Nanomotion Ceramic Servo Motors Full Catalog

Precision Motion Control

A Johnson Electric Company Based on the principles of ultrasonic standing waves in piezoelectricity, Nanomotion introduces its most advanced series of electronic motors, operating similarly to DC servo motors with the high resolution and dynamic performance of piezo actuators. Nanomotion... A Breakthrough Technology As the leading manufacturer of piezo-electric motors for precision motion control applications, Nanomotion’s product line

ds I ranges from single element motors for dar nstit an ut St io e n h o actuation, to larger motors for driving typical T f

S I I s

IS r

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90 e u 02 l stages. Nanomotion motors operate with no a li ty As intrinsic magnetic fields and no moving parts. sured Firm The motors provide unlimited travel in a compact package, with the ability to achieve unmatched precision for linear or rotary motion.

Nanomotion’s motors have been successfully

By pressing the ceramic applied in diverse applications, using our finger tip against a standard housed motors for motion control ceramic strip a driving The simultaneous excitation of the force is exerted on a longitudinal extension and transverse positioning in industrial automation to simply linear or rotary stage, bending modes creates two creating motion. applying a piezoelectric element embedded dimensional acoustic waves resulting in a small elliptical path at in consumer products. Regardless of the the ﬁnger tip. packaging, Nanomotion brings a unique drive solution to any motion requirement. When the driving voltage is not applied, the compression of the ﬁnger tip to the ceramic maintains holding torque on the motion device. Unlike other braking devices, there is no position shift or hysteresis in the Nanomotion motor.

Table of Contents

Motor Technology 1 Drive Strips 12 AB5 24 Semiconductor Applications 2 FB Series 13 SB1291 Single Axis Drive 25 Biomedical Applications 4 Specials 19 Design Guide 26 HR Series 6 Amplifiers 20 Quick Reference Guide 32 DM Series 8 AB1A 21 ST Motors 10 AB2 22 MM Series 11 AB4 23 Nanomotion’s unique motor & stage technology makes it well suited to applications in:

• Semiconductor & Flat Panel Equipment -Normal Environments to Ultra-High Vacuum • Fiber Optics Manufacturing and Dynamic Components • Storage Media Manufacturing and Test Equipment • Bio-Medical and Pharmaceutical Manufacturing • Metrology • General Automation

An exceptionally small operating package provides unlimited travel in a convenient and easy to mount package.

The operating nature of the finger tips CE Compliant ampliﬁer provide unprecedented move and settle accepts +/- 10V from capability, along with built in braking. most all servo controls. Step resolutions better than 20 nanometers with a wide range of Plug-N-Play with simple velocity from 1µ/sec to 250mm/sec. connectorization and easy installation.

Built in spring cam allows for set up in less than 5 minutes, without the need for extensive alignment.

Precision crossed roller bearing stages with integral linear encoders provide a wide range of travel and performance levels. Alumina running surface mounts to most standard slide mechanisms and is easily applied with double sided tape.

Nanomotion motors and FB stages are available in a wide range of configurations and are compatible with all standard servo controls.

1 SemiConductor Applications

Nanomotion Motors and FB Stages For The Semiconductor Market

XYZT UHV Stage for Laser / Ion Standard Motors: • Clean Room Beam Micromachining of Semicon Devices

Applications This 4 axis motion system provides X/Y/Z and Theta motion for laser or Ion Beam machining of Vacuum and Non- Magnetic Motors: semiconductor chips or MEMs devices. The stage -10 • E-Beam and Ion construction is UHV compatible to 10 Torr and has Beam Applications non-magnetic motors. Each linear axis Vacuum uses 50nm resolution linear encoders and the theta Compatible Motors: axis positions to 1 arc second. This stage can • High Vacuum and operate up to 200mm/sec. UHV Applications

Standard Nanomotion manufactures a wide variety of and Vacuum Compatible vacuum and UHV motors for Semiconductor applications. FB Stages: Our vacuum motors, for environments up to 10-7 Torr • Precision linear and are also available in non-magnetic configurations. rotary stages for These motors have no magnetic materials and no clean room and intrinsic magnetic field, and are ideal for E-Beam and vacuum Ion Beam applications, where magnetic motion can environments disturb the direction of the beam. Nanomotion's UHV • Custom stage motors are inherently non-magnetic and compatible designs for open -10 frame and small to 10 Torr. footprints • Well-suited to use in E-Beam and Ion Beam chambers

2 Vacuum / Non-Magnetic Stage

A dual axis stage providing 10mm travel in X and Y axes uses Nanomotion’s ST motors, in a Ultra High Vacuum compatible and non-magnetic configuration. Titanium bearings provide for a completely non-magnetic stage construction.

The stages use a 50nm resolution encoder and the entire assembly fits within a 75mm diameter.

Data Storage Certification Process

A single axis linear stage is used for track certification of a hard disk. The stage uses Nanomotion LS4 motors and a 100nm resolution linear encoder. (5nm optional) Step sizes range from 1µ to 15µ in less than

10msec, settling to 200nm. The stage operates in a class 100 clean room environment, on a 24/7 basis. Several hundred units have accumulated billions of cycles over the past several years.

3 BioMedical Applications

Nanomotion Motors and FB Stages For The BioMedical Market

Non-magnetic Auto Focus & Scanning Stages for Cell Imaging Motors: and Virtual Microscopy • MRI Applications Nanomotion’s auto focus stage is designed specifically for use in Standard Motors: vertical orientation, with the dynamic performance to meet the • Microscope Stages demanding requirements of focusing on the fly. The • Auto Focus Axes stage uses a spring counterbalance to offset the • High Throughput load, and manage the demanding requirements of Screening following Cell Terrain, during high speed imaging. • Clean Room Assembly Nanomotion’s stages are also used extensively in the Applications horizontal Step & Repeat or Scan on-the-fly, for cell imaging. The ability to provide high speed move Vacuum Motors: & settle as well as smooth constant velocity • Laser & Mass offers the highest motion performance in the Spectrometer Applications smallest footprint. While the stage technology can provide long travel, it can make focus Precision Stages moves in the range of 1 to 10 microns in for Bio and 5 milliseconds, settling to 100nm. Pharma Markets: • Linear stages for auto focus in cell analysis • Linear and rotary stages for sample manipulation

Features • Ceramic Servo Motor with Travel to 25mm • High Resolution from 10nm to 100nm (1nm optional) • Zero Backlash with Direct Drive • High Speed Move & Settle for Focusing Operation • Superior Position Stability and Zero Power Consumption at Rest • Position Holding without Power Provides Optical Stability and Reduces Thermal Drift • Easy Add-on Mounting to Standard Microscopes

4 Proteomics and Drug Development

High speed multi-axis systems use Nanomotion ceramic servo motors to provide the utmost in speed and performance, while maintaining an exceptionally small machine footprint. Whether controlling the position of the dispensing head or actuating a series of syringes, Nanomotion provides compact, light weight motors that can operate in a lab environment.

