Arxiv:1809.08747V1 [Quant-Ph] 24 Sep 2018 Adit N Wsaepwrhnln.Wt Respect with Power-Handling

arXiv:1809.08747v1 [quant-ph] 24 Sep 2018 adit n Wsaepwrhnln.Wt respect With power-handling. scale design nW ( and our circulation bandwidth show low-loss parameters for allows realistic with simulations [19]. non-reciprocity broadband compact to alter path supercon- an nate provide to which be complementary isolators, principle travelling-wave are ducting in schemes may Such which in It lossless. manner, circulation efficient desired [14]. hardware ac- the dc a broadband engineering for to by circulators [15–18] down tive designs way previous bandwidth, the on concept’s all improves the operation for for signal. responsible allowing input is the of aspect im- frequency This the but be on frequency, delay constraints no the modulation poses that the requires with and approach commensurate modulation The active [10–14]. on delay for based concept circulation recent broadband a of implementation superconducting simultane- noise, be must added optimized. size loss, ously and range, as dynamic such cir- bandwidth, metrics readout, qubit performance in re- and non-reciprocity culator qubits of [9], use of computation standard number quantum the large fault-tolerant the for Given quired supercon- with make integrate circuits. magnets or ducting large miniaturize to their difficult but them bandwidths, octave vide a otybe iie onro-addvcs[–,7] [1–3, devices narrow-band bandwidth to (fractional limited been gyrator and mostly circulators has on-chip low-loss of oc- synthesis can non-reciprocity cur, lossless which over bandwidth the circuits. process- superconducting information with quantum for ing vital is loss incurring noise or adding and without modes source an electromagnetic directionally-routing propagating particular, of In of exchange broken. detector—be symmetry under system scattering electromagnetic reciprocity—the Lorentz ∗ [email protected] hnmdlda uecnutn nertdcircuit, integrated superconducting a as modeled When the propose we problem, optimization this address To lhuhMxelseutospaen etitoson restrictions no place equations Maxwell’s Although that requires often signal-processing Sophisticated eino no-hpsprodcigmcoaecirculator microwave superconducting on-chip an of Design 1 IA ainlIsiueo tnad n ehooyadth and Technology and Standards of Institute National JILA, adigo rvossprodcigcruaos[–]by [1–3] circulators to superconducting up previous powers of input for handling linear be to nerto ihbodadqatmlmtdapies[4–6 amplifiers limited quantum broadband with integration uis iuain ftedvc hwta talw o low for allows mu it the that for show set device are the goals of Simulations Design qubits. delays. and switches transfer Badisolation and dB epeetadsg o uecnutn,o-hpcirculat on-chip superconducting, a for design a present We .INTRODUCTION I. 2 eateto hsc,Uiest fClrd,Budr Co Boulder, Colorado, of University Physics, of Department ejmnJ Chapman, J. 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FIG. 1. Circulation with actively modulated transfer switches and delays. (a) A four-port circulator is constructed from two dynamically modulated transfer switches and a pair of delay lines. The left (blue) switch is shown in the crossed state, and the right (red) switch is shown in the through. The delay is set to one quarter of the modulation period τ = T/4. (b) The left and right switches are modulated with period T and a relative phase of π/2. For visual clarity, the modulation period is divided into quarter-period intervals indicated by the pastel background colors. (c) The schematics depict the way the switches will route a right-propagating signal, depending on its arrival time. Signals incident on port 1 are always routed to port 2, and signals incident on port 3 are routed to port 4. Note that these are not “snap-shots” of the switches’ conﬁgurations, as the signal is delayed by a quarter-period of the modulation as it propagates through the network. (d) The same depiction as (c), but for left-travelling waves incident on ports 2 or 4. To keep the device’s orientation the same as in (b), time ﬂows from right to left in this diagram.

circulator may be complemented by a quantitative an odd-excitation of the network’s first and third ports: frequency-domain analysis in which all m sidebands (de- its interference with the transmission of an even excita- tuned by integer multiples of the modulation frequency tion creates the desired circulation. Such a representa- Ω=2π/T ) are treated as ports of the network. The tion is useful in quantifying the effect of imperfections scattering of a signal incident on the first physical port and in evaluating the device’s linearity. (Absent nonide- may then be expressed as alities, Eq. (1) yields perfect four-port circulation when m Ωτ = π/2, θ = π/2, for which rm = δm,0). Ap- S11 =0, (1) pendix A includes± the full multi-frequency scattering± ma- m 1 trix derivation, and extension of Eq. (1) to include the S = (δm,0 rm), 21 2 − effects of group delay dispersion, finite modulation band- m S31 =0, width, and loss. m 1 The device’s sensitivity to these non-idealities depends S41 = (δm,0 + rm), 2 on the modulation rate Ω: Equation (1) shows that group − 4 ejkΩτ ej(m k)θ delay dispersion becomes problematic an Ω/(2π) shift in rm , ≡−π2 (m k)k frequency causes a delay variation on the scale of τ. Sim- k X − ilarly, a finite bandwidth Ωb of the square-wave modu- where the sum on k runs over all odd integers, δ is the lation truncates the sum in Eq. (1) at kmax = Ωb/Ω. Kronecker-delta, and m is an index denoting effective Both of these considerations prejudice the design in fa- ports at different frequencies, which is taken to be zero vor of longer delays and modulation rates which are much at the frequency of the input signal (e.g. m = 2 de- smaller than the frequencies of the circulated signals. notes the scattering of signals detuned from the− input Slow modulation also facilitates filtering, allowing sup- by 2Ω). The term rm describes the transmission of pression of spurious coupling between the modulation − 3 and signal lines. through crossed

