Linear Actuator with Servo Motor Drives: Ball Screw & Leadscrew

Servo Motor Linear Actuators Classical Motor-Leadscrew / Ballscrew Linear Actuators

HIGH FORCE

PRECISE

ECONOMICAL

WWW.PI.WS © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www.pi.ws. R1 11/05/02.0 -3 rcso ierActuatorwithClosed-LoopServoMotor Linear Precision M-230 o-oaigTp ii wths toet 5mm 25 to Stroke Switches, Limit Tip, Non-Rotating ࡯ ࡯ ࡯ ࡯ ࡯ advantages: several fers of- design non-rotating-tip drives, the micrometer tating-tip ro- conventional to Compared Tip Non-Rotating encoder. high-resolution motor-shaft-mounted, with combination gearhead 2-phase / motor a closed-loop DC a by or motor driven stepper tip ing non-rotat- with micrometer a a of consist in They package. compact with resolution mm 25 sub-micron to up motion linear providing actuators linear ultra-high-resolution are M-230 ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ plcto Examples Application etn equipment Testing testing assurance Quality packaging Photonics Metrology positioning Fiber TF2.0 h MTBF>20.000 Mount Clamp or Mount Front Switches Reference and Limit Non-Contact Motors DC Closed-Loop mm/s 1.5 Velocity Max. Tip Non-Rotating μm 0,05 to Motion Incremental Min. mm 25 & 10 Range Travel wthspot dacdau- advanced reference supports The switch reference installed. direction-sensing and are switches limit your of Hall- effect non-contact protection equipment, the For Switches Reference and Limit nanometers. 50 as low as motion incremental minimum for allowing construction, OEM tion low-fric- low-stiction, and tremely ex- feature They industrial environments. heavier- duty for solution effective cost- a provide actuators M-230 Life Long & Accuracy High ࡯ ࡯ ࡯ ࡯ edn wobble pendent tip-angle-de- of Elimination point contact the at wear of Elimination errors motion sinusoidal of Elimination errors positioning induced torque- of Elimination -3.0 -3.5 ihrslto CMk cutr,1 n 5m rvlrange travel mm 25 and 10 actuators, DC-Mike high-resolution M-230.25, M-230.10, ce-nbl i n lttip flat included. a are and tip ball screw-in A 1-52). p. (see M-238 and 1-50) p. agsrfrt h -3 (see travel M-235 the and to refer loads ranges higher For Versions High-Load troller. con- and me- actuator 10 between to ters up lengths cable for drivers line integrated DC connector features the the versions, On servo cable. m extension 3 a with sub-D come and 15-pin connector with cable m 0.5 integral an include actuators All Drivers Line Integrated precision. high with applications tomation altp(included) tip Ball cutr 5m,LmtSwitches Limit mm, 25 Actuator, Linear DC-Mike High-Resolution M-230.25 Switches Limit mm, 10 Actuator, Linear DC-Mike High-Resolution M-230.10 Information Ordering lttp(included) tip Flat M-230. Cable length: 500 mm, 15-pin sub-D connector with integrated line drivers (DC motor models). Dimensions in mm

