Almaden Research Center, San Jose, CA. He has held visiting professor appointments at University of California at Berkeley, University of Cambridge, UK, Technical University Vienna, Austria, University of Paris, Orsay, France, ETH Zurich and EPFL Lausanne, Switzerland.

Gerd K. Binnig Chapter G.45

Definiens AG Gerd Binnig obtained his PhD from the Johann Wolfgang Goethe University, Munich, Germany Frankfurt, Germany, and joined IBM Research in 1978. He was corecipient of the gbinnig@definiens.com 1986 Nobel Prize in Physics for the invention of the scanning tunneling microscope, and he also invented the atomic force microscope. His current research interests are micro- and nanosystem techniques and “Fractal Darwinism”, a theory he developed to describe complex systems. 1890 About the Authors

Marcie R. Black Chapter A.4

Bandgap Engineering Inc. Dr. Marcie Black is the CTO at Bandgap Engineering. Bandgap Waltham, MA, USA Engineering is nanoengineering solar silicon to maximize photovoltiac [email protected]; energy conversion. Before joining Bandgap, Marcie was a technical [email protected] staff member in the applied electromagnetics group at Los Alamos National Laboratory and worked on a variety of nanotechnology and Authors optical systems. She earned her BS, MS and PhD from the Massachusetts Institute of Technology. She has published over 30 articles in peer reviewed journals and three book sections and has two patents issued and numerous patents pending.

Donald W. Brenner Chapter D.31

Department of Materials Science Dr. Donald W. Brenner is currently a Professor in the Department of and Engineering Materials Science and Engineering at North Carolina State University, Raleigh, NC, USA Raleigh. He received his BSc from the State University of New York in [email protected] 1982 and his PhD from Penn. State University in 1987, both in Chemistry. He joined the Theoretical Chemistry Section at the United States Naval Research Laboratory as a staff scientist in 1987, and joined the North Carolina State University faculty in 1994. His research interests focus on using atomic and mesoscale simulation and theory to understand technologically important processes and materials. Professor Brenner’s awards include the 2002 Feynman prize for research achievement in nanotechnology (theory), the Alcoa Foundation Engineering Research Achievement Award (2000), Co-author of a Veridian Medal Paper (1999), and an Outstanding Teacher Award from the North Carolina State College of Engineering (1999). He is a member of the North Carolina State University Academy of Outstanding Teachers.

Jean-Marc Broto Chapter A.3

Institut National des Sciences Appliquées Jean-Marc Broto is Professor at the Université Toulouse III, France. He is a specialist of Toulouse in electronic transport and magnetization properties under high magnetic fields and Laboratoire National des Champs contributed to the discovery of the giant magnetoresistance in 1988. Magnétiques Pulsés (LNCMP) Toulouse, France [email protected]

Guozhong Cao Chapter A.5

University of Washington Dr. Guozhong Cao is Boeing-Steiner Professor of Engineering, Professor of Materials Dept. of Materials Science Science and Engineering, and Adjunct Professor of Chemical and Mechanical and Engineering Engineering at the University of Washington, Seattle, WA, and Affiliate Professor of Seattle, WA, USA Chemistry in Chongqing University, China. He received his PhD degree from [email protected] Eindhoven University of Technology (the Netherlands), MS from Shanghai Institute of Ceramics, and BS from East China University of Science and Technology (China). He has published over 250 refereed papers, authored and edited 5 books and 3 conference proceedings. Currently, Dr. Cao serves as the editor of Annual Review of Nano Research and Associate Editor of Journal of Nanophotonics. His recent research is focused mainly on nanomaterials for energy related applications including solar cells, lithium-ion batteries, supercapacitors, and hydrogen storage. About the Authors 1891

Edin (I-Chen) Chen Chapter C.22

National Central University I-Chen Chen received the PhD degree in Materials Science and Institute of Materials Science Engineering from University of California, San Diego in 2007. Right and Engineering after graduation, he joined National Central University in Taiwan as an Department of Mechanical Engineering Assistant Professor. His research interests include nanomaterials, solar Chung-Li, Taiwan energy materials and optoelectronic devices.

[email protected] Authors

Yu-Ting Cheng Chapter H.52

National Chiao Tung University Yu-Ting Cheng received his BS and MS degree’s in Materials Science Department of Electronics Engineering & and Engineering from National Tsing Hua University, Hsinchu, Taiwan Institute of Electronics in 1991 and 1993, respectively. After his military service he went to Hsinchu, Taiwan, R.O.C. Carnegie Mellon University, Pittsburgh, PA, and got his second MS [email protected] degree in the same field in 1996. Then he finished his PhD in Electrical Engineering at the University of Michigan, Ann Arbor, in 2000. Then he worked for IBM Thomas J. Watson Research Center, Yorktown Heights, as a research staff member and was involved in several SoP (system on package) projects. In 2002 he became an Assistant Professor in the Department of Electronics Engineering in National Chiao Tung University, where he has been promoted to an Associate Professor recently. His research interests include the fundamental study of materials for microsystem integration and MEMS applications, SoP, and the design and fabrication of microsensors and microactuators. He is a member of IEEE, IOP, and Phi Tau Phi.

Giovanni Cherubini Chapter G.45

IBM Zurich Research Laboratory Dr. Giovanni Cherubini received a PhD degree in Electrical Engineering from the Tape Technologies University of California, San Diego, in 1986. He joined the research staff of IBM in Rüschlikon, Switzerland 1987. In 2006, he was elected Fellow of the IEEE. His interests comprise high-speed [email protected] data transmission and data-storage systems. He was co-editor of the 100BASE-T2 Standard for fast ethernet transmission over voice-grade cables. More recently, he contributed to the realization of the first fully functional atomic-force-microscope-based data-storage prototype system.

Mu Chiao Chapter H.52

Department of Mechanical Engineering Mu Chiao received his BS and MS degrees from National Taiwan University in 1996 Vancouver, Canada and a PhD degree in Mechanical Engineering from the University of California at [email protected] Berkeley, USA in 2002. From 2002 to 2003 he was with Berkeley Sensor and Actuator Center, University of California at Berkeley as a Post-Doctoral Research Fellow. His research effort was on MEMS power source and nanowire/tube synthesis. From March 2003 to July 2003 he was a senior MEMS engineer at Intpax, Inc, USA, working on MEMS sensors for automotive applications. Dr. Chiao has been with the Department of Mechanical Engineering, The University of British Columbia since September 2003 as an Assistant Professor. His current research interests include design and fabrication of MEMS and nanodevices for biomedical applications. Particularly, he is working on MEMS drug delivery devices, anti-biofouling coating for implantable biomedical sensors and biomaterials for MEMS. He is supported by the Natural Sciences and Engineering Research Council (NSERC), Canada, Canada Foundation for Innovations (CFI). Dr. Chiao is the recipient of the Canada Research Chairs (CRC) in MEMS and Nanoengineering for biomedical applications. 1892 About the Authors

Jin-Woo Choi Chapter B.18

Louisiana State University Jin-Woo Choi received his BS and MS degree in Electrical Engineering Department of Electrical from Seoul National University in Korea in 1994 and 1996, respectively and Computer Engineering and his PhD degree in Electrical Engineering from the University of Baton Rouge, LA, USA Cincinnati in 2001. Now he is an Assistant Professor at Louisiana State [email protected] University, Baton Rouge, LA. His current research activities include Authors magnetic particle separators, microfluidic systems for biochemical detection, micro total analysis systems (μ-TAS), bioelectronics, nanomaterial-based biosensors, and bioMEMS components and systems.

Tamara H. Cooper Chapter B.17

University of Adelaide Tamara Cooper completed a Bachelor of Biotechnology (Hons) at CSIRO Human Nutrition Flinders University in 2004 and is currently undertaking a PhD with the Adelaide, SA, Australia University of Adelaide and CSIRO Molecular and Health Technologies [email protected] in Adelaide, South Australia. Her current research involves constructing fluorescent proteins for time-resolved fluorescence resonance energy transfer technologies involving G-protein coupled receptors and G-protein subunits for cell-free biosensor applications.

Alex D. Corwin Chapter H.48

GE Global Research Alex D. Corwin received the BA degree in math and physics from Wesleyan Niskayuna, NY, USA University, Middletown, CT, in 1995 and the MS and PhD degrees in physics from [email protected] Cornell University, Ithaca, NY, in 1998 and 2002, respectively. He held a postdoctoral appointment at Sandia National Laboratories before joining the staff in 2004. During his time at Sandia he worked on MEMS reliability, studying in particular friction and adhesion of contacting micro-systems. Additionally, he developed the MEMScript software for making automated and high-resolution measurements on MEMS devices. In 2007 he moved to GE’s global research center where he continues to work on MEMS reliability.

Maarten P. de Boer Chapter H.48

Carnegie Mellon University Maarten P. de Boer earned the PhD degree from the University of Minnesota, Department of Mechanical Engineering Chemical Engineering and Materials Science Department in 1996, specializing in thin Pittsburgh, PA, USA film fracture mechanics. He was employed by Sandia National Labs in Albuquerque, [email protected] NM, from 1996 to 2007, and worked in the area of microelectromechanical systems addressing phenomena such as adhesion, friction, and mechanical properties. He also designed MEMS actuators and sensors. He joined the Department of Mechanical Engineering at Carnegie Mellon University in Pittsburgh, PA, as Associate Professor in 2007.

Dietrich Dehlinger Chapter B.13

Lawrence Livermore National Laboratory Dr. Dehlinger is a Postdoctoral Researcher at the Lawrence Livermore Engineering National Laboratory. He received is PhD from the Electrical and Livermore, CA, USA Computer Engineering department at the University of California, San [email protected] Diego. His background is in optics, MEMS, and nanofabrication techniques. His current work involves designing devices for di-electrophoretic sample preparation. About the Authors 1893

Frank W. DelRio Chapter H.48

National Institute of Standards Frank W. DelRio received a PhD in Mechanical Engineering from the and Technology University of Colorado at Boulder in 2006. During his tenure at the Gaithersburg, MD, USA University of Colorado, he served as a Microsystems and Engineering [email protected] Sciences Applications (MESA) Institute fellow at Sandia National Laboratories in Albuquerque, NM and as an Engineering Sciences Summer Institute (ESSI) fellow at Sandia National Laboratories in Authors Livermore, CA. After working as a postdoctoral researcher in the Department of Chemical Engineering at the University of California, Berkeley, he joined the Materials Science and Engineering Laboratory at the National Institute of Standards and Technology in Gaithersburg, MD. His current work focuses on the mechanical and tribological properties of thin films and small-scale structures.