The beneﬁts of slow modulation, however, do not come t ≪ c t ≫ c without a price. Slow modulation is only possible with long delays, which in the context of integrated circuits or typically entails greater loss and circuit size and/or reduced bandwidth. In a superconducting design space, though, vanishing conductive losses make long, low-loss, (a) broadband delays possible [20–23], and circuit size is the 1 4 only remaining penalty. We leverage this fact in the pro- & & posed superconducting implementation of a broadband, c low-loss, on-chip circulator, the topic of the following section. t 3 2 & & III. PROPOSED SUPERCONDUCTING IMPLEMENTATION (b) 0 #21

We set design goals for our circulator by anticipat- # ing its use in superconducting qubit readout. In par- -20 11 [dB] ticular, we design for integrability with broadband near- $% quantum-limited amplifiers such as Josephson paramet- # # -40 31 ric amplifiers [5] or Josephson traveling-wave parametric amplifiers [4], in the frequency range of 4 to 8 GHz. To # allow for robust, wafer-scale production, we work in the -60 41 design space allowed by optical lithographic fabrication. The modular nature of the proposed circulator reduces the challenge of designing a low-loss, broadband circu- 0 4 8 12 lator to the problem of designing low-loss, broadband frequency [GHz] transfer switches and delays. We address these in turn, and then present simulations of the full device. FIG. 2. Transfer switch with tunable inductors. A symmetric lattice of tunable inductors forms a transfer switch. A. Transfer switch (a) When the inductors are tuned such that lt ≪ lc, the switch is in its through state. Tuning lc ≪ lt realizes the To construct a fast superconducting transfer switch, switch’s crossed state. Parallel capacitances c are used to we arrange two pairs of nominally identical and tunable match the switch to a characteristic impedance Z0. (b) Calcu- inductors in a symmetric lattice (bridge) topology (see lated scattering parameters of the network in (a) parametrized × −2 Fig. 2a). The pairs of inductors tune in a coordinated by Eq. (3), with l0 = 0.94 nH, c = 270 fF, ǫ = 2.5 10 . Solid lines are exact solutions. Dashed lines are the approx- fashion, allowing the switch to toggle between its through imations to first-order in ǫ given in Eq. (B5). Insertion loss and crossed states (inset of Fig. 2a). is < 0.03 dB between 4 and 8 GHz. Gray rectangle shows Constructing the switch with purely reactive elements the Bode-Fano criterion (Eq. (2)) between 2 and 10 GHz. allows it to be completely free of dissipation. Limiting in- Its proximity to S11 attests to the efficacy of the single-pole sertion loss, however, requires impedance matching. Syn- matching network. thesis of a matching network is simplified if the bridge can be strongly imbalanced—that is, if the impedance of the through elements may be made much larger than the impedance of the crossed elements, or vice versa. In this dB over an 8 GHz band requires that L be less than limit, the Bode-Fano criterion [24, 25] for the switch is approximately 1 nH. We make this match in a simple, approximately that of a series RL circuit [26]: symmetrical way, with shunting capacitors c sandwiching ∞ the inductor L (Fig. 2a). R ln Γ(ω) dω < π . (2) To quantify the needed imbalance, we analyze the − | | L switch in its “through” position and parametrize the pairs Z0 of tunable inductors as Here R is taken to be the characteristic impedance of the surrounding lines Z = 50 Ohms, Γ(ω) is the reflection 0 lt = l0, coefficient, and L is the small inductance in the network l0 (l in the switch’s through state, l in the crossed state). lc = . (3) t c ǫ A broadband match may then be obtained for sufficiently small L. For example, limiting reflections to Γ = 20 Here ǫ is a small parameter that describes the degree to − 4 which the bridge can be imbalanced. A standard cir- N 40 of the SQUIDs in series. cuit analysis (see Appendix B) allows expansion of the An≈ auxiliary benefit of this large plasma frequency re- switch’s scattering parameters in powers of ǫ. We find quirement comes in the device’s linearity. Similar broad- that the amplitude of both reflection and unwanted trans- band switches fabricated with 35 µA junctions have re- mission (e.g. transmission to isolated ports of the switch) ported 1-dB compression points at 53 dBm [28]. As- scale to leading order as ǫ, provided the impedance of the suming power-handling scales with the− square of junction l0 critical currents, the design proposed here would saturate resonator Zr = 2c is equal to Z0, and the capacitive −1 around 65 dBm, ample for integration with Josephson corner-frequencyqfc (Z c) is much larger than the − ≡ 0 travelling-wave amplifiers [4]. maximum frequency of operation ( 10 GHz). When For use in the proposed active circulator, it is not l 1 nH, this may be accomplished≈ with c 200 fF. 0 ≈ ≈ enough for the transfer switches to perform statically: Fine tuning of the inductance and capacitance may then they must also be fast. In principal, the only physical be used to adjust the passband of the switch around the constraint on the switching speed is the junction self- √ center frequency ω0 = 1/ 2l0c. Made in this way, the resonance frequency. In practice, however, further re- imbalanced switch is effectively an RLC oscillator with striction of the modulation bandwidth can limit the ex- quality factor of order one. tent to which photons in the flux control lines couple into As the switch’s isolation and return loss depend di- the circuit and emerge as noise in the operation band. rectly on ǫ, implementing inductors which may be tuned In particular, in the regime where the modulation rate over a wide range is a critical task. We suggest two ways Ω is much less than the 4 to 8 GHz operating frequencies, in which small ǫ values may be realized. it is advantageous to limit the modulation bandwidth to The first uses laddered arrays of Josephson junctions half of the minimum operating frequency. This provides which are flux-biased close to frustration. Devices made ample separation between the modulation band (1/T to 2 in this way have demonstrated ǫ 2 10−2 [27, 28]. GHz) and the signal band (4 to 8 GHz), which facilitates The second uses dc-SQUIDs with small,≤ × high-aspect ra- filtering. It also ensures that modulation tones which tio loops ( 5 µm 100 nm). These may be fabricated spuriously couple into the signal lines will be below the with