Scanning Microscopy Volume 1 Number 3 Article 7 6-27-1987 Advanced Vacuum Systems for Analytical Electron Microscopy G. S. Venuti Venuti Associates Follow this and additional works at: https://digitalcommons.usu.edu/microscopy Part of the Life Sciences Commons Recommended Citation Venuti, G. S. (1987) "Advanced Vacuum Systems for Analytical Electron Microscopy," Scanning Microscopy: Vol. 1 : No. 3 , Article 7. Available at: https://digitalcommons.usu.edu/microscopy/vol1/iss3/7 This Article is brought to you for free and open access by the Western Dairy Center at DigitalCommons@USU. It has been accepted for inclusion in Scanning Microscopy by an authorized administrator of DigitalCommons@USU. For more information, please contact
[email protected]. Scanning Microscopy, Vol. 1, No. 3, 1987 (Pages 939-942) 0891-7035/87$3.00+.00 Scanning Microscopy International, Chicago (AMF O'Hare), IL 60666 USA ADVANCED VACUUM SYSTEMS FOR ANALYTICAL ELECTRON MICROSCOPY G.S. Venuti Venuti Associates P.O.Box 29265 San Diego, CA 92129 Phone No.: 619 484 7182 (Received for publication March 27, 1987, and in revised form June 27, 1987) Abstract Introduction Recent technological advancements such as A high-energy beam of electrons used for significantly improved power supply stability and electron microscopy and microanalysis can have polepiece design, as well as increased accelerating significant impact on the specimen. Beam damage is voltage all contribute to the primary objective of the usually more severe in organic and biological speci scanning electron microscope (SEM): higher resolu mens ( 8); it has been reported by numerous investi tion. Similarly, the advent of analytical electron gators that this damage ranges from loss of organic microscopy (AE M) has also expanded the scope of material (6), and removal of volatile elements to applications to include energy-dispersive spectro significant hydrocarbon contamination (2,10) and metry, wavelength-dispersive spectrometry, and etching.