Michel Despont Chapter G.45

IBM Zurich Research Laboratory Michel Despont received a degree in Microtechnology from the Swiss Federal Micro- and Nanofabrication Institute of Technology of Lausanne in 1993 and a PhD in Physics from the Institute Rüschlikon, Switzerland of Microtechnology, University of Neuchâtel, Switzerland, in 1996. After a [email protected] postdoctoral fellowship at the IBM Zurich Research Laboratory in 1996, where he worked on the development of various cantilever2 based sensors and pioneered the process development of an ultra-thick, high-aspect-ratio UV resist called SU-8, he spent one year as a visiting scientist at the Seiko Instrument Research Laboratory in Japan. Since returning to the IBM Zurich Research Laboratory, his work has focused on the development of micro- and nanomechanical devices as well as on 3-D microdevice integration for system-on-chip (SoC) applications. In 2005, he was appointed manager and currently leads the Micro- and Nanofabrication group.

Lixin Dong Chapter G.46

Michigan State University Lixin Dong is an Assistant Professor at Michigan State University. He received the BS Electrical and Computer Engineering and MS degrees in Mechanical Engineering from Xi’an University of Technology East Lansing, MI, USA (XUT) in 1989 and 1992, respectively. He became a Research Associate in 1992 and a [email protected] Lecturer in 1995, both of Mechanical Engineering, and an Associate Professor of Mechatronics in 1998 at XUT, where he has served as the head of the Department of Mechatronics Engineering from 1997 to 1999. He received his PhD degree in Micro Systems Engineering from Nagoya University in 2003, and became Assistant Professor of Micro/Nano Systems Engineering and MechanoInformation Engineering at Nagoya University in 2003. In 2004 he joined the Swiss Federal Institute of Technology (ETH) Zurich as a Research Scientist, and was a Senior Research Scientist at ETH Zurich from 2005 to 2008, where he led the NanoRobotics Group in the Institute of Robotics and Intelligent Systems (IRIS). His main research interests include nanorobotics, mechatronics, nanoelectromechanical systems (NEMS), mechanochemistry, and nanobiomedical devices. He serves as an Associate Editor of the IEEE Trans. on Nanotechnology and the IEEE Trans. on Automation Science and Engineering. He is Chair of the Technical Committee (TC) on Nano Energy, Environment and Safety (NEES).

Gene Dresselhaus Chapter A.4

Massachusetts Institute of Technology Gene Dresselhaus received his PhD in physics from the University of Francis Bitter Magnet Laboratory California in 1955. He was a faculty member at the University of Cambridge, MA, USA Chicago, and assistant professor at Cornell before joining MIT Lincoln [email protected] Laboratory in 1960 as a staff member. In 1976 he assumed his current position at the MIT Francis Bitter Magnet Laboratory. His area of interest is the electronic structure of nanomaterials and he has co-authored with M.S. Dresselhaus several books on fullerenes, nanowires, and nanotubes. 1894 About the Authors

Mildred S. Dresselhaus Chapter A.4

Massachusetts Institute of Technology Mildred Dresselhaus received her PhD in Physics from the University Department of Electrical Engineering of Chicago in 1958. She joined the MIT faculty in 1967. She has been and Computer Science active in research across broad areas of solid state physics, especially in Department of Physics carbon science. Her present research activities focus on carbon Cambridge, MA, USA nanotubes, bismuth nanowires, low dimensional thermoelectricity, and

Authors [email protected] novel forms of carbon. She is the recipient of the National Medal of Science and 25 worldwide honorary degrees.

Urs T. Dürig Chapter G.45

IBM Zurich Research Laboratory Urs Dürig received a PhD degree from the Swiss Federal Institute of Technology, Micro-/Nanofabrication Zurich, in 1984. He joined IBM as a post-doc working on near-field optical Rüschlikon, Switzerland microscopy. He is Research Staff Member since 1986: He worked in the field of [email protected] scanning tunneling and dynamic force microscopy. In 1997, he joined the Micro/ Nanomechanics group focusing on polymer material issues and thermal modeling.

Andreas Ebner Chapter C.27

Johannes Kepler University Linz Andreas Ebner studied Technical Chemistry at the Johannes Kepler University of Linz Institute for Biophysics and earned his Dr. tech. at the at the Biophysics Institute of the JKU Linz. Currently Linz, Austria he is working in Prof. Hinterdorfer’s Institute as subgroup leader focusing on [email protected] AFM-tip chemistry, topography and recognition imaging, and single molecule-force spectroscopy.

Evangelos Eleftheriou Chapter G.45

IBM Zurich Research Laboratory He received a PhD in Electrical Engineering from Carleton University, Rüschlikon, Switzerland Ottawa, Canada, in 1985, and joined IBM Research in 1986. His [email protected] research focuses on magnetic recording and storage systems. His current research interests include nanotechnology, in particular probe-storage techniques. In 2005, Dr. Eleftheriou was co-recipient of the Eduard Rhein Technology Award. He was co-recipient of the 2003 IEEE Leonard G. Abraham Prize Paper Award. In January 2002, he was elected Fellow of the IEEE, and in 2005 became an IBM Fellow and was elected to the IBM Academy of Technology.

Emmanuel Flahaut Chapter A.3

Université Paul Sabatier Emmanuel Flahaut obtained his PhD in Materials Science in Toulouse CIRIMAT, Centre Interuniversitaire de working on CCVD synthesis of carbon nanotubes (CNTs) and dense Recherche et d’Ingénierie des Matériaux, ceramic-based composites including CNTs. He spent then more than UMR 5085 CNRS one year as a post-doctoral researcher in Malcolm Green’s Group in Toulouse, France fl[email protected] Oxford to work mainly on the filling of CNTs. He is now a permanent CNRS researcher at the University of Toulouse.

Anatol Fritsch Chapter D.36

University of Leipzig Anatol Fritsch received his diploma in physics from the University of Leipzig, Institute of Experimental Physics I Germany, in 2007. Working on his PhD degree with Professor Josef Käs his current Division of Soft Matter Physics research interests are the mechanical properties of multicellular cancer spheroids and Leipzig, Germany the development of optical techniques for high resolution single and multiple cell [email protected] tomography. About the Authors 1895

Harald Fuchs Chapter C.26

Universität Münster 1984 PhD Universität des Saarlandes with Prof. H. Gleiter (nano crystalline systems); Physikalisches Institut 1984–1985, Post doc with IBM Research Lab. Zurich in the group of G. Binnig and Münster, Germany H. Rohrer; 1985–1993 Project Manager ‘Ultrathin Organic Films’with BASF AG, [email protected] Ludwigshafen; Germany. Since 1993 he is full Professor and Director at the Physical Institute of the University of Münster; 2000, Cofounder and Scientific Director of the Center for Nanotechnology (CeNTech). Authors

Christoph Gerber Chapter B.15

University of Basel Professor Christoph Gerber is the Director for scientific communication Institute of Physics of the National Center of Competence for Nanoscale Science (NCCR) National Competence Center for at the Institute of Physics, University of Basel, Switzerland and is a Research in Nanoscale Science (NCCR) Research Staff Member emeritus in Nanoscale Science at the IBM Basel Basel, Switzerland Research Laboratory in Rüschlikon, Switzerland. He has served as a [email protected] project leader in various programs of the Swiss National Science Foundation and in the European 6th Framework. During the past 25 years, his research has been focused on nanoscale science. He is a veteran in scanning probe microscopy and made major contributions to the invention of the scanning tunneling microscope and the atomic force microscope (AFM) and is a co-inventor of biochemical sensors based on AFM technology. He is an author and co-author of more than 150 scientific papers that appeared in peer-reviewed journals with more than 19 000 citations in cross disciplinary fields. He belongs worldwide to the one hundred most cited researchers in Physical Sciences. He gave numerous plenary and invited talks at international conferences.

Franz J. Giessibl Chapters C.23, C.25

Universität Regensburg Professor Giessibl is working in atomic force microscopy and scanning Institute of Experimental tunneling microscopy in ultrahigh vacuum at room temperature and low andAppliedPhysics temperatures. He is a Steering Committee Member of the International Regensburg, Germany Conference on Noncontact Atomic Force Microscopy. He received the [email protected] R and D 100 Award Chicago 1994, the German Nanoscience Award 2000, and the Rudolf Kaiser Price in 2001. Since May 2006 he is head of the Department of Experimental and Applied Physics at the University of Regensburg, Germany.

Enrico Gnecco Chapter D.30

University of Basel Enrico Gnecco is a senior researcher at the Swiss Nanoscience Institute in Basel. His National Center of Competence research interests focus on nanotribology, atomic force microscopy in ultrahigh in Research vacuum and controlled manipulation of nanoparticles. Department of Physics Basel, Switzerland [email protected] 1896 About the Authors

Stanislav N. Gorb Chapter F.43

Max Planck Institut für Metallforschung Stanislav Gorb is a Professor and Chair at the Institute of Zoology, University of Kiel, Evolutionary Biomaterials Group Germany. He received his PhD in Zoology and Entomology at the Schmalhausen Stuttgart, Germany Institute of Zoology of the Ukrainian Academy of Sciences in Kiev. Gorb was a [email protected] postdoctoral researcher at the University of Vienna, a Research Assistant at the University of Jena, a group leader at the Max Planck Institute for Developmental Authors Biology in Tübingen and Max Planck Institute for Metals Research, Stuttgart, Germany, and a visiting Professor at both the University of Washington and Nanjing University of Astronautics and Aeronautics, China. Gorb’s research focuses on morphology, structure, biomechanics, physiology, and evolution of surface-related functional systems in animals and plants, as well as the development of biologically inspired technological surfaces and systems. He received the Schlossmann Award in Biology and Materials Science in 1995 and was the 1998 BioFuture Competition winner for his works on biological attachment devices as possible sources for biomimetics. Gorb has authored three monographs, including “Attachment Devices of Insect Cuticle” and “Biological Micro- and Nanotribology”; two edited books, more than 150 papers in peer-reviewed.

Hermann Gruber Chapter C.27

University of Linz Hermann J. Gruber earned his PhD from the University of Graz, Institute of Biophysics Institute of Organic Chemistry, in 1983. He was a postdoctoral fellow at Linz, Austria Purdue University (1983-1985). Since then, he is at the University of [email protected] Linz, Institute of Biophysics, where he holds a position as Associate Professor. His current and ongoing research includes surface chemistry, bioconjugation, and reconstitution of biological interaction.

Jason Hafner Chapter C.22

Rice University Jason Hafner earned his PhD in Physics from Rice University in 1998. Department of Physics and Astronomy He then held an NIH postdoctoral fellowship at Harvard University Houston, TX, USA working on carbon nanotube probes for high-resolution biological [email protected] atomic-force microscopy. In 2001 he returned to Rice University where his research group is pursuing biophysical applications of scanned probe microscopy and nanomaterials.

