Stepper Motor Linear Actuators Classical Motor-Leadscrew / Ballscrew Linear Actuators

HIGH FORCE

PRECISE

ECONOMICAL

WWW.PI.WS © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. Cat120E Inspirations2009 08/10.18 oos&DrivesFundamentals & Motors rv Screws Drive Motor DC ActiveDrive™ hsdsg rvdsseveral case. provides advantages: motor design the This in and amplifier driver (pulse modulation) PWM width a considerably, integrating cost by this re- duces system ActiveDrive™ The motor. stepper a for that than higher high-per- generally however,is a amplifier, of formance cost The low tion. vibra- rpm, low and low dissipation heat at torque high response, fast performance, dynam- ic good are drives motor oeo h datgso DC- of advantages the of Some lsi rv Systems(Stepper&ServoMotors) Drive Classic m eouinfrlonger for ranges. to revolution travel mm/ up 1 or and mm/revolution, 0.4 between 0.5 pitch a leadscrews have and Typical power, velocity, lifetime. motor on required pre- effect the dictable with ballscrews, recirculat- ing exhibit than friction but higher self-locking to Leadscrews are preloaded backlash. spring nut reduce The be stage. the can of to sled coupled the nut a with motor-driv- screw en a of leadscrew very consists drive A and motion. smooth resolutions very high provide can Leadscrews Leadscrews mrvdreliability, improved and system, compact more- cost, Reduced motor and amplifier the between losses power eliminating by efficiency, Increased ig iesedrneand range speed wide run- are smooth ning, vibration, servo-motors of DC lack of tics Characteris- (servo-loop). sys- tem closed-loop is a that in motor operated current direct A Servo-Motor DC h datgso Cmotor DC of of advantages Some the mandatory. set- is filter tings and algorithm tive) deriva- integral, (proportional, PID with a controller motor performance, good optimum torque. For low-speed good very r aneac re eyeffi- very free, maintenance are but self-locking, not are screws Ball- ratio. ball- to-thread-diameter proper the selecting by ed eliminat- be pas- can Backlash closed-circuit sage. a in and nut screw balls the the the of between of number riding a sled and the stage, to housing) motor-driven coupled (ball nut a a with screw of consists drive ballscrew recirculating A with friction friction. rolling sliding re- place they because than leadscrews, friction less significantly have ballscrews Recirculating Ballscrews Recirculating eas oetra driver external no because rotcllna encoders. linear optical or rotary either with assured case shielded cally electri- single a in together motor and amplifier the ing mount- by radiation noise er amplifi- PWM of Elimination oiinn cuayis accuracy Positioning n aln r required are cabling and oqe hycnb operated be can low They high torque. and with consumption factor power form resolution, small angular high very Drive Gearhead / DC-Motor heat low vibration. low rpm, and dissipation low at torque otmdl s preloaded use revolution. models per Most counts to up 4000 with opti- encoders and range rotary watt cal 3 to 2 in the power various maximum uses with types PI exter- amplifier. an nal without such C-843 the boards as controller PC by DC- are of drives advantages motor/gearhead few A oini iceeangular discrete in providing motor motion electric An Motor Stepper back- lash. eliminate to gearheads rvsaego yai per- dynamic good are drives omne atrsos,high response, fast formance, aaseto ahproduct. the each of in sheet noted data is type screw The or mm/revolution. 1 2 0.5, of ball- pitches have PI screws continuous Standard in operation. lifetime long and speeds high offer and cient Cmtr ftesm size, same the of motors closed-loop DC to Compared electron- ics. control simple the in to is opposed as positioning required where predictable applications especially for are suited and lifetimes long very have motors Stepper oos hc r eycost- very effective. are which PI 2-phase motors, operation. microstepped offers state in steady especially heat, more sipate dis- and performance dynamic poorer provide motors stepper lies advantage Another ation. acceler- extreme and response tp,wtottene fposi- of need the without steps, insno rservo-loop. or sensor tion fast Piezo Drives Ultrasonic Piezomotors It is important to distinguish Ultrasonic piezomotors are between different types of direct-drive systems; they do piezo drives: classical piezo not use leadscrews or gear- actuators (direct acting), flex- heads and are backlash-free. In ure amplified actuators, and addition, they neither create, piezo linear motors. Direct- nor are influenced by, magnet- drive piezo actuators offering ic fields. The drive consists of a resolutions of under one nano- stator, containing a piezoce- meter can be combined with ramic oscillator and a slider classical motorized actuators (friction bar), which is attached and stages to form coarse/fine to the moving part of the stage. systems or the more advanced With PI ultrasonic piezomotors hybrid systems (p. 4-132). speeds of up to 500 mm/s and Piezo linear motors provide resolutions of 0.1 μm in closed- Working principle of an ultrasonic linear piezomotor drive basically unlimited travel loop are possible. They are ranges. PI offers two types: also extremely compact, self- Ultrasonic (high-speed) motors locking and have lifetimes of translation stages like the ics, albeit with relatively low and PiezoWalk® (high-force, over 20,000 hours. PI piezo- M-661, M-662, M-663 and holding force. They are used high resolution) motors. Piezo motors are used in miniature M-664 series, and in XY stages primarily in scanning applica- actuators can achieve extreme- like the M-686. tions with travel ranges in the ly high accelerations of many millimeter to low centimeter thousands of g’s, are friction- Voice-Coil Linear Drives range. PI offers voice coil less and backlash-free. These friction-free electromag- drives in the V-106 stages, as netic linear drives are charac- well as in custom-designed terized by their good dynam- systems.

