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Home , Acorn tube, Audion, Compactron, Crookes tube, Eugen Goldstein, Fleming valve

Vacuum & Technology Time Line, 1500–1799 Time Line Color Code Key

Related scientific developments Anders Celsius devices (1701-1744) & Mayow Apparatus ca. 1669 suggests new temperature Otto von Guericke scale. This scale is revised Historical events Magdeberg hemisphere John Mayow (1641-1679) Rene Descartes in 1745 by Carl von Linn¾ (1707-1778) Vacuum gauges demonstration suggests that air may be (1596-1650) 1654 made up of two different gases 1742 Vacuum pumps in his Principa Philosophiae Experiments by Richard 1674 suggests that a vacuum Captions Townley (1628-1707) and Jakob Hermann cannot exist Vacuum device manufacturing Henry Power (1623-1668) (1678-1733) 1644 establish PV law for expansion postulates that pressure is (later called Boyle’s Law or proportional to density and Marriotte’s Law) to the square of the average Ferdinand II, 1660 velocity of the particles Grand Duke of Tuscany, in motion invents liquid-in-glass 1716 thermometer In response to Boyle’s ideas, 1641 Franciscu Linus (1595-1675) Otto von Guericke’s suggest the properties of a air pump vacuum is due to invisible thread-like Hero of Alexandria writes 1672 “funiculus” that strive to hold Pneumatias summarizing nearby objects together what is then known about Evangelista Torricelli 1660 syphons, pumps, etc. (1608-1647) Johannes van Helmont ~150 B.C.E. Substitutes for George Ernts Stahl defines “gas” (Flemish = chaos) water in overhead pump introduces idea of to mean an air-like substance 1644 phlogiston as the 1620 agent of burning Otto von Guericke Hero’s Pneumatias Otto von Guericke and rusting Jean Antoine Nollett (1602-1686) publishes treatise on Falling bodies in a translated to Italian by Aleotti 1697 Phlogiston theory Water barometer vacuum experiments vacuum experiment 1547 Evangelista Torricelli abandoned 1654 1672 1743 mercury barometer 1791 1643

Otto von Guericke 1725 1750 1775 1799 Air pump— 1500 1600 first vacuum produced 1650 1700 ~1640 Jean Picard observes Daniel Bernoulli “barometric light,” a glow (1700-1782) discharge induced by static First truly statistical treatment of kinetic Robert Boyle electricity when a mercury barometer is shaken theory of gasses (1627-1691) 1728-1733 Santorre Santorro studies mercury barometer 1675 Francis Hauskbee (1561-1636) ~1660 shows that sound is not and Galileo independently Galileo Galilei transmitted in a vacuum Charles Law— invent thermoscope for Blaise Pascal (1623-1662) (1564-1642) 1705 Jacques-Alexandre Charles measuring temperature Û measures limit of Puy de D me Experiment- establishes that for a given ~1612 temperature change, different overhead water pump Florin Perrier showed that Robert Boyle states Edm¾ Mariotte in France the height of the column in Boyle’s Law for gases expand the same amount 1638 (~1620-1684) independently Daniel Gabriel Fahrenheit Gasparo Berti mercury barometer decreased compression of gases 1787 publishes relation between , invents mercury first vacuum produced with altitude, confirming a 1661 thermometer standardized (in water barometer) prediction of his brother-in-law, pressure and volume in with ice and boiling water ~1640 1648 On the Nature of Air 1676 1714

Boyle’s bell in a vacuum 1660