optical≃ lithography×≃ by orienting the loop such that signal band, even if they are mixed up in frequency by the its normal vector is parallel to the chip’s surface. We second transfer switch. Further discussion of the control expect ǫ < 2.5 10−2 to be possible with such a de- waveforms’ effect on the circulator’s output spectrum is sign. (For more× details, see Appendix C). Implemented given in Appendix D. in either fashion, the tunable inductors may then be arranged in a bridge geometry and tuned with a pair of flux controls, as in Refs. [3, 29–31]. B. Delay lines and optimal modulation rate Figure 2b shows the magnitudes of the calculated scattering parameters of our switch design, optimized for the Modulating the transfer switches slowly requires a − 4 to 8 GHz band given ǫ = 2.5 10 2. Between 4 and broadband and low-loss delay on the scale of ns, many × 8 GHz, insertion loss is < 0.03 dB, isolation exceeds 25 microwave periods long. Furthermore, this delay must dB, and reflections are less than 26 dB. The impedance be relatively free of dispersion. These considerations sug- − match is therefore comparable to the Bode-Fano limit gest the use of a transmission line delay which supports a for an RL circuit (shaded gray rectangle). The switch’s TEM or quasi-TEM mode, such as a coplanar waveguide group delay dispersion is non-zero, but as the total delay (CPW). Such a line may be tightly meandered to realize provided by the switch is approximately the inverse of the desired broadband delay in a compact manner. its bandwidth (and Q 1), it imparts a delay which is ≈ The primary sources of dispersion in such a structure small relative to that of the delay lines. are the resonant modes associated with the ground plane Imbalancing an inductive bridge to this degree puts and the bends in the path of the CPW. To account for constraints on the junction’s plasma (self-resonance) fre- these, we conducted numerical simulations of meandered quency ωp. When the tunable inductors are flux-biased CPWs using a planar method-of-moments solver. These into their high-inductance state, their Josephson induc- show 1 ns delays may be achieved over the entire 2 to tance changes by a factor of 1/ǫ, decreasing the plasma 10 GHz band, with return loss better than 30 dB and − frequency of the unbiased junction by a factor of √ǫ. fractional group velocity dispersion < 3 10 4 per 80 To ensure that this reduced plasma frequency is always MHz. Dispersion at this level would cause× 0.05 dB of greater than the circulator’s operation band, we require circulator insertion loss (see Appendix A). (Dispersion ωp > 2π √ǫ 10 GHz in the unbiased junctions. For from the quasi-TEM nature of the CPW mode, and the × × a niobium trilayer process where ωp is a known function frequency-dependence of niobium’s surface inductance, of the junction critical current density Jc [32, 33], the are irrelevant on this scale [34, 35].) above constraint defines a minimum Jc. Given a mini- At temperatures and frequencies where the thermal mum feature size of 2 µm, the minimum junction critical and photon energies are much less than the supercon- current is then set at I0 =9 µA. Finally, the target array ducting gap, dissipation in a CPW is dominated by di- inductance of l 1 nH can be achieved by cascading electric loss. For a signal with frequency ω propagating 0 ≈ 5 in a TEM mode for a time τ = π/(2Ω), the attenuation C. Simulated Performance a from the surrounding dielectric is [36] ωτ To predict the performance of the proposed super- a = exp tan δ . (4) conducting circulator we conduct time-domain numer- − 2 ical simulations of the design. The delays are mod- Here tan δ is the dielectric loss tangent. Coplanar waveg- eled as ideal transmission lines which provide a delay of τ = π/(2Ω) = 3.125 ns (commensurate with Ω=2π 80 uides fabricated on silicon substrates routinely demon- × strate quality factors > 105 [37], making the dissipation MHz). The transfer switches are modeled by the lumped- from a 1 ns delay less than 3 mdB for signals in our band. element network depicted in Fig. 2a, with several non- To estimate the physical size of such a delay and the idealities included: resulting circuit, we note that for a CPW on silicon where First, each inductor is replaced by an array of N = 46 microwaves travel more slowly than the vacuum speed of inductors in series, each of which is assumed to be tunable light c , the needed delay line has length d πc /(5Ω). by an external signal Φe, via the relation 0 ≈ 0 Assuming a minimum lithographic feature size of 2 µm, l0 l(Φe)= + lg. (5) a 50 Ohm CPW may be as narrow as 10 µm, and a 2 2 ǫ + (1 2ǫ)cos (Φe) reasonable value for the meander pitch is p = 60 µm. − The switches themselves require less than 1 mm2, so the This functional formp is chosen to replicate the flux- entire layout may fit on a chip with area 2dp + 2 mm2. dependence of an asymmetrical dc-SQUID’s induc- Selecting a precise value for the modulation frequency tance [38], and make contact with Eq. (3) in the lim- Ω therefore amounts to balancing competing effects: its Φe 0 and Φe π/2. We fix Nl0 = 1.02 nH and → −2 → slower modulation minimizes the loss associated with dis- ǫ =2.5 10 , and the geometric inductance is chosen to × persion and finite modulation bandwidth, but increases be Nlg = 207 pH. Second, alongside each of these tunable dielectric losses and circuit size. Figure 3 summarizes inductors we place a parallel capacitance of cJ = 180 fF these trade-offs. The blue trace shows circuit size (left to mimic the self-capacitance of the junctions. Lastly, the axis), while the red traces shows the various loss channels tunable inductors are modulated by two approximately (right axis), calculated with Eq. (4) and the methods de- square-wave signals with frequency Ω=2π 80 MHz. We scribed in Appendix A. A modulation rate of Ω=2π 80 model the finite modulation bandwidth by× synthesizing MHz (d 37.5 cm) is estimated to keep the circulator’s× the bias signals from the sum of the first 25 Fourier com- insertion≈ loss below 0.1 dB while allowing the device to ponents of a square-wave, such that the bias waveform fit on a 7 mm by 7 mm chip. has no spectral weight above Ωb/(2π) = 25Ω/(2π)=2 GHz. Figure 4a shows the first column of the simulated net- 4 10 0.5 work’s scattering parameters. Between 5.9 and 8.2 GHz, the circulator’s isolation exceeds 20 dB. Insertion loss in the same band is less than 0.3 dB. Accounting for loss 10 3 ]

