Deuterium Lamps (D2 Lamps)

DEUTERIUM LAMPS (D2 LAMPS) Hamamatsu deuterium lamps key features and the reasons D2 Long lifetime 1 UV-transmitting glass £ Problems with prior lamps using quartz glass £We solved these problems LAMPS Premature deterioration in transmittance by using UV-transmitting cause by UV light glass superior to quartz glass!! FOR HIGH PERFORMANCE Quality variations due to production DEVICES process and material inclusions High resistance to UV light Troublesome ozone generation

Life characteristics High quality TLS B0021EA Hamamatsu deuterium lamps (D2 lamps) 120 with less variations deliver a long lifetime, excellent stability, and 110 100 high output to the highest levels to allow 90 No ozone generation users to obtain the maximum performance 80 70 characteristics from their equipment. 60 50 40

30 SYNTHETIC SILICA σ RELATIVE IRRADIANCE (%) RELATIVE SYNTHETIC SILICA ±3 20 UV GLASS 10 UV GLASS ±3 σ 0 1 0101001000 10000 TIME (h) High stability

Light output stability Maintains high stability until product lifetime end Stability at initial operation Stability after 2000 hours of operation 2 20 20 3 15 15 10 10 5 5 A.U.) A.U.) -5 0 -5 0 -5 -5

ABS (10 -10 ABS (10 -10 -15 -15 -20 -20 0 100 200 300 400 500 600 700 800 0 100 200 300 400 500 600 700 800 TIME (s) TIME (s) TLSOB0095EA TLSOB0096EA

2 Ceramic electrode

£Problems with prior lamps using £We solved these problems by (Metal electrode) using ceramic electrodes with excellent temperature Low stability due to being susceptible to characteristics!! ambient conditions Excellent temperature Large variation in light output because characteristics electrode spacing is not uniform ensure high stability Uniform electrode spacing minimizes variations in characteristics

3 Cathode (Super quiet type)

£Problems with conventional directly-heated type £We solved these problems of 4 the directly-heated type by Concentrated radiated heat damage using a super quiet cathode!! applies a large load to the cathode Electron emission Vibration and operating time directly capability with minimal affect cathode deterioration fluctuations Construction (L2D2) CERAMIC ELECTRODE (REAR PIECE) ANODE Lighting performance APERTURE CERAMIC 4 Capacitor ELECTRODE (CENTER PIECE) £Problems with D2 lamp without auxiliary ignition £We solved these problems with

CATHODE the conventional lighting Fails to light up due to electrode deterioration method by using auxiliary during long-term operation lighting method!! Fails to light up due to decrease of internal Secured lighting even gas during long-term operation if the lamp is hot or BULB at the end of lifetime Fails to light up when the lamp is hot and LIGHT OUTPUT TLSOC0030EB in case of re-igniting right after turning off 1 Deuterium lamps are light source lamps that utilize an arc discharge in deuterium (D2) gas. They emit an intense spectrum in the UV region and have feature of unrivaled stability compared to other UV light sources. PRODUCT LINE-UP / APPLICATION LIST

33 W 30 W 5 W to 7 W 110 W X2D2® L2D2® S2D2® H2D2® LAMPS LAMPS LAMPS LAMPS High brightness deuterium lamps Long lifetime deuterium lamps Compact deuterium lamps Ultra-high luminance deuterium lamps High-end light sources that offer Best-selling light sources that deliver Compact yet high-performance Next-generation light sources that the world’s highest luminance the high quality and high performance light sources that were impossible have achieved the highest among the 30 W class * (twice that required by chemical analysis to create up till now with luminance in the history of of L2D2 lamps) instruments while keeping costs low conventional deuterium lamps deuterium lamps P3 P5 P11 P14 *As of Feb. 2016 according to our research *As of Feb. 2016 according to our research

Window material Applications UV glass Synthetic silica MgF2 HPLC (High Performance Liquid Chromatography) UV-VIS Spectrophotometer CE (Capillary Electrophoresis) Atomic Absorption Spectrophotometer Thin Layer Chromatography Water Quality, Air Pollution and Other Environmental Analyzer Film Thickness Gauge Semiconductor Testing Equipment UV Resistance Evaluation of Materials Photoionization Light Source Static Electricity Removal by Vacuum UV Light

: Optimum : Usable according to application : Not generally suitable Peripheral devices that support high performance Total support for extracting maximum lamp performance After-sales To enable lamps to exhibit their maximum performance, it is service important to design an based on long years optimum housing and of experience power supply. We do not only sell deuterium lamps but also provide power supplies Custom products and housings specifically tailored to meet designed for deuterium user needs lamps. Besides selling our own products, we provide technical support to help users design their Advice own lamp housings and power for improving supplies. We are also glad to offer performance advice on optimal electrical ratings characteristics and lamp shapes that meet user Design specifications. Power supplies Please consult with us for support and housings specifications that are not listed in specifically designed our product catalog. for lamps

2 X2D2® LAMPS The X2D2® lamps (high brightness & long lifetime deuterium lamps) deliver unparalleled brightness twice that of L2D2 lamps (see page 5) while still maintaining the high stability and long lifetime offered by the conventional deuterium lamps. These characteristics will enhance sensitivity and throughput in various photometric instruments.