Daniel Bernoulli (1700-1782) Gilles Personne de Roberval writes “Hydrodynamica” (1602-1675) Robert Boyle publishes -includes concept of gas viscosity Galileo Galilei’s Syphon Experiment Void within a void experiment New Experiments Physio-Mechanical, 1733-1738 1638 Expanding bladder experiment touching the Spring of Air, and its Effects 1648 1660 Vacuum Science & Technology Time Line, 1800–1899 Pierre & Jacques Curie Elihu Thomson C. F. Varley discover the piezoelectric effect commercial medical suggests that 1880 American Institute of X-Ray machines Roots Pump rays are particles Electrical Engineers 1896 invented by brothers Thomas A. Edison 1871 holds first meeting Philander and Francis Roots forms the L. von Babo during the Philadelphia 1859 Edison Illuminating Company Develops self-recycling 1880 International Exhibition Wilhelm C. Roentgen Sprengel pump discovered X-Rays 1884 Wilhelm Conrad Roentgen 1876 Sir , England 1895 Julius Plò cker demonstrated Sir (1845-1923) August TØ pler (1842-1923) that a bends performs the Maltese creates the first X-Ray tube (1836-1912) originates cross experiment Cryogenic pumping with what later became known as the term Kathoden-strahlen 1898 Edison files patent on thin 1887 liquid air cooled charcoal Thomas A. Edison cathode rays Geissler-TØ pler (cathode rays) film deposition by thermal 1892 (1847-1931) 1858 1876 mercury vacuum evaporation in a 1884 transmits 1862 Thomas A. Edison files U.S. a signal for one mile Louis Paul Cailleter A.W. Wright Tube 1897 patent on high vacuum carbon 1895 F.M. & P.H. Roots (1832-1813) describes thin film incandescent lamp Industrial Roots French and inventor, deposition by Edison files patent on 1879 Blower Pump liquifies , , nitrogen, arc vaporization Heinrich R. Hertz precursor the fluorescent and M. W. Travers Isaiah Davies 1868 and air. Invents altimeter and the 1887 discovers cathod lamp and fluoroscope discover “Roots” pump high-pressure manometer Sir William Crookes, England rays can penetrate 1896 1898 Joseph-Louis Gay-Lussac Hermann Sprengel 1848 Sir William Crookes 1877-1878 invents the , thin metal sheets (1778-1850) Devises mercury Johann Heinrich (1832-1919) early form of the CRT 1892 Gay-Lussac’s Law— drop pump Wilhelm Geissler suggests that cathode 1879 Clemens Winkler At a given pressure, the change in (1814-1879) 1865 Jean B. Perrin volume is proportional to the change rays are negatively discovers first charged particles Alexander G. Bell proved cathode rays in temperature David Hughes Johann Geissler, 1871 invents Thomas A. Edison “Germanium” were a stream of 1802 experiments with first “” charged particles Bonn, Germany, develops March 1876 first observation of 1886 R. W. Wood John James Waterston Geissler mercury vacuum pump, using three nails in vacuum improves Braun’s CRT 1895 J. W. Hittorf 1878 & adds the time base demonstrates field (1811-1883) with which he produces the first (“Edison effect”) emission of good vacuum discharge tubes demonstrates that George Johnstone Stoney March 1883 deflection Henry A. Fleuss introduces concept of Edison improves the from a metal into (Geissler tubes) cathode rays travel estimates the charge on 1889 (England) Karl F. Braun Mean Free Path Sprengel-Geissler a vacuum 1855 in straight lines, cathode ray particles Oil Piston Pump invents the 1843 recycling mercury pump 1897 develops Hittorf tube (electrons) 1892 Cathode Ray Tube 1869 1874 1879 1897

1899 1800 1850 Sir William Preece Albert Hess Malignani Corp (Italy) 1875 (England) duplicates 1890 uses a Lenard tube Use of chemical gettering Sir William Crookes, England Edison’s thermionic to study and map (phosphorus) Law of Partial Pressures Pumping by emission experiment and magnetic fields 1896 John Dalton (1766-1844) chemical makes quantitative William Einthoven 1894 1801 1876 presents a paper on the measurements, presents develops the Joseph Swan (1828-1914) “molecular shadow” to the results to Royal Society electrocardiogram William Sutherland patents carbon incandescent lamp G.R. Carey Physical Society of March 26, 1885 1890 (1859-1911) Scotland, that operates in partial vacuum invents the May 26, 1883 Philipp E.A. Lenard Gas-viscosity laws Sir William R. Grove 1860 or photoelectric cell added to Hertz’s work on 1897 First description of 1874 cathode rays penetrating William Thompson sputtering phenomenon George J. Stoney thin metal sheets Sir Joseph J. Thomson (Lord Kelvin) 1894 1852 Edison Effect suggests the name discovers the (1824-1907) “electron” for cathode (He called them “corpuscles”) suggests absolute ray particles 1897 temperature scale (1856-1943) 1891 Sir William Ramsay 1848 develops the Vacuum apparatus for exhausting (1852-1916) induction motor Edison's electric lamps. isolates argon from air 1888 Amedeo Avogadro Based on Crookes' design. 