Gas & Metal Compatibility Table

Home , Phosphorus trifluoride, Tungsten hexafluoride

Chemical Suggested Choosing a Mott High Purity Gas Filter: Gas FormulaFilter Media Choosing the best metal filter is not always a simple matter,

Ammonia NH3 SS/Ni because in addition to easily identified variables (i.e., gas, pressure Argon Ar SS/Ni and flow), there are subjective considerations. Some gases are Arsenic Pentafluoride AsF5 SS/Ni

Arsine AsH3 SS/Ni(1) compatible with more than one type of metal which allows Boron Trichloride BCI 3 H/Ni you a choice when selecting the right filter for your application. Boron Trifluoride BF 3 H/Ni

Carbon Dioxide CO2 SS/Ni Carbon Monoxide CO SS The information contained in this table is a guideline for Carbon Tetrachloride CCl4 SS/Ni appropriate filter selection. Consultation with your gas Carbon Tetraflouride CF4 SS/Ni supplier is recommended to ensure Chlorine Cl2 H/Ni/SS

Diborane B2H6 SS/Ni(1) gas compatibility. Because so many Dichlorosilane SiH2Cl2 H/Ni factors can affect the chemical resis- Diethyltelluride Te(C2H5)2 SS/Ni tance of a given product, you should Fluorine F2 H/Ni Freon 13 CClF3 SS/Ni pretest under your own operating Freon 14 Tetrafluoromethane CF SS/Ni 4 conditions. As with Freon 23 Trifluoromethane/Fluoro-form CHF 3 SS/Ni any chemical Freon 115 Chloropentafluoroethane C 2ClF5 SS/Ni

Freon 116 Hexafluoroethane C 2F6 SS/Ni application, safety Germane GeH SS/Ni 4 precautions as noted Helium He SS/Ni on MSDS sheets Hydrogen H2 SS/Ni Hydrogen Bromide HBr H/Ni should be observed. Hydrogen Chloride HCl H/Ni Hydrogen Fluoride HF H/Ni

Hydrogen Selenide H 2Se SS/Ni Mott engineers are available to recommend which filter best Hydrogen Sulfide H S SS/Ni 2 meets the criteria of your application. Toexpedite that selection Krypton Kr SS/Ni

Methane CH4 SS/Ni process, you should have the following information available:

Methyl Fluoride CH 3F SS/Ni Nitric Oxide NO SS/Ni

Nitrogen N2 SS/Ni Type of Gas:

Nitrogen Trifluoride NF3 H/Ni/SS Nitrous Oxide N 2O SS/Ni Gas Flow Rate: Neon Ne SS/Ni

Oxygen O2 SS/Ni Ozone O3 H Inlet (or system)Pressure: PSIG Perflouropropane C3F8 SS/Ni Maximum allowable P: PSID Phosphine PH3 SS/Ni(1) ∆ Phosphorus Trifluoride PF 3 H/Ni Phosphorous Pentachloride PCl5 SS/Ni Inlet & Outlet Connections: Phosphorous Pentaflouride PF5 SS/Ni Silane SiH SS/Ni 4 Available Envelope/Footprint Dimensions (if known): Silicon Tetrachloride SiCl 4 H/Ni

Silicon Tetrafluoride SiF 4 H/Ni Stibine SbH3 SS/Ni

Sulfur Hexafluoride SF6 SS/Ni Tetraethyl Orthosilicate TEOS SS/Ni

Trichlorosilane SiHCl3 H/Ni Trimethyl Borane (CH3)3B SS/Ni Trimethyl Phosphate (CH3)3PO4 SS/Ni

Tungsten Hexafluoride WF 6 H/Ni Xenon Xe SS/Ni

SS = 316L Stainless Steel Ni = Nickel H=Hastelloy C-22 (1) - Compatible to 25 degrees C and concentrations to 1000 ppm (2) - Compatible to 150 degrees C