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Piezoelectric Motor Using In-Plane Orthogonal Resonance Modes of an Octagonal Plate

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Piezoelectric Motor Using In-Plane Orthogonal Resonance Modes of an Octagonal Plate actuators Article Piezoelectric Motor Using In-Plane Orthogonal Resonance Modes of an Octagonal Plate Karl Spanner and Burhanettin Koc * Physik Instrumente GmbH & Co. KG, Auf der Roemerstrasse, 1, 76228 Karlsruhe, Germany; [email protected] * Correspondence: [email protected]; Tel.: +49-721-4846-2416 Received: 26 September 2017; Accepted: 4 December 2017; Published: 6 January 2018 Abstract: Piezoelectric motors use the inverse piezoelectric effect, where microscopically small periodical displacements are transferred to continuous or stepping rotary or linear movements through frictional coupling between a displacement generator (stator) and a moving (slider) element. Although many piezoelectric motor designs have various drive and operating principles, microscopic displacements at the interface of a stator and a slider can have two components: tangential and normal. The displacement in the tangential direction has a corresponding force working against the friction force. The function of the displacement in the normal direction is to increase or decrease friction force between a stator and a slider. Simply, the generated force alters the friction force due to a displacement in the normal direction, and the force creates movement due to a displacement in the tangential direction. In this paper, we first describe how the two types of microscopic tangential and normal displacements at the interface are combined in the structures of different piezoelectric motors. We then present a new resonance-drive type piezoelectric motor, where an octagonal plate, with two eyelets in the middle of the two main surfaces, is used as the stator. Metallization electrodes divide top and bottom surfaces into two equal regions orthogonally, and the two driving signals are applied between the surfaces of the top and the bottom electrodes. By controlling the magnitude, frequency and phase shift of the driving signals, microscopic tangential and normal displacements in almost any form can be generated. Independently controlled microscopic tangential and normal displacements at the interface of the stator and the slider make the motor have lower speed–control input (driving voltage) nonlinearity. A test linear motor was built by using an octagonal piezoelectric plate. It has a length of 25.0 mm (the distance between any of two parallel side surfaces) and a thickness of 3.0 mm, which can produce an output force of 20 N. Keywords: piezoelectric; motor; friction 1. Introduction Piezoelectric motors are the main candidates for use in small mechanical systems [1–16]. The advantages compared to electromagnetic ones with the same size and weight include high power density, insensitivity towards a magnetic field, silent, direct drive without a gear mechanism, a quick response without backlash, maintaining a position with no energy consumption and a high dynamic range of velocity with high positioning accuracy [12–16]. According to functional principles, construction, and drive specifications, piezoelectric motors can be categorized into three groups: piezo-walk-drive, inertia-drive and resonance-drive [6]. 1.1. Piezo-Walk-Drive In a piezo-walk-drive mechanism, there are at least two sets of actuator arrangements embedded in the structure and they operate one after the other. The main reason that these motors are called piezo-walk-drive is because the moving sequences in these motors resemble two or four feed walking actions. In these motors, a step motion is realized in two ways. Actuators 2018, 7, 2; doi:10.3390/act7010002 www.mdpi.com/journal/actuators Actuators 2018, 7, 2 2 of 15 1.1. Piezo-Walk-Drive In a piezo-walk-drive mechanism, there are at least two sets of actuator arrangements embedded Actuatorsin the structure2018, 7, 2 and they operate one after the other. The main reason that these motors are called2 of 14 piezo-walk-drive is because the moving sequences in these motors resemble two or four feed walking actions. In these motors, a step motion is realized in two ways. InIn oneone way,way, therethere are are normal normal and and tangential tangential microscopic microscopic displacements displacements to to the the moving moving direction direction of aof sliding a sliding element. element. Each Each actuator actuator in a in motor a motor that generatesthat generates a microscopic a microscopic displacement displacement has one has single one task,single which task, iswhich either is to either perform to perform a “clamp” a or“clamp” “move” or action. “move” If anaction. actuator If an has actuator the task has of performingthe task of aperforming “clamp” action, a “clamp” the displacement action, the isdisplacement normal to the is slidernormal moving to the direction slider moving and the direction ultimate functionand the ofultimate these actuators function isof tothese increase actuators or decrease is to increase normal or force decrease and thus, normal to hold force friction and thus, force. to Ifhold an actuator friction isforce. required If