1894 (1776-1856) Sir William Robert Grove 1880 Avogadro’s Law— (1811-1896) All gases have the same Heinrich Daniel Ruhmkorff, Germany Rudolf Clausius number of in a Eugen Goldstein observes (1803-1877) (1822-1888) given volume regardless of “canal” rays (positive ), develops used by introduces idea of the temperature or pressure so called because they Geissler and Crookes Mean Free Path of a 1811 bored holes in the cathosde tube experiments diffusing particle of a discharge tube 1851 1858 Sir William Crookes 1886 Sir Joseph John Thomson Vacuum pumping system Eugene Bourdon Karl Kronig (1856-1940) 1870 Electrical Indicator Sir J.J. Thomson with his apparatus (1808-1884) (1822-1879) D.G. Fitz-Gerald, England, France, patents Bourdon-tube 307,031—October 21, 1884 suggests that gas molecules Herbert G. McLeod, England patents integral Mg John Ambrose Fleming pressure gauge in equilibrium travel in straight Robert W. Bunsen Volume compression, for an incandescent lamp reports to the 1849 lines unless they collide with something Water Jet Pump mercury manometer in England (1881) and U.S. (1883) Physical Society of London 1856 1870 1874 1881 that his “lamp” functioned as a . March 27, 1896 Vacuum Science & Technology Time Line, 1900–1924 First New York to San Francisco Lisa Meitner, Germany, Navy use of (1878-1968) discovers 1907–1908 telephone call using Western E. Weintraub Electric triode the radiationless electron Mercury and rectifier Albert W. Hull transition known as the W.C. Roentgen 1915 1902 Radio Corporation Magnetron tube Auger effect (named for in of America founded 1921 Pierre Auger, France, who for discovery of x-rays. Edwin H. Armstrong Charles Proteus Steinmetz 1919 discovered the effect two 1901 invents the files patent on mercury vapor M. von Laue years later lamp with halide salts 1924 1911 Gas filled Francis William Aston to improve color Lee deForest deForest incandescent lamp for x-ray diffraction (1877-1945) Nobel Prize in Physics Guglielmo Marconi transmits 1902 Sir John Ambrose Fleming (1873–1961) 1910 “Doc” Herrold 1912–1913 from crystals spectrograph (1890–1954) for mass spectrometer a wireless signal from England devises the first practical invents the Triode (Audion) begins first radio 1914 1919 Invents 1922 electron tube;the November 1906 broadcast service 1920 K.M.G. Siegbahn to North America Georges Claude A. Dufour develops a W.H. Bragg & W.L. Bragg 1901 () in San Jose, CA Nobel Prize in Physics c 1906 demonstrates 1911 high- continuously Nobel Prize in Physics Irving Langmuir for x-ray spectroscopy in public pumped CRT and records for crystal structure derived Thoriated filaments 1924 1910 directly on photographic plates from x-ray diffraction Navy Receiver using 1920 1913 1915 Hewitt deForest (Audion) L.T. Jones & H. G. Tasker demonstrate electrostatic 1906 Dieckmann, Glage, John B. Johnson & H. J. Van der Bijl 1901 focusing in a magnetically Pilipp Eduard Anton von Lenard Rosing,Campbell-Swinton developed the first commercial Nobel Prize in Physics for CRT ( 224-A) deflected CRT Peter Cooper Hewitt propose the use of the cathode rays. 1913 1924 develops mercury Braun tube to display W. D. Coolidge 1905 images H.M. Fessenden X-Ray tube manufacturer Marconi IP501 vapor lamp Lord Raleigh (John William Strutt) 1902 1906–1911 Hetrodyne receiver 1915 1 Tube detector (1842-1919) 1912 1919 (1879-1955) deForest's Space Telegraph Saul Dushman Nobel Prizes in both Physics Robert A. Millikan Nobel Prize in Physics 879,532—February 18. 