Extended Summary 本文は pp.102-107 Development of MEMS Capacitive Sensor Using a MOSFET Structure Hayato Izumi Non-member (Kansai University,
[email protected]) Yohei Matsumoto Non-member (Kansai University,
[email protected] u.ac.jp) Seiji Aoyagi Member (Kansai University,
[email protected] u.ac.jp) Yusaku Harada Non-member (Kansai University,
[email protected] u.ac.jp) Shoso Shingubara Non-member (Kansai University,
[email protected]) Minoru Sasaki Member (Toyota Technological Institute,
[email protected]) Kazuhiro Hane Member (Tohoku University,
[email protected]) Hiroshi Tokunaga Non-member (M. T. C. Corp.,
[email protected]) Keywords : MOSFET, capacitive sensor, accelerometer, circuit for temperature compensation The concept of a capacitive MOSFET sensor for detecting voltage change, is proposed (Fig. 4). This circuitry is effective for vertical force applied to its floating gate was already reported by compensating ambient temperature, since two MOSFETs are the authors (Fig. 1). This sensor detects the displacement of the simultaneously suffer almost the same temperature change. The movable gate electrode from changes in drain current, and this performance of this circuitry is confirmed by SPICE simulation. current can be amplified electrically by adding voltage to the gate, The operating point, i.e., the output voltage, is stable irrespective i.e., the MOSFET itself serves as a mechanical sensor structure. of the ambient temperature change (Fig. 5(a)). The output voltage Following this, in the present paper, a practical test device is has comparatively good linearity to the gap length, which would fabricated.