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High-Throughput Plasmonic Nanolithography UC Berkeley UC Berkeley Electronic Theses and Dissertations Title High-Throughput Plasmonic Nanolithography Permalink https://escholarship.org/uc/item/93c7w34j Author Pan, Liang Publication Date 2010 Peer reviewed|Thesis/dissertation eScholarship.org Powered by the California Digital Library University of California High-Throughput Plasmonic Nanolithography by Liang Pan A dissertation submitted in partial satisfaction of the requirements for the degree of Doctor of Philosophy in Engineering-Mechanical Engineering in the Graduate Division of the University of California, Berkeley Committee in charge: Professor David B. Bogy, Co-Chair Professor Xiang Zhang, Co-Chair Professor Roberto Horowitz Professor Ming Wu Fall 2010 High-Throughput Plasmonic Nanolithography ©2010 by Liang Pan Abstract High-Throughput Plasmonic Nanolithography by Liang Pan Doctor of Philosophy in Engineering-Mechanical Engineering University of California, Berkeley Professor David B. Bogy, Co-Chair Professor Xiang Zhang, Co-Chair The conventional projection-type photolithography approach to nanoscale manufacturing is facing possibly insurmountable challenges, especially to invent novel technical solutions that remain economical for the next generation of semi-conductor integrated circuits. Although extreme ultra violet (EUV) lithography with the next generation photo-masks and 193-nm immersion lithography with double patterning are expected to deliver 22 nm and smaller nodes, it still cannot effectively address the reliability and cost issues required for mass production. Maskless nanolithography is a potentially agile and cost effective approach, but most of the current solutions have throughputs that are too low for manufacturing purposes. This dissertation reports a new low-cost high-throughput approach to maskless nanolithography that uses an array of plasmonic lenses (PL) that "fly" above the rotating surface to be patterned, concentrating short wavelength surface plasmons into sub-100 nm spots. However, these nanoscale spots are only formed in the near field (within a few nanometers of the surface), which makes it very difficult to scan the array above the surface at high speeds. To overcome this problem a self-spacing air-bearing surface was designed and fabricated that can fly the array just nanometers above a disk that is spinning at speeds on the order of 10 meter/second, and patterning with feature sizes far smaller than the far-field diffraction limit have been experimentally demonstrated . Using this plasmonic nanolithography (PNL) approach, a 22-nm half-pitch direct pattern writing was successfully demonstrated using ultra-fast laser assisted nanoscale heat management and advanced PL designs. This nano-fabrication scheme has the potential of a few orders of magnitude higher throughput than current maskless techniques, and it opens the way for a new cost effective approach towards the next generation lithography for nano-manufacturing. To My Family i Acknowledgement I would like to express my deepest gratitude to my research advisors, Professor David B. Bogy and Professor Xiang Zhang, for their guidance and encouragements through my doctoral study. I would sincerely thank my former Xlab manager, Professor Cheng Sun (Northwestern University), who has been very important in shaping my research path and for helping me in the past five years. I would also like to thank all my former and current teammates, Werayut Srituravanich, Yongshik (Peter) Park, Yi Xiong, Erick Ulin-Avila, Yuan Wang and Li (Leo) Zeng for all the valuable discussions, collaboration and helps. It has been my great pleasure to work together with them. I want to extend my thanks to my former and current colleagues both in CML and Xlab, Du Chen, Nan Liu, Guy Bartal, Zhaowei Liu, Dongmin Wu, David Pile, Rupert Oulton, Jia-Yang Juang, Rohit Ambekar, Shuang Zhang, Xiaobo Yin, Nicholas (Xuanlai) Fang, Yongmin Liu, Sheng Wang, Ming Liu, Sean Moseley, Puneet Bhargava, Sujit Kirpekar, Sripathi Canchi, Ning Li, Thomas Zentgraf, Lee Fok, Hyeun-Seok Choi, Branden Cox, Christian Spencer, Jessica Little, Nga Thien Bui, and all the other colleagues for their advice, support, and friendship. I also want to thank Professor C. Singh Bhatia (National University of Singapore), Professor Robert Hocken (UNC Charlotte), and Professor Tsu-Chin Tsao (UCLA) for all the valuable suggestions, collaboration and helps. Finally, I am deeply indebted to my families for their love and support. Any of my successes is impossible without their great love and encouragement. ii Contents Acknowledgement....................................................................................................................................................... ii List of Figures ..............................................................................................................................................................v List of Tables ............................................................................................................................................................. xii Chapter 1 Introduction..........................................................................................................................................1 1.1 Introduction to Current Nanolithography...........................................................................................................1 1.1.1 History and Status of Photolithography ......................................................................................................1 1.1.2 Alternative Approaches ...............................................................................................................................3 1.1.2.1 Extreme Ultra-Violet lithography (EUVL)..........................................................................................4 1.1.2.2 X-ray Lithography...............................................................................................................................5 1.1.2.3 Electron-Beam Projection Lithography (EPL) ....................................................................................6 1.1.2.4 Nano-Imprint Lithography (NIL) ........................................................................................................7 1.1.2.5 Maskless Approaches ..........................................................................................................................8 1.1.2.6 Electron Beam Direct Writing (EBDW)..............................................................................................9 1.1.2.7 Parallel Electron Beam Lithography .................................................................................................10 1.1.2.8 Optical Maskless Lithography...........................................................................................................10 1.1.2.9 Molecular Self-Assembly Lithography .............................................................................................11 1.2 Introduction to Plasmonic Techniques ..............................................................................................................12 1.2.1 Introduction to Surface Plasmons .............................................................................................................12 1.2.2 Plasmonic Nearfield Microscopy..............................................................................................................14 1.2.3 Plasmonic Nearfield Nanolithography ......................................................................................................16 1.3 Introduction to Hard Disk Drive (HDD) Technology........................................................................................18 1.4 Scope and Organization of Thesis.....................................................................................................................22 Chapter 2 Plasmonic Lens (PL)..........................................................................................................................23 2.1 Plasmonic Resonance Structures ......................................................................................................................23 2.2 PL Performance Characterization....................................................................................................................25 2.3 Example Proposed PL Designs.........................................................................................................................26 2.3.1 Modified Bull’s Eye ..................................................................................................................................26 2.3.2 H-shaped PLs ............................................................................................................................................28 2.3.3 H-shaped PL with a Ring Reflector...........................................................................................................30 2.3.4 Recessed H-shaped PL for Direct Line Patterning....................................................................................32 2.3.5 Push-Pin PL...............................................................................................................................................34 2.4 Summary ...........................................................................................................................................................43 iii Chapter 3 Plasmonic Flying Head......................................................................................................................44
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