1908 40 KV vacuum rectifier Irving Langmuir formulates (discovery of argon) and Measures charge on the 1913 essential elements of F. Lowenstein for photoelectric effect — Studies of inert electron (oil drop experiment) gas/surface interactions, Negative Bias Patent 1921 Guglielmo Marconi & KDKA transmits first gaseous elements in air 1909-1912 W.D. Coolidge structural dependence, etc. that 1,231,764—July 3, 1917 Carl F. Braun licensed broadcast 1904 High-voltage we now know as “Surface Science” Robert A. Millikan Nobel Prize in Physics for 1920 Marconi vacuum Arthur R. B. Wehnelt Crystal Set x-ray tube 1910-1920 (1868-1955) . (used as a detector) develops the oxide coated c 1905 1913 Awarded Nobel Prize in physics 1898–1905 1909 CRT deForest Diode introduced for measuring charge on electron 1903–1904 1923 Electric Sound Tungsten Filament Radio Telephone Hearing Aid Airplane Broadcasting Lamp Superconductivity Geiger Counter & Sonar Theory of Relativity

1901 1902 1903 1904 1906 1907 1908 1909 19111912 1913 1914 1916 1917 191819191921 1922 1923 1924 1900 1905 1910 1915 1920 Wolfgang Gaede Georges Claude W. Voege & Rohn Otto Von Baeyer O.E. Buckley Irving Langmuir M. Knudsen ATT purchases license Arthur J. Dempster Box Pump (1870-1960) Thermocouple Triode Irving Langmuir Hot cathode ionization Vibrating reed Radiometer effect from deForest mass spectrometer Early 1920s builds first neon lamp vacuum gauge vacuum gauge gas filled gauge development (viscosity) gauge ~1902 W. Kaufman 1906 vacuum gauge August 1914 1918 James Dewar 1909 incandescent 1916 1923 Harris J. Ryan Helical Torricelli tube 1910 Cryosorption Pump Marcello Pirani lamp developed magnetic turned by an ATT purchases patent using activated charcoal and Pirani gauge (thermal Marconi files suit 1915 Marconi/deForest/Moorhead deflection CRT’s rights for triode from deForest liquid air 1903 conductivity from Pfeiffer Co. against Lee deForest reach agreement on patents 1905 Western Electric March 1917 ~1900 heated filament) Rotary oil-sealed re: triode 1919 patents indirectly Lee deForest kept rights for 1906 mechanical 1914 heated cathode amateur and experimental use vacuum pump Joseph J. Thompson 1915 Lee deForest Radio Telephone & 1910 AEG- develops AEG-produces 250 RE11’s First neon advertising Nobel Prize in Physics— standardized tubes Telegraph company sign in U.S. Wolfgang Gaede per day for war effort F. Holweck Conduction of electricity for radio reception GE develops makes VT-21 and CF-185 tubes 1923 First theory and Irving Langmuir in Germany Spiral drum-type, through gases (EVN94, EVN129) Tungar rectifier for the U.S. Government Jean B. Perrin experiment on High-speed diffusion 1918 molecular drag pump 1906 in Germany December 1915 1917 Edison’s National Phonograph (1870-1942) molecular-drag pump and all-metal 1922 1914 GE produces YB-1 company uses sputter coating estimates value of condensation pump pumping Edison & Swan Co. 1918 First Fleming to produce phonograph Avogadro’s number 1912 1916 patent expired First Lee deForest Produces round valves Moorhead Laboratories, cylinder masters (and coins name) Tubular Audion developed Nov 1922 patent expired and Fleming valves San Francisco begins 1903 1909 by Cunningham Jan. 1924 for Marconi Co. production of SE-1444 October 1915 Radiotron WD-11 Poulsen Wireless/ in Great Britain for U.S. Navy Lee deForest follows 1922 Federal Telegraph Co. 1915 Rate of 50,000 April 1916 Wolfgang Gaede founded per month claimed Allied Radio founded Rotary mercury-sealed German telephone GE begins WE develops VT-1 & VT-2 1909 production of Siemens & Halske develop 1918 1922 mechanical tube Pliotrons (triode) Type “A” vacuum tube—about for Signal Corps Lee deForest vacuum pump (Leiben-Reiz) 1915 50,000 produced in Germany Goes into high production Co produces DV/DL 1905 c 1910 1916 1917 Sir John Ambrose Fleming Detection of Radio Waves McCandless Lamp Co Radiotron series vacuum tube (1849–1945) with Fleming Valve, an produces tubes for deForest Western Electric British Thomson Houston