Judith A. Harrison Chapter D.31

U.S. Naval Academy Judith A. Harrison has been a Professor of Chemistry at the United States Naval Chemistry Department Academy for the past 16 years. She received her BA from St. Anselm College and her Annapolis, MD, USA PhD from the University of New Hampshire. Before joining the faculty of the Naval [email protected] Academy, she was a postdoctoral associate at the Naval Research Laboratory. For the past 18 years, her research has focused on the theoretical examination of nanometer-scale processes, such as indentation, friction, wear, and tribochemistry of hydrocarbon systems. She has published over 65 technical papers and given more than 80 invited talks, including the “Burt L. Newkirk Lecture” at Rensselaer Polytechnic Institute and the Keynote address at the 2002 annual meeting of the Society of Tribologists and Lubrication Engineers. In 2000, she won the Naval Academy’s Research Excellence Award and the Department of the Navy’s Meritorious Civilian Service Award. The Maryland Chapter of the American Chemical Society has selected her to be the 2009 recipient of the George Braude Award. She has served on the Executive Committee of the Nanoscale Science and Technology Division of the American Vacuum Society and currently is the chair of that committee. She is a member of various professional organizations including the American Vacuum Society and the American Chemical Society. About the Authors 1897

Martin Hegner Chapter B.15

CRANN – The Naughton Institute PD Martin Hegner received the MSc in Life Sciences and his PhD from the Swiss Trinity College, University of Dublin Federal Institute of Technology, Zurich, Switzerland. In 1994 he was awarded a Ciba School of Physics Geigy postdoc fellowship for projects at the Physics Institute of University of Basel Dublin, Ireland and worked on single biomolecule experiments involving scanning probe microscopy. [email protected] In 1996 he joined for three years the research group of C. Bustamante at University of Oregon and thereafter at University of California at Berkeley, where he developed Authors functional interfaces for optical tweezers single molecule experiments. On joining again the Physical Institute at the University of Basel in 1999, he built up a biophysically oriented research group focusing on nanomechanical investigations on single biomolecules and lately on multifunctional cantilever arrays for biomedical applications. Since 2007 he is Associate Professor in the School of Physics at Trinity College Dublin and Principal Investigator at CRANN.

Thomas Helbling Chapter B.14

ETH Zurich Thomas Helbling studied at the Department of Electrical Engineering Micro and Nanosystems and Information Technology at the ETH Zurich, Switzerland where he Department of Mechanical received his MSc in Electrical Engineering in 2005. He focused on and Process Engineering micro- and nanosystems technology and the design of integrated Zurich, Switzerland [email protected] electronic circuits (digital and analog). Since 2005 he has been a PhD student at the Institute of Micro- and Nanosystems, ETH Zurich, where he is investigating the use of carbon nanotubes as gas sensing elements and as active sensing elements for future micro- and nanoscaled pressure sensors.

Michael J. Heller Chapter B.13

University of California San Diego Professor Michael J. Heller received his PhD in Biochemistry of Department of Bioengineering Colorado State University in 1973. Further steps in his career: NIH Dept. of Electrical Postdoctoral Fellow, Northwestern University; Supervisor DNA and Computer Engineering Technology, Amoco, 1976–1984; Director Molecular Biology, La Jolla, CA, USA [email protected] Molecular Biosystems, Inc., 1984–1987; Co-founder and President, Integrated DNA Technologies, 1987–1989; Co-founder and CTO, Nanogen, 1993–2001. Dr. Heller is now Professor in the Departments of Bioengineering and Electrical and Computer Engineering at the University California, San Diego.

Seong-Jun Heo Chapter D.31

Lam Research Corp. Dr. Seong-Jun Heo is a process engineer in the conductor etch division at Lam Fremont, CA, USA research. He received his BSc and MD in materials engineering from Hanyang [email protected] University in Seoul, Korea in 1997 and 1999, respectively. He was a research engineer in the semiconductor division of Samsumg Electronics from 1999 to 2003. He received his PhDin materials science from the University of Florida in 2007. His graduate work was in the area of computational simulation of the mechanical properties of nanoscale materials. He is interested in semiconductor process as well as computational simulation related to nanotechnology. 1898 About the Authors

Christofer Hierold Chapter B.14

ETH Zurich Christofer Hierold is Professor for Micro- and Nanosystems at ETHZurich since April Micro and Nanosystems 2002. Before, he was eleven years with Siemens AG, Corporate Research, and Department of Mechanical Infineon Technologies AG in Munich, Germany, working mainly on CMOS and Process Engineering compatible microsystems. His major research at ETH Zurich is now focused on the Zurich, Switzerland field of nanotransducers, evaluation of new materials for MEMS and advanced

Authors [email protected] microsystems. Christofer Hierold is a member of the international steering committees of the major conferences in the field (MEMS, TRANSDUCERS, EUROSENSORS) and he is a member of the editorial boards of IEEE/ASME J. Microelectromechanical Systems and of J. Micromechanics and Microengineering and Joint Editor of the book series Advanced Micro- and Nanosystems.

Peter Hinterdorfer Chapter C.27

University of Linz Peter Hinterdorfer earned a Dr. tech. from the University of Linz, Institute for Biophysics Austria, Institute for Biophysics in 1992. He was a postdoctoral fellow Linz, Austria at the University of Virginia, Department of Molecular Physiology and [email protected] Biological Physics (1992/1993). Since then he has been at the University of Linz, Institute for Biophysics, where he holds a position as Associate Professor. His current and ongoing research includes single-molecule force spectroscopy and high-resolution topography imaging of biological samples. He is the inventor of TREC (topography and recognition) imaging.

Dalibor Hodko Chapter B.13

Nanogen, Inc. Dr. Hodko received his B.Sc., M.Sc. and Ph.D. degrees in chemical San Diego, CA, USA engineering and chemistry from the University of Zagreb, Croatia. He [email protected] has more than 20 years of industrial experience in the development of innovative technologies (17 issued patents) and products in the areas of bioanalytical and micro- and nanofluidics devices as well as large systems with applications in physical and environmental chemistry. He has intensive experience in managing Government supported project and was a Principal Investigator on more than 25 federally funded projects. Dr. Hodko is presently a Director of Advanced Technology at Nanogen, Inc.

Hendrik Hölscher Chapter C.26

Forschungszentrum Karlsruhe Hendrik Hölscher studied physics at the University of Hamburg. After two years at the Institute of Microstructure Technology Center of Advanced European Studies and Research (CAESAR) in Bonn he was the Karlsruhe, Germany head of the research group nanoForce at the Center for Nanotechnology at the [email protected] University of Münster. Since spring 2008 he has been working at the Institute of Microstructure Technology (IMT) at the Forschungszentrum Karlsruhe.

Hirotaka Hosoi Chapter C.23

Hokkaido University Hirotaka Hosoi received the DE degree in Electronic Enginnering from Hokkaido Creative Research Initiative Sousei University in 1999. Since 2002 he has been at Innovation Plaza Hokkaido, Japan Sapporo, Japan Science and Technology Corporation (JST). His main research focus is in [email protected] high-resolution magnetic imaging of magnetic materials surfaces using a scanning force microscope. His current research interests includes magnetism on metal-oxide surfaces. About the Authors 1899

Katrin Hübner Chapter D.32

Staatliche Fachoberschule Neu-Ulm Katrin Hübner finalized her Diploma in Physics in the Department of Neu-Ulm, Germany Experimental Physics of Ulm University, Ulm, Germany. Afterwards [email protected] she spent two years on researching pancreatic cancer cells mainly using AFM and PFM. Now she is teaching math and physics at the Fachoberschule Neu-Ulm, Germany. Authors

Douglas L. Irving Chapter D.31

North Carolina State University Dr. Douglas L. Irving is an Assistant Professor of Materials Science and Materials Science and Engineering Engineering (MSE) at North Carolina State University. He received his Raleigh, NC, USA BS in Physics from Furman University in 1997 and his MS and PhD in [email protected] MSE from the University of Florida in 2002 and 2004, respectively. His research is focused on the study of materials in extreme environments using theoretical and computational approaches that range from multi-scale to electronic structure methods.

Jacob N. Israelachvili Chapter D.29

University of California Jacob Israelachvili earned his PhD 1971 at the Cavendish Laboratory, University of Department of Chemical Engineering Cambridge, UK. He held various positions at the Department of Applied Mathematics and Materials Department at the Australian National University (1974–1986), including those of Professional Santa Barbara, CA, USA Fellow and Head of Department. In 1986 he joined the faculty at University of [email protected] California, Santa Barbara as Professor in the Department of Chemical Engineering and Materials Department. In 1988 he was elected a Fellow of the Royal Society of London, and in 1991 he was awarded the Alpha Chi Sigma Award for Chemical Engineering Research by the AIChE. He was elected as a foreign associate of the US National Academy of Engineering in 1996 and to the National Academy of Sciences in 2004. He also received the MRS Medal in 2004 and the ACS National Award in Colloid and Interface Science in 2009.

Guangyao Jia Chapter B.19

University of California, Irvine Guangyao Jia received his BE degree in Mechanical Engineering from Beijing Department of Mechanical University of Chemical Technology in China in 1990 and his MSc degree in Chemical and Aerospace Engineering Engineering from Florida Institute of Technology in 2001. Currently he is working Irvine, CA, USA with Professor Marc Madou on his PhD degree in Mechanical and Aerospace [email protected] Engineering at the University of California, Irvine. His research includes centrifuge-based microfluidics for flow-through DNA hybridization and microfluidic PCR chips for rapid DNA amplification.

Sungho Jin Chapter C.22

University of California, San Diego Sungho Jin received PhD degree in Materials Science from UC Department of Mechanicaland Berkeley in 1974. After 26 years of research at Bell Labs, he joined UC Aerospace Engineering San Diego in 2002 as a Distinguished Professor. His research include La Jolla, CA, USA nanomaterials, electronic materials and biomaterials. He is a member of [email protected] the US National Academy of Engineering, APS Fellow, MRS Fellow, and received John Bardeen Award. 1900 About the Authors

Anne Jourdain Chapter H.49

Interuniversity Microelectronics Center Anne Jourdain received the MSc degree in Opto-Microelectronics from (IMEC) the Ecole Nationale Supérieure d’Ingénieurs de Caën, France in 1994. Leuven, Belgium She did her PhD in LETI-CEA, Grenoble, France, and received the PhD [email protected] degree in 1998 from the University Joseph Fourier of Grenoble, France. In 1999, she joined the Interuniversity Microelectronics Center (IMEC), Authors Leuven, Belgium, where she was involved in the MEMS processing development. In 2000, she joined the RF-MEMS team where she is currently in charge of the packaging of RF-MEMS devices.