Technical Data Model M-230.10 M-230.25 M-230.10S M-230.25S Units Active axes X X X X Motion and positioning Travel range 10 25 10 25 mm Integrated sensor Rotary encoder Rotary encoder Sensor resolution 2,048 2,048 Cts./rev. Design resolution 0.0046 0.0046 0.037 0.037 μm Min. incremental motion 0.05 0.05 0.05 0.05 μm Backlash 2 2 2 2 μm Unidirectional repeatability 0.1 0.1 0.1 0.1 μm Max. velocity 0.8 0.8 1.5 1.5 mm/s Reference switch repeatability 1 1 1 1 μm Mechanical properties Spindle Leadscrew Leadscrew Leadscrew Leadscrew Spindle pitch 0.4 0.4 0.4 0.4 mm Gear ratio 42.92063:1 42.92063:1 28.44444:1 28.44444:1 Motor resolution** 384** 384** steps/rev. Max. push/pull force 70 70 45* 45* N Max. lateral force 30 20 30 20 N Drive properties Motor type DC-motor, DC-motor, 2-phase 2-phase gearhead gearhead stepper motor** stepper motor** Operating voltage 0 to ±12 0 to ±12 24 24 V Electrical power 2 2 W Limit and reference switches Hall-effect Hall-effect Hall-effect Hall-effect Miscellaneous Operating temperature range -20 to +65 -20 to +65 -20 to +65 -20 to +65 °C Material Al (anodized), steel Al (anodized), steel Al (anodized), steel Al (anodized), steel Mass 0.3 0.35 0.3 0.35 kg Cable length 0.5 0.5 0.5 0.5 m Connector 15-pin sub-D 15-pin sub-D 15-pin sub-D 15-pin sub-D connector connector connector connector Recommended controller/driver C-863 single-axis C-863 single-axis (p. 4-114) C-663 single-axis C-663 single-axis C-843 PCI board, C-843 PCI board, (p. 4-112) for up to 4 axes for up to 4 axes (p. 4-120) *at velocities of up to 1 mm/s **2-phase stepper motor, 24 V chopper voltage, max. 0.25 A/phase, 24 full steps/rev., motor resolution with C-663 stepper motor controller © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18 M-231 CompactLinearActuatorwithClosed-LoopServoMotor With LimitSwitches,SuitableforFiberAlignment lution The M-231isanultra-high-reso cations withhighprecision. advanced automationappli erence switchsupports switches areinstalled.Theref- effect limitandreference equipment, non-contactHall- For theprotectionofyour Limit andReferenceSwitches micro re place see p.4-50 g.M-105, translation stages(e. designed tofitexistingmanual The M-231wasespecially Upgrade forManualAligners encoder (2048counts/rev.). shaft-mounted, high-resolution head combinationwithmotor- a closed-loopDC-motor/gear a leadscrewwhichisdrivenby compact package.Itconsistsof sub-micron resolutionina linear motionupto17mmwith Application Examples MTBF >5.000h Fits M-105FiberAligners Non-Contact LimitandReferenceSwitches Closed-Loop DC-Motors Max. Velocity 2.5mm/s Min. IncrementalMotionto0.1µm Travel Range17mm Testing equipment Quality assurancetesting Photonics packaging Metrology Fiber positioning meter. linear actuatorproviding ment foramanual ff ) asadirect - - - and controller. 10 metersbetweenactuator drivers forcablelengthsupto nector featuresintegratedline the DCservoversions,con- with a3mextensioncable.On sub-D connectorandcome gral 0.5mcablewith15-pin All actuatorsincludeaninte- Integrated LineDrivers integrated linedrivers sub-D connectorwith mm,15-pin, Cable length:500 M-231, dimensions(inmm). -3.7hg-eouinD-ieatao,1 mmtravelrange M-231.17 high-resolutionDC-Mikeactuator, 17 Technical Data and M-238(seep.1-52). p. 1-46),M-235(see1-50) ranges, refertotheM-230(see For higherloadsandtravel Drive properties 0.2 Unidirectional repeatability eomne otolrdie C-863single-axis(p.4-114) Recommended controller/driver -20to+65 Mass Material Hall-effect Operating temperaturerange Miscellaneous Limit andreferenceswitches Electrical power Operating voltage Motor type Max. push/pullforce Gear ratio Spindle pitch 1 Spindle Mechanical properties Reference switchrepeatability Max. velocity Backlash Design resolution Sensor resolution Integrated sensor Travel range Motion andpositioning Model Min. incrementalmotion Active axes Al (anodized),steel 0 to±12 0.4 1.5 2 0.007 17 for upto4axes(p. 4-120) C-843 PCIboard, 0.17 2 DC-motor, gearhead 40 28.44444:1 Leadscrew 0.1 2,048 Rotary encoder M-231.17 X Actuator, 17mm,LimitSwitches High-Resolution DC-MikeLinear M-231.17 Ordering Information M-105 XYZpositioning M-231 mountedon µm °C V mm mm/s µm µm mm kg W N µm Cts./rev. Units µm systems M-232 Folded Linear Actuator with Closed-Loop Servo Motor Compact Package, Suitable for Fiber Alignment

Ordering Information

M-232.17 Compact High-Resolution DC-Mike Linear Actuator, 17 mm, Limit Switches

M-232.17 high-resolution DC-Mike actuator mounted on M-105 translation stage

࡯ Travel Range 17 mm ࡯ Min. Incremental Motion to 0,1 µm ࡯ Max. Velocity 2,5 mm/s ࡯ Closed-Loop DC-Motors ࡯ Non-Contact Limit and Reference Switches ࡯ Fits M-105 Fiber Aligners ࡯ MTBF >5.000 h

