PI Linear Actuator Catalog

Linear Actuators for Precision Motion Control,/--5 Solutions featuring Novel Piezoelectric Motors and Classical Motors

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Precision Linear Actuators Overview Motion Control with Piezoelectric / Servo / Stepper Motors

PI is the leading manufacturer of ultra-high-precision actuators for nanopositioning and micropositioning applications in industries such as Semi- conductors; Biotechnology and Medicine; Lasers, Optics, Micros- copy; Aerospace Engineering; Precision Machining; Astronomy and Microsystems Technology.

Section a Section b Section c

Motorized Screw Type Actuators PILine® Ceramic Ultrasonic Piezo NEXACT® Compact Piezo

DC & Stepper Motors Motor Actuators Stepping Motor Actuators Forces to 400 N High-Speed Piezomotors and PiezoWalk® Drive Travel to 50 mm Drives Compact Dimensions Resolution to 50 nm Velocity to 800 mm/s Forces to 10 N Compact Dimensions <0.1 nm Resolution Travel to 150 mm (Basically Self-Locking at Rest Unlimited) Travel to 25 mm (Basically Forces to 7 N Unlimited) Self-Locking at Rest Velocity to 10 mm/s Resolution to 20 nm Non-Magnetic, Vacuum Non-Magnetic, Vacuum Compatible Compatible

Section c Section d Section e Section f

NEXLINE® High-Force Piezo Flexure-Guided Piezo Piezo Stack Actuators Motion Controllers (Examples) Stepping Motor Actuators Actuators PICMA® Multilayer and Controllers for Servo Motors PiezoWalk® Drive PICMA® Piezoceramic PICA™ Stack Actuators and Stepper Motors Non-Magnetic, Vacuum Multilayer Actuators Forces to 100 kN Controllers for Ultrasonic Compatible Sub-Nanometer Resolution Sub-Nanometer Resolution Linear Motors ® Forces to 600 N Fast Response (Millisecond- Fast Response (to Controllers for NEXACT <0.1 nm Resolution Range) Microsecond-Range) Linear Motors Self-Locking at Rest Excellent Guiding Precision High Reliability and Long Controllers for Piezo Actuators Basically Unlimited Travel Travel to 1.8 mm Lifetime and Flexure Stages High Reliability, Long Life Travel to 200 µm High-Dynamics Mode Visit www.pi.ws for our full selection of motion 1 controllers & software solutions. Piezo • Nano • Positioning

M-228 Stepper Motor Actuator Cost-Effective Stepper-Mike Linear Actuator with Limit Switches

the non-rotating-tip design of- Ordering Information fers several advantages: M-228.10S Elimination of torque-induc- Stepper-Mike Linear Actuator, ed positioning errors 10 mm, Limit Switches Elimination of sinusoidal Ask about custom designs! motion errors Elimination of wear at the contact point Elimination of tip-angle- dependent wobble

Limit and Reference Switches For the protection of your equip-

M-228 linear actuator ment, non-contact Hall-effect limit and reference switches are installed. The direction-sensing reference switch supports ad- Cost-Effective Design vanced automation applications 10 mm Travel Range with high precision. 46 nm Resolution with C-663 Controller Non-Rotating Tip Technical Data Max. Velocity 1.5 mm/s M-228.10S Units Non-contact Limit and Reference Switches Active axes X Compact Design Motion and positioning Travel range 10 mm Sensor resolution Cts./rev. Design resolution 0.046* µm Minimum incremental motion 0.15* µm Backlash 5** µm The linear actuators of the design offers many useful fea- Unidirectional repeatability 1 µm M-228 series provide a travel tures such as a non-rotating Accuracy 10 µm range of 10 mm and are tip, limit and reference switch- Max. velocity 1.5* mm/s equipped with high-resolution es and a mechanical position Origin repeatability 1 µm stepper motors with gearbox. display. Mechanical properties Together with the C-663 controller, the M-228 provides a Non-Rotating Tip Spindle Leadscrew Spindle pitch 0.5 mm/rev. resolution of 46 nm for loads Compared to conventional ro- up to 20 N. The cost-effective tating-tip micrometer drives, Gear ratio 28.44444:1 Motor resolution 384* steps/rev. Max. load 20 N Max. push/pull force 20 N Max. lateral force 0.1 N Drive properties Motor type 2-phase stepper motor Operating voltage 24*** V Limit and reference switches Hall-effect Miscellaneous Operating temperature range -20 to +65 °C Material Aluminium anodized, stainless steel Mass 0.23 kg Cable length 0.5 m Connector Sub-D connector 15-pin Recommended controller/driver C-663 (single-channel) Dimensions of the M-228 linear actuator in mm. * with C-663 stepper motor controller Decimal places are separated by commas ** preloaded

© PI 1998-2007. Subject to change without notice. This data sheet is superseded by any new 07/05/31.0.2 release. The newest release is available for download at www.pi.ws. *** 2-phase stepper motor, 24 V chopper voltage, max. 0.25 A/phase, 24 full-steps/rev. a-1 Latest PI Catalogs: www.pi.ws

M-227 Servo Motor Actuators High-Resolution DC-Mike Actuators

Ordering Information

M-227.10 DC-Mike Actuator, 10 mm

M-227.25 DC-Mike Actuator, 25 mm

M-227.50 DC-Mike Actuator, 50 mm

M-219.10 Ball Tip

M-250.20 Piezo Translator

Ask about custom designs!

M-227.10 (w/ piezo tip), M-227.25, M-227.50 (w/ ball tip), high-resolution DC-Mike actuators and several tip options

10, 25 & 50 mm Travel Ranges High-Resolution Piezo Option 0.05 µm Minimum Incremental Motion All models come with standard Non-Rotating Tip flat tips. A variety of other tips Closed-Loop DC Motor are also available, such as a Compatible with Leading Industrial Motion Controllers piezoelectric tip featuring 20 µm travel with sub-nanometer Sub-nm Resolution with Optional PZT Drive resolution for dynamic scan- >5,000 Hours MTBF ning and tracking (see page 7-85).

For mounting, the DC-Mikes are clamped around the 19 mm diameter section. High forces M-227 are ultra-high-resolution M-227 actuators provide a cost- around the 16 mm diameter linear actuators providing lin- effective solution for industrial section must be avoided, as ear motion up to 50 mm with and OEM environments. Based must be lateral forces on the sub-micron resolution in a on the successful M-222/M-226 tip. compact package. They consist series which they replace, of a micrometer with non-rotat- M-227 DC Mikes offer both im- Stepper-motor-driven versions ing tip, driven by a closed-loop proved specs and reduced of the M-227 are available on DC-motor/gearhead combina- costs. The combination of an request. For higher loads and tion with motor-shaft-mounted extremely low stiction/friction integrated limit switches refer high-resolution encoder (2048 construction and high-resolu- to the M-230 and M-235 (see counts/rev.). tion encoder allows for a mini- pages 7-78 and 7-82). mum incremental motion of Non-Rotating Tip 50 nanometers at speeds up to Compared to conventional 1 mm/sec. rotating-tip micrometer drives the non-rotating-tip design Integrated Line Drivers offers several advantages; it Each actuator includes an inte- eliminates: grated 0.1 m cable with 15-pin sub-D connector and a 3 m Torque-induced stage extension cable. The connector platform tilt features integrated line drivers Sinusoidal motion errors for cable lengths up to 10 me- Wear at the contact point ters between actuator and con-

M-219.10 ball tip option P-250.20 piezo tip option

M-227 DC-Mike, dimensions (in mm). C-815.38 motor cable included: 3 m, sub-D, 15/15 pin (m/f).

Technical Data Models M-227.10 M-227.25 M-227.50 Units Notes see page 7-106 Travel range 10 25 50 mm Design resolution 0.0035 0.0035 0.0035 µm A3 Min. incremental motion 0.05 0.05 0.05 µm A4 Unidirectional repeatability 0.1 0.1 0.1 µm Backlash 2 2 2 µm Max. velocity 1 1 1 mm/s Max. push/pull force* 40 40 40 N Max. lateral force 0.1 0.1 0.1 N (at tip) Encoder resolution 2048 2048 2048 counts/rev. Drivescrew pitch 0.5 0.5 0.5 mm/rev. Gear ratio 69.12:1 69.12:1 69.12:1 Nominal motor power 2 2 2 W Motor voltage 12 12 12 V Weight 0.16 0.22 0.26 kg Recommended motor controllers C-842, C-844, C-860 C-842, C-844, C-860 C-842, C-844, C-860 D2 * Higher forces on request a-3 Latest PI Catalogs: www.pi.ws

M-230 Servo & Stepper Motor Actuators High-Resolution Closed-Loop DC-Mike & Stepper Actuators

Ordering Information

M-230.10 DC-Mike Actuator, 10 mm, Limit Switches

M-230.25 DC-Mike Actuator, 25 mm, Limit Switches

M-230.10S Stepper-Mike Actuator, 10 mm, Limit Switches

M-230.25S Stepper-Actuator, 25 mm, Limit Switches M-230.10, M-230.25, high-resolution DC-Mike actuators, 10 and 25 mm travel range Ask about custom designs!

10 & 25 mm Travel Range Integrated Line Drivers features integrated line drivers 0.05 µm Minimum Incremental Motion M-230 actuators include an for cable lengths up to 10 meters between actuator and Non-Rotating Tip integral 0.5 m cable with 15-pin controller. Velocity to 2 mm/sec. sub-D connector and a 3 m extension cable. On the DC- Closed-Loop DC Motors and Stepper Motors servo versions, the connector A screw-in ball tip and a flat tip Compatible with Leading Industrial Motion Controllers are included. Integrated Hall-Effect Origin and Limit Switches Front Mount or Clamp Mount For higher loads and travel >5,000 Hours MTBF ranges refer to the M-235 on page 7-82.

M-230 are ultra-high-resolution Elimination of torque- linear actuators providing lin- induced positioning errors ear motion up to 25 mm with Elimination of sinusoidal sub-micron resolution in a motion errors compact package. They consist Elimination of wear at the of a micrometer with non-rotat- contact point ing tip driven by a 2-phase Elimination of tip-angle- stepper motor or a closed-loop dependent wobble DC motor/gearhead combination with motor-shaft-mounted, high-resolution encoder (2048 M-230 actuators provide a cost- counts/rev.). effective solution for heavier- duty industrial and OEM envi- Non-Rotating Tip ronments. They feature ex Compared to conventional tremely low-stiction, low-fric- rotating-tip micrometer drives, tion construction, allowing for the non-rotating-tip design minimum incremental motion offers several advantages: as low as 50 nanometers and speeds up to 2 mm/sec. Application Examples Non-Contact Limit and Origin Photonics packaging Switches Fiber alignment Integrated, non-contact, high- Quality control precision Hall-effect origin and limit switches protect your Test equipment M-230. Cable length: 500 mm, equipment and increase versa- 15-pin sub-D connector with tility in automation applica- integrated line drivers (DC motor Metrology models). Dimensions in mm.

Ball tip (included) Flat tip (included)

Technical Data Models M-230.10 M-230.25 M-230.10S M-230.25S Units Notes see page 7-106 Travel range 10 25 10 25 mm Design resolution 0.0046 0.0046 0.0012 0.0012 µm A3 Min. incremental motion 0.05 0.05 0.05 0.05 µm A4 Unidirectional repeatability 0.1 0.1 0.1 0.1 µm Backlash 2 2 2 2 µm Max. velocity 1.5 1.5 2 2 mm/s Max. push/pull force 70 70 45** 45** N Max. lateral force 30 20 30 20 N (at tip) Encoder resolution 2048 2048 - - counts/rev. Motor resolution - - 1200* 1200* steps/rev. Drivescrew pitch 0.4 0.4 0.4 0.4 mm/rev.

Gear ratio 42.92:1 42.92:1 28.44444:1 28.44444:1 C-815.38 motor cable Nominal motor power 2 2 * * W included: 3 m, sub-D, 15/15 pin (m/f). Motor voltage 12 12 24* 24* V * 2-phase stepper, 24 V Origin and limit switches Hall-Effect Hall-Effect Hall-Effect Hall-Effect chopper voltage, max. Weight 0.30 0.35 0.30 0.35 kg 250 mA / phase, 1,200 microsteps with C-600, Recommended motor C-843, C-848, C-862 C-843, C-848, C-862 C-600, C-630 C-600, C-630 D2 C-630 controllers controllers ** at up to 1 mm/sec.

a-5 M-231 Servo Motor Actuator High-Resolution Closed-Loop DC-Mike Actuators

Ordering Information

M-231.17 DC-Mike Actuator, 17 mm, Limit Switches

Ask about custom designs!

M-231.17 high-resolution DC-Mike actuator, 17 mm travel range

17 mm Travel Range sub-D connector and a 3 m 0.1 µm Minimum Incremental Motion Non-Contact Limit and Origin extension cable. The connector Switches features integrated line drivers Velocity up to 2.5 mm/sec. for cable lengths up to 10 Closed-Loop DC Motor Integrated, non-contact, high- precision Hall-effect origin and meters between actuator and Compatible with Leading Industrial Motion Controllers controller. limit switches protect your Integrated Hall-Effect Origin and Limit Switches equipment and increase versa- Fits M-105 & F-110 Fiber Aligners tility in automation applica- Stepper-motor-driven versions >5,000 Hours MTBF tions. of the M-231 are available on request. Integrated Line Drivers For higher loads and travel The M-231 is an ultra-high-res- tion construction allowing for Each actuator includes an inte- ranges, refer to the M-230 and olution linear actuator provid- minimum incremental motion gral 0.5 m cable with 15-pin M-235 on pages 7-78 and 7-82. ing linear motion up to 17 mm of 100 nanometers at speeds with sub-micron resolution in a up to 2.5 mm/sec. compact package. It consists of a leadscrew which is driven by a closed-loop DC motor/gearhead combination with motor- shaft-mounted, high-resolution encoder (2048 counts/rev.).

Upgrade for Manual Aligners The M-231 was especially designed to fit existing manual M-231 mounted on translation stages (e.g. M-105, M-105 XYZ positioning see page 7-30) and F-110 piezo- systems electric fiber alignment systems (see page 8-24 in the “Photonics” section) as a direct Technical Data replacement for a manual Models M-231.17 Units Notes see p. 7-106 micrometer. Travel range 17 mm Design resolution 0.007 µm A3 M-231 actuators provide a cost- Min. incremental motion 0.1 µm A4 effective solution in industrial Unidirectional repeatability 0.2 µm and OEM environments. They Backlash 2 µm feature a low-stiction low-fric- Max. velocity 2.5 mm/s Max. push/pull force 40 N Application Examples Max. lateral force 0 N (at tip) Encoder resolution 2048 counts/rev. Photonics packaging Drive screw pitch 0.4 mm/rev. Fiber alignment Gear ratio 28.44444:1 Quality control Nominal motor power 2 W Motor voltage 12 V Test equipment M-231, dimensions (in mm). Weight 0.17 kg Cable length: 500 mm, 15-pin, sub-D Metrology connector with integrated line drivers Recommended motor C-843, C-848, D2

M-232 Servo Motor Actuator Compact, High-Resolution, Closed-Loop DC-Mike Actuator

Ordering Information

M-232.17 Compact DC-Mike Actuator, 17 mm, Limit Switches

Ask about custom designs!

Integrated Line Drivers Each actuator includes an inte- M-232.17 high-resolution DC-Mike actuator mounted on M-105 translation stage gral 0.5 m cable with 15-pin sub-D connector and a 3 m extension cable. The connector 17 mm Travel Range features integrated line drivers 0.1 µm Minimum Incremental Motion for cable lengths up to 10 meters between actuator and Velocity up to 2.5 mm/sec. controller. Closed-Loop DC Motor Compatible with Leading Industrial Motion Controllers Stepper-motor-driven versions Integrated Hall-Effect Limit and Origin Switches of the M-232 are available on Fits M-105 & F-110 Fiber Aligners request. For higher loads and >5,000 Hours MTBF travel ranges refer to the M-230 and M-235 datasheets on pages 7-68 and 7-72. The M-232 is an ultra-high-res- environments. They feature a Index olution linear actuator provid- low-stiction, low-friction con- ing linear motion up to 17 mm struction allowing for mini- with sub-micron resolution in a mum incremental motion of compact package. It features a 100 nanometers at speeds of space-saving design with a up to 2.5 mm/sec. leadscrew side-by-side to a Non-Contact Limit and Origin closed-loop DC motor / gear- M-232, head combination and a high- Switches dimensions resolution encoder (2048 Integrated, non-contact, high- (in mm). Cable length: counts/rev.). precision Hall-effect origin and 500 mm, limit switches, protect your 15-pin sub-D Upgrade for Manual Stages connector with equipment and increase versa- integrated line The M-232 was especially de- tility in automation applications. drivers. signed to fit existing manual translation stages (e.g. M-105) Technical Data and F-110 piezoelectric fiber Models M-232.17 Units Notes see p. 7-106 alignment systems as a direct Travel range 17 mm replacement for a manual Design resolution 0.007 µm A3 micrometer. M-232 actuators Min. incremental motion 0.1 µm A4 provide a cost-effective solu- Unidirectional repeatability 0.2 µm tion in industrial and OEM Backlash 2 µm Max. velocity 2.5 mm/s Max. push/pull force 40 N Application Examples Max. lateral force 0 N (at tip) Encoder resolution 2048 counts/rev. Photonics packaging Drive screw pitch 0.4 mm/rev. Fiber alignment Gear ratio 28.44444:1 Nominal motor power 2 W Quality control Motor voltage 12 V Test equipment Limit switches Hall-Effect Metrology Weight 0.17 kg Recommended motor controllers C-843, C-848, C-862 D2 © PI 1998-2005. Subject to change w/o notice. Cat 118 05/09.17

a-7 M-235 Servo & Stepper Motor Actuators Heavy-Duty High-Resolution Closed-Loop DC-Mike & Stepper Actuators

high-speed positioning appli- Ordering Information cations. M-235.2DG Heavy-Duty, High-Resolution DC- Non-Contact Limit and Origin Mike Actuator, 20 mm, Ballscrew, Switches Limit Switches