Yong Chae Jung Chapter F.42

Samsung Electronics C., Ltd. Yong Chae Jung received the BS degree from Sungkyunkwan University, South Korea Senior Engineer Process in 2001 and the MS degree from University of Southern California, Los Angeles in Development Team 2004. He is currently a Ph.D. candidate in Mechanical Engineering from The Ohio Gyeonggi-Do, Korea State University. His research interests are in bio/nanotechnology and biomimetics, [email protected] including design and fabrication of micro/nanostructures for superhydrophobicity, self-cleaning and low adhesion.

Harold Kahn Chapter H.50

Case Western Reserve University Harold Kahn is Researcher Associate Professor of Materials Science and Engineering Department of Materials Science at Case Western Reserve University, Cleveland, Ohio. His research is focused on and Engineering MEMS device processing and testing, particularly wafer-level mechanical testing and Cleveland, OH, USA shape-memory actuated microfluidics. He received a BS in metallurgical engineering [email protected] from Lafayette College and a PhD in electronic materials from the Massachusetts Institute of Technology.

Roger Kamm Chapter D.35

Massachusetts Institute of Technology Roger Kamm is the Germeshausen Professor of Mechanical and Department of Biological Engineering Biological Engineering and Associate Head of the Department of Cambridge, MA, USA Mechanical Engineering at MIT. A primary objective of Kamm’s [email protected] research group has been the application of fundamental concepts in fluid and solid mechanics to better understand essential biological and physiological phenomena. Studies over the past thirty years have addressed issues in the respiratory, ocular and cardiovascular systems. More recently, his attention has focused on two new areas, the molecular mechanisms of cellular force sensation, and the development of new scaffold materials and microfluidic technologies for vascularized engineered tissues. These works have led to over 160 journal publications. He is a Fellow of the American Institute for Biomedical Engineering and the American Society for Mechanical Engineering. He is the current chair of the US National Committee on Biomechanics and the World Council on Biomechanics, and Director of the Global Enterprise for Micro Mechanics and Molecular Medicine.

Ruti Kapon Chapter C.27

Weizmann Institute of Science Ruti Kapon received her PhD in applied physics at the Hebrew Department of Biological Chemistry University of Jerusalem. She joined Ziv Reich’s group at the department Rehovot, Israel of Biological Chemistry at the Weizmann institute of Science as a [email protected] post-doc and is now a staff scientist in the group. Her research interests include transport phenomena in biological systems, protein energy landscapes and single molecule techniques. About the Authors 1901

Josef Käs Chapter D.36

University of Leipzig Professor Josef Alfons Käs is heading the Division of Soft Matter Physics and is Institute of Experimental Physics I Director of the Institute of Experimental Physics I at the University of Leipzig, Division of Soft Matter Physics Germany. He received his PhD from the Technical University of Munich followed by Leipzig, Germany a Postdoc position at Harvard Medical School. After a position as Assistant Professor [email protected] in the Physics Department at the University of Texas at Austin he accepted an

appointment at the University of Leipzig. His research interests include all fields of Authors cell biophysics with a particular focus on cellular biomechanics probed by optical traps and scanning force microscopy.

Horacio Kido Chapter B.19

University of California at Irvine Horacio Kido holds BSc and MSc degrees from Stanford University in Biological Mechanical and Aerospace Engineering Sciences as well as a PhD from the University of California at Davis in Agricultural Irvine, CA, USA and Environmental Chemistry. He works on microfluidic systems for biological [email protected] sample preparation.

Tobias Kießling Chapter D.36

University of Leipzig Tobias Kießling received his Diploma in Physics from the University of Institute of Experimental Physics I Leipzig, Germany in 2007. He is currently working on his PhD degree Division of Soft Matter Physics with Professor Josef Käs on an interdisciplinary project including laser Leipzig, Germany physics, optics, and microfluidics as well as cellular mechanics and [email protected] stem cell separation.

Jitae Kim Chapter B.19

University of California at Irvine Jitae Kim received the BSc degree from Hanyang University, South Department of Mechanicaland Aerospace Korea and MS from University of Southern California in 1998 and Engineering 2001, respectively. He is currently a doctoral student in mechanical Irvine, CA, USA engineering (BioMEMS) at UC, Irvine. His major research interest is [email protected] CD (compact disk)-based microfluidics for sample preparation in nucleic acid analysis.

Jongbaeg Kim Chapter H.52

Yonsei University Jongbaeg Kim received the BS degree in Mechanical Engineering from Yonsei School of Mechanical Engineering University, Seoul, Korea, in 1997, the MS degree in Mechanical Engineering from the Seoul, South Korea University of Texas, Austin, TX, in 1999, and the PhD degree in Mechanical [email protected] Engineering from the University of California, Berkeley, in 2004. He was with DiCon Fiberoptics, Inc., Richmond, CA, from 2004 to 2005, where he designed and developed high-performance optical MEMS components for telecommunication applications. He then joined the Yonsei University, where he is currently an Assistant Professor with the School of Mechanical Engineering. His research interests are modeling, design and fabrication of microsystems, and integrated nanostructures on MEMS.

Nahui Kim Chapter B.19

Samsung Advanced Institute Nahui Kim received the MS and PhD degree in Electrical Engineering and Computer of Technology Science from the University of California at Irvine. She has four years of industrial Research and Development experience as a circuit engineer. Her recent research work involves a compact Seoul, South Korea disc-based microfluidic platform for genetic, molecular, behavioural, and [email protected] pharmacological analysis of organismal stress response and antidepressants action. Currently she work in the R&D at Samsung Advanced Institute of Technology. 1902 About the Authors

Kerstin Koch Chapter F.41

Rhine-Waal University of Applied Professor Dr. Kerstin Koch received her Diploma, PhD and Science Habillitation (2006) in Biology from the University of Bonn, Germany. Department of Life Science, Biology The main topics of the research include molecular self-assembly, and Nanobiotechnology molecular architecture of plant surface lipids (waxes), biological Kleve, Germany surfaces, origin and functions of micro- and nanostructures,

Authors [email protected]. de superhydrophobic and superhydrophilic biomimetic surfaces. Since 2009 she is Professor for Biology and Nanobiotechnology at the Rhine-Waal University of Applied Science, Kleve, Germany.

Jing Kong Chapter A.4

Massachusetts Institute of Technology Jing Kong is Associate Professor in the Department of Electrical Department of Electrical Engineering Engineering and Computer Science at MIT. Her research interests lie in and Computer Science the synthesis, characterization, fundamental property studies and Cambridge, MA, USA application with carbon nanomaterials, such as nanotubes and graphene. [email protected] She obtained her BS degree in Chemistry from Peking University in China, and PhD in Chemistry from Stanford University.

Tobias Kraus Chapter A.6

Leibniz-Institut für Neue Materialien Tobias Kraus currently heads a Junior Research Group at the Leibniz-Institute for gGmbH New Materials (INM) in Saarbrücken, Germany. With his group, he investigates the Saarbrücken, Germany mechanisms that create ordered structures at small scales, primarily in systems that [email protected] contain nanoparticles. He is a Chemical Engineer (TU Munich), holds a PhD in Materials Science (ETH Zurich) and was a postdoctoral associate at IBM Research in Zurich, Switzerland.

Anders Kristensen Chapter A.9

Technical University of Denmark Professor Anders Kristensen received his PhD in Physics from University of DTU Nanotech Copenhagen in 1994. He worked at University of London and at the Niels Bohr Kongens Lyngby, Denmark Institute, University of Copenhagen, before he joined the Technical University of [email protected] Denmark in 2001. His current research on miniaturized sensor and actuator technology includes optical sensing and actuation in nanofluidic devices, and nanoimprint lithography.

Ratnesh Lal Chapter C.22

University of Chicago Professor Lal received his MS and M Phil in Physics and Biophysics Center for Nanomedicine from Jawaharlal Nehru University in New Delhi and PhD in Chicago, IL, USA Neurobiology from UAB. After postdoctoral training at Caltech, he was [email protected] a faculty member at the University of Chicago and the University of California at Santa Barbara before assuming his current position as a Professor and the Director of the newly established Center of Nanomedicine at the University of Chicago. Professor Lal is an authority on biomedical applications of atomic force microscopy (AFM) and nanoscale imaging of complex biological systems. He has presented many international keynote lectures and his work has featured in many popular magazines and news media, including Time, Smithsonian and UPI. Prof Lal was the UTS Invited Professor in Sydney for their BioNanotechnology initiative and a New Zealand Government International Science Scholar. Research in his lab involves the development of nanotechnologies for nanomedicine. In addition to seminal research publications in the field of nanomedicine, Dr Lal holds several patents based upon AFM cantilever arrays, microfluidics, optoelectronics and nanotubes for medical diagnostics and medical nanodevices, nanoscale fluid behavior and new TIRF, FRET and related optical microscopy. About the Authors 1903

Jan Lammerding Chapter D.35

Harvard Medical School Dr. Lammerding is an Instructor in Medicine at Harvard Medical Brigham and Women’s Hospital School serving in the Department of Medicine at Brigham and Cambridge, MA, USA Women’s Hospital; in addition he is as a lecturer at the Biological [email protected] Engineering Department at MIT, teaching molecular, cellular, and tissue biomechanics. His areas of interest include subcellular biomechanics and the cellular signaling response to mechanical stimulation. In Authors particular, he is focusing on how mutations in nuclear envelope proteins such as lamin can render cells more sensitive to mechanical stress, potentially leading to muscular dystrophy in mechanically strained tissues or increased atherosclerosis in vascular cells exposed to fluid shear stress and vessel strain. Dr. Lammerding received his BE from the Thayer School of Engineering at Dartmouth College, a Diplom Ingenieur degree in Mechanical Engineering from RWTH Aachen University in Aachen, Germany, and a PhD in Biological Engineering from MIT, Cambridge, MA. He completed his post-doctoral training in Dr. Richard Lee’s laboratory at Brigham and Women’s Hospital, Boston, MA before becoming a faculty member at Brigham and Women’s Hospital.

Hans Peter Lang Chapter B.15

University of Basel Dr. Hans Peter Lang received a PhD in physics from the University of Basel in 1994. Institute of Physics, National Competence As a postdoc, he directed research in the pulsed laser deposition and low temperature Center for Research in Nanoscale Science scanning tunneling microscopy groups at the Institute of Physics in Basel. Since 1996, (NCCR) Basel he is working as a postdoc at IBM Zurich Research Laboratory in the field of Basel, Switzerland [email protected] cantilever array sensors. Since 2000, he is a project leader in a project focused on biochemical applications of cantilever array sensors. He has given more than 100 scientific presentations and has published about 110 scientific articles in renowned journals.

Carmen LaTorre Chapter D.34

Owens Corning Science and Technology Carmen LaTorre holds BSc and MSc degrees in Mechanical Engineering from The Roofing and Asphalt Ohio State University. He is currently an engineer at the Owens Corning Science and Granville, OH, USA Technology Center in Granville, Ohio, where his primary focus is on fiberglass [email protected] insulation product/process development.