The M-232 is an ultra-high-reso - Limit and Reference Switches M-232, dimensions (in mm). Cable length: 500 mm, lution linear actuator providing For the protection of your 15-pin sub-D connector with integrated line drivers linear motion up to 17 mm with equipment, non-contact Hall- sub-micron resolution in a effect limit and reference Technical Data compact package. It features a switches are installed. The ref- Model M-232.17 Units space-saving design with a erence switch supports leadscrew side-by-side to a Active axes X advanced automation appli- Motion and positioning closed-loop DC-motor/gear- cations with high precision. head combination and a high- Travel range 17 mm Integrated sensor Rotary encoder resolution encoder (2048 coun- Integrated Line Drivers ts/rev.). They feature a low-stic- Sensor resolution 2,048 Cts./rev. All actuators include an inte- tion, low-friction construction Design resolution 0.007 µm gral 0.5 m cable with 15-pin allowing for minimum incre- Min. incremental motion 0.1 µm sub-D connector and come mental motion of 100 nanome- Backlash 2 µm with a 3 m extension cable. On ters at speeds of up to Unidirectional repeatability 0.2 µm the DC servo versions, the con- 2.5 mm/sec. Max. velocity 1.5 mm/s nector features integrated line Reference switch repeatability 1 µm drivers for cable lengths up to Upgrade for Manual Aligners Mechanical properties 10 meters between actuator Spindle Leadscrew The M-232 was especially and controller. designed to fit existing manual Spindle pitch 0.4 mm translation stages (e. g. M-105 For higher loads and travel Gear ratio 28.44444:1 see p. 4-50 ff ) as a direct ranges, refer to the M-230 (see Max. push/pull force 40 N replacement for a manual p. 1-46), M-235 (see p. 1-50) Drive properties micrometer. and M-238 (see p. 1-52). Motor type DC-motor, gearhead Operating voltage 0 to ±12 V Application Examples Electrical power 2 W Limit and reference switches Hall-effect ࡯ Fiber positioning Miscellaneous ࡯ Metrology Operating temperature range -20 to +65 °C Material Al (anodized), steel ࡯ Photonics packaging Mass 0.17 kg ࡯ Quality assurance testing Recommended controller/driver C-863 single-axis (p. 4-114) C-843 PCI board, ࡯ Testing equipment for up to 4 axes (p. 4-112) © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. Cat120E Inspirations2009 08/10.18 The newest release for data sheets is available download at www.pi.ws. © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www.pi.ws. R1 09/12/07.0 M-235 Ball-ScrewLinearActuatorw/Closed-LoopServoMotor ihDnmc,Srk o5 m ocst 2 N 120 to Forces mm, 50 to Stroke High-Dynamics, he ifrn oo drives: with motor available different is three M-235 The Drives Different Three encoder counts/rev.). (2048 motor-shaft-mounted, motor motor high-resolution DC closed-loop by with stepper a driven or 2-phase is a which ballscrew heavy-duty ultra- preloaded low-friction, a of It package. consists compact a reso- in sub-micron lution to with up mm of 50 motion linear ultra-high- viding pro- an actuator linear is resolution M-235 The ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ plcto Examples Application ogLifetimes & Long Speeds High Provide Drives Ballscrew Recirculating aumCmail esosAalbet 10 to Available Versions Vacuum-Compatible h >20.000 MTBF Switches Reference and Limit Non-Contact Motors DC Closed-Loop N 100 Force Lateral N 120 Load Push/Pull Option Drive Direct High-Speed μm 0.1 to Motion Incremental Min. mm 50 & 20 Range Travel etn equipment Testing testing assurance Quality packaging Photonics Metrology Automation positioning Fiber ࡯ ࡯ ࡯ ࡯ h o-oaigtpdesign advantages: several offers non-rotating-tip the conventional drives, micrometer rotating-tip to Compared Tip Non-Rotating low-vibration motor. stepper a The 2-phase have control. high-power, versions position M-235.x2S with for equipped encoders rotary are high-resolution nm and 100 only of motion incremental minimum a provide models DC-motor The applications. ing drive position- is high-speed direct for motor a version with equipped M-235.5DD The edn wobble pendent tip-angle-de- of Elimination point contact the at wear of Elimination errors motion sinusoidal of Elimination errors positioning induced torque- of Elimination -3.D bto)high-resolution (bottom) M-235.5DG -6 -3.D tp and (top) M-235.2DG CMk,ballscrew DC-Mike, hPa ce-nbl i n lttip flat included. a are and tip ball screw-in A only). (DC-motors troller con- and me- actuator 10 between to ters up lengths cable for drivers line integrated DC connector features the the versions, On servo cable. extension made is μm possible! 1 of repeatability bidirectional a Thus, life. ice serv- longer power and consumption lower velocity, for allows higher screws, lead conventional to compared reduced friction, significantly Its pre- play. mechanical eliminate to and loaded is maintenance-free ballscrew recirculating The Lifetime Long and Speed High for Ballscrews onco n oewt m 3 a with sub-D come and 15-pin connector with cable m 0.5 integral an include actuators All Drivers Line Integrated precision. high with applications reference tomation au- advanced reference supports switch and direction-sensing The installed. are limit switches your of fect protection Hall-ef- non-contact equipment, the For Switches Reference and Limit -3.2 ihrslto Stepper-Mike, high-resolution M-235.22S aumVrino M-235.5DG of Version Vacuum M-235.5VG Gearhead Motor DC Ballscrew, mm, 50 Actuator, Linear High-Power M-235.5DG M-235.5DD of Version Vacuum M-235.5VD Motor DC Direct-Drive Ballscrew, mm, 50 Actuator, Linear High-Power M-235.5DD M-235.2DG of Version Vacuum M-235.2VG Gearhead Motor DC Ballscrew, mm, 20 Actuator, Linear High-Power M-235.2DG M-235.2DD of Version Vacuum M-235.2VD Motor DC Direct-Drive Ballscrew, mm, 20 Actuator, Linear High-Power M-235.2DD Information Ordering s bu utmdesigns! custom about Ask 0m rvlrne ballscrew range, travel mm 20 Ball tip (included) M-235.22S and M-235.52S dimensions in mm, M-235.2DD, M-235.2DG, M-235.5DD cable length 500 mm, 15-pin Sub-D connector and M-235.5DG dimensions in mm. Cable length 500 mm, 15-pin Sub-D connector with integrated line drivers

