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1986 Nobel Prizes Development of Scanning Tunnelling Microscopy A. Baratoff, Zürich (IBM Zürich Research Laboratory)

Heinrich Rohrer (left) and (also winners of the 1984 EPS Hewlett-Packard Europhysics Prize).

On October 15, 1986 the world learn­ Both instruments rely on ed about the award of the in and are limited by quantum properties of to for his funda­ the latter, but have otherwise little in mental investigations in optics common. The present contribution fo­ and the construction of the first elec­ cusses on the development of STM by tron , and to Gerd Binnig and its inventors. A similar article on electron for designing the scan­ microscopy will appear later. Before ning tunnelling microscope. reviewing the main stages in the evolu­ Ruska, now 79, obtained satisfactory tion of the STM (see also Ref. 2), let me images with his two-stage instrument in describe the physics and operation of 1931 and surpassed the resolution and that conceptually simple instrument. magnification of light two The state of the art, including complete years later while working at the Techni­ references, is covered in two recent Pro­ cal University in Berlin 1). Since then ceedings 3·4). electron microscopes with their diffe­ rent imaging modes and modifications, Basic Principles have slowly matured and gained accep­ The key to STM is to approach a pro­ tance as indispensable tools in physics, bing tip, made of a refractory hard metal Fig. 2 — Distribution of tunnelling current materials science, microelectronics, bio­ like tungsten, within a few A of the sam­ density in energy (top) and space (bottom). logy and medicine that enable structural ple to be investigated so that a measu­ (Ref. 3), Copyright 1986, IBM. analysis and selective manipulation on a rable current IT (typically 1 nA) flows in scale of few µm down to a few A (under response to a fixed voltage VT ranging in 1960, the new technique relies on tun­ special conditions). It is therefore grati­ from a few mV for metals to several volts nelling through vacuum or an inert me­ fying that the Prize Committee decided for poor conductors. The tip is then dium, like liquid He, thus permitting in to honour Ruska's pioneering work, thus scanned along the surface at a constant situ investigations of local surface chan­ recognizing what The New York Times distance s (to zero order) by means of a ges induced by external means, or by the referred to as a "microscopic oversight". feedback control unit that maintains IT tip itself. Recently STM images of relati­ By contrast, the Scanning Tunnelling constant. As sketched in Fig. 1, both fine vely inert surfaces like gold and graphite Microscope (STM), first successfully approach and scanning are effected by have been obtained in air and water3·4). operated only five years ago, soon prov­ calibrated piezoceramic rods producing To obtain stable images, differing only ed able to resolve atomic-scale features displacements of several A/V. The z-dis- by small drifts, required much ingenuity on the surfaces of even poorly conduc­ placement (proportional to V recorded and perseverance. Mechanical vibra­ ting materials. Although it is only begin­ along successive scans yields a nondes­ tions and noise had to be suppressed. In ning to have an impact beyond funda­ tructive topographic profile (dotted line) the 1970's a few groups tried, but none mental science, the tremendous poten­ provided the tip neither accidentally tou­ could reach the goal of controlled ap­ tial of STM (depending on the context, ches the surface nor induces local fields proach, vacuum tunnelling and scann­ M means either microscope or micro­ causing atoms to jump. ing. The specific designs discussed be­ scopy) has been realized by the Prize In contrast to experiments with low all rely on an isolation and damping Committee at a relatively early stage. (e.g. oxide) barriers, initiated by Giaever system against external disturbances and on a coarse approach mechanism that brings the sample within the work­ Fig. 1 — Principle of STM: The ing range (100 A to several pm) of the probing tip (black) is actuated by piezodrives. The influence of internal voltages independently applied vibrations generated by the motion of to three mutually orthogonal piezodrives. While the tip is the tip is avoided by setting the cutoff scanned along the sample by frequency of the feedback well below Vx, Vy, the control unit, CU, the lowest mechanical eigenfrequency records and supplies the voltage of the tip-scanning unit. Vz required to keep the tunnell­ Parameters determining the tunnelling ing current IT (VT) constant. current distribution, and hence the sen- 141 sitivity and resolution of STM, are illu­ strated in Fig. 2. Assume for simplicity that the barrier is vacuum and that both sample and tip are good conductors. The applied voltage VT then appears across the separating potential barrier, and the height of the latter is approximately the average Φ = (Φ1 + Φ2)/2 of the tip and sample work functions. Its thickness s is the distance between the turning points of electrons at a given energy within the window defined by the corresponding Fermi levels EF1, EF2 (assuming rapid equilibration within each electrode and negligible thermal excitation above the barrier). If VT << Φ1, Φ2, the distance dependence of IT is dominated by the exponential decay of the transmission Fig. 3 — Schematic diagram of ''pocket-size" STM. (Ref. 9), Copyright 1986, the American coefficient at EF1 ≈ EF2. For free elec­ Institute of Physics. trons tunnelling between parallel elec­ trodes, the current density would be phy that are difficult to recognize unless ed LEED and Auger surface diagnostics.) j ≈ (e2/hπ) (k/s) VT exp(-2)ks), (1) Φ is simultaneously recorded. As in later designs, including the com­ where h/e2 = 25.8 kΩ and pact one sketched in Fig. 3 9), a "louse" 2k(Å-1) = 1.025V [Φ(eV)]. Experimental Aspects: Early Work consisting of a piezoplate (2) on three For a curved tip IT is approximately ob­ The idea of STM arose in 1978 during metal feet (3) separated from a ground tained by integrating (1) laterally about a visit by Binnig to discuss research plate by high dielectric constant in­ the closest separation s, thus giving an plans with Rohrer while he was writing sulators ensured coarse approach in effective tunnelling area of 2V (r/K) dia­ up his doctoral dissertation. After settl­ steps of 100 A to 1 µm via sequential meter for a tip of radius r at its apex. This ing in Zurich in the fall, Binnig started clamping of the feet in harmony with estimate of the lateral resolution L, e.g. designing and testing various compo­ contractions and elongations of the 50 A for even a smooth tungsten field nents with his uncanny ability to see the body (2). Better procedures for obtain­ emission tip with r = 1000 A and (p = essential. He was helped by Rohrer's for­ ing stable minitips in situ were develo­ 4.5 eV, looked promising enough and mer experienced technician, Christoph ped, e.g. applying up to 100 V for a cer­ motivated Binnig and Rohrer to build Gerber, who has since then instructed tain time. their first STM 5, 6). Their ability to ob­ hundreds of visitors and newcomers to At his first invited talk at the German serve monoatomic steps with apparent the field. Binnig and Rohrer still pursued Physical Society meeting in April 1982 widths < 10 A led them to conjecture their previous research interests, but the Binnig claimed that ≈ 3 A wide features that the ground tungsten wires they situation changed in autumn 1981 when occasionally appearing in adjacent used for tips supported small clusters of a working STM design took shape and scans were single adsorbates. Soon atoms. The extreme sensitivity of IT to s an eager young technician, Edmund afterwards individual close-packed naturally selects the "minitip" closest to Weibel, joined the group. [001] atomic rows on the reconstructed the sample 6): the dream of resolving Initially magnetic levitation above a Au(110) surface could be imaged. This single surface atoms (schematically in­ superconducting lead bowl coated with observation prompted theorists to get to dicated by circles in Fig. 1) suddenly aluminium provided vibration isolation work and provided a basis for testing seemed within reach! Subsequent theo­ and eddy-current damping. A linear estimates of the resolution. ries demonstrated that L is of order 1.6 V decay of log IT vs. s was observed after a But it was the first STM image of the [(r + s)/k], but can also be smaller if, for heuristic cleaning procedure, with