Features Characteristics

●Long life: 2000 h ●Spectral distribution TLSOB0024EF TLSOB0079EC ●High stability: 0.005 %(p-p) typ. 1 100 ●High brightness: 2 times higher than L2D2 lamps

SYNTHETIC SILICA ■Arc distribution (L9519, L10904) at 50 cm) 0.1 -1 ●X2D2 lamp Aperture size: 0.5 mm 60 ·nm MgF2 (L9841) -2

UV GLASS (L9518, L10804) 40

0.01 RELATIVE IRRADIANCE (%) RELATIVE

20 IRRADIANCE (µW·cm

0.001 0 160 200 240 280 320 360 400 100 120 140 160 180 200 220 240 400

WAVELENGTH (nm) WAVELENGTH (nm)

●Directivity (Light distribution)

1UV glass 2Synthetic silica 3MgF2 2 times L9518, L10804 L9519, L10904 L9841 30° 30° 30° higher than 20° 20° 20°

conventional type 10° 10° 10° ● 0° 0° 0° L2D2 lamp Aperture size: 0.5 mm -10° -10° -10°

-20° -20° -20° -30° -30° -30°

30° 30° 30° 20° 20° 20°

10° 10° 10°

0° 0° 0°

-10° -10° -10°

-20° -20° -20°

-30° -30° -30°

TLSOB0111EA TLSOB0112EA TLSOB0113EA

3 Dimensional outline (Unit: mm)

L9518, L10804 L9519, L10904 50 50 -0.05 Tolerance of emitting point (center) -0.05 Tolerance of emitting point (center) 35 -0.1 35 -0.1 A A With respect to axial line A: ±0.1 With respect to axial line A: ±0.1 30 ± 1 With respect to plane B: ±0.1 30 ± 1 With respect to plane B: ±0.1 ARC POINT ARC POINT +0.15 +0.15 3 +0.05 3 +0.05 ARC POINT ARC POINT 15 50 50 +0 -0.1 +0 -0.1 10 10 59 MAX. 59 MAX. 32 B 32 B 22 22 5 5 2 × 3.3 2 × 3.3

AUXILIARY AUXILIARY 14 ± 1 IGNITION 22±0.05 22±0.05 IGNITION 9 MAX. 9 MAX. DEVICE DEVICE 22±0.05 22±0.05

LIGHT OUTPUT LIGHT OUTPUT 160 ± 10 CONNECTOR (MOLEX) CONNECTOR (MOLEX) 160 ± 10 CONNECTION HOUSING: 39-01-2040 HOUSING: 39-01-2040 CONNECTION #1: AUXILIARY ELECTRODE #1: AUXILIARY ELECTRODE (70) CONTACT: 39-00-0428 (70) CONTACT: 39-00-0428 #2: ANODE #2: ANODE #3: FILAMENT #3: FILAMENT #4: FILAMENT (GND) TLSOA0105EE #4: FILAMENT (GND) TLSOA0106EE

L9841 50 Tolerance of emitting point (center) -0.05 35 -0.1 With respect to axial line A: ±0.1 A With respect to plane B: ±0.1 Example of optical system layout for visible light 30 ± 1 +0.15 (X2D2 lamp) ARC POINT 3 +0.05 ARC POINT The see-through structure allows easy use in combination with a visible light source. 15 +0 -0.1 50 22 10 59 MAX. B 32 2 × 3.3 TOP VIEW 5 ANGLE OF INCIDENCE 19°

AUXILIARY 25 ± 1 IGNITION LIGHT

9 MAX. 22±0.05 22±0.05 DEVICE OUTPUT HALOGEN LENS LIGHT OUTPUT LAMP (VISIBLE LIGHT) CONNECTOR (MOLEX) 160 ± 10 HOUSING: 39-01-2040 CONNECTION L10804, L10904 #1: AUXILIARY ELECTRODE CONTACT: 39-00-0428 (70) #2: ANODE TLSOC0053ED #3: FILAMENT #4: FILAMENT (GND) TLSOA0107EE

Specifications

Type No. L9518 L10804 L9519 L10904 L9841 Unit Type Standard See-through Standard See-through Standard — Window material UVglass Synthetic silica MgF2 — Spectral distribution 185 to 400 160 to 400 115 to 400 E nm Aperture diameter 0.5 mm Output stability Drift (Max.) ±0.3 %/h at 230 nm Fluctuation (p-p) Typ. 0.005 % A Guaranteed life at 230 nm 2000 h B Discharge starting voltage (Max.) 400 V dc Anode current 300 ± 30 mA dc Tube voltage (Typ.) 90 85 V dc Voltage 2.5 ± 0.25 V dc Warm-up Current (Typ.) 4 A dc Filament ratings Voltage 1.7 ± 0.2 V dc Operating Current (Typ.) 3.3 A dc Filament warm-up time (Min.) 20 s C Power supply C9559, M9521 — D Bulb wall temperature 245 to 290 °C ALamp life end is deﬁned as the point when light output at 230 nm falls to 50 % of its initial value or when output ﬂuctuations exceed 0.05 % (p-p). BA trigger voltage must be applied to the anode and auxiliary electrode. CThe power supply for the L2D2 cannot be used to operate X2D2 lamps. DRecommended temperature for operating a lamp in the lamp housing. Consult us on how to measure the temperature. EDoes not support vacuum evacuation and so should be used in nitrogen atmosphere. * Custom lamps not listed above will be available on request. Please feel free to contact us.

4 L2D2® LAMPS

The L2D2® lamps are UV light sources with a long service lifetime and high stability. These L2D2 lamps have characteristics essential for light sources used in chemical analysis instruments and provide high measurement accuracy.

Example of custom-designed lamp

Cathode Aperture diameter type Cathode ratings ( 0.5, 1.0) Preheating Operating 1 2.5 V 1.0 V 2 2.5 V 1.7 V Features 3 3.0 V 0 V – 1 V Light-emitting point 4 10 V 2.5 V – 6 V 5 10 V 7 V ●Long life: 4000 h (L6565) 6 12 V – 15 V 0 V ● Flange High stability: 0.005 %(p-p) typ. shape ●Small intensity variations Capacitor position Lead length ●Low cost ●Error-free lighting Connector

Please consult us about custom designed lamp.