Integrated, non-contact, high- M-235.2VG precision Hall-effect origin and Vacuum Version of M-235.2DG limit switches, protect your M-235.2DD equipment and increase versa- Heavy-Duty, High-Resolution DC- tility in automation applica- Mike Actuator, Direct Drive, 20 mm, tions. Ballscrew, Limit Switches M-235.2VD M-235.2DG (top) and Integrated Line Drivers Vacuum Version of M-235.2DD M-235.5DG (bottom) high- M-235 actuators with DC resolution DC-Mike, ballscrew. M-235.22S motors include an integral Heavy-Duty, High-Resolution 0.5 m cable with 15-pin sub-D Stepper-Mike Actuator, 20 mm, connector and a 3 m extension Ballscrew, Limit Switches 20 mm or 50 mm Travel Range cable. The connector features 0.1 µm Minimum Incremental Motion M-235.5DG integrated line drivers for cable Heavy-Duty, High-Resolution DC- High-Speed Direct Drive Option lengths up to 10 meters Mike Actuator, 50 mm, Ballscrew, 120 N Push/Pull Load between actuator and con- Limit Switches 100 N Lateral Load Limit troller. M-235.5VG Preloaded Ultra-Low-Friction Ball Screw with Vacuum Version of M-235.5DG A screw-on ball tip and a flat tip Non-Rotating Tip M-235.5DD are included. Heavy-Duty, High-Resolution Closed-Loop DC Motors and Stepper Motors DC-Mike Actuator, Direct Drive, For smaller sizes and lower- Compatible with Leading Industrial Motion Controllers 50 mm, Ballscrew, Limit Switches duty applications, refer to the Integrated Hall-Effect Limit & Origin Switches M-230, M-231, M-232 and M-235.5VD Vacuum Version of M-235.5DD >20,000 Hours MTBF M-227 and M-168 see p. 7-76, Vacuum Versions p. 7-78, p. 7-80, p. 7-81, and M-235.52S p. 7-84. Heavy-Duty, High-Resolution Stepper-Mike Actuator, 50 mm, The M-235 is an ultra-high-res- Non-Rotating Tip Ballscrew, Limit Switches olution linear actuator provid- Compared to conventional ro- Higher speed M-235 versions on ing linear motion of up to 50 tating-tip micrometer drives, request mm with sub-micron resolu- the non-rotating-tip design Ask about custom designs! tion in a compact package. It offers several advantages: consists of a preloaded ultra- low-friction, heavy-duty ball- Elimination of torque- screw which is driven by a induced positioning errors 2-phase stepper motor or a Elimination of sinusoidal closed-loop DC motor with mo- motion errors tor-shaft-mounted, high-reso- Elimination of wear at the lution encoder (2048 counts/ contact point rev.). Elimination of tip-angle- dependent wobble Application Examples M-235 actuators provide a cost- Quality control effective solution for heavy- duty industrial and OEM envi- Test equipment ronments. They feature an Flexible automation extremely low stiction, low-fric- Metrology tion construction, allowing for minimum incremental motion Photonics packaging as low as 100 nanometers. The M-235.52S high-resolution Fiber alignment M-235.5DD version is equipped Stepper-Mike, 50 mm travel range, ballscrew.

Ball tip (included) M-235.22S and M-235.52S dimensions (in mm). M-235.2DD, .2DG and M-235.5DD, .5DG. Cable length: 500 mm, 15-pin sub-D connector with integrated line drivers. Dimensions in mm.

Technical Data Models M-235.2DG M-235.2DD M-235.22S M-235.5DG M-235.5DD M-235.52S Units Notes see page 7-106 Travel range 20 20 20 50 50 50 mm Design resolution 0.016 0.5 0.05 0.016 0.5 0.05 µm A3 Min. incremental motion 0.1 0.5 0.1 0.1 0.5 0.1 µm A4 Unidirectional repeatability 0.1 0.5 0.2 0.1 0.5 0.2 µm Bidirectional repeatability 1 1 1 1 1 1 µm Max. velocity 3 >30 20 3 >30 20 mm/s Max. push/pull force 120 >50 100** 120 >50 100** N Max. lateral force (at tip) 100 100 100 100 100 100 N Encoder resolution 2048 2048 - 2048 2048 - counts/rev. Motor resolution - - 20,000* - - 20,000* steps/rev. Ballscrew pitch 1 1 1 1 1 1 mm/rev. Gear ratio 29.6:1 - - 29.6:1 - - Nominal motor power 4 17 - * 4 17 -* W Motor voltage 12 12 24 * 12 12 24 * V Origin and limit switches Hall-Effect Hall-Effect Hall-Effect Hall-Effect Hall-Effect Hall-Effect Mass 0.55 0.50 0.65 0.7 0.65 0.8 kg Recommended motor controllers C-843, C-848, C-862 C-600, C-630 C-843, C-848, C-862 C-600, C-630 D2 C-862 C-862 C-815.38 motor cable included: 3 m, sub-D, 15/15 pin (m/f). * 2-phase stepper, 24 V chopper voltage, max. 0.8 A / phase, 20,000 microsteps with C-600, C-630 controllers. ** at up to 10 mm/sec a-9 M-238 Servo Motor Actuators High-Load, High-Resolution Linear Actuator with Optional Linear Encoder

high-efficiency PWM (pulse Ordering Information width modulation) servo- amplifier mounted side-by- M-238.5PG Heavy-Duty DC-Mike Actuator, side with the DC-Motor and 400 N, 50 mm, ActiveDrive™ offers several advantages: M-238.5PL* Heavy-Duty DC-Mike Actuator, Increased efficiency, by 400 N, 50 mm, ActiveDrive™, eliminating power losses Direct-Metrology Encoder between the amplifier and * Ask for availability in your region motor Reduced cost of ownership and improved reliability, because no external driver Ballscrews for High Speed, is required Precision and Lifetime Elimination of PWM amplifi- The precision-ground ball- er noise radiation, by screw is maintenance-free and mounting the amplifier and M-238.5PL Heavy-Duty Mike actuator (with CD for size comparison) preloaded to eliminate mecha- motor together in a single, nical play. Its significantly re- electrically shielded case duced friction, compared to High Load Capacity to 400 N conventional leadscrews, allows Non-Rotating Tip Travel Range 50 mm for higher velocity, lower Resolution to 0.1 µm Compared to conventional power consumption and longer Max. Velocity 30 mm/s rotating-tip micrometer drives, lifetime. the non-rotating-tip design Preloaded Frictionless Ball Screw offers several advantages: Optional 0.1 µm Direct-Metrology Linear Encoder for Limit and Reference Switches For the protection of your Exceptional Precision Elimination of torque- equipment, non-contact Hall- MTBF >20,000 h induced positioning errors effect limit and reference Vacuum-Compatible Versions Available for 10-6 hPa Elimination of sinusoidal switches are installed. The motion errors direction-sensing reference The M-238 is a high-load, high- Direct Metrology Linear Elimination of wear at the switch supports advanced precision actuator providing Encoder to Compensate contact point automation applications with linear motion up to 50 mm, a Mechanical Play Elimination of tip-angle high precision. load capacity to 400 N and high The M-238.5PL model is dependent wobble velocity to 30 mm/s. It consists equipped with a non-contact, of a low-friction, heavy-duty optical, linear encoder (direct The lateral guiding of the tip ballscrew, driven by a closed- metrology) with an output withstands lateral forces of up loop, ActiveDrive™ DC-Motor resolution of 0.1 µm. Because to 100 N. with gearbox. The M-238 the encoder measures the actu- is therefore well suited for al position of the non-rotating high duty-cycle operation in actuator tip, drive-train errors industrial environments. An like backlash and elastic defor- optional linear encoder pro- mations are eliminated. A vides exceptional accuracy and lower-cost version with a ro- repeatability. tary encoder is available as model number M-238.5PG. Application Examples

Quality assurance testing ActiveDrive™ DC-Motor Testing equipment DC motor drives offer several advantages, such as high Precision machining dynamics, high torque at low Astronomy rotational speed, low heat and low vibration. Flexible automation Metrology The ActiveDrive™ design, M-238 dimensions in mm

© PI 1998-2006. Subject to change without notice. This data sheet is superseded by any new R1 06/08/24.0 release. The newest release is available for download at www.pi.ws. developed by PI, features a a-10 Piezo • Nano • Positioning

M-238.5PL velocity at 30 mm/s is highly constant.

M-238.5PL repeatability is better than 0.3 µm.

The settling time for a 30 mm step is less than 1.5 seconds.

Technical Data Models M-238.5PG M-238.5PL Units Tolerance Active axes X X Motion and positioning Travel range 50 50 mm Integrated sensor Rotary encoder Linear encoder Sensor resolution 4000 cts/rev. 0.1 µm Design resolution 0.13 0.1 µm typ. Min. incremental motion 0.5 0.3 µm typ. Backlash 3 1 µm typ. Unidirectional repeatability 1 0.3 µm typ. Max. velocity 30 30 mm/s Origin repeatability 1 1 µm ±20 % Mechanical properties Spindle pitch 2 2 mm/rev. Gear ratio 3.71:1 3.71:1 Push/pull force 400 400 N Max. Lateral force 100 100 N Max. Drive properties Motor type DC-motor, ActiveDrive™ DC-motor, ActiveDrive™ Operating voltage 24 (PWM) 24 (PWM) V Electrical power 80 80 W nominal Miscellaneous Operating temperature range -10 to 50 -10 to 50 °C Material Al (anodized), steel Al (anodized), steel Mass 2.4 2.4 g ±5 % Cable length 3 3 m ±10 mm Connector D-Sub 15 (m) D-Sub 15 (m) Recommended controller/driver C-862, C-843 C-862, C-843 a-11 Piezo • Nano • Positioning

M-122 Servo Motor Linear Slide Fast Miniature Linear Translation Stage with Integrated Optical Linear Encoder

Ordering Information

M-122.2DD Accessories High-Precision Translation Stage, M-122.AP1 25 mm, Direct-Drive DC Motor, Angle bracket for vertical Ballscrew mounting of M-122 stages Ask about custom designs The M-122.2DD miniature translation stage features an optical linear encoder with 0.1 µm position resolution and a highly effi- cient ballscrew

Travel Range 25 mm 0.1 µm Optical Linear Encoder for Highest Accuracy & Repeatability Min. Incremental Motion to 0.2 µm Max. Velocity 20 mm/s Cross-Roll Bearings Recirculating Ball Screw Drives Provide High Speeds & Long Lifetimes

M-122.2DD dimensions in mm, The M-122 palm-top-sized trans- efficiency than leadscrews, and 3 m cable, Sub-D connector 15-pin lation stage combines small allows maintenance-free, high dimensions, high speeds and duty-cycle operation at high Technical Data very high accuracy at a compet- velocities up to 20 mm/sec. M-122.2DD itive price. It features a space- Active axes X saving, folded drive train with XY and XYZ Combinations Motion and positioning the servo motor and drive screw M-122 stages can be combined Travel range 25 mm side-by-side. Equipped with a to very compact XY and XYZ Integrated sensor Linear encoder non-contacting optical linear systems. The M-122.AP1 moun- Sensor resolution 0.1 µm encoder and a preloaded, preci- ting bracket is available to Design resolution 0.1 µm sion-ground, ball-screw, these mount the Z-axis. Min. incremental motion 0.2 µm stages can provide much higher Backlash 0.2 µm accuracy and better repeatabili- Limit and Reference Switches Unidirectional repeatability 0.15 µm Pitch ±150 µrad ty than conventional stepper For the protection of your equip- Yaw ±150 µrad motor stages or rotary encoder- ment, non-contact Hall-effect Max. velocity 20 mm/s equipped servo motor stages. limit and reference switches are Origin repeatability 1 µm installed. The direction-sensing Mechanical properties Low Friction, High Speed, reference switch supports Drive screw Recirculating ballscrew Maintenance-Free advanced automation applica- Thread pitch 0.5 mm Due to its low-friction, the back- tions with high precision. Stiffness in motion direction 0.25 N/µm lash-free ball screw yields sig- Max. load 50 N Low Cost of Ownership nificantly higher mechanical Max. push/pull force 20 N The combination of these posi- Max. lateral force 25 N Application Examples tioners with the networkable, Drive properties single-channel C-862 Mercury™ Motor type DC motor Photonics packaging servo motor controller (s. p. 9-6) Operating voltage 0 to ±12 V Electrical power 2.25 W Fiber positioning offers high performance for a very competitive price in both Limit and reference switches Hall-effect Miscellaneous Metrology single- and multiaxis configura- Operating temperature range -20 to +65 tions. For multiaxis applica- Quality assurance testing Material Aluminum, steel tions, the C-843 PC plug-in con- Testing equipment Dimensions 86 x 60 x 20.5 mm troller board with on-board Mass 0.22 kg Micromachining servo amplifiers (s. p. 9-8) is Recommended controller/driver C-862 (single-axis)

© PI 1998-2006. Subject to change without notice. This data sheet is superseded by any new 07/06/019.0 release. The newest release is available for download at www.pi.ws. another cost-effective alternative. C-843 PCI board (up to 4 axes) a-12 Latest PI Catalogs: www.pi.ws

M-413 Servo & Stepper Motor Linear Slides High-Load Translation Stages for Cost-Sensitive Precision Positioning Applications

Ordering Information

3 Linear Translation Stage with leadscrew, 120 mm wide 4 Precision-Linear Stage with ball screw, 120 mm wide PD ActiveDrive™ DC Motor (includes 24 V power supply)

M-41 . DG DC Motor Gearhead 2S 2-Phase Stepper Motor VP ActiveDrive™ DC Motor 1 Travel Range 100 mm (includes 24 V power 2 Travel Range 200 mm supply), Vacuum Compati- 3 Travel Range 300 mm ble to 10-6 hPa M-413 linear stage versions (from right: the M-413.1PD, M-413.2PD and VG DC Motor Gearhead, Vacu- M-413.3PD provide travel ranges from 100 to 300 mm (CD for size comparison) um Compatible to 10-6 hPa

For Cost-Sensitive Precision Positioning Applications are polished to guide the car- together in a single, electri- Travel Ranges 100 to 300 mm riage with optimum straight- cally shielded case Resolution to 0.018 µm ness and flatness. M41x.xDG models are equipp- Min. Incremental Motion to 0.1 µm Low Cost of System ed with a DC motor with a low- Preloaded Precision Leadscrew or Recirculating Ball Screw Ownership backlash gearhead and a shaft- Drives Provide High Speeds & Long Lifetimes The combination of these mounted optical encoder to Stress-Relieved Aluminum Base for Highest Stability stages with the networkable give a minimum incremental Vacuum-Compatible Versions Available single-axis C-862 Mercury™ motion of 0.1 µm. M-413 and M-414 Versions for Reduced Load Requirements (s. p. 9-6) and C-663 Mercury™ M-41x.x2S models feature a Step controllers offers high per- cost-effective direct-drive, The M-413 and M-414 linear ture a low-friction ball screw formance for a very competi- 2-phase stepper motor, provid- translation stage series provide offering a minimum incremen- tive price in both single and ing very smooth operation and cost effective solutions for pre- tal motion down to 0.1 µm. multiaxis configurations. Alter- a resolution of 0.2 µm. cision positioning of higher Three motor drive options natively, the C-843 motion con- loads up to 50 kg over travel allow the optimum adaptation troller PCI card with on-board Limit and Reference Switches ranges up to 300 mm. to the requirements of different servo amplifiers (!) is available. For the protection of your They are designed with a preci- automation applications. equipment, non-contact Hall- sion-machined, high-density, M-413s and M-414s are avail- Three Motor Drive Options effect limit and reference stress-relieved aluminum base able in 3 lengths providing trav- M-41x.xPD high-speed versions switches are installed. The for exceptional stability and el ranges from 100 to 300 mm. come equipped with the high- direction-sensing reference robustness. The highly precise The stages can carry up to performance ActiveDrive™ sys- switch supports advanced M-413 drive includes a preload- 50 kg and push/pull up to 50 N. tem. The ActiveDrive™ design, automation applications with ed leadscrew, providing a mini- Special versions for vacuum developed by PI, features a high precision. mum incremental motion of applications are available (see high-efficiency PWM (pulse 0.2 µm. ordering information). width modulation) servo-ampli- Other Family Members fier mounted side-by-side with The M-403/M-413 and M-404/ High Resolution Ball Screws & the DC motor and offers sever- M-414 series of linear stages Lead Screws Maintenance-Free, High al advantages: form a modular system. The For higher velocities and a long Guiding Precision Increased efficiency, by elim- M-403 is the basic family, pro- lifetime the M-414 versions fea- All models are equipped with inating power losses be- viding travel ranges from high-precision linear guiding Application Examples tween the amplifier and 25 to 200 mm. M-413 is rails and recirculating ball motor designed for higher loads with Automation bearings. The recirculating ball travel ranges from 100 to 300 Reduced cost of ownership bearings are maintenance free mm. The M-404 and M-414 R&D and improved reliability, and immune to cage migration. stages have the same travel because no external driver is Semiconductor technology The choice of components and ranges and load capacities, but careful mounting guarantees required Metrology offer higher precision and more high load capacity, longer life- Elimination of PWM amplifi- speed. Quality assurance testing time and high guiding accura- er noise radiation, by moun-

© PI 1998-2007. Subject to change without notice. This data sheet is superseded by any new 07/06/22.0.2 release. The newest release is available for download at www.pi.ws. cy. Additionally the bearings ting the amplifier and motor a-13 Piezo • Nano • Positioning

M-413 and M-414 dimensions in mm, Sub-D connector 15-pin, 3 m cable

Polished bearings provide excellent guiding accuracy: better than 15 arcseconds (75 µrad) over 200 mm of travel, as shown above for the M-414 stage

M-414.1xx M-414.2xx M-414.4xx M-414.xPD M-414.xDG M-414.x2S M-413.1xx M-413.2xx M-413.4xx F 120 133 105.5 A 255 355 455 G 59.5 56 59.5 B 65 115 165 C 59.5 109.5 159.5 M-413.xPD M-413.xDG M-414.x2S D 54 (±50) 104 (±100) 154 (±150) F 120 122 105.5 E 40 90 140 G 59.5 56 59.5