Technical Data Model M-235.2DG M-235.2DD M-235.22S M-235.5DG M-235.5DD M-235.52S Units Active axes X X X X X X Motion and positioning Travel range 20 20 20 50 50 50 mm Integrated sensor Rotary Rotary Rotary Rotary encoder encoder encoder encoder Sensor resolution 2.048 2.048 2.048 2.048 Cts./rev. Design resolution 0.016 0.5 0.156 0.016 0.5 0.156 μm Min. incremental motion 0.1 0.5 0.1 0.1 0.5 0.1 μm Unidirectional repeatability 0.1 0.5 0.2 0.1 0.5 0.2 μm Bidirectional repeatability 1 1 1 1 1 1 μm Max. velocity 2.6 >30 20 2.6 >30 20 mm/s Mechanical properties Gear ratio 29.6:1 29.6:1 Motor resolution* 6,400* 6,400* steps/rev. Max. push / pull force 120 50 100** 120 50 100** N Max. lateral force 100 100 100 100 100 100 N Drive properties Motor type DC-motor, DC-motor 2-phase DC-motor, DC-motor 2-phase gearhead stepper motor* gearhead stepper motor* Operating voltage 0 to ±12 0 to ±12 24 0 to ±12 0 to ±12 24 V Electrical power 4 17 4.75 4 17 4.75 W Limit and reference switches Hall-effect Hall-effect Hall-effect Hall-effect Hall-effect Hall-effect Miscellaneous Operating temperature range -20 to +65 -20 to +65 -20 to +65 -20 to +65 -20 to +65 -20 to +65 °C Material Al (anodized), Al (anodized), Al (anodized), Al (anodized), Al (anodized), Al (anodized), steel steel steel steel steel steel Mass 0.55 0.5 0.65 0.7 0.65 0.8 kg Recommended controller/driver C-863 single-axis C-863 single-axis C-663 single-axis C-863 single-axis C-863 single-axis (p. 4-114) C-663 single-axis C-843 PCI board, C-843 PCI board, C-843 PCI board, C-843 PCI board, (p. 4-112) for up to 4 axes for up to 4 axes for up to 4 axes for up to 4 axes (p. 4-120) *2-phase stepper motor, 24 V chopper voltage, max. 0.8 A/phase, 400 full steps/rev., motor resolution with C-663 stepper motor controller **at up to 10 mm/sec Data for vacuum versions may differ. © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18 M-238 High-Load,LinearActuatorwithClosed-LoopServo Forces to400N,OptionalDirectPositionMeasurement ࡯ ࡯ ࡯ repeatability. vides exceptionalaccuracyand optional linearencoderpro- industrial environments.An high duty-cycleoperationin is thereforewellsuitedfor with gearbox.TheM-238 loop, ActiveDrive™DC-Motor ballscrew, drivenbyaclosed- of alow-friction,heavy-duty velocity to30mm/s.Itconsists load capacityto400Nandhigh linear motionupto50mm,a precision actuatorproviding The M-238isahigh-load,high- ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ Application Examples Vacuum-Compatible Versions Available for10 Exceptional Precision Optional 0.1µmDirect-MetrologyLinearEncoderfor Metrology Flexible automation Astronomy Precision machining Testing equipment Quality assurancetesting MTBF >20,000h Preloaded FrictionlessBallScrew Max. Velocity 30mm/s Resolution to0.1µm Travel Range50mm High LoadCapacityto400N M-238.5PL Heavy-DutyMikeactuator(withCDforsizecomparison) lower-cost versionwitharo mations areeliminated.A like backlashandelasticdefor- actuator tip,drive-trainerrors position ofthenon-rotating encoder measurestheactua lution of0.1µm.Becausethe metrology) withanoutputreso optical, linearencoder(direct equipped withanon-contact, The M-238.5PLmodelis Mechanical Play Encoder toCompensate Direct MetrologyLinear developed by PI,featuresa The ActiveDrive™ design, and lowvibration. ro dy advantages, suchashigh DC motordrivesofferseveral ActiveDrive™ DC-Motor model numberM-238.5PG. tary encoderisavailableas tational speed,lowheat namics, hightorqueatlow -6 hPa - - l ࡯ ࡯ ࡯ ࡯ offers severaladvantages: the non-rotating-tipdesign rotating-tip micrometerdrives, Compared toconventional Non-Rotating Tip to 100N. withstands lateralforcesofup The lateralguidingofthetip offers severaladvantages: side withtheDC-Motorand amplifier mountedside-by- width modulation)servo- high-efficiency PWM(pulse ࡯ ࡯ ࡯ electrically shieldedcase motor togetherinasingle, mounting theamplifierand fier noiseradiation,by Elimination ofPWMampli- is required because noexternaldriver and improvedreliability, Reduced costofownership motor between theamplifierand eliminating powerlosses Increased efficiency, by dependent wobble Elimination oftip-angle contact point Elimination ofwearatthe motion errors Elimination ofsinusoidal induced positioningerrors Elimination oftorque- tips high precision. automation applicationswith switch supportsadvanced direction-sensing reference switches areinstalled.The effect limitandreference equipment, non-contactHall- For theprotectionofyour Limit andReferenceSwitches lifetime. power consumptionandlonger for highervelocity, lower conventional leadscrews,allo duced friction,comparedto nical play. Itssignificantlyre preloaded toeliminatemecha screw ismaintenance-freeand The precision-groundball Precision andLifetime Ballscrews forHighSpeed, -3.P 1. 90 67.6 113.4 124.4 M-238.5PL M-238.5PG *Ask foravailabilityinyourregion Direct-Metrology Encoder 400 N,50mm,ActiveDrive™, Heavy-Duty DC-MikeActuator, M-238.5PL* 400 N,50mm,ActiveDrive™ Heavy-Duty DC-MikeActuator, M-238.5PG Ordering Information M-238 dimensionsin mm AB ws - - - M-238.5PL velocity at 30 mm/s is highly constant.