Hybrid Drives (Coarse / Fine)

Classic Combinations becoming activated after the Combinations of different drive motorized positioner has come concepts are called hybrid to a complete stop. Because drives. PI’s micropositioning separate position sensors are systems realize stacked sys- used. the absolute accuracy (not tems of piezo and manual or the resolution) is limited by the motorized stages, where a precision of the motorized long- motor/screw drive combina- range positioner. tion provides a long travel range and a piezo drive adds fine positioning accuracy and Novel Hybrid Concept exceptional responsiveness A novel concept is implement- over small ranges. For exam- ed in the M-511.HD and M-714 ple, PI offers a fiber-scanning Hybrid Translation Stages and C-702 Hybrid Controllers, that and coupling system compris- Different types of combined motorized and piezo positioning systems: ing a 6-DoF micropositioner evaluate a nanometer-preci- a) Serially stacked drives with individual integrated position sensors (F-206) mounted beside a sion, long-range, sensor and b) PI Hybrid drive with integrated, internal, high-resolution sensor, for use with highly specialized controller multi-axis piezo system (P-611 provide nanometer accuracy Nanocube®) with high position over the whole travel range. resolution. The motor-leadscrew and the tages of both the motorized makes hybrid systems ideal for piezo actuator are fully inte- actuator and the piezo actuator applications where the position The servo-control algorithms grated to form one motion sys- from startup to settling.The of an incident needs to be read with stacked systems like these tem, and act simultaneously at result is immediate starting, and repositioned precisely, or generally operate independent- all times. Thus every move be- smoothness of motion, and a where an externally specified ly, with the piezo system only nefits from the specific advan- highly constant velocity. This target position needs to be hit © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. Cat120E Inspirations2009 08/10.18 reuaiisi h oinof motion the the in out irregularities smooth actively ators actu- piezo The actuators. piezo response fast stiff, frictionless and flexures by motor-spindle-drive micropositioner’s the from the stage of positioning platform hybrid motion decoupling the by is this accomplished side, mechanical the On or inspection surface metrology. in such as nanometers, a few within noe)wt calculated, a trajectory. smooth with linear integrated encoder) (by the position reading platform unit actual the drive compare single continuously and one as combina- tion piezo and treat motor algorithms the control The range. sensor the down to pro- capability move to full the vide train by drive caused motorized platform the okn rnil fteM51H.Tepafr sdecou- is platform The M-511.HD. the of principle Working ldfo h oo rv ri ytepeoatao and actuator piezo the by train drive motor the from pled