Technical Data

M-414.xPD M-414.xDG M-414.x2S M-413.xPD M-413.xDG M-413.x2S Units Motion and positioning Travel range for all models: 100 / 200 / 300 mm (see Ordering Information) Integrated sensor Rotary encoder Rotary encoder — Rotary encoder Rotary encoder — Sensor resolution 4000 2000 — 4000 2000 — cts/rev. Design resolution 0.5 0.023 0.31 0.25 0.018 0.16 µm Min. incremental motion 0.5 0.1 0.4 0.25 0.2 0.2 µm Backlash 0.5 4 2 6 10 6 µm Unidirectional repeatability 0.5 1 1 1 1 1 µm Pitch 100 100 100 300 300 300 µrad Yaw 100 100 100 300 300 300 µrad Max. velocity 100 3 6 10# 2.5 3 mm/s Origin repeatability 1 1 1 1 1 1 µm Mechanical properties Spindle Recirculating Recirculating Recirculating Leadscrew Leadscrew Leadscrew ballscrew ballscrew ballscrew Spindle pitch 2 2 2 1 1 1 mm Gear ratio — 42.92063:1 — — 28.44444:1 — Motor resolution — — 6400* — — 6400* steps/rev. Stiffness in motion direction 6000 6000 6000 6000 6000 6000 N/µm Max. load 500 500 500 500 500 500 N Max. push/pull force 50 50 50 50 50 50 N Max. lateral force 200 200 200 200 200 200 N Drive properties Motor type ActiveDrive™ DC motor, 2-phase ActiveDrive™ DC motor, 2-phase DC motor gearhead stepper motor* DC motor gearhead stepper motor* Operating voltage 24 0–12 24 24 0–12 24 V Electrical power 70 3.6 4.8 70 3.6 4.8 W Torque 80 3 200 80 3 200 Ncm Limit and reference switches Hall-effect Hall-effect Hall-effect Hall-effect Hall-effect Hall-effect Miscellaneous Operating temperature range -20 to +65 -20 to +65 -20 to +65 -20 to +65 -20 to +65 -20 to +65 °C Material for all models: Aluminum (black anodized) Mass (depends on dimensions/travel range) 4.4 / 5.4 / 6.6 4.2 / 5.2 / 6.4 4.4 / 5.4 / 6.6 4.4 / 5.4 / 6.6 4.2 / 5.2 / 6.4 4.4 / 5.4 / 6.6 kg Recommended controller/driver C-862 (single-axis)C-862 (single-axis)C-663 (single-axis) C-862 (single-axis) C-862 (single-axis)C-663 (single-axis) C-843 PCI board C-843 PCI board C-843 PCI board C-843 PCI board (up to 4 axes) (up to 4 axes) (up to 4 axes) (up to 4 axes) *2-phase stepper motor, 24 V chopper voltage, max. 0.8 A/phase, 400 full steps/rev., motor resolution with C-663 stepper motor controller # Max. recommended velocity a-14 Latest PI Catalogs: www.pi.ws

M-674 Ceramic Ultrasonic Motor Actuators PILine® RodDrive Integrated Piezo Linear Motor Drive

Working Principle Ordering Information The M-674 PILine® RodDrive, RodDrives employ a patented shown with C-184 OEM and M-674.164 C-185 bench-top driver elec- ultrasonic drive developed by PILine® RodDrive, 50 mm, 7 N tronics, provides 7 N pushing PI. The highly compact, inte- force and travel ranges of 50, grated P-664 piezomotors can M-674.264 100 and 150 mm PILine® RodDrive, 100 mm, 7 N provide velocities of 450 mm/s, together with high resolution M-674.364 ® and holding force. The maxi- PILine RodDrive, 150 mm, 7 N mum travel is determined by the length of the rod and is basically unlimited. Cus- tomized adaptations in terms of operating and holding force Closed-Loop Operation: are feasible by varying type Optimized for High Velocity and number of motors used. and Rapid Step/Settling Because the integrated ceramic Together with a position sen- motors are preloaded against sor, RodDrives can be operat- the rod, RodDrives resist ed in closed-loop with the motion with an intrinsic hold- C-866.D64 piezo motor con- ing force when at rest. The troller. This specialized servo- result is very high position sta- controller also integrated the Drive-Component for Integration into Micropositioning bility without the heat dissipa- motor drive electronics and Systems tion common with convention- enables highly constant speeds Travel Ranges to 150 mm al linear motors. Furthermore, up to 350 mm/s with very short Push/Pull Forces to 7 N there are no gears, leadscrews settling times (10´s of msecs). Min. Incremental Motion to 0.05 µm or other mechanical compo- RodDrives can also be operat- Velocity to 450 mm/s nents to contribute play or ed with conventional servo- backlash. controllers. In this case, the Self-Locking at Rest C-185 (to be ordered separate- Variety of Drivers / Controllers ly) external drive electronics is PILine® piezomotors require a required which accepts a ±10 V M-674 PILine® RodDrives repre- They consist of a rod which is drive electronics for exciting analog signal from the con- sent a level of integration be- preloaded by piezo linear mo- the ultrasonic oscillations. The troller. tween PILine® OEM piezo linear tors from two sides. Depend- drive electronics is available as motors such as P-664 and guiding on the way of integration, OEM board, stand-alone device Note ed micropositioning systems either the rod or the motor or integrated inside a closed- The products described in this such as the M-682 series block is coupled to the moving loop motion controller and document are in part protected stages. platform. therefore not included in the by the following patents: RodDrives may replace classi- delivery. US-Pat. No. 6,765,335 cal drive elements like rotary Advantages of PILine® motor/leadscrew assemblies, Micropositioning Systems or magnetic linear drives inte- The ultrasonic piezoceramic grated into a micropositioner. drives used in PILine® micro- positioners have a number of advantages over classical Application Examples drives:

System Integration for Higher Accelerations, up to Micropositioning Products 10 g Speeds up to 500 mm/s Automation Small Form Factor Handling Self-Locking When Powered Down Micromanipulation No Shafts, Gears or Other Biotechnology Rotating Parts Non-Magnetic and Vacuum Metrology Constancy of closed-loop velocity at 200 mm/s of an integrated M-674 RodDrive

© PI 1998-2007. Subject to change without notice. This data sheet is superseded by any new R2 07/08/21.0.5 release. The newest release is available for download at www.pi.ws. Compatible Drive Principle b-1 Piezo • Nano • Positioning

The M-674 integrated into a Micropositioning Stage

0D 0 0 0 / / /

Dimensions of the M-674.00 RodDrive in mm

Technical Data Models M-674 M-674 M-674 Units Tolerance M-674.164 M-674.264 M-674.364 Motion and positioning Travel range 50 100 150 mm x Minimum incremental motion, open-loop 0.05* 0.05* 0.05* µm typ. Max. velocity 450 450 450 mm/s Max. acceleration 20 20 20 m/s Mechanical properties Stiffness when powered down 5** 5** 5** N/µm ±10 % Holding force when powered down 777Nmax. Push / pull force 777Nmax. Drive properties Resonant frequency 155 155 155 kHz, typ. Integrated piezo motor 2 x PILine® P-664 2 x PILine® P-664 2 x PILine® P-664 (Dual Motor) (Dual Motor) (Dual Motor) Motor voltage range 200 (peak-peak)*** 200 (peak-peak)*** 200 (peak-peak)*** V 70 (RMS)*** 70 (RMS)*** 70 (RMS)*** Operating voltage drive electronics 12 12 12 V Max. elec. power consumption 15 15 15 W drive electronics Miscellaneous Operating temperature range -20 to +50 -20 to +50 -20 to +50 °C Body material PEEK-PTFE PEEK-PTFE PEEK-PTFE Mass 0.1 0.12 0.14 kg ±5 % Cable length 1.5 1.5 1.5 mm ±10 mm Connector LEMO connector LEMO connector LEMO connector LEMO connector Recommended controller/driver C-184.D64 OEM drive C-184.D64 OEM drive C-184.D64 OEM drive electronics board electronics board electronics board C-185.D64 driver C-185.D64 driver C-185.D64 driver C-866.D64 Controller for C-866.D64 Controller for C-866.D64 Controller closed-loop operation closed-loop operation closed-loop operation

* The minimum incremental motion is a typical value that can be achieved in the open-loop mode of a piezomotor stage. To reach the specs it is important to follow the mounting guidelines of the OEM-motors. ** Stiffness at 25 °C. *** The operationg voltage is supplied by the drive electronics. b-2 Latest PI Catalogs: www.pi.ws

P-652 Miniature Ultrasonic Motor Actuator Cost-Effective PILine® Piezo Ceramic Linear Drive for High Volume Applications

Ordering Information

P-652 Miniature PILine® OEM-Drive

Custom versions on request

without the heat dissipation common in conventional linear motors. During operation, the oscillating piezoceramic moves the slider over the length of the motor. There are no gears, leadscrews or other mechanical components to contribute play or backlash.

P-652.01 OEM-Drive with customized mounting interface (golf ball for size comparison) Operation with conventional controllers The high-frequency oscilla- Self-Locking, No Lubricants, No Classical Bearings tions for the PILine® motors are Cost-Effective, High-Volume-Production Drive created by driver electronics, which can in turn be controlled Velocity to 80 mm/s by short pulses as low as 3 V. Generated Forces up to 0.2 N The output frequency of the Piezo Micromotor: only 9x5.7x2.2 mm driver electronics self-adjusts Travel Range 3.2 mm to the resonant frequency of the motor ceramic, so no individual tuning is necessary.

Notes ® P-652 PILine OEM piezomotor stator, affixing the load to the The products described in this drives are ideal for OEM appli- slider and making the electrical document are in part protected cations where space is limited connections. by the following patents: and moved masses are small. The motors are designed for German Patent These minute linear position- moving small objects such as No. 102004059429 ers can be used to replace clas- glass fibers, optical, micro- or International Patent sical drive elements like minia- electro-mechanical elements No. WO2006/027031A1 turized motor/spindle systems fast and precisely. or other linear motors, which P-652 outclasses with its speed Working Principle of up to 80 mm/s. The basic P-652 drives employ a new, ® advantages PILine piezo linear patented, ultrasonic piezomo- motors offer compared to clas- tor drive developed by PI. The sical drives are: highly compact, integrated piezomotor can provide accel- High velocities erations of up to 2.5 g and Compact design velocities of up to 80 mm/s High push/pull and holding together with high position res- forces relative to the drive olution and—considering its size length of only 9 mm—high holding force. Because the The integration of P-652 in an ceramic stator is pressed application is simple, because against the slider, piezomotor the moving slider and the piezo drives resist motion with an actuator are delivered assem- intrinsic holding force when bled as a unit. All that remains the unit is at rest. The result is is to provide for mounting the

© PI 1998-2007. Subject to change without notice. This data sheet is superseded by any new R1 07/06/27.0.5 release. The newest release is available for download at www.pi.ws. very high position stability b-3 Piezo • Nano • Positioning

P-652.01 OEM-Drive, dimensions in mm.

Technical Data P-652 Motion and positioning Travel range 3.2 mm X Minimum incremental motion, open-loop 0.1 µm* typ. Typ. step size, open-loop 13 µm** typ. Max. velocity 80 mm/s max. Typ. velocity 25 mm/s** typ. Mechanical properties Holding force when powered down 0.2 N max. Push / pull force 0.11 N* max. Drive properties Resonant frequency 470 kHz Integrated piezo motor PILine® P-652 Driver electronics operating voltage 2.8–5.0 V Driver electronics, max. elec. power consumption 500 mW Driver electronics, current consumption 55 mA Miscellaneous Operating temperature range -20 to +50 °C Mass 0.6 g ±5 % Recommended controller/driver C-180K001, dimensions 25 x 10 x 3 mm Dimensions 9 x 5.7 x 2.2 mm * The minimum incremental motion cited is a typical value that can be achieved in open-loop mode. To reach this specification, it is important to follow the mounting guidelines for these motors. ** Pulsed operation, 1 ms pulse length, 50 % on time b-4 M-664 Ceramic Ultrasonic Motor Linear Slide Low-Profile High-Speed PILine® Translation Stage with Linearencoder

No Shafts, Gears or Other Ordering Information Rotating Parts Non-Magnetic and Vacuum- M-664.164 PILine® Micro Positioning Stage Compatible Drive Principle with P-664 Piezo Linear Motor, 25 mm, 6 N Optimized Controller and Ask about custom designs! Drive Electronics ® PILine® motors require a spe- PILine drives at high resolu- cial drive electronics to gener- tions. ate the ultrasonic oscillations for piezoceramic element. For Optionally, for use with third optimum performance the party servo controllers, the highly specialized C-866 mo- C-185 analog drive electronic tion controller is recommend- (stand-alone unit) is available. ed. This sophisticated con- It controls the motor speed by troller also integrates the drive an analog ±10 V signal. For Fast and compact M-664 piezo translation stage with linear encoder electronics. Furthermore, the optimum performance this controller has a number of spe- driver must be tuned together cial features, including dy- with the stage and should be Travel Range 25 mm namic parameter switching for ordered at the same time as the motor/stage. Max. Velocity 400 mm/s an optimized high-speed mo- Ultra-Low Profile, 15 mm tion and settling behavior to take into account the motion Notes Direct Metrology Linear Encoder with 0.1 µm Resolution characteristics typical of The products described in this High Guiding Accuracy with Crossed Roller Bearings piezomotors. The broad-band document are in part protected Compact XY Combinations encoder input (35 MHz) sup- by the following patents: Piezo Linear Motor with 6 N Drive Force ports the outstanding high US Pat. No. 6,765,335 Self Locking at Rest accelerations and velocities of German Patent No. 10154526

M-664 micropositioning sys- For improved guiding accura- tems are low-profile, high- cy, the M-664 uses two crossed 7,5 accuracy translation stages roller bearings mounted on 2,5 15

with piezo linear encoders. The ground aluminum profiles. The 5 ® M-664 stage is next-larger in integrated P-664 PILine linear 40 4,3 the series of piezomotor-driven motor can generate forces up stages of which the M-663 is to 6 N and maximum closed- 60 the smallest. loop velocities to 400 mm/s 50 over a 25 mm travel range. 25 Application Examples 12

® Biotechnology Advantages of PILine Micropositioning Systems Micromanipulation The ultrasonic piezoceramic Microscopy drives used in PILine® micro- positioners have a number

Quality assurance testing 3 of advantages over classical 90 75 20 63 Metrology drives: 3

4x M Mass storage device Higher Accelerations, testing up to 10 g Speeds up to 500 mm/s R&D Small Form Factor Self-Locking When Powered Photonics packaging M-664 dimensions in mm

© PI 1998-2007. Subject to change without notice. This data sheet is superseded by any new 07/08/21.0.2 release. The newest release is available for download at www.pi.ws. Down b-5 Piezo • Nano • Positioning

PILine® Micropositioning stages: M-682, M-664 and M-663 (from left)

Technical Data Models M-664.164 Tolerance Active axes X Motion and positioning Travel range 25 mm Integrated sensor Linear encoder Sensor resolution 0.1 µm Min. incremental motion 0.1 µm typ. Backlash ±0.2 µm typ. Unidirectional repeatability 0.2 µm typ. Pitch ±50 µrad typ. Yaw ±50 µrad typ. Max. velocity 400 mm/s Reference switch repeatability 1 µm typ. Mechanical properties Max. load 25 N Max. push/pull force 6 N Max. holding force 4 N Drive properties Motor type P-664 PILine® ultrasonic piezo drive Operating voltage 168 V (peak-to-peak) * 60 V (RMS) * Electrical power 10 W ** nominal Current 800 mA ** Limit and reference switches Hall-effect Miscellaneous Operating temperature range -20 to +50 °C Material Al (black anodized) Dimensions 90 x 60 x 15 mm Mass 0.190 kg ±5 % Cable length 1.5 m ±10 mm Connector MDR, 14-pin Recommended controller/driver C-866.164 single-axis controller/driver C-185.164 drive electronics * The stage supply power is drawn from the drive electronics, which runs on 12 V. ** For drive electronics b-6 N-310 Piezo Stepping Motor Linear Actuator Compact NEXACT® OEM Piezo Ceramic Stepping Drives with Long Travel Ranges

Self-locking when powered Ordering Information down; no holding current N-310.01 Zero backlash, no wear or NEXACT® OEM linear drive, maintenance, no mechani- 20 mm, 10 N cal components like gears Ask about custom designs or leadscrews. Non-Magnetic and Vacuum Compatible Operating Prin- ciple

Working Principle for Application Flexibility nuts. Therefore, mechanical NEXACT® PiezoWalk® technolo- limitations such as backlash gy overcomes the limitations and wear are eliminated and N-310 Piezo Stepping Motor Linear Actuator of conventional nanoposition- the drive is maintenance-free. ing drives and combines virtually unlimited travel ranges Self-Locking PiezoWalk® Piezo with high stiffness in a very Stepping Drive 20 mm Standard Travel Range small package. Furthermore, NEXLINE® and NEXACT® exhib- ® Compact and Cost-Effective Design NEXACT actuators provide it high stiffness and are self- 0.03 nm Resolution piezo-class resolution (far locking even when powered below one nanometer) and To 10 N Push/Pull Force down due to the clamping millisecond responsiveness. Low Operating Voltage action of the piezo actuators in The special drive design Self Locking, with no Heat Dissipation, Nanometer Stability the mechanics. This entails reduces the operating voltage nanometer position stability at Non-Magnetic and Vacuum-Compatible Working Principle to 40 V and below. rest, with no heat dissipation or servo-dither. In operation, piezoceramic bending elements act on the Controller and Drive runner, which is connected to Electronics appropriated for the moving part of the applica- the Application N-310 NEXACT® PiezoWalk® lin- The N-310 can be operated in tion. The length of the runner ® ear drives feature travel ranges open-loop and closed-loop mo- determines the travel range NEXACT actuators require of 20 mm and push/pull force de (with the addition of an ex- and can be chosen as required. special drive electronics to capacities to 10 N in a compact ternal position sensor). A varie- Force capacity, resolution and control the complex stepping sequences. The E-860 series package of only 25 x 25 x 12 mm. ty of NEXACT® controllers facil- velocity are determined by the ® With their high resolution, itates the integration into micro- piezo geometry and drive elec- NEXACT controllers are available in different open-and NEXACT® drives, are ideal for or nanopositioning applications. tronics and are scalable. To high-precision positioning over move the runner over longer closed-loop versions. For example, the E-861 includes a long travel ranges. Advantages of PiezoWalk® distances the steping mode is ® piezo stepping drives used, whereas for distances complete NEXACT servo-controller with low-noise, 24-bit ® ® smaller than one step, the lin- Application Examples NEXLINE and NEXACT drives ear (analog) mode enables drivers and a powerful DSP. It offer several advantages over also comes with ample soft- Semiconductor technology traditional drive technologies: high-dynamics positioning with resolutions far below one ware for easy integration and Resolution in the picometer Wafer inspection nanometer. highly effective computer con- range trol. For applications which do Nano lithography Compact dimensions not require the highest resolu- Wear and Maintenance-Free Surface Measurement High drive forces from ten tion lower-priced drive elec- Technique newtons (NEXACT®) up to In contrast to ordinary DC or tronics, ranging all the way to stepper motor drives, the OEM boards, can be ordered. Profilometry several hundred newtons PiezoWalk® drives effect linear (NEXLINE®) Microscopy motion directly, without the The products described in this High dynamic performance Motion in strong magnetic need to transform rotation with document are in part protected fields with sub-microsecond res- mechanical elements such by the following patents:

© PI 1998-2007. Subject to change without notice. This data sheet is superseded by any new R1 07/08/16.0.5 release. The newest release is available for download at www.pi.ws. ponse as gears, leadscrews and German Patent No. P4408618.0 c-1 Piezo • Nano • Positioning 0

Translation stage with N-310 NEXACT® drive. The positioner offers 20 mm travel

range with an encoder resolution of 25 nm

Technical Data Models N-310.01 Tolerance Active axes X Motion and positioning Travel range ±20 mm Step size (in step mode) 5 nm to 5 µm Travel range in analog operation 7 µm max. Open-loop resolution 0.025 nm typ. Step frequency 1.5 kHz* max.

