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Safety Data Sheet Material Name: TRIFLUORIDE, ADSORBED SDS ID: 0088 (JAPAN)

SECTION 1: Identification of the substance/mixture and of the company/undertaking

Material Name PHOSPHORUS TRIFLUORIDE, ADSORBED Details of the supplier of the safety data sheet Entegris, Inc.

129 Concord Road Building 2 Billerica, MA 01821 USA

Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America)

日本インテグリス株式会社 〒108-0073 東京都港区三田1-4-28 三田国際ビルヂング 電話番号: 03-5442-9718

緊急連絡先： 03-4520-9637(CHEMTREC) 電子メール: [email protected] Synonyms PHOSPHORUS ; TRIFLUOROPHOSPHINE Product Description This may be packaged in an SDS®, SAGE® or PDS ® gas source package. The package contains an adsorbent media which allows the gas to be stored at sub-atmospheric pressures. There is no possibility of contact or exposure to the adsorbent. This SDS addresses only the hazards of the gas. Recommended Use semi-conductor fabrication, general synthetic chemical Restrictions on Use None known.

SECTION 2: Hazards identification

GHS Classification Acute Toxicity - Inhalation - Gas - Category 1 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific target organ toxicity - Single exposure - Category 3 ( respiratory system ) Specific Target Organ Toxicity - Repeated Exposure - Category 1 ( bones ) GHS Label Elements Symbol(s)

______Page 1 of 10 Issue date: 2018-04-12 Revision 2.2 Print date: 2018-04-12

Safety Data Sheet Material Name: PHOSPHORUS TRIFLUORIDE, ADSORBED SDS ID: 0088 (JAPAN)

Signal word Danger Hazard statements H330 Fatal if inhaled. H314 Causes severe skin burns and eye damage. H335 May cause respiratory irritation. H372 Causes damage to organs through prolonged or repeated exposure. (bones ) Precautionary statements Prevention P260 Do not breathe gas. P264 Wash hands thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P284 Wear respiratory protection. P271 Use only outdoors or in a well-ventilated area. P270 Do not eat, drink or smoke when using this product. Response P314 Get medical advice/attention if you feel unwell. P310 Immediately call a CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P320 Specific treatment is urgent (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Storage P403 Store in a well-ventilated place. P233 Keep container tightly closed. P405 Store locked up. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations.

SECTION 3: Composition / information on ingredients

CAS Component Name Percent Japan ENCS Inventory Japan ISHL Inventory # #

PHOSPHORUS 7783-55-3 100 -- -- TRIFLUORIDE

SECTION 4: First aid measures ______Page 2 of 10 Issue date: 2018-04-12 Revision 2.2 Print date: 2018-04-12

Safety Data Sheet Material Name: PHOSPHORUS TRIFLUORIDE, ADSORBED SDS ID: 0088 (JAPAN)

Inhalation If gas is inhaled, move victim to fresh air. If breathing has stopped, give artificial respiration. If breathing is weak, give oxygen. Get medical attention without delay. Skin If this chemical contacts the skin, immediately flush the contaminated skin with soap and water. If clothing is contaminated, immediately remove and flush the skin with soap and water. Get medical attention immediately. Assume victim has also been exposed by inhalation. DO NOT USE HOT WATER. If warm water is not available, gently wrap affected parts in blankets. Get immediate medical attention. Eyes Immediately flush eyes with plenty of water for at least 60 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. Ingestion If swallowed, do NOT induce vomiting. Rinse mouth. Get medical attention immediately. Symptoms: Immediate Fatal if inhaled, respiratory tract burns, skin burns, eye burns, mucous membrane burns Symptoms: Delayed bone damage Note to Physicians For inhalation, consider oxygen. Avoid gastric lavage or emesis.

