Gas & Metal Compatibility Table

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Gas & Metal Compatibility Table Chemical Suggested Choosing a Mott High Purity Gas Filter: Gas FormulaFilter Media Choosing the best metal filter is not always a simple matter, Ammonia NH3 SS/Ni because in addition to easily identified variables (i.e., gas, pressure Argon Ar SS/Ni and flow), there are subjective considerations. Some gases are Arsenic Pentafluoride AsF5 SS/Ni Arsine AsH3 SS/Ni(1) compatible with more than one type of metal which allows Boron Trichloride BCI 3 H/Ni you a choice when selecting the right filter for your application. Boron Trifluoride BF 3 H/Ni Carbon Dioxide CO2 SS/Ni Carbon Monoxide CO SS The information contained in this table is a guideline for Carbon Tetrachloride CCl4 SS/Ni appropriate filter selection. Consultation with your gas Carbon Tetraflouride CF4 SS/Ni supplier is recommended to ensure Chlorine Cl2 H/Ni/SS Diborane B2H6 SS/Ni(1) gas compatibility. Because so many Dichlorosilane SiH2Cl2 H/Ni factors can affect the chemical resis- Diethyltelluride Te(C2H5)2 SS/Ni tance of a given product, you should Fluorine F2 H/Ni Freon 13 CClF3 SS/Ni pretest under your own operating Freon 14 Tetrafluoromethane CF SS/Ni 4 conditions. As with Freon 23 Trifluoromethane/Fluoro-form CHF 3 SS/Ni any chemical Freon 115 Chloropentafluoroethane C 2ClF5 SS/Ni Freon 116 Hexafluoroethane C 2F6 SS/Ni application, safety Germane GeH SS/Ni 4 precautions as noted Helium He SS/Ni on MSDS sheets Hydrogen H2 SS/Ni Hydrogen Bromide HBr H/Ni should be observed. Hydrogen Chloride HCl H/Ni Hydrogen Fluoride HF H/Ni Hydrogen Selenide H 2Se SS/Ni Mott engineers are available to recommend which filter best Hydrogen Sulfide H S SS/Ni 2 meets the criteria of your application. Toexpedite that selection Krypton Kr SS/Ni Methane CH4 SS/Ni process, you should have the following information available: Methyl Fluoride CH 3F SS/Ni Nitric Oxide NO SS/Ni Nitrogen N2 SS/Ni Type of Gas: Nitrogen Trifluoride NF3 H/Ni/SS Nitrous Oxide N 2O SS/Ni Gas Flow Rate: Neon Ne SS/Ni Oxygen O2 SS/Ni Ozone O3 H Inlet (or system)Pressure: PSIG Perflouropropane C3F8 SS/Ni Maximum allowable P: PSID Phosphine PH3 SS/Ni(1) ∆ Phosphorus Trifluoride PF 3 H/Ni Phosphorous Pentachloride PCl5 SS/Ni Inlet & Outlet Connections: Phosphorous Pentaflouride PF5 SS/Ni Silane SiH SS/Ni 4 Available Envelope/Footprint Dimensions (if known): Silicon Tetrachloride SiCl 4 H/Ni Silicon Tetrafluoride SiF 4 H/Ni Stibine SbH3 SS/Ni Sulfur Hexafluoride SF6 SS/Ni Tetraethyl Orthosilicate TEOS SS/Ni Trichlorosilane SiHCl3 H/Ni Trimethyl Borane (CH3)3B SS/Ni Trimethyl Phosphate (CH3)3PO4 SS/Ni Tungsten Hexafluoride WF 6 H/Ni Xenon Xe SS/Ni SS = 316L Stainless Steel Ni = Nickel H=Hastelloy C-22 (1) - Compatible to 25 degrees C and concentrations to 1000 ppm (2) - Compatible to 150 degrees C WWW.TEESING.COM | TEL +31 70 413 07 50.