Non-Magnetic Motors for MRI

MRI manipulators and robotics use Ceramic

Servo Motors to control position while the MRI machine is on. The MRI creates an exceptionally high magnetic field preventing the use of conventional motors. Nanomotion’s motors are provided with NO magnetic materials and have no magnetic fields, eliminating the potential for artifacts on the display screen.

5 HR Series

Nanomotion’s HR Series motors range in size from a single element (providing 0.4kg of force) to an eight element motor (providing 3.2kg of force). The HR series is capable of driving both linear and rotary stages. The HR series motors have a wide dynamic range of speed, from several microns per second to 250mm/sec and can easily mount to traditional low friction stages or other devices. The unique operating characteristics of the HR Series motors provide inherent braking and the ability to eliminate servo dither when in a static position.

Features • Unlimited Travel • Wide Dynamic Velocity Range - From 1µ/sec to 250mm/sec • Excellent Move & Settle • Step Resolutions to 10nm • No Intrinsic Magnetic Field • No External Magnetic Field Sensitivity (for Non-Magnetic Version) Approved • Vacuum Versions Available

Motor Performance Specifications

Max Dynamic Static Static Preload Kf Force Velocity Stall Force Hold Force Stiffness on Stage Constant (mm/sec) (N) (N) (N/µ) (N) (N/Volt Commanded)

HR1 250 4 3.5 1 18 .75

HR2 250 8 7 1.8 36 1.5

HR4 250 16 14 2.8 72 3

HR8 250 32 28 3.8 144 6

Note: All motor performance data is based on using Nanomotion ceramic motors and amplifiers.

Environmental

operating temperature: 0 to 50˚ C storage: -20˚C to +70˚C humidity: 0 to 80%, non condensing -V vacuum motors: to 10-7 torr after bake out -U ultra-high vacuum motors: to 10-10 torr after bake out max bake out temperature: 120˚C for -V motors, 140˚C for -U motors

6 HR Series Dimensions (European View)

DIRECTION DIRECTION OF MOTION OF MOTION (A) FINGER TIP C 3.05 11.2 5 NOM

) 21 d e s s A R E F ( F R E E ) e 2 F F r 7 x . 0 . 2 E E p 1 P 7 ± R . 14.3 4 m Y 1.4 8

H 40.5 5 . 7 o T . G 3 7 2 5 RETRACTED RETRACTED C (K) HR1 only 0 4

n B 46.6 e

h 41.3 40.6 W When Compressed ( 41.9 REF J E TYPx2 2 1.2 5 PANGNSCD EWR 4 M

O 4 M4x0.7 N F 5 8 . 5 3 . 2 4 5

PRELOAD RELEASE ECCENTRICS (must be accessible after mounting) B

3.2 FINGER TYPx2 TIPS 3.05

A B C DEF G H J K Motor Motor Motor Cable Gnd Gnd Side Side Side Screw Weight Height Width Exit Screw Screw Mtg Mtg Mtg Type (Grams)

HR1-1-S 8 25.7 15.6 4.7 4.7 3.8 31 4.7 4 M3x0.5 30

HR1-1-V 8 25.7 15.6 4.7 4.7 3.8 31 4.7 4 M3x0.5 20

HR1-1-U 7.7 25.5 NA NA 4 4 NA NA NA NA 20

HR2-1-S 12.7 25.7 15.6 9.7 4.7 6 NA NA NA NA 60

HR2-1-V 12.7 25.7 15.6 9.7 4.7 6 NA NA NA NA 40

HR2-1-U 12.7 25.5 NA NA 4 6 NA NA NA NA 40

Terminal Mtg for U motors

HR4-1-S 14.4 46.6 Bottom Back 9.3 7.2 NA NA NA NA 73

HR4-1-V 14.4 46.6 Left or Right 9.3 7.2 NA NA NA NA 73

HR4-1-U 14.9 46.6 NA NA NA NA NA NA 6 NA 73

HR8-1-S 23.3 46.6 Bottom Back 9 12 NA NA NA NA 170

HR8-1-V 23.3 46.6 Left or Right 9 12 NA NA NA NA 120

HR8-1-U 23.8 46.6 NA NA NA NA NA NA 12 NA 120

Note: All dimensions in mm -S motors are Standard -V motors are Vacuum Rated to 10-7, Torr (use VN for Vacuum & Non-Magnetic) -U motors are Vacuum Rated to 10-10, Torr and are Non-Magnetic -N motors are Non-Magnetic, for MRI environments

Force vs. Velocity at various work regimes 1 8 Envelope of Performance 2 4 R R R R ) 25˚C 50˚C Vacuum H H H H max. max. max. N duty duty duty ( curve continuous continuous continuous cycle operation time cycle operation time cycle operation time e a 100% — 100% — 100% — 4 8 15 30 c

b 100% — 100% — 44% 184 r 2 5 10 20 f c 100% — 92% 137 26% 107 o d e g

F 1 3 5 10 d 100% — 62% 93 17% 72 b c e 78% 67 seconds 47% 70 13% 55 0 0 0 0 a f 56% 62 seconds 33% 50 9% 39 0 100 200 300 g 50% 56 seconds 30% 45 8% 35 Velocity (mm/sec)

7 DM Series

The DuraMotor provides the utmost in durability through the use of new and improved materials for the motor tip and drive strip. Designed for the most demanding applications, the DuraMotor provides exceptional levels of cleanliness and motor life with low particle generation. The DuraMotor series is available in the standard configurations of DM1, 2, 4 and 8 element motors with the identical footprint of the equivalent HR series. The DuraMotor series is offered with a unique family of DuraStrips and DuraDisks, and is compatible with all standard Nanomotion amplifiers. The DuraMotor supports linear, rotary, and tilt applications with the same benefits of unlimited travel, built-in holding/braking without power consumption and a wide bandwidth of velocity.