SECTION 5: Firefighting measures

Suitable extinguishing media regular dry chemical, carbon dioxide Large fires: Use water spray, fog or regular foam. Unsuitable Extinguishing Media None known. Specific hazards arising from the chemical Negligible fire hazard. Containers may rupture or explode if exposed to heat. Fire Fighting Measures Move container from fire area if it can be done without risk. Cool containers with water spray until well after the fire is out. Isolate area until gas has dispersed. Do not get water inside container. Damaged cylinders should be handled only by specialists. Fight fire from maximum distance or use unmanned hose holders or monitor nozzles. Cool containers with water spray until well after the fire is out. Do not direct water at source of leak or safety devices; icing may occur. Withdraw immediately if any discoloration of tanks occurs due to fire. Keep unnecessary people away, isolate hazard area and deny entry. Use extinguishing agents appropriate for surrounding fire. Apply water from a protected location or from a safe distance. Avoid inhalation of material or combustion by-products. Stay upwind and keep out of low areas. Combustion fluorinated compounds, oxides of phosphorus Special Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure.

SECTION 6: Accidental release measures

Personal precautions Wear personal protective clothing and equipment. Environmental precautions Avoid release to the environment. ______Page 3 of 10 Issue date: 2018-04-12 Revision 2.2 Print date: 2018-04-12

Safety Data Sheet Material Name: PHOSPHORUS TRIFLUORIDE, ADSORBED SDS ID: 0088 (JAPAN)

Methods and Materials for Containment and Cleaning Up Fully encapsulating, vapor protective clothing should be worn for spills and leaks with no fire. Do not touch or walk through spilled material. Stop leak if possible without personal risk. Reduce vapors with water spray. If possible, turn leaking containers so that gas escapes rather than liquid. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. Do not direct water at spill or source of leak. Isolate area until gas has dispersed. Use appropriate protective equipment including self- contained breathing apparatus. Be certain to flush lines and enclosures with inert gas before repairing.

SECTION 7: Handling and storage

Handling Procedures Do not breathe gas. Wash hands thoroughly after handling. Wear protective gloves/clothing and eye/face protection. Wear respiratory protection. Use only outdoors or in a well-ventilated area. Do not eat, drink, or smoke when using this product. Handle this material only in a sealed, purged system. Do not heat cylinder by any means to increase discharge rate of product from the cylinder. In order to maintain the subatmospheric (<760 Torr) package, SDS cylinder temperature should not exceed 24 C. If subject to temperature greater than 24 C container may become pressurized which increases the risk of leakage and possible exposure to toxic gas. Storage Procedures Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store and handle in accordance with all current regulations and standards. Protect from physical damage. Store in a cool, dry, well ventilated area of non-combustible construction. Keep away from cylinders of oxygen or other highly oxidizing or flammable materials. Ship and store cylinders with outlet plug in place. Avoid contact with water or moisture. Keep separated from incompatible substances. Incompatibilities amines, bases, halogens, oxidizing materials

SECTION 8: Exposure controls/personal protection

Component Exposure Limits PHOSPHORUS TRIFLUORIDE 7783-55-3

ACGIH: 2.5 mg/m3 TWA as F (related to ) ACGIH - Threshold Limit Values - Biological Exposure Indices (BEI) PHOSPHORUS TRIFLUORIDE (7783-55-3) 2 mg/l Medium: urine Time: prior to shift Parameter: Fluoride (background, nonspecific ); 3 mg/l Medium: urine Time: end of shift Parameter: Fluoride (background, nonspecific ) (related to Fluorides) Engineering controls Provide local exhaust or process enclosure ventilation system. Ensure compliance with applicable exposure limits. Eye protection Wear splash resistant safety goggles with a faceshield. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. Body protection For the gas: Wear appropriate chemical resistant clothing. For the liquid: Wear appropriate protective, cold insulating clothing. Hand protection Wear insulated gloves. Respiratory Protection ______Page 4 of 10 Issue date: 2018-04-12 Revision 2.2 Print date: 2018-04-12

Safety Data Sheet Material Name: PHOSPHORUS TRIFLUORIDE, ADSORBED SDS ID: 0088 (JAPAN)

Respirators depend on exposure level. SCBA with full face piece recommended during change outs and available in case of emergency.