2 caused by disperion in the CPW delays (which is not present in the time-domain simulation), the total loss of the device is expected to be less than 0.35 dB across this 10 2 finite 0.25 band. mod.

loss[dB] The primary performance limitation is the ﬁnite mod- insertion loss bw ulation bandwidth: if the simulation is repeated with

chiparea [mm 1 10 infinite modulation bandwidth and all other parameters dielectric held fixed, isolation is greater than 20 dB between 4 and loss dispersion 8.5 GHz, and insertion loss is improved to better than 0 10 0 0.1 dB. Power emerging out of the circulator’s other three 10 0 10 1 10 2 10 3 ports (at the input frequency) accounts for 0.03 dB of this mod. frequency Ω/2" [MHz] loss. We attribute the final 0.05 dB to the dispersion of the switches. FIG. 3. Optimal modulation rate. Estimated chip area The simulated 0.2 dB of insertion loss that results (left axis, blue trace) and total insertion loss (right axis, thick from an Ωb = 2π 2 GHz modulation bandwidth is red trace) as a function of the modulation frequency. Contri- greater than the 0.07× dB expected from the analysis in butions to the insertion loss from dispersive, dielectric, and Appendix A. The discrepancy arises from the sensitive finite modulation bandwidth effects are also shown. These dependence of the inductance on the control signal near assume a fractional group velocity dispersion of 3 × 10−4 per −5 the Φ = π/2 operating point (at Φ = π/2, dl/dΦ di- 80 MHz, a dielectric loss tangent of tan δ = 10 , and an e e e verges). While the rising-edge of the finite bandwidth Ωb/(2π) = 2 GHz modulation bandwidth. flux signal approaches (and then overshoots) its target value of π/2, the efficacy of the switches is diminished until the control flux settles. 6

