Annual Report 2019

FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB Annual Report 2019 ANNUAL REPORT Fraunhofer Institute for Integrated Systems and Device Technology IISB Fraunhofer Institute for Integrated Systems and Device Technology 2019 Imprint Note to the Chapter „Names and Data“ Published by: The „Names and Data“ chapter is exclusively available in the online version of the annual report: Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB Schottkystrasse 10 https://www.iisb.fraunhofer.de/annual_reports 91058 Erlangen, Germany It includes the following contents: Editors: • Guest Scientists Thomas Richter • Patents Martin März • Publications • PhD Theses Layout and Setting: • Master Theses Anja Grabinger • Bachelor Theses Helen Kühn Thomas Richter Printed by: Frank UG Grafik – Druck – Werbung, Höchstadt Printed on: RecyStar® Nature, white, Recyclingpapier Cover Photo: Central power distribution for the ± 380 Volt DC network at Fraunhofer IISB. © Kurt Fuchs / Fraunhofer IISB Backside Photo: Acting director of Fraunhofer IISB Prof. Martin März explains to Bavarian Minister of Economic Affairs and Deputy Prime Minister Hubert Aiwanger (left) how sector coupling is implemented at Fraunhofer IISB and which significance the topic has for the Energiewende. © Kurt Fuchs / Fraunhofer IISB © Fraunhofer IISB, Erlangen 2020 All rights reserved. Reproduction only with express written authorization. ACHIEVEMENTS AND RESULTS ANNUAL REPORT 2019 FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB Director (acting): Prof. Dr.-Ing. Martin März Fraunhofer IISB Schottkystrasse 10 91058 Erlangen, Germany Phone: +49 (0) 9131 761-0 Fax: +49 (0) 9131 761-390 E-Mail: info@iisb.fraunhofer.de Web: www.iisb.fraunhofer.de PREFACE 2 Fraunhofer IISB Sustainable energy supply and mobility are key elements in meeting the im- 1 Schematic overview of the Headquarters minent environmental and economic challenges our society is facing. Superior Fraunhofer IISB headquar- solutions require fresh thinking and a comprehensive view of the overall sys- ters in Erlangen. tem. At Fraunhofer IISB, this exactly constitutes the objective of our research © Fraunhofer IISB on intelligent power electronic systems and technologies. Cleanroom laboratory 2 Prof. Dr.-Ing. Martin März, Our work on materials engineering, semiconductor technology, advanced packaging, and exten- director of Fraunhofer IISB. of the Chair of Electron Devices sive system development, including a special focus on silicon carbide and other wide-bandgap © K. Fuchs / Fraunhofer IISB Chair of semiconductors, explicitly addresses the demands of digitalization, energy efficiency, and climate Electron Devices protection. of the University Extension building A of Erlangen-Nürnberg (FAU) In energy research, it is important to consider the complete, and partly complex, framework of Extension building B generators, consumers, storages, and power grids. That was apparent also in our symposium on energy systems, held on the occasion of the ceremonial inauguration of our eagerly awaited completion 2019 latest extension building in Erlangen in July. The new office and laboratory complex offers an infrastructure which allows the highly flexible and efficient linkage of different forms of energy, using various modern storage technologies, an intelligent load management, data analytics and Cleanroom laboratory AI, renewable sources of energy, a powerful DC microgrid, a cogeneration unit, and our growing LOHC-Container fleet of electric vehicles. Another highlight is a large medium-voltage application hall. This makes for energy storage IISB a living lab on industrial scale. In the current endeavors for global climate, electric driving is a key issue. The long-standing expertise of IISB in this field was underlined by our »Week of Electromobility« in September, including the IISB Annual Conference dealing with power electronics for electric vehicles, the 10-year anniversary edition of our BMBF-Fraunhofer student program DRIVE-E, as well as the public finish of the e-rally WAVE Germany 2019 on the central square of Erlangen. I would like to thank all my colleagues for their magnificent work and the trusting collaboration in the past year. I also thank our partners in industry and all our funding authorities, especially the Charging site Bavarian Ministry of Economic Affairs, Regional Development and Energy as well as the German for electric vehicles Federal Ministry of Education and Research (BMBF), for their support. Now, I warmly encourage you to catch up on the latest work of Fraunhofer IISB presented in this report. Let yourselves be inspired! Sincerely yours, Test center Prof. Dr. Martin März (Erlangen, February 2020) for electric vehicles 3 1 TaBLE OF CONTENTS FRAUNHOFER IISB AT A GLANCE ......................................................................6 Energy Management – Standardization in Multi-Level-Converter Submodules .....................................75 Profile and History ...................................................................................6 foxBMS – Free and Open BMS Platform Focused on Functional Safety and AI......................................76 Advisory Board 2019 .................................................................................7 Data Analytics .....................................................................................78 Organizational Chart 2019.............................................................................8 Numbers ..........................................................................................9 EVENTS..........................................................................................82 Research Areas ....................................................................................10 More Space for Energy Research .......................................................................83 Locations .........................................................................................12 DRIVE-E Academy and Study Awards 2019 ...............................................................87 Network and Partners ...............................................................................13 WAVE Trophy Germany 2019..........................................................................89 Chair for Power Electronics (LEE) and Chair of Electron Devices (LEB) ............................................14 The Long Night of Sciences 2019.......................................................................91 Lectures at the University of Erlangen-Nürnberg (FAU) .......................................................15 Made in Franconian Switzerland .......................................................................93 17th Fraunhofer IISB Lithography Workshop ...............................................................95 THE FRAUNHOFER-GESELLSCHAFT ...................................................................16 Nationwide School Competition .......................................................................97 Fraunhofer IISB Receives “FamilienLogo” .................................................................99 RESEARCH FAB MICROELECTRONICS GERMANY ........................................................18 IISB Research and Development Awards 2019 .............................................................99 One-Stop-Shop: Microelectronics Innovation from Fundamental Research to Pilot Products ...........................19 EnCN Energy Award 2019 ...........................................................................101 Best Paper Award for Academic Performance.............................................................101 MODELING AND ARTIFICIAL INTELLIGENCE ............................................................22 IFEEC 2019 Best Paper Award ........................................................................103 Physics and Artificial Intelligence: No Competitors but Together Ever More Useful ..................................25 LZE Tech Day 2019 Gives Insights into R&D ..............................................................103 Design Automation in Power Electronics: Workflow and AI ...................................................29 MATERIALS ......................................................................................32 NAMES AND DATA ...............................................................................104 Innovative Reliable Nitride-based Power Devices and Applications: The EU Projekt InRel-NPower .......................35 Advanced X-Ray Topography Imaging ...................................................................41 TECHNOLOGY AND MANUFACTURING ................................................................44 The „Names and Data“ chapter is exclusively available in the online version of the annual report: Adaptive Sampling and Contamination Control Methods for Silicon and SiC Manufacturing Lines . 47 DEVICES AND RELIABILITY ..........................................................................52 https://www.iisb.fraunhofer.de/annual_reports SiC-VDMOS: Beyond the Lithography Limits with Self-Alignment Channels .......................................55 New Environmental Test Lab at IISB .....................................................................56 It includes the following contents: From Material Characterization to FE-based Design Optimization ...............................................58 • Guest Scientists VEHICLE LECTRONICS ..............................................................................62

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