SECTION 9: Physical and chemical properties

Appearance colorless gas Physical State gas colorless (fumes white Odor Not available Color smoke in open air)

Odor Threshold Not available pH (Strong acid gas ) -152 °C Boiling Point -101.2 °C

Boiling Point Not available Freezing point Not available Range Flammability (solid, Evaporation Rate Not available Non-Flammable gas) Autoignition Not available Flash Point (Non-flammable ) Temperature Lower Explosive Decomposition Not available Not available Limit temperature Upper Explosive Not available Vapor Pressure <760 mmHg @ 21 °C Limit

Vapor Density Specific Gravity 3.03 @25 °C Not available (air=1) (water=1) Partition coefficient: n- Water Solubility (Reacts ) Not available octanol/water 0.01871 cP @ Viscosity Kinematic viscosity Not available 25 °C

Solubility (Other) Not available Density 0.23 lbs/ft3 Physical Form gas Molecular Formula P-F3 Molecular Weight 87.97

SECTION 10: Stability and reactivity

Reactivity May react on contact with water. Releases toxic and/or corrosive . Stability May react on contact with water. Releases toxic and/or corrosive gases. Possibility of hazardous reactions Will not polymerize. Conditions to avoid

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Safety Data Sheet Material Name: PHOSPHORUS TRIFLUORIDE, ADSORBED SDS ID: 0088 (JAPAN)

Minimize contact with material. Avoid inhalation of material or combustion by-products. Containers may rupture or explode if exposed to heat. Avoid contact with water or moisture. Incompatible materials amines, bases, halogens, oxidizing materials Hazardous decomposition products fluorinated compounds, oxides of phosphorus Water or Moisture , oxides of phosphorus, halogenated compounds

SECTION 11: Toxicological information

Component Analysis - LD50/LC50 The components of this material have been reviewed in various sources and no selected endpoints have been identified. Acute Toxicity Estimate No data available. Immediate Effects Fatal if inhaled, respiratory tract burns, skin burns, eye burns, mucous membrane burns Delayed Effects bone damage Skin Corrosivity/Irritation Data skin burns Serious Eye Damage/Eye Irritation eye damage Respiratory Sensitization No data available Dermal Sensitization No data available Germ Cell Mutagenic Data No data available Component Carcinogenicity PHOSPHORUS TRIFLUORIDE 7783-55-3

ACGIH: A4 - Not Classifiable as a Human Carcinogen (related to Fluorides) Reproductive Effects Data No data available Tumorigenic Data No data available Specific Target Organ Toxicity - Single Exposure respiratory system Specific Target Organ Toxicity - Repeated Exposure skeletal system Aspiration hazard Not applicable. Medical Conditions Aggravated by Exposure respiratory disorders

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Safety Data Sheet Material Name: PHOSPHORUS TRIFLUORIDE, ADSORBED SDS ID: 0088 (JAPAN)

SECTION 12: Ecological information

Component Analysis - Aquatic Toxicity No LOLI ecotoxicity data are available for this product's components. Persistence and degradability No data available Bioaccumulative potential No data available Mobility in soil No data available Other adverse effects No information available for the product.

SECTION 13: Disposal considerations

Waste residues Wastes should be treated and disposed by professionals certified by the governor of the local government, and hazards of the waste must be communicated sufficiently. Disposal of Contaminated Packaging Dispose containers in accordance with local regulations. When containers are empty, make sure all residues must be cleaned before disposal.

