Integrated circuits – Finn Müller-Hansen
From basic solid state research to application
Integrated circuits From simple transistors to modern microelectronics
Seminar talk by Finn Müller-Hansen on May 28, 2013
1 Integrated circuits – Finn Müller-Hansen
How does this work*?
* For example: How can this computer add the two numbers?
2 Integrated circuits – Finn Müller-Hansen
http://www.anandtech.com/show/6409/13inch-retina-macbook-pro-review 3 Integrated circuits – Finn Müller-Hansen
http://www.anandtech.com commons.wikimedia.org 4 Integrated circuits – Finn Müller-Hansen
http://www.anandtech.com 5 Integrated circuits – Finn Müller-Hansen
http://www.anandtech.com http://www.cellmatrix.com 6 Integrated circuits – Finn Müller-Hansen
● How was it possible to develop complicated logic circuits like this computer?
● How are modern microchips manufactured?
● And how do microelectronics work?
7 Integrated circuits – Finn Müller-Hansen Outline
History
Technology
Future
Images: strims.pl web.mit.edu http://www.extremetech.com/wp-content/uploads/2012/06/Quantum.jpg 8 Integrated circuits – Finn Müller-Hansen Part I
History of a revolution
Technology
Future
Images: strims.pl web.mit.edu http://www.extremetech.com/wp-content/uploads/2012/06/Quantum.jpg 9 Integrated circuits – Finn Müller-Hansen
The invention of the transistor
● 1925 Lilienfeld: theory of a field effect transistor
● 1947 Shockley, Bardeen and Brattain: point contact transistor at Bell Labs (Nobel prize in 1956)
● 1950 bipolar junction transistor commons.wikimedia.org 10 Integrated circuits – Finn Müller-Hansen
The first integrated circuit
Kilby: Invention of the Integrated Circuit Further thought led me to the conclusion that semiconductors were all that were really required – that resistors and capacitors, in particular, could be made from the same material as the active devices [the transistors]. I also realised that, since all of the components could be made of a single material, they could also be made in situ, interconnected to form a complete circuit. I then quickly sketched a proposed design for a flip-flop using these components. Resistors were provided by bulk effect in the silicon, and capacitors by pn-junctions.
11 Integrated circuits – Finn Müller-Hansen
The first integrated circuit
1958 Jack Kilby at TI (Nobel price 2000)
http://www.ti.com/corp/docs/kilbyctr/jackbuilt.shtml 12 Integrated circuits – Finn Müller-Hansen
Further developments
Between 1958 and 1960:
● Hoerni: planar process
● silicon instead of germanium
● Noyce: aluminium wiring
● Lehovec: insulation by pn-junctions
● J. Last: assembly of first planar IC Robert Noyce
● Kahng and Atalla: first MOSFET
Who invented the IC? Jean Hoerni Kurt Lehovec http://www.computerhope.com 13 Integrated circuits – Finn Müller-Hansen
Economy
● military and NASA in the semiconductor market
● 1955 Shockley Semiconductor Laboratories
● “Traitorous eight” (Hoerni, Noyce, Moore and others)
● 1957 Fairchild Semiconductors
● mid 1960s patent wars between TI, Fairchild, ...
● late 1960s Intel, AMD, Zilog, etc.
http://www.flickr.com/photos/wimar/4657299405/sizes/o/in/photostream/ 14 Integrated circuits – Finn Müller-Hansen
Moore's Law
1965 G.E. Moore: Cramming More Components onto Integrated Circuits
commons.wikimedia.org 15 Integrated circuits – Finn Müller-Hansen
Keeping up with Moore's Law
● Downscaling
● Higher clock frequencies
● material research
● advances in lithography
● new deposition techniques
● multi-core computing Semiconductor sales 1977-2012
reinvestments only possible rising capital requirements due to economic success
Data from http://www.semiconductors.org/industry_statistics/global_sales_report/ 16 Integrated circuits – Finn Müller-Hansen
●How was it possible to develop complicated logic circuits like this computer?
● various contributions of inventors and researchers
● cooperation of research, economics, and public sector
● self-fulfilling prophecy of Moore's Law
● economic success of IC
17 Integrated circuits – Finn Müller-Hansen Part II
History
Technology of IC Future
Images: strims.pl web.mit.edu http://www.extremetech.com/wp-content/uploads/2012/06/Quantum.jpg 18 Integrated circuits – Finn Müller-Hansen
Logic
● boolean logic
● logic gates implement boolean functions
● examples: NOT, AND, OR, XOR and combinations
● functional complete gates: NAND and NOR
OR Gate constructed from NAND NAND Gate
commons.wikimedia.org 19 Integrated circuits – Finn Müller-Hansen
Example: Adder .
Full Adder . .
Part of ALU (arithmetic logic unit) on a CPU (central processing unit) commons.wikimedia.org 20 Integrated circuits – Finn Müller-Hansen
CMOS logic
CMOS NAND Gate commons.wikimedia.org 21 Integrated circuits – Finn Müller-Hansen
Chip design Example: Register transfer level addition of two x bit numbers
logic synthesis
Gate-level description (circuit diagram)
placement, routing, etc.