Christophe Laurent Chapter A.3

Université Paul Sabatier Dr. Christophe Laurent is Professor of Materials Chemistry at CIRIMAT UMR 5085 CNRS University Paul Sabatier and is the head of the Nanocomposites and Toulouse, France Carbon Nanotubes group of CIRIMAT. His research include in the [email protected] synthesis, characterization and mechanical properties of ceramic-matrix nanocomposites, and since 1994, carbon nanotubes (synthesis of single- and double-walled CNTs, formation mechanisms, characterization, localized growth, hydrogen storage, ceramic-matrix composites). 1904 About the Authors

Abraham P. Lee Chapter B.20

University of California Irvine Abraham (Abe) P. Lee is a Professor in the Departments of Biomedical Department of Biomedical Engineering Engineering (BME) and Mechanical and Aerospace Engineering at the Department of Mechanical University of California at Irvine. He also serves as the Director of the and Aerospace Engineering Micro/nano Fluidics Fundamentals Focus (MF3) Center, a Irvine, CA, USA DARPA-industry supported research center. Prior to joining the UCI

Authors [email protected] faculty in 2002, he was a Senior Technology Advisor in the Office of Technology and Industrial Relations at the National Cancer Institute, and a program manager in the Microsystems Technology Office of the Defense Advanced Research Projects Agency (DARPA). Dr. Lee started his career at Lawrence Livermoore NL and led projects on the treatment of stroke and CBW defense. Dr. Lee received his PhD degree in Mechanical Engineering from the University of California at Berkeley. His current research is focused on the development of “digital” micro/ nano fluidic platforms for the following applications: biosensors to detect environmental and terrorism threats, point-of-care diagnostics, “smart” nanomedicine for early detection and treatment, automated cell sorting technologies, and tissue engineering and cell-based therapeutics. Dr. Lee currently serves as Editor for the Journal of Microelectromechanical Systems and International Advisory Editorial Board member of Lab on a Chip journal. He served as editor of 4 books, edited two special journal issues, and is author of 5 book chapters. He has given more than 100 invited presentations, owns 33 issued US patents He has given more than 100 invited presentations, owns 33 issued US patents and has published over 100 peer reviewed papers in journals and conference proceedings.

Stephen C. Lee Chapter B.16

Ohio State University Stephen C. Lee is a pioneer in the field of semi-biological nanodevices Biomedical Engineering Center (nanobiological devices), having published the first monograph devoted to the topic in Columbus, OH, USA 1998. His interests are in enabling technologies for the incorporation of functional [email protected] proteins and nucleic acids into nanodevices, particularly for application in oncology and cardiovascular disease. He is currently Associate Professor of Cellular and Molecular Biochemistry, Chemical Engineering and Biomedical Engineering at the Ohio State University.

Wayne R. Leifert Chapter B.17

Adelaide Business Centre Wayne Leifert received his PhD in Membrane Physiology from the University of CSIRO Human Nutrition Adelaide, South Australia. He serves on the editorial board of the Journal of Adelaide, SA, Australia Biomolecular Screening, Expert Opinion on Drug Discovery and other journals in the [email protected] field. His areas of interests are in cell and membrane physiology, biochemistry and molecular biology of G-protein coupled receptors. His recent research has focused on the G-protein coupled receptor signalling processes particularly for construction of cell-free biosensors utilizing nano-and biotechnologies to adapt for multiple applications including medical diagnostics and high throughput drug screening. About the Authors 1905

Liwei Lin Chapter H.52

UC Berkeley Liwei Lin received the BS degree in power mechanical engineering Mechanical Engineering Department from National Tsing Hua University, Hsinchu, China, in 1986, and the Berkeley, CA, USA MS and PhD degrees in mechanical engineering from the University of [email protected] California, Berkeley, in 1991 and 1993, respectively. He was an Associate Professor in the Institute of Applied Mechanics, National Taiwan University, Taiwan, R.O.C., from 1994 to 1996 and an Assistant Authors Professor in the Mechanical Engineering Department, University of Michigan from 1996 to 1999. Since 1999, he has been with University of California, Berkeley, where he is currently Chancellor’s Professor at the Mechanical Engineering Department and Co-director at the Berkeley Sensor and Actuator Center. His research interests are in design, modeling and fabrication of micro/nanostructures, micro/ nanosensors, and micro/nanoactuators as well as mechanical issues in micro/nanosystems, including heat transfer, solid/fluid mechanics, and dynamics. He is the holder of nine U.S. patents in the area of MEMS. He led the effort to establish the MEMS division in ASME and served as the founding Chairman of the Executive Committee from 2004 to 2005. He is a Fellow of the American Society of Mechanical Engineers (ASME).

Yu-Ming Lin Chapter A.4

IBM T.J. Watson Research Center Dr. Yu-Ming Lin received the BS in physics from National Taiwan Nanometer Scale Science & Technology University in 1996, and the MS and PhD in Electrical Engineering and Yorktown Heigths, NY, USA Computer Science from Massachusetts Institute of Technology (MIT) [email protected] in 2000 and 2003, respectively. He was awarded Gold Medal by MRS for his graduate studies in 2002. Dr. Lin joined the IBM T. J. Watson Research Center in 2003, where he is currently a research staff member in the Physical Science department. His research at IBM focuses on the exploration and application of nanoscale electronic devices based on carbon materials. Specific contributions include the understanding of transport characteristics in carbon nanotubes, noise characterization and reduction in carbon nanotube devices and the demonstration of a carbon nanotube ring oscillator. His recent work also involved the fabrication and characterization of graphene RF devices.

Marc J. Madou Chapter B.19

University of California Irvine Dr. Madou is a Chancellor’s Professor at UC Irvine in the Department of Mechanical Department of Mechanical and Aerospace and Aerospace Engineering. His research focuses on miniaturization science (MEMS and Biomedical Engineering and NEMS) with emphasis on chemical and biological applications. Current projects Irvine, CA, USA include polymer actuators (for drug delivery), C-MEMS and CD based fluidics. Dr. [email protected] Madou received his PhD from the Rijksuniversiteit, Ghent, Belgium, Solid-State Physics Laboratory in 1978.

Othmar Marti Chapters C.21, D.32

Ulm University Dr. Othmar Marti is a specialist for scanning probe microscopies since the very early Institute of Experimental Physics days of that technique. His current research is focused on life science, polymer Ulm, Germany physics and optics and combinations thereof. He has a chair for Experimental Physics [email protected] and the Director of the Institute of Experimental Physics at Ulm University. 1906 About the Authors

Jack Martin Chapter H.51

Foxborough, MA, USA Jack Martin has been a technologist and manager in research, [email protected] development and manufacture of industrial MEMS products for over 30 years. His accomplishments include the development of wafer fab and packaging processes that have been used by Analog Devices to produce MEMS products since 1992. He has a PhD in Materials Science, a BS Authors and MS in Chemical Engineering, and is a Licensed Professional Engineer. He holds approximately 50 issued and pending patents.

Shinji Matsui Chapter A.7

University of Hyogo Dr. Shinji Matsui is a Professor at the University of Hyogo. He obtained Laboratory of Advanced Science his PhD degree in Electrical Engineering from Osaka University in and Technology for Industry 1981. Prior to joining the University of Hyogo, he worked at NEC Hyogo, Japan Corporation. His significant works were the demonstration of [email protected] electron-beam induced deposition and atomic-beam holography. His current research is focused on the three-dimensional nanofabrication by focused-ion-beam chemical-vapor-deposition and nanoimprint at room temperature.

Mehran Mehregany Chapters A.11, B.12

Case Western Reserve University Professor Mehran Mehregany received his BSc in Electrical Engineering from the Department of Electrical Engineering University of Missouri in 1984, and his MSc and PhD in Electrical Engineering from and Computer Science Massachusetts Institute of Technology in 1986 and 1990, respectively. From 1986 to Cleveland, OH, USA 1990 he was a consultant to the Robotic Systems Research Department at ATandT [email protected] Bell Laboratories, where he was a key contributor to ground-breaking research in microelectromechanical systems (MEMS). In 1990 he joined the Department of Electrical Engineering and Applied Physics at Case Western Reserve University as an Assistant Professor. He was awarded the Nord Assistant Professorship in 1991 and was promoted to Full Professor in July 1997. He held the George S. Dively Professor of Engineering endowed chair from January 1998 until July 2000, when he was appointed the Goodrich Professor of Engineering Innovation. He served as the Director of the MEMS Research Center at Case from July 1995 until December 2002. Since January 2003, he has been serving as Chairman of the Electrical Engineering and Computer Science Department. Professor Mehregany is well known for his research in the area of MEMS, and his work has been widely covered by domestic and foreign media. His research interests are in micro- and nanoelectromechanical systems (MEMS and NEMS), including sensors, actuators, micromachining and microfabrication technologies. His additional specialized interest centers on developing silicon carbide as an enabling material for MEMS and NEMS, in particular for applications in harsh environments. Professor Mehregany is the founder/co-founder of several technology companies, including Advanced Micromachines Incorporated (now part of The Goodrich Corporation), FLX Micro, Inc. and NineSigma, Inc.

Etienne Menard Chapter A.10

Semprius, Inc. Etienne Menard received an engineering diploma in Electronics from the National Durham, NC, USA Polytechnic Institute of Engineering in Electrotechnology, Electronics, Computer [email protected] Science and Hydraulics (ENSEEIHT) at Toulouse (France) in 2002. In 2005 he obtained a PhD degree in Chemistry from the University “Pierre et Marie Curie” (Paris, France) and the Department of Materials Science and Engineering at the University of Illinois at Urbana-Champaign (UIUC) under the direction of Denis Fichou at the “Laboratoire des Semi-Conducteurs Organiques” (CEA/SACLAY, France) and Prof. John A. Rogers at UIUC. He is currently founding scientist of Semprius, Inc. where he pursues his research interests in flexible display backplanes driven by transfer printed micro-ICs, high performance photovoltaic modules using micro-optic concentrators, ultra-high conversion efficiency quad-junction solar cells and innovative ultra-thin flexible solar technologies. About the Authors 1907

Ernst Meyer Chapter D.30

University of Basel Ernst Meyer is professor of physics at the University of Basel. He is Institute of Physics interested in friction force and dynamic force microscopy with true Basel, Switzerland atomic resolution. He is also active in the field of sensors based upon [email protected] micromechanics and magnetic spin resonance detection with force microscopy. Awarded from the Swiss Physical Society, he is member of the Swiss and American Physical Society, of the Editorial Board of Authors Tribology Letters, and co-editor of books on atomic force microscopy.

