Intel Fellow, Technology and Manufacturing Group Director, Interconnect Technology and Integration
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Mack DFM Keynote
The future of lithography and its impact on design Chris Mack www.lithoguru.com 1 Outline • History Lessons – Moore’s Law – Dennard Scaling – Cost Trends • Is Moore’s Law Over? – Litho scaling? • The Design Gap • The Future is Here 2 1965: Moore’s Observation 100000 65,000 transistors 10000 Doubling each year 1000 100 Components per chip per Components 10 64 transistors! 1 1959 1961 1963 1965 1967 1969 1971 1973 1975 Year G. E. Moore, “Cramming More Components onto Integrated Circuits,” Electronics Vol. 38, No. 8 (Apr. 19, 1965) pp. 114-117. 3 Moore’s Law “Doubling every 1 – 2 years” 25 nm 100000000000 10000000000 feature size + die size 1000000000 100000000 10000000 1000000 Today only lithography 100000 25 µm contributes 10000 1000 Componentsper chip 100 feature size + die size + device cleverness 10 1 1959 1969 1979 1989 1999 2009 2019 Year 4 Dennard’s MOSFET Scaling Rules Device/Circuit Parameter Scaling Factor Device dimension/thickness 1/ λ Doping Concentration λ Voltage 1/ λ Current 1/ λ Robert Dennard Capacitance 1/ λ Delay time 1/ λ Transistorpower 1/ λ2 Power density 1 There are no trade-offs. Everything gets better when you shrink a transistor! 5 The Golden Age 1975 - 2000 • Dennard Scaling - as transistor shrinks it gets: – Faster – Lower power (constant power density) – Smaller/lighter • Moore’s Law – More transistors/chip & cost of transistor = ‒15%/year • More powerful chip for same price • Same chip for lower price – Many new applications – large increase in volume 6 Problems with Dennard Scaling • Voltage stopped shrinking -
Characterization of the Cmos Finfet Structure On
CHARACTERIZATION OF THE CMOS FINFET STRUCTURE ON SINGLE-EVENT EFFECTS { BASIC CHARGE COLLECTION MECHANISMS AND SOFT ERROR MODES By Patrick Nsengiyumva Dissertation Submitted to the Faculty of the Graduate School of Vanderbilt University in partial fulfillment of the requirements for the degree of DOCTOR OF PHILOSOPHY in Electrical Engineering May 11, 2018 Nashville, Tennessee Approved: Lloyd W. Massengill, Ph.D. Michael L. Alles, Ph.D. Bharat B. Bhuva, Ph.D. W. Timothy Holman, Ph.D. Alexander M. Powell, Ph.D. © Copyright by Patrick Nsengiyumva 2018 All Rights Reserved DEDICATION In loving memory of my parents (Boniface Bimuwiha and Anne-Marie Mwavita), my uncle (Dr. Faustin Nubaha), and my grandmother (Verediana Bikamenshi). iii ACKNOWLEDGEMENTS This dissertation work would not have been possible without the support and help of many people. First of all, I would like to express my deepest appreciation and thanks to my advisor Dr. Lloyd Massengill for his continual support, wisdom, and mentoring throughout my graduate program at Vanderbilt University. He has pushed me to look critically at my work and become a better research scholar. I would also like to thank Dr. Michael Alles and Dr. Bharat Bhuva, who have helped me identify new paths in my research and have been a constant source of ideas. I am also very grateful to Dr. W. T. Holman and Dr. Alexander Powell for serving on my committee and for their constructive comments. Special thanks go to Dr. Jeff Kauppila, Jeff Maharrey, Rachel Harrington, and Tim Haeffner for their support with test IC designs and experiments. I would also like to thank Dennis Ball (Scooter) for his tremendous help with TCAD models. -
The End of Moore's Law and Faster General Purpose Computing, and A
The End of Moore’s Law & Faster General Purpose Computing, and a Road Forward John Hennessy Stanford University March 2019 The End of an Era • 40 years of stunning progress in microprocessor design • 1.4x annual performance improvement for 40+ years ≈ 106 x faster (throughput)! • Three architectural innovations: • Width: 8->16->64 bit (~4x) • Instruction level parallelism: • 4-10 cycles per instruction to 4+ instructions per cycle (~10-20x) • Multicore: one processor to 32 cores (~32x) • Clock rate: 3 MHz to 4 GHz (through technology & architecture) • Made possible by IC technology: • Moore’s Law: growth in transistor count • Dennard Scaling: power/transistor shrinks as speed & density increase • Power = frequency x CV2 • Energy expended per computation was reducing Future processors 1 THREE CHANGES CONVERGE • Technology • End of Dennard scaling: power becomes the key constraint • Slowdown in Moore’s Law: transistors cost (even unused) • Architectural • Limitation and inefficiencies in exploiting instruction level parallelism end the uniprocessor era. • Amdahl’s Law and its implications end the “easy” multicore era • Application focus shifts • From desktop to individual, mobile devices and ultrascale cloud computing, IoT: new constraints. Future processors 2 UNIPROCESSOR PERFORMANCE (SINGLE CORE) Performance = highest SPECInt by year; from Hennessy & Patterson [2018]. Future processors 3 MOORE’S LAW IN DRAMS 4 THE TECHNOLOGY SHIFTS MOORE’S LAW SLOWDOWN IN INTEL PROCESSORS 10X Cost/transisto r slowing down faster, due to fab costs. Future processors 5 TECHNOLOGY, POWER, AND DENNARD SCALING 200 4.5 180 4 Technology (nm) 160 3.5 Energy/nm^2 140 3 120 2.5 100 2 80 1.5 60 Namometers 1 40 20 0.5 nm^2 per Power Relative 0 0 2000 2002 2004 2006 2008 2010 2012 2014 2016 2018 2020 Power consumption Energy scaling for fixed task is better, since more & faster xistors. -
Risk Factors
Risk Factors •Today’s presentations contain forward-looking statements. All statements made that are not historical facts are subject to a number of risks and uncertainties, and actual results may differ materially. Please refer to our most recent Earnings Release and our most recent Form 10-Q or 10-K filing for more information on the risk factors that could cause actual results to differ. •If we use any non-GAAP financial measures during the presentations, you will find on our website, intc.com, the required reconciliation to the most directly comparable GAAP financial measure. Rev. 4/19/11 Today’s News The world’s first 3-D Tri-Gate transistors on a production technology New 22nm transistors have an unprecedented combination of power savings and performance gains. These benefits will enable new innovations across a broad range of devices from the smallest handheld devices to powerful cloud-based servers. The transition to 3-D transistors continues the pace of technology advancement, fueling Moore’s Law for years to come. The world’s first demonstration of a 22nm microprocessor -- code-named Ivy Bridge -- that will be the first high-volume chip to use 3-D Tri-Gate transistors. Energy-Efficient Performance Built on Moore’s Law 1 65nm 45nm 32nm 22nm 1x 0.1x > 50% 0.01x reduction Lower Active Power Active Lower Lower Transistor Leakage Transistor Lower Active Power per Transistor (normalized) Transistor per Power Active 0.001x Constant Performance 0.1 65nm 45nm 32nm 22nm Higher Transistor Performance (Switching Speed) Planar Planar Planar Tri-Gate Source: Intel 22 nm Tri-Gate transistors increase the benefit from a new technology generation Source: Intel Transistor Innovations Enable Technology Cadence 2003 2005 2007 2009 2011 90 nm 65 nm 45 nm 32 nm 22 nm Invented 2nd Gen. -
AI Chips: What They Are and Why They Matter
APRIL 2020 AI Chips: What They Are and Why They Matter An AI Chips Reference AUTHORS Saif M. Khan Alexander Mann Table of Contents Introduction and Summary 3 The Laws of Chip Innovation 7 Transistor Shrinkage: Moore’s Law 7 Efficiency and Speed Improvements 8 Increasing Transistor Density Unlocks Improved Designs for Efficiency and Speed 9 Transistor Design is Reaching Fundamental Size Limits 10 The Slowing of Moore’s Law and the Decline of General-Purpose Chips 10 The Economies of Scale of General-Purpose Chips 10 Costs are Increasing Faster than the Semiconductor Market 11 The Semiconductor Industry’s Growth Rate is Unlikely to Increase 14 Chip Improvements as Moore’s Law Slows 15 Transistor Improvements Continue, but are Slowing 16 Improved Transistor Density Enables Specialization 18 The AI Chip Zoo 19 AI Chip Types 20 AI Chip Benchmarks 22 The Value of State-of-the-Art AI Chips 23 The Efficiency of State-of-the-Art AI Chips Translates into Cost-Effectiveness 23 Compute-Intensive AI Algorithms are Bottlenecked by Chip Costs and Speed 26 U.S. and Chinese AI Chips and Implications for National Competitiveness 27 Appendix A: Basics of Semiconductors and Chips 31 Appendix B: How AI Chips Work 33 Parallel Computing 33 Low-Precision Computing 34 Memory Optimization 35 Domain-Specific Languages 36 Appendix C: AI Chip Benchmarking Studies 37 Appendix D: Chip Economics Model 39 Chip Transistor Density, Design Costs, and Energy Costs 40 Foundry, Assembly, Test and Packaging Costs 41 Acknowledgments 44 Center for Security and Emerging Technology | 2 Introduction and Summary Artificial intelligence will play an important role in national and international security in the years to come. -
