Varian, Inc. Vacuum Technologies
Vacuum Solutions for Electron Microscopy Applications Ready for the Nanotech Era
Varian Vacuum Technologies is established as a world leader in the design, manufacturing, and customisation of performance- driven vacuum products ranging from high energy physics and research to the most difficult industrial processes. The Conflat® flange, VacIon® pump, Contra-Flow™ leak detector and TriScroll™ pump, as well as the MacroTorr concept in Turbo pump technology were all invented by Varian; today, the technology found in each has been adopted as the industry standard.
Varian has long experience with supplying vacuum components to instrumentation manufacturers of focused beam systems such as Scanning Electron Microscopes (SEM) and transmission electron microscopes (TEM). This broad vacuum product line provides the focused beam system designer with the ability to choose a pump with the optimal combination of size, performance and cost for the multiple vacuum levels commonly found in these instruments. Finally, Varian`s 50 years of vacuum pump experience makes the company and its talented designers team uniquely qualified to supply customized solutions for these special applications. Image courtesy of Omicron Nano Technology
2 Varian Vacuum Solutions for Electron Microscopy Applications
Focused beam analytical greatly improved the accuracy, these instrumentation has instrumentation has been used for operability and economy of these coincided with the growth of high decades starting with research devices. Today, there is a wide technology manufacturing. These applications. Although extremely range of these highly sensitive and coincident developments have useful for detailed analysis of accurate devices from many greatly expanded the application of many different materials, for many different manufacturers available focused beam systems. Today, years, these instruments stayed in for many different applications. modern semiconductor the laboratory due to their expense manufacturing depends on the use and complication. Although focused beam analytical of SEM’s, and represents the largest instrumentation remains a mainstay application of these instruments. Modern electronics and improved of fundamental and practical manufacturing techniques have research, the growth and utility of
SCANNING ELECTRON MICROSCOPES (SEM) • Critical dimension • Defect review • Environmental SEM • Variable pressure • Basic & industrial • Research & development • Semiconductor manufacturing
TRANSMISSION ELECTRON MICROSCOPES (TEM) • Basic research • Life sciences • Industrial process development
FOCUSED ION-BEAM SYSTEMS (FIB) • Material research • Process development • Semiconductor repair • Failure analysis & 3D analysis
SURFACE ANALYSIS • Basic & industrial • Research & development Above and cover images courtesy of Carl Zeiss SMT AG
Varian, Inc. Vacuum Technologies 3 Varian Products for SEM Systems
Analytical systems that use focused are driven by the need to analyze beams require high and ultra-high ever-smaller samples, especially in vacuum pumping. The most common semiconductor, life-science, and applications of this type include other high technology applications. electron microscopes (SEM and End users of these systems analyze TEM), focused ion beam tools (FIB), all types of substances from and surface analysis systems. All organic compounds to these applications can have very semiconductor wafers. stringent performance requirements In the Semiconductor industry, for sensitivity, resolution, sample in particular, more sensitivity throughput and measurement for better sample resolution repeatability. These requirements is required.
Electron Microscopes Applications Turbo Pumps Ion Pumps SCANNING ELECTRON MICROSCOPES (SEM) V 701/551 SEM 8, 25, 35, 55 l/s SEM V 301 SEM
TRANSMISSION ELECTRON MICROSCOPES (TEM) V 301 SEM 8, 25, 35, 55 l/s SEM V70
FOCUSED ION BEAM SYSTEMS V 1001 SEM 20,45 l/s StarCell V 701/551 SEM V 301 SEM
SURFACE ANALYSIS V 701/551 SEM 8, 25, 35, 55 l/s SEM V 301 SEM V70
SEM and FIB images courtesy of Carl Zeiss SMT AG - TEM and S.A. images courtesy of Omicron Nano Technology 4 Varian Vacuum Solutions for Electron Microscopy Applications
Varian can supply all the vacuum All of them are tailored to the low requirements and to reduce components required for electron electromagnetic noise and vibration cost of ownership. microscopes. Additionally, Varian requirements of the SEM, TEM and Varian offers three convenient has extensive knowledge concerning Dual Beams next generation. Service Plans to help you maximize this application, and the ability to Additionally, Varian offers a full your productivity: Repair Program, customize vacuum products to line of rough vacuum pumps (both Advance Exchange and Upgrade meet the highly demanding needs wet and dry), valves and vacuum Program. of systems using charged particle measurement components to meet • The Repair Program takes care of beam technology. These dedicated any designer’s requirement. your Turbo Pump in need of a products include SEM Turbo, factory repair. Integrated Double Dampers, SEM Special care is paid to After Sales • The Advance Exchange allows Ion pumps and control systems. Support, in order to meet customer you to receive a replacement Turbo Pump without any need to stop your production. • The Upgrade Program allows you to replace a Varian Turbo Pump with the most recent model of a similar size. (For products other than Turbo Backing Pumps Valves Gauging Pumps please contact Varian TS 300, TS 600, SH 110, Small Aluminum CT 100, Technical Support). DS 42, DS 102, DS202, Block Valves EyeSys Mini-BA, DS 302, DS402 EyeSys IMG The table shows the broad range of products that Varian offers specifically for manufacturers of charged particle beam analytical systems. Products include a full DS 102, DS 202, Small Aluminum CT 100, SH 110 Block Valves EyeSys Mini-BA, range of specially designed EyeSys IMG SEM ion pumps: from 0.4 l/s up to 500 l/s. Varian also has a full range of low vibration turbo pumping systems that are specifically designed for TS 300, TS 600, SH 110 Small Aluminum CT 100, focused beam systems, having Block Valves EyeSys Mini-BA, EyeSys IMG lower vibration level than equivalent Magnetic Levitated products.
TS 300, TS 600, SH 110 Small Aluminum CT 100, Block Valves EyeSys Mini-BA, EyeSys IMG
Varian, Inc. Vacuum Technologies 5 Focused Electron Beam System
In order to better understand the The column is typically divided into Load-locks are used in many applicability of Varian products on at least two parts: the ultra-high modern SEM’s to accelerate the focused beam systems, a typical vacuum electron gun which sample processing time by quickly instrument is shown on the right. generates the electrons, and the transferring the sample from This figure represents a typical high vacuum column which atmosphere to the high vacuum SEM or TEM. A sample that has focuses the electron beam. chamber. Sample chambers been prepared for analysis is first The electron filament in the gun typically require high vacuum and placed inside the loadlock that is lasts longer if the vacuum is stable. fast pumping times to permit high pumped down to operating The vacuum in the column area is vacuum, after which the sample is typically lower than that of the mechanically transferred to the gun, especially if the sample in the process chamber. In the high chamber area is prone to out- vacuum chamber, an electron gassing, such as in the case of beam scans the sample for organic materials. Varian’s line of analysis. The electron beam is high performance VacIon ion generated and focused in the pumps are well suited for the column. These three major vacuum requirements of modern subsystems all require vacuum transmission electron microscope pumps that Varian can supply. (TEM), scanning electron microscopes (SEM) and focused Ion Beam (FIB) systems. These vacuum pumps are described in the next section of this brochure.
Image courtesy of Carl Zeiss SMT AG
6 Varian Vacuum Solutions for Electron Microscopy Applications
sample throughput in order to not to contaminate a sample or lower the cost of ownership of disturb the measuring equipment these instruments. In modern while the system is in operation, applications such as and therefore have very similar semiconductor manufacturing, vacuum requirements. both loadlocks and chambers require completely dry vacuum, and very low vibration levels so as
Varian, Inc. Vacuum Technologies 7 Vacuum Solutions for the Column
Column Requirements • No vibrations • Low charged particle emissions and magnetic emissions • High differential pumping • Accurate pressure measurements
Varian Solutions • SEM Ion Pumps and StarCell Ion Pumps • Application specific pumping solutions • Application specific, multi-channel controller solutions Image courtesy of Carl Zeiss SMT AG
Columns often require multiple applications: SEM ion pumps with Varian completes its offering to the levels of ultra-high vacuum to patented diodes designed to microscope manufacture with a insure proper beam operation. reduce pump interference on the full line of controller/power Varian’s 10 l/s to 70 l/s ion pumps column; the StarCell® which has supplies that have full control provide the necessary pumping the improved pumping curve of a features and multiple channels. levels in the compact size needed triode type element that is suitable Multi-channel controllers can for this application. Additionally, for high differential pump in ESEM operate column pumping systems Varian’s VacIon ion pumps are (environmental SEM) or high gas that provide flexible and cost available with two different loads found in FIB type columns. effective control for the multiple pumping elements, specifically Finally, Varian can apply its levels of vacuum required in the designed for sensitive column extensive knowledge of focused FIB columns. In fact, Varian is beam systems and flexible currently the only supplier offering manufacturing capabilities to 3 channel ion pump controllers. produce special ion pump Varian`s application specific ion designs that are custom made pumping systems, including to a specific system. special controller protocols and custom body configurations, ensure that Varian`s ion pumps can meet the most stringent column requirements in an economic fashion.