Robert Modliñski Chapter H.49

Baolab Microsystems Robert Modliñski has been a researcher and manager in the design, Terrassa, Spain development and fabrication of microsystems. He received the MSc [email protected] degree in Electronics and Microsystems from the Wroc³aw University of Technology, Poland in 2001 and his PhD from the Katholieke Universiteit Leuven, Belgium in 2009 while he was at the Interuniversity Microelectronics Center IMEC between 2002 and 2007. His main research activities are in the area of NEMS/MEMS and CMOS-MEMS integrated products with a strong focus on competitiveness, reliability and price, testing and characterization. He was involved in several pan-European research programs on radio frequency MEMS devices, CMOS-MEMS integrated gyroscopes and optical MEMS in cooperation with research centers, companies and universities. At present, he is running a development program on CMOS-MEMS integrated systems, post-process programs on dry release etching and 3-D surface modification of CMOS-MEMS integrated systems being the process development and reliability manager at Baolab Microsystems, Spain.

Mohammad Mofrad Chapter D.35

University of California, Berkeley Dr. Mohammad R.K. Mofrad is currently on the Bioengineering faculty at the Department of Bioengineering University of California, Berkeley. Professor Mofrad is an expert in the areas of Berkeley, CA, USA molecular cell mechanics and mechanotransduction, and cardiovascular disease. Dr. [email protected] Mofrad received his BSc degree from Sharif University of Technology in Tehran, Iran. After earning MSc and PhD degrees from the Universities of Waterloo and Toronto, respectively, he spent two years at MIT and Harvard Medical School/Massachusetts General Hospital as a post-doctoral fellow. Before joining the faculty at Berkeley, Dr. Mofrad was a principal research scientist at MIT for nearly two years. At Berkeley, he has developed and taught several new courses, including cell mechanics and mechanotransduction, molecular cell biomechanics, biological transport phenomena, and models of cell mechanics: dynamics of the cytoskeleton and nucleus. Dr. Mofrad has co-edited three books on topics related to cytoskeletal mechanics and computational biomechanics, including a recent book on cellular mechanotransduction: diverse perspectives from molecules to tissue. Professor Mofrad is the founder of the Mechanotransduction Knowledgebase Mechanotransduction.org.

Marc Monthioux Chapter A.3

CEMES - UPR A-8011 CNRS Marc Monthioux has been working on carbon materials for more than 20 years. He is Carbones et Matériaux Carbonés,Carbons involved in research on carbon nanotubes since 1998, discovered the ability of and Carbon-Containing Materials single-wall nanotubes in being filled by foreign molecules the same year, associated Toulouse, France with B. Smith and Professor D.E. Luzzi from University of Pennsylvania. He is [email protected] Director of Research at the French National Center for Scientific Research and European Associate Editor of CARBON Journal. 1908 About the Authors

Markus Morgenstern Chapter C.24

RWTH Aachen University Markus Morgenstern earned his PhD from the Institute of Interface II. Institute of Physics B and JARA-FIT Research and Vacuum Physics of the Forschungszentrum Jülich, Aachen, Germany Germany in 1996. After one year of research at the University of Paris [email protected] VII he joined the Group of Professor Roland Wiesendanger in 1997 as a Senior Scientist. In 2002 he completed his Habilitation at the University Authors of Hamburg with the subject scanning tunneling spectroscopy on semiconductor systems and nanostructures. In 2004 he received the Schottky -Prize of the German Science foundation and started as a full Professor at the RWTH Aachen. Since 1007, he is Scientific Director of JARA-FIT (Jülich-Aachen Research Alliance: Fundamentals of Future Information Technology).

Seizo Morita Chapter C.23

Osaka University Professor Seizo Morita works in atomic force microscopy (AFM) Department of Electronic Engineering research. He has discovered two-dimensional friction with a lattice Osaka, Japan periodicity and two-dimensional solid phase of densely [email protected] contact-electrified electrons on SiO2 thin films in ambient conditions. He has achieved mapping, discrimination and control of atoms with atomic resolution and also atom manipulation based on a mechanical method using the noncontact AFM apparatus.

Koichi Mukasa Chapter C.23

Hokkaido University K. Mukasa is a Professor of Electronics at Hokkaido University, Sapporo, Japan. In Nanoelectronics Laboratory 1980 he joined Alps Electric Co. Ltd, where he worked on the magnetic thin film Sapporo, Japan heads and materials. In 1987 he moved to the university. His research interests include [email protected] spin-polarized STM, exchange force microscopy, magnetic force microscopy, Mott spin detectors, nanostructure concerning electron spin and molecular/biological materials and devices.

Bradley J. Nelson Chapter G.46

Swiss Federal Institute of Technology (ETH) Brad Nelson is the Professor of Robotics and Intelligent Systems at ETH-Zürich and Institute of Robotics is the director of the Institute of Robotics and Intelligent Systems (IRIS). His primary and Intelligent Systems research direction lies in extending robotics research into emerging areas of science Zurich, Switzerland and engineering. His most recent scientific contributions have been in the area of [email protected] microrobotics, biomicrorobotics, and nanorobotics, including efforts in robotic micromanipulation, microassembly, MEMS (sensors and actuators), mechanical manipulation of biological cells and tissue, and NEMS. He has also contributed to the fields of visual servoing, force control, sensor integration, and web-based control and programming of robots. Professor Nelson received a BSc (Mechanical Engineering) from the University of Illinois at Urbana-Champaign in 1984, an MSc (Mechanical Engineering) from the University of Minnesota in 1987, and the PhD degree in Robotics (School of Computer Science) from Carnegie Mellon University in 1995. During these years he also worked as an engineer at Honeywell and Motorola, and served as a United States Peace Corps Volunteer in Botswana, Africa. In 1995 he became Assistant Professor at the University of Illinois at Chicago, Associate Professor at the University of Minnesota in 1998, and Professor at ETH in 2002.

Michael Nosonovsky Chapters D.33, F.42

University of Wisconsin-Milwaukee Michael Nosonovsky is an Assistant Professor at the University of Department of Mechanical Engineering Wisconsin-Milwaukee. He got his PhD from Northeastern University Milwaukee, WI, USA (Boston) and worked as a Postdoc at Ohio State University and National [email protected] Institute of Standards and Technology (Maryland). His research interests include surface and contact mechanics, capillary effects, nanotribology, self-organization and biomimetcs. About the Authors 1909

Hiroshi Onishi Chapter C.23

Kanagawa Academy of Science Dr. Hiroshi Onishi is an experimental chemist at the Kanagawa and Technology Academy of Science and Technology interested in molecule-scale Surface Chemistry Laboratory reaction kinetics at interfaces by observing molecules moving and Kanagawa, Japan reacting over metal oxide surfaces with time-lapse imaging with [email protected] scanning probe microscopes. Domestic societies encouraged him with awards to further develop his research towards nano-scale chemistry. Authors

Alain Peigney Chapter A.3

Centre Inter-universitaire de Recherche Professor Alain Peigney is ceramic engineer and has a Doctor in physical chemistry. sur l’Industrialisation des Matériaux He is Associate Professor of materials chemistry at the Paul Sabatier University, (CIRIMAT) Toulouse, France. His research encompasses the synthesis, sintering and Toulouse, France microstructural characterization of ceramics and ceramic matrix nanocomposites. [email protected] Since 1994 he concentrates on the synthesis of single- and double-walled carbon nanotubes and the preparation of nanocomposites containing carbon nanotubes.

Oliver Pfeiffer Chapter D.30

Individual Computing GmbH Oliver Pfeiffer studied physics at the University of Basel, where he received his PhD Dornach, Switzerland for work on energy dissipation of oscillating cantilevers in non-contact AFM. Related [email protected] to this research field is the examination of damping of torsional oscillations of cantilevers when approaching the sample.

Haralampos Pozidis Chapter G.45

IBM Zurich Research Laboratory Dr. Pozidis received the PhD in Electrical Engineering from Drexel Storage Technologies University, Philadelphia, PA, in 1998. After working with Philips Rüschlikon, Switzerland Research, Eindhoven, the Netherlands, on signal processing and coding [email protected] for optical storage technologies, with focus on DVD and Blue-Ray-Disc, Dr. Pozidis joined IBM Research in 2001. His research focuses on receiver design for alternative storage technologies, particularly scanning probe microscopy-based techniques.

Robert Puers Chapter H.49

Katholieke Universiteit Leuven Professor Robert Puers recieved his BSc degree in electrical ESAT/MICAS engineering in Ghent in 1974, and his MSc degree at the Katholieke Leuven, Belgium Universiteit te Leuven in 1977, where he also obtained his PhD in 1986. [email protected] From 1980 he was employed as a Research Assistant at the Laboratory ESAT at K.U. Leuven. In 1986 he became Director (NFWO) of the clean room facilities for silicon and hybrid circuit technology at the ESAT-MICAS laboratories of the same university. He was a pioneer in the European research efforts in silicon micromachined sensors, MEMS and packaging techniques, for biomedical implantable systems as well as for industrial devices. At present, he is as a Full Professor at the K.U. Leuven. He is the author or co-author of more than 300 papers on biotelemetry, sensors, MEMS and packaging in reviewed journals or international conferences. He is a Fellow of the Institute of Physics (UK), council member of the International Microelectronics and Packaging Society (IMAPS), senior member of the Institute for Electric and Electronic Engineers (IEEE). 1910 About the Authors

Calvin F. Quate Chapter C.25

Stanford University Calvin F. Quate received his BS from the University of Utah in 1944 and the PhD Edward L. Ginzton Laboratory degree from Stanford University, Stanford, CA, in 1950. He held positions at Bell Stanford, CA, USA Laboratories and Sandia Corporation before joining the faculty at Stanford University, [email protected] where he has been since 1961. Currently, he is a Faculty Member with the Department of Electrical Engineering and the Department of Applied Physics at Stanford

Authors University. His research interests revolve around the scanning probe microscopes. Dr. Quate is a Member of the National Academy of Engineering and the National Academy of Sciences, an Honorary Fellow of the Royal Microscopical Society, and a Foreign Member of the Royal Society London. He has received the IEEE Morris N. Liebmann Award in 1981, the Rank Prize for Opto-electronics in 1982, the IEEE Medal of Honor in 1988, the President’s National Medal of Science in 1992, and the American Physical Society Keithley Award in 2000.

Oded Rabin Chapter A.4

University of Maryland Oded Rabin is an Assistant Professor of Materials Science and Engineering at the Department of Materials Science University of Maryland, College Park. He earned a BA degree in Chemistry from the and Engineering Technion – Israel Institute of Technology, Haifa, Israel; an MA degree in Chemistry College Park, MD, USA from the Weizmann Institute of Science, Rehovot, Israel; and a PhD degree in [email protected] Physical Chemistry from the Massachusetts Institute of Technology, Cambridge, MA. His work focuses on synthesis of nanoparticles and nanowires for thermoelectrics, sensing, and medical imaging technologies.