3D-AFM Measurements for Semiconductor Structures and Devices
3D-AFM Measurements for Semiconductor Structures and Devices Ndubuisi G. Orji and Ronald G. Dixson Engineering Physics Division Physical Measurement Laboratory National Institute of Standards and Technology Gaithersburg, MD, 20899, USA Abstract This book chapter reviews different types of three-dimensional atomic force microscope (3D-AFM) measurements for semiconductor metrology. It covers different implementations of 3D-AFM, calibrations methods, measurement uncertainty considerations and applications. The goal is to outline key aspects of 3D-AFM for dimensional semiconductor measurements in a way that is accessible to both new and experienced users and gives readers a strong foundation for further study. Preprint version For published version see: N. G. Orji & R. G. Dixson “3D-AFM Measurements for Semiconductor Structures and Devices” In Metrology and Diagnostic Techniques for Nanoelectronics (eds. Z. Ma, & D. G. Seiler) (Pan Stanford, 2017). Official contributions of the U.S. Government, not subject to copyright. Certain commercial equipment, instruments, materials or companies are identified in this paper in order to specify the experimental procedure adequately, or to give full credit to sources of some material. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor is it intended to imply that the materials or equipment identified are necessarily the best available for the purpose. 3D-AFM Measurements for Semiconductor Structures and Devices Table of -
Introducing 10-Nm Finfet Technology in Microwind Etienne Sicard
Introducing 10-nm FinFET technology in Microwind Etienne Sicard To cite this version: Etienne Sicard. Introducing 10-nm FinFET technology in Microwind. 2017. hal-01551695 HAL Id: hal-01551695 https://hal.archives-ouvertes.fr/hal-01551695 Submitted on 30 Jun 2017 HAL is a multi-disciplinary open access L’archive ouverte pluridisciplinaire HAL, est archive for the deposit and dissemination of sci- destinée au dépôt et à la diffusion de documents entific research documents, whether they are pub- scientifiques de niveau recherche, publiés ou non, lished or not. The documents may come from émanant des établissements d’enseignement et de teaching and research institutions in France or recherche français ou étrangers, des laboratoires abroad, or from public or private research centers. publics ou privés. APPLICATION NOTE 10 nm technology Introducing 10-nm FinFET technology in Microwind Etienne SICARD Professor INSA-Dgei, 135 Av de Rangueil 31077 Toulouse – France www.microwind.org email: [email protected] This paper describes the implementation of a high performance FinFET-based 10-nm CMOS Technology in Microwind. New concepts related to the design of FinFET and design for manufacturing are also described. The performances of a ring oscillator layout and a 6-transistor RAM memory layout are also analyzed. 1. Technology Roadmap Several companies and research centers have released details on the 14-nm CMOS technology, as a major step for improved integration and performances, with the target of 7-nm process by 2020. We recall in -
Review Article Finfets: from Devices to Architectures
