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Symbols Symbols used in Vacuum

Vacuum Symbols

All symbols, except those marked 1) The symbols for vacuum 1) These symbols must only be used in the may be used in any orientation. should always be so positioned that indicated position (tip of the triangle pointing the narrowing lines point to the side downwards) of higher .

Vacuum Pumps

Vacuum , Piston Diaphragm general vacuum pump

Rotary positive Rotary piston Sliding vane rotary displacement pump vacuum pump vacuum pump

Rotary plunger Liquid ring Roots vacuum pump vacuum pump vacuum pump

Turbine vacuum Turboradial Turboraxial pump, general vacuum pump vacuum pump

Turbomolecular pump Ejector Diffusion pump vacuum pump

Adsorption pump pump Sputter-

Cryopump Scroll vacuum pump

Container

Vessel with crowned Vacuum ends, general

A00 12 Leybold Vacuum Full Line Catalog 2005 Symbols used in Vacuum Technology Vacuum Symbols

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Accessories

Seperator, Seperator filter, air filter, general with heat exchange, general (e. g. cooled)

Filter or Vapour baffle, Vapour baffle, filter device, general cooled general (with heat exchange)

Cold trap, with Cold trap general supply reservoir

Isolating Devices

Shut-off fitting, Gate valve Shut-off valve, general Straight-line valve

Right-angle valve Shut-off device with Stopcock safety function

Butterfly valve Right-angle Three-way stopcock stopcock

Check valve

Leybold Vacuum Full Line Catalog 2005 13 A00 Vacuum Symbols Symbols used in Vacuum Technology

Valve Actuation

Manual operation Metering valve Fluid drive (hydraulic or magnetic)

Solenoid operation Electric motor drive Weight-actuated

Connections and Piping

Flange connector, Flange connector, Small flange general bolted connector

Clamped flange Threaded pipe Ball-and-socket joint connector connector

Spigot-and-socket Connection by taper Flange connector, joint ground joint general

Change in pipe cross Junction of two pipes Cross-over of two section (e.g. reducer with pipes without nipple) communication

Branch point Bundle pipes Port allowing sliding motion, with flange

Linear motion Rotary and linear Rotary motion feedthrough motion feedthrough feedthrough

Electric current feedthrough

A00 14 Leybold Vacuum Full Line Catalog 2005 Symbols used in Vacuum Technology Vacuum Symbols

Vacuum Measurement and Gauges A00

1) Vacuum 1) Vacuum measure- 1) Vacuum gauge (to indicate the ment, Vacuum presence of a vacuum) measurement point

1) Recording vacuum 1) Vacuum gauge 1) Vacuum gauge gauge (writing) with analogue with digital display display

Flow measurement

1) These symbols must only be used in the indicated position (tip of the triangle pointing downwards)

Pressure Units

On the basis of international agree- bar mbar Pa atm Torr mTorr ments (ISO/R 1000) and the regula- 1 bar 1103 105 0.987 0.750 x 103 0.750 x 106 tions which apply in the Federal 1 mbar 10-3 1102 0.987 x 10-3 0.750 0.750 x 103 Republic of Germany based on these (laws on the units used in metrology) 1) -2 -5 -2 -5 -2 1 1 Pa (N x m ) 10 10 1 0.987 x 10 0.750 x 10 0.750 x 10 as well as the 1 atm = 760 Torr 1.01 1.01 x 103 1.01 x 105 1 0.760 x 103 0.760 x 106 Standards (DIN 28 400 and subse- quent numbers) we have adapted the 1 Torr 1.33 x 10-3 1.33 1.33 x 102 1.32 x 10-3 1103 characteristic quantities stated in this 1 mTorr 1.33 x 10-6 1.33 x 10-3 1.33 x 10-1 1.32 x 10-6 10-3 1 catalog to the current regulations. 1) Pa = Pascal The table gives the conversion factors between commonly used pressure units. All dimensions given in the technical drawings are stated in mm. 1 mbar x l x s-1 ; 60 sccm Dimensions in ( ) are stated in inch. The products of Leybold Vacuum are subject to continual further development; thus the technical data or the dimensional drawings are subject to change without prior notice.

Leybold Vacuum Full Line Catalog 2005 15 A00 Pressure Units Vacuum Technology – Worldwide

Conversion Factors Temperature Pressure

1 inch 2.54 cm °C °F psi bar

1 ft 30.48 cm 032 1.0 0.07

1 sq inch 6.45 cm2 10 50 10 0.70

1 sqft 0.0929 m2 20 68 14.5 1.00

1 cu inch 923.03 cm3 30 86 20 1.38

1 cu ft 28.32 liter 40 104 30 2.07

1 US gallon 3.78 liter 50 122 40 2.76

1 lmp gallon 4.54 liter 60 140 50 3.45

1 micron 1.33 x 10-3 mbar 70 158 60 4.14

1 qt 0.946 liter 80 176 70 4.83

1 lb 0.453 kg 90 194 80 5.51

1 hp 735 W 100 212 90 6.20

1 r.p.m. 1 min-1 °F = 1.8 x °C + 32 100 6.90

Various pressure units Various pumping speed units

mbar Torr inches Hg m3 x h-1 l x s-1 cfm (millibar) vacuum m3 x h-1 = m3/h 1.0 0.278 0.589 1013 760 0 l x s-1 = l/s 3.60 1.0 2.12 400 300 18.12 cfm (cubic feet per minute) 1.699 0.472 1.0 133 100 25.98 Example: 1 m3 x h-1 = 0.589 cfm 4329.80 Please note: The nominal pumping speed of a pump at 60 Hz is 20% higher than at 50 Hz 1 0.75 29.89

0029.92

Dimensions Various flow rate units

Inches Inches mm mbar x l x s-1 kg x h-1 cm3 x h-1 slm

1/8 0.1250 3.1750 mbar x l x s-1 1.0 4.28 x 10-3 0.987 59.2 x 10-3

1/4 0.2500 6.3500 kg x h-1 (0 °C) 218 1.0 215 12.91

3.8 0.3750 9.5250 cm3 x h-1 (NTP) 2.81 x 10-4 1.2 x 10-6 1.0 1.66 x 10-5

1/2 0.5000 12.7000 slm (standard liter per minute) 16.88 72.15 x 10-3 16.67 1.0

3/4 0.7500 19.0500

1/1 1.0000 25.4000

A00 16 Leybold Vacuum Full Line Catalog 2005