Françisco M. Raymo Chapter A.2

University of Miami Françisco M. Raymo is Professor in the Department of Chemistry at the Department of Chemistry University of Miami. His research interests lie at the interface of Coral Gables, FL, USA chemistry and biology. In particular, he is developing photoswitchable [email protected] fluorescent probes to image biological samples with nanoscaled resolution.

Manitra Razafinimanana Chapter A.3

University of Toulouse III (Paul Sabatier) Professor Manitra Razafinimanana was born in Analalava, Madagascar. Centre de Physique des Plasmaset leurs He received the 3rd cycle degree, and Doctorat d’Etat des Sciences Applications (CPPAT) Physiques degree from the Université Paul Sabatier, Toulouse, France, Toulouse, France in 1982 and 1986, respectively. Since 2000, he has held the position of razafi[email protected] professor. He has worked on plasma diagnostics, arc-electrode interaction, transport coefficients and thermodynamical properties calculation.

Ziv Reich Chapter C.27

Weizmann Institute of Science Ha’Nesi Professor Ziv Reich received his PhD at the Department of Organic Chemistry, Ha’Rishon Weizmann Institute of Science and did his postdoctoral studies at the Howard Hughes Department of Biological Chemistry Medical Institute, Stanford University. His research concentrates on transport Rehovot, Israel phenomena in biological systems, protein energy landscapes, and single-molecule [email protected] techniques in applications and development. Professor Reich was elected an EMBO young investigator and is recipient of the TEVA Pharmaceutical Founders and the Yigal Alon awards. About the Authors 1911

John A. Rogers Chapter A.10

University of Illinois Professor John A. Rogers obtained BA and BS degrees in chemistry and in physics Department of Materials Science from the University of Texas, Austin, in 1989. From MIT, he received SM degrees in and Engineering physics and in chemistry in 1992 and the Ph.D. degree in physical chemistry in 1995. Urbana, IL, USA From 1995 to 1997, Rogers was a Junior Fellow in the Harvard University Society of [email protected] Fellows. He joined Bell Laboratories as a Member of Technical Staff in 1997 and served as a Research Director from 2000-2002. He is currently Founder Professor of Authors Engineering at University of Illinois at Urbana-Champaign, where he pursues his research interests in unconventional methods for micro/

Cosmin Roman Chapter B.14

ETH Zurich Cosmin Roman obtained his electrical engineering diploma from the Micro and Nanosystems Department Polytechnic University in Bucharest in 2002, with a specialization in of Mechanical and Process Engineering computer science. Dr. Roman did his doctoral studies at TIMA Zurich, Switzerland laboratory, a research lab that belongs to the National Polytechnic [email protected] Institute of Grenoble (INPG), working on modeling quantum transport and mechanical properties of carbon nanotube-based (CNT) devices for bio-sensing applications. During his career, Dr. Roman has acquired various competences ranging from programming to condensed matter physics and mathematical physics. His current research interests include transport phenomena, mechanics, or more generally the physics of nanostructures.

Marina Ruths Chapter D.29

University of Massachusetts Lowell Dr. Marina Ruths is Assistant Professor at the University of Department of Chemistry Massachusetts at Lowell. She received her Ph.D. from the University of Lowell, MA, USA California, Santa Barbara in 1996 followed by postdoctoral research at [email protected] the University of Illinois at Urbana-Champaign, at the Max-Planck-Institute for Polymer Research, Germany and at Åbo Akademi University. Her current research includes adhesion, friction and nanorheology of surfactant, polymer, and liquid crystal systems. She received an ASLA-Fulbright grant in 1991 and an Alexander von Humboldt fellowship in 1998.

Ozgur Sahin Chapter C.25

The Rowland Institute at Harvard Ozgur Sahin received his BS degree in Electrical Engineering from Bilkent Cambridge, MA, USA University, Ankara, Turkey in 2001 and the PhD degree in Electrical Engineering in [email protected] 2005 from Stanford University, CA. He is currently directing the nanomechanical sensing laboratory at the Rowland Institute at Harvard, Cambridge, MA.

Akira Sasahara Chapter C.23

Japan Advanced Institute of Science Professor Akira Sasahara received his BS, MS, and PhD degrees from the University and Technology of Tokyo in 1993, 1995, and 1998, respectively. He is now Assistant Professor in the School of Materials Science School of Materials Science. He is interested in local structures formed on solid Nomi, Japan surfaces and his current research focuses on elucidation of chemical and physical [email protected] properties of nanoscale structures on metal oxide surfaces and their effect on chemical reaction using scanning probe microcopy. 1912 About the Authors

Helmut Schift Chapter A.9

Paul Scherrer Institute Dr.-Ing. Helmut Schift is head of the INKA-PSI Group in the Laboratory for Micro- and Laboratory for Micro- and Nanotechnology (LMN) at the Paul Scherrer Nanotechnology Institut (PSI) in Villigen, Switzerland. He studied electrical engineering Villigen PSI, Switzerland at University of Karlsruhe, Germany, and the École Nationale [email protected] Supérieure de Physique de Strasbourg (ENSPS), France, and performed Authors his Ph.D. studies at the Institute of Microtechnology Mainz (IMM), Germany. After his graduation in 1994, he joined PSI as a research staff member. His work includes all aspects of replication technology, from stamp manufacturing to polymer nanorheology. Since 10 years he is involved in the development of nanoimprint lithography (NIL) as an alternative nanopatterning method and has worked in national and international projects. Apart from his research he is giving lectures on “Nanotechnology for Engineers” and seminar talks on nanotechnology for a non-scientific audience.

André Schirmeisen Chapter C.26

University of Münster Dr. André Schirmeisen is head of the nanomechanics group at the Institute of Physics Center for Nanotechnology (CeNTech) at the University of Münster, Münster, Germany Germany. He received his PhD degree in Physics from McGill [email protected] University, Canada and his habilitation degree from Münster University. His research interests include atomic resolution imaging of surfaces by non-contact atomic force microscopy, self-assembly processes of organic molecules, nanoionics and nanotribology.

Christian Schulze Chapter D.36

Beiersdorf AG Christian Schulze received the MSc in Physics from the University of Leipzig, Research & Development Germany in 2006. Currently he is working within a cooperation of the Research Hamburg, Germany Department of Beiersdorf AG and Professor Josef Käs, University of Leipzig, on his [email protected]; PhD degree. His research includes the characterization of the mechanical properties of [email protected] human skin cells and tissues.

Alexander Schwarz Chapter C.24

University of Hamburg Dr. Alexander Schwarz belongs to the scientific staff of the Center of Microstructure Institute of Applied Physics Research at the Institute of Applied Physics at the University of Hamburg, Germany. Hamburg, Germany Since 1993 he has experience in scientific research in the field of high resolution force [email protected] microscopy and spectroscopy at cryogenic temperatures in ultrahigh vacuum and high magnetic fields. He is a Senior Scientist and works on atomic-force microscopy (AFM) with atomic resolution as well as related magnetically sensitive techniques, i.e. , magnetic force microscopy (MFM) and magnetic exchange force microscopy (MExFM).

Udo D. Schwarz Chapter C.24

Yale University Udo D. Schwarz received his PhD from the University of Basel in 1993 Department of Mechanical Engineering already using scanning force microscopy. Subsequently he moved to the New Haven, CT, USA University of Hamburg, specialising on low-temperature scanning force [email protected] microscopy and nanotribology. After spending a year at the Lawrence Berkeley National Laboratory, he accepted a position as Associate Professor of Mechanical Engineering at Yale University in 2002, where he got promoted to Full Professor in 2009. About the Authors 1913

Philippe Serp Chapter A.3

Ecole Nationale Supérieure d’Ingénieurs Dr. Philippe Serp is Associate Professor in the Laboratoire de Chimie en Arts Chimiques et Technologiques de Coordination (LCC) at UPR 8241 Ecole Nationale Supérieure LaboratoiredeChimiedeCoordination d’Ingénieurs en Arts Chimiques et Technologique. After receiving is (LCC) PhD from Paul Sabatier University, Toulouse, France, in 1994 with a Toulouse, France work on the preparation of supported catalyst, he moved to

[email protected] Authors Universidade do Porto to carry out post-doctoral research on catalytic CVD to prepare carbon fibers. His current research interests include CVD preparation of nanostructured materials and catalysis.

Huamei (Mary) Shang Chapter A.5

GE Healthcare Dr. Huamei (Mary) Shang is development engineer at GE Healthcare. She received Milwaukee, WI, USA her PhD degree from the University of Washington, Seattle, WA, in 2006 and both MS [email protected] and BS degrees from Dalian Institute of Light Industry, Dalian, China, in 2002 and 1998, respectively. Her current research interests are focused mainly on the processing, design, fabrication and characterization of x-ray scintillation inorganic materials and devices for healthcare applications. Dr. Shang is the author of over 25 publications and 3 book chapters. Her major awards include O’Brien Memorial Fellowship, Ford Company Fellowship and the Joint Institute of Nanotechnology fellowship.

Susan B. Sinnott Chapter D.31

University of Florida Dr. Susan B. Sinnott is a Professor of Materials Science and Engineering at the Department of Materials Science University of Florida (UF). She received her PhD in Physical Chemistry from Iowa and Engineering State University and was on the faculty at the University of Kentucky prior to joining Gainesville, FL, USA UF in 2000. Her research includes examining the fundamental mechanisms associated [email protected]fl.edu with tribology using computational methods.

Anisoara Socoliuc Chapter D.30

SPECS Zurich GmbH Anisoara Socoliuc received her PhD from the University of Basel, Zurich, Switzerland where she worked on control of friction on the nanoscale. She is [email protected] currently application scientist at Specs Zurich GmbH.