begins production UV-200, UV 201 1923–1926 1906–1916 Lee deForest instrument for converting enables the vacuum begins production of including “R” valve for military Nov 1920 alternating electric currents Triode produced 1907–1014 Gaede Diffusion pump of biased tubes for AT&T Marconi Co. in Great Britain tube to function Long distance telephone into continuous currents Sold business to concept using Mercury (Type M/101A first) 1916 Wolfgang Gaede as an 1915 put into use 803,684—November 7, 1905 Westinghouse in 1914 1913 (1878–1945) 1912 /G.E. Begins production in France—much behind U.S. of “R“ valves in Great Britain 1920 1916 Vacuum Science & Technology Time Line, 1925–1950 Ernest O. Lawrence Scientific Foundation of Vacuum Techniques Nobel Prize in Physics Nobel Prize in Physics published by Saul Dushman for the neutron. for invention of Cyclotron. 1949 1935 1939 F.C. Williams describes use of Cathode Ray Tube as a digital McMurdo Silver 525-line NTSC system ENIAC computer approved by FCC developed at Univ. of Penn. memory storage device 15 tube console receiver 1948 1937 for commercial B &W TV It used 18,000 vacuum tubes. Complete amateur (ham) Atwater Kent for diffraction of x-rays 1941 1943 radio station—1 tube receiver 3 tube receiver and electrons in gases. Loewe 3NF vacuum & 1 tube 1930 1936 RCA & Du Mont “” 1929 — demonstrates television Philo T. Farnsworth 1926 Nobel Prize in Chemistry— at the NY World’s Fair Philo T. Farnsworth Discovery of 1939 John L. Baird demonstrates an 1934 all-electronic television system demonstrates a 700 line in San Francisco Manfred von Ardenne high resolution television Scanning Electron 1927 1935 Microscope prototype: demonstrates an all Late night DX SEMI A.H. Compton electronic television in with a 1 tube receiver D. McMullan 1929 1930 — 1948 Nobel Prize in Physics for Irving Langmuir — Oskar Heil scattering of x-rays by electrons. Nobel Prize in Chemistry 1927 Surface Chemistry patents the Model B field effect 1932 Varian brothers first working klystron Sir Henry Tizard Percy Spencer of Raytheon Co. and (but did not work) Stanford University brings to U.S. designed the laminated Gustav Hertz— 1935 1937 Sept. 6, 1940 magnetron which increased production Bardeen, Brattain, and Shockley Nobel Prize in Physics— Kenjiro Takayanagi Alan B. Du Mont Laws governing begins applying CRT’s World’s first regular TV demonstrate the first demonstrates a gas focused semiconductor amplifier (transistor) collision between oscillograph CRT to display to television broadcasting by BBC in England 1932 1947 electron and television images electronic system by EMI Patent 2,535,035 — October 3, 1950 Sir Charles Oatley 1925 1927 1936 (1904-1996) Alan B. Du Mont John Randall and Harry Boot Rudi Kompfner Co-developer of Vladimir K. Zworykin files a founds the develop the magnetron first traveling wave tube J.A. Hipple scanning electron Harold S. Black patent on the kinescope. He Heintz & Kauffman Du Mont Laboratories E. H. Armstrong Erwin Muller (Germany) at Birmingham University Oxford University cyclotron microscope discovers later developed the . 1931 announces develops Field Emission Feb. 21, 1940 1942 resonance mass 1948 vs. RCA 1929 negative modulation Microscope spectrometer tube patent litagation 1927 1935-1937 Vacuum tube 1933 First general 1949 memory for purpose computer computers First Working B&W Television VHF Electronic Computer to RCA demonstrates All-electronic Quartz Clock Cyclotron Car Radio Television Use Binary Code Color Television Nuclear Reactor Calculating Device Oven ENIAC Computer Transistor