Features • Demanding Move & Settle profiles with high duty cycle • High speed motion profiles • Vacuum & UHV configurations available • Wide dynamic range of velocity - From 1µm/sec to 250mm/sec

Approved

Motor Performance Specifications

Max Dynamic Static Static Preload Kf Force Velocity Stall Force Hold Force Stiffness on Stage Constant (mm/sec) (N) (N) (N/µ) (N) (N/Volt Commanded)

DM1 250 4 3.5 1 18 .75

DM2 250 8 7 1.8 36 1.5

DM4 250 16 14 2.8 72 3

DM8 250 32 28 3.8 144 6

Note: All motor performance data is based on using Nanomotion Drive Surface, motors and amplifiers.

Environmental

8 DM Series Dimensions (European View)

DIRECTION DIRECTION OF MOTION OF MOTION (A) FINGER TIP C 3.05 11.2 5 NOM

) 21 d e s s A R E F ( F R E E ) e 2 F F r 7 2 x . 0 . E E p 1 P 7 ± R . 14.3 4 m Y

7 1.4 8

H 40.5 5 . o T . G 3 7 2 5 RETRACTED RETRACTED C (K) HR1 only 0 4

n B 46.6 e

h 41.3 40.6 W When Compressed ( 41.9 REF J E TYPx2 2 1.52 GNDPAN W SCRE 4

M Force vs. Velocity at various work regimes O 4 M4x0.7 N F 5 8 . 5 3 . 2 H H H 4 H 5 R R R R PRELOAD RELEASE 4 2 8 1 ECCENTRICS 4 8 15 30 (must be accessible after mounting) B

23.2 5 10 F20INGER f TYPx2 TIPS 3.05 d g 1 3 5 10 e D b c 0 0 0 0 a 0 100 200 300 Velocity (mm/sec) A B C DEF G H J K Motor Motor Motor Cable Gnd Gnd Side Side Side Screw Weight Height Width Exit Screw Screw Mtg Mtg Mtg Type (Grams) Force vs.Velocity at various work regimes DM1-1-S 8 25.7 15.6 4.7 4.7 3.8 31 4.7 4 M3x0.5 30

DM1-1-V 8 25.7 15.6 4.7 4.7 3.8 31 4.7 4 M3x0.5 20 L L L S S S 2 8 DM1-1-U 7.7 25.5 NA NA 4 4 NA NA4 NA NA 20 3 6 9 DM2-1-S 12.7 25.7 15.6 9.7 4.7 6 NA NA NA NA 60 2 4 6 f DM2-1-V 12.7 25.7 15.6 9.7 4.7 6 NA NA d NAe g NA 40

F 1 2 3

DM2-1-U 12.7 25.5 NA NA 4 6 o NA NA b cNA NA 40 r 0 0 0 a c

e 0Terminal Mtg 10 for U motors 20 30 ( N Velocity (mm/sec) DM4-1-S 14.4 46.6 Bottom Back 9.3 7.2 ) NA NA NA NA 73

DM4-1-V 14.4 46.6 Left or Right 9.3 7.2 NA NA NA NA 73

DM4-1-U 14.9 46.6 NA NA NA NA NA NA 6 NA 73

DM8-1-S 23.3 46.6 Bottom Back 9 12 NA Force NAvs. VelocityNA at various NAwork regimes170

DM8-1-V 23.3 46.6 Left or Right 9 12 NA NA NA NA 120 D D D D

DM8-1-U 23.8 46.6 NA NA NA NAS S S NAS NA 12 NA 120 8 4 2 1 Note: All dimensions in mm 4 8 15 30 -S motors are Standard

2 F 5 10 20 -7 f -V motors are Vacuum Rated to 10 , Torr (use VN for Vacuum & Non-Magnetic)o d g -10 r e F -U motors are Vacuum Rated to 10 , Torr and are Non-Magnetic 1 c 3 5 10 e

o c a b

-N motors are Non-Magnetic, for MRI environments r

0 ( 0 0 0 c N

e 0 100 200 300 ) (

N Velocity (mm/sec) )

Envelope of Performance Force vs. Velocity at various work regimes

25˚C 50˚C Vacuum D D D max. max. max. D M M M duty duty duty M curve continuous continuous continuous 1 2 4 cycle operation time cycle operation time cycle operation time 8 a 100% — 100% — 100% — 4 8 15 30 b 100% — 100% — 44% 184 2 5 10 20 f c 100% — 92% 137 26% 107 d e g d 100% — 62% 93 17% 72 F 1 3 5 10

o c a b e 78% 67 seconds 47% 70 13% 55 r 0 0 0 0 c

f 56% 62 seconds 33% 50 9% 39 e 0 100 200 300 (

g 50% 56 seconds 30% 45 8% 35 N Velocity (mm/sec) )

9 ST Motor

The ST Series Piezoelectric Motor is the smallest motor of its kind. The ST provides high resolution motion control for linear or rotary devices in a fraction of the space of traditional mechanisms. The ST is ideal for small stepping as well as continuous travel, with the ability to make step increments in the tens of nanometers and the ability to operate at speeds up to 250mm/sec.

Features • The Smallest Standard Dimensions (European View) Piezo-Electric Package

• Unlimited Travel CABLE OUT 3 • Wide Dynamic Velocity Range - 4xM2 from 1µm/sec to 250mm/sec 1.5 1 • Excellent Move & Settle . 2 6 . p

. • Standard and Low Speed 8 y t

4 3

2 Version for High Resolution 1

7 • No Intrinsic Magnetic Field • No External Magnetic

5 2 . Field Sensitivity 1 0.8 p

y 9.1 t 19.3 typ. 2 21.9

Motor Performance Specifications

max dynamic static static preload Kf Force velocity stall force hold force stiffness on stage Constant (mm/sec) (N) (N) (N/µ) (N) (N/Volt Commanded)

ST-1-S 250 1.2 1 .15 8 .1

ST-1-V 250 1.2 1 .15 8 .1

Note: All Dimensions are in mm.

Environmental

operating temperature: 0 to 50˚ C storage: -40˚C to +70˚C humidity: 0 to 80%, non condensing

10 MM Series

Nanomotion’s MM motor is the smallest industrial motor of its kind that provides unlimited linear or rotary motion, with 0.17N of driving force and velocity up to 220mm/sec. The MM motor works with Nanomotion’s standard AB4 amplifier and any servo controller, and can be integrated into most bearing structures.