Hindawi Publishing Corporation Advances in Electronics Volume 2014, Article ID 365689, 21 pages http://dx.doi.org/10.1155/2014/365689 Review Article FinFETs: From Devices to Architectures Debajit Bhattacharya and Niraj K. Jha Department of Electrical Engineering, Princeton University, Princeton, NJ 08544, USA Correspondence should be addressed to Niraj K. Jha; [email protected] Received 4 June 2014; Accepted 23 July 2014; Published 7 September 2014 Academic Editor: Jaber Abu Qahouq Copyright © 2014 D. Bhattacharya and N. K. Jha. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. Since Moore’s law driven scaling of planar MOSFETs faces formidable challenges in the nanometer regime, FinFETs and Trigate FETs have emerged as their successors. Owing to the presence of multiple (two/three) gates, FinFETs/Trigate FETs are able to tackle short-channel effects (SCEs) better than conventional planar MOSFETs at deeply scaled technology nodes and thus enable continued transistor scaling. In this paper, we review research on FinFETs from the bottommost device level to the topmost architecture level. We survey different types of FinFETs, various possible FinFET asymmetries and their impact, and novel logic- level and architecture-level tradeoffs offered by FinFETs. We also review analysis and optimization tools that are available for characterizing FinFET devices, circuits, and architectures. 1. Introduction (), drain-induced barrier lowering (DIBL), and threshold voltage ( th) roll-off. Improvement in these metrics implies Relentless scaling of planar MOSFETs over the past four less degradation in the transistor’s th with continued scaling, decades has delivered ever-increasing transistor density and which in turn implies less degradation in off . -
Electrical Characterization and Modeling of Low Dimensional Nanostructure FET Jae Woo Lee
Electrical characterization and modeling of low dimensional nanostructure FET Jae Woo Lee To cite this version: Jae Woo Lee. Electrical characterization and modeling of low dimensional nanostructure FET. Autre. Université de Grenoble; 239 - Korea University, 2011. Français. NNT : 2011GRENT070. tel- 00767413 HAL Id: tel-00767413 https://tel.archives-ouvertes.fr/tel-00767413 Submitted on 19 Dec 2012 HAL is a multi-disciplinary open access L’archive ouverte pluridisciplinaire HAL, est archive for the deposit and dissemination of sci- destinée au dépôt et à la diffusion de documents entific research documents, whether they are pub- scientifiques de niveau recherche, publiés ou non, lished or not. The documents may come from émanant des établissements d’enseignement et de teaching and research institutions in France or recherche français ou étrangers, des laboratoires abroad, or from public or private research centers. publics ou privés. THÈSE Pour obtenir le grade de DOCTEUR DE LUNIVERSITÉ DE GRENOBLE Spécialité : Micro et Nano Électronique Arrêté ministériel : 7 août 2006 Présentée par Jae Woo LEE Thèse dirigée par Mireille MOUIS et Gérard GHIBAUDO préparée au sein du Laboratoire IMEP-LAHC dans l'École Doctorale EEATS Caractérisation électrique et modélisation des transistors à effet de champ de faible dimensionnalité Thèse soutenue publiquement le 5 décembre 2011 devant le jury composé de : M. Gérard GHIBAUDO DR CNRS Alpes-IMEP/INPG, Président M. Jong-Tae PARK Dr Incheon University, Rapporteur M. Jongwan JUNG Dr Sejong University, Rapporteur -
United States Securities and Exchange Commission Form
UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 OR 15(d) of The Securities Exchange Act of 1934 Date of Report: November 20, 2014 (Date of earliest event reported) INTEL CORPORATION (Exact name of registrant as specified in its charter) Delaware 000-06217 94-1672743 (State or other jurisdiction (Commission (IRS Employer of incorporation) File Number) Identification No.) 2200 Mission College Blvd., Santa Clara, California 95054-1549 (Address of principal executive offices) (Zip Code) (408) 765-8080 (Registrant's telephone number, including area code) (Former name or former address, if changed since last report) Check the appropriate box below if the Form 8-K filing is intended to simultaneously satisfy the filing obligation of the registrant under any of the following provisions (see General Instruction A.2. below): [ ] Written communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425) [ ] Soliciting material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12) [ ] Pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR 240.14d-2(b)) [ ] Pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR 240.13e-4c)) Item 7.01 Regulation FD Disclosure The information in this report shall not be treated as filed for purposes of the Securities Exchange Act of 1934, as amended. On November 20, 2014, Intel Corporation presented business and financial information to institutional investors, analysts, members of the press and the general public at a publicly available webcast meeting (the "Investor Meeting"). -