M-238.5PL repeatability is better than 0.3 µm.

The settling time for a 30 mm step is less than 1.5 seconds.

Technical Data Model M-238.5PG M-238.5PL Units Tolerance Active axes X X Motion and positioning Travel range 50 50 mm Integrated sensor Rotary encoder Linear encoder Sensor resolution 4000 cts/rev. 0.1 µm Design resolution 0.13 0.1 µm typ. Min. incremental motion 0.5 0.3 µm typ. Backlash 3 1 µm typ. Unidirectional repeatability 1 0.3 µm typ. Max. velocity 30 30 mm/s Origin repeatability 1 1 µm ±20 % Mechanical properties Spindle pitch 2 2 mm/rev. Gear ratio 3.71:1 3.71:1 Push/pull force 400 400 N Max. Lateral force 100 100 N Max. Drive properties Motor type DC-motor, ActiveDrive™ DC-motor, ActiveDrive™ Operating voltage 24 (PWM) 24 (PWM) V Electrical power 80 80 W nominal Miscellaneous Operating temperature range -10 to 50 -10 to 50 °C Material Al (anodized), steel Al (anodized), steel Mass 2.4 2.4 kg ±5 % Cable length 3 3 m ±10 mm Connector D-Sub 15 (m) D-Sub 15 (m) Recommended controller/driver C-863, C-843 C-863 (p. 4-114), C-843 (p. 4-120) © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18 M-227 ServoMotorizedMicrometerLinearActuator Non-Rotating Tip, LongStroketo50mm ࡯ ࡯ ࡯ ࡯ offers severaladvantages: the non-rotating-tipdesign rotating-tip micrometerdrives, Compared toconventional Non-Rotating Tip 1 mm/sec. 50 nano mum incrementalmotionof tion encoderallowsforamini- construction andhigh-resolu- extremely lowstiction/friction coder. Thecombinationofan mounted high-resolutionen bination withmotor-shaft- loop DC-motor/gearheadcom- rotating tip,drivenbyaclosed- of amicrometerwithnon- com sub-micron resolutionina ar motionupto50mmwith linear actuatorsprovidingline M-227 areultra-high-resolution ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ dependent wobble Elimination of tip-angle- contact point Elimination ofwearatthe motion errors Elimination ofsinusoidal induced positioningerrors Elimination oftorque- Sub-nm ResolutionwithOptionalPZTDrive MTBF >5,000h Closed-Loop DC-Motors Non-Rotating Tip Min. IncrementalMotionto0.05µm Travel Ranges10,25and50mm pact package.Theyconsist meters atspeedsupto - - ed limitswitches refertothe For higherloads andintegrat- see p.1-73and1-58. scanning andtracking ter resolutionfordynamic 20 µmtravelwithsub-nanome- piezoelectric tipfeaturing are alsoavailable,suchasa flat tips.Avarietyofothertips All modelscomewithstandard High-Resolution PiezoOption and controller. 10 metersbetweenactuator drivers forcablelengthsupto nector featuresintegratedline the DCservoversions,con- with a3mextensioncable.On sub-D connectorandcome gral 0.5mcablewith15-pin All actuatorsincludeaninte- Integrated LineDrivers ments. dustrial andOEMenviron- cost-effective solutionforin M-227 actuatorsprovidea Cost-Effective Compact, High-Precision, high-resolution DC-Mikeactuatorsandseveraltipoptions M-227.10 (w/piezotip),M-227.25,M-227.50ball - (see p.1-50 -3 (seep.1-46 M-230 ff andM-238. ) ff) , M-235 Drive Piezo ActuatorforMicrometer P-855.20 Ball Tip M-219.10 Actuator, 50mm High-Resolution DC-MikeLinear M-227.50 Actuator, 25mm High-Resolution DC-MikeLinear M-227.25 Actuator, 10mm High-Resolution DC-MikeLinear M-227.10 Ordering Information P-855.20 piezotipoption M-219.10 balltipoption M-227 DC-Mike, dimensions (in mm). C-815.38 motor cable included: 3 m, sub-D, 15/15 pin (m/f)