Specifications

A B Output stability at 230 nm Required Dimen- Guaranteed discharge Anode Tube Window Spectral Aperture Fluctuation starting Type No. Type sional Drift life material distribution diameter (p-p) voltage C current voltage outline at 230 nm Max. Typ.Max. Typ. (nm) (mm) (%/ h)(%) (h) (V dc) (mA dc) (V dc) L6565 q 1.0 4000 350 L6301 L6301-50 i L6303 q UV glass 185 to 400 L12313 e L12313-50 u 0.5 ±0.3 0.005 2000 400 L6307 Standard w L6309 300 ± 30 80 L7296 r Synthetic 160 to 400 L7296-50 y silica L12307 w UV glass 185 to 400

L7293 t D MgF2 115 to 400 1.0 — — 2000 350 L7293-50 o L6999 q UV glass 185 to 400 L6999-50 i See-through 0.5 ±0.3 0.005 2000 400 L9030 r Synthetic 160 to 400 L9030-50 y silica ASee pages 7 and 8. BLamp life end is deﬁned as the point when light output at 230 nm falls to 50 % of its initial value or when output ﬂuctuations exceed 0.05 % (p-p). CA pulse voltage higher than this value must be supplied to start reliable lamp discharge. DOperating life may vary depending on operating environmental conditions (vacuum atmosphere).

5 Characteristics

●Spectral distribution Deuterium lamps emit high intensity light in the UV range at wavelengths shorter than 400 nm. Light intensity on the short wavelength side is determined by the window material used. ■UV glass, Synthetic silica ■MgF2 TLSOB0024EF TLSOB0079EC 1.0 100

SYNTHETIC SILICA (PROJECTING TYPE, 1 mm THICK) 80 MgF2 at 50 cm) -1 0.1

·nm 60 -2

UV GLASS 40 0.01

RELATIVE IRRADIANCE (%) RELATIVE 20 IRRADIANCE (µW·cm

0.001 0 160 200 240 280 320 360 400 100 120 140 160 180 200 220 240 400 WAVELENGTH (nm) WAVELENGTH (nm) ●Arc distribution ●Directivity (Light distribution)

Arc distribution of deuterium lamps is determined by the aperture 1UV glass 2Synthetic silica 3MgF2 (light exit) size. At the same input current and voltage, lamps with a 30° 30° 30° 0.5 mm aperture provide 1.4 times higher intensity than lamps with a 20° 20° 20°

1.0 mm diameter aperture. 10° 10° 10°

0° 0° 0°

-10° -10° -10°

-20° -20° -20°

-30° -30° -30°

30° 30° 30° 20° 20° 20°

10° 10° 10°

0° 0° 0°

APERTURE: 0.5 mm APERTURE: 1.0 mm -10° -10° -10° -20° -20° -20° -30° -30° -30° TLSOB0021EC TLSOB0020EC TLSOB0077EC

H Filament ratings Applicable power supply Filament Warm-up Operating Bulb wall E warm-up time Voltage Current Voltage Current temperature Type No. AC input type DC input time I Typ. Typ. Min. (Recommended) (V dc, ac) (A dc, ac) (V dc) (A dc) (s) L6565 1.0 ± 0.1 1.8 C9598-2510 M9596-2510 L6301 2.5 ± 0.25 4 L6301-50 1.7 ± 0.2 3.3 C9598-2517 M9596-2517 L6303 L12313 3 5 0 to 1 0 to 1.8 C9598-3000 M9596-3000 L12313-50 0.8 2.5 to 6.0 F 0.3 to 0.6 C9598-1035 M9596-1035 L6307 L6309 10 ± 1 20 245 to 290 1.2 7.0 ± 0.5 1 C9598-1070 M9596-1070 L7296 L7296-50 12 to 15 0.5 to 0.55 0 G 0 G C9598-1555 M9596-1555 L12307 L7293 L7293-50 L6999 2.5 ± 0.25 4 1.0 ± 0.1 1.8 C9598-2510 M9596-2510 L6999-50 L9030 L9030-50 EIf the cable between the lamp and power supply is too long, a large filament voltage drop occurs in the cable that might make the lamp filament voltage too low. The filament power supply should be designed to supply the specified voltage at the lamp input terminal. FRecommended operating voltage is 3.5 V ± 0.5 V. GDuring lamp operation a discharge current flows into the filament so no external power supply is needed to maintain the filament temperature. HTo extract full performance from our deuterium lamps we recommend using our dedicated power supplies. IRecommended temperature for operating a lamp in the lamp housing. Consult us on how to measure the temperature. * Custom lamps not listed above will be available on request. Please feel free to contact us. 6 Dimensional outline (Unit: mm)

See-through type q L6301, L6565, L6303, L6999 w L6307, L6309 , L12307 e L12313

± 28 ± 1 30 1 30 ± 1 7 MAX. 7 MAX. 7 MAX. 2 2 2 ± ± ± 2 2 2 68 68 ± 60 ± ± 42 42 42

ARC POINT ARC POINT ARC POINT 10 10 10 ± ± ± 160 160 160

CONNECTION CONNECTION CONNECTION L6303 FILAMENT : BLUE FILAMENT : BLUE 20 20 20 FILAMENT : BLUE . FILAMENT.GND: BLUE 7 FILAMENT GND : BLACK 7 FILAMENT · GND : BLACK 7 ANODE : RED ANODE : RED 6 ANODE : RED 6 6 L6301, L6565, L6999 FILAMENT : BLUE FILAMENT : BLUE ANODE : RED TLSOA0040ED TLSOA0018EF TLSOA0039EF