(a) 0 IV. CONCLUSION 4 21

11 1 3 We have described the theory of operation for a broadband and low-loss circulator based on active modulation and delay. The device may be understood as a network 2 31

[dB] -20 of two simple components: transfer switches and delays. Design of a superconducting implementation was pre- sented and discussed in terms of the optimal modulation rate Ω, a key design parameter. The device was then sim- 41 ulated numerically: isolation is greater than 20 dB while insertion loss is less than 0.35 dB over a bandwidth of 2.3 -40 GHz. Based on comparison with demonstrated Joseph- 4 8 12 probe frequency [GHz] son junction based switches, its 1-dB compression point is expected to be 65 dBm. (b) 0 − The proposed circulator therefore represents a ma- -20 2Ω/(2$)2Ω/(2$) jor advance in on-chip non-reciprocity, improving on the [dB] bandwidth and power-handling of other near-lossless de-

inc inc -40 vices [1–3] by more than a factor of 50. These gains be- -60 come especially powerful when the broadband circulator

!(")/! is combined with a linear and broadband near-quantum -80 5 6 7 limited amplifier [4, 6]. Such a quantum microwave re- transmitted spectrum [GHz] ceiver, which would be linear at powers 106 times greater than a typical qubit readout tone, and operable over a bandwidth 103 times greater than a typical readout- cavity’s coupling rate, could allow for the simultaneous Simulated performance. FIG. 4. Time-domain numerical readout of many qubits in an on-chip package. simulations of the circulator, with transfer switches formed from symmetric lattices of tunable inductors modulated at Acknowledgment The authors thank Jiansong Gao, × Ω = 2π 80 MHz. (a) First column of the simulated scattering Bradley Moores, and Xian Wu for helpful discussions. matrix, when the device is configured for counter-clockwise circulation. The horizontal line at −20 dB is a guide to the E.I.R acknowledges support from the ARO QuaCGR fel- eye. (b) Power spectrum of the signal emerging from the lowship. This work is supported by the ARO under con- circulator’s second port, when the circulator is driven by a 6 tract W911NF-14-1-0079 and the National Science Foun- GHz tone incident on its first port. Power is normalized to dation under Grant Number 1125844. the incident signal power Pinc. The thin black trace shows the same quantity in a simulation with infinite modulation bandwidth. Appendix A: Circulator scattering parameters