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Ereztech LLC P3553 Safety Data Sheet
EREZTECH LLC 11555 Medlock Bridge Road, Suite 100, Johns Creek, GA 30097, USA T: +1.888.658.1221 F: 1.678.619.2020 E: [email protected] W: https://ereztech.com Section 1. Identification Product Name: Phosphorus trifluoride Product Type: Gas CAS Number: 7783-55-3 Product Number: P3553 Product Manufacturer: Ereztech LLC 11555 Medlock Bridge Road, Suite 100 Johns Creek, GA 30097 Product Information: (888) 658-1221 In Case of an Emergency: CHEMTREC: 1-800-424-9300 (USA); +1 703-527-3887 (International); CCN836180 *** Contact manufacturer for all non-emergency calls. Section 2. Hazards Identification Appearance/Odor: Colorless, odorless gas. Classification: ACUTE TOXICITY, ORAL - Category 4, H302 ACUTE TOXICITY, DERMAL - Category 4, H312 SKIN CORROSION/IRRITATION - Category 1B, H314 SERIOUS EYE DAMAGE/EYE IRRITATION - Category 2, H318 ACUTE TOXICITY, INHALATION - Category 1, H330 SPECIFIC TARGET ORGAN TOXICITY, SINGLE EXPOSURE; RESPIRATORY TRACT IRRITATION – Category 3, H335 GHS Label Elements Hazard Pictograms: Signal Word: DANGER Hazard Statements: H302: Harmful if swallowed. H312: Harmful in contact with skin. H314: Causes severe skin burns and eye damage. H318: Causes serious eye damage. H330: Fatal if inhaled. H335: May cause respiratory irritation. Ereztech P3553 Page 1 of 13 Revision: 1.00 Date of Issue: 11/27/2020 Phosphorus trifluoride Safety Data Sheet Section 2. Hazards Identification Precautionary Statements Prevention: P260: Do not breathe fumes/gases/mists/vapors/sprays. P264: Wash skin thoroughly after handling. P270: Do not eat, drink or smoke when using this product. P271: Use only outdoors or in a well-ventilated area. P280: Wear protective gloves/ protective clothing/ eye protection/ face protection.
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Safety Data Sheet Material Name: TUNGSTEN HEXAFLUORIDE SDS ID: MAT24560
Safety Data Sheet Material Name: TUNGSTEN HEXAFLUORIDE SDS ID: MAT24560 Section 1 - PRODUCT AND COMPANY IDENTIFICATION Material Name TUNGSTEN HEXAFLUORIDE Synonyms MTG MSDS 85; TUNGSTEN FLUORIDE (WF6), (OC-6-11)-; WOLFRAM HEXAFLUORIDE; HEXAFLUOROTUNGSTEN; TUNGSTEN(6+) FLUORIDE; TUNGSTEN HEXAFLUORIDE (WF6); TUNGSTEN VI FLUORIDE; TUNGSTEN FLUORIDE; UN 2196; F6W Chemical Family Fluoride, inorganic, metal Product Use Industrial and Specialty Gas Applications. Restrictions on Use None known. Details of the supplier of the safety data sheet MATHESON TRI-GAS, INC. 3 Mountainview Road Warren, NJ 07059 General Information: 1-800-416-2505 Emergency #: 1-800-424-9300 (CHEMTREC) Outside the US: 703-527-3887 (Call collect) Section 2 - HAZARDS IDENTIFICATION Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Gases Under Pressure - Liquefied gas Acute Toxicity - Inhalation - Gas - Category 2 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific target organ toxicity - Repeated exposure - Category 1 GHS Label Elements Symbol(s) Signal Word Danger Hazard Statement(s) Contains gas under pressure; may explode if heated. Fatal if inhaled. Causes severe skin burns and eye damage. Causes damage to organs through prolonged or repeated exposure. （bones ） Precautionary Statement(s) Prevention Do not breathe gas. Use only outdoors or in a well-ventilated area. In case of inadequate ventilation wear respiratory protection. ____________________________________________________________ Page 1 of 9 Issue date: 2021-07-07 Revision 7.0 Print date: 2021-07-07 Safety Data Sheet Material Name: TUNGSTEN HEXAFLUORIDE SDS ID: MAT24560 Do not eat, drink or smoke when using this product. Wear protective gloves/protective clothing/eye protection/face protection.