See-through type See-through type r L7296, L9030 t L7293 y L7296-50, L9030-50

50 ± 1 -0.05 30 ± 1 35.0 -0.1 A 50 ± 1 14 ± 1 30 ± 1 8 7 30 ± 1 22.0 ± 0.1 22.0 ± 0.1 ARC 7 MAX. 7 MAX. 7 MAX. POINT

2 × 3.3 15 15

ARC +0 -0.1 68 ± 2 68 ± 2 POINT 68 ± 2 22.0 42 42 ± 2 42 ± 2 ARC B 15 15

O-RING 5 ARC POINT POINT +0.15 FIXED 3 +0.05 14 ± 1 RANGE 15 ± 0.5

160 ± 10 LIGHT OUTPUT 160 ± 10 160 ± 10 20

CONNECTION CONNECTION CONNECTION 7 L7296 L7293 L7296-50 6 20

FILAMENT : BLUE 20 FILAMENT : BLUE 7 FILAMENT : BLUE . 7 FILAMENT GND : BLACK FILAMENT : BLUE FILAMENT·GND : BLACK Tolerance of emitting point (center) ANODE : RED 6 6 ANODE : RED With respect to axial line A: ±0.1 ANODE : RED With respect to plane B: ±0.1 L9030 L9030-50 FILAMENT : BLUE FILAMENT : BLUE FILAMENT : BLUE FILAMENT : BLUE ANODE : RED ANODE : RED TLSOA0017EG TLSOA0011EF TLSOA0075EE

7 See-through type u L12313 -50 i L6301-50, L6999-50 o L7293-50

-0.05 35.0 -0.1 A -0.05 -0.05 35.0 -0.1 35 -0.1 A 50 ± 1 A 50 ± 1 28 ± 1 30 ± 1

30 ± 1 7 MAX. 22.0 ± 0.1 22.0 ± 0.1 ARC ARC ARC 22 ± 0.1 22 ± 0.1 7 MAX. 7 MAX. POINT POINT POINT 50 ± 1 2 × 3.3 22.0 ± 0.1 22.0 ± 0.1 2 × 3.3 ARC +0 -0.1

37 ARC

60 ± 2 POINT +0 -0.1 7 68 ± 2

B 37 POINT 68 ± 2 22 22.0

B 2 × 3.3 42 15 5 +0.15 O-RING 15

B 8 3 +0.05 5 FIXED 15 +0 -0.1 5 RANGE +0.15 ARC 3 +0.05 50 ± 1

22.0 15 ± 0.5 POINT

LIGHT OUTPUT +0.15 3 +0.05 15 160 ± 10 160 ± 10 160 ± 10 LIGHT OUTPUT LIGHT OUTPUT

CONNECTION CONNECTION CONNECTION FILAMENT: BLUE FILAMENT: BLUE FILAMENT: BLUE 20 20 FILAMENT: BLUE 20 7 FILAMENT: BLUE 7 FILAMENT: BLUE 7 ANODE : RED ANODE : RED ANODE : RED 6 6 6

Tolerance of emitting point (center) Tolerance of emitting point (center) Tolerance of emitting point (center) With respect to axial line A: ±0.1 With respect to axial line A: ±0.1 With respect to axial line A: ±0.1 With respect to plane B: ±0.1 With respect to plane B: ±0.1 With respect to plane B: ±0.1

TLSOA0050EA TLSOA0051ED TLSOA0088EC

Mounting example on the vacuum system See-through type (L7293, L7293-50) The see-through type electrode structure enables straight-line arrange- 1 ment of the halogen lamp, deuterium lamp, optical system and optical path. This simplifies optical design of UV-VIS spectrophotometer etc., 2 and eliminates loss of light amount caused by the half mirror.

4 An example for optics of See-through type TOP VIEW

40° A ARC POINT LIGHT B SCREW PORTION OUTPUT

C HALOGEN LENS LAMP 1VACUUM FLANGE 2 TIGHTENING SCREW SEE-THROUGH 3 O-RING JIS B2401 L2D2 LAMP CALL No. V15 TLSOC0011EF 4SPACER AMgF2 WINDOW BGRADED SEAL ▼ CO-RING FIXED RANGE Type No. TLSO 0053EA L6999, L6999-50, L9030, L9030-50

8 ® ® X2D2 L2D2 ® LAMPS LAMPS Power supply for X2D2 lamps / Lamp housing POWER SUPPLY FOR D2 LAMPS LAMP HOUSE

Applications using deuterium lamps require very high stability ▲Power supply Left: C9559, Right: M9521 ▲Lamp housing Left: E9522-50, Right: E9558-50 of light output, so using a Hamamatsu dedicated power supply and lamp house is recommended to operate these lamps. Power supply for L2D2® lamps / Lamp housing When users are designing their own power supply and lamp housing, we provide technical support and follow-up to ensure an optimal optical design so please consult us when needed.

E9522-50: for L9518 E9558-50: for L9519 E9522: for L6301-50 E9558: for L7296-50 * We welcome requests for custom products for see-through types (L10804, L6999-50, L6999-50 and L9030-50). ▲Power supply Left: C9598, Right: M9596 ▲Lamp housing Left: E9522, Right: E9558

Dimensional outline (Unit: mm) ●C9559 ●E9522-50 * P.C.D. (Pitch Circle Diameter) +0.1 2.8 -0 WEDGE PRESSURE PIN 60 ARC POINT 19.2 3 × M4 DEPTH 5 LAMP FLANGE MOUNTING SURFACE TOP VIEW (P.C.D.* 40) 79 5.8 3-120° 32 22 2 × M3 DEPTH 5

C9559 140 50 35.2

3-120° 22 ± 0.05 22 ± 0.05 R25 35 18 3 × M3 (P.C.D.* 24) 34 ARC POINT 110 280 ARC POINT +0.2 32.2 -0 OPTICAL SYSTEM MOUNTING SURFACE FRONT VIEWSIDE VIEW REAR VIEW TLSOA0114EA ●Supplied lamp output cable ●E9558-50 +0.1 3000 ± 50 2.8 -0 WEDGE PRESSURE PIN 60 TLSOA0112EA ● OPTICAL SYSTEM M9521 MOUNTING SURFACE 32 LAMP FLANGE MOUNTING SURFACE 4.2 3 × M4 DEPTH 5 79 (P.C.D.* 40) 29 ± 1 22 2 × M3 DEPTH 5 ARC POINT 0°

100 110 R25 3-12 50

160 35 MAX. 5 MAX. 35.2 170 22 ± 0.05 22 ± 0.05 32 5 34 ARC POINT FRONT VIEW SIDE VIEW 3-120° 3 × M3 (P.C.D.* 24) TLSOA0113EA TLSOA0115EA Power supply for X2D2 lamp specifications

Parameter C9559 M9521 Unit AC 100 V to AC 240 V Input voltage (100 V/200 V Auto switching) DC 24 V ± 2.4 V — Input Single phase 50 Hz / 60 Hz Input current (Max.) 1.4 3 A Output With load (Typ.) 85 / 90 V dc voltage (DC) Without load (Min.) 200 V dc Output current (DC) 300 ± 30 mA dc Current ﬂuctuation (p-p) (Typ.) 0.005 % Current drift at 25 °C (Typ.) ±0.02 %/h Output Voltage 2.5 ± 0.2 V dc Warm-up Filament Current (Typ.) 4 A dc ratings Voltage 1.7 ± 0.2 V dc Operation Current (Typ.) 3.3 A dc Filament warm-up time Approx. 20 s Trigger Anode 600 V peak voltage Auxiliary electrode 600 V peak Cooling method — Forced air cooling (0.3 m3/min) — Operation ambient temperature 0 to +40 °C Storage temperature -10 to +60 °C Operating and storage humidity Below 80 (No condensation) % External control (Lamp ON/OFF, Lamp irradiation signal) Yes Yes — Conformance CE Yes Yes — 9 standards UL (File No. E249677) — Yes — Dimensional outline (Unit: mm) The power supply for the L2D2 cannot be used to operate X2D2 lamps. * P.C.D. (Pitch Circle Diameter)

●C9598 ●E9522 ARC POINT

+0.1

60 2.8 -0 WEDGE PRESSURE PIN

19.2 LAMP FLANGE 3 × M4 DEPTH 5 MOUNTING SURFACE TOP VIEW (P.C.D.* 40) 84 5.8 3-120° 37 22 ± 0.05 2 × M3 DEPTH 5 90 50

-120° 35.2

3 22 ± 0.05 22 ± 0.05 117 200 R25 35 18 3 × M3 (P.C.D.* 24) 32 ARC POINT ARC POINT +0.2 FRONT VIEWSIDE VIEW REAR VIEW 32.2 -0 OPTICAL SYSTEM MOUNTING SURFACE ●Supplied lamp output cable TLSOA0118EA ●E9558 1800 ± 50 +0.1 TLSOA0116EA -0 60 2.8 WEDGE PRESSURE PIN

● OPTICAL SYSTEM LAMP FLANGE M9596 MOUNTING SURFACE 32 MOUNTING SURFACE 4.2 3 × M4 DEPTH 5 84 29 ± 1 2 × M3 DEPTH 5 (P.C.D.* 40) 22 ARC POINT R25 3-120° 100 86.4 50 35.2

102 30 MAX. 5 MAX. 22 ± 0.05 22 ± 0.05 118 3-120° 3 × M3 (P.C.D.* 24) 37 5 34 ARC POINT FRONT VIEW SIDE VIEW TLSOA0117EA TLSOA0119EA Power supply for L2D2 lamp specifications

Parameter C9598 M9596 Unit AC 100 V to AC 240 V Input voltage (100 V/200 V Auto switching) DC 24 V ± 2.4 V — Input Single phase 50 Hz / 60 Hz Input current (Max.) 0.9 2 A With load (Typ.) 80 V Output voltage (DC) Without load (Min.) 200 V Output current (DC) 300 ± 30 mA Output Current Fluctuation (p-p) (Typ.) 0.005 % Current drift at +25 °C (Typ.) ±0.02 %/h Warm-up time Approx. 20 s Trigger voltage Approx. 600 V peak Cooling method — Forced air cooling (0.3 m3/min) — Operation ambient temperature 0 to +40 °C Storage temperature -10 to +60 °C Operating and storage humidity Below 80 (No condensation) % External control (Lamp ON/OFF, Lamp irradiation signal) Yes Yes — Conformance EN (CE marking) Yes Yes — standards UL (File No. E249677) — Yes —

Filament ratings

Warm-up Operation Type No. Voltage Current Voltage Current Applicable lamp (V dc) (A dc)(Typ.) (V dc) (A dc)(Typ.) L6565, L7293, L6999, L6999-50, L7293-50 C9598/M9596-2510 2.5 ± 0.2 4 1.0 ± 0.1 1.8 L6301, L6301-50, L9030, L9030-50 C9598/M9596-2517 2.5 ± 0.2 4 1.7 ± 0.2 3.3 L6303 C9598/M9596-3000 3 ± 0.2 5 0 0 L12313 C9598/M9596-1035 10 ± 0.5 0.8 3.5 ± 0.2 0.3 L6307 C9598/M9596-1070 10 ± 0.5 1.2 7 ± 0.4 1 L7296, L6309, L7296-50 C9598/M9596-1555 13.5 ± 0.7 0.5 5.25 ± 0.25 0.3 L12307

10 S2D2® LAMPS The S2D2® lamps are compact deuterium lamps with a drastically reduced size compared to ordinary deuterium lamps. Despite their compact body, the S2D2 lamps have the same high stability as conventional deuterium lamps and a unique electrode structure that delivers high brightness.