Max. speed 10 mm/s* max. Mechanical properties Push/Pull force (active) 10 N max. Drive properties Drive type NEXACT® linear drive Operating voltage -10 V to +40 V Miscellaneous Operating temperature range 0 to 50 °C Body material Stainless steel Mass 50 g ±5 % Cable length 1.5 m ±10 mm Connector NEXACT® linear drive (D-Sub 15, 3 row) Recommended controller/driver E-860-series N-310.01 Actuator, dimensions in mm * Depending on the control electronics.

c-2 Latest PI Catalogs: www.pi.ws

N-111 Piezo Stepping Motor Linear Actuator NEXLINE® High-Force OEM Piezo Ceramic Nanopositioning Stepping Drive

all be optimized for a particular Ordering Information application. N-111.30 NEXLINE® OEM Nanopositioning ® ® NEXLINE PiezoWalk Piezo- Drive, 5 mm, 50 N ceramic clamping and shear N-111.3A elements act directly on a mov- NEXLINE® OEM Nanopositioning ing runner that is coupled to Drive, 5 mm, 50 N, Closed-Loop, the moved object. While the 5 nm Resolution runner can be moved larger Ask about custom designs distances in step mode, analog operation over a distance of less than one step enables high-dynamics positioning with resolutions far below one Self-locking when powered nanometer. The patented down; no holding current PiezoWalk® overcomes the Zero backlash, no wear or limitations of conventional maintenance, no mechanical N-111 compact high-load OEM nanopositioning actuators and components like gears or nanopositioning actuator combines long travel ranges leadscrews. with high resolution and stiff- Non-magnetic and vacuum ness. compatible operating prin- 5 mm Travel ciple To 50 N Pull / Push Force and 80 N Holding Force Advantages of PiezoWalk® Self Locking at Rest, no Heat Generation Piezo Stepping Drives NEXLINE® Actuators are Non-Magnetic and Vacuum-Compatible Working Principle distinguished by a number of ® ® NEXLINE and NEXACT drives unique outstanding features: offer several advantages over traditional drive technologies: Cleanroom compatibility Vacuum compatibility The innovative N-111 NEX- del. Both can be operated Resolution in the picometer Operation under conditions, LINE® OEM drives are compact with the sophisticated E-755 range which prohibit usage of actuators for nanopositioning NEXLINE® motion controller. Compact dimensions magnetic drives with travel ranges to 5 mm, The N-111.3A is equipped with High drive forces from ten high resolution, and generated a 5 nm resolution linear enco- newtons (NEXACT®) up to Notes forces to 50 N. der for long-range position several hundred newtons The products described in this control. Due to its low-noise, (NEXLINE®) document are in part protected Two versions are available, the 24 bit D/A converters, the E-755 High dynamic performance by the following patents: N-111.3A closed-loop model controller can provide pico- with sub-microsecond res- German Patent No. 10148267 and N-111.30 open-loop mo- meter level resolution in the ponse US Patent No. 6,800,984 highly-dynamic short-range / dithering mode.

Application Examples NEXLINE® Working Principle Semiconductor for Application Flexibility technology NEXLINE® PiezoWalk® drives can be used wherever high Semiconductor testing loads must be positioned very Wafer inspection precisely over long distances Nano lithography and then perhaps subjected to small-amplitude dynamic ad- Nano imprint justment, as for active vibra- Nanometrology tion control. By varying the combination of longitudinal Active vibration damping and shear piezo elements, the Motion in strong step size, dynamic operating Z / tip / tilt platform with NEXLINE® drives and position sensors; magnetic fields range (analog travel), clamping 300 mm (12”) diameter, 200 N load capacity, 1.3 mm travel range, 10 mrad tilt range

© PI 1998-2007. Subject to change without notice. This data sheet is superseded by any new R2 07/08/06.0 release. The newest release is available for download at www.pi.ws. force, speed and stiffness can c-3 Piezo • Nano • Positioning

= 1 2 3 4

N-111 dimensions in mm

Technical Data Models N-111.30 N-111.3A Tolerance Active axes X X Motion and positioning Travel range 5 mm 5 mm Step size (in step mode) 10 nm to 5 µm 10 nm to 5 µm Integrated sensor - Linear encoder Sensor resolution - 5 nm Analog mode travel range 2.5 µm 2.5 µm Max. Open-loop resolution 0.025 nm 0.025 nm Typ. Closed-loop resolution - 5 nm Step frequency 100 Hz* 100 Hz* Velocity 0.2 mm/s** 0.2 mm/s** Mechanical properties Stiffness in motion direction 15 N/µm 15 N/µm ±20 % Push / Pull force (active) 50 N 50 N Max. Holding force (passive) 80 N 80 N Min. Drive properties Drive type NEXLINE® linear drive NEXLINE® linear drive Operating voltage ±250 V ±250 V Miscellaneous Operating temperature range -40 to 80 °C -40 to 80 °C Material Al (anodized), steel Al (anodized), steel Mass 115 g 135 g ±5 % Cable length 1.5 m 1.5 m ±10 mm Connector Sub-D NEXLINE® connector, Sub-D NEXLINE® connector, single-channel single-channel; sensor connector Recommended controller / driver E-755.101: E-755.1A1 * Depends on control electronics ** Depends on control electronics. The maximum speed in step mode is set so as to ensure the highest possible velocity constancy, with no speed fluctuations while steps are being performed. c-4 Latest PI Catalogs: www.pi.ws

N-214 Piezo Stepping Motor Linear Actuator NEXLINE® High-Force Piezo Ceramic Nanopositioning Stepping Drive

justment, as for active vibra- Ordering Information tion control. By varying the combination of longitudinal N-214.00 NEXLINE® High-Load Actuator, and shear piezo elements, the 20 mm, 200 N, linear encoder, step size, dynamic operating 5 nm resolution range (analog travel), clamping N-215.00 force, speed and stiffness can NEXLINE® High-Load Actuator, all be optimized for a particular 20 mm, 400 N, open-loop application.

NEXLINE® PiezoWalk® Piezo- ceramic clamping and shear elements act directly on a mov- clamping moves. That is why ing runner that is coupled to piezo stepping drives have no the moved object. While the intrinsic travel limitation and runner can be moved larger can be used flexibly. The max. N-215 NEXLINE® high-load actuator distances in step mode, analog step frequency of 100 Hz and is operation over a distance of determined by the controller. It allows velocities up to 20 mm Travel Range less than one step enables high-dynamics positioning 1 mm/s, depending on the step 0.03 nm Resolution Open-Loop and 5 nm Closed-Loop size and / or analog range. with resolutions far below To 400 N Push / Pull Force and 600 N Holding Force one nanometer. The patented Self Locking when Power down, No Heat Generation PiezoWalk® overcomes the limi- Unlimited Lifetime Non-Magnetic and Vacuum-Compatible Working Principle tations of conventional nanopo- The application area of NEX- sitioning actuators and com- LINE® drives often lies in the bines long travel ranges with difficult-to-access internals of high resolution and stiffness. machines, where nanometer- The innovative N-214 / N-215 PiezoWalk® supports two differ- realm adjustment and vibration NEXLINE® OEM linear drives ent motion modes: a high-reso- High-Resolution Dynamic cancellation are required. are ultra-precision nanoposi- lution, high-dynamics short Operation tioning actuators with travel range (analog) mode and a In analog mode the motion is Long lifetime is therefore a ranges to 20 mm and push / stepping mode with virtually effectuated exclusively by the basic requirement for NEX- pull forces to 400 N. The novel, unlimited travel range. very stiff shear elements, pro- LINE® actuators. To promote patented NEXLINE® PiezoWalk® viding a resonant frequency in long lifetime, the controller can drive design combines long Two versions are available, the the direction of motion of sev- reduce the operating voltage travel ranges with high N-214 closed-loop model and eral kilohertz. The motion reso- on all the piezo elements to mechanical stiffness and piezo- N-215 open-loop model. Both lution here is limited only by zero at any position and still class resolution of better than can be operated with the the stability of the drive elec- maintain the full holding force. ® 0.1 nm. sophisticated E-755 NEXLINE tronics, or, in closed-loop oper- motion controller. The N-214 is ation, by the sensor. Note equipped with a 5 nm resolu- The products described in this tion linear encoder for long- Basically Unlimited Travel document are in part protected Application example range position control. Due to Range by the following patents: its low-noise, 24 bit D/A conver- Semiconductor Step mode involves a sequence German Patent No. 10148267 ters, the E-755 controller can technology of coordinated shear and US Patent No. 6,800,984 provide picometer level resolu- Semiconductor testing tion in the highly-dynamic Wafer inspection short-range / dithering mode.

Nano lithography NEXLINE® Working Principle Nano imprint for Application Flexibility ® ® Nanometrology NEXLINE PiezoWalk drives can be used wherever high Active vibration damping loads must be positioned very Motion in strong precisely over long distances and then perhaps subjected to magnetic fields Train of 1 nm steps in open-loop analog mode with an N-215 NEXLINE® actuator

© PI 1998-2007. Subject to change without notice. This data sheet is superseded by any new R2 07/08/06.0.5 release. The newest release is available for download at www.pi.ws. small-amplitude dynamic ad- c-5 Piezo • Nano • Positioning

Six-axis parallel-kinematics Hexapod with N-215-based NEXLINE® high-load actuators for use in strong magnetic fields. NEXLINE® linear actuator principle

Models N-214.00 N-215.00 Active Axes X X Motion and positioning Travel range 20 mm 20 mm Step size in stepping mode 10 nm to 6 µm 10 nm to 6 µm Integrated sensor Linear encoder - Sensor resolution 5 nm - Travel range in analog mode 3 µm 3 µm Open-loop resolution 0.03 nm 0.03 nm Closed-loop resolution 5 nm - Step frequency 100 Hz* 100 Hz* Velocity 0.5 mm/s** 0.5 mm/s** Mechanical properties Stiffness in motion direction 75 N/µm 150 N/µm Drive force (active) 200 N 400 N Holding force (passive) 300 N 600 N Drive properties Drive type NEXLINE® linear drive NEXLINE® linear drive Operating voltage ±250 V ±250 V Miscellaneous Operating temperature range -40 to 80 °C -40 to 80 °C Material Al (anodized), steel Al (anodized), steel Mass 1050 g 1150 g Cable length 4.0 m 2.0 m Connector D-sub single-channel D-sub single-channel NEXLINE® connector, NEXLINE® connector plus separate sensor connector Recommended controller / driver E-755.1A1 E-755.101 * Depends on control electronics ** Depends on control electronics. The maximum speed in step mode is set so as to ensure the highest possible velocity constancy, with no speed fluctuations while steps are being performed.

c-6 P-601 Piezo Flexure Linear Actuator PiezoMove® High-Precision, High-Speed, Flexure-Guided Lever-Amplified Z-Actuator

Ordering Information

P-601.1S PiezoMove® Lever Amplified Actuator, 100 µm, SGS

P-601.3S PiezoMove® Lever Amplified Actuator, 250 µm, SGS

P-601.4S PiezoMove® Lever Amplified Actuator, 400 µm, SGS

P-601.10 PiezoMove® Lever Amplified Actuator, 110 µm, Open-Loop

P-601 PiezoMove® Lever Amplified Z-Actuators. P-603.30 PiezoMove® Lever Amplified Actuator, 300 µm, Open-Loop

Flexure Guidance for Frictionless, Ultra-Straight Motion P-601.40 ® PiezoMove Lever Amplified Standard Travel Ranges to 480 µm, Custom to 1 mm Actuator, 480 µm, Open-Loop Very Fast Resoponse, to 250µsec Feasible, Resolution to 0.2 nm High Dynamics and Stiffness PICMA® High-Performance Piezo Actuators Open and Closed-Loop Versions Ideal for OEM Applications

Lever amplified PiezoMove® tors, lever amplified actuators as well as non-magnetic ones P-601 actuators combine large offer larger travel ranges, a are available on request. vertical travel ranges up to much higher lateral stiff- 480 µm and a high positioning ness and guiding precision. Superior Lifetime accuracy in a very compact Compared to single-axis nano- Reliability is assured by the use design. With settling times of positioning stages, they offer of award-winning PICMA® mul- only a view milliseconds and a clearly smaller dimensions. tilayer actuators, which are ® resolution in the sub-nanome- PiezoMove lever amplified integrated into a sophisticated, ter range they are well suited actuators feature a resolution single-module, flexure guiding for static and dynamical appli- to 0.2 nm and a repeatability to system. The PICMA® actuators cations. 8 nm. feature cofired ceramic encapsulation and thus offer better ® PiezoMove P-601 lever ampli- With their highly precise, fric- performance and reliability fied actuators cover the range tionless flexure guidance, a than conventional piezo actua- between direct-driven pre- very high stiffness and excel- tors. The wire-EDM-cut flexu- loaded piezo translators, such lent straightness of motion are res are FEA modeled to make as the P-840 series, and single- reached. Together with their them extremely precise. In axis nanopositioning stages, small dimensions and the cost- addition they are maintenance- like the P-611 series. Compared effective design, the P-601 free and not subject to wear. to direct-driven piezo transla- lever amplified actuators are especially suited for OEM Application Example applications. Versions with strain-gauge sensors (SGS) are Nanopositioning equipped with a full bridge cir- Semiconductor Testing cuit that is insensitive to ther- Adaptronics mal drift. Versions without a sensor are also available for Photonics / Integrated open-loop applications. In Optics addition to standard models Biotechnology made from steel special ver-

© PI 1998-2006. Subject to change without notice. This data sheet is superseded by any new 06/04/19.2 release. The newest release is available for download at www.pi.ws. sions from Invar or aluminum, d-1 Piezo • Nano • Positioning

P-601 dimensions in mm.

Technical Data Models P-601.10 P-601.1S P-601.30 P-601.3S P-601.40 P-601.4S Units Tolerances Active Axis ZZZZZZ Motion and Positioning Integrated sensor – SGS – SGS – SGS Travel range -20 to +120 V, open-loop 110 110 300 300 480 480 µm min. Travel range closed-loop – 100 – 250 – 400 µm Resolution open-loop 0.2 0.2 0.3 0.3 0.4 0.4 nm typ. Resolution closed-loop 22661212nmtyp. Linearity – 0.1 – 0.3 – 0.3 % typ. Unidirectional repeatability – 8 – 10 – 30 nm typ. Pitch 20 20 20 20 20 20 µrad typ. Yaw 10 10 10 10 10 10 µrad typ. Mechanical Properties Stiffness in motion direction 0.8 0.8 0.38 0.38 0.28 0.28 N/µm ±20 % Resonant frequency unloaded 750 750 440 440 350 350 Hz ±20 % Resonant frequency loaded (30 g) 620 620 350 350 290 290 Hz ±20 % Push-/pull force in motion direction 30/10 30/10 20/10 20/10 15/10 15/10 N Max. Lateral force 30 30 30 30 30 30 N Max. Drive Properties Drive type PICMA® PICMA® PICMA® PICMA® PICMA® PICMA® Electrical capacitance 1.5 1.5 3.1 3.1 4.6 4.6 µF ±20 % DOOC 1.9 1.9 1.6 1.6 1.4 1.4 µA/(Hz x µm) ±20 % Miscellaneous Operating temperature range -20 to 80 -20 to 80 -20 to 80 -20 to 80 -20 to 80 -20 to 80 °C Material Stainless Stainless Stainless Stainless Stainless Stainless Steel Steel Steel Steel Steel Steel Mass 50 50 75 75 110 110 g ±5 % Cable length 250 250 250 250 250 250 mm ±10 mm Sensor connection Open leads Open leads Open leads Open leads Open leads Open leads Voltage connection Open leads Open leads Open leads Open leads Open leads Open leads Recommended driver/controller A, G D, H A, G D, H A, G D, H d-2 Latest PI Catalogs: www.pi.ws

P-783 Piezo Flexure Linear Actuator Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Metrology Sensor

Ordering Information

P-783.ZL Vertical Piezo Flexure Stage, 300 µm, LVDT Sensor

Ask about custom designs!

the actual distance between the fixed frame and the moving part of the stage. This results in higher motion linearity, long- term stability, phase fidelity, and—because external disturbances are seen by the sensor immediately—a stiffer, faster- responding servo-loop. See p. 2-4 ff. and p. 5-2 ff. for more P-783 nanopositioning stage, microprocessor shown for size comparison information.