Features • Exceptionally small dimensions • Excellent move and settle characteristics • Suitable for high vacuum environments • Inherent brake at power off • Unlimited travel • Wide dynamic velocity range– from 100 micron/sec to 220 mm/sec • No intrinsic magnetic field • High resolution • Nominal lifetime– 20,000 hours under nominal operating conditions

Motor Performance Specifications

Max Dynamic Static Static Preload Kf Force Kv Force Velocity Stall Force Hold Force Stiffness on Stage Constant (mm/sec) (mN) (mN) (Nµ) (N) (mN/Volt Commanded) (N • sec/m)

MM-1-S-1.5 220 170 160 0.04 0.9 25 to 35 0.5 to 0.8

MM-1-V-1.5 220 170 160 0.04 0.9 25 to 35 0.5 to 0.8

Note: All motor performance data is based on using Nanomotion ceramic motors and amplifiers

Environmental

operating temperature: 0 to 50˚ C storage -40˚C to +70˚C humidity 0 to 80%, non condensing residual magnetism 0.27 nT vacuum compatibility 1E – 7 torr. guaranteed after baking max bake out temperature 24Hr @ 120˚C

11 Drive Strips

Nanomotion manufactures and supplies ceramic drive strips, DuraStrips and CCS ceramic coated steel for all motor types. Standard strips, rings and disks are available in a wide variety of sizes and shapes. Nanomotion can also provide custom drive strips/rings for different application requirements. The mating drive surface is critical to the motor’s performance. All specifications are based on using Nanomotion’s drive surfaces. Most of Nanomotion’s standard drive strips are provided with vacuum compatible, double sided tape for easy mounting. The motor user manual defines the proper mounting procedure.

*Mounted with Double Sided Tape

Strips for use with a b standard lengths**

standard ceramic

CS-10-1.5-200 ST, HR1 10 1.5 200 – – –

CS-10-3-XXX*** HR1, HR2, HR4 10 2.7 200 250 300 350

CS-20-3-XXX HR8 20 2.7 200 250 300 350

dura strip

DS-10-3-XXX*** DS1, DS2, DS4 10 2.7 200 250 300 350

DS-20-3-XXX DS8 20 2.7 200 250 300 350

ceramic coated steel

CCS-20-5-XXX HR1, HR2, HR4, HR8 20 4.8 500 1000 1500 2000

Note: * All ceramics are provided with double sided tape. Please Note: All dimensions are in mm specify in your order form if otherwise required. ** For special lengths, consult factory for pricing and availability *** The XXX represents the required length of the ceramic strip; 50, 100, and 150mm are available as standard. Rings & Disks motor preload od id thickness

rings Nanomotion manufactures many CR-12-9-5-X a = axial, r = radial, ra = radial axial 12 9 5 other ring and disk sizes. Please contact us CR-40-32-10-X* a = axial, r = radial, ra = radial axial 40 32 10 for non-standard sizes.

CR-60-40-10-X a = axial, r = radial, ra = radial axial 60 40 10

CR-100-80-10-X a = axial, r = radial, ra = radial axial 100 80 10

Note: * The X represents the motor preload required for the ceramic ring, a = axial, r = radial, ra = radial axial

disks

CD-146-114-1.5 axial 146 114 1.5

CD-192-60-5 axial 192 60 5

CD-192-150-5 axial 192 150 5

12 FB Series

The FB Series product line is a family of standard, modular linear stages

available for single and multi-axis applications. The stage configuration utilizes crossed roller bearings, a linear optical encoder, and Nanomotion’s ceramic servo motors. The stages are offered in a wide range of widths and travel lengths and can be combined in X/Y or X/Y/Z or other multi-axis configurations. Encoder resolutions can be varied to achieve a range of performance criteria and there are different size motors for each cross-

section to meet necessary force/acceleration requirements.

Features • Compact stage design with low profile • Direct drive motor with simple, robust construction • Linear encoder mounted in the center for optimum positioning • Easily configurable in multi-axis • Wide range of slide size, travels and motor size

Stage Configurations

Width Motor Options Standard Travels

series

FB050 50mm HR2 OR HR4 20mm, 50mm, 75mm

FB075 75mm HR4 OR HR8 40mm, 60mm, 100mm, 150mm

FB100 100mm HR4 OR HR8 60mm, 100mm, 150mm

FB150 150mm HR4 OR HR8 100mm, 150mm, 200mm

Note: Travel lengths to 300mm available in the FB100 and FB150 configurations. Encoders Available Mountings Standard encoder resolution is 0.1µm X/Y Optional resolutions: 1µm, 0.5µm, 50nm, 10nm X/Z using angle bracket Optional limits and home sensor (FB050 is home only) X/Y/Z using angle bracket

13 FB Series

Performance Specifications

FB050 FB075 FB100 FB150

2.5µm/25mm 2.5µm/25mm 2.5µm/25mm 1.5µm/25mm straightness & flatness travel travel travel travel

maximum load capacity (in kg)

20mm travel 2

40mm travel 5

50mm travel 5

60mm travel 5 10

75mm travel 7

100mm travel 7 12 20

150mm travel 10 12 25

200mm travel 25

Motor Performance Specifications

FB050 FB075 FB100 FB150

driving force (in N)

HR2 8

HR4 16 16 16 16

HR8 30 30 30

FB050 FB075 FB100 FB150

static holding force (in N)

HR2 3.5

HR4 12 12 12 12

HR8 25 25 25

FB050 FB075 FB100 FB150

position repeatability

0.1µm standard ±0.5µm

10nm optional ±50nm

50nm optional ±200nm

0.5µm optional ±2µm

1.0µm optional ±3µm

14 FB050 FB Series

Ground 5X .130 .453 M4 - 6H .315 4X .177 .500 Tooling Holes .315 .177 Mounting Holes C-Bored Farside

107 4.213 40 50 40 1.575 1.969 1.575 20 .787

40 40 1.575 20.900 1.575 20.900 .823 .823 29.500 A 1.161

Motor Performance Specifications

Travel A B Dynamic Stage Moving (mm) (mm) (mm) Stall Force Mass Mass (N) (g) (g)

FB050-020-0.1M2 20 50 55 8 385 150

FB050-020-0.1M4 20 50 55 16 400 150

FB050-050-0.1M2 50 75 80 8 595 226

FB050-050-0.1M4 50 75 80 16 610 226

FB050-075-0.1M4 75 100 105 16 700 400

Note All standard FB stages are provided with .1µm resolution linear encoders.