an to actuator perform is a “move”required action, to perform the displacement a “move” generatedaction, the by displacement the actuator isgenerated tangential by to the movingactuator direction is tangential of the to sliding the moving element. direction Expansion of the and sliding shrinkage element. of this Expansion actuator and creates shrinkage a microscopic of this movementactuator creates of the a slider.microscopic After the movement structure of proposed the slider. by After Brisbane the structure in 1965 [17 proposed], some other by Brisbane structures in operated1965 [17], on some the basisother of structures the piezo-walk-drive operated on principal the basis [18 of– 21the]. Typically,piezo-walk-drive these structures principal consist [18–21]. of threeTypically, actuators, these wherestructures two ofconsist them of are three responsible actuators, for where the clamping two of andthem one are is responsible responsible for the movingclamping action. and one In theseis responsible motors, thefor requiredthe moving displacements action. In these in the motors, normal the and required tangential displacements directions, within the respect normal to aand sliding tangential element, directions, can be generated with re byspect actuators to a sliding that use element, longitudinal, can be shear, generated transverse, by andactuators planar that coupling use longitudinal, of piezoelectric shear, materials. transverse, In the and early planar structures, coupling the of piezoelectric piezoelectric elements materials. used In inthe the early piezo-drive structures, type the motors piezoelect wereric in elements bulk forms, used but in inthe many piezo-drive of the commercializedtype motors were structures, in bulk theforms, actuators but in aremany manufactured of the commercialized in multilayer structures, forms to generatethe actuators sufficient are manufactured displacement atin amultilayer relatively low-drivingforms to generate voltage. sufficient displacement at a relatively low-driving voltage. Assuming thatthat the the activation activation makes makes the the length, length or, the or diameter,the diameter, decrease decrease and release, and release, which causeswhich ancauses actuator an actuator to return to return to its restto its position, rest position, the motion the motion sequence sequence as seen as seen in Figure in Figure1 can 1 becan started be started by activatingby activating one one clamping clamping actuator actuator (A). When(A). When the moving the moving actuator actuator (C) is (C) also is activated, also activated, shrinkage shrinkage of the movingof the moving actuator actuator generates generates a half step. a half At step. this moment,At this moment, the clamping the clamping actuator actuator (A) is released (A) is soreleased that it canso that clamp it can and clamp maintain and the maintain holding the force. holding In the fo followingrce. In the step, following the second step, clamping the second actuator clamping (B) is activatedactuator (B) and is theactivated moving and actuator the moving (C) is released.actuator (C) When is released. the second When clamping the second actuator clamping (B) is released,actuator one(B) is motion released, sequence one motion is finished. sequence is finished. Figure 1. Motion sequences of a piezo-walk-drive motor proposed by Brisbane in 1965 [17]. Figure 1. Motion sequences of a piezo-walk-drive motor proposed by Brisbane in 1965 [17]. Later, we can see examples where clamping actuators are attached to the end of feeding actuators,Later, where we can at see least examples two identical where clampingsets are used actuators in each are motor attached structure to the end[22]. of Assuming feeding actuators, that the whereactivation at least makes two the identical length setsof an are actuator used in increase each motor and release, structure making [22]. Assuming an actuator that return the activation to its rest makesposition, the motion length sequence of an actuator of the increase piezo-walk-drive, and release, as makingseen in anFigure actuator 2, can return be started to its by rest activating position, motionclamping sequence actuators of (1C) the piezo-walk-drive, in the first set (step as 1) seen. A half in Figure step can2, can be bemade started when by the activating moving clamping actuators actuatorsin the first (1C) andin inthe thefirst second set (stepset (1F 1) .and A half 2F) stepare activated can be made (step when 2). At the this moving moment, actuators a pushing in the force first is and in the second set (1F and 2F) are activated (step 2). At this moment, a pushing force is generated by the moving actuators (1F) in the first set. When the clamping actuators (2C) in the second set are activated (step 3), all moving and clamping actuators are in an active state. The second half of the step is started by releasing the clamping actuators (1C) in the first set (step 4). After the moving actuators (1F Actuators 2018, 7, 2 3 of 15 generatedActuators 2018 by, 7 ,the 2 moving actuators (1F) in the first set. When the clamping actuators (2C) in3 ofthe 14 second set are activated (step 3), all moving and clamping actuators are in an active state.
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