Z-Travel to 300 µm Working Principle / Reliability Low Profile P-783 nanopositioning stages Frictionless Precision Flexure Guiding System are equipped with the award winning PICMA® piezo drives, Internal Motion Amplifier integrated into a sophisticated Closed-Loop Resolution <10 nm flexure guiding system. The PICMA® High-Performance Piezo Drives wire-EDM-cut flexures are FEA

Long Travel Range The P-783 piezo nano-Z-axis stage is a compact, closed-loop actuator providing a positioning and scanning range of up to 300 µm. It is designed for applications with loads ranging from a few grams to a few hundred grams.

Direct-Metrology LVDT Sensor P-783 stages feature direct- measuring, non-contact LVDT sensors (direct metrology). Unlike indirect sensors, direct- metrology sensors measure

Application Examples

Metrology Wafer inspection PCB inspection Nanopositioning Switching Biotechnology Micromanipulation P-783 dimensions (in mm) © PI 1998-2005. Subject to change w/o notice. Cat 118 05/09.17 d-3 Piezo • Nano • Positioning

modeled for zero stiction, zero friction and exceptional guiding precision. The ceramic- encapsulated PICMA® drives are more robust than conventional piezo actuators, featuring superior lifetime and performance in both dynamic and static applications. Because guidance, actuators and sensors are all frictionless and maintenance-free, these nanopositioning systems achieve outstanding levels of reliability.

Notes

See the “Piezo Drivers & Variety of piezo flexure nanopositioning systems. Nanopositioning Controllers” Call your PI Sales Engineer about your application. section, p. 6-8 ff. for our comprehensive line of low-noise control electronics. See the “Selection Guide” on p. 2-14 ff. for comparison with other nanopositioning systems.

Technical Data Models P-783.ZL Units Notes see p. 2-84 Active axes Z Open-loop travel @ 0 to 100 V 300 µm ±20% A2 Closed-loop travel 300 µm A5 Integrated feedback sensor LVDT B * Closed-loop / open-loop resolution 10 / 1 nm C1 Closed-loop linearity (typ.) 0.1 % Full-range repeatability (typ.) ±15 nm C3 Stiffness 0.15 N/µm ±20% D1 Push / pull force capacity 20 / 10 N D3 (in operating direction) Max. normal load +20 / -5 N D4 Lateral force limit 0.5 N D5 Lateral runout (tip/tilt) (typ.) 10 / 25 µrad E1 Electrical capacitance 5.4 µF ±20% F1 ** Dynamic operating 2 µA/(Hz x µm) F2 current coefficient (DOCC) Unloaded resonant frequency 300 Hz ±20% G2 * For calibration information see p. 2-8. Resolution of PI Resonant frequency @ 24 g load 240 Hz ±20% G3 piezo nanopositioners is not Resonant frequency @ 100 g load 160 Hz ±20% G3 limited by friction or stiction. The value given is noise Operating temperature range -20 to 80 °C H2 equivalent motion with E-503 Voltage connection VL J1 amplifier. Sensor connection L J2 ** Dynamic Operating Current Coefficient in µA per Hz Weight (with cables) 160 g ±5% and µm. Body material Al, (platform: steel) L Example: Sinusoidal scan of 30 µm at 10 Hz requires Recommended amplifier/controller H, E approximately 0.6 mA drive (codes explained p. 2-17) current. d-4 Latest PI Catalogs: www.pi.ws

P-62x.1– Piezo Flexure Linear Slides PIHera® Nanopositioning & Scanning Stages with Direct Metrology

very high bandwidth and ex- Ordering Information hibit no periodic errors. Unlike conventional sensors, P-620.1CD * / P-620.1CL * PIHera® Nanopositioning System, capacitive sensors measure 50 µm, Capacitive Sensors the actual distance between the fixed frame and the moving P-620.10L PIHera® Nanopositioning System, part of the stage. They detect 60 µm, Open-Loop, LEMO Conn. errors contributed by all components in the drive train— P-621.1CD * / P-621.1CL * PIHera® Nanopositioning System, from the actuator through the 100 µm, Capacitive Sensors flexures to the platform. This results in higher motion linear- P-621.10L PIHera® Nanopositioning System, ity, long-term stability, phase 120 µm, Open-Loop, LEMO Conn. fidelity, and—because external P-622.1CD * / P-622.1CL * PIHera® piezo nanotranslation stages with disturbances are seen by the PIHera® Nanopositioning System, travel ranges from 50 µm to 1800 µm sensor immediately—a stiffer, 250 µm, Capacitive Sensors faster-responding servo-loop. See p. 2-4 ff. and p. 5-2 ff. for P-622.10L PIHera® Nanopositioning System, Record Travel Range for Piezo Flexure Stages: to 1800 µm more information. 300 µm, Open-Loop, LEMO Conn. Fast Response, Frictionless Motion, High Bandwidth P-625.1CD * / P-625.1CL * Resolution <1 nm Nanometer Precision in PIHera® Nanopositioning System, Frictionless Precision Flexure Guiding System Milliseconds 500 µm, Capacitive Sensors PICMA® Long-Life, Ceramic Encapsulated Piezo Drives One of the advantages of P-625.10L ® ® Direct Metrology with Capacitive Sensors for Highest PIHera stages over motor- PIHera Nanopositioning System, 600 µm, Open-Loop, LEMO Conn. Precision driven positioning stages is the rapid response to input P-628.1CD * / P-628.1CL Up to 0.02 % Position Accuracy PIHera® Nanopositioning System, changes and fast and pre- X, XY, Z, XYZ Versions cise settling behavior. The 800 µm, Capacitive Sensors Vacuum-Compatible Versions P-622.1CD, for example, can P-628.10L PIHera® Nanopositioning System, ® settle to an accuracy of 10 nm P-620.1CD – P-629.1CD PIHera Superior Accuracy Through 950 µm, Open-Loop, LEMO Conn. systems are piezo-nanoposi- Direct-Motion Metrology with in only 30 msec (other PI P-629.1CD * / P-629.1CL * tioning stages featuring travel Capacitive Sensors stages provide even faster response)! PIHera® Nanopositioning System, ranges from 50 to 1800 µm. The capacitive-sensor-equipped 1500 µm, Capacitive Sensors Despite the increased travel versions provide motion lin- P-629.10L ranges, the units are extremely earity to 0.02 % with effective Single & Multi-Axis Versions PIHera® Nanopositioning System, compact and provide sub- resolution in the sub-nanome- See page 2-42 and page 2-54 1800 µm, Open-Loop, LEMO Conn. nanometer resolution. The ter range. PI capacitive sensors for Z and XY versions. XZ and * .1CD with Sub-D Connector long travel range is achieved are absolute-measuring, direct- XYZ combinations can be * .1CL with LEMO Connectors with a newly designed, friction- metrology devices that boast assembled without adapters. free and extremely stiff flexure Vacuum versions to 10-9 hPa are system, which also offers rapid available as part numbers response and excellent guiding P-62x.1UD accuracy (typically less than Custom sizes & specifications 5 µrad pitch/yaw over the full available! travel range).

Application Examples

(Dynamic) interferometry Microscopy Nanopositioning Biotechnology Rapid scanning motion of a P-621.1CD (commanded rise time 5 ms) with the E-710 con- Quality assurance troller and DDL option. Digital Dynamic Linearization virtually eliminates the tracking error (<20 nm) during the scan. The improvement over a classical PID controller is up to Semiconductor technology 3 orders of magnitude, and grows with the scanning frequency © PI 1998-2007. Subject to change without notice. This data sheet is superseded by any new R1 07/06/14.0.2 release. The newest release is available for download at www.pi.ws. d-5 Piezo • Nano • Positioning

T U 0,5 S B M R

L H7 F E P N

PIHera® XYZ combination 0,01 K 0,01 D G Q H

L= 1,5 m

L H7 M

J 0,01 C

Dimensions of the P-62x.1CD/.1CL/.10L in mm, decimal places separated by commas

Technical Data Models P-620.1CD/ P-621.1CD/ P-622.1CD/ P-625.1CD/ P-628.1CD/ P-629.1CD P-62x.10L Units P-620.1CL P-621.1CL P-622.1CL P-625.1CL P-628.1CL P-629.1CL Active axes X X X X X X X Open-loop travel -20 to 120 V 60 120 300 600 950 1800 see P-62x.1CD µm Closed-loop travel 50 100 250 500 800 1500 - µm Integrated feedback sensor capacitive capacitive capacitive capacitive capacitive capacitive - * Closed-loop / open-loop resolution 0.2 / 0.1 0.4 / 0.2 0.7 / 0.4 1.4 / 0.5 1.8 / 0.5 2.5 / 2.0 - / see P-62x.1CD nm Closed-loop linearity (typ.) 0.02 0.02 0.02 0.03 0.03 0.03 - % Stiffness 0.42 0.35 0.15 0.10 - 0.13 see P-62x.1CD N/µm Push / pull force capacity (in X) 10/5 10/8 10/8 10/8 10/8 10/8 see P-62x.1CD N Max. Load 10 10 10 10 10 10 see P-62x.1CD N Lateral force limit 10 10 10 10 10 10 see P-62x.1CD N Tilt ( y, z) (typ.) 3 3 3 6 6 30/10 see P-62x.1CD µrad Electrial capacitance 0.75 1.5 3.0 6.0 18.6 - see P-62x.1CD µF ±20 % Dynamic operating current 1.9 1.9 1.5 1.5 - - see P-62x.1CD µA/(Hz x µm) coefficient (DOCC) Unloaded resonant frequency 1240 800 400 215 125 125 see P-62x.1CD Hz ±20 % Resonant frequency @ 20 g load 550 520 340 180 115 - see P-62x.1CD Hz ±20 % Resonant frequency @ 120 g load 260 240 185 110 90 110 see P-62x.1CD Hz ±20 % Operating temperature range -40 - 120 -40 - 120 -40 - 120 -40 - 120 -40 - 120 -40 - 120 -40 - 150 °C Voltage Connection D ** D ** D ** D ** D ** D ** VL Sensor Connection D ** D ** D ** D ** D ** D ** - Weight (with cables) 108 158 195 238 375 720 g ±5 % Body material Al Al Al Al Al AI Al Recommended amplifier/controller F, M, L, H F, M, L, H F, M, L, H F, M, L, H F, M, L, H F, M, L, H C, G (codes explained p. 2-17)

* For calibration information see p. 2-8. Resolution of PI piezo nanopositioners is not limited by friction or stiction. The value given is noise equivalent motion with E-710 controller ** Version .1CL with Lemo connectors. d-6 Latest PI Catalogs: www.pi.ws

P-882 – P-888 Piezo Stack Linear Actuator PICMA® High-Performance Monolithic Multilayer Piezo Actuators (LVPZT)

PI has with thousands of in- Optimum UHV Compatibility— dustrial PZT applications. No Outgassing The lack of polymer insulation Increased Lifetime Through and the high Curie temperature Humidity Resistance make for optimal ultra-high- The monolithic ceramic-en- vacuum compatibility (no out- capsulated design provides gassing / high bakeout temper- better humidity protection than atures, up to 150 °C) polymer-film insulation. Diffu- sion of water molecules into Ideal for Closed-Loop the insulation layer, is greatly Operation reduced by the use of cofired, The ceramic surface of the outer ceramic encapsulation. actuators is extremely well suited for use with resistive or PICMA® piezo actuators are currently available High-Level Dynamic optical fiber strain gauge sen- with cross-sections of 2 x 3, 3 x 3, 5 x 5 and 10 x 10 mm. Performance—Very Wide sors. Such sensors can be eas- Temperature Range ily applied to the actuator sur- The high Curie temperature of face and exhibit significantly Award-Winning Technology 320 °C gives PICMA® actuators higher stability and linearity Low Operating Voltage a usable temperature range than with conventional poly- Superior Lifetime Even Under Extreme Conditions extending up to 150 °C. This mer-insulated actuators. Very Large Operating-Temperature Range means that they can be operat- High Humidity Resistance ed in hotter environments, or Amplifiers, Drivers & Excellent Temperature Stability they can be driven harder in Controllers dynamic operation. With con- High Stiffness PI offers a wide range of conventional multilayer actuators, trol electronics for piezo actua- UHV Compatible to 10-9 hPa heat generation—which is pro- tors from low-power drivers Sub-Millisecond Response & Sub-Nanometer Resolution portional to operating frequen- to multichannel, closed-loop, cy—either limits the operating digital controllers. Of course, PI frequency or duty cycle in also designs custom amplifiers dynamic operation, or makes and controllers. ungainly cooling provisions Increased Lifetime and Higher ments. They are superior to necessary. Performance conventional multilayer actua- At the low end, operation PICMA® (PI Ceramic Monolithic tors in industrial applications down to a few Kelvin is possi- Actuator) piezo actuators are and high-endurance situations, ble (with reduction in perform- characterized by their high per- where they show substantially ance specifications). formance and reliability, even longer lifetimes both in static in extremely harsh environ- and dynamic operation.

New Production Process, Application Examples Optimized PZT Ceramics Precision mechanics and PICMA® piezo actuators are mechanical engineering made from a ceramic material Nanopositioning / high- in which the piezoceramic speed switching properties such as stiffness, capacitance, displacement, Active and adaptive optics temperature stability and life- Vibration cancellation time are optimally combined. The actuators’ monolithic Pneumatic & hydraulic design and special electrode valves structure was made possible Metrology / interferometry by advances in production PICMA® actuator with optional wire technology. This development Life sciences, medicine leads and rounded top piece for is just one reflection of the decoupling lateral forces optional. and biology PICMA® dimensions, in mm

PICMA® piezo actuators (bottom curve) compared with conventional The displacement of PICMA® actuators exhibits very low tempera- multilayer actuators with polymer insulation (top curve). PICMA® ture dependence. This, in combination with their low heat genera- actuators are not affected by the high-humidity test conditions. tion, makes PICMA® actuators optimal for dynamic operation. Conventional piezo actuators exhibit increased leakage current after (Operating frequency f = 200 Hz) only a few hours. Leakage current is an indication of insulation quality and expected lifetime. Test conditions: U = 100 VDC; T = 25 °C; Relative Humidity = 70%

Recommended preload for Technical Data / Product Order Numbers dynamic operation 15 to 30 MPa Order Dimensions Nominal Max. Blocking Stiffness Electrical Resonant number* A x B x L displacement displacement force [N/µm] capacitance frequency * For optional PTFE insulated [mm] [µm @ 100 V] [µm @ 120 V] [N @ 120 V] [µF] ±20% [kHz] ±20% wires, pigtail length 100 mm, P-882.10 2 x 3 x 9 6.5 ±20% 8 ±20% 190 24 0.13 135 change order number extension to .x1 (e.g. P-882.11). P-882.20 2 x 3 x11 8.5 ±20% 10.5 ±20% 210 20 0.18 110 P-882.30 2 x 3 x 13.5 11 ±20% 13 ±20% 210 16 0.22 90 Unloaded (longitudinal) resonant frequency measured at P-882.50 2 x 3 x 18 15 ±10% 18 ±10% 210 12 0.31 70 1 Vpp; capacitance at 1 Vpp, P-883.10 3 x 3 x 9 6.5 ±20% 8 ±20% 290 36 0.21 135 1 kHz. P-883.20 3 x 3 x 11 8.5 ±20% 10.5 ±20% 310 29 0.27 110 Standard PZT ceramic type: P-883.30 3 x 3 x 13.5 11 ±20% 13 ±20% 310 24 0.35 90 PIC 252 P-883.50 3 x 3 x 18 15 ±10% 18 ±10% 310 18 0.48 70 Max. operating voltage: P-885.10 5 x 5 x 9 6.5 ±20% 8 ±20% 800 100 0.6 135 -20 to +120 V P-885.20 5 x 5 x 11 8.5 ±20% 10.5 ±20% 850 82 0.8 110 Max. operating temperature: -40 to +150 °C P-885.30 5 x 5 x 13.5 11 ±20% 13 ±20% 870 67 1.1 90 P-885.50 5 x 5 x 18 15 ±10% 18 ±10% 900 50 1.5 70 Standard Mechanical Interface: P-885.90 5 x 5 x 36 32 ±10% 38 ±10% 950 25 3.1 40 ceramic (top & bottom) Standard Electrical Interface: P-887.30 7 x 7 x 13.5 11 ±20% 13 ±20% 1700 130 2.2 90 solderable pads P-887.50 7 x 7 x 18 15 ±10% 18 ±10% 1750 100 3.1 70 Available Options: strain gauge P-887.90 7 x 7 x 36 32 ±10% 38 ±10% 1850 50 6.4 40 sensors, special mechanical P-888.30 10 x 10 x 13.5 11 ±20% 13 ±20% 3500 267 4.3 90 interfaces, etc. Other specifications on request. P-888.50 10 x 10 x 18 15 ±10% 18 ±10% 3600 200 6.0 70 Specifications subject to change P-888.90 10 x 10 x 36 32 ±10% 38 ±10% 3800 100 13.0 40 without notice. e-2 P-840/1 Preloaded Piezo Stack Actuator Preloaded Open- & Closed-Loop Piezo Translators (LVPZT)

tion sensors and operate with Ordering Information PI servo-control electronics see page 4-19 ff. and page 4-31 P-841.10 Closed-Loop LVPZT Translator, ff. for details). 15 µm