Technical Data Model M-227.10 M-227.25 M-227.50 Units Active axes X X X Motion and positioning Travel range 10 25 50 mm Integrated sensor Rotary encoder Rotary encoder Rotary encoder Sensor resolution 2048 2048 2048 Cts./rev. Design resolution 0.0035 0.0035 0.0035 µm Min. incremental motion 0.05 0.05 0.05 µm Backlash 2 2 2 µm Unidirectional repeatability 0.1 0.1 0.1 µm Max. velocity 0.75 0.75 0.75 mm/s Mechanical properties Drive screw Leadscrew Leadscrew Leadscrew Thread pitch 0.5 0.5 0.5 mm Gear ratio 69.12:1 69.12:1 69.12:1 Max. push/pull force 40 40 40 N Max. lateral force 0.1 0.1 0.1 N Drive properties Motor type DC-motor, gearhead DC-motor, gearhead DC-motor, gearhead Operating voltage 0 to ±12 0 to ±12 0 to ±12 V Electrical power 1.25 1.25 1.25 W Miscellaneous Operating temperature range -20 to +65 -20 to +65 -20 to +65 °C Material Al (anodized), steel Al (anodized), steel Al (anodized), steel Mass 0.16 0.22 0.26 kg Cable length 0.1 0.1 0.1 m Connector 15-pin sub-D connector 15-pin sub-D connector 15-pin sub-D connector Recommended controller/driver C-863 single-axis C-863 single-axis C-863 single-axis (see p. 4-114) C-843 PCI-board, C-843 PCI-board, C-843 PCI-board, for up to 4 axes for up to 4 axes for up to 4 axes (see p. 4-120) *Higher forces on request © Physik Instrumente (PI) GmbH & Co. KG 2010. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www.pi.ws. R2 11/01/12.0 -6 Mercury C-863 -xsD-ev-oo otolrwt ewr Feature Network with Controller DC-Servo-Motor 1-Axis ࡯ ࡯ ࡯ ࡯ ࡯ in- USB the via possible is PC or laptop with interchange data Easy predecessors. its than tile versa- and powerful more even is controller motor servo C-863 Mercury generation latest The ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ plcto Examples Application etn equipment Testing testing assurance Quality optics integrated / Photonics Automation positioning Fiber Control Manual for Joystick Optional Interface RS-232 and USB Control Motor-Brake (TTL) Lines I/O Digital Parameters and Macros for EEPROM Non-Volatile Applications Multi-Axis for Capability Network Recorder Data Functionality Stand-Alone Resolution Programmable & Macro Speed High for Input Encoder MHz W 20 30 to up Supplies Controller Servo-Motor DC Cost Low at Performance High h -6 ecr Csrocnrle etrsUBadR-3 interfaces RS-232 and USB features controller servo DC Mercury C-863 The n nrmna noe inlpoesn t2 H bandwidth MHz 20 at processing signal encoder incremental and DC ServoMotorController&Driver ihmcoadcompound- and macro with high-level language the command mnemonic by cost- facilitated very is Programming a way. effective in industry research and in tasks handling and automation achieve to features of number a offers Mercury The Automation Flexible systems. micropositioning cost-effective high-performance, building ideal for it inte- makes amplifier its grated with The design compact applications. industrial in integration easy interface for provides RS-232 The terface. ipiyn h setup. the simplifying and reliability in-creasing costs, Stages––reducing ActiveDrive Translation M-500 the as such stages high-speed tem––even DC-motor- sys- micro-positioning any PI driven of operation direct the allow outputs a control in PWM Additional package. amplifier small power integrated an and controller motion high-performance concept a Mercury combines unique The Outputs PWM and Amplifier Integrated to Due Cost-Saving minimal effort. programming with units, sitioning po- motorized and piezo-based for both units, controller different of networking allows GCS PI- (GCS). set PI command the general using operated be can ily fam- motor Mercury the stepper of controllers and servo All Programming Easy piezo or drives. stepping drives piezomotor oos PILine stepper or for motors, compatible servo-motors controllers PI DC are other with and time any at extended be can are flexible, networks chain daisy Such in- PC terface. single a over and con- controlled networked class be can Mercury trollers 16 to Up Control Multi-Axis provided. are lines and output input four four signals trigger of external or internal synchronization with motion easy For required!). communication run- computer (no time up power at tasks tion automa- run to macro autostart user-programmable a by provided is capability Stand-alone non- the in recall. later for stored memory volatile be can Macros functionality. command ® ultrasonic esv otaepackage. software compre- daisy-chain a hensive and a cable network cable, cation communi- RS-232 and sup- USB ply, delivered power wide-range a is with controller Each Delivery of Contents LEDs and 4 Buttons 4 Box, Button Push C-170.PB End Open m, 2 Cable, I/O C-170.IO C-819.20 to Controllers 2 Connecting for Y-Cable C-819.20Y Controller Mercury for Joystick Analog 2-Axis C-819.20 Supply Power Wide-Range with Channel, 1 Controller, DC-Motor Mercury C-863.11 Information Ordering C-863 dimensions in mm