Physical layout
http://www.iis.ee.ethz.ch/~kgf/aries/8.html 22 Integrated circuits – Finn Müller-Hansen
Manufacturing of ICs
● chip design
● lithography
● etching
● material deposition
● wiring
● testing and packaging
www.amd.com 23 Integrated circuits – Finn Müller-Hansen
Lithography
● electron beam lithography for mask production
● 193 nm argon fluoride excimer laser photolithography (deep UV)
● different resist material
● state of the art: 22nm processes
http://britneyspears.ac/physics/fabrication/photolithography.htm 24 Integrated circuits – Finn Müller-Hansen
Beyond the diffraction limit
Optical Proximity Correction
Phase shifting techniques
Immersion lithography http://www.tf.uni-kiel.de/matwis/amat/admat_en/kap_5/backbone/r5_3_2.html commons.wikimedia.org 25 Integrated circuits – Finn Müller-Hansen
Etching and deposition techniques
● wet chemistry etching
● plasma etching:
● chemical etching
● reactive ion etching
● sputtering
● chemical vapor deposition
● physical vapor deposition
Clemens, J.T.: Silicon Microelectronics Technology. Bell Labs Technical Journal, 1997 26 Integrated circuits – Finn Müller-Hansen
Fabrication of transistors
30nm
TEM image of a modern MISFET
http://huniv.hongik.ac.kr/~hmed/nanofet.html commons.wikimedia.org 27 Integrated circuits – Finn Müller-Hansen
Wiring
completed silicon wafer
Peercy, P.S.: The drive to miniaturization. Nature 406, 2000 http://www.dailytech.com 28 Integrated circuits – Finn Müller-Hansen
How are modern microchips manufactured?
● lithography as a key technology
● chip is built in layers
● more than 500 single steps
● computational power makes design of next generation possible
29 Integrated circuits – Finn Müller-Hansen Part III
History
Technology Future of ICs
Images: strims.pl web.mit.edu http://www.extremetech.com/wp-content/uploads/2012/06/Quantum.jpg 30 Integrated circuits – Finn Müller-Hansen
Limiting factors in downscaling of CMOS
● high current density in metal wires
● thickness of gate insulator (high k dielectrics)
● lithography
● EUV (1-10 nm)
● electron beam
http://physics.nmsu.edu/~bkiefer/research.html 31 Integrated circuits – Finn Müller-Hansen
Alternatives to silicon?
● Organic semiconductors, spintronics
● Molecular computing (e.g. DNA computer)
● Optical computer (→ presentation on photonic crystals)
●
probably not within the next 20 years http://images.cryhavok.org/v/Quantum+Computer.jpg.html 32 Integrated circuits – Finn Müller-Hansen
How do microelectronics work?
http://techreport.com/forums/viewtopic.php?f=14&t=77469 33 Integrated circuits – Finn Müller-Hansen
References
● Bratton, D. et al: Recent progress in high resolution lithography. Polymers for advanced technologies 17, 2006
● Braun, E.: Revolution in miniature. Cambridge University Press, 1978
● Chen, Y and A. Pépin: Nanofabrication: Conventional and nonconventional methods. Electrophoresis 22, 2001
● Clemens, J.T.: Silicon Microelectronics Technology. Bell Labs Technical Journal, 1997
● Eckert, M. and H. Schubert: Kristalle, Elektronen, Transistoren. Rohwolt Hamburg, 1986
● Kilby, J.S.: Invention of the Integrated Circuit. IEEE Transactions on Electron Devices, vol 23, 1976
● www.halbleiter.org
● Moore, G.E.: Cramming More Components onto Integrated Circuits. Electronics, 1965
34 Integrated circuits – Finn Müller-Hansen
References (II)
● Peercy, P.S.: The drive to miniaturization. Nature 406, 2000
● Ruge, I and H. Mader: Halbleiter-Technologie. Springer Berlin, Heidelberg, New York, 1991
● Schulz, M.: The end of the road for silicon? Nature 399, 1999
● Seisyan, R.P.: Nanolithography in Microelectronics: A Review. Technical Physics 56, 2011
● Thompson, S.E. and S. Parthasarathy: Moore’s law: the future of Si microelectronics. Materials Today vol. 6, 2006
● Thompson, L.F.: Introduction to Microlithography. American Chemical Society Washington, DC, 1994
● Tietze, U. und C. Schenk: Halbleiter-Schaltungstechnik. Springer Berlin, 1999.
● Waser, R. (ed.): Nanoelectronics and Information Technology. Wiley-VCH Weinheim, 2005
35 Integrated circuits – Finn Müller-Hansen
How do microelectronics work?
Questions?
(If you really want to know it start studying computer engineering.)
http://techreport.com/forums/viewtopic.php?f=14&t=77469 36