8 Varian Vacuum Solutions for Electron Microscopy Applications
SEM Ion pumps Varian is the only manufacturer to filament. The key to this superior When combining the SEM ion offer specially designed SEM ion performance is Varian’s patented pump on the gun with a StarCell pumps. These pumps are ideal for anode design which uses ion pump on the lower column, the high vacuum guns where contoured cells and simplified Varian ion pumps can offer a stable vacuum and low leakage electrical elements. This insures powerful combination optimised current is required to control and stable current readings and lower for modern E-beam columns. preserve the charged particle particle generation.
Features Benefits New anode geometry • Low leakage current; current stability Improved internal design • Pressure stability with no to reduce field emission voltage/current spikes Optical baffle (optional) • Low charged particles emission from the pump
Application Specific Ion Pumps Varian’s long experience with ion has given us long experience with application specific designs. Some pumps has made us the traditional the unique requirements of these recent custom products include: supplier to manufacturers of instruments, and has enabled focused beam systems. This in turn Varian to offer its customers highly
Features Benefits Integrated ion pump/column • Balanced weight and magnetic field • Lower conductance loss Ion/Neg combination • Very high pumping speed • Compact size and modular design
Varian Ion Pump Power Supplies In addition to Varian’s standard ion designs are the result of Varian’s pump power supplies, we can offer long experience with focused beam customized units that are tailored systems. Recent examples have to specific applications. These included:
Features Benefits ICPU-3 3 channel integrated • Only 3 channel controller presently controller on the market • Saves space at a lower cost Battery power supply • Enables service without breaking vacuum • Allows for shipping under vacuum for sustained periods Varian, Inc. Vacuum Technologies 9 Vacuum Solutions for Load Locks and Main Chamber
Chamber and Load lock Requirements • Fast pump down • Low vibrations • Compact size
Varian Solutions • Wide range of dedicated Turbo Pumps • Application specific, vibration isolation systems • Optimized vacuum design • Dry primary pumps
Varian offers a full range of high maintains a complete applications vacuum pumps and components lab with state-of-the-art vibration designed especially for the simulation and testing equipment demanding requirements of all for the most sensitive microscopy focused beam systems including applications. Varian also has a full SEM’s, TEM’s, FIB’s and surface range of integrated pump analysis systems. These application controllers that offer the highest specific, low vibration turbo control flexibility with near zero pumping systems have been electromagnetic noise generation. designed based on Varian’s extensive experience with focused Last but not least, our experts can beam applications. In fact, Varian team with your system engineers to define application specific performing and cost effective solutions.
10 Varian Vacuum Solutions for Electron Microscopy Applications
SEM Turbo Pumps Varian offers a full range of application 700 l/s and 1000 l/s speeds. All of lab. Finally, each SEM turbo pump specific designed SEM turbo pumps Varian’s SEM turbo pumps designs is tested in production before including 70 l/s, 300 l/s, 550 l/s, can be verified in Varian’s application being shipped to the customer.
Features Benefits Specially designed ceramic bearing • Low vibration response at low cost suspension systems (lower than MagLev) Full range of pumping speeds • Maximum design flexibility for the smallest or largest systems at lower cost Enhanced vacuum performance • Smaller roughing pump required with MacroTorr Stages Purge option available • Suitable for applications with process gas Lowest magnetic signature • Virtually no interference with the beams Oil free design • Maintenance free
Application Specific Damping Systems Modern focused beam systems can be as an integral part of its SEM turbo damper is designed to match the so sensitive to vibrations that highly pumping system. That is, when turbo pump with the instruments effective dampers are mandatory. Varian designs a turbo pump for a vibration profile. The design is then Varian applies damping technology focused beam instrument, the verified in Varian’s application lab.