Hybrid piezoelectric / motor actuator system Velocity up to :250µm/s power dissipation). Positioncommand bandwidth:1kHz. Low 900N. to of zero range Force RMS. 2nm than less error does error does not exceed 1.7nm. of 0.125nm.shortterminterpolation The resolution ina ofandresults factor interpolation 2000 an for stability and phase amplitude allowssolid It’s sensor. optical high precision a via measured is position The h lxr uds hsas eue h nri fthe of inertia the reduces also This guides. flexure the iz-rvnpafr n losfrrpdresponse rapid for allows and platform piezo-driven

tracing within positioning and accurate extremely 15mm and Travel range resolution. extremely high range and travel along with actuator system torque) motor (brushless piezoelectric and Hybrid hybrid system Principle of Principle

M-228 · M-229 Stepper-Motor Leadscrew-Drive Linear Actuators High-Load, Compact and Highly Cost-Efficient, with Limit Switches

࡯ Elimination of tip-angle- Ordering Information dependent wobble M-228.10S Limit and Reference Switches Stepper-Mike Linear Actuator, 10 mm, Stepper Motor, For the protection of your Gearhead, Limit Switches equipment, non-contact Hall- M-228.11S effect limit and reference Stepper-Mike Linear Actuator, switches are installed. The 10 mm, Stepper Motor, direction-sensing reference Direct Drive, Limit Switches switch supports advanced M-229.25S automation applications with Stepper-Mike Linear Actuator, high precision. 25 mm, Stepper Motor, Gearhead, Limit Switches M-229.26S Low Cost of Ownership Stepper-Mike Linear Actuator, The combination of these actu- 25 mm, Stepper Motor, M-228 and M-229 series linear actuators are driven by powerful direct-drive Direct Drive, Limit Switches stepper motors, or are equipped with more compact, gearhead stepper motors: ators with the networkable M-229.26S, M-228.11S, M-229.25S, M-228.10S (from left) C-663 Mercury Step controller Ask about custom designs! (s. p. 4-112) offers high per- formance for a very competi- ࡯ Highly Cost-Efficient, Compact Design tive price in both single and multi-axis configurations. ࡯ 10 and 25 mm Travel Range ࡯ High Load Capacity to 80 N ࡯ Gearhead Version: 46 nm Resolution (with C-663 Controller) ࡯ Direct Drive: Max. Velocity 5 mm/s ࡯ Non-Rotating Tip ࡯ Non-Contact Limit and Reference Switches

M-228 and M-229 series linear Cost-Effective Design, actuators provide a travel Valuable Features range of 10, resp. 25 mm, and The cost-effective design offers are equipped with high-resolu- many useful features such as a tion stepper motors. The step- non-rotating tip, limit and ref- per mikes can push or pull erence switches and a mechan- loadsupto80N,andprovide ical position display. speeds up to 5 mm/s. Models featuring gearhead/stepper

motor combinations offer the A spherical tip and a 3 m exten- M-228.11S dimensions in mm same stroke in a more compact sion cable are included in the package. delivery. The more compact gearhead versions include an additional flat tip.

Application Examples Non-Rotating Tip Compared to conventional ࡯ Quality assurance testing rotating-tip micrometer drives, ࡯ Testing equipment the non-rotating tip design offers several advantages: ࡯ Alignment of secondary mirrors ࡯ Elimination of torque- induced positioning errors ࡯ Automation ࡯ Elimination of sinusoidal ࡯ Metrology motion errors M-229 high-load stepper mike with gearhead, ࡯ Precision machining ࡯ Elimination of wear at the C-663 Mercury stepper motor controller (rear) © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www.pi.ws. R1 09/11/10.0 contact point Piezo • Nano • Positioning



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M-228.10S dimensions in mm   

  

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M-229.25S dimensions in mm M-229.26S dimensions in mm

Technical Data Model M-228.10S M-228.11S M-229.25S M-229.26S Units Active axes X X XX Motion and positioning Displacement 10 10 25 25 mm Design resolution* 0.046 0.078 0.046 0.078 μm Min. incremental motion* 1 1 1 1 μm Backlash** 5 10 10 10 μm Unidirectional ±2 ±2 ±2 ±2 μm repeatability Max. velocity* 1.5 5 1.5 5 mm / s Reference switch 1 1 1 1 μm repeatability Mechanical properties Drive screw Leadscrew Leadscrew Leadscrew Leadscrew Thread pitch 0.5 0.5 0.5 0.5 mm / rev. Gear ratio 28.44444:1 – 28.44444:1 – Motor resolution* 384 6400 384 6400 steps / rev. Max. push/pull force 20 50 50 80 N Drive properties Motor type 2-phase 2-phase 2-phase 2-phase stepper motor stepper motor stepper motor stepper motor Operating voltage 24*** 24# 24## 24# V Reference and limit switches Hall-effect Hall-effect Hall-effect Hall-effect Miscellaneous