Design P-841.20 Closed-Loop LVPZT Translator, These translators are equipped 30 µm with highly reliable multilayer P-841.30 PZT ceramic stacks protected Closed-Loop LVPZT Translator, by a non-magnetic stainless 45 µm steel case with internal spring P-841.40 preload. The standard transla- Closed-Loop LVPZT Translator, tor tip and base have tapped 60 µm holes. Select the P-840.95 ball P-841.60 tip option to help decouple off- Closed-Loop LVPZT Translator, P-840, P-841 piezo translators (DIP switch for size comparison) axis or torque loads from the 90 µm

translator. P-840.10 Open-Loop LVPZT Translator, 15 µm Displacement to 90 µm Mounting P-840.20 Pushing Forces to 1000 N For push/pull forces up to 5 N, Open-Loop LVPZT Translator, 30 µm Preloaded for Pulling Forces to 50 N the translator can be mounted P-840.30 Sub-msec Response by clamping around the case. Open-Loop LVPZT Translator, 45 µm For larger forces, the translator Sub-nm Resolution P-840.40 must be mounted by the base. Options: Ball Tip, Vacuum Versions Open-Loop LVPZT Translator, 60 µm For positioning of magnetic parts the P-176.20 magnetic P-840.60 Open-Loop LVPZT Translator, 90 µm P-840 and P-841 preloaded High Accuracy in Closed-Loop adapter can be screwed into piezo translators are high-reso- Operation the translator tip. Ask about custom designs! lution linear actuators for static The P-840 is specifically de- For more mounting guidelines and dynamic applications. signed for open-loop opera- see page 1-48. They provide sub-millisecond tion. For highest accuracy, the response and sub-nanometer P-841 closed-loop version resolution. The internal spring includes integrated ultra-high- preload makes them ideal for resolution strain gauge posi- dynamic applications. Technical Data Closed-Loop Models P-841.10 P-841.20 P-841.30 P-841.40 P-841.60

Open-loop travel @ 0 to 100 V 15 30 45 60 90 Application Examples Closed-loop travel 15 30 45 60 90 * Integrated feedback sensor SGS SGS SGS SGS SGS Static and dynamic ** Closed-loop / open-loop resolution 0.3 / 0.15 0.6 / 0.3 0.9 / 0.45 1.2 / 0.6 1.8 / 0.9 positioning *** Static large-signal stiffness 57 27 19 15 10 Disk drive testing Push/pull force capacity 1000 / 50 1000 / 50 1000 / 50 1000 / 50 1000 / 50 Torque limit (at tip) 0.35 0.35 0.35 0.35 0.35 Smart structures Electrical capacitance 1.5 3.0 4.5 6.0 9.0 Adaptive mechanics Dynamic operating current coefficient (DOCC) 12.5 12.5 12.5 12.5 12.5 Unloaded resonant frequency (f ) 18 14 10 8.5 6 Vibration cancellation 0 Standard operating temperature range -20 to +80 -20 to +80 -20 to +80 -20 to +80 -20 to +80 Switching Voltage connection VL VL VL VL VL Laser tuning Sensor connection L L L L L Weight without cables 20 28 46 54 62 Patch clamping Material case / end pieces N-S N-S N-S N-S N-S For more examples Length L 32 50 68 86 122 see page 1-5 Recommended amplifier/controller C, D ,G , H C, D ,G , H C, D ,G , H C, D ,G , H C, D ,G , H

Response of a P-841.10 to a 3 nm peak-to-peak square wave control input signal, measured with servo-control bandwidth set to 240 Hz and 2 msec settling time. Note the crisp response to the square wave control signal.

Factory Installed Options Notes P-703.20 See the “Piezo Drivers & Nano- High-Vacuum Option positioning Controllers” sec- (see p. 1-44) tion for our comprehensive line of low-noise modular and OEM P-840.95 control electronics for computer and manual control. Ball Tip (see page 1-44)

Accessories P-176.20 Magnetic adapter with M3 threaded stud, see page 1-45. Extension cables & connectors: see page 6-55 in the “Piezo Drivers & Nanopositioning P-840, P-841, dimensions (in mm). See table for length, L Controllers” section.

Open-Loop P-840.10 P-840.20 P-840.30 P-840.40 P-840.60 Units Notes see page 1-46 15 30 45 60 90 µm ±20% A2 -- ---µmA5 -- --- B - / 0.15 - / 0.3 - / 0.45 - / 0.6 - / 0.9 nm C1 57 27 19 15 10 N/µm ±20% D1 1000 / 50 1000 / 50 1000 / 50 1000 / 50 1000 / 50 N D3 0.35 0.35 0.35 0.35 0.35 Nm D6 1.5 3.0 4.5 6.0 9.0 µF ±20% F1 12.5 12.5 12.5 12.5 12.5 µA/ (Hz x µm) F2 18 14 10 8.5 6 kHz ±20% G2 -20 to +80 -20 to +80 -20 to +80 -20 to +80 -20 to +80 °C H2 * Closed-loop models can attain linearity up to 0.15% VL VL VL VL VL J1 and are shipped with per------J2formance reports. 20 28 46 54 62 g ±5% K ** Resolution of piezo actuators is not limited by friction N-S N-S N-S N-S N-S L or stiction. 32 50 68 86 122 mm ±0.3 Noise equivalent motion with E-503 amplifier; C,G C,G C,G C,G C,G *** Dynamic small-signal stiffness ~30% higher. e-4 P-842 Preloaded Piezo Stack Linear Actuator Preloaded Piezo Actuators (LVPZT) with Sensor Option

P-842, P-843, P-844 and P-845 can be held by clamping the series piezo translators are case. The P-176.50 / P-176.60 high-resolution linear actuators flexible tips can be installed to for static and dynamic applica- decouple the ceramic from tions. They provide sub-mil- bending forces (see page 1-45). lisecond response and sub- For more mounting guidelines, nanometer resolution. see page 1-48.

Design High Accuracy in Closed-Loop These actuators consist of a Operation friction-free, preloaded, mono- The P-842 and P-844 are lithic multilayer piezoceramic designed for open-loop posi- stack protected by a stainless tioning tasks. The P-843 and steel case. P-845 versions are equipped The high preload gives these with integrated high-resolution actuators outstanding proper- SGS position sensors and offer ties for dynamic applications high-accuracy, closed-loop P-844 piezo actuators (battery operation (for more informa- for size comparison) (e.g. precision machining, active damping, etc.) and push- tion, see the “Tutorial: Piezo- pull applications. electrics in Positioning,” Sec- tion 4). Travel Range to 90 µm Mounting Pushing Forces to 3000 N Options: Preloaded for Pulling Forces to 700 N Mounting is at the foot, although with push/pull forces P-703.20 Sub-ms Response of less than 100 N, the actuator High-vacuum option, p. 1-44. Sub-nm Resolution Options: Vacuum Versions, Water-Resistant Case

Application Examples Technical Data and Product Order Numbers Order Travel range Travel range Integrated Resolution Static Static and dynamic number (open-loop) (closed-loop) position closed-loop / large-signal for 0 to 100 V [µm] sensor* open-loop stiffness precision positioning [µm] ±20% [nm]** [N/µm] ±20%*** Disk drive testing P-842.10 15 - - - / 0.15 57 equipment P-842.20 30 - - - / 0.3 27 P-842.30 45 - - - / 0.45 19 Optics P-842.40 60 - - - / 0.6 15 P-842.60 90 - - - / 0.9 10 Metrology / P-843.10 15 15 SGS 0.3 / 0.15 57 interferometry P-843.20 30 30 SGS 0.6 / 0.3 27 Active structures P-843.30 45 45 SGS 0.9 / 0.45 19 (Adaptronics) P-843.40 60 60 SGS 1.2 / 0.6 15 P-843.60 90 90 SGS 1.8 / 0.9 10 Precision engineering / P-844.10 15 - - - / 0.15 225 micromechanisms P-844.20 30 - - - / 0.3 107 Adaptive mechanics P-844.30 45 - - - / 0.45 75 P-844.40 60 - - - / 0.6 57 Active vibration control P-844.60 90 - - - / 0.9 38 Switching applications P-845.10 15 15 SGS 0.3 / 0.15 225 P-845.20 30 30 SGS 0.6 / 0.3 107 Laser tuning P-845.30 45 45 SGS 0.9 / 0.45 75 P-845.40 60 60 SGS 1.2 / 0.6 57 For more examples, P-845.60 90 90 SGS 1.8 / 0.9 38 see page 1-5 Notes see A2 A5 B C1 D1

Accessories P-176.50 Flexible tip for P-842 / P-843, see p. 1-45

P-176.60 Flexible tip for P-844 / P-845, see p. 1-45 Extension cables with connectors: see pp. 6-55 ff.

Note High-resolution amplifiers and servo-control electronics, both digital and analog, are described in the “Piezo Drivers & Nanopositioning Controllers” section, page 6-8 ff.

P-844, P-845 dimensions in mm; length = L, see P-842, P-843 dimensions in mm; length = L, see table for value; max. torque at tip: 1 Nm. table for value; max. torque at tip: 0.35 Nm.

Push/pull Electrical Dynamic operat- Resonant Weight Length L Recommended force capacity capacitance ing current frequency without [mm] amplifier/controller [N] [µF] ±20% coefficient (unloaded) cable (codes explained p. 1-3) [µA / (Hz x µm)] [kHz] ±20% [g] ±5% 800 / 300 1.5 12.5 18 31 37 C, G 800 / 300 3.0 12.5 14 42 55 C, G 800 / 300 4.5 12.5 10 53 73 C, G 800 / 300 6.0 12.5 8.5 64 91 C, G 800 / 300 9.0 12.5 6 86 127 C, G 800 / 300 1.5 12.5 18 31 37 D, H 800 / 300 3.0 12.5 14 42 55 D, H 800 / 300 4.5 12.5 10 53 73 D, H Voltage connection: LEMO 800 / 300 6.0 12.5 8.5 64 91 D, H FFA.00.250; 1 m coaxial cable, 800 / 300 9.0 12.5 6 86 127 D, H RG 178, teflon insulation. Sensor connection: LEMO 3000 / 700 6.0 50 16 84 47 C, G FFA.0S.304; 1 m coaxial cable 3000 / 700 12.0 50 12 108 65 C, G with PUR insulation. 3000 / 700 18.0 50 9 132 83 C, G Temperature range: -40 to 80 °C. Case / end pieces: non-magnetic 3000 / 700 24.0 50 7.5 156 101 C, G steel 3000 / 700 36.0 50 5.5 204 137 C, G * SGS versions can attain closed-loop linearity up to 3000 / 700 6.0 50 16 84 47 D, H 0.15% and are shipped with 3000 / 700 12.0 50 12 108 65 D, H performance reports. ** The resolution of piezo actu- 3000 / 700 18.0 50 9 132 83 D, H ators is not limited by stic- 3000 / 700 24.0 50 7.5 156 101 D, H tion or friction. Value given 3000 / 700 36.0 50 5.5 204 137 D, H is noise equivalent motion with E-503 amplifier. D3 F1 F2 G2 K *** Dynamic smallsignal stiffness is ~30% higher. e-6 P-212 · P-216 Piezo Stack Linear Actuator Preloaded Open- & Closed-Loop PICA™ Power Piezo Actuators (HVPZT) with Sensor Option

Ordering Information

2 Preloaded Piezo Actuator, 1000 V, 2000 N 6 Preloaded Piezo Actuator, 1000 V, 4500 N 0 w/o Sensor S w/SGS Position Sensor T modified for Low Temperature P-21 . V modified for High Temperature/Vacuum 1 Travel Range 15 µm 2 Travel Range 30 µm 4 Travel Range 60 µm Option: 8 Travel Range 120 µm P-177.50 9 Travel Range 180 µm (P-216 only) From left: Dynamic applica- P-212.1S and .8S, P-216.9S, Please read “Options and Accessories”, page 1-44 ff, for tions (with E-481): .4S and .1S piezo actuators further information. temperature sensor (CD for size comparison) Extensions cables, adapters & connectors: see in “Accessories” and protective air in the “Piezo Drivers & Nanopositioning Controllers” section. for PICATM HVPZT

Travel Range to 180 µm tors prove consistent perform- guide in the „Piezo Drivers & Pushing Forces to 4500 N ance, even after billions Nanopositioning Controllers“ Pulling Forces to 500 N (1,000,000,000) of cycles. section page 6-2 ff. Sub-millisecond Response Mechanical Mounting Sub-nanometer Resolution Options: Vacuum, High- and Low-Temperature Mounting is at the foot, with push/pull forces of less than 5 N, the actuator can be held by clamping the case. The optional ball tip is intended to decouple torque and off-center forces The P-212 and P-216 series are These actuators have the fric- from the translator. Read de- high-resolution linear piezo tion-free, preloaded PICA™ tails in Mounting and Handling actuators (translators) for static Power actuators inside. The Guidelines page 1-48. and dynamic applications. preload makes them ideal for They provide sub-millisecond dynamic applications like preci- High Flexibility with response and sub-nanometer sion machining or active damp- PI Amplifiers, Drivers & resolution. ing. Controllers High Displacement with Ultra- PI offers a wide range of con- Application Examples High Reliability trol electronics for piezo actuators from low-power drivers to PICA™ Power actuators are Optics the high-performance ampli- optimized for high-temperature fier / controller E-481. Metrology / Interferometry working conditions and high- duty-cycle dynamic applica- Adaptronics For closed-loop operation PI tions. Precision engineering / offers a wide variety of analog and digital controllers. The micromechanics All PICA™ piezo ceramics E-500 modular system can be are specifically designed for Adaptive mechanics easily upgraded from an ampli- high-duty-cycle applications. fier to a servo controller, in- Active vibration damping With PI’s extensive applications cluding different interface / dis- knowledge, gained over sever- Switches play modules. al decades, performance does Laser tuning not come at the price of Force generation / reliability. All materials used Notes materials testing are specifically matched for High-resolution amplifiers and robustness and lifetime. En- servo-control electronics, both Nanotechnology durance tests on PICA™ actua- digital and analog, see selection © PI 1998-2007. Subject to change without notice. This data sheet is superseded by any new 07/10/19.0 release. The newest release is available for download at www.pi.ws. e-7 Piezo • Nano • Positioning

0 A-0.05 0.05 A M 9

SW D 0.5 5.5 0.5

L Option Sensor 5 4 M 11 9.5 5 4

A SW C M8 7 Piezo B 0.1

P-212 and P-216, dimensions in mm. End pieces and case of stainless steel. Sensor connection: LEMO FFA.0S.304; 1 m coaxial cable with PUR insulation, 2- conductor, shielded

Technical Data P-212.10 P-212.20 P-212.40 P-212.80 P-216.10 P-216.20 P-216.40 P-216.80 P-216.90 Einh. Toleranz Operating voltage 0 to1000 0 to1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 V Motion and positioning Closed-loop travel 15 30 60 120 15 30 60 120 180 µm Closed-loop resolution** 0.3 0.6 1.2 2.4 0.3 0.6 1.2 2.4 3.6 nm typ. Open-open resolution** 0.15 0.3 0.6 1.2 0.15 0.3 0.6 1.2 1.8 nm typ. Linearity* 0.2 0.2 0.2 0.2 0.2 0.2 0.2 0.2 0.2 % typ. Mechanical properties Static large-signal stiffness*** 90 60 34 18 210 140 80 50 32 N/µm ±20% Unloaded resonant frequency 17 12 7 4.5 17 12 7 4.5 3 kHz ±20% Push/pull force capacity 2000 /300 2000 /300 2000 /300 2000 /300 4500 / 500 4500 / 500 4500 / 500 4500 / 500 4500 / 500 N Max. Shear force limit 15 10 10 10 60 36 23 23 23 N Torque limit (on tip) 0.5 0.5 0.5 0.5 11111 Nm Drive properties El. capacitance 47 90 180 370 130 250 500 1000 1500 nF ±20% Dynamic operating 55551313131313µA/(Hz x µm) ±20% current coefficient Miscellaneous Mass (with cable) 110 120 150 210 170 200 250 370 480 g ±5%

* Requires SGS sensor. SGS versions are shipped with performance reports ** Measured with an Interferometer. The resolution of piezo actuators is not limited by stiction or friction *** Dynamic small-signal stiffness is ~50% higher Piezo ceramic type: PICATM Power Operating temperature range: -40 to +80 °C Recommended controller/driver: B, I, J, see codes explanation page 6-11 For maximum lifetime, voltages in excess of 750 V should be applied only for short durations See Notes (Technical Data) for further information page 2-84 ff e-8 P-225 · P-235 Piezo Stack Linear Actuator Preloaded PICATM Power High-Load Piezo Actuators (HVPZT) with Sensor Options

Ordering Information

2 Preloaded High-Load Piezo Actuator, 1000 V, 12500 N 3 Preloaded High-Load Piezo Actuator, 1000 V, 30000 N 0 w/o Sensor S w/SGS Position Sensor T modified for Low Temperature P-2 5. V modified for High Temperature/Vacuum 1 Travel Range 15 µm 2 Travel Range 30 µm Option: 4 Travel Range 60 µm P-177.50 Dynamic applications 8 Travel Range 120 µm (with E-481): 9 Travel Range 180 µm (P-235 only) temperature sensor and protective air for Please read “Options and Accessories”, page 1-44 ff, for PICATM HVPZT High-load piezo actuators P-235.1S, .4S and .9S, P-225.8S and .1S further information. (from left) with CD for size comparison Extensions cables, adapters & connectors: see in “Accessories” P-706.00 in the “Piezo Drivers & Nanopositioning Controllers” section. Water-resistant case