Technical Data Model C-863.11 Function DC-servo-motor controller, 1 channel Motion and control Servo characteristics P-I-D servo control, parameter change on-the-fly Trajectory profile modes Trapezoidal, point-to-point Encoder input AB (quadrature) single-ended or differential TTL signal, 20 MHz Stall detection Servo off, triggered by programmable position error Input limit switch 2 x TTL (pull-up/pull-down, programmable) Input reference switch 1 x TTL Motor brake 1 x TTL, software controlled Electrical properties Output power max. 30 W (PWM) Output voltage 0 to 15 V Current 80 mA + motor current (3 A max.) Interfaces and operation Communication interfaces USB, RS-232 (9-pin [m] sub-D) Motor connector 15-pin (f) sub-D Controller network Up to 16 units on single interface I/O ports 4 analog/digital in, 4 digital out (TTL) Command set PI General Command Set (GCS) User software PIMikroMove® Software drivers LabVIEW drivers Supported functionality Start-up macro, data recorder for recording parameters as motor input voltage, velocity, position or position error; internal safety circuitry: watchdog timer Manual control (optional) 2-axis joystick, Y-cable for 2D motion, pushbutton box Miscellaneous Operating voltage 15 to 30 V included: external power supply, 15 V / 2 A Operating temperature range +5 to +50 °C Mass 0.3 kg Dimensions 130 x 76 x 40 mm © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release. The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18 C-843 DC-Servo-MotorControllerw/IntegratedDrivers Servo MotionController/DriverPCIBoardfor2or4Axes ful equipment (alldirect-drive available todrive morepower- In addition,PWMoutputsare actuators. micropositioning stagesand motors usedinmostcompact amplifiers forthesmallDC with on-board,low-noiselinear cards, thenewC-843comes Unlike otherPCIcontroller On-Board Servo-Amplifiers ve, easy-to-set-upsolution. new cardisaverycost-effecti- external servo-amplifiers,this Because thereisnoneedfor micropositioning equipment. ler carddrivesupto4axesof The C-843PCImotioncontrol ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ ࡯ General CommandSet(GCS)Compatible Extensive SoftwareSupport Motor-Brake ControlOutput Fast PCICommunication,120µsforPositionRead 16 I/OLinesforFlexibleAutomation 32 kSamplesRAMforHigh-SpeedBufferOperations Trapezoidal Curve,S-CurveandVelocity Profile Additional PWMOutputsforHigh-PowerMotors Very Cost-Effective:ServoAmplifiersOn-Board Two andFour AxisVersion duty linearactuator, M-511.DDdirectdrivetranslationstageandM-501.1DGvertical Small motorsaredriventhroughtheC-843’s onboardlinearamplifiers,direct-drive C-843.41 DC-motorcontrollerboardwithM-110.DGlinearstage,M-235.5DGheavy stage. NoexternalamplifierisrequiredtodriveanyoftheseorotherPIstages. PI stages(e.g.M-511.DD)employActiveDrive™controlledofftheC-843’s PWM - superior positioning andtra- tion andfilter settingsfor options fortrajectorygenera- motion controlwithmany ding high-performancePID (digital signalprocessor)provi- The C-843employsafastDSP High-Performance PIDControl of the4(or2)channels. grammed individuallyforeach amplifier modecanbepro- The PWMmodeandlinear fiers). with noexternalpowerampli- and alsoconnecttotheC-843 ActiveDrive™ PWMamplifiers, from PIfeaturetheintegrated translation androtationstages outputs. LabVIEW andDLL librariesare and