Operating temperature range -20 to +65 -20 to +65 -20 to +65 -20 to +65 °C Please avoid lateral forces Material Al·(anodized), Al·(anodized), Al·(anodized), Al·(anodized), at the tip. * with C-663 stepper steel, brass steel, brass steel, brass steel, brass motor controller Mass 0.23 0.36 0.4 0.61 kg ** with preload Cable length 0.5 0.6 0.5 0.6 m *** max. 0,25 A / phase; 24 full steps / rev. Connector 15-pin sub-D 15-pin sub-D 15-pin sub-D 15-pin sub-D # max. 0,85 A / phase; connector connector connector connector 400 full steps / rev. ## max. 1 A / phase; Recommended controller C-663 single-axis C-663 single-axis C-663 single-axis C-663 single-axis 24 full steps / rev. © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www.pi.ws. R1 11/05/02.0 M-230 o-oaigTp ii wths toet 5mm 25 to Stroke Switches, Limit Tip, Non-Rotating ࡯ ࡯ ࡯ ࡯ ࡯ advantages: several fers of- design non-rotating-tip drives, the micrometer tating-tip ro- conventional to Compared Tip Non-Rotating encoder. high-resolution motor-shaft-mounted, with combina- tion gearhead 2-phase / motor a closed-loop DC a by or motor driven stepper tip ing non-rotat- with micrometer a a of consist in They package. compact with resolution mm 25 sub-micron to up motion lin- ear providing actuators linear ultra-high-resolution are M-230 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ plcto Examples Application etn equipment Testing testing assurance Quality packaging Photonics Metrology positioning Fiber TF2.0 h MTBF>20.000 Mount Clamp or Mount Front Switches Reference and Limit Non-Contact and Motors DC Closed-Loop mm/s 1.5 Velocity Max. Tip Non-Rotating μm 0,05 to Motion Incremental Min. mm 25 & 10 Range Travel -3.0 -3.5 ihrslto CMk cutr,1 n 5m rvlrange travel mm 25 and 10 actuators, DC-Mike high-resolution M-230.25, M-230.10, rcso ierActuator Linear Stepper /ServoPrecision tpe Motors Stepper wthspot dacdau- advanced reference supports The switch reference installed. direction-sensing and are switches limit your of Hall- effect non-contact protection equipment, the For Switches Reference and Limit nanometers. 50 as low as motion incremental minimum for allowing construction, OEM tion low-fric- low-stiction, and tremely ex- feature They industrial environments. heavier- duty for solution effective cost- a provide actuators M-230 Life Long & Accuracy High ࡯ ࡯ ࡯ ࡯ edn wobble pendent tip-angle-de- of Elimination point contact the at wear of Elimination errors motion sinusoidal of Elimination errors positioning induced torque- of Elimination ce-nbl i n lttip flat included. a are and tip ball screw-in A 1-52). p. (see M-238 and 1-50) p. agsrfrt h -3 (see travel M-235 the and to refer loads ranges higher For Versions High-Load troller. con- and me- actuator 10 between to ters up lengths cable for drivers line integrated DC connector features the the versions, On servo cable. m extension 3 a with sub-D come and 15-pin connector with cable m 0.5 integral an include actuators All Drivers Line Integrated precision. high with applications tomation altp(included) tip Ball ii Switches Limit mm, 25 Actuator, Linear Stepper-Mike High-Resolution M-230.25S Switches Limit mm, 10 Actuator, Linear Stepper-Mike High-Resolution M-230.10S Information Ordering lttp(included) tip Flat M-230. Cable length: 500 mm, 15-pin sub-D connector with integrated line drivers (DC motor models). Dimensions in mm