Encoder Options part suffix resolution -1.0M .1µm Optional -0.5M .5µm Optional -50N 50nm Optional -10N 10nm Optional

15 FB Series FB075

.165 .177 M5 - 6H .177 Tooling Holes 8X .217THRU ALL 8X .165 .370 32 .394 .217 75 M5 - 6H .276 1.260 Mounting Holes 2.953 Tooling Holes C-Bored Farside

Ground

55 55 50 A B C 2.165 2.165 1.969

55 2.165 55 2.165 120 4.724 Encoder Cable

Motor Performance Specifications

Travel A B C Dynamic Stage Moving (mm) (mm) (mm) (mm) Stall Force Mass Mass (N) (g) (g)

FB075-040-0.1M4 40 n/a 75 n/a 16 650 302

FB075-060-0.1M4 60 n/a 100 n/a 16 920 405

FB075-060-0.1M8 60 n/a 100 n/a 32 1035 412

FB075-100-0.1M4 100 110 125 110 16 1125 505

FB075-100-0.1M8 100 110 125 110 32 1230 515

FB075-150-0.1M4 150 160 175 160 16 1515 710

FB075-150-0.1M8 150 160 175 160 32 1620 720

Note All standard FB stages are provided with .1µm resolution linear encoders.

Encoder Options part suffix resolution -1.0M .1µm Optional -0.5M .5µm Optional -50N 50nm Optional -10N 10nm Optional

16 FB100 FB Series

8 X .217 THRU ALL 100 8X .165 .469 .394 .217 3.937 M5 - 6H .375 Mounting Holes C-Bored Farside Tooling Holes 37 .165 .311 1.457 M5 - 6H .217 Tooling Holes

Ground

80 80 50 A B C 3.150 3.150 1.969

80 80 3.150 3.150

145 Encoder Cable 5.709

Motor Performance Specifications

Travel A B C Dynamic Stage Moving (mm) (mm) (mm) (mm) Stall Force Mass Mass (N) (g) (g)

FB100-060-0.1M4 60 n/a 120 n/a 16 1580 690

FB100-060-0.1M8 60 n/a 120 n/a 32 1690 700

FB100-100-0.1M4 100 120 160 120 16 2040 920

FB100-100-0.1M8 100 120 160 120 32 2145 930

FB100-150-0.1M8 150 160 200 160 32 2625 1160

Note All standard FB stages are provided with .1µm resolution linear encoders.

Encoder Options part suffix resolution -1.0M .1µm Optional -0.5M .5µm Optional -50N 50nm Optional -10N 10nm Optional

17 FB Series FB150

8 X .260 THRU ALL 8 X .197 .591 .433 .256 M6 - 6H .472 Mounting Holes 150 Tooling Holes 1.969 C-Bored Farside 5.906

.197 .368 M6 - 6H .250 Tooling Holes

125 125 50 A B C 4.921 4 .9 2 1 1 .9 6 9

125 125 4.921 4.921

195 7.677

Motor Performance Specifications

-- Travel A B C Dynamic Stage Moving (mm) (mm) (mm) (mm) Stall Force Mass Mass (N) (g) (g)

FB0150-100-0.1M8 100 n/a 150 n/a 32 3940 1600

FB150-150-0.1M8 150 175 200 175 32 5095 2125

FB150-200-0.1M8 200 225 250 225 32 6275 2660

Note All standard FB stages are provided with .1µm resolution linear encoders.

Encoder Options part suffix resolution -1.0M .1µm Optional -0.5M .5µm Optional -50N 50nm Optional -10N 10nm Optional

18 Specials

Unique Motion Solutions

Miniature stages are available in open loop (shown here) or closed loop configurations, utilizing Nanomotion’s ST motor and a 15mm wide slide assembly. The ST motor will drive this stage with up to 1.3N force with a maximum velocity of 250mm/sec and completely unlimited travel.

This long travel, closed loop actuator is easily configured for motion up to 4 meters in length. The assembly consists of a profile linear rail with recirculating ball bearings mounted to an aluminum extrusion. A linear tape scale encoder is used for position feedback and the stage is driven with an HR8 motor providing 40N of force. This assembly utilizes Nanomotion’s new CCS, ceramic coated steel drive strip which is designed for long travel applications.

A four axis vacuum rated assembly, providing motion in X/Y/Z and Theta orientations, is used for laser etching.

The assembly is vacuum rated to 10-7 Torr and uses non-magnet motors. The Z axis uses a spring counter balance to offset the vertical load and all stainless steel crossed roller axes use an anti-migration device in the bearing structure. This assembly provides 40mm travel in X & Y axes, 25mm travel in Z and up to 90 degrees in Theta.

19 Amplifiers

Nanomotion offers 5 types of amplifiers to facilitate best performance of the motors. AB1A- is the standard, heavy duty amplifier, widely used.

AB1A-3U- a board level AB1A amplifier card, in 3U format for motherboard interface. AB2- facilitates additional ultra high resolution capabilities (UHR), down to 1 nanometer, using the unique DC mode. AB4- a compact amplifier, powered by 12V supply. AB5- the innovative linearized amplifier, yields excellent motion performance with any standard controller firmware. AB5-3U- a board level AB5 amplifier card, in 3U format for motherboard interface.

AB1A AB1A-3U AB2 AB4 AB5 AB5-3U

unique functionality nanomotion board level dc mode compact linear response, linear response basic 3U format for ultra high amplifier operates with operates with resolution package standard servo standard servo

supply voltage (vdc) 48 48 24 12 24 24

packaging Panel mount Board level Panel mount Small panel Panel mount Board level box 3U format box mount box box 3U format

max # of HR elements (1) 32 32 16 4 32 32

max motor cable length (3) 15 15 20 20 20 20

input signals (2) ±10vdc ±10vdc ±10vdc ±10vdc ±10vdc ±10vdc SPI Digital

modes of operation Velocity Velocity Velocity Velocity Velocity Velocity Step Gate Step Gate Step Gate Step Gate Step Gate Step Gate UHR position

AB1A, AB1A-3U AB2, AB5, AB5-3U AB4 regular low regular low regular low cable capacitance cable capacitance cable capacitance cable cable cable