Features Benefits Special materials to tune vibration • Provides superior vibration response characteristics Application specific designs • Provides higher conductance in less space
Scroll Pumps Features Benefits Varian new SH-110 scroll pump Dual voltage IEC power connection • Flexible electrical connections for has been designed to provide with On/Off switch and available easy installation worldwide reliable, dry vacuum in a small, international power cords economical package. Built-in vacuum pump • Isolates the pump during vacuum isolation valve system upset conditions. Prevents contamination of the vacuum system. Single scroll pump • Quick and easy maintenance and high efficiency Hermetically sealed design • Prevents leakage of process gasses Light weight and compact package • Easily adaptable for multiple system configurations Quiet operation • Suitable for the most demanding high-tech installations
Varian, Inc. Vacuum Technologies 11 Copyright byVarianSpA to changewithoutnotice. All specificationsaresubject Fax: (91)1128521173 Tel: (91)1128521171 India New Delhi110046 7, NangalRayaBusinessCentre 1010 CompetentHouse 101-108, 1stFloor Varian IndiaPVTLTD India Fax: (49)6151703302 Tel: (49)6151703353 Germany 64289 Darmstadt Postfach 111435 Alsfelder Strasse6 Varian DeutschlandGmbH Germany andAustria (31)118671569 From BeneluxFax: (31)118671570 From BeneluxTel: Fax: (33)169282308 Tel: (33)169863813 France Les Uliscedex(Orsay)91941 Z.A. deCourtaboeuf-B.P.12 7 avenuedesTropiques Varian s.a. France andBenelux Toll Free:8008206556 Fax: (86)1063100141 Tel: (86)1063108550 P.R. China Beijing 100052 10XuanWuMenWaiStreet No. Beijing JunefieldPlaza Rm 1648CentralTowerSouthWing Varian Technologies-Beijing China Toll Free#1(800)8827426 Fax: (781)8605437 Tel: (781)8617200 USA Lexington, MA02421 121 HartwellAvenue Varian VacuumTechnologies Central coordinationthrough: Canada V V www.varianinc.com acuum Technologies arian, Inc. Shinsa 2 Varian TechnologiesKorea,Ltd Korea Toll Free:0120655040 Fax: (81)352321263 Tel: (81)352321253 Japan Minato-ku, Tokyo108 4-16-36 Shibaura Sumitomo ShibauraBuilding,8thFloor Varian VacuumTechnologies Japan Fax: (39)0119979350 Tel: (39)0119979111 Italy 10040 Leini,(Torino) via F.lliVarian54 Varian VacuumTechnologies Italy Fax: (44)1865291571 Tel: (44)1865291570 England 1QU Oxford OX5 Yarnton Oxford IndustrialPark 6 MeadRoad Varian Ltd. UK andIreland Toll Free:0800051342 Fax: (886)226989678 Tel: (886)226989555 Taiwan, R.O.C. Hsi chih,TaipeiHsien 14F-6, No.77,HsinTaiWuRd.,Sec.1 Varian TechnologiesAsiaLtd. Taiwan Fax: (52)55239472 Tel: (52)55239465 Mexico, D.F. C.P. 03100 Col DelValle Concepcion BeisteguiNo109 deC.V. deR.L. Varian, S. Mexico Toll Free:0802222452 Fax: (82)234522451 Tel: (82)234522452 Korea 135-280 Kangnam-gu, Seoul 966-5 Daechi-dong nd Bldg. 2F Fax: (39)0119979350 Tel: (39)0119979111 Italy 10040 Leini,(Torino) via F.lliVarian54 Varian VacuumTechnologies Other Countries Fax: (781)8605437 Tel: (781)8617200 USA Lexington, MA02421 121 HartwellAvenue Varian VacuumTechnologies United States 00 800234 Toll FreeNumberforEurope 1 (800)8827426 Toll FreeNumberforUnitedStates
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