Olav Solgaard Chapter C.25

Stanford University Olav Solgaard received the BS degree in Electrical Engineering from E.L. Ginzton Laboratory the Norwegian Institute of Technology and the MS and PhD degrees in Stanford, CA, USA Electrical Engineering from Stanford University, California. He was a [email protected] postdoctoral researcher at the University of California at Berkeley before joining the University of California at Davis as an Assistant Professor in 1995. In 1999 he joined Stanford University where he is now an Associate Professor of Electrical Engineering. His research interests are optical devices and systems for communication and measurements with an emphasis on semiconductor fabrication and MEMS technology. He has authored more than 150 technical publications, and holds 18 patents. He is a co-founder Silicon Light Machines, Sunnyvale, CA, and an active consultant in the MEMS industry. 1914 About the Authors

Dan Strehle Chapter D.36

University of Leipzig Dan Strehle received his Diploma in Physics from the University of Leipzig, Germany Institute of Experimental Physics I in 2006. Currently he is a PhD student in the Soft Matter Physics group of Professor Division of Soft Matter Physics Josef Käs at the University of Leipzig. His research is focused on the mechanical Leipzig, Germany characterization of biopolymer bundles using optical tweezers. [email protected] Authors

Carsten Stüber Chapter D.36

University of Leipzig Carsten Stüber received his MSc in Physics from the University of Leipzig, Germany Institute of Experimental Physics I in 2006. The PhD student in biophysics is researching the internal cell structure using Division of Soft Matter Physics optical technologies as well as cell characterization combining Raman spectroscopy Leipzig, Germany and optical traps. [email protected]

Yu-Chuan Su Chapter H.52

ESS 210 Yu-Chuan Su received the BS and MS degrees in Power Mechanical Department of Engineering and System Engineering from the National Tsing Hua University, Taiwan, in 1993 Science 101 and 1995, respectively. In 2003, he received the PhD degree in Hsinchu, Taiwan Mechanical Engineering with an emphasis on MEMS technology from [email protected] the University of California, Berkeley,. In 2004, he joined the National Tsing Hua University, Taiwan, and is now an Assistant Professor in the Engineering and System Science Department. His research interests are in design and fabrication of polymer-based nano- and microfluidic systems for biomedical applications, including protein crystallization, droplet metering and manipulation, magnetic nanoparticles, and controlled drug delivery.

Kazuhisa Sueoka Chapter C.23

Graduate School of Information Science Kazuhisa Sueoka is currently Professor at the Graduate School of and Technology Information Science and Technology, Hokkaido University. His Hokkaido University research interests include spin polarized scanning tunnelling Nanoelectronics Laboratory microscopy and local spin injection, non-contact atomic force Sapporo, Japan [email protected] microscopy and surface spin imaging, development of electron spin analyzer and application to scanning electron microscopy, ferromagnetic/semiconductor heterostructure, and fabrication of cantilevers equipped with sensor devices such as magnetoresistance sensors, and single electron transistor.

Yasuhiro Sugawara Chapter C.23

Osaka University Yasuhiro Sugawara received his PhD in 1988 from Tohoku University and is Professor Department of Applied Physics in the Department of Applied Physics of the Graduate School of Engineering at Osaka Osaka, Japan University since 2002. His research focuses on the further development of scanning [email protected] probe microscopes and their applications, especially the noncontact atomic force microscope for the observation of solid surfaces at the atomic and molecular level. His aim is also to develop new nanomaterials and nanodevices by manipulation of single atoms and molecules using the atomic force microscope. About the Authors 1915

Benjamin Sullivan Chapter B.13

TearLab Corp. Benjamin Sullivan is a Biomedical Engineer with a research focus on nanoscale San Diego, CA, USA optoentropic transduction mechanisms in order to improve specificity of diagnostic [email protected] assays. Prior to obtaining his PhD in Bioengineering at the University of California, San Diego, Benjamin spent six years researching molecular profiles of the tear film while at the Schepens Eye Research Institute as an affiliate of Harvard Medical School. He is currently Chief Scientific Officer of TearLab Corp. Authors

Paul Swanson Chapter B.13

Nexogen, Inc. Dr. Swanson is the Vice President of Engineering at Nexogen, Inc. He Engineering received his PhD degree in Electrical Engineering from the University San Diego, CA, USA of Illinois. He has designed generations of microelectrode arrays, with [email protected] and without integrated active circuitry, for the electrophoretic manipulation of charged nanoscaled materials. He is an inventor on patents ranging fromdevices for molecular biological analysis to laser logic devices.

Yung-Chieh Tan Chapter B.20

Washington University School of Medicine Dr. Yung-Chieh Tan received his PhD from the University of California Department of Medicine at Irvine. While in Irvine, he developed many techniques for droplet Division of Dermatology microfluidics. He is currently developing micro-transdermal drug St. Louis, MO, USA delivery devices at Washington University in St. Louis. [email protected]

Shia-Yen Teh Chapter B.20

University of California at Irvine Shia-Yen Teh received a BS in Biosystems Engineering from University of California, Biomedical Engineering Department Davis in 2004. She worked in the biotech industry before pursuing a graduate degree Irvine, CA, USA at University of California, Irvine, where she is currently working towards her PhD in [email protected] Biomedical Engineering, specializing in the field of microfluidics with Professor Abraham Lee. Her interests include multiphase microfluidics, monodispersed particle and vesicle formation and their biological applications, and drug delivery.

W. Merlijn van Spengen Chapter H.49

Leiden University Merlijn van received the MSc degree in electronic engineering (microelectronics Kamerlingh Onnes Laboratory failure analysis) from Eindhoven University of Technology, The Netherlands, in 1999. Leiden, CA, The Netherlands In 2004 he obtained the PhD degree from the Catholic University of Leuven, Belgium, [email protected] while staying at the Independent Microelectronics Research Institute IMEC. Here he studied MEMS reliability and characterization with a focus on stiction and charge-induced defects. Currently, he is at Leiden University, The Netherlands, working on the application of nanotribological principles to MEMS. 1916 About the Authors

Peter Vettiger Chapter G.45

University of Neuchâtel Peter Vettiger joined the IBM Zurich Research Laboratory in 1963. He SAMLAB established and lead the micro/nanoscale fabrication activities for Neuchâtel, Switzerland superconducting, electronic and opto-electronic devices. In 1995, [email protected] together with G.K. Binnig, he initiated and lead until his retirement in 2002 the millipede probe-storage activities. His current research Authors interests include micro/nanomechanical devices and systems based on probe arrays for imaging and metrology, nanofabrication, biology, and probe storage applications. Since his retirement, he still is involved part-time in nanotechnology-related activities at IBM Zurich Research and also at CSEM/University of Neuchatel, Switzerland. He became an IEEE Fellow in 2000 and was honored with a Doctor honoris causa from the University of Basel, Switzerland, in 2001.

Franziska Wetzel Chapter D.36

University of Leipzig Franziska Wetzel received her Diploma in Physics from the University Institute of Experimental Physics I of Leipzig, Germany, in 2006. She is currently working on her PhD Division of Soft Matter Physics degree in the Soft Matter Physics Laboratory of Professor Josef Käs in Leipzig, Germany Leipzig. Her research is focused on characterizing benign and cancerous [email protected] cells via mechanical properties using the optical stretcher method.

Heiko Wolf Chapter A.6

IBM Research GmbH Dr. Wolf is a Research Staff Member in the Science and Technology Department at Zurich Research Laboratory the IBM Zurich Research Laboratory. His research focuses on self-assembly and Rüschlikon, Switzerland transfer methods for nanopatterning applications. Dr. Wolf studied chemistry at the [email protected] University of Mainz, Germany, and at Kyoto University, Japan. He received a diploma degree in chemistry from the University of Mainz in 1992. In 1995, he received a PhD degree in Chemistry from the University of Mainz for work done in collaboration with IBM’s Zurich Research Laboratory on self-assembled monolayers. After three years as a Research Scientist in the Polymer Division at Degussa AG, he joined the microcontact processing group of IBM’s Zurich Research Laboratory as a Research Staff Member in 1999.

Darrin J. Young Chapter B.12

Case Western Reserve University Darrin J. Young received his BS, MS, and PhD degrees from the EECS Department at Department of EECS, Glennan 510 University of California at Berkeley in 1991, 1993, and 1999, respectively. He Cleveland, OH, USA pioneered RF MEMS high-Q tunable passive devices for wireless communications. [email protected] He joined the EECS Department at Case Western Reserve University as an assistant professor in 1999. His main research interests include MEMS device design and fabrication. About the Authors 1917

Babak Ziaie Chapter A.8

Purdue University Babak Ziaie received his doctoral degree in Electrical Engineering from Birck Nanotechnology Center the University of Michigan in 1994. From 1995-1999 he was a West Lafayette, IN, USA postdoctoral-fellow and an assistant research scientist at the Center for [email protected] Integrated Microsystems (CIMS) of the University of Michigan. He subsequently joined the Electrical and Computer Engineering Department of the University of Minnesota as an Assistant Professor Authors (1999-2004). Since January 2005, he has been with the School of Electrical and Computer Engineering at Purdue University where he is currently a professor. His research interests are related to the biomedical applications of MEMS and Microsystems (BioMEMS). These include implantable wireless microsystems, smart polymers for physiological sensing and active flow control, micromachined interfaces with the central nervous system, biomimetic sensors and actuators, and ultra-sensitive sensors for biological (molecular and cellular) applications. Dr. Ziaie is the recipient of the NSF Career award in Biomedical Engineering (2001) and McKnight Endowment Fund Award for Technological Innovations in Neuroscience (2002). Dr. Ziaie is a member of the IEEE and the American Association for the Advancement of Science.

Christian A. Zorman Chapters A.11, B.12

Case Western Reserve University Christian A. Zorman received his BSc in physics and BA in economics Department of Electrical Engineering from the Ohio State University in 1988, and MSc and PhD in Physics and Computer Science from Case Western Reserve University in 1991 and 1994, respectively. Cleveland, OH, USA His doctoral research involved an investigation of the secondary [email protected] electron emission properties of CVD diamond films for vacuum electronics. Dr. Zorman joined the MEMS program at CWRU in 1994 as a Research Associate and immediately began working in the SiC MEMS area. He was promoted to Senior Research Associate in 1997 and Researcher in 2000. He currently is an Associate Professor in EECS at CWRU. He has been instrumental in the construction of AP- and LPCVD reactors for SiC thin films, and has led the development of recipes for the growth of single and polycrystalline 3C-SiC films for micromachined sensors and actuators. In addition to the development of novel bulk and surface micromachining techniques for SiC, Dr. Zorman was a key contributor in the development of novel polishing, wafer bonding, and low defect density growth processes for SiC. His current research interests include the development of SiC for NEMS. He has published over 120 technical papers, five book chapters. Professor Zorman is a past chairman of the MEMS Technical Group in the American Vacuum Society and is currently serving as co-chairman.

Jim V. Zoval Chapter B.19

Saddleback College Dr. Jim Zoval received his Doctorate in Chemistry from the University of California, Department of Math and Science Irvine in 1996. Dr. Zoval has both academic and industrial experience. In addition to Mission Viejo, CA, USA teaching, Dr. Zoval has worked in the biotech industry during his entire career. Dr. [email protected] Zoval held positions as a Research Scientist at LightSense Inc., Sr. Project Engineer at Nanogen Inc., Research Specialist at University of California, and Sr. Manager of Special Projects Research at Burstein Technologies Inc. Most of his work has been in the chemical and engineering areas of medical and clinical diagnostic platform development. Dr. Zoval’s professional publications include 3 chapters in text books, 26 journal publications, and 5 patents. 1918