1926 1927 1928 1929 1931 19321933 19341936 19371938 1939 1941 1942 1943 1944 1946 1947 1948 1949 1925 First US screen 1930 1935 1940 1945 1950 Cecil R. Burch F.M. Penning grid tube Wolfgang Gaede W. Stevens Owen W. Richardson & George H. Bancroft Cold-cathode, Erwin W. Mò ller invents RCA UX-222 Gas Ballast Pump Varian brothers join Sperry Time-of-Flight Oct. 1927 (1879-1959) ionization gauge Oil diffusion pump 1935 Corp. in Long Island, NY mass spectrometer Field Electron Microscope that Nobel Prize in Physics for 1930 1937 1940 Wayne B. Nottingham images individual Mahn & Mecalf 1946 First RCA AC thermionic phenomena, proposes soft x-ray, 1950 Paper on Velocity Modulated filament tube Richardson's Law 6.3V becomes standard Ernest O. Lawrence pressure measurement limit 1928 Electron Tubes Nobel Prize in Physics— 1947 RCA UX-226 for AC & DC filaments 1936 C.M. Van Atta Sept. 1927 A.R. Olsen 1934 Diffusion pump speed The Cyclotron Hipple, Sommer & Thomas Paul Kollsman & L.L Hirst 1939 Omegatron Landmark UX 280 Kenneth C.D. Hickman >100 liter/sec. 1949 (Germany) develops Capacitance 1937 Alfred O.C. Nier, et al. Twin triodes rectifier introduced Fractionating oil diffusion first accurate manometer Mass spectrometer 6SN7, 7F8 (produced for 1929 pump and fluids leak detector barometric altimeter 1935 1945 over 50 years) 1928 1943 First Transmission Radar set using magnetron May. 1927 — M. Siegbahn Electron Microscope G.E. 6E5 built by British Disk-type, Kenneth C.D. Hickman Farnsworth “Magic Eye” tube September 1940 molecular drag pump Low-pressure Electron 1931 1934 1926 synthetic oils Multiplier 1929 1929 First button base 1.4 V Farnsworth miniature tube 1R5 Image Dissector RCA 1940 1926 National Union 9 original tubes in metal family Daniel Alpert Bayard-Alpert gauge produced first 1935 William W. Hansen 1950 tubes for car L. Malter 1909–1949) Metal tube ( 1931 Multi-stage, self-fractionating introduced by RCA – 6L7 Inventor of the 1935 diffusion pump microwave cavity Twin triodes Mercury vapor 1937 12AU7, 12AX7, 12AT7 Friedrich Meyer, rectifier 82, 83 First electron ray (and other glass mini tubes) Hans J. Spanner 1932 (magic eye) tube 1948 and Edmund Germer, introduced by RCA – 6E5 Siemens Transmission UHF oscillator using 1935 Germany, file patent on First beam power Electron Microscope— high-pressure metal vapor Westinghouse announced 1941 Mercury-arc rectifier – Max Knoll and Ernst Ruska Irving Langmuir UV and fluorescent lamp 1936 1938 Saul Dushman (1881-1957) 1927 Cecil R. Burch () 1883–1954) 1933 ( Holding Tube Gas diffusion pump using Pioneer vacuum scientist, published invented by Albert W. Hull low-vapor pressure oils Scientific Foundation of Vacuum Techniques 1927 1928 1949 Vacuum Science & Technology Time Line, 1951–1975

American Vacuum Society became incorporated October 19, 1953 Low energy electron diffraction Integrated circuit (LEED) image from nickel Fairchild Semiconductor Varian Varian Klystron (VA-842) 1962 Varian VA-126 1962 Erwin Muller This liquid-cooled, multicavity & describes Field High-power traveling founded Intel Nixie Display Tubes radar klystron was the largest Richard E. Honig Ion Microscope wave tube July 1968 Altair 8800 Computer 1957 documented production klystron publishes “Vapor 1951 1962 introduced 1959 Pressure Data for the 1975 Society of Vacuum Coaters International Organization Solid and Liquid celebrates (SVC) holds first Symposium Elements” - Data Magnetically focused of Vacuum Science and Nobel Prize 1957 and charts for 79 electron beam gun— Technology founded (IOVST) 1956 elements in RCA Leslie Holland William Shockley, 1958 Review (Updated 1951 , and Walter H. Brattain in 1969 by Honig IBM 7090 computer Nobel Prize in Physics and Dean A. Kramer) first transistor computer, for discovery 1962 1959 Integrated circuit patent of transistor effect Integrated circuit patent Gilbert Reiling (U.S.) RCA demonstrated Jack S. Kilby 1956 Elmer Fridrich and Robert Noyce files patent on modern IOVST becomes SLAC Linear Accelerator the shadow mask 3,138,744 June 23, 1964 Committee on Emmett Wily file Ali Javan invents 2.981,877 April 25, 1961 metal-halogen International Union invented by William Hansen, color TV tube Vacuum Techniques Vacuum Deposition of Thin Films