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Arizona State University Tempe, AZ 85287-5706, USA
EmaIRiAl :A .v Fualtsoni lSechsokol aof@ Engainseeurin.eg du Arizona Institute for Nano-Electronics WWhhaatt iiss nnaannootteecchhnnoollooggyy
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IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics NNaannootteecchhnnoollooggyy GGrroowwtthh
S. Milunovich, J. Roy. United States Technology Strategy. Merrill Lynch. 4 Sept. 2001 IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics … continuing the scale down process micro-electronics yesterday
’ macro-electronics in 1950 s future nano-electronics micro-electronics today IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics WWhhaatt iiss nnaannoo?? PPoowweerr PPrreeffiixx OOrriiggiinnss
110012 tteerraa tteerraass:: mmoonnsstteerr 11009 ggiiggaa ggiiggaass:: ggiiaanntt 11006 mmeeggaa mmeeggaass:: llaarrggee 11003 kkiilloo cchhiilliiooii:: tthhoouussaanndd 1100-3 mmiillllii mmiillllii:: tthhoouussaanndd 1100-6 mmiiccrroo mmiikkrrooss:: ssmmaallll 1100-9 nnaannoo nnaannooss:: ddwwaarrff IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics WWhhyy iiss tthhee nnaannoommeetteerr ssccaallee ddiiffffeerreenntt??
1. The wavelike properties of electrons inside matter are influenced by variations on the nanometer scale. 2. The systematic organization of matter on the nanometer length scale is a key feature of biological systems. 3. Nanoscale components have very high surface areas. 4. The finite size of material entities, determine an increase of the relative importance of surface tension and local electromagnetic effects. 5. The interaction wavelength scales of various external wave phenomena become comparable to the material entity size.
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics ""TThheerree''ss pplleennttyy ooff rroooomm aatt tthhee bboottttoomm..""
Richard P. Feynman, Ph.D.
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics Beginning of the Transistor Era How it all started …
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics – birth of an era, Bell Laboratories 1947
” 0.5 the first transistor made of Germanium IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics this article, Scientific American, Sep. 1948, offers the earliest survey of transistor technology
Point Contact Transistor IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics Nobel Prize in Physics 1956
"for their researches on semiconductors and their discovery of the transistor effect"
William Bradford Shockley John Bardeen Walter Houser Brattain
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics transistors made of semiconductors
pure semiconductor doped semiconductor
free electron electron electron Ge P atom atom
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics inventing the integrated circuit
- many transistors and complex circuits on single substrate -
1st integrated circuit made by Texas Instruments modern integrated circuit
1958 - Jack Kilby and Robert Noyce each chip contains many millions transistors
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics Nobel Prize in Physics 2000
"for basic work on information and communication technology"
"for developing semiconductor "for his part in the invention of heterostructures used in high-speed and the integrated circuit" optoelectronics"
Zhores I Alferov Herbert Kroemer Jack S Kilby
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics ” Intel 4004 - 2 integrated circuits heart of the computer
’ ” today s wafers-12
packaged chip IRA A. Fulton School of Engineering modern pc Arizona Institute for Nano-Electronics Scaling and Its Impact
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics …… ’ . Moore s law governs
Gordon Moore “ ” every 1.5 years complexity doubles
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics … drive for
speed dense memory
low power SSccaalliinngg DDoowwnn complexity
high frequency space
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics from age of microelectronics to nanoelectronics
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics NNaannooTTrraannssiissttoorrss
NMOS: uniaxial tensile stress PMOS: uniaxial compressive from stressed SiN film stress from sel. SiGe in S/D
Note: strain and mobility
enhancement are Lg dependent
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics an immediate problem: simple statistics today future
all transistors are similar because of self averaging
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics WWhhaatt hhaappppeennss wwhheenn ttrraannssiissttoorrss ggeett ssmmaalllleerr aanndd ssmmaalllleerr??
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics ………… from many impurities .. to very few
Intel - 2004
0.1 micron
ballistic electron
moving without collisions
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics tunnelling: limiting device miniaturization
gate leakage tunnelling current
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics another amazing effect of the wave nature of electrons TUNNELLING
tunnel
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics Nobel Prize in Physics 1973
"for their experimental "for his theoretical predictions of the discoveries regarding properties of a supercurrent through a tunnelling phenomena in tunnel barrier, in particular those semiconductors and phenomena which are generally known superconductors, as the Josephson effects" respectively"
Leo Esaki Ivar Giaever Brian David Josephson IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics revolution of tunnelling: Scanning Tunnelling Microscope STM
tip
surface
tip motion…..
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics Nobel Prize in Physics 1986
"for his fundamental work in "for their design of the scanning electron optics, and for the design tunnelling microscope" of the first electron microscope"
Ernst Ruska Gerd Binnig Heinrich Rohrer
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics STM observing surfaces silicon
nickel
3 Angstroms = 0.3 nm
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics … a more difficult barrier two mountains
sequential tunnelling
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics resonant tunnelling
full transmission - as if no mountains
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics What is on the Horizon?