▲Left: L13301 Right: L10671D

Features Characteristics ●Long life: 1500 h (L10671D) ●Spectral distribution ●Directivity (Light distribution) TLSOB0109EB 0.010 ●Compact L10671D L13301 0.009 30° 30° ●High stability: 0.005 %(p-p) typ. 0.008 20° 20° ) at 50 cm 0.007 -1 ●High output UV continuous 10° 10°

·nm 0.006 spectrum -2 L10671D 0° 0° 0.005 -10° -10° ●Low power consumption 0.004 -20° -20° 0.003 ●Easy to use -30° -30° 0.002 L10671P 0.001 IRRADIANCE (µW·cm L10671D 30° 30° L10671H 0.000 200 220 240 260 280 300 320 340 360 380 400 20° 20° WAVELENGTH (nm) TLSOB0079JB 100 10° 10° 0° 0° -10° 80 -10° MgF2 (L13301) -20° -20° -30° 60 -30° TLSOB0114EA DETECTOR TLS B0005EA

PRINT CIRCUIT BOARD

RELATIVE IRRADIANCE (%) RELATIVE 20

TLS C0005EA

0 100 120 140 160 180 200 220 240 400 WAVELENGTH (nm)

Specifications

Parameter Description / Value Unit Type No. L10671D L13301 — Window material UV glass MgF2 — Spectral distribution 185 to 400 115 to 400 nm Aperture diameter 1.0 mm Output stability Drift (Max.) ±0.25 %/h at 230 nm Fluctuation (p-p) (Typ.) 0.005 % Guaranteed life at 230 nm A 1500 1000 D h Output current 30 50 mA Output voltage (Typ.) Approx. 135 V Voltage 4.2 V Warm-up Current (Typ.) 0.55 A dc Filament ratings Voltage 3.5 V Operating Current (Typ.) 0.5 A dc Filament warm-up time (Min.) Approx. 25 s Bulb wall temperature B (Max.) 185 240 °C Storage temperature -10 to +60 °C Storage humidity Below 85 % (No condensation) — ALamp life end is deﬁned as the point when light output at 230 nm falls to 50 % of its initial value or when output ﬂuctuations exceed 0.05 % (p-p). 11 B Position “a” in dimensional outline COperating life may vary depending on operating environmental conditions (vacuum atmosphere). Dimensional outline (Unit: mm)

* PCD (Pitch Circle Diameter) ●L10671D ●L13301 O-RING FIXED RANGE TEMPERATURE MEASUREMENT TEMPERATURE P.C.D.* 10.72 ± 0.2 15.0 ± 0.5 P.C.D.* 10.72 ± 0.2 TEMPERATURE TEMPERATURE POINT a MEASUREMENT POINT a A 58 MAX. A MEASUREMENT MEASUREMENT 20.5 MAX. 8 MAX. 18° 18° POINT a 10° POINT a 205 15.5 ± 2.0 8 MAX. 10° 9 × 0.7 9 × 0.7

8 ° 8 7 7 6°

36° 36 3 9 36° B 9 B 6 6 5 ● 15 5 CONNECTION

20.5 ° ● 4 1 CONNECTION 4 1 1: FILAMENT

22 MAX. 36° 36°

36° 36 2 3 2 3 1: FILAMENT 3 (7): ANODE 3 (7): ANODE ARC POINT 5: AUXILIARY ARC POINT 7.5 6 9 × 0.7 18° 10° 5: AUXILIARY 7.5 6 9 × 0.7 18° 10° ELECTRODE ELECTRODE EMISSION POINT POSITION TOLERANCE (CENTER) 9: GND EMISSION POINT POSITION TOLERANCE (CENTER) 9: GND · With Respect To Axis Line A: ±0.3 mm 2, 4, 6, 8: N.C. · With Respect To Axis Line A: ±0.3 mm 2, 4, 6, 8: N.C. · With Respect To Axis Line B: ±0.3 mm · With Respect To Axis Line B: ±0.3 mm TLSOA0109EA TLSOA0016EA RELATED PRODUCTS

Power supply

3 × 3 ●L10671P (for L10671) CN9: CONNECTOR FOR 12 V CN1: JACK FOR DC INPUT VOLTAGE (MOUNTING HOLE) CN4: CONNECTOR 1: + 3 3 FOR 5 V OUTPUT 2: – (Usage example: Tungsten Lamp) Parameter Description / Value Unit 1: + 2: – CN2: EXTERNAL CONTROL 3

Input voltage (DC) 12 * V CONNECTOR 27 CN5: CONNECTOR Power consumption Max. 10 VA FOR 5 V OUTPUT 65 (Usage example: Shutter Solenoid) S2D2 lamp ON /OFF — 1: + 2: N.C. CN4 output ON/OFF — 20 3: – CN5 output ON/OFF A — 8 17 30 3 55 CN3: CONNECTOR External control Status signal TOP VIEWFOR S2D2 LAMP TOP VIEW OUTPUT (Bottom Board Only) 1: GND S2D2 lamp — 18 MAX. 2: FILAMENT CN4 3: N.C. 4: AUXILIARY BOARD = 1.2 mm Main power ELECTRODE ( ) 32.5 MAX. 5: ANODE A Each time a signal for external control is input across SIDE VIEW

terminals 3 and 10, voltages +5 V and -5 V are alternately 2.5 MAX. 9.2 TLS A0005EA output at 200 ms intervals. * Input voltage range is from 8.5 V dc to 13.2 V dc. 1000 ± 100 112.5 ●C10707 (for L13301) Parameter Description / Value Unit Input voltage (DC) * 10.8 to 13.2 V OUTPUT CABLE DC JACK MAIN POWER LED Power consumption Max. 17 VA EXTERNAL CONTROL Lamp ON /OFF 70 CONNECTOR External control — Lamp status signal