SECTION 14: Transport information

International Regulations IATA Information: Shipping Name: ADSORBED GAS, TOXIC,CORROSIVE, N.O.S. , ( Contains: Phosphorus trifluoride ) Hazard Class: 2.3 UN#: UN3516 Required Label(s): 2.3, 8

ICAO Information: Shipping Name: ADSORBED GAS, TOXIC,CORROSIVE, N.O.S. , ( Contains: Phosphorus trifluoride ) Hazard Class: 2.3 UN#: UN3516 Forbidden by Air

IMDG Information: Shipping Name: ADSORBED GAS, TOXIC,CORROSIVE, N.O.S. , ( Contains: Phosphorus trifluoride ) Hazard Class: 2.3 UN#: UN3516 Required Label(s): 2.3, 8 International Bulk Chemical Code This material does not contain any chemicals required by the IBC Code to be identified as dangerous chemicals in bulk. Domestic Regulations Land transportation The product shall be packaged and shipped in accordance with Fire Service Act, Poisonous and/or Deleterious Substances Control Law. Water transportation ______Page 7 of 10 Issue date: 2018-04-12 Revision 2.2 Print date: 2018-04-12

Safety Data Sheet Material Name: PHOSPHORUS TRIFLUORIDE, ADSORBED SDS ID: 0088 (JAPAN)

The product shall be packaged and shipped in accordance with Ship Safety Act. Air transportation The product shall be packaged and shipped in accordance with Civil Aeronautic Act.

SECTION 15: Regulatory information

Japan Regulations Industrial Safety and Health Law The following substances are recognized as harmful according to the Enforcement Order of Industrial Safety and Health as administered by the Industrial Safety and Health Department in the Labor Standards Bureau of the ministry of Health, Labour and Welfare of Japan: PHOSPHORUS TRIFLUORIDE 7783-55-3

Harmful Substances Whose Names are to be indicated on label: >=1 % weight

SDS preparation is required: >=0.1 % weight Japan Designated Chemical Substances (PRTR Law) No components are subject to reporting requirements as specified by the ''Law Concerning Reporting, etc. of Releases to the Environment of Specific Chemical Substances and Promoting Improvements in Their Management'' and are not included in the "Pollutant Release and Transfer Register (PRTR)" of designated chemicals. Poisonous and Deleterious Substances Control Law Product: Poisonous Ingredients: Phosphorus trifluoride and its preparations Poisonous Order Article 1-6-13 Fire Service Law - Product Not applicable Civil Aeronautics Act Toxic gas Ship Safety Act Toxic gas Act on Port Regulations Toxic gas Japan Water Pollution Control Law PHOSPHORUS 7783-55-3 TRIFLUORIDE

allowable maximum limit 8 mg/L (discharged to non-marine ;as F ); Hazardous substance allowable maximum limit 15 mg/L (discharged to marine ;as F ) Soil Contamination Countermeasures Act PHOSPHORUS TRIFLUORIDE 7783-55-3

Designated Hazardous Substances: Present (related to Fluorides) Component Analysis - Inventory PHOSPHORUS TRIFLUORIDE (7783-55-3)

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Safety Data Sheet Material Name: PHOSPHORUS TRIFLUORIDE, ADSORBED SDS ID: 0088 (JAPAN)

