PI Linear Actuator Catalog
Total Page:16
File Type:pdf, Size:1020Kb
Linear Actuators for Precision Motion Control,/--5 Solutions featuring Novel Piezoelectric Motors and Classical Motors Latest PI Catalogs: www.pi.ws Latest PI Catalogs: www.pi.ws Precision Linear Actuators Overview Motion Control with Piezoelectric / Servo / Stepper Motors PI is the leading manufacturer of ultra-high-precision actua- tors for nanopositioning and micropositioning applications in industries such as Semi- conductors; Biotechnology and Medicine; Lasers, Optics, Micros- copy; Aerospace Engineering; Precision Machining; Astronomy and Microsystems Technology. Section a Section b Section c Motorized Screw Type Actuators PILine® Ceramic Ultrasonic Piezo NEXACT® Compact Piezo DC & Stepper Motors Motor Actuators Stepping Motor Actuators Forces to 400 N High-Speed Piezomotors and PiezoWalk® Drive Travel to 50 mm Drives Compact Dimensions Resolution to 50 nm Velocity to 800 mm/s Forces to 10 N Compact Dimensions <0.1 nm Resolution Travel to 150 mm (Basically Self-Locking at Rest Unlimited) Travel to 25 mm (Basically Forces to 7 N Unlimited) Self-Locking at Rest Velocity to 10 mm/s Resolution to 20 nm Non-Magnetic, Vacuum Non-Magnetic, Vacuum Compatible Compatible Section c Section d Section e Section f NEXLINE® High-Force Piezo Flexure-Guided Piezo Piezo Stack Actuators Motion Controllers (Examples) Stepping Motor Actuators Actuators PICMA® Multilayer and Controllers for Servo Motors PiezoWalk® Drive PICMA® Piezoceramic PICA™ Stack Actuators and Stepper Motors Non-Magnetic, Vacuum Multilayer Actuators Forces to 100 kN Controllers for Ultrasonic Compatible Sub-Nanometer Resolution Sub-Nanometer Resolution Linear Motors ® Forces to 600 N Fast Response (Millisecond- Fast Response (to Controllers for NEXACT <0.1 nm Resolution Range) Microsecond-Range) Linear Motors Self-Locking at Rest Excellent Guiding Precision High Reliability and Long Controllers for Piezo Actuators Basically Unlimited Travel Travel to 1.8 mm Lifetime and Flexure Stages High Reliability, Long Life Travel to 200 µm High-Dynamics Mode Visit www.pi.ws for our full selection of motion 1 controllers & software solutions. Piezo • Nano • Positioning M-228 Stepper Motor Actuator Cost-Effective Stepper-Mike Linear Actuator with Limit Switches the non-rotating-tip design of- Ordering Information fers several advantages: M-228.10S Elimination of torque-induc- Stepper-Mike Linear Actuator, ed positioning errors 10 mm, Limit Switches Elimination of sinusoidal Ask about custom designs! motion errors Elimination of wear at the contact point Elimination of tip-angle- dependent wobble Limit and Reference Switches For the protection of your equip- M-228 linear actuator ment, non-contact Hall-effect limit and reference switches are installed. The direction-sensing reference switch supports ad- Cost-Effective Design vanced automation applications 10 mm Travel Range with high precision. 46 nm Resolution with C-663 Controller Non-Rotating Tip Technical Data Max. Velocity 1.5 mm/s M-228.10S Units Non-contact Limit and Reference Switches Active axes X Compact Design Motion and positioning Travel range 10 mm Sensor resolution Cts./rev. Design resolution 0.046* µm Minimum incremental motion 0.15* µm Backlash 5** µm The linear actuators of the design offers many useful fea- Unidirectional repeatability 1 µm M-228 series provide a travel tures such as a non-rotating Accuracy 10 µm range of 10 mm and are tip, limit and reference switch- Max. velocity 1.5* mm/s equipped with high-resolution es and a mechanical position Origin repeatability 1 µm stepper motors with gearbox. display. Mechanical properties Together with the C-663 con- troller, the M-228 provides a Non-Rotating Tip Spindle Leadscrew Spindle pitch 0.5 mm/rev. resolution of 46 nm for loads Compared to conventional ro- up to 20 N. The cost-effective tating-tip micrometer drives, Gear ratio 28.44444:1 Motor resolution 384* steps/rev. Max. load 20 N Max. push/pull force 20 N Max. lateral force 0.1 N Drive properties Motor type 2-phase stepper motor Operating voltage 24*** V Limit and reference switches Hall-effect Miscellaneous Operating temperature range -20 to +65 °C Material Aluminium anodized, stainless steel Mass 0.23 kg Cable length 0.5 m Connector Sub-D connector 15-pin Recommended controller/driver C-663 (single-channel) Dimensions of the M-228 linear actuator in mm. * with C-663 stepper motor controller Decimal places are separated by commas ** preloaded © PI 1998-2007. Subject to change without notice. This data sheet is superseded by any new 07/05/31.0.2 release. The newest release is available for download at www.pi.ws. *** 2-phase stepper motor, 24 V chopper voltage, max. 