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics structures with nanotubes
1-10 nm
imaging of nanotube
memory cell one-dimensional transistor
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics pick and place AFM tip (like STM)
… write
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics single atoms
2 Angstroms = 0.2 nm
standing waves of electrons
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics …… AA hhaappppyy mmaarrrriiaaggee
TThhee ttwwoo ggrreeaatteesstt ddiissccoovveerriieess ooff tthhee 2200--tthh cceennttuurryy quantum mechanics stored program computers pprroodduucceedd qquuaannttuumm ccoommppuuttiinngg aanndd qquuaannttuumm iinnffoorrmmaattiioonn tthheeoorryy
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics Quantum computation Applications • • Modeling of quantum systems Factorization of large integer numbers P. Shor (1994)
RSA Code: Military, Pharmaceutical industry Banking Nanoelectronics
• • Quantum search algorithm Quantum Cryptography L. Grover (1995)
Process optimization: Industry Military Bob Alice
Eve
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics Quantum computation QC Roadmap Physical realization of a qubit http://qist.lanl.gov/ • • Ion traps and neutral atoms Semiconductor charge qubit
Single QD Double QD
E2 e e E1
E0 • E Photon based QC 0 1 0 1 E0 P 1 • • Spin qubit Superconducting qubit
Cooper pair box SQUID Nuclear spin Electron spin (liquid state NMR, solid state NMR)
I S i
N pairs - 0 N+1 pairs - 1
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics WWhhaatt iiss NNeexxtt?? BIOLOGICAL ION CHANNELS
Proteins that form nanoscopic aqueous tunnels in cell membrane Enormous range of Biological functions - regulate ion flow and composition inside cell - control electrical signaling in the nervous system - muscle contraction, drug delivery – Disease malfunctioning channels
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics So, why are we interested in ion channels ??
– Channels are naturally occurring device elements – Nanoscale devices with ~0.2-15nm in diameter and between 0.3-10nm length – self-assembled – perfectly reproducible – have many specific built-in features and functions – can be mutated – Channels can be designed with specific conductances, selectivities and functions
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics NNaannootteecchhnnoollooggyy AApppplliiccaattiioonnss IInn OOtthheerr AArreeaass
ssttaaiinn rreessiissttaanntt tteexxttiilleess
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IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics Nanotechnology in Medicine …
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics The Six Major Challenges of Interest of NanoTechnology in Medicine
1. Prevention and Control of Cancer Developing nanoscale devices that can deliver cancer prevention agents and anticancer vaccines using nanoscale delivery vehicles 2. Early Detection and Proteomics Creating implantable molecular sensors that can detect cancer-associated biomarkers. 3. Imaging Diagnostics Designing “smart” injectable, targeted contrast agents that improve the resolution of cancer to the single cell level IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics 4. Multifunctional Therapeutics Developing nanoscale devices that integrate diagnostic and therapeutic functions 5. Quality of Life Enhancement in Cancer Care Designing nanoscale devices that can optimally deliver medications for treating side effects due to chronic anticancer therapy, including pain, nausea, loss of appetite, depression, and difficulty breathing 6. Interdisciplinary Training Coordinating efforts to provide cross-training in molecular and systems biology to nanotechnology engineers and in nanotechnology to cancer researchers
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics SSmmaarrtt NNaannoossttrruuccttuurreess ffoorr SSeelleeccttiivvee DDrruugg DDeelliivveerryy Drug Delivery for:
#1 - Cardiovascular disease – #2 Cancer Nanotube Nanocap #3 - Infectious diseases
Toxin Removal for: Scale: 1/40th of red blood cell
Adverse drug reactions >106,000 deaths/yr Video Clip Pesticide Poisonings >220,000 deaths/yr
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics NNaannooMMeeddiiccaall DDiiaaggnnoossttiiccss
Targets: Where: - drug overdose - hospital - brain trauma - law enforcement - disease markers - homeland security
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics DDeelliivveerraabblleess PPiippeelliinnee
Nanoengineered pulmonary drug delivery systems Microemulsion formulation technology
Knowledge of bio-nano toxicity
Biophotonics-based detection of disease s
e Bacteriorhodopsin-based data storage l b a
r Flexible device/system integration e v i l Chip-based drug delivery system e
D Nanosensors for management of traumatic brain injury
Pesticide detoxification Drug detox
Breath detection of drugs Breath detection of diseases
Smart nanostructures for targeted drug delivery IRA A. Fulton School of Engineering 2003 2004 Arizona In2s0t0it5ute for Nan2o0-0E29l0e0c6tronics 2007 2008 Nanotechnology Funds in USA
IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics IRA A. Fulton School of Engineering Arizona Institute for Nano-Electronics