* This power supply come with AC/DC adapter. 42.5

Lamp housing Socket with cable E13807 (for L13301) ● * PCD (Pitch Circle Diameter) L10671H (for L10671D) P.C.D.* 10.72 ± 0.2 3 80 ± 10 Parameter Description / Value Unit 2 × 3.3 Weight 320 g Optimum operating temperature B +40 to +80 °C BAt position “b” in the L10671H dimensional outline. (When this lamp housing is installed in equipment, thermal design specs must be consid- 17.5 ▼CONNECTION ered to ensure the operating temperature will be within this range.) SOCKET 1: ANODE 130 23 6 TEMPERATURE 2: AUXILIARY ELECTRODE 8 MAX. MEASUREMENT POINT b 2 × M2.6 3: FILAMENT 4: GND

TOP VIEW SCREWS FOR LAMP CHANGE 26 19 37.5 12 2.5 7.5 56 CONNECTOR FOR CONNECTION TO L10671P (CN3) LIGHT OUTPUT 29 9.2 14

ARC POINT ARC 28 5 POINT FRONT VIEW 6 SIDE VIEW M11 × 0.5 (DEPTH 3.75) * 2 × 2.7 * 10 mm dia. lens can be placed. FOR M2.6 FLATHEAD SCREW 13 13

2 × M2.6 DEPTH 2 (Screw holes for mounting) BOTTOM VIEW TLS A0006EA * Please consult us on the housing and vacuum ﬂange for the L13301. 12 RELATED PRODUCTS

Technical information: Module type

Hamamatsu can propose customized modules which meet your requests - application and other conditions of your concept - with best performance of our lamps. The following are just examples of customization, so please contact us with the information of your request.

UV-VIS fiber light source high power type (X2D2 lamp)

Features

●Spectral distribution 200 nm to 1600 nm ●External control Power ● ● supply High power Shutter function ●High stability: Fluctuation 0.004 % p-p (Typ.) ●Filter holder Halogen (equivalent to 2 × 10-5 A.U.) ● lamp Fiber output ●Long life lamp: 2000 hours

Characteristics Customize example D2 lamp ●Spectral distribution (Typical data) ●UV-VIS fiber type module TLSOB0099EB Connector 10 WHEN TUNGSTEN-HALOGEN (Fiber adapter is available) X2D2 lamp (See through type) LAMP WITH MAX. VOLTAGE WHEN TUNGSTEN-HALOGEN Optical system for Halogen lamp LAMP WITH MIN. VOLTAGE Halogen lamp

1 Shutter

▲Customize image Control board RELATIVE IRRADIANCE

LIGHT GUIDE CORE DIA.= 0.8 mm 0.1 Reference dimention (W × H × D) 200 300 400 500 600 700 800 900 1000 1100 * Power supply for lamp operation should be prepared. : 178 mm × 157 mm × 250 mm WAVELENGTH (nm)

Compact type (S2D2 lamp)

SMA connector Optical system (Half mirror) Features Shutter Tungsten lamp ●Compact ●High stability: Fluctuation 0.004 % p-p (Typ.) (equivalent 2 × 10-5 A.U.) ●External control ●Shutter function ●Fiber output

Characteristics Customize example ●Spectral distribution (Typical data) ●UV fiber type module S2D2 lamp Power TLSZB0125EA ▲Customize image 10 supply Shutter

Reference dimention (W × H × D)

: 72 mm × 40 mm × 90 mm 1

0.1 SMA connector Lens L10671H (S2D2 lamp) RELATIVE IRRADIANCE

LIGHT GUIDE * Power supply for lamp operation should be prepared. CORE DIAMETER= 0.8 mm 0.01 200 300 400 500 600 700 800 900 1000 1100 WAVELENGTH (nm)

13 VUV light source ■APPLICATIONS ●Electrostatic remover ●Semiconductor inspection ●Dechucking of electrostatic chucks ●Film thickness measurement ●Material resistance evalution ●LCD manufacturing equipment ●Spectrophotometry ●Photoionization source

H2D2 light source unit L11798, L11799

The H2D2 light source unit contains a high-brightness, high-end deuterium lamp (H2D2 lamp) that emits light at a brightness 6 times higher than our current deuterium lamps (L2D2 lamps). Despite its high brightness, the H2D2 is highly stable, has a long service life, and allows air-cooled operation by a specially designed housing. This feature makes it much more convenient and easy to use than ordinary water-cooled lamps. The H2D2 can be used in various applications and enhances equipment sensitivity and throughput. ▲L11798, L11799 Left: Light source, Right: Power supply Features Characteristics

●High brightness: 6 times ●Spectral distribution ●Arc distribution TLSOB0079EB TLS B0007EB (Compared to L2D2 lamp) 100 650 600 ●High stability: Fluctuation 0.05 % p-p (Max.) 550 High 80 Drift ±0.3 %h (Max.) L11798 500 brightness 450 ● ×6 Long life: Warranty of 1000 hours 60 400 ● 350 H2D2 lamp Air cooling (needs no cooling water) 300 Conventional model X2D2 lamp 40 250 ●External control L2D2 lamp 200 ( 0.5 mm) 150 RELATIVE IRRADIANCE (%) RELATIVE RELATIVE IRRADIANCE (%) RELATIVE 20 100 50 0 0 100 120 140 160 180 200 220 240 400 -2.5 -2 -1.5 -1 -0.5 0 0.5 1 1.5 2 2.5 WAVELENGTH (nm) DISTANCE FROM APERTURE CENTER (mm)