0.25 A/phase, 24 full-steps/rev. a-1 Latest PI Catalogs: www.pi.ws M-227 Servo Motor Actuators High-Resolution DC-Mike Actuators Ordering Information M-227.10 DC-Mike Actuator, 10 mm M-227.25 DC-Mike Actuator, 25 mm M-227.50 DC-Mike Actuator, 50 mm M-219.10 Ball Tip M-250.20 Piezo Translator Ask about custom designs! M-227.10 (w/ piezo tip), M-227.25, M-227.50 (w/ ball tip), high-resolution DC-Mike actuators and several tip options 10, 25 & 50 mm Travel Ranges High-Resolution Piezo Option 0.05 µm Minimum Incremental Motion All models come with standard Non-Rotating Tip flat tips. A variety of other tips Closed-Loop DC Motor are also available, such as a Compatible with Leading Industrial Motion Controllers piezoelectric tip featuring 20 µm travel with sub-nanometer Sub-nm Resolution with Optional PZT Drive resolution for dynamic scan- >5,000 Hours MTBF ning and tracking (see page 7-85). For mounting, the DC-Mikes are clamped around the 19 mm diameter section. High forces M-227 are ultra-high-resolution M-227 actuators provide a cost- around the 16 mm diameter linear actuators providing lin- effective solution for industrial section must be avoided, as ear motion up to 50 mm with and OEM environments. Based must be lateral forces on the sub-micron resolution in a on the successful M-222/M-226 tip. compact package. They consist series which they replace, of a micrometer with non-rotat- M-227 DC Mikes offer both im- Stepper-motor-driven versions ing tip, driven by a closed-loop proved specs and reduced of the M-227 are available on DC-motor/gearhead combina- costs. The combination of an request. For higher loads and tion with motor-shaft-mounted extremely low stiction/friction integrated limit switches refer high-resolution encoder (2048 construction and high-resolu- to the M-230 and M-235 (see counts/rev.). tion encoder allows for a mini- pages 7-78 and 7-82). mum incremental motion of Non-Rotating Tip 50 nanometers at speeds up to Compared to conventional 1 mm/sec. rotating-tip micrometer drives the non-rotating-tip design Integrated Line Drivers offers several advantages; it Each actuator includes an inte- eliminates: grated 0.1 m cable with 15-pin sub-D connector and a 3 m Torque-induced stage extension cable. The connector platform tilt features integrated line drivers Sinusoidal motion errors for cable lengths up to 10 me- Wear at the contact point ters between actuator and con- © PI 1998-2005. Subject to change w/o notice. Cat 118 05/09.17 Tip-angle-dependent wobble troller. a-2 Piezo • Nano • Positioning M-219.10 ball tip option P-250.20 piezo tip option M-227 DC-Mike, dimensions (in mm). C-815.38 motor cable included: 3 m, sub-D, 15/15 pin (m/f). Technical Data Models M-227.10 M-227.25 M-227.50 Units Notes see page 7-106 Travel range 10 25 50 mm Design resolution 0.0035 0.0035 0.0035 µm A3 Min. incremental motion 0.05 0.05 0.05 µm A4 Unidirectional repeatability 0.1 0.1 0.1 µm Backlash 2 2 2 µm Max. velocity 1 1 1 mm/s Max. push/pull force* 40 40 40 N Max. lateral force 0.1 0.1 0.1 N (at tip) Encoder resolution 2048 2048 2048 counts/rev. Drivescrew pitch 0.5 0.5 0.5 mm/rev. Gear ratio 69.12:1 69.12:1 69.12:1 Nominal motor power 2 2 2 W Motor voltage 12 12 12 V Weight 0.16 0.22 0.26 kg Recommended motor controllers C-842, C-844, C-860 C-842, C-844, C-860 C-842, C-844, C-860 D2 * Higher forces on request a-3 Latest PI Catalogs: www.pi.ws M-230 Servo & Stepper Motor Actuators High-Resolution Closed-Loop DC-Mike & Stepper Actuators Ordering Information M-230.10 DC-Mike Actuator, 10 mm, Limit Switches M-230.25 DC-Mike Actuator, 25 mm, Limit Switches M-230.10S Stepper-Mike Actuator, 10 mm, Limit Switches M-230.25S Stepper-Actuator, 25 mm, Limit Switches M-230.10, M-230.25, high-resolution DC-Mike actuators, 10 and 25 mm travel range Ask about custom designs! 10 & 25 mm Travel Range Integrated Line Drivers features integrated line drivers 0.05 µm Minimum Incremental Motion M-230 actuators include an for cable lengths up to 10 meters between actuator and Non-Rotating Tip integral 0.5 m cable with 15-pin controller. Velocity to 2 mm/sec. sub-D connector and a 3 m extension cable. On the DC- Closed-Loop DC Motors and Stepper Motors servo versions, the connector A screw-in ball tip and a flat tip Compatible with Leading Industrial Motion Controllers are included. Integrated Hall-Effect Origin and Limit Switches Front Mount or Clamp Mount For higher loads and travel >5,000 Hours MTBF ranges refer to the M-235 on page 7-82. M-230 are ultra-high-resolution Elimination of torque- linear actuators providing lin- induced positioning errors ear motion up to 25 mm with Elimination of sinusoidal sub-micron resolution in a motion errors compact package.