At the Technical University of Denmark a new Surface Science Research Group is being created. When fully staffed it is planned to Fig. 5 — Real-time STM image of cleaved consist of 3-4 faculty positions. The first of these, at the associate graphite. Minima are only 2.42 A apart. professor (lecturer) level is now open at the Laboratory of Applied Physics II. and the atomic resolution studies of cleaved graphite performed before his Applicants are expected to have several years of post doctoral departure with the STM shown in Fig. 3. research experience with surface spectroscopies, preferably also A stack of stainless-steel plates separa­ with some applications to industrial problems. ted by Viton dampers provided enough The applicant must be able to undertake teaching in elementary vibration isolation for stable operation in and advanced physics courses. air. When placed into the UHV chamber The successful applicant is expected to play a major role in the build of a scanning , this up of the surface physics groups and the acquisition of equipment. compact instrument could produce Further information can be obtained from Dr. Steen MΦrup, Labo­ traces of excellent clarity 9) and the cor­ ratory of Applied Physics II, Building 307, The Technical University responding image clearly shows minima of Denmark, DK-2800 Lyngby, Denmark. Tel. (45) (2) 88 24 88, with the expected spacing. Although only every second surrounding carbon ext. 2321. atom appears as a slightly shifted maxi­ Curriculum vitae including relevant publications, if possible in three mum in that picture, Binnig and cowor­ copies, and an account of teaching experiences are to be directed kers very recently managed to image all to: six, albeit in a narrow range of current, Faculty of Basic Sciences, Building 101 as shown in Fig. 5. This photograph was Technical University of Denmark, taken in a few seconds direct from an DK-2800 Lyngby, Denmark oscilloscope driven by a fast-scanning STM operating in liquid Fie similar to one not later than 6 January, 1987. that was built in one day in Stanford 4).

REFERENCES 5. Binnig G., Rohrer Fl., Gerber Ch. and 10. Binnig G., Rohrer Fl., Gerber Ch. and Weibel E., App/. Phys. Lett. 40 (1982) 178. Weibel E., Phys. Rev. Lett. 50 (1983) 120. 1. Ruska E., The Early Development of Elec­ 6. Binnig G., Rohrer H., Gerber Ch. and 11. Binnig G. and Rohrer Fl., Physica 127B tron Lenses and Electron Microscopy (S. Weibel E., Phys. Rev. Lett. 49 (1982) 57. (1984) 37, and in Trends in Physics 1984 (J. Hirzel Verlag, Stuttgart) 1980. 7. Binnig G. and Rohrer H., Surf. Sci. 126 Janta and J. Pantoflicek, eds. EPS) 1985, p. 2. Quate C.F., Phys. Today 39 (August 1986) (1983) 236. 38. 26; Salvan F., La Recherche 181 (1986) 8. Binnig G. and Rohrer H., Sci. Am. 253 12. Becker R.S., Golovchenko J., Higashi 1202. (August 1985) 50. G.S. and Swartzentruber B.S., Phys. Rev. 3. IBMJ. Res. Develop. 30 (1986) 355, 430. 9. Gerber Ch., Binnig G., Fuchs H., Marti 0. Lett. 57 (1986) 1020 and references therein. 4. Proceeding of the STM'86 Conference, and Rohrer H., Rev. Sci. Instrum. 57 (1986) 13. Binnig G., Quate C.F. and Gerber Ch., Surf. Sci.. to be published. 221. Phys. Rev. Lett. 56 (1986) 930.

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