Technical Data Model M-230.10 M-230.25 M-230.10S M-230.25S Units Active axes X X X X Motion and positioning Travel range 10 25 10 25 mm Integrated sensor Rotary encoder Rotary encoder Sensor resolution 2,048 2,048 Cts./rev. Design resolution 0.0046 0.0046 0.037 0.037 μm Min. incremental motion 0.05 0.05 0.05 0.05 μm Backlash 2 2 2 2 μm Unidirectional repeatability 0.1 0.1 0.1 0.1 μm Max. velocity 0.8 0.8 1.5 1.5 mm/s Reference switch repeatability 1 1 1 1 μm Mechanical properties Spindle Leadscrew Leadscrew Leadscrew Leadscrew Spindle pitch 0.4 0.4 0.4 0.4 mm Gear ratio 42.92063:1 42.92063:1 28.44444:1 28.44444:1 Motor resolution** 384** 384** steps/rev. Max. push/pull force 70 70 45* 45* N Max. lateral force 30 20 30 20 N Drive properties Motor type DC-motor, DC-motor, 2-phase 2-phase gearhead gearhead stepper motor** stepper motor** Operating voltage 0 to ±12 0 to ±12 24 24 V Electrical power 2 2 W Limit and reference switches Hall-effect Hall-effect Hall-effect Hall-effect Miscellaneous Operating temperature range -20 to +65 -20 to +65 -20 to +65 -20 to +65 °C Material Al (anodized), steel Al (anodized), steel Al (anodized), steel Al (anodized), steel Mass 0.3 0.35 0.3 0.35 kg Cable length 0.5 0.5 0.5 0.5 m Connector 15-pin sub-D 15-pin sub-D 15-pin sub-D 15-pin sub-D connector connector connector connector Recommended controller/driver C-863 single-axis C-863 single-axis (p. 4-114) C-663 single-axis C-663 single-axis C-843 PCI board, C-843 PCI board, (p. 4-112) for up to 4 axes for up to 4 axes (p. 4-120) *at velocities of up to 1 mm/s **2-phase stepper motor, 24 V chopper voltage, max. 0.25 A/phase, 24 full steps/rev., motor resolution with C-663 stepper motor controller © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www.pi.ws. R1 09/12/07.0 M-235 ihDnmc,Srk o5 m ocst 2 N 120 to Forces mm, 50 to Stroke High-Dynamics, he ifrn oo drives: with motor available different is three M-235 The Drives Different Three encoder counts/rev.). (2048 motor-shaft-mounted, motor motor high-resolution DC closed-loop by with stepper a driven or 2-phase is a which ball- screw heavy-duty ultra- preloaded low-friction, a of It package. consists compact a reso- in sub-micron lution to with up mm of 50 motion linear ultra-high- viding pro- an actuator linear is resolution M-235 The ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ plcto Examples Application ogLifetimes & Long Speeds High Provide Drives Ballscrew Recirculating aumCmail esosAalbet 10 to Available Versions Vacuum-Compatible h >20.000 MTBF Switches Reference and Limit Non-Contact Motors Stepper and Motors DC Closed-Loop N 100 Force Lateral N 120 Load Push/Pull Option Drive Direct High-Speed μm 0.1 to Motion Incremental Min. mm 50 & 20 Range Travel etn equipment Testing testing assurance Quality packaging Photonics Metrology Automation positioning Fiber -3.2 ihrslto Stepper-Mike high-resolution M-235.22S Stepper-Motor Ballscrew-DrivePrecisionLinearActuator ࡯ ࡯ ࡯ ࡯ h o-oaigtpdesign advantages: several offers non-rotating-tip the conventional drives, micrometer rotating-tip to Compared Tip Non-Rotating low-vibration motor. stepper a The 2-phase have control. high-power, versions position M-235.x2S with for equipped encoders rotary are high-resolution nm and 100 only of motion in- cremental minimum a provide models DC-motor The applications. ing drive position- is high-speed direct for motor a version with equipped M-235.5DD The edn wobble pendent tip-angle-de- of Elimination point contact the at wear of Elimination errors motion sinusoidal of Elimination errors positioning induced torque- of Elimination -6 hPa ce-nbl i n lttip flat included. a are and tip ball screw-in A only). (DC-motors troller con- and me- actuator 10 between to ters up lengths cable for drivers line integrated DC connector features the the versions, On servo cable. extension made is μm possible! 1 of re- peatability bidirectional a Thus, life. ice serv- longer power and consumption lower velocity, for allows higher screws, lead conven- tional to compared reduced friction, significantly Its pre- play. mechanical eliminate to and loaded is maintenance-free ballscrew recirculating The Lifetime Long and Speed High for Ballscrews onco n oewt m 3 a with sub-D come and 15-pin connector with cable m 0.5 integral an include actuators All Drivers Line Integrated precision. high with applications reference tomation au- advanced reference supports switch and di- rection-sensing The installed. are limit switches your of fect protection Hall-ef- non-contact equipment, the For Switches Reference and Limit -3.D bto)high-resolution (bottom) M-235.5DG 0m,Blsrw tpe Motor Stepper Ballscrew, mm, 50 Actuator, Linear High-Power M-235.52S aumVrino M-235.5DG of Version Vacuum M-235.5VG Gearhead Motor DC Ballscrew, mm, 50 Actuator, Linear High-Power M-235.5DG M-235.5DD of Version Vacuum M-235.5VD Motor DC Direct-Drive Ballscrew, mm, 50 Actuator, Linear High-Power M-235.5DD M-235.2DG of Version Vacuum M-235.2VG Gearhead Motor DC Ballscrew, mm, 20 Actuator, Linear High-Power M-235.2DG M-235.2DD of Version Vacuum M-235.2VD Motor DC Direct-Drive Ballscrew, mm, 20 Actuator, Linear High-Power M-235.2DD Motor Stepper Ballscrew, mm, 20 Actuator, Linear High-Power M-235.22S Information Ordering s bu utmdesigns! custom about Ask -3.D tp and (top) M-235.2DG CMk,ballscrew DC-Mike, Ball tip (included) M-235.22S and M-235.52S dimensions in mm, M-235.2DD, M-235.2DG, M-235.5DD cable length 500 mm, 15-pin Sub-D connector and M-235.5DG dimensions in mm. Cable length 500 mm, 15-pin Sub-D connector with integrated line drivers

