Ultra-Thin and Flexible CMOS Technology: ISFET- Based Microsystem for Biomedical Applications
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Vilouras, Anastasios (2021) Ultra-thin and flexible CMOS technology: ISFET- based microsystem for biomedical applications. PhD thesis. http://theses.gla.ac.uk/82122/ Copyright and moral rights for this work are retained by the author A copy can be downloaded for personal non-commercial research or study, without prior permission or charge This work cannot be reproduced or quoted extensively from without first obtaining permission in writing from the author The content must not be changed in any way or sold commercially in any format or medium without the formal permission of the author When referring to this work, full bibliographic details including the author, title, awarding institution and date of the thesis must be given Enlighten: Theses https://theses.gla.ac.uk/ [email protected] Ultra-thin CMOS Technology: ISFET-Based Sensing Microsystem for Wearable and Implantable Biomedical Applications Anastasios Vilouras A thesis submitted to the Department of Electronics and Electrical Engineering at the University of Glasgow in fulfilment of the requirements for the Degree of Doctor of Philosophy December 2020 Abstract A new paradigm of silicon technology is the ultra-thin chip (UTC) technology and the emerging applications. Very thin integrated circuits (ICs) with through-silicon vias (TSVs) will allow the stacking and interconnection of multiple dies in a compact format allowing a migration towards three-dimensional ICs (3D-ICs). Also, extremely thin and therefore mechanically bendable silicon chips in conjunction with the emerging thin-film and organic semiconductor technologies will enhance the performance and functionality of large-area flexible electronic systems. However, UTC technology requires special attention related to the circuit design, fabrication, dicing and handling of ultra-thin chips as they have different physical properties compared to their bulky counterparts. Also, transistors and other active devices on UTCs experiencing variable bending stresses will suffer from the piezoresistive effect of silicon substrate which results in a shift of their operating point and therefore, an additional aspect should be considered during circuit design. This thesis tries to address some of these challenges related to UTC technology by focusing initially on modelling of transistors on mechanically bendable Si-UTCs. The developed behavioural models are a combination of mathematical equations and extracted parameters from BSIM4 and BSIM6 modified by a set of equations describing the bending-induced stresses on silicon. The transistor models are written in Verilog-A and compiled in Cadence Virtuoso environment where they were simulated at different bending conditions. To complement this, the verification of these models through experimental results is also presented. Two chips were designed using a 180 nm CMOS technology. The first chip includes nMOS and pMOS transistors with fixed channel width and two different channel lengths and two different channel orientations (0° and 90°) with respect to the wafer crystal orientation. The second chip includes inverter logic gates with different transistor sizes and orientations, as in the previous chip. Both chips were thinned down to ∼20m using dicing-before-grinding (DBG) prior to electrical characterisation at different bending conditions. Furthermore, this thesis presents the first reported fully integrated CMOS-based ISFET microsystem on UTC technology. The design of the integrated CMOS-based ISFET chip with 512 integrated on-chip ISFET sensors along with their read-out and digitisation scheme is presented. The integrated circuits (ICs) are thinned down to ∼30m and the bulky as well as thinned ICs are electrically and electrochemically characterised. Also, the thesis presents the first reported mechanically bendable CMOS-based ISFET device demonstrating that mechanical deformation of the die can result in drift compensation through the exploitation of the piezoresistive nature of silicon. Finally, this thesis presents the studies towards the development of on-chip reference electrodes and biodegradable and ultra-thin biosensors for the detection of neurotransmitters such as dopamine and serotonin. i Table of Contents Abstract ........................................................................................................................................ i List of Tables .............................................................................................................................. v List of Figures ............................................................................................................................ vi List of Publications .................................................................................................................. xv Acknowledgements ................................................................................................................ xvii Author’s Declaration ............................................................................................................. xviii Glossary of Abbreviations ...................................................................................................... xix Chapter 1. Introduction ............................................................................................................1 1.1 Motivation ....................................................................................................................1 1.2 Research Objectives ..................................................................................................5 1.3 Research Contributions .............................................................................................5 1.4 Thesis organisation ....................................................................................................7 Chapter 2. Literature Review ............................................................................................... 10 2.1 Introduction ............................................................................................................. 10 2.2 Potentiometric Electrochemical Ion-Sensitive Electrodes ............................... 12 2.2.1 Overview of Potentiometric Metal-Oxide Based Electrochemical pH Sensors ........................................................................................................................................... 13 2.2.2 Sensing Mechanisms.............................................................................................. 14 2.2.3 Properties and Non-Ideal Characteristics of Potentiometric pH Sensors.... 19 2.2.4 Mechanically Flexible Potentiometric Ion-Sensitive Electrodes ................... 22 2.3 Ion-Sensitive Field-Effect Transistor: Operation, Sensor Interface and On-Chip Signal Processing Techniques ............................................................................ 23 2.3.1 Operation and Theory of pH Sensitivity ............................................................ 23 2.3.2 ISFET Read-Out Topologies ................................................................................. 31 2.3.3 Circuit-Level and Post-Processing Techniques for Mitigation of ISFET Non- Ideal Effects ..................................................................................................................... 34 2.4 Ion-Sensitive Field-Effect Transistor: Applications and Advances ................. 37 2.4.1 Applications of ISFET-Based Sensing Systems .................................................. 37 2.4.2 Mechanically Flexible ISFET-Based Sensors towards Wearable Healthcare Devices .............................................................................................................................. 40 2.5 Summary ................................................................................................................... 44 Chapter 3. Modelling, Simulations and Validation of Mechanically Bendable Integrated CMOS Devices ....................................................................................................... 45 3.1 Introduction................................................................................................................... 45 3.2 Mechanical Characterisation of Ultra-Thin Silicon Chips ................................. 47 3.3 Strain Effects: From Silicon Substrate to Integrated Devices and Circuits ... 50 3.3.1 Strain Effects on Bulk Silicon .............................................................................. 50 ii 3.3.2 Strain Effects on MOSFETs and Ion-Sensitive Field-Effect Transistors ........ 53 3.3.3 Strain Effects on Basic CMOS Circuit Blocks ..................................................... 58 3.4 Compact Modelling of CMOS-Based Devices and Sensors on Bendable Ultra-Thin Chips .................................................................................................................. 62 3.4.1 Modelling of Bending Stress Effect on Metal Oxide Semiconductor Field- Effect Transistors ............................................................................................................ 62 3.4.2 Modelling of Bending Stress Effect on Ion-Sensitive Field-Effect Transistors ........................................................................................................................................... 70 3.5 Electrical Characterisation and Model Evaluation of Transistors, Circuits and Sensors on Ultra-Thin Chips .............................................................................................. 74