Analysis of the network in Fig. 1a is simplified by sep- arately considering even and odd excitations of the net- The ripple in the scattering parameters has a free spec- work’s left and right sides. Let the matrix U describe the tral range of 2Ω, and is caused by small reflections at the unitary transformation between the numbered port basis second transfer switch. As these reflections take two ex- and the basis of left/right and even/odd excitations: tra passes through the delay lines, they experience an additional delay of 2τ = π/Ω before interfering with the 101 0 un-reflected signal. 1 010 1 Despite the coordinated modulation used to create cir- U =   . (A1) √2 1 0 1 0 culation, the majority of the transmitted power is un-  −  changed in frequency. The orange trace in Fig. 4b shows  01 0 1    the spectral content of the signal exiting the circulator’s  −  second port, when the first port is driven by a 6 GHz We assume that both the switches and delay lines are tone. Most of the power ( 0.28 dB) emerges at 6 GHz. impedance matched. We also initially assume loss- Sidebands detuned from 6−GHz by multiples of 2Ω/(2π) less, distortion-less delays and infinite switch-modulation are also visible. The largest of these sidebands is less than bandwidth. These last three assumptions are relaxed at 27 dB. For reference, the thin black trace also shows the the conclusion of the derivation. same− simulation with infinite modulation bandwidth. Al- Even excitations are unaffected by the state of the though they are suppressed by over 45 dB, modulation switches. As all of the network’s components are sidebands are still present in the spectrum. They are impedance matched by assumption, common mode ex- caused by the finite isolation of the transfer switches. citations are unaltered as they propagate through the 7 network. The scattering matrix for the even mode exci- which is 1 when Ωτ θ =0. − tations Se is therefore: For a left-propagating wave, the action of the network is given by the reverse-ordered product, LDR. For a 0 1 Se = . (A2) pure tone at ω, 1 0 ! 4 ejkΩτ ejkθ lm (LDR)m = , (A9) To analyze the network’s odd dynamics, we introduce ≡ 0 −π2 (m k)k k a vector whose entries describe the spectral content aω X − at the sidebands of the modulation frequency Ω: when m is even. By examination, we can then see that . the spectral weight at the input frequency is . 4 ejk(Ωτ+θ)  aω  (LDR) = , (A10) +2Ω 00 π2 k2 k  aω+Ω  X   aω =  a  . (A3) which is 1 when Ωτ + θ =0.  ω    The scattering matrix for the odd mode excitations So  aω−Ω    is therefore:  aω−2Ω     .  0 lm  .  So = . (A11)     rm 0 ! We choose to index this infinite-dimensional vector with positive and negative indices, and designate the term aω Note that this scattering matrix describes the way the as the 0 index. network scatters an incident signal among its physical Let us define the modulation of a single transfer switch ports, as well as effective ports indexed by m, which rep- which is square-wave biased with phase φ as H(t) resent signals at sidebands of the modulation rate Ω. sign [sin(Ωt + φ)]. By Fourier decomposition, ≡ Finally, to recover the full scattering matrix in the − − numbered port basis we perform the inverse transforma- 2 ejnφejnΩt e jnφe jnΩt −1 H(t)= − , (A4) tion, S = U Se,oU. Here, Se,o is a block-diagonal ma- jπ n n trix with diagonal entries Se and So. This yields: X 1 where the sum runs over positive odd integers. S = (A12) Written in this way, the action of a switch on the vector 2 × a ω can be expressed as a matrix. In element-wise form, 0 δm,0 + lm 0 δm,0 lm this matrix may be defined piece-wise as − δm, rm 0 δm, + rm 0  0 − 0  , 0 if m n even, 0 δm,0 lm 0 δm,0 + lm Hmn(φ)= j(m−n)φ − (A5)  −  2e if m n odd.  δ + r 0 δ r 0  ( jπ(m−n) −  m,0 m m,0 m   −  The action of the delay lines is represented by a diag- which reduces to the ideal scattering matrix for a four- onal matrix with elements port circulator when the operation condition Ωτ = π/2= θ is satisfied. It also provides additional information D = ejmΩτ δ . (A6) mn m,n ±about how the network adds sidebands when this crite- We may now calculate the action of the full cascaded rion is violated. network, formed by a left switch with φ =0 (represented The above frequency-domain analysis makes a conve- by the matrix L H(0)), a delay (represented by the nient starting-point for studies of group delay disper- matrix D), and a right≡ switch with φ = θ (represented by sion, frequency-dependent loss, and finite modulation the matrix R H(θ)). This network transforms a right- bandwidth. To account for group delay dispersion and propagating differential≡ excitation by the matrix product frequency-depdendent loss, the delay matrix elements be- RDL. If the right-propagating excitation is a pure tone come with frequency , the output of the network at the th ω m ′ jmΩτm sideband is Dmn = ame δm,n. (A13) 4 ejkΩτ ej(m−k)θ The frequency-dependence of the delay and attenuation rm (RDL)m = , (A7) ≡ 0 −π2 (m k)k in the line are now accounted for by the terms τm and k X − am. if m is even and 0 if m is odd. Here the sum on k runs To handle finite modulation bandwidth, we assume over all (positive and negative) odd integers. The signal that for “intermediate” biasing, the symmetric lattice is transmitted at the input frequency is therefore approximately balanced. In this configuration, the even- mode scattering matrix is unchanged from Eq. (A2), 4 ejk(Ωτ−θ) (RDL) = , (A8) and the odd-mode scattering matrix is perfectly reflec- 00 π2 k2 k tive (the two-by-two identity matrix), with some overall X 8 undetermined phase. The full network therefore scatters Appendix B: Transfer switch scattering parameters incident signals promptly, dividing their power equally between all ports. In this limit, finite modulation band- Here we derive an analytic expression for the scatter- width may be treated by truncating the sum in k. ing matrix of the four-port transfer switch in Fig. 2a. Together, these three effects give revised expressions This switch has two types of inductors, lt and lc, along ′ ′ for lm and rm which we denote lm and rm: with capacitors c and ports of characteristic impedance Z0. To obtain the frequency dependent scattering ma- kmax jkΩτ jkθ trix S[ω], we first calculate the admittance matrix Y[ω] ′ 4 e k e l = ak , (A14) of this circuit in the manner discussed in Ref. [39] and m −π2 (m k)k k references therein: X − kmax jkΩτ j(m−k)θ T ′ 4 e k e Y[ω]= A y[ω] A, (B1) r = ak . m −π2 (m k)k k A X − where is the incidence matrix describing nodal connec- tivity of the network, and y is the primitive admittance ′ ′ When kmax is finite, lm and rm have magnitudes which matrix describing the voltage current relationship across are less than 1, and Eq. (A13) is amended in two ways. each chord of the network. First, the diagonal elements in the even and odd rows The circuit described in Fig. 2a has four nodes in ad- become ˜lm/2 and r˜m/2, respectively. These parameters dition to ground (each node labeled by the number of are constrained by conservation of energy to have mag- the port connected to it) and eight chords (chord num- ˜ 2 2 nitudes lm = 1 lm and r˜m = 1 rm. Second, bers 1 through 4 across the inductors, and chord numbers the transmission| | elements− which| were| perfectly− vanishing 5 through 8 connecting the capacitors to ground). The become ˜l /2 pin the odd rows and pr˜ /2 in the even incidence matrix A is therefore the 8 4 matrix, m m × rows. − − 1 10 0 − 1 1 0 0 1 (a) (c)  −  0 11 0  −    0 0 1 1 A =  −  , (B2) 0.5 10 00    01 00    ins. lossins.[dB]   00 10    00 01  0   0   (b) (d) and the primitive admittance matrix is the 8 8 diagonal matrix, × -20