1HR element 0.5 to 5 0.5 to 8 0.5 to 10 0.5 to 20 0.5 to 10 0.5 to 20

2HR elements 0.5 to 5 0.5 to 8 0.5 to 10 0.5 to 20 0.5 to 10 0.5 to 20

4 HR elements 0.5 to 10 0.5 to 15 0.5 to 10 0.5 to 20 0.5 to 10 0.5 to 20

8 HR elements 0.5 to 10 0.5 to 15 0.5 to 10 0.5 to 20 NA NA

16 HR elements 0.5 to 10 0.5 to 15 0.5 to 10 0.5 to 20 NA NA

32 HR elements 0.5 to 10 0.5 to 15 0.5 to 10 (AB5) 0.5 to 20 (AB5) NA NA

1 ST element 3 3 NA 0.5 to 10 NA 0.5 to 10m

2 LS elements 0.5 to 5 NA NA NA NA NA

4 LS elements 0.5 to 5 NA NA NA NA NA

8 LS elements 0.5 to 5 NA NA NA NA NA

20 AB1A Amplifiers

The AB1A amplifier is a single axis digital driver that can run one or multiple Nanomotion motors in parallel. While operating in a closed loop servo system, the driver works as a velocity amplifier, receiving a +/- 10 volt analog command from the controller. The controller signal translates into AC voltage at 39.6 kHz to run the motor. In an open loop mode the amplifier can receive a signal from an external joystick, providing motion in a continuous or stepping mode.

Features • Digital Drive Handles Up to 32 Elements • Available in Eurocard 3µ Format • +/- 10V Input from Servo Control • Joystick Input for Open Loop Operation • 2 Optically Isolated Limits • Card Interface is 48 Pin 3 Row Connector

Amplifier Specifications driving capability: up to 32 elements (4 HR8 motors) Analog Control Input

input voltage range: +/-10V

input impedance: 10 KΩ input low pass filter: 2.7 KHz input sampling resolution: 10 bits

DC POWER SUPPLY

543 2 1 2X LEDS BLOCK TERMINAL MALE MODE GND 15 InMode 16 DC/DC

CONTROLLER Vin+ 1 Vout+ Twisted And AMPLIFIER Shielded Cable Vin- 14 Vout- CIRCUIT Shield

FAULT 3 STATUS ENABLE 24 ENABLE D D T T Y PLANT Y P Emergancy Stop 12 P E E Right Limit 22 2 2 LC Left Limit 10 5 5 CIRCUIT GND 4 P P I I N N M F

E D TYPE 9 PIN MALE A M L A E D TYPE 9 PIN FEMALE L E G P M G U D C H P O O N N . D A D D 345W M 1627 I S S N Environmental operating temperature: 0 to 50˚ C E storage temperature: -40˚C to +70˚C NANOMOTION humidity: 0 to 80% MOTOR

Electrical power input: +48Vdc±5% max motor output: 270 to 280Vrms power consumption w/o load: +48Vdc/0.125A power consumption with max load: +48Vdc/6.5Amax E 21 + G V V 4 N I I N N N 8 A D + - V B L E Amplifiers AB2

The AB2 amplifier combines the normal Velocity mode of the AB1A amplifier, for servo operation, with the DC mode, for Ultra-High resolution positioning. The DC mode treats the motor as a traditional piezo actuator, providing the ability to make discrete moves at the 1 nanometer level. The DC mode uses the same ±10v analog signal from the controller output and translates it to a ±300 nanometer position move capability, with 1 nanometer resolution. This function can be operated in an open loop or closed loop manner. The switching between the Velocity mode and DC mode is done seamlessly through a discrete input signal.

Features • Ultra High Resolution Capability using DC Mode • Digital Drive Handles 16 HR Motor Elements • Requires 24Vdc Supply Input • Cable Length up to 20m • Over Current and Over Voltage Protection

Environmental

operating temperature: 0 to 50˚ C storage: -40˚C to +70˚C humidity: up to to 80%, non condensing

Electrical

power supply input: +24 Vdc ±5% (stabilized) max motor output voltage: 280 Vrms power consumption without load: +24 Vdc/200 mA power consumption with max load: +24 Vdc/5A

22 AB4 Amplifiers

The AB4 amplifier offers the same performance as the AB1A, in a reduced package. The AB4 operates off of 12vdc supply input and can drive up to 4 HR motor elements total, either (1) 4 element HR motor, or multiple HR motors totaling 4 elements. The AB4 is the smallest standard motor amplifier and is provided with a 26-pin rear connector (26 pin, two row header). This connector provides access to all functionality (motor, power inputs, limits, and I/O functions), making it easy to integrate. Additional motor and power inputs are available with standard connections on the front.

Features • Exceptionally compact mounting • 12Vdc supply input • Drives up to 4 HR motor elements • Cable length up to 20m • Over current and over voltage protection

Environmental

operating temperature: 0 to 50˚ C storage: -40˚C to +70˚C humidity: up to to 80%, non condensing

Electrical

power supply input: +12 Vdc ±5% (stabilized) max motor output voltage: 280 Vrms power consumption without load: +12 Vdc/300 mA power consumption with max load: +12 Vdc/3.5A

23 Amplifiers AB5

The AB5 amplifier revolutionizes the driving concept for Nanomotion ceramic servo motors, enabling a frictionless and smooth motion throughout the entire velocity range. At stop the inherent brake is activated, maintaining the many advantages of brake at power off. Consequently the control scheme is simplified, facilitating the use of any low cost servo controller to achieve outstanding performance. As a result the whole range of controllers in the market place can be used with Nanomotion motors, as well as generic control algorithms. No custom algorithm is needed to be used with Nanomotion motors. In addition, exceptional control performance is achieved at servo systems, showing robust performance at various working conditions.