The Breakthrough Advantage for Fpgas with Tri-Gate Technology
WHITE PAPER FPGA The Breakthrough Advantage for FPGAs with Tri-Gate Technology Transistor design transitions from traditional planar to 3-D structures provide a significant boost in the capabilities of high-performance programmable logic. Authors Introduction Ryan Kenny In February 2013, Altera® and Intel® Corporation jointly announced that the next Senior Product Marketing Manager generation of Altera’s highest performance FPGA products would be produced Intel Programmable Solutions Group using Intel’s 14 nm 3-D Tri-Gate transistor technology exclusively. In December 2015, Intel completed the acquisition of Altera. This makes Intel the exclusive Jeff Watt major FPGA provider of the most advanced, highest performance semiconductor Technical Fellow technology available. To understand the impact of Tri-Gate technology on the Intel Programmable Solutions Group capabilities of high-performance FPGAs, and how significant this advantage is in digital circuit speed, power, and production availability, a background on the development and state of Tri-Gate and related technologies is offered here. Transistor design background In 1947 the first transistor, a germanium ‘point-contact’ structure, was demonstrated at Bell Laboratories. Silicon was first used to produce bipolar transistors in 1954, but it was not until 1960 that the first silicon metal oxide semiconductor field-effect transistor (MOSFET) was built. The earliest MOSFETs Table of Contents were 2D planar devices with current flowing along the surface of the silicon under Introduction . .1 the gate. The basic structure of MOSFET devices has remained substantially unchanged for over 50 years. Transistor Design Background. .1 Since the prediction or proclamation of Moore’s Law in 1965, many additional Important Turning Point in enhancements and improvements have been made to the manufacture and Transistor Technology. -
ZERO DEFECTS November 2015 Entegris Newsletter
ZERO DEFECTS November 2015 Entegris Newsletter CONTENTS Entegris Expands CMP Filtration Technology 1. Entegris News Solutions and Research, Analytical and Entegris Expands CMP Filtration Technology Solutions and Research, Manufacturing Capabilities in Taiwan Analytical and Manufacturing Capabilities in Taiwan Microcontamination Control business SmartStack® 300 mm Contactless unit, Clint Haris. “Entegris continues to HWS Launch @ SEMICON® Europa invest in people, technology and facilities 2. Yield Improvement in Asia to introduce new solutions for the Tackling Materials Contamination semiconductor market. As our customers Control Complexities Below 22 nm produce integrated circuits with smaller Entegris Announces New feature sizes, our nanofiber technology reduces the number of defect-causing VaporSorb™ TRK Filter for Entegris announced at the SEMICON® contaminants from reaching the wafer.” Advanced Yield Protection in Taiwan tradeshow the development of Semiconductor Lithography a platform of CMP filtration solutions The Entegris filter platform using NMB Processing using nano-melt-blown (NMB) filtration media now includes the Planargard® bulk, 5. Innovation technology, as well as the expansion of Solaris® point-of-tool and Planarcap® Diffusion, a Key Parameter to its CMP research, analytical services and point-of-dispense families to provide Understand Contamination manufacturing capabilities in Taiwan. contamination control solutions through- Phenomena in FOUPs: These investments enable the company out the CMP process area. Developed and - Part 1 – Polymer Transport to further serve the growing demand for manufactured in Taiwan, the NMB media Coefficients Obtention advanced CMP filtration solutions. utilizes the increased porosity of the nanofibers to reduce shear stress placed - Part 2 – Coefficients Application “CMP processes continue to grow in upon the slurry during transport and in Numerical Simulation complexity in both the materials used filtration operations.