Electrostatic remover VUV ionizer L12542

Due to its wide irradiation angle about 3 times larger than our current VUV light source, the Characteristics L12542 efﬁciently removes electrostatic ●Directivity 30° charges over large areas in depressurized or (Light distribution) 20° vacuum environments. 10° Up until now two or more VUV light sources were needed to neutralize electrostatic charges 0° in large areas due to their limited irradiation -10° angle. The L12542 solves this problem and ▲L12542 -20° efﬁciently neutralizes large areas in a vacuum. Left: Light source, Right: Power supply -30° TLSZB0105EA

S2D2 VUV light source unit L10706 series

The S2D2 VUV light source unit is a vacuum ultraviolet light source unit that incorporates SEM image a compact deuterium lamp with an MgF2 ●Comparison of electrostatic change removal effect window. Equipped with a SUS flexible tube with a vacuum flange and a unique cooling mecha- nism, this light source unit allows irradiating objects or samples at a very close distance, and can be installed and operated under depressurized conditions. ▲L10706 Left: Light source, Right: Power supply The compact lamp unit and SUS flexible tube ▲Before offer greater flexibility in attaching the light irradiance source unit to various types of equipment. ▲After irradiance 14 * It is also possible to remove electrostatic charges by other D2 lamps with MgF2 window. ■HANDLING PRECAUTION

1. Deuterium lamps emit ultraviolet rays which can be harmful to eyes and skin. Do not look directly at the emitted light or allow direct exposure to skin. Always wear protective glasses or goggles and clothing when operating the lamps. (Refer to JIS T 8141 or equivalent safety standards). 2. Since the bulb wall temperature reaches a high temperature (over 200 °C) during lamp operation, do not touch it with bare hands or bring inﬂam- mable objects near it. 3. Do not apply vibrations or mechanical shocks to the lamp. These might cause light output stability to deteriorate. 4. Graded sealing of synthetic silica and MgF2 window: On bulbs using synthetic silica or MgF2 window, the window is formed by so-called "graded sealing" which connects different glasses with slightly different expansion rates. Since the mechanical strength of the seams of this graded sealing is low, use caution when securing the lamp so that no force is exerted on those seams during use. 5. Before turning on the lamp, wipe the bulb and window gently using alcohol or acetone. Do not handle the lamp with bare hands. Dirt or smears on the window will cause a signiﬁcant drop in ultraviolet transmittance. 6. High voltage is used to operate these lamps. Use extreme caution to prevent electrical shock. 7. Be sure to avoid to store the lamp under high humidity and high temperature. Also, in case the lamp is not used for a long time, it with package in the place where shock or vibration is not applied. 8. Handling MgF2 and synthetic quartz windows: UV light generates ozone when it irradiates an atmosphere containing oxygen. The amount of the generated ozone is low and so does not affect the human body but does produce an ozone smell. So ventilate the room from time to time when using a lamp with an MgF2 or synthetic quartz window in a closed room. ■WARRANTY

Lamps are warranted for a period of one year from the date of shipment. If a lamp is found to be defective within this warranty period, Hamamatsu will replace the defective lamp without charge. (This warranty is limited to replacement of the defective lamp.) Even if within the warranty period (one year), the warranty shall not apply to cases where the lamp operation time has exceeded the guaranteed life, or the trouble was caused by incorrect operation or natural or man-made disasters. ■DISPOSAL OF LAMPS

When disposing of the used lamp, take appropriate measures in compliance with applicable regulations regarding waste disposal and correctly dispose of it yourself, or entrust disposal to a licensed industrial waste disposal company. In any case, be sure to comply with the regulations in your country, state, region or province to ensure the used lamp is disposed of legally and correctly.

Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office. Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2019 Hamamatsu Photonics K.K.

HAMAMATSU PHOTONICS K.K. www.hamamatsu.com HAMAMATSU PHOTONICS K.K., Electron Tube Division 314-5, Shimokanzo, Iwata City, Shizuoka Pref., 438-0193, Japan, Telephone: (81)539/62-5248, Fax: (81)539/62-2205 U.S.A.: Hamamatsu Corporation: 360 Foothill Road, Bridgewater, NJ 08807, U.S.A., Telephone: (1)908-231-0960, Fax: (1)908-231-1218 E-mail: [email protected] Germany: Hamamatsu Photonics Deutschland GmbH.: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-265-8 E-mail: [email protected] France: Hamamatsu Photonics France S.A.R.L.: 19, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10 E-mail: [email protected] United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court,10 Tewin Road, Welwyn Garden City, Hertfordshire AL7 1BW, UK, Telephone: (44)1707-294888, Fax: (44)1707-325777 E-mail: [email protected] North Europe: Hamamatsu Photonics Norden AB: Torshamnsgatan 35 16440 Kista, Sweden, Telephone: (46)8-509 031 00, Fax: (46)8-509 031 01 E-mail: [email protected] Italy: Hamamatsu Photonics Italia S.r.l.: Strada della Moia, 1 int. 6, 20020 Arese (Milano), Italy, Telephone: (39)02-93 58 17 33, Fax: (39)02-93 58 17 41 E-mail: [email protected] China: Hamamatsu Photonics (China) Co., Ltd.: 1201 Tower B, Jiaming Center, 27 Dongsanhuan Beilu, Chaoyang District, 100020 Beijing, P.R.China, Telephone: (86)10-6586-6006, Fax: (86)10-6586-2866 E-mail: [email protected] TLS 1017E04 Taiwan: Hamamatsu Photonics Taiwan Co., Ltd.: 8F-3, No.158, Section2, Gongdao 5th Road, East District, Hsinchu, 300, Taiwan R.O.C. Telephone: (886)3-659-0080, Fax: (886)3-659-0081 E-mail: [email protected] JUN. 2019 IP