Features • Compatible with any Servo Controller • Linear Velocity Response at Full Command Range • Brake On or Brake Off Upon Command • Drives Up to 32 HR Motor Elements • 24 Vdc Supply Input

Motor Performance Specifications

driving capability: up to 32 HR motor elements

Analog Control Input input voltage range: ±10V input impedance: 10KΩ input low pass filter: 2.7 Khz input sampling resolution: 10 bits + direction

Environmental

operating temperature: 0 to 50˚ C storage: -40˚C to +70˚C humidity: up to to 80%, non condensing Electrical

power input: +24 Vdc ±5% (stabilized) power consumption without load: 24 Vdc/200 mA power consumption with max load: 24 Vdc/10A

24 Single Axis Drive Control SB1291 NM

The SB1291 NM combines a single axis AB1A amplifier combined with a single axis, high performance, digital servo control card. This offers complete stand alone operation in a compact package with a high performance controller that is easy to use. The SB1291 NM comes complete with user interface software for the ease of application development and omotion Contact Nan the ability to store preset programs. s Version for Dual Axi

Features • Digital control with velocity and position 1 0 loop sampling at 20kHz sampling rate 8 • Programmable operation for motion in position, velocity, manual joystick, and Master-Slave modes • RS232 communication interface

• Comprehensive C Libraries for DOS and 15 most Windows configurations

• Drive control can be provided with AB2 11 5 8 9 . for nanometer positioning 0 7 2 . 0 . 5

205.5 Dimensions & Specifications

communication: RS232. Baud Rate up to 57600 encoder: Two channel, +5VDC TTL compatible, 4MHz max, optically isolated analog input: 1 input ±10V, 12 bit resolution safety input: End of travel limits & E Stop, optically isolated inputs/outputs: (8) optically isolated inputs 5 or 24V (8) optically isolated outputs 5 or 24V 50mamp per output electrical input: 48Vdc ±5%

25 Design

Technical Guidelines for Using Nanomotion Motors

Nanomotion motors provide direct drive performance for linear or rotary motion. Motion is transmitted through the contact of a finger pushing on a drive strip. The ‘friction pair’ is specifically selected to yield optimum performance with minimal wear, currently achieving 40,000 hours of operation and working in environments up to Class 10 clean rooms. To yield the maximum performance benefits of Nanomotion’s ceramic servo motors, it is important to understand the operating characteristics of the piezo ceramic elements and the impact that it has on the mechanical structure. As a direct drive, the Nanomotion motor is sized by the basic principles of F=MA (plus the resistance of the bearing structure & the force of gravity if on an incline or vertical). While this is a basic sizing method, one must calculate the maximum speed and force necessary to meet the application performance requirements and size the motor properly, operating within the defined EOP (Envelop of Performance).

26 Design

Managing Normal Force and Stage Stiffness

In addition to the motor sizing, Nanomotion’s motor exerts a normal force into the bearing structure in the direction that the motor is mounted and preloaded. This normal force is 5 times the driving force of the motor. Because of this force, it is optimum if the motor can be mounted on the centerline of the bearing structure. Nanomotion motors are in successful operation with: • Crossed roller linear and rotary bearings • Recirculating linear guides & shaft bearings. • Linear and rotary air bearings. • Angular contact & radial rotary bearings A key design criteria is the bearing stiffness and preload, to assure successful operation of the motor. A good target value is 40N/micron of bearing stiffness. For less precise applications that do not require 20,000 hours of life, a lower stiffness number is acceptable. For more precise applications, operating in production environments, a minimum stiffness of 50N/micron should be targeted. These stiffness values are easily achieved with conventional bearings on the market today. For example, an HR1 motor provides 1 lb (4.4N) of thrust, and will create 5 lbs (22N) force into the bearing structure, perpendicular to motion. In addition to the normal force, there is the potential for higher acceleration forces that are placed in the same direction, impacting the bearing. Acceleration forces can be 2 to 3 times greater than the normal force. The most common linear bearings used in precision motion are crossed rollers and linear recirculating guides. While ball bushings and air bearings are acceptable technologies, they are in the minority. Rotary applications with Nanomotion motors are quite common as the direct drive motor can eliminate worm gears, belts and other rotary transmissions. In rotary applications there is design flexibility to apply the motor axially, driving on the flat surface of a disk, or radially, driving on the circumference of a ring.

27 Design

Rotary Bearings

Typical Axial Mounting Typical Radial Mounting

As with linear bearings, the bearing stiffness is critical to the performance of the Nanomotion motor. Moreover, a single motor applied axially will induce a moment load on the bearing whereas a single motor applied radially will induce a side load on the bearing structure. In many rotary applications it is appropriate to consider the use of two smaller motors, mounted 180º apart to maintain a balanced load on the bearing. Mounting two motors that are not 180º apart, with a slightly different angle, can also help to maintain a preload on the bearing and have a positive impact. In evaluating rotary bearings, there are 3 common types that are utilized in rotary stages: • Rotary crossed roller • Angular contact • Deep groove radial While the same stiffness criteria apply to rotary applications, 50N/µm, each bearing offers different operating characteristics. The selected bearing should be fully evaluated for its specific load rating and stiffness in the appropriate directions.

28 Design

Mechanical Mounting Tolerance

The Nanomotion motor is constructed with a spring behind each motor element. This spring is designed to provide a preload (normal force) as well as allow for mounting inaccuracies. The spring can compensate for ‘out of parallel’ conditions up to 50µm (.002”). All of the bearing types discussed provide linear accuracies well within these tolerances, but the machined mounting surfaces will contribute to linear accuracy. It should, however, be achievable to control linear straightness to 50µm in a precision motion system. For systems that require ultrahigh resolution (below 100nm) and smooth constant velocity, it is important to maintain tighter tolerances on the straightness of motion, to optimize the servo performance.

Mechanical Assembly Procedures and Safeguards

WARNING: NEVER OPERATE THE MOTOR UN-LOADED, WITHOUT PRELOAD AGAINST A NANOMOTION DRIVE STRIP. Proper mounting procedures are described in each motor manual, with preload being set by a shim (provided with ST, HR1 & HR2 motors), or a cam (internal to the HR4 & HR8 motors). The motor should be mounted perpendicular to travel, with the arrows on the motor label indicating the direction of travel. In applications utilizing the HR4 & HR8 motors, it is important to avoid compressing the motor against the ceramic strip, prior to engaging the cams. This additional force will result in a higher that expected preload. If there is a concern about controlling the force during mounting it is acceptable to use a shim, when the fingertips are in a retracted position, up to 15µm thickness. This will assure that the motor elements are not ‘over compressed’ against the drive strip. Always make sure the mechanical travel does not permit the motor fingers to become disengaged from the ceramic drive strip. The fingertips should remain in a compressed state at all times. Most Nanomotion provided drive strips have a 3M acrylic tape bonded to them. Nanomotion can provide the specification on the tape for those customers who require it. When applying the ceramic with the tape, make sure there are no air bubbles and the ceramic strip is applied to a clean surface. After adhering the drive strip, secure it with two drops of epoxy, per the instructions in the manual, to prevent any motion in sheer.