Extremely High Stiffness al decades, performance does the “Tutorial: Piezoelectrics in Pushing Forces to 30,000 N not come at the price of relia- Nanopositioning”. Pulling Forces to 3500 N bility. All materials used are specifically matched for robust- High Flexibility with Travel Ranges to 180 µm ness and lifetime. Endurance PI Amplifiers, Options: Versions for Vacuum, High- and Low-Temperatures tests on PICA TM actuators prove Drivers & Controllers and with Water-Resistant Case consistent performance, even PI offers a wide range of con- after billions (1,000,000,000) of trol electronics for piezo actua- cycles. tors from economical, low- power piezo drivers to the Open- and Closed-Loop E-481 high-performance am- Models for Optimum plifier / controller providing Dynamics and Linearity 2000 W of dynamic power. The standard models are ideal P-225 and P-235 are preloaded, These ultra-high-force linear for open loop positioning ap- For closed-loop operation a TM high-load piezo actuators actuators consist of PICA plications. In this mode the wide variety of analog and dig- (translators) for static and Power piezoelectric ceramic- actuator displacement is rougly ital controllers is available. The dynamic applications. They stacks encapsulated in a stain- proportional to the applied E-500 modular system can be provide sub-millisecond re- less steel case with stainless voltage. easily upgraded from an ampli- sponse and sub-nanometer steel end pieces and a friction- fier to a servo controller, includ- resolution. less internal spring preload. Open-loop operation is ideal ing different interface / display The high load capacity and pre- for applications where the fast- modules. load makes them ideal for est response and the high-est machining applications and bandwidth are essential. Here, Read details in Mounting and Aplication Examples active vibration cancellation. commanding and read-ing the Handling Guidelines page 1-48. target position in absolute val- Precision engineering / High Displacement with Ultra- ues is either not important or Notes micromechanics High Reliability carried out by an external feed- High-resolution amplifiers and Adaptive mechanics PICATM Power actuators are back loop. servo-control electronics, both optimized for high-temperature digital and analog, see selec- Active vibration damping working conditions and high- For highest positioning accura- tion guide in the "Piezo Drivers Adaptronics duty-cycle dynamic applica- cy and repeatability, select the & Nanopositioning Controllers" tions. factory installed closed-loop Static and dynamic section page 6-2 ff. All PICATM piezo ceramics are option with integrated ultra- precision positioning specifically designed for high- high- resolution strain gauge Force generation / dutycycle applications. With position sensors and operate materials testing PI’s extensive applications with PI servo-control electronics. For more information, read © PI 1998-2007. Subject to change without notice. This data sheet is superseded by any new 07/11/15.0 release. The newest release is available for download at www.pi.ws. knowledge, gained over sever-

e-9 Piezo • Nano • Positioning

P-225 and P-235, dimensions in mm. End pieces and case of stainless steel. Sensor connection: LEMO FFA.0S.304; 1 m coaxial cable with PUR insulation. Voltage connection: LEMO FGG.0B.701.CJA.1173, 1 m cable with PUR insultaion, 2-conductor, shielded

Technische Daten P-225.10 P-225.20 P-225.40 P-225.80 P-235.10 P-235.20 P-235.40 P-235.80 P-235.90 Unit Tolerance Operating voltage 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 0 to 1000 V Motion and positioning Closed-loop travel 15 30 60 120 15 30 60 120 180 µm Open-loop resolution** 0,3 0,6 1,2 2,4 0,3 0,6 1,2 2,4 3,6 nm typ. Closed-loop resolution**** 0,15 0,3 0,6 1,2 0,15 0,3 0,6 1,2 1,8 nm typ. Linearity 0,2 0,2 0,2 0,2 0,2 0,2 0,2 0,2 0,2 % typ. Mechanical properies Static large-signal 480 330 200 110 860 600 380 210 150 N/µm ±20 stiffness*** Unloaded resonant 14 10 7 4 14 10 7 3,9 2,8 kHz ±20 % frequency Push/pull force capacity 12500 / 12500 / 12500 / 12500 / 30000 / 30000 / 30000 / 30000 / 30000 / N Max. 2000 2000 2000 2000 3500 3500 3500 3500 3500 Shear force limit 255 152 84 73 707 420 232 147 147 N Torque limit (on tip) 1,5 1,5 1,5 1,5 22222 Nm Drive properties El. capacitance 320 630 1300 2600 550 1100 2400 5100 7800 nF ±20 % Dynamic operating 33 33 33 33 65 65 65 65 65 µA/(Hz x µm) ±20 % current coefficient Miscellaneous Mass (with cable) 410 470 610 900 580 690 940 1400 1900 g ±5 % * Requires SGS sensor. SGS versions are shipped with performance reports ** Measured with an interferometer. The resolution of piezo actuators is not limited by stiction or friction *** Dynamic small-signal stiffness is ~50 % higher Piezo ceramic type: PICATM Power Operating temperature range: -40 to +80 °C Recommended controller/driver: B, I, J, see page 6-11 For maximum lifetime, voltages in excess of 750 V should be applied only for short durations See Notes (Technical Data) for further information see page 2-84 ff

e-10 See www.pi.ws for other Servo & Stepper Motor Controllers

C-863 Controller for Servo Actuators Mercury™ DC-Motor Controller / Driver with Network Feature

For easy synchronization of Ordering Information motion with internal or external trigger signals four input C-863.10 Mercury™ DC-Motor Controller, and four output lines are pro- 1 Channel, with Wide-Range vided. Power Supply

Accessories: Multi-Axis Control, Combination of DC & Stepper C-819.20 2-Axis Analog Joystick for Motors ™ Mercury Controller Up to 16 C-863 Mercury™ DC C-819.20Y servo controllers and C-663 Y-Cable for Connecting stepper motor controllers can 2 Controllers to C-819.20 be daisy-chained and ad- C-862.PB3 dressed via the same interface. Push Button Box for Mercury™ The C-863 Mercury™ DC servo controller features USB and RS-232 interfaces and incremental encoder signal processing at 20 MHz bandwidth The networking feature allows the user to start out with one ply, RS-232 communication controller and add more units cable, a daisy-chain network High Performance at Low Cost later for multiaxis setups. cable and a comprehensive DC Servo-Motor Controller Supplies up to 30 W software package. 20 MHz Encoder Input for High Speed & Resolution Easy Programming Macro Programmable Stand-Alone Functionality All servo and stepper motor A stepper motor version is Network Capability for Multi-Axis Applications controllers of the Mercury™ available as the C-663: Non-Volatile EEPROM for Macros and Parameters family can be operated using Stepper Motor Version Digital I/O Lines (TTL) the PI general command set Motor-Brake Control (GCS). PI-GCS allows network- C-663.10 TM USB and RS-232 Interface ing of different controller units, Mercury Step Stepper Motor Controller with Wide-Range Power Optional Joystick for Manual Control both for piezo-based and Supply Works with All PI Micropositioning Actuators and Stages motorized positioning units, with minimal programming C-663.PS effort. In addition, the C-863 Wide-Range Power Supply for MercuryTM Step, 24 V can be programmed using the The latest generation Mercury™ cost-effective micropositioning native command set of previ- C-863 servo motor controller is systems. ous Mercury™ controllers. even more powerful and versa- tile than its predecessors. Easy data interchange with laptop or Flexible Automation Cost-Saving Due to Integrated PC is possible via the USB The Mercury™ offers a number Amplifier and PWM Outputs interface. The RS-232 interface of features to achieve automa- The unique Mercury™ concept provides for easy integration in tion and handling tasks in combines a high-performance industrial applications. The research and industry in a very motion controller and an inte- compact design with its inte- cost-effective way. Programm- grated power amplifier in a grated amplifier makes it ideal ing is facilitated by the high- small package. Additional for building high-performance, level mnemonic command lan- PWM control outputs allow the guage with macro and com- direct operation of any DC- pound-command functionality. motor-driven PI micro-posi- Application Examples Macros can be stored in the tioning system––even high- non-volatile memory for later speed stages such as the Fiber positioning recall. M-500 ActiveDrive™ Translation Stages––reducing costs, in- Automation creasing reliability and simpli- Stand-alone capability is pro- fying the setup. Photonics / integrated optics vided by a user-programmable autostart macro to run automa- Quality assurance testing tion tasks at power up (no run- Contents of Delivery time computer communication Each controller is delivered Testing equipment required!). with a wide-range power sup- © PI 1998-2008. Subject to change without notice. This data sheet is superseded by any new 08/01/14.0 release. The newest release is available for download at www.pi.ws. f-1 See www.pi.ws for other Servo & Piezo • Nano • Positioning Stepper Motor Controllers

C-843 DC-motor controller board (center) with M-110 linear stage, M-235 linear actuator, M-511.DD translation stage and M-501.1DG vertical stage. No external amplifier is required to drive any of these or other PI stages. Small motors are driven through the C-843’s onboard linear amplifiers, direct-drive stages (e.g. M-511.DD) employ ActiveDrive™ controlled off the C-843’s PWM outputs.

C-863 dimensions in mm

Technical Data

Model C-863.10 Function DC-servo-motor controller, 1 channel Motion and control Servo characteristics P-I-D-amplifier, parameter change on-the-fly Trajectory profile modes Trapezoidal, point-to-point Encoder input AB (quadrature) single-ended or differential TTL signal, 20 MHz Stall detection Servo off, triggered by programmable position error Input limit switch 2 x TTL (pull-up/pull-down, programmable) Input reference switch 1 x TTL Motor brake 1 x TTL, software controlled Electrical properties Output power max. 30 Watt (PWM) Output voltage 0 to 15 V Current 80 mA + motor current (3 A max.) Interfaces and operation Communication interfaces USB, RS-232 (9-pin [m] sub-D) Motor connector 15-pin (f) sub-D Controller network Up to 16 units on single interface I/O ports 4 analog/digital in, 4 digital out (TTL) Command set Mercury Command Set, GCS (via DLL) User software PIMikroMove®, MMCRun Software drivers GCS (PI General Command Set)-DLL, LabVIEW drivers, native Mercury™ DLL Supported functionality Start-up makro; internal safety circuitry: watchdog timer Manual control (optional) 2-axis joystick, Y-cable for 2D motion, pushbutton box Miscellaneous Operating voltage 15 to 30 V included: external power supply C-890.PS, 15 V / 2 A Operating temperature range +5 to +50 °C Mass 0.3 kg Dimensions 130 x 76 x 40 mm

f-2 See www.pi.ws for other Ultrasonic Motor Controllers

C-866 Controller for Ultrasonic Motors High-Speed, Closed-Loop Controller / Driver for PILine® Ultrasonic Piezo Linear Motors

tioning system, the piezomo- Ordering Information tor drive electronics has been integrated in the controller. C-866.161 Piezomotor Controller with Drive Various versions of the con- Electronics, 1 Channel, for PILine® troller are available, depend- Systems with P-661 Motors ing on the piezomotor used. C-866.164 Piezomotor Controller with Drive The C-866.161 version, for Electronics, 1 Channel, for PILine® example, contains the drive Systems with P-664 Motors

electronics for the P-661 motor C-866.165 (page 10-14 f) , which is used Piezomotor Controller with Drive in the M-663 (page 10-16 f) Electronics, 1 Channel, for PILine® micro linear stage. Systems with P-665 Motors PILine® micro linear stage with 19 mm travel range and C-866.D64 0.1 µm resolution with To assure the best possible Piezomotor Controller with Drive C-866.161 controller ® system performance in terms Electronics, 1 Channel, for PILine Systems with M-674 RodDrive of force, velocity up to several 100 mm/s and settling times of Accessories ® Optimized for PILine Piezo Linear Motors a few tens of milliseconds, the C-843.ATS High-Speed Encoder Input integrated drive electronics is Auto-Tuning Software Option PID Servo Algorithm with Dynamic Parameter Switching fine-tuned to the connected Integrated Piezomotor Drive Electronics actuator / stage at the factory. Ask about custom designs! 3 TTL-Inputs, 3 TTL-Outputs Software / Programming Analog Input custom application programs Extensive Software Support In addition to the user soft- is simplified, because the com- ware for setup, system opti- mands for all supported mization and operation, com- devices are identical in syntax TM prehensive LabView and DLL and function. PI controllers for libraries are provided. nanopositioning systems, for piezomotors and servo or step- Communication with the C-866 per motors can be command- is provided either through the ed with GCS. The C-866 motion controller Spezialized Servo Algorithms RS-232 or the USB interface. For manual control, the unit was specially designed for for Ultrasonic Motors Advantages of PILine® can be operated with a joystick closed-loop positioning sys- The C-866 uses a highly spe- Micropositioning Systems tems with PILine® ultrasonic on the host PC. cialized DSP (Digital Signal The ultrasonic piezoceramic piezo linear drives. This com- Processor) to handle the drives used in PILine® micro- The PIMikroMove® user soft- pact unit contains not only PID servo-control algorithm as ware provides the PITuning- positioners have a number of servo-control and communica- well as other system functions. Tool for system performance advantages over classical tions circuitry, but also the Because of the motion proper- optimization. Graphic displays drives: drive electronics. ties typical for ultrasonic show the system’s behaviour piezomotors, the contoller has and facilitate parameter set- Higher Accelerations, up to a number of special features, ting. 10 g including dynamic control Speeds up to 500 mm/s parameter adaptation. The Optionally, the C-843.ATS Small Form Factor Application Examples high-bandwidth encoder input Auto-Tuning software is avail- Self-Locking When Powered with a limit frequency of Biotechnology able; it determines the ideal Down 35 MHz supports the high No Shafts, Gears or Other Fiber positioning settings automatically. velocities of ultrasonic piezo- Rotating Parts Automation motor stages, even at high res- Non-Magnetic and Vacuum olution. PI General Command Set Compatible Drive Principle Photonics / integrated (GCS) optics Integrated Drivers for The comprehensive command Quality assurancec testing Piezomotors structure is based on the PI Testing equipment To reduce the number of com- General Command Set (GCS). ®

© PI 1998-2007. Subject to change without notice. This data sheet is superseded by any new 07/05/30.0 release. The newest release is available for download at www.pi.ws. ponents in the PILine posi- With GCS the development of f-3 Piezo • Nano • Positioning See www.pi.ws for other Ultrasonic Motor Controllers

PIMikroMove® software for easy system performance feedback and parameter optimization

C-866 dimensions in mm

Technical Data C-866.161 C-866.164 C-866.D64 C-866.165 Function Controller / driver for PILine® piezomotor systems Drive type PILine® P-661 motors PILine® P-664 motors PILine® RodDrive M-674 PILine® P-665 motors Channels 1111 Motion and control Servo characteristics Programmable PID V-ff filters, parameter changes on-the-fly Trajectory profile Trapezoidal, S-curve Processor Motion chip, 2.5 kHz servo update rate Encoder input A/B (quadrature) differential signals, 35 x 106 counts/s Stall detection Servo off, triggered by programmable position error Limit switches 2 TTL lines, programmable Reference switch 1 TTL line, programmable Electrical properties Operating voltage 12 VDC from external power supply (included in delivery) Output power/channel 3 W 8 W 18 W 5 W

Output voltage/channel 0 to 42 Vrms 0 to 60 Vrms 0 to 100 Vrms 0 to 170 Vrms Current 300 mA w/o motor 300 mA w/o motor 300 mA w/o motor 300 mA w/o motor Interfaces and operation Communication interfaces USB 1.1, RS-232, max. 115,200 baud Motor connector MDR14 I/O ports Mini DIN 9-pin socket with 3 TTL-inputs, 3 TTL-outputs, 1 analog input (0 to 5 V) Command set PI General Command Set (GCS) User software PIMikroMove® Software drivers GCS-DLL, LabVIEWTM driver Manual control Joystick on host PC Miscellaneous Temperature range +10 °C to +50 °C Mass 780 g Dimensions 174 x 104 x 49 mm (w/o ground stud, w/o rubber feet, w/o rails)

f-4 © PI 1998-2008. Subject to change without notice. This data sheet is superseded by any new f-5 release. The newest release is available for download at www.pi.ws. 08/03/20.0 Networkable ControllerforNEXACT E-861 Controller/DriverforNEXACT®Systems than 1nm.TheNEXACT ing withresolutionsofless vides high-dynamicsposition- the analogmode,whichpro- shorter thantypically7µm, stepping mode,andformoves drive: forlongermoves,the in non-volatile memory. example, macros canbestored automation andhandling.For ber offeaturestosupport E-861 controllersofferanum- Flexible Automation ing voltagesto45Vandbelow. design minimizespiezooperat- NEXACT troller isdesignedtooperate The new, compactE-861con- of thePiezoWalk supports bothmotionmodes with themechanics,E-861 precisely. Inperfectharmony tems usingthem,simplyand closed-loop positioningsys- with AutostartMacro Non-Volatile MacroStorageforStand-AloneFunctionality Complete SystemwithController, Integrated PowerAmplifiersandSoftware Parameter ChangesOn-the-Fly I/O forAutomation,JoystickManualOperation Daisy-Chain NetworkingforMulti-AxisOperation High PerformanceatLowCost Open-Loop Operation,orClosed-LoopwithLinearEncoder For NEXACT PiezoWalk ® NEXACT linear drivesand ® ® ® System: E-861.1A1NEXACT Drives andPositioningSystems linear drive;suitableforinstallationinstagewithencoder ® ® stepping Ceramic LinearDrivesandPositioners ® drive motor controllers). DC servo-motor andstepper with otherPIcontrollers(e.g. any timeandarecompatible flexible, canbeextended at Such daisychainnetworksare over asinglePCinterface. be networkedandcontrolled Up to16E-861controllerscan Multi-Axis Operation vided. and fouroutputlinesarepro- nal triggersignals,fourinput motion withinternalorexter- For easysynchronizationof ed automatically. command sequenceisexecut- up, themacrowithitsinternal communication. Uponpower- operation withoutexternal macro allowsstand-alone A programmableautostart ® Controller withopen-loopN-310.01 Linear Motor Controllers Visit www.pi.ws forNEXLINE Latest PI Catalogs: Latest PI www.pi.ws without difficulty. ferent controllersispossible a systemwithvarietyofdif- all PIcontrollers,socontrolling programming isthesamewith Command Set(GCS),system DLLs. WiththePIGeneral included LabView driversand software isfacilitatedwith software. Interfacingtocustom PIMikroMove tion isdonewiththeincluded System setupandconfigura- and checkedbysoftware. All parameterscanbeset Comprehensive Software Easy SystemSetup, Linear Encoder NEXACT E-861.1A1 Ordering Information ® Controller, 1Channel, ® user-interface ® Visit www.pi.ws for NEXLINE® Piezo • Nano • Positioning Linear Motor Controllers

