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Design of Low Noise Ph-ISFET Microsensors and Integrated Suspended Inductors with Increased Quality B

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Design of Low Noise Ph-ISFET Microsensors and Integrated Suspended Inductors with Increased Quality B Design of low noise pH-ISFET microsensors and integrated suspended inductors with increased quality B. Palan To cite this version: B. Palan. Design of low noise pH-ISFET microsensors and integrated suspended inductors with increased quality. Micro and nanotechnologies/Microelectronics. Institut National Polytechnique de Grenoble - INPG, 2002. English. tel-00003085 HAL Id: tel-00003085 https://tel.archives-ouvertes.fr/tel-00003085 Submitted on 4 Jul 2003 HAL is a multi-disciplinary open access L’archive ouverte pluridisciplinaire HAL, est archive for the deposit and dissemination of sci- destinée au dépôt et à la diffusion de documents entific research documents, whether they are pub- scientifiques de niveau recherche, publiés ou non, lished or not. The documents may come from émanant des établissements d’enseignement et de teaching and research institutions in France or recherche français ou étrangers, des laboratoires abroad, or from public or private research centers. publics ou privés. 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*ÓÖØ *#Ø$ÙÖ '$ ÕÙÐ&Ø $ É/ ÁÒØÖÓ ÙØÓÒ Ò ÖÐ Ä× ÑÖÓ×Ý×ØÑ× ÓÑÙÜ ×ÓÒØ ÙÒ Ü ÖÖ Ñ ÙÖ ÔÙ× ÙÒ ÞÒ ÒÒ׺ Ä ×ÓÒ × ×Ý×ØÑ× ×× ×ÙÖ × ÑÖÓ ÔØÙÖ× Ò× Ð ÑÒ Ô ÓÙÖ ×ÙÖÚÐÐÖ Ò ÚÚÓ ÖØÒ× ÔÖÑØÖ× ÑÕÙ× Ò× Ð ×Ò ´ÔÀ¸ ÔÇ ¸ ÔÇ µ Ù¹ ¾ ¾ ÑÒØÚ Ð ÓÑÔÐÜØ ÖÓ××ÒØ Ù ØÖØÑÒØÑк × ÑÖÓ ÔØÙÖ× ÑÕÙ× ´ÁËÌ×µ Ô ÓÙÖÖÒØ ÖÑÔ ÓÖØÖ ÙÒ ÖÒ ×Ù× Ô ÓÙÖ × ÔÔÐØÓÒ× × ÓÒ Ô ÙØ ÖÕÙÖ Ò ÖÒ ÚÓÐÙÑ × ×Ô Ó×Ø× ØÐ× ÖÙÒ××ÒØ Ð × ÓÙظ Ð ÓÒÒ Ô ÖÓÖÑÒ Ø × ÖÙØ ½º ÄÓÖ×ÕÙ³ÓÒ ÚÐÓÔÔ × ÔØÙÖ× ÓÑÙÜ ×¹ÓÙØ Ø ØÖ× Ô ÖÓÖÑÒØ׸ Ú Ð ØÖØÑÒØ Ù ×ÒÐ ×ÙÖ Ð ÑÑ ÔÙ ÕÙ Ð× ÁËÌ׸ ÐÓÖ× ÙÒ ÙØÖ ÔÖØ ³ÙÒ ÑÖÓ×Ý×ØÑ ÑÔÐÒØÐ ÙØÓÒÓÑ ÓØ ÐÑÒØ ØÖ Ö×ÓÐÙ ÙÒ ÒØÖ ØÖÒ×¹ Ñ××ÓÒ ×Ò× ¬Ð ÚÖ× Ð³ÜØÖÙÖº ØØ Ð×ÓÒ ×Ø ÖÐ× ÔÖ ÙÒ ÖÙØ Ê Ú Ð× ÒÙØÒ× Ô××Ú׺ Ä ÐÓ Ê ÔÖÒÖ Ò Ö Ð ÓÒØÖÓÐØÐÓÑÑÙÒØÓÒ ÒØÖ Ð ÑÖÓ×Ý×ØÑ ÑÔÐÒØ Ø ÙÒ ÒØÖ ÓÒØÖÓРгÜØÖÙÖ ´ÙÒ È Ò× Ð³ÓÔØеº Ä× Ó ØÚ× ØØ Ø× ×ÓÒØ ÔÖ ÓÒ×ÕÙÒØ ¯ ØÙ ×Ðظ ÓÒÔØÓÒ Ø ÚÖ¬ØÓÒ ÜÔÖÑÒØÐ Ð ÖÐ×ØÓÒ × ÔØÙÖ× ÔÀ¹ÁËÌ Ò× ÙÒ ØÒÓÐÓ ÅÇË ×Ù¹ÑÖÓÒÕÙ ×ØÒÖ × ÓÙظ Ý ÓÑÔÖ× Ð³ØÙ Ù ÖÙظ Ø Ð ÚÐÓÔÔ ÑÒØ × ÖÙØ× ÒÐÓÕÙ× ØÖØÑÒØÙ ×ÒÐ ´ÔØÖ× ¾ µ ¯ ØÙ× ×Ðظ ÓÒÔØÓÒ Ø ÚÐÙØÓÒ ÜÔÖÑÒØÐ × ÒÙØÒ× ×Ô¹ ÖÐ× Ô××Ú× ÙØ ÕÙÐØ ×ÙÖ¹ÔÙ Ò ÚÙ × ÔÔÐØÓÒ× Ê Ô ÓÙÖ Ð× Ñ¹ ÖÓ×Ý×ØÑ× ÓÑÙÜ ´ÔØÖ× µº Ò ½¼¸ ÖÚÐ ÔÖ×ÒØ Ð ÔÖÒÔ Ñ×ÙÖÖ Ð ÓÒÒØÖØÓÒ × ÕÙÒØØ× ÑÕÙ× Ú ÙÒ ×Ô Ó×Ø ÐØÖÓÒÕÙ¸ ÔÔ Ð ÁËÌ ´ÁÓÒ ËÒ×ØÚ Ð «Ø ÌÖÒ¹ ××ØÓÖµ ¾º Ä× ÚÒØ× Ð³ÁËÌ ÔÖ ÖÔÔ ÓÖØ ÙÜ ÐØÖÓ × Ñ×ÙÖ× ÔÀ Ò ÚÖÖ ´Ð ÑØÓ Ð ÔÐÙ× ÓÙÖÒØ ÙØÐ× ÔÓÙÖ Ñ×ÙÖÖ Ð ÔÀµ ×ÓÒØ Ð ØÐÐ ØÖ× Ô¹ Øظ Ð ÖÔ ÓÒ× ÖÔ¸ Ð Ô Ó××ÐØ ÔÖÓ ÙØÓÒ Ò ÚÓÐÙÑ ÐÚ¸ Ð ÓÒ ÖÔÔ ÓÖØ ×ÒлÖÙظ Ð ×× ÑÔÒ ×ÓÖظ Ø Ò¬Ò Ð Ô Ó××ÐØ ³ÒØÖØÓÒ Ð³ÐØÖÓÒÕÙ Ò×ÑÐ Ú Ð ÔØÙÖ ×ÙÖ Ð ÑÑ ÔÙº × ÑÖÓ ÔØÙÖ× ³ÁËÌ ×ÓÒØ ÙÓÙÖ³Ù ×Ô ÓÒÐ× ×ÙÖ Ð ÑÖ ¿¸ Ô ÒÒظ ÐÙÖ× ÔÖÜ Ö×Ø ÒÓÖ ÔÐÙ× ÐÚ× ÕÙ ÐÙ × ÐØÖÓ × Ò ÚÖÖº Ò ÔÐÙ׸ Ð× ÁËÌ× ­ ºÈÐÒ Ô Ú ÓÑÑÖÙÜ ×ÓÒØ ÖÕÙ× Ú × ØÒÓÐÓ× ÖÐØÚÑÒØ ÒÒÒ× Ø ×Ô¬ÕÙ׸ ÕÙ ÑÔ Ð³ÒØÖØÓÒ ÑÓÒÓÐØÕÙ Ù ÔØÙÖ Ø ÖÙØ× ÐØÖÓÒÕÙ׺ Ä ÔÖÑÖ ÔÖØ ØØ Ø× Ö ÓÒØÖÙÖ Ù ÚÐÓÔÔ ÑÒØ ÔØÙÖ× ³ÁËÌ׸ ÕÙ Ô ÙÚÒØ ØÖ ÖÐ×× Ø ÖÕÙ× Ú ÙÒ ØÒÓÐÓ ÅÇË ×Ô ÓÒÐ ÓÑÑÖÐÑÒظ ×Ò× ÑÓ ¬ØÓÒº Ä ÖØÓÒ ÓÑÑÙÒ ØÐ× ÔØÙÖ× ÔÀ Ò×ÑÐ Ú Ð× ÖÙØ× ÐØÙÖ ÓÙÚÖÖ Ð ÑÒ Ô ÓÙÖ Ð× ÑÖÓ×Ý×ØÑ× ÓÑÙÜ ÑÓÒÓÐØÕÙ׸ ÑÑ ÑÔÐÒØÐ× Ò× Ð ÓÖÔ׺ Ä ÔØÖ ¾ ÓÒØÒØ ÙÒ ÖÚ×ÓÒ ÐÓÖÔÕ٠гØØ ØÙÐ × ÔØÙÖ× ³ÁË̺ × ÕÙØÓÒ× Ù ÓÑÔ ÓÖØÑÒØ ³ÁË̸ Ð× ÑÑÖÒ× ×Ò×Ð× Ù ÔÀ¸ Ò× ÕÙ Ð ÓÒØÖÒØ Ð³ÐØÖÓ ÖÖÒ ×ÓÒØ×ÙØ׺ × ØÒÓÐÓ× ÖØÓÒ ×× ×ÙÖ Ð ×ÐÙѸ Ø Ù×× ÙÒ ÔÖÓ × ×ÙÖ ×Ù×ØÖØ ÔÐ×ØÕÙ ÖÑÑÒØ ÚÐÓÔÔ× Ð³ÁŸ ÄÙÚÒ¸ ÐÕÙ¸ ×ÓÒØ ÜÔÐÕÙ׺ Ä× ÖØ× Ù ÓÑÔ ÓÖØÑÒØ Ð Ù ÑÖÓ¹ ÔØÙÖ ÑÕÙ¸ × ÑÓ Ð× ×ÑÙÐØÓÒ¸ Ø Ð Ñ× Ò ÓØÖ¸ ×ÓÒØ ÖÔØÙÐ׺ Ä ÔØÖ ¿ ØÖØ Ð³ØÙ ×ÐØ Ð ÖØÓÒ ³ÁËÌ× Ò× ÙÒ Ø¹ ÒÓÐÓ ¼Ñ ÅÇË ×Ù¹ÑÖÓÒÕÙ ×ØÒÖ¸ ×Ò× ÔÔ Ð × ØÔ × ÖØÓÒ ×ÙÔÔÐÑÒØÖ׺ ØØ ØÒÓÐÓ Ô ÖÑØ Ð³ÒØÖØÓÒ × ÖÙØ× Ú × ÔØÙÖ× Á˹ Ì× ×ÙÖ Ð ÑÑ ÔÙº ÈÐÙ×ÙÖ× ×ØÖÙØÙÖ× ÜÔÖÑÒØÐ× ÓÒØØ ÓÒÙ׸ ÑÓÒØ× Ò ÓØÖ¸ Ø ÖØÖ×׺ ÖØÒ× × ÁËÌ× ÑÓÒØÖÒØ ÙÒ ×Ò×ÐØ Ù ÔÀº ÍÒ ÓÒÒ ÔÖØ ×Ø ÓÒ×Ö ÐÑ×ÒÓØÖº Ä× Æ× ÖÒÓÒØÖ× Ø × ÖÑÖÕÙ× Ô ÓÙÖ ÑÐÓÖÖ Ð× ÔØÙÖ× ×ÓÒØ ÓÒÒ× ÓÒ Ö×ÙѺ Ä ÔØÖ ×Ø ÓÒ×Ö ÙÜ ØÙ× ÖÙØ ³ÁË̺ ÓÑÑÒÒØ ÔÖ Ð ØÓÖ ÖÙØ ØÖÒ××ØÓÖ× ÅÇË Ø Ð× ÁËÌ׸ Ð ÔØÖ ÓÒØÒÙ Ø ÑÓÒØÖ Ð× Ñ×ÙÖ× ÖÙØ ×× ÖÕÙÒ × ÔØÙÖ× ÁËÌ× ÓÑÑÖÙÜ Ø ÒÓ× ÔØÙÖ× ÔÀ¹ ÁËÌ× ÓÒÙ׺ Ä× ÔÖÓÔÖØ× ÖÙØ ÒÓ× ÔØÙÖ× ÖÕÙ× Ò ØÒÓÐÓ ÅÇË ×ÓÒØ ÒÖÙÖ× Ø ÚÒØÙ×× ÓÑÔÖ× ÙÜ ÔØÙÖ× ÓÑÑÖÙܺ Ä ÔØÖ ×ÙØ ÙÒ ÖÚ×ÓÒ ÐÓÖÔÕÙ ÔÐÙ×ÙÖ× ÖÙØ× ³ÒØÖ ÔØÙÖ ÁË̺ ÍÒ ÖÙØ ÒÒÓÚØÙÖ ÐØÙÖ ÔØÙÖ ÔÀ¹ÁËÌ Ø ÓÒÙ¸ ¹ ÖÕÙ¸ Ø Ñ×ÙÖ Ò× ØÖÓ× ×ÓÐÙØÓÒ× ÔÀ «ÖÒØ׺ ÍÒ ÙÜÑ ÒØÖ ÔØÙÖ ÁËÌ ×ÙÖ Ð ×Ù×ØÖØ ÓÖÒÕÙ ×Ø ÔÖ×Òغ Ä ÔØÖ ÓÒÐÙØ Ð ÔÖØ ³ÁËÌ ØØ Ø׺ Ä ØÖÚÐ ÔÖ×ÒØÑÓÒØÖ Ð ÔÖÒÔ ¸ Ø × ÑÐÓÖØÓÒ× Ø × ×Ù×ØÓÒ× Ô ÓÙÖ × ÖÖ× ÙØÙÖ× ×ÓÒØ ÓÒÒ׺ Ä ÙÜÑ ÔÖØ ØØ Ø× ×Ø ÓÒ×Ö Ð ÓÒÔØÓÒ Ø Ð ÖØÖ×ØÓÒ × ÒÙØÒ× ÔÐÒÖ× ×ÙÖ¹ÔÙ ÙØ ØÙÖ ÕÙÐØ É Ò ØÒÓÐÓ ÅÇË ×Ù¹ ÑÖÓÒÕÙ Ô ÓÙÖ × ÔÔÐØÓÒ× ÒÐÓÕÙ× Ê Ô ÓÙÖ Ð× ÑÖÓ×Ý×ØÑ× ÓÑÙܺ Ä× ØÒÓÐÓ× ÅÇË ÖÒØ× Ô ÖÑØØÒØ ÓÒØÓÒÒÖ ÙÜ ÖÓ¹ÖÕÙÒ׸ Ø ÙÒ «ÓÖØ ×Ø Ø Ô ÓÙÖ ÓØÒÖ ÙÒ ×ÓÐÙØÓÒ ÑÓÒÓÐØÕÙ ÕÙ Ô ÖÑØ ×Ø×Ö Ð× ×ÓÒ× ØÐÓÑÑÙÒØÓÒ× ÑÓÐ׺ Ä ÙØ Ù ÚÐÓÔÔ ÑÒØ × ÖÙØ× ÒÐÓÕÙ× Ê ÅÇË ×ÙÖ ÙÒ ×ÙÐ ÔÙ Ú ÙÒ ×× ÓÒ×ÓÑÑØÓÒ ³ÒÖ Ø Ð ÓÙØ ÖÙØ Ô ÙØ ØÖ ØØÒØ ×ÙÐÑÒØ × × ØÒÓÐÓ× ÖÖÚÒØ ×Ù×ØØÙÖ Ð× ØÒÓÐÓ× Ô ÓÐÖ× Ø × Ò× Ð ÖÓÒØ¹Ò ÒÐÓÕ٠ʺ Ä× ÒÙØÒ× ×ÓÒØ × ÐÑÒØ× Ô××× ØÖ× ÑÔ ÓÖØÒØ× Ò× Ð ÔÐÙÔÖØ × ÔÔй ØÓÒ× ÖÙØ ÖÓ¹ÖÕÙÒ¸ Ù×× Ò ÕÙ Ò× Ð× ÑÖÓ×Ý×ØÑ× ÓÑÙÜ ÑÔÐÒØÐ׺ ÅÐÙÖÙ×ÑÒظ Ð× ÒÙØÒ× ÒØÖ× Ò ÑØÐ ×ÙÖ¹ÔÙ¸ ÓÖÑ× Ò ØÒÓÐÓ× ÓÒÚÒØÓÒÒÐÐ× ÅÇ˸ ×ÓÙ«ÖÒØ × ÐÑØØÓÒ× Ð Ô ÖÓÖÑÒ Ù× ÙÜ Ô ÖØ× Ò× Ð ×Ù×ØÖØ Ö××Ø Ø Ò× Ð ÑØк × «Ø× ××ÒØ ÑÒÖ ×Ò¹ ¬ØÚ Ð ØÙÖ ÕÙÐØ É ÔÖ ÖÔÔ ÓÖØ Ù ØÙÖ ÕÙÐØÓØÒÙ ³ÙÒ ÒÙØÒ ÓÖ× ÔÙ º Ä ÙÜÑ ÔÖØ ØØ Ø× ××ÝÖ ³ÑÐÓÖÖ Ð ÔÖÓÐÑ × ØÙÖ É Ø ÔÖÓÔ Ó× × ÒÓÙÚÙÜ ÒÙØÙÖ× Ò ×ÔÖÐ ×ÙÖ¹ÔÙ ÑÖÓ¹Ù×Ò׸ ×Ù×Ô ÒÙ× ­ ºÈÐÒ Ô Ú Ø ÚÖØÐÑÒØ Ô Ó×ØÓÒÒ× Ú × ØÙÖ× ÕÙÐØÉ ÑÐÓÖ׺ Ä ÔØÖ ÓÑÑÒ Ð ÙÜÑ ÔÖØ ØØ Ø× Ø ×Ø ÓÒ×Ö ÓÑÑ ÙÒ ÒØÖÓ ÙØÓÒ ÒÖÐ ÙÜ ÒÙØÙÖ× Ô××× ÒØÖ× Ú ÙÒ ÔÖ×ÒØØÓÒ ³ÙÒ ÑÓ Ð Ð³ÒÙØÙÖ ³ÐÙÑÔ ³ Ø Ð× ÐÙÐ× ×× ÐÑÒØ׺ Ä ÑÓ Ð Ø Ð× ÕÙØÓÒ× ÖØ× ×ÓÒØ ÙØÐ×× ÔÐÙ× ØÖ Ò× Ð ÔØÖ ÔÓÙÖ Ð ÓÒÔØÓÒ × ÒÙØÙÖ× ×Ù×Ô
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  • Ion-Sensitive Field Effect Transistor (ISFET) for MEMS Multisensory Chips at RIT Murat Baylav
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