29 Design

Sizing Example:

Requirements: Total moving mass (moving part of stage plus payload), M = 1Kg Travel, X = 0.01 m (horizontal orientation) Total move time, T = 0.1 sec (not including settling time) Motion profile: trapezoidal, accelerate for 1/3 of the total time, move a constant velocity for 1/3 of the total time, decelerate for 1/3 of the total time Calculate: Acceleration / deceleration, A = 4.5 * X / T2 = 1 * 0.01 / 0.12 = 4.5 m/sec2 Maximum velocity, V = 1.5 * X / T = 1.5 * 0.01 / 0.1 = 0.15 m/sec Acceleration force, Fa = M * A = 1 * 4.5 = 4.5 N Add additional forces (bearing friction, load force, gravity/inclination, etc.) to obtain total force Ft. Let’s neglect in this example. Plot the point {Ft,V} on the Force/Velocity curves. See figure below. Select the motor whose curve is above the {Ft,V} point. In this case it would be an HR4.

Force vs Velocity, HR Series

35 ] 30 Force/Velocity N

[ Nodal Point 25 e

c 20 Linear (HR1) r

o 15 Linear (HR2) F 10 Linear (HR8) 5 Linear (HR4) 0 0 0.1 0.2 0.3 Velocity [m/sec]

30 Design

Settling Time

The achievable settling time is mainly dictated by the damping of the motor and the natural frequency of the system. A typical number of three cycles is required for the motor damping to damp the system vibration along the motion axis, so the settling time will be roughly according to the following formula: Ts = 3/Fr Where Fr is the natural frequency of the system, and is calculated according to the following formula:

Where: KFr=1√- stiffness K of the motor in Newton/meter 2π m m - mass of the moving part in Kg If the desired natural frequency is higher than the one calculated for a given configuration, adding another motor in parallel or in tandem will increase the system’s natural frequency due to the increased stiffness. The combined stiffness of several motors is the algebraic sum of the stiffness of the individual motors. One should recalculate the natural frequency using the combined stiffness of the motors. It is worthwhile to note that the effective motor stiffness increases under close loop operation. Driving vertically with a motor that actuates based on friction requires specific consideration to the static load, separate from the dynamic force. As a rule of thumb, each 4.4N element can drive 120 grams vertically. Beyond this a counter balance should be considered. This can be in the form of a spring, a continuous force gas spring, or opposing weight.

Electrical Interface

Nanomotion’s motors run at resonant frequency and are sensitive to the capacitance of the electrical circuit. Changing cable lengths will affect the total capacitance. There are guidelines provided in Nanomotion’s catalog and manuals as to the acceptable cable lengths. In addition to the cable length from the motor to the amplifier, caution should be used if third party cable is used. Nanomotion provides motors with specific low capacitance cable at: Standard motors: 64pF/foot Vacuum motors: 13pF/foot If the capacitance of the electrical circuit is too high, the full performance of the motor will not be realized. Nanomotion can provide guidelines for testing capacitance.

31 Design

Quick Reference– Getting Started

Verify proper stage mechanics with preloaded bearings and appropriate stiffness. Follow Nanomotion’s motor mounting guidelines for preloading and motor orientation with respect to travel & verify that ceramic strip has two drops of epoxy. Connect the ground wire from the motor to the amplifier. Verify the connection (jumper) between power supply return and the controller’s analog ground. Condition the motor before tuning, per Motor Installation Manual (Always recondition the motor each time it is disengaged from the ceramic strip). After conditioning, wipe the ceramic with a clean cloth and IP alcohol without disengaging the motor. Use “Abort on Position Error” (or other safety mechanism) and appropriate torque limit during initial integration and conditioning. Do not exceed 5v and 50% duty cycle. Avoid prolonged operation in an unstable condition (excessive vibration) during tuning process. Consult with Nanomotion with any questions during the set up process.

• Do not operate the motor in an un-loaded (un-mounted) condition • Do not exceed the duty cycle limits when operating the motor (see Motor Installation Manual) • Do not allow the motor tips to leave contact with the ceramic strip during operation (Use mechanical hard stops) • Do not remove the cover of the motor (High Voltage Inside) • Do not immerse the motor in any liquids

32 Ordering Guide

Motors HR 1- 1- S- 3

operating motor type # of elements configuration cable length environment

HR 1 1 S = Standard -0 for U DM (DuraMotor) 2 V = Vacuum (10-7) (500mm flying leads) LS 4 N = Non-Magnetic 3= 3 meters ST 8 VN = Vac & Non Mag 10= 10 meters MM U = Ultrahigh (custom cable lengths Vacuum (10-10) are available, contact factory)

Amplifiers AB5- HR- E4-

amplifier type motor type # of elements

AB1A-2a HR (HR or DM) E1 ABIA-3U LS E2 AB2 ST E4 AB4 MM E8 AB5 E16 AB5-3U E32

Ceramics CS 20- 3- 200

drive surface strip strip width strip length type thickness

CS (ceramic strips) 10 (10mm wide) 1.5 (1.5mm thick) 050 (50mm) DS (DuraStrip) 15 (15mm wide) 3 (2.7mm thick) 100 (100mm) CCS (ceramic coated steel) 20 (20mm wide) 5 (5.2mm thick) 150 (150mm) 25 (25mm wide) -for CCS only 200 (200mm) 250 (250mm) 300 (300mm) ring type ring outside diameter - inside diameter - ring height 350 (350mm) 400 (400mm) 500 (500mm) CR (ceramic rings) 12-9-5 (12mm outside diameter) 600 (600mm) 40-32-10 (40mm outside diameter) 60-40-10 (60mm outside diameter) 80-60-10 (80mm outside diameter) 100-80-10 (100mm outside diameter)

disk type disk outside diameter - inside diameter - disk thickness

CD (ceramic disks) 146-114-1.5 (146mm outside diameter) for non-standard 192-60-5 (192mm outside diameter) strip/ring/disk sizes, please contact the 192-150-5 (192mm outside diameter) factory.

A Johnson Electric Company

Nanomotion Ltd. Worldwide Headquarters Mordot HaCarmel Industrial Park Yokneam 20692 Israel t: (972)4-9590862 f: (972)4-9590995 e: [email protected]

Nanomotion Inc. U.S. Headquarters 1 Comac Loop, Suite 14B2 Ronkonkoma, New York 11779 t: (800) 821-6266 t: (631) 585-3000 f: (631) 585-1947 e: [email protected]

Nanomotion Inc. West Coast Office 2570 North First St. Suite 200 San Jose, CA 95131 t: (408) 273-4562 f: (408) 273-4662 e: [email protected]