P AUL SCHERRER INSTITUT

To reach PSI by public transport To find PSI by car

By Rail Via At Brugg AG railway station (railway line • Follow the signs to «Koblenz». from Zurich to Basle/Berne) take the bus • After «Lauffohr» turn left towards line Brugg–Villigen PSI–Böttstein–Döttingen. «/Villigen». Bus stop at Villigen PSI West. Travel time • After 300 m turn right towards «Villigen». approx. 20 minutes. • About 1 km after the village of «Villigen» Timetables: www.sbb.ch the PSI West area is located on the right hand side. By Air • At Flughafen Zürich (Zurich Airport, ZRH) Via Baden take the train at the SBB railway station • Follow the signs to «Koblenz». to Brugg AG. • After «Siggenthal Station» there are two • Get off in Brugg and take the bus roundabouts. At the second roundabout turn (see “By Rail”). left to PSI East area. Travel time approx. 75 minutes. • To reach the PSI West area, cross over the river Aare.

GPS Coordinates N 47° 32.317‘ E 008° 13.808‘ Inauguration of the from Koblenz / Waldshut (DE) Contact: Tegerfelden XIL-II beamline Böttstein Edith Meisel PSI East / psi forum PSI West PSI N Tel. +41 (0)56 310 28 14

AARE Würenlingen 5 km E-mail: [email protected]

Villigen Stilli Siggenthal Station November 5, 2010

Remigen

Lauffohr 14:00 – 17:00

LIMMAT Obersiggenthal PSI West, WBGB/019 Brugg

Windisch Baden AARE Hausen b. Brugg Baden West Exit REUSS A3 from Basel Baregg Wettingen Paul Scherrer Institut A3 A1 Exit Neuenhof 5232 Villigen PSI, Brugg Exit Exit A1 A1 from Zurich Tel. +41 (0)56 310 21 11 A1 from Bern Mägenwil Fax +41 (0)56 310 21 99 Exit www.psi.ch

Invitation Program

November 5, 2010 PSI West, WBGB/019

Mini-symposium – WBGB/019

Dear colleagues, 14:00 Coffee

You are cordially invited to the inauguration of the XIL-II beam- 14:10 Welcome by Joël Mesot (PSI) and Friso van der Veen (PSI) line of the Swiss Light Source (SLS), Paul Scherrer Institut (PSI). 14:30 Moore’s Law beyond 32 nm: Can lithography provide In the last years, PSI has pioneered Extreme UV Interference continued device scaling? Lithography (EUV-IL). This technique makes use of synchrotron- Dr. Todd R. Younkin, Intel Corporation generated EUV light at 13.5 nm wavelength and holographic 15:00 Two-dimensional functional carbon nanostructures gratings for the fabrication of periodic and high-resolution Prof. Dr. Armin Gölzhäuser, University of Bielefeld nanostructures over large areas with high throughput. With this method, a world record in resolution for photolithography 15:30 First decade of EUV-IL: Achievements and challenges was obtained by producing a grating with 11 nm half pitch. Dr. Harun Solak, Eulitha AG The first EUV-IL tool, named XIL-I, has been extensively used

Inauguration of the XIL-II beamline of the XIL-II Inauguration 16:00 XIL-II: A unique tool enabling the nanocale science beamline of the XIL-II Inauguration for both academic and industrial research as well as for com- and technology of tomorrow mercial applications. EUV-IL provides a unique test center for Dr. Yasin Ekinci, PSI semiconductor manufacturers and helps in the development of next generation computer processors and memory chips. At the same time, this novel technology offers new opportunities for Inauguration and visit of the beamline: SLS Hall academic research. 16:30 Official inauguration ceremony and visit of beamline Owing to the great success of XIL-I, which has been operat- ing as a branch of the SIS beamline, PSI has decided to make a 17:00 Apéro significant upgrade of this beamline. XIL-II is now an independ- ent beamline with its own light source and on-site clean-room facility and with more beam-time availability and better perfor- mance, ready to serve industrial and academic research.

We are looking forward to celebrating the inauguration with you. Inauguration of the XIL-II beamline November 5, 2010, PSI West, WBGB/019

REGISTRATION Paul Scherrer Institut Edith Meisel First Name / Name ODRA/102 5232 Villigen PSI Address Switzerland

Phone Phone: +41 (0)56 310 28 14 Fax: +41 (0)56 310 26 46 E-mail E-mail: [email protected] I will participate I will not participate I will arrive by private car Paul Scherrer Institut Edith Meisel ODRA/102 5232 Villigen PSI Switzerland