patent on tungsten- helium-neon incandescent lamp for Vacuum Science, developed by Edward Ginzton (pictured), 1950 (later the AVS) by Leslie Holland published halogen lamp gas laser 1961 Techniques, and and completed under the holds its first direction of Dr. Wolfgang Panofsky 1956 1958 1960 Applications (IUVSTA) J. English, B. Fletcher symposium Radio-frequency 1962 1966 1953 Erwin W. Mò ller invents IBM 709 computer sputter deposition— and W. Steckelmacher develop wide-range Pirani First transistor Field Ion Microscope last major vacuum tube computer, Ross Aiken G.S. Anderson et al. First AVS Chapter vacuum gauge Texas Instruments images individual atoms used magnetic core memory CRT for aircraft and 14” Thin CRT tube 1962 founded-Pacific Northwest 1964 1954 1956 1958 1960 1962

First man (USSR) Sputnik IC Patents filed in space Moon Landing

1951 1952 1953 1954 1956 1957 1958 1959 1961 1962 1963 1964 19661967 19681969 1971 1972 1973 1974 1955 1960 1965 1970 1975 Charles W. Hanks— A.J. Beck & A.D. Brisbane J.Peter Hobson and Jesse W. Beams P.A. Redhead 3 ° Robert T. Bayard & Inverted, cold-cathode R. Herb Willi Becker Paul A. Redhead Spinning-rotor 2000 ft space chamber Extractor gauge 270 bent-beam J.K. Fremerey NASA Daniel Alpert magnetron vacuum gauge Orbitron pump with Turbomolecular UHV Inverted magnetron, gauge (viscosity) U.S. Air Force 1966 electron-beam gun Commercial scanning spinning rotor Cryo-pumps for invent triode 1952 electron-impact Ti sublimation Pump cold-cathode gauge 1960 1960 First practical capacitance evaporation source electron microscope— vacuum gauge Space Simulation and Ionization Gauge with 1955 1958 1958 1968 Instruments, U. K. at Jülich semiconductor fabrication W. Becker Varian Assoc. Inc. manometer MKS Instruments fine- collector 1970 1972 1975 Multi-stage turbine 1000 liter/sec E-13 torr, XHV vacuum chamber 1961 1950 Ring Getter with A.M. Gurewitsch A.Y. Cho, et al.— (turbomolecular) VacIon Pump (2 ft. diameter) using cryogenic Molecular-beam epitaxy U-shaped cross section & W. F. Westendorf pump concept 1960 helium-cooled traps and baffles (used in vacuum tubes) Single cell sputter ion pump 1968 Peter Clarke— 1955 National Research Corp. Cambridge Instrument Cylindrical and conical 1952 1954 L.L. Levenson, Norman Milleron 1960 Company (England)- The Physical Basis magnetron sputter Zenith shuts down and D.H. Davis compute vacuum Stereoscan Scanning conductances using Monte Carlo of Ultra-high Vacuum deposition sources Lansdale, PA unit Elelctron Microscope by Paul A. Redhead, J.P. Hobson 1971 Lewis D. Hall, R.L. Jepsen & J.C. Helmer simulations James M. Lafferty 1975 prototype and E.V. Kornelson Vacion (sputter-ion) pump based on 1960 Hot-cathode magnetron, 1965 published K.H. Mirgel Penning discharge— Gas laser invented ionization gage John Chapin— 1961 1968 Vertical uni-directional all electronic pump 1960 First commercial monopole Planar Magnetron sputter 1957 residual gas analyzer 1969 deposition source First use of quadrupole First of a series of amateur oriented C.H. Kruger & A.H. Shapiro 1974 mass spectrometer as vacuum articles in Scientific American Statistical theory of First JVST, 1964 Quadrupole Mass Filter residual gas analyzer R.G. Herb Leybold Company 1958 turbo-molecular pumping Vol. 1, No.1, Sept./Oct. Evapor-Ion pump with 1953 1960 1964 Roots vacuum pump mfg. Mars Hablanian 1961 W.M. Brubaker, P. Michael Uthe, & Robert Finnigan sublimation and ionization 1955 Axial flow, automotive (thin-bladed) First commercial quadrupole mass spectrometer 1950 supercharger at high vacuum residual gas analyzer Showed air compressors make good vacuum 1964 Association of Vacuum M-type Carcinotrons Varian Associates pumps, confounding existing theory Equipment Manufacturers W. Steckelmacher (voltage tuned microwave Very large sorption pumps for 1957 (AVEM) founded and B. Fletcher oscillators) developed roughing large chambers