! = 0 1 1 1 1 -40 y[ω]= diag , , , ,jωc,jωc,jωc,jωc . ! = ±2 {jωlt jωlc jωlc jωlt }

isolation[dB] -60 ! = ±4 (B3) ! = ±6 Substituting Eq. (B2) and Eq. (B3) into Eq. (B1) pro-

-5 -3 -1 0 1 2 3 vides a straightforward construction of the admittance 10 10 10 10 10 10 10 matrix, which is readily transformed into the four-port group delay disp. [/Ω] mod. bw [Ω/2 ] scattering matrix via the formula [26]:

−1 FIG. 5. Performance in the presence of non-idealities. S[ω] = (I + Z0Y[ω]) (I Z0Y[ω]) . (B4) The effects of group delay dispersion (a-b) and finite modu- − lation bandwidth (c-d) on the circulator’s insertion loss (a,c) Here I is the 4 4 identity matrix. and isolation (b,d), calculated with Eq. (A14) The analytic× expression for S[ω] can now be expanded in ǫ, the small parameter which describes bridge imbalance. We assume the switch is in its crossed position, and take lt = l0/ǫ and lc = l0. To further simplify Results from this revised expression are plotted in the result, we also introduce the capacitive time con- Fig. 5, which shows the design’s sensitivity to group de- stant τc = Z0c. The network described in Fig. 2a then lay dispersion in the network’s delay lines (a-b) and the functions as a matched crossover switch when the condi- 2 2 2 finite modulation bandwidth of its transfer switches (c- tion l0/(2c)= Z0 / 1+ ω τc is met—that is, when the d). For each case, the insertion loss (a,c) and isolation impedance of the resonator l /(2c) equals the char- 0 (b,d) are plotted. acteristic impedance of the surrounding lines Z , and p 0 9

ω2τ 2 1. Enforcing this condition, the first column (a) c ≪ of the switch’s scattering matrix is, top τ 2ω2 1 S = ǫ | c − | + (ǫ2), (b) | 11| 2τ ω O c top S = S , 21 11 | | | | 2 τcω + j S = ǫ | | + (ǫ2), (c) | 31| 2τ ω O c side j + τ ω (τ ω + j)2 S = c jǫ c + (ǫ2). | 41| j τ ω − 2τ ω O c c − FIG. 6. Tunable inductor design. (a) Top view of a lad- (B5) der of alternating rf-SQUIDs, as studied in Refs. [6, 27]. The linear inductors may be realized either with the geometric in- Eq. (B5) shows that the switch’s isolation and return loss ductance of galvanic connections, or with high critical current scale linearly with ǫ in the limit of large imbalance. Josephson junctions. When biased close to frustration the impedance of the array can exceed a resistance quantum [27]. (b) Top view of a series-array of dc-SQUIDs, with SQUID loops in the plane of the chip. The tunability of such arrays may be limited by the geometric inductance of the SQUID Appendix C: Widely tunable dc-SQUID inductors loops. (c) Side view of a series array of dc-SQUIDs, with SQUID loops orthogonal to the plane of the chip. In this In this section we discuss two ways to make the highly "vertical" geometry, the vertical dimension of the loop is set tunable inductors needed for the transfer switch. The by the inter-layer spacing, which can substantially reduce the first uses laddered arrays of Josephson junctions, as de- loop’s geometric inductance [40]. picted in Fig. 6a. Inductors of this type are demonstrated and discussed in Refs. [6, 27]. The second uses arrays of dc-SQUIDs formed by two Appendix D: Cross-talk and added noise Josephson junctions arranged in parallel. The tunability of a dc-SQUID may be limited by a) the degree to which the critical currents of the two junctions may be In principle, a circulator based on delays and dynam- made identical, and b) the geometric inductance of the ically modulated switches need not add noise. Firstly, loop [38]. Cascading an array of these elements in se- an ideal circulator functions with unit gain, so noiseless ries dilutes the nonlinearity by decreasing the supercon- circulation is permitted by the fundamental theorem for ducting phase drop across each junction, thus increasing phase-insensitive amplifiers [41]. Secondly, dynamically power-handling [29]. modulated switches may route signals without adding noise [42]. Nevertheless, the proposed circulator is an In an optical lithographic process where the SQUID active, flux-actuated device. It may therefore add noise is fabricated in the plane of the chip (see schematic in via the fluctuations of its control flux. Fig. 6b), such a loop can be made no smaller than several These variations around the optimal flux bias point microns on a side. For Josephson junctions with critical may cause stochastic changes in the circulator’s scatter- currents on the scale of 10 µA, the geometric inductance ing parameters. The result is a sort of multiplicative of such a loop is often the limitation on tunability. noise on the circulated signal. This may be mitigated That limitation can be removed by orienting the by thermalizing the bias lines to cryogenic temperatures, SQUID “vertically”, such that a vector normal to its loop where the Johnson noise is small relative to the 100 µA is parallel with the chip’s surface (Fig. 6c). The small di- bias currents that generate the flux controls. In≈ similar mension of the loop is now determined by the inter-layer flux-modulated circulators, thermalization at 4 K keeps separation ( 100 nm), rather than the minimum feature ≈ added noise below half a photon; further reduction is size in the optical lithographic process. This decreases possible with filtering or thermalization to lower temper- the volume in which the loop can store magnetic energy atures [3]. by a factor of 50, reducing its geometric inductance by ≈ Cross-talk between the bias lines and the microwave the same amount [40]. circuit can also create unwanted photons at the circula- Critical current symmetry is a process dependent tor’s output. Effects caused by spurious coupling may quantity, but for niobium trilayer processes variations be reduced with careful layout, such as designing flux are typically below 5% [33]. Subject to that limitation, a lines that are higher-order multipole sources of magnetic vertical SQUID with nominal junction critical currents of field, to decrease the range over which stray fluxes are 10 µA could be tuned by a factor of 40. This is the basis broadcast. But even by itself, the intentional coupling for our estimate that ǫ 2.5 10−2 would be possible engineered between the bias lines and the loops of the with such a design. ≤ × SQUIDs may be problematic, as it can allow the time- 10