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Tungsten Hexafluoride WF6 Safety Data Sheet SDS P4855
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Chemical Chemical Hazard and Compatibility Information Acetic Acid HAZARDS & STORAGE: Corrosive and combustible liquid. Serious health hazard. Reacts with oxidizing and alkali materials. Keep above freezing point (62 degrees F) to avoid rupture of carboys and glass containers.. INCOMPATIBILITIES: 2-amino-ethanol, Acetaldehyde, Acetic anhydride, Acids, Alcohol, Amines, 2-Amino-ethanol, Ammonia, Ammonium nitrate, 5-Azidotetrazole, Bases, Bromine pentafluoride, Caustics (strong), Chlorosulfonic acid, Chromic Acid, Chromium trioxide, Chlorine trifluoride, Ethylene imine, Ethylene glycol, Ethylene diamine, Hydrogen cyanide, Hydrogen peroxide, Hydrogen sulfide, Hydroxyl compounds, Ketones, Nitric Acid, Oleum, Oxidizers (strong), P(OCN)3, Perchloric acid, Permanganates, Peroxides, Phenols, Phosphorus isocyanate, Phosphorus trichloride, Potassium hydroxide, Potassium permanganate, Potassium-tert-butoxide, Sodium hydroxide, Sodium peroxide, Sulfuric acid, n-Xylene. Acetone HAZARDS & STORAGE: Store in a cool, dry, well ventilated place. INCOMPATIBILITIES: Acids, Bromine trifluoride, Bromine, Bromoform, Carbon, Chloroform, Chromium oxide, Chromium trioxide, Chromyl chloride, Dioxygen difluoride, Fluorine oxide, Hydrogen peroxide, 2-Methyl-1,2-butadiene, NaOBr, Nitric acid, Nitrosyl chloride, Nitrosyl perchlorate, Nitryl perchlorate, NOCl, Oxidizing materials, Permonosulfuric acid, Peroxomonosulfuric acid, Potassium-tert-butoxide, Sulfur dichloride, Sulfuric acid, thio-Diglycol, Thiotrithiazyl perchlorate, Trichloromelamine, 2,4,6-Trichloro-1,3,5-triazine
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Gas Conversion Factor for 300 Series
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Gas and Metal Compatibility Guide
Gas & Metal Compatibility Table Chemical Suggested Choosing a Mott High Purity Gas Filter: Gas Formula Filter Media Choosing the best metal filter is not always a simple Ammonia NH 3 SS/Ni matter, because in addition to easily identified variables Argon Ar SS/Ni Arsenic Pentafluoride AsF 5 SS/Ni (i.e., gas, pressure and flow), there are subjective Arsine AsH 3 SS/Ni(1) considerations. Some gases are compatible with more Boron Trichloride BCI 3 Ni/H than one type of metal which allows you a choice when Boron Trifluoride BF 3 Ni/H Carbon Dioxide CO 2 SS/Ni selecting the right filter for your application. Carbon Monoxide * CO SS * Carbon Tetrachloride CCl 4 SS/Ni The information contained in this table is a guideline for Carbon Tetraflouride CF 4 SS/Ni appropriate filter selection. Consultation with your gas Chlorine Cl 2 SS/Ni/H Diborane B2H6 SS/Ni(1) supplier is recommended to ensure Dichlorosilane SiH 2Cl 2 Ni/H gas compatibility. Because so many Diethyltelluride C4H10 Te SS/Ni Fluorine F2 Ni/H factors can affect the chemical Freon 13 CClF 3 SS/Ni resistance of a given product, you Freon 14 Tetrafluoromethane CF 4 SS/Ni should pretest under your own Freon 23 Trifluoromethane/Fluoro-form CHF 3 SS/Ni Freon 115 Chloropentafluoroethane C2ClF 5 SS/Ni operating conditions. Freon 116 Hexafluoroethane C2F6 SS/Ni As with any Germane GeH 4 SS/Ni Helium He SS/Ni chemical Hydrogen H2 SS/Ni application, Hydrogen Bromide HBr Ni/H Hydrogen Chloride HCl Ni/H safety precautions Hydrogen Fluoride HF Ni/H as noted on MSDS Hydrogen Selenide H2Se SS/Ni sheets should be Hydrogen Sulfide H2S SS/Ni Krypton Kr SS/Ni observed .
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Comprehensive Electronics Solutions Praxair Offers a Full Suite of Electronics Gases, Equipment and Services
Comprehensive Electronics Solutions Praxair offers a full suite of electronics gases, equipment and services. Applications: Semiconductor From cost effectiveness to supply reliability to product quality – across North LEDs and Photonics America and around the world – Praxair is the gas supply partner with a proven Solar track record of success. Praxair’s experts are uniquely positioned to address the key needs of your operation, helping you remain competitive in today’s Nanotechnology highly complex, global electronics market. Electronics Assembly Product solutions with consistent performance Praxair is your industry-leading electronics solutions provider, backed by the dedicated service and industry know-how of the largest industrial gas company in North America. Whether its cylinder specialty gases for production processes, facility support gases from a microbulk system, or bulk or on-site delivery systems for large quantity demands, electronics manufacturing requires reliable, consistent products and service to get the job done right. Praxair’s complete suite of electronics gases, delivery equipment and services are designed to help you boost productivity and cut costs – crucial to your bottom line. Process gases that support your productivity Praxair’s global track record of supporting electronics producers in semiconductor, LED and electronics assembly markets among others is second to none. Our process gases maximize productivity, reduce process costs and enable new technologies. Count on Praxair for a reliable supply of gases that
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Phosphorus Compounds
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Low Temperature Chemical Vapor Deposition and Method for Depositing a Tungsten Silicide Film with Improved Uniformity and Reduced Fluorine Concentration
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AIGA 2005 Meeting
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