Technical Data E-861.1A1 Function Controller for NEXACT® drives / systems Drive type N-310.01 NEXACT® linear drive Channels 1 Motion and control Servo characteristics P-I-D-amplifier, parameter change on-the-fly Trajectory profile modes Trapezoidal Encoder input Analog encoder input sine-cosine interpolation circuit preset for

differential transmission, 1 Vpp amplitude and 2.27 V offset of the encoder signal Stall detection Servo off, triggered by programmable position error Input limit switch 2 x TTL (pull-up/pull-down, programmable) Input reference switch 1 x TTL Electrical properties Output power max. 40 W Output voltage -10 to +45 V Current consumption max. 2 A Interfaces and operation Communication interfaces USB 1.0, RS-232 (9-pin (m) D-Sub) Motor connector D-Sub 15-pin (f) High Density Sensor connector D-Sub 15-pin (m) High Density Controller network Up to 16 units on single interface I/O ports 4 analog/digital in, 4 digital out (TTL) Command set PI General Command Set (GCS) User software PIMikroMove®, PI Terminal Software drivers GCS-DLL, LabVIEW drivers Supported functionality Start-up macro; data recorder for categories like current position or velocity; internal safety circuitry: watchdog timer Manual control (optional) Joystick, Y-cable for 2D motion, pushbutton box Miscellaneous Operating voltage 24 V included: external power supply, 24 V, 2.5 A Operating temperature range 0 to +50 °C Mass 1.1 kg Dimensions 206 x 130 x 66 mm (with mounting rails)

The E-755 Controller for NEXLINE® high-force linear motor actuators (models N-111, N-214, N-215, etc.) For more information visit www.pi.ws

f-6 Latest PI Catalogs: www.pi.ws

E-625 Controller for Piezo (Flexure) Actuators Compact Piezo Amplifier & Servo-Controller with High-Speed Interface

effort in the face of complex Ordering Information multi-axis positioning tasks. It is also supported by the E-516 E-625.SR LVPZT Piezo Amplifier & Servo- Computer Interface Module, Controller, Strain Gauge Sensor, and most PI nanopositioning RS-232 Interface controllers and motor controllers. For more information E-625.LR on GCS, see p. 9-28. LVPZT Piezo Amplifier & Servo- Controller, LVDT Sensor, RS-232 Interface

E-625.CR LVPZT Piezo Amplifier & Servo- Controller, Capacitive Sensor, RS-232

E-625.CN E-625.SR (left) and E-625.CR Network Cable for Connecting compact piezo servo-controllers. two E-625s

Controls Piezo Flexure Actuators/Stages and Stack Actuators Network Capability with up to 4 Channels Visit www.pi.ws for our full selection For Capacitive, LVDT and Strain Gauge Position Sensors of Piezo Controllers Wave Table for User-Defined Curves Integrated 20-Bit High-Speed RS-232 Interface

The E-625 is a bench-top piezo and LVDT sensors can be net- linear amplifier and position worked and controlled over a servo controller with integrated single RS-232 connection. high-speed RS-232 computer Between the individual E-625s, interface and 20-bit D/A con- parallel networking with op- verters. The low-noise amplifi- tional E-625.CN cables is used er can supply/sink a peak cur- providing higher data rates rent of 140 mA in a voltage than possible with serial links. range of -20 to 120 V. Versions are available to operate with Wave Table SGS, LVDT or capacitive posi- User-defined data-points, cal- tion sensors, making the servo- culated with any arbitrary func- controller suitable for a wide tion, can be stored in a wave variety of PI piezo actuators table in the E-625 for later out- E-625 open-loop frequency response with various PZT loads. Values shown are capacitance in µF. and nanopositioning stages. put under control of an external trigger. New and Fast Communications Interface Software / GCS Command Set The RS-232 interface handles The E-625 controller comes the communications with the with Windows™ installation outside world. It performs up to software, DLLs and Lab View™ 300 highly deterministic read drivers. The command struc- or write operations per second ture of the extensive command and incorporates precision 20- set is based on the PI General bit D/A and A/D converters for Command Set (GCS). The GCS exceptional positional stability was developed by PI to facili- and resolution. tate the programming and operation of a wide range of Multi-Axis Network Ideal system configuration: different devices with a com- E-625.CR with P-725 PIFOC Up to four E-625s with any mon command language, thus microscope objective positioner.

© PI 1998-2006. Subject to change without notice. This data sheet is superseded by any new 06/02/03.0 release. The newest release is available for download at www.pi.ws. combination of capacitive, SGS reducing the programming f-7 Piezo • Nano • Positioning

Two single-channel piezo controllers: E-625 and the more powerful E-665 (background).

Visit www.pi.ws for for our full selection of Piezo Controllers

Technical Data Models E-625.SR, E-625.LR, E-625.CR Function Power amplifier & position servo-control of LVPZTs Channels 1 Amplifier Output voltage -20 to +120 V Maximum output power 11 W (s. p. 6-52) Average output power 6 W Peak output current <5 ms 140 mA Average output current 60 mA Current limitation Short-circuit proof Voltage gain 10 ±0.1 Polarity Positive Input Impedance 100 kΩ Dimensions 205 x 105 x 60 mm Mass 1050 g Operating voltage 12 to 30 VDC, stabilized Operating current 2 A Interface D/A converter 20-bit resolution A/D converter (sensor) 20-bit resolution Networking 4 channels, parallel RS-232 baudrate 9.6 kBaud–115.2 kBaud (default 115.2) Wave table 64 values, 100 Hz, externally triggered Position Servo-Control Sensor types Capacitive (E-625.CR), Strain gauge (E-625.SR), LVDT (E-625.LR) Servo characteristics P-I analog, notch filter Connectors PZT connector LEMO ERA.00.250.CTL / Sub-D Mix (.CR) Sensor connector LEMO EPL.0S.304.HLN (.SR, .LR) / Sub-D Mix (.CR) E-761 Digital Piezo Controller in PCI-Board Format. Analog input SMB For more information visit www.pi.ws Monitor output SMB RS-232 9-pin sub-D (male) f-8 Latest PI Catalogs: www.pi.ws

Piezo Stepping Motor Basics

PiezoWalk® Precision Drives – unlimited travel range and based on different versions ity. These properties are typi- Millimeter Travel, Nanometer still provide the characteristic of the PiezoWalk® principle: cally better for piezo stepping Resolution, High Forces features of a piezoelectric NEXLINE® and NEXACT®. Both actuators compared to inertia actuator: an open-loop resolu- provide specific advantages drives or ultrasonic motors. PiezoWalk® drives break away tion down to 30 picometers and depending on the application. The operation is possible in from the limitations of conven- a very high stiffness for dynam- two different modes: a high- tional Nanopositioning actua- ic operation and force genera- PiezoWalk® piezo stepping resolution, high dynamics ana- tors. They offer a basically tion. PI offers two product lines drives usually consist of sever- log mode within a single step, al individual piezo actuators and a step mode with virtually and generate motion through unlimited travel range. succession of coordinated clamp / unclamp and shear- motion cycles (steps). Each cycle provides only a few microns of movement, but run- ning at hundreds of hertz, the drive achieves continuous motion in the mm/second range. 50 picometer steps with a NEXLINE® drive, measured with external ultra- high-resolution capacitive sensor. The PiezoWalk® working princi- This performance provides a big safety Custom PiezoWalk® linear actuator ple provides high force capabil- margin for next generation nanotechnology applications ities, resolution and repeatabil-

Features and Advantages of PiezoWalk® drives are availa- ® PiezoWalk Drives ble for non-magnetic applications such as super-con- Very high resolution, limited ductivity experiments. They typically only by the sensor. do not create magnetic In fine-adjustment, analog fields nor are they influen- mode, resolution of 30 pico- ced by them. meters has been demonstra- The active parts in ted. PiezoWalk® drives are made High force generation and of vacuum-compatible cera- stiffness. NEXLINE® drives mics. The drives also work 6-axis parallel-kinematic nanopositioning system (Hexapod) with N-215 based NEXLINE® high-load actuators for use in strong magnetic fields can hold and generate for- in UV-light environments. ces to 600 N, NEXACT® to NEXLINE® drives can survive 15 N. shock loads of several g PiezoWalk® drives hold a during transportation. stable position to nanome- PiezoWalk® drives are ter level in power-off mode. available in three levels Due to the actuator design, of integration to provide the maximum clamping flexibility for OEMs: OEM force is applied at rest. drives, packaged actuators Because a position can be and integrated into held with zero operating vol- complex positioning tage, leakage currents can- systems such as multi-axis not affect the integrity of the translation stages or 6-DOF NEXLINE® linear actuator principle piezo drive. Hexapods. g-1 Piezo • Nano • Positioning

Piezo Stepping Motor Basics

NEXLINE® High-Force Drives for Nanopositioning NEXLINE® systems are based on very rugged, high-efficiency shear and clamping actuators and incorporate a preloading mechanism to provide pushing and holding forces up to 600 N with high lifetime. The rigid design with resonant frequen- cies of hundreds of hertz allows the construction of very stiff structures and helps to sup- press vibration. The analog

operating mode can be used N-215 high-load NEXLINE® linear drive for dithering and active vibra- provides holding forces to 600 N and 20 mm travel tion cancellation.

Compact NEXACT® Drives for Moderate Forces NEXACT® drives use bending actuators which combine the feed forward and the clamping cycles. They provide push/pull forces to 15 N with maximum velocities of more than 10 mm/s at low operating voltages of 40 V. The compact and cost-effective NEXACT® drives are available with various drive electronics, ranging from cost- effective OEM drives for open- loop operation in stepping mode to the sophisticated E-861 servo-controller for high- resolution, closed-loop linear NEXLINE® linear actuator principle translation stages.

g-2 Latest PI Catalogs: www.pi.ws

Ultrasonic Piezo Motor Basics PILine® Ultrasonic Piezomotors – Working Principle

PILine® linear piezomotors are accelerations to 10 g and veloc- based on a novel, patented ities to 500 mm/s. ultrasonic drive developed by Ultrasonic motors cannot pro- PI. At the heart of the system is vide the unlimited resolution of a rectangular monolithic piezo- linear piezo actuators and flex- ceramic plate (the stator), seg- ure-guided piezo positioning mented on one side by two stages. These motors transfer electrodes. Depending on the motion through friction, which desired direction of motion, the is why their repeatability is lim- left or right electrode of the ited to about 50 nm. Much piezoceramic plate is excited to higher resolution and holding produce high-frequency eigen- forces can be achieved with mode oscillations at tens to PiezoWalk® piezomotors / dri- hundreds of kilohertz. An alu- ves. Variety of PILine® ultrasonic piezomotors, mina friction tip (pusher) translation stages and motion controllers. ® attached to the plate moves PILine Levels of Integration along an inclined linear path at PILine® ultrasonic drive prod- the eigenmode frequency. ucts are offered in three differ- Through its contact with the ent levels of integration. The friction bar, it provides micro- drive electronics and controller impulses that drive the moving can be chosen accordingly. part of the mechanics (slider, P-661 and P-664 OEM motors turntable, etc.) forward or back- require the greatest amount wards. With each oscillatory of care at the customer’s site. cycle, the mechanics executes Motor and friction bar – the a step of a few nanometers; the length depends on the travel macroscopic result is smooth range – have to be integrated motion with a virtually unlimit- into a mechanical setup. ed travel range. The driving Operation requires preload State-of-the PILine® ultrasonic motors are based on a simple construc- force is taken from the energy of the motor against the friction allowing for the design of low-cost drive units and extremely compact, high-speed micro-positioning stages smaller than a matchbox. in the longitudinal oscillation tion bar, guiding and, if component. The transverse necessary, the servo-loop. component serves to increase / M-674 RodDrives can replace Linear positioning stages decrease the pressure of the classical drive elements like represent the highest level of friction tip against the friction rotary motor / leadscrew manufacturer integration. bar. The transverse oscillation assemblies, or magnetic The piezomotor is integrated energy determines the maxi- linear drives integrated into completely in a high-quality mum frictional force and hence a micropositioner or hand- mechanical setup inlcuding the holding and driving force of ling device. Integration if necessary the servo-loop the motor. State-of-the-art requires guiding and – if with direct-metrology linear ultrasonic motors can produce necessary – the servo-loop. encoders.

PILine® levels of integration: OEM motor, RodDrive, linear positioning stage. g-3 Piezo • Nano • Positioning

Ultrasonic Piezo Motor Basics

Features and Advantages of PILine® Ultrasonic Custom high-force ultrasonic Piezomotors piezo motors can provide forces to 50N. Compact Size: the direct- drive principle allows the design of ultra-compact translation stages. The M-662, for example, provides 20 mm travel in a 28 x 28 x 8 mm package. Low inertia, high acceleration, speed and resolution: PILine® drives achieve velocities to 500 mm/s and accelerations to 10 g. They are also very stiff, a prerequisite for their fast step-and-settle times – on the order of a few milliseconds – and provide resolution to 0.05 µm. The no lubricant flow or material steady-state heat dissipa- lack of a leadscrew means relaxation to cause submi- tion. cron creep. There is also no Vacuum Compatibility: Vacu- rotational inertia to limit um compatible versions of acceleration and decelera- PILine® drives are available. tion. Negligible EMI: PILine® dri- Excellent Power-to-Weight ves do not create magnetic Ratio: PILine® drives are opti- fields nor are they influenced mized for high performance by them, a decisive advanta- in a minimum package. No ge in many applications. comparable drive can offer Custom Solutions / Flexibili- the same combination of ty for OEMs: PILine® drives acceleration, speed and pre- are available in open-loop cision. and closed-loop translation Safe: The minimum inertia of stages and as OEM compo- the moving platform toget- nents. PI develops and ma- her with the “slip clutch” nufactures all piezo ceramic effect of the friction drive components in-house. This Settling behavior of a PILine® M-663 linear stage, 100 µm step. A stable position to within 0.1 µm can be reached in only 10 ms. provide better protection of gives us the flexibility to pro- precision fixtures / devices vide custom motors (size, than leadscrew-driven sta- force, environmental condi- ges. Despite the high speeds tions) for OEM and research and accelerations, there is a applications. much lower risk of pinching Quality, Lifetime, Experien- fingers or other injuries than ce: Based on PI’s 30+ years of with conventional drives. experience with piezo nano- This means users may not positioning technology, need interlocks, light cur- PILine® drives offer exceptio- tains or other measures to nal precision and reliability keep them safe. with an MTBF of >20,000 Self-Locking Feature: PILine® hours. Rotating components drives create a braking force such as gears, shafts and when not energized without moving cables that are prone the position shift common to failure in conventional with conventional mechani- motion systems, are not part cal brakes. Other benefits of of the PILine® design. the self-locking are the elimi- Principle .design of a PILine® ultrasonic piezomotor-driven translation stage. nation of servo dither and g-4 Piezo • Nano • Positioning

Micropositioning,Nanopositioning,NanoAutomation Cutting-Edge Solutions for Industry and Research

PI headquarters. PI employs the world's most experienced R&D and production teams for nanopositioningPI headquarters systems

Positioning Technology - Key Technologies Under One Applications 30 Years Ahead of its Time Roof: A Plus for Our PI has been a world market lea- Customers Today PI delivers Micro- & NanoPositioning solutions der in nanopositioning techno- PI has a strategy of vertical for all important high-tech logy and ultra-high-precision integration with all key techno- markets: motion-control systems for logies developed and maintai- many years. The first nanopo- ned in one company. This per- Semiconductors sitioning systems served re- mits direct control over every Data Storage search centers working in step from conception to ship- interferometry and laser tech- ment, optimizing quality and Photonics, Fiber Optics, nology. Today, entire branches cost. As a customer, you, too, Telecom of industry – such as the semi- can profit from our over 30 Life Sciences conductor industry, biotechno- years experience in micro- and Lasers, Optics, Microscopy logy and, increasingly, the nanopositioning. machine-tool industry – are de- PI can react quickly to devel- Aerospace Engineering pendent on progress in nano- opment and production needs Precision Machining positioning. of OEM customers – even for highly complex custom pro- Astronomy ducts and assemblies.

g-5 Piezo • Nano • Positioning

Program Overview Headquarters Piezo Ceramic Actuators & Motors Piezo Nanopositioning Systems and Scanners GERMANY Active Optics / Tip-Tilt Platforms Physik Instrumente (PI) PI Ceramic GmbH Lindenstr. Capacitive Nanometrology Sensors GmbH & Co. KG Auf der Römerstr. 1 D-07589 Lederhose Piezo Electronics: Amplifiers and Controllers D-76228 Karlsruhe/Palmbach Tel: +49 (36604) 882-0 Hexapod 6-Axis Positioners / Robots Tel: +49 (721) 4846-0 Fax: +49 (36604) 882-25 Micropositioning Stages & Actuators Fax: +49 (721) 4846-100 [email protected] Photonics Alignment Systems, Solutions for [email protected] · www.pi.ws www.piceramic.de Telecommunications Motor Controllers Subsidiaries Ultrasonic Linear Motors USA (East) & CANADA USA (West) & MEXICO PI (Physik Instrumente) L.P. PI (Physik Instrumente) L.P. 16 Albert St. 5420 Trabuco Rd., Suite 100 Auburn, MA 01501 Irvine, CA 92620 Request or downlowd the complete Tel: +1 (508) 832 3456 Tel: +1 (949) 679 9191 PI Nanopositioning & Piezo Actuator Fax: +1 (508) 832 0506 Fax: +1 (949) 679 9292

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FRANCE ITALY PI France S.A.S. Physik Instrumente (PI) S.r.l. 32 rue Delizy Via G. Marconi, 28 F-93694 Pantin Cedex I-20091 Bresso (MI) .0. 0 Subject to change without notice © Physik Instrumente (PI) GmbH & Co. KG 1998–200 8 Tel: +33 (1) 481 039 30 Tel: +39 (02) 665 011 01 Fax: +33 (1) 481 008 03 Fax: +39 (02) 665 014 56 [email protected] [email protected] www.pi-france.fr www.pionline.it The following designations are protected company names or registered trademarks of third parties: Microsoft, Windows, Excel, PDF L in Act/ 0 8 /0 3