state dynamics to obtain the power spectral density p(f). (a) (b) Φ We ﬁx the junction assymmetry at 5%, neglect the geometric inductance of the junctions, and take the the Φ capacitance to be cJ = 180 fF and the quality factor to be Q =3.5. Power-balance then allows expression of the steady-state photon occupation nss in a cavity irradiated by this noise source: (c) p(f) 0 nss . (D1) 10 ≤ ~ω

We write Eq. (D1) as an inequality to indicate that it 10 -4 is a kind of worst-case scenario: if any of the flux Φe is returned within the Amperian loop drawn in Fig. 7b, the 10 -8 4 6 8 irradiated noise will decrease; it vanishes completely in [GHz] the limit where the flux is returned symmetrically within (and outside of) the Amperian loop. FIG. 7. Noise from active flux control. (a) Circuit model Fig. 7c shows the steady-state photon number at fre- for noise from a dynamically modulated flux Φe. (b) Alter- quencies between 4 and 8 GHz, for a flux signal comprised of the first 25 terms in the Fourier series of an Ω=2π 80 nate representation for the circuit in (a). The pink path traces × an Amperian loop which encloses a time-varying flux. The MHz square wave (blue trace). The presence of non-zero resulting electromotive force drives current through the resis- occupation at frequencies above the largest spectral com- tors. (c) Steady-state photon number vs photon frequency ponent of the modulation (2 GHz) is a signature of the for the circuit in (b), calculated with Eq. (D1). The three SQUID’s nonlinearity. traces show the resulting occupations when the external flux Photon population is well above the 10−4 threshold Φe(t) is modulated with a Fourier-series approximation of an for residual cavity occupation now being≈ approached in × Ω = 2π 80 MHz square wave capped at 2 GHz (olive), a circuit QED experiments [44–46], but this may be im- sigma approximation [43] of an Ω = 2π × 80 MHz square wave capped at 2 GHz (purple), and a sigma approximation proved by regulation of the flux control signal’s spectral of an Ω = 2π × 15 MHz square wave capped at 750 MHz content. The purple trace in Fig. 7d shows the same (teal). measurement, now performed with a sigma approximation [43] of the square wave—essentially a low-pass fil- tered square wave. The resulting occupancies are suppressed by several orders of magnitude. Reducing the modulation rate to Ω=2π 15 MHz and capping the × varying control flux to drive current out of the circulator’s modulation bandwidth at 750 MHz provides an addi- ports. Fig. 7a illustrates how this can happen in a sim- tional reduction in the occupancy (teal trace). The price ple model comprised of a dc SQUID with self-capacitance of this filtering is paid in loss. Because the switching time is increased by the 750 MHz cap on the modulation cJ , inserted into a transmission line of characteristic bandwidth, insertion loss climbs to 0.5 dB. impedance Z0. As each transmission line presents a Ultimately, the above analysis is meant− to model how Z0 path to ground, there exist finite-impedance Ampe- rian loops that carry current out of the circuit when a junction’s nonlinearity can mix flux control signals up in frequency, and how these microwave photons are emit- dΦe/dt =0 (see Fig. 7b). 6 ted out of the circulator’s ports. This radiation can be In this manner, the flux bias can create photons at a controlled by regulating the modulation spectrum, and range of frequencies. To quantify this effect, we numer- with symmetric arrangement of the bias lines in layout. ically integrate the classical equation of motion for the Nevertheless, this model is merely an approximation: we circuit in Fig. 7b [38], and Fourier transform its steady- discuss it here to illustrate possible recourse.

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