Technical Data Model M-235.2DG M-235.2DD M-235.22S M-235.5DG M-235.5DD M-235.52S Units Active axes X X X X X X Motion and positioning Travel range 20 20 20 50 50 50 mm Integrated sensor Rotary Rotary Rotary Rotary encoder encoder encoder encoder Sensor resolution 2.048 2.048 2.048 2.048 Cts./rev. Design resolution 0.016 0.5 0.156 0.016 0.5 0.156 μm Min. incremental motion 0.1 0.5 0.1 0.1 0.5 0.1 μm Unidirectional repeatability 0.1 0.5 0.2 0.1 0.5 0.2 μm Bidirectional repeatability 1 1 1 1 1 1 μm Max. velocity 2.6 >30 20 2.6 >30 20 mm/s Mechanical properties Gear ratio 29.6:1 29.6:1 Motor resolution* 6,400* 6,400* steps/rev. Max. push / pull force 120 50 100** 120 50 100** N Max. lateral force 100 100 100 100 100 100 N Drive properties Motor type DC-motor, DC-motor 2-phase DC-motor, DC-motor 2-phase gearhead stepper motor* gearhead stepper motor* Operating voltage 0 to ±12 0 to ±12 24 0 to ±12 0 to ±12 24 V Electrical power 4 17 4.75 4 17 4.75 W Limit and reference switches Hall-effect Hall-effect Hall-effect Hall-effect Hall-effect Hall-effect Miscellaneous Operating temperature range -20 to +65 -20 to +65 -20 to +65 -20 to +65 -20 to +65 -20 to +65 °C Material Al (anodized), Al (anodized), Al (anodized), Al (anodized), Al (anodized), Al (anodized), steel steel steel steel steel steel Mass 0.55 0.5 0.65 0.7 0.65 0.8 kg Recommended controller/driver C-863 single-axis C-863 single-axis C-663 single-axis C-863 single-axis C-863 single-axis (p. 4-114) C-663 single-axis C-843 PCI board, C-843 PCI board, C-843 PCI board, C-843 PCI board, (p. 4-112) for up to 4 axes for up to 4 axes for up to 4 axes for up to 4 axes (p. 4-120) *2-phase stepper motor, 24 V chopper voltage, max. 0.8 A/phase, 400 full steps/rev., motor resolution with C-663 stepper motor controller **at up to 10 mm/sec Data for vacuum versions may differ. M-168 Stepper-Mike Leadscrew-Drive Precision Linear Actuator Non-Rotating Tip, Strokes to 50 mm