KR KR JP - JP - KECI KECI KR - VN A C N M T US CA EU PH ENC ISH - - REAC (Draft U N Z X W S L Anne Anne H CCA ) x 1 x 2

Ye NS EI Ye Ye No No No No No No No No No No s L N s s

SECTION 16: Other information

NFPA Ratings Health: 3 Fire: 0 Reactivity: 1 Hazard Scale: 0 = Minimal 1 = Slight 2 = Moderate 3 = Serious 4 = Severe Summary of Changes 4/10/2018 - Update to Section(s) 2, 3, 5, 7, 11, 14, 15. Preparation Date 7/30/2015 Revision date 4/10/2018 Key / Legend ACGIH - American Conference of Governmental Industrial Hygienists; ADR - European Road Transport; AU - Australia; BOD - Biochemical Oxygen Demand; C - Celsius; CA - Canada; CA/MA/MN/NJ/PA - California/Massachusetts/Minnesota/New Jersey/Pennsylvania*; CAS - Chemical Abstracts Service; CERCLA - Comprehensive Environmental Response, Compensation, and Liability Act; CFR - Code of Federal Regulations (US); CLP - Classification, Labelling, and Packaging; CN - China; CPR - Controlled Products Regulations; DFG - Deutsche Forschungsgemeinschaft; DOT - Department of Transportation; DSD - Dangerous Substance Directive; DSL - Domestic Substances List; EC – European Commission; EEC - European Economic Community; EIN - European Inventory of (Existing Commercial Chemical Substances); EINECS - European Inventory of Existing Commercial Chemical Substances; ENCS - Japan Existing and New Chemical Substance Inventory; EPA - Environmental Protection Agency; EU - European Union; F - Fahrenheit; F - Background (for Venezuela Biological Exposure Indices); IARC - International Agency for Research on Cancer; IATA - International Air Transport Association; ICAO - International Civil Aviation Organization; IDL - Ingredient Disclosure List; IDLH - Immediately Dangerous to Life and Health; IMDG - International Maritime Dangerous Goods; ISHL - Japan Industrial Safety and Health Law; IUCLID - International Uniform Chemical Information Database; JP - Japan; Kow - Octanol/water partition coefficient; KR KECI Annex 1 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL); KR KECI Annex 2 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL) , KR - Korea; LD50/LC50 - Lethal Dose/ Lethal Concentration; LEL - Lower Explosive Limit; LLV - Level Limit Value; LOLI - List Of LIsts™ - ChemADVISOR’s Regulatory Database; MAK - Maximum Concentration Value in the Workplace; MEL - Maximum Exposure Limits; MX – Mexico; Ne- Non-specific; NFPA - National Fire Protection Agency; NIOSH - National Institute for Occupational Safety and Health; NJTSR - New Jersey Trade Secret Registry; Nq - Non-quantitative; NSL – Non-Domestic Substance List (Canada); NTP - National Toxicology Program; NZ - New Zealand; OSHA - Occupational Safety and Health Administration; PEL- Permissible Exposure Limit; PH - Philippines; RCRA - Resource Conservation and Recovery Act; REACH- Registration, Evaluation, Authorisation, and restriction of Chemicals; RID - European Rail Transport; SARA - Superfund Amendments and Reauthorization Act; Sc - Semi-quantitative; STEL - Short-term Exposure Limit; TCCA – Korea Toxic Chemicals Control Act; TDG -

______Page 9 of 10 Issue date: 2018-04-12 Revision 2.2 Print date: 2018-04-12

Safety Data Sheet Material Name: PHOSPHORUS TRIFLUORIDE, ADSORBED SDS ID: 0088 (JAPAN)

Transportation of Dangerous Goods; TLV - Threshold Limit Value; TSCA - Toxic Substances Control Act; TW – Taiwan; TWA - Time Weighted Average; UEL - Upper Explosive Limit; UN/NA - United Nations /North American; US - United States; VLE - Exposure Limit Value (Mexico); VN (Draft) - Vietnam (Draft); WHMIS - Workplace Hazardous Materials Information System (Canada). Other Information Disclaimer: The information in this (Material) Safety Data Sheet ("(M)SDS") is believed to be current and accurate as of the time of shipment of the product by Entegris. Entegris makes no warranties, express or implied, with respect to such information, including, without limitation, the implied warranties of merchantability and fitness for a particular purpose. Entegris assumes no liability for any loss or injury which may result from the use of the information contained in this (M)SDS. The chemical, physical and toxicological properties of the Entegris product described in this (M)SDS have not been thoroughly investigated. Users are responsible for exercising due care in using the Entegris product, and for conducting their own investigation to determine whether the product is fit for their particular purpose and suitable for their method of use or application. It is the user's responsibility to ensure that its activities comply with all applicable laws and regulations. Entegris is a registered trademark of Entegris Inc. or an affiliated company. © 2015 Entegris Inc. or affiliated company. All rights reserved.

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