J.C. Helmer & W.H. Hayward 1969 develop convection Introduction of ‘modern’ 1952 1961 Bent-beam (Helmer) gauge thermal conductivity First oil-free piston Vacsorb cryosorption pump developed British & Japanese 1966 vacuum gauge that vacuum pump Varian Associates 1960 begin using traveling William R. Wheeler measures up to one 1974 1958 wave tubes for R.G. Herb developed P. Della Porta UHV (CF) metal-gasket Varian Clinac x-ray machine for atmosphere radio relay systems Getter-Ion pump (multipurpose tubes for TV) Non-evaporable Getter captured step-seal cancer radiation therapy 1971 1951 1953 1955 ~1950s 1961 1963 Time Line Color Code Key Vacuum Science & Technology Time Line, 1976–2003 Related scientific developments Vacuum devices 8086 industry standard Radio & electronics 16-bit microprocessor. Historical events It had 29,000 6-inch wafers Vacuum gauges and a clock speed of 4.77 Mhz fabricated successfully Hans Georg Dehmelt Vacuum pumps (4-inch wafers) December 1983 June 1978 Nobel Prize in Physics Captions for use of Penning Trap & to study charged particles Vacuum device manufacturing Nobel Prize in Physics for 1989 scanning tunneling microscopy 1986 First 8 inch semiconductor wafers produced April 1992 Court breaks up AT&T Wolfgang Paul clearing the way for Nobel Prize in Physics competition in for Paul Trap for long distance charged particles Jack St. Clair Kilby 1984 1989 (1923- ) Molecular beam Nobel Prize in Physics— epitaxy experiments Integrated Circuit in space (NASA) 2000 1995 1.2 million-transistor Intel 80486™ It runs at 25 MHz April 1989 Intel introduces Pentium™ processor Ernst August Friedrich Ruska (8-inch wafers) Zhores I. Alferof (1930-) Hard disk drive for PC (1906-1988) March 1993 Steve Jobs & Steve Wozniak Nobel Prize for transmission and (1928-)— (Seagate & Shugart) — Found Apple Computer 1980 electron microscope Nobel Prize in Physics April 1976 1986 Heterojunction transistor, solid state laser 2000

1976 1977 1978 1979 1981 1982 1983 19841986 1987 1988 1989 19911992 1993 1994 1996 1997 1998 1999 1980 1985 1990 1995 2000 JVST A First commercial color Large non-evaporable JVST B television display (21-inch) getter panel 1983 1992 1976 Edwards introduced the dry pump for the Osaka Vacuum Ltd. semiconductor industry Compound Molecular Pump 1985 1980 First issue of VikingI&II RCA closes Harrison, NJ “The Bell Jar” land on Mars receiving tube plant WE 215A vacuum tube vacuum for the amateur GLASS VACUUM TUBE MANUFACTURERS AS OF 1997 1976 Sylvania takes over January 1992 manufacture shutdown 1981 China Nuvistor line 1919–1981 April 30, 1976 The last major vacuum tube Shuguang Electrical Factory No. 1 production line was shut down France Paul C. Arnold (Raytheon) Amperex Daniel G. Bills - 1986 Russia K.M. Siegbahn Reflector Corp, Saratov First commercial Nobel Prize in Physics The Earth, in a vacuum, Ryazan Plant of Electronics, Ryazan convection Pirani gauge for high resolution from space 1977 SRPC Istok, Moscow electron spectroscopy Svetlana Electronic Devices, St. Petersburg 1981 Ulyanov, Ulyanovsk Vokhod, Kaluga 150 ft. diameter dish for Slovakia, Czech Republics AVVT, Prague and Arthur L. Schawlow radar and communications Stanford University KR Enterprise, Prague www.avs.org Nobel Prize in Physics JJ Electronic, Prague for laser spectroscopy Teslovak, Cadca © 2003 AVS Research: Perham Foundation 1981 First Issue of USA Revisions and corrections based on Surface Science Fritztronics, Randolph, MA comments from Exhibit attendees and AVS Education/History committee members. Spectra GE/Sylvania (RCA), Maryland MU, Oceanside, CA Intel images courtesy of Intel Corp. Vacuum tube production 1992 Revision date: May 2003. ends for all practical purposes Richardson Electronics, LaFox, IL in most Western European Triton Services ETD, Gaithersburg, MD Westrex Corporation, Kansas City, MO Countries and the US. 1977 Yugoslavia El Electronic Industries, Nis, Serbia