Ordering Information

M-168.12S High-Resolution Stepper-Mike Linear Actuator, 10 mm

M-168.22S High-Resolution Stepper-Mike Linear Actuator, 25 mm

M-168.52S High-Resolution Stepper-Mike Linear Actuator, 50 mm

Ask about custom designs!

M-168 Stepper-Mikes providing 10, 25 and 50 mm travel range (from front to back)

࡯ 10, 25 and 50 mm Travel Range ࡯ Resolution <0.1 μm ࡯ 2-Phase Stepper Motor ࡯ Manual Positioning Knob ࡯ Sub-nm-Resolution with Optional PZT Actuator ࡯ >5,000 h MTBF

M-168 are compact, high-reso- p. 1-58 for spherical tips and lution linear actuators provid- other options). ing linear motion up to 50 mm with sub-micron resolu- High-Resolution Piezo Option tion. They consist of a microm- The optional piezo tip provides eter drive with non-rotating tip 20 μm travel with sub-nanome- driven by a 6400 microstep/rev ter resolution for dynamic scan- and 2-phase stepper motor. ning and tracking (see p. 1-73).

Non-Rotating Tip Compared to conventional ro- tating-tip micrometer drives, M-168.12S, M-168.22S and M-168.52S dimensions in mm. Sub-D connector 15-pin, 3 m cable included (C-815.38) the non-rotating-tip design of- fers several advantages: Technical Data ࡯ Elimination of torque-indu- ced positioning errors Model M-168.12S M-168.22S M-168.52S Unit ࡯ Elimination of sinusoidal Travel range 10 25 50 mm motion errors Design resolution 0.078 0.078 0.078 μm ࡯ Elimination of wear at the Min. incremental motion 0.3 0.3 0.3 μm contact point Unidirectional repeatability 0.1 0.1 0.1 μm ࡯ Elimination of tip-angle-de- Backlash 2 2 2 μm pendent wobble Max. velocity 5 5 5 mm/s Max. push/pull force 50 50 50 N M-168 Stepper-Mikes feature an Max. lateral force 0.02 0.02 0.02 N (at tip) extremely low-stiction, low-fric- Motor resolution* 6400* 6400* 6400* steps/rev. tion construction allowing for Drive screw pitch 0.5 0.5 0.5 mm/rev. high resolution and repeat- Weight 0.4 0.45 0.5 kg ability. A manual positioning Recommended motor C-663 single-axis C-663 single-axis C-663 single-axis (p. 4-112) knob provides coarse resolu- controllers tion of 5 μm. All models come *2-phase stepper motor, 24 V chopper voltage, max. 0.8 A/phase, 400 full steps/rev.,

© Physik Instrumente (PI) GmbHThe & newest Co. release KG for 2008. data Subjectwith sheets to is change available without for notice. download All at data www.pi.ws. are R1 superseded 10/10/04.0 by any new release. standard flat tips (see motor resolution with C-663 stepper motor controller © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www.pi.ws. R1 11/01/12.0 C-663 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ -xsNtokbeSeprMtrController Stepper-Motor Networkable 1-Axis inri ob otoldb a by controlled be to posi- is precision tioner a where tions applica- control motion flexible and cost-effective stepper for perfect solution the Step is controller motor Mercury The ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ecr tpcnrle ihM436Speiintasainstage translation precision M-403.62S with controller Step Mercury plcto Examples Application CMtrControllers DC-Motor Mercury with Networkable and Compatible aaeesCagal On-the-Fly Changeable Parameters Recorder Data Memory Macro Non-Volatile Control Manual for Port Joystick Applications Multi-Axis for Capability Network Functionality Stand-Alone Cost Low at Performance High ie positioning Fiber applications Photonics equipment Testing control Quality Handling automation Flexible Programmable StepperMotorController&Driver lxbe a eetne tany at extended be can are flexible, networks chain daisy Such and in- PC terface. networked single a over be controlled can control- lers class Mercury 16 to Up Control Multi-Axis motion. high-resolution for ultra-smooth, provides PI motors) with steps/rev. stepper 6400 to step (up full 1/16 of Microstepping C-863 controller. motor successful servo Mercury the supple- ments C-663 The controller). logic (programmable PLC or PC fort. ef- programming minimal with drivers controllers servo piezo multi-axis and as such trollers PI-con- different of networking allows PI-GCS (GCS). Com- Set General mand PI the using opera- ted be can controllers Step Mercury system. your into tion for integra- and allow programming easy DLLs drivers Windows and LabVIEW devices. ler control- multiple of networking supports software included The standard. also is interface RS-232 the an applications, in- dustrial via facilitate To possible interface. is USB PC or top lap- with interchange data Easy Options Interface Two and Package Software Comprehensive User-Friendly: required!). communication run- computer (no time up power at tasks tion automa- run to user-programmable macro autostart a by ded provi- is capability Stand-alone con- be control. also manual for can nected joystick provided. A are lines and output input four four signals trigger of external or internal synchronization with motion easy For recall. later for non-vola- memory the tile in stored be can compound- Macros functionality. and command macro with high-level language the command mnemonic by cost- facilitated very is Programming a way. effective in industry research and in tasks handling and automation of achieve number to features a offers C-663 The Automation Flexible drives. piezostepping or drives ooso tpe motors, stepper PILine or motors servo- DC for controllers with PI compatible over are and time ® lrsncpiezomotor ultrasonic S al n comprehen- package. software a sive and cable USB a cables, communications 232 RS- supply, power wide-range a with comes Step Mercury Each Delivery of Contents uhBto o,4Btosand 4LEDs Buttons 4 Box, Button Push C-170.PB end open m, 2 cable, I/O C-170.IO C-819.20 to Controllers 2 Connecting for Y-Cable C-819.20Y Controller Mercury for Joystick Analog 2-Axis C-819.20 Supply,24V Power Wide-Range with Controller Motor Stepper Step Mercury C-663.11 Information Ordering Technical Data Model C-663.11 Function Stepper motor controller, stand-alone capability Drive type 2-phase stepper motor Channels 1 Motion and control Trajectory profile modes Trapezoidal, point-to-point Microstep resolution 1/16 full step Limit switches 2 x TTL, programmable Reference switches 1 x TTL, programmable Motor brake 1 x TTL, programmable Electrical properties Operating voltage 15 to 30 V Current limitation per motor phase 1000 mA Interface and operation Interface/Communication USB, RS-232 (bus architecture) Motor connector Sub-D 15 (f) Controller network Up to 16 units* on single interface I/O ports 4 analog/digital in, 4 digital out Command set PI General Command Set (GCS) User software PIMikroMove® Software drivers LabVIEW drivers Supported functionality Start-up macro, data recorder for recording parameters as motor input voltage, velocity, position or position error Manual control Joystick, Y-cable for 2D motion, pushbutton box Miscellaneous Operating temperature range 0 to 50 °C Mass 0.3 kg Dimensions 130 x 76 x 40 mm3 *16 with USB; 6 with RS-232 (depending on RS-232 output driver of PC) USA (East) & CANADA USA (West) & MEXICO Program Overview Piezo Ceramic Actuators & Motors PI (Physik Instrumente) L.P. PI (Physik Instrumente) L.P. 16 Albert St. 5420 Trabuco Rd., Suite 100 Piezo Nanopositioning Systems and Scanners Auburn, MA 01501 Irvine, CA 92620 Active Optics / Tip-Tilt Platforms Tel: +1 (508) 832 3456 Tel: +1 (949) 679 9191 Capacitive Nanometrology Sensors Fax: +1 (508) 832 0506 Fax: +1 (949) 679 9292 Piezo Electronics: Amplifiers and Controllers [email protected] [email protected] www.pi-usa.us www.pi-usa.us Hexapod 6-Axis Positioners / Robots Micropositioning Stages & Actuators JAPAN Photonics Alignment Systems, Solutions for PI Japan Co., Ltd. PI Japan Co., Ltd. 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