operation, comprehensive for setup,systemoptimization In additiontotheusersoftware Software /Programming with GCS. per motorscanbecommanded piezomotors andservoorstep- nanopositioning systems,for function. PIcontrollersfor are identicalinsyntaxand mads forallsupporteddevices is simplified,becausethecom- custom applicationprograms With GCSthedevelopmentof General CommandSet(GCS). structure isbasedonthePI The comprehensivecommand (GCS) PI GeneralCommandSet profiles. ming customizedtrajectory motion systemandalsoperfor- allows theobservationof register contents,etc.)This (positions, velocities,internal pendent systemvariables loop timeofuptofourinde- integer multiplesoftheservo- buffering (readandwrite)at trace memoryallowsonline The integrated32k-sample High-Speed Buffering for M-531.DDBstages). motor-brake outputlines(e.g. etc.). TheC-843alsofeatures tion tasks(triggerfunctions, available forflexibleautoma- signals, 16moreI/Olinesare channel forlimitandreference In additionto3TTLinputsper I/O forFlexibleAutomation fast andaccuratepositioning. en feedback (incrementalrotary support differentialencoder bandwidth counters(5MHz) for eachaxison-the-fly. High- be programmedindividually other motionparameterscan city, accelerationandseveral cking accuracy. Position,velo- coders orlinearscales)for the DSP. C-843 offersdirectaccessto For systemprogrammersthe tion ofanencoderindexpulse. conditions arise,suchasrecep- signal thePCwhenspecial vided sothatthechipsetcan access. Aninterruptlineispro- messages passedviamemory board consistofpacket-based Communications to/fromthe and macroeditor. joystick operation,terminal ration includingtuningtool, venient interfaceforstageope- MikroMove™ providesacon- provided. TheuserfriendlyPI C-843 MotorController Joystick andPCIInterfaceBoardfor C-843.JS 4-Axis DC-Motor ControllerPCIPCBoard, C-843.41 2-Axis DC-Motor ControllerPCIPCBoard, C-843.21 Ordering Information PIMikroMove® tabular presentation of four connected axes with display of absolute and relative positioning input, current position, halt axis button, state and velocity setting.

The Tuning Tool which is integrated in PIMikroMove® demonstrates acquiring and displaying step and settle data of micropositioning systems. Controls allow adjustment of the PID parameters for best performance.

Technical Data Model C-843 Function PC plug-in DC-servo-motor controller board, 32-bit plug-and-play PCI-bus interface, supported by main boards with 3.3 V and 5 V PCI bus connectors (universal card) Axes 2 (C-843.21); 4 (C-843.41) Servo characteristics Programmable PID V-ff filter, parameter changes on-the-fly Profile modes Trapezoidal, S-curve, velocity profile Output power / resolution Analog 6 watts/channel (drawn directly from PC power supply), 12-bit D/A converters, PWM 10-bit, 24.5 kHz Current limitation 500 mA per channel (short-circuit-proof) Encoder input AB (quadrature) differential TTL signals, 5 x 106 counts/s Stall detection Servo off, triggered by programmable position error Limit switches 2 TTL / axis (active high/low, programmable) Reference switches 1 TTL / axis (active high/low, programmable) I/O ports 8 TTL inputs, 8 TTL outputs Motor connectors 15-pin (f) sub-D per channel (2 on board + 2 on bracket for C-843.41) Interface/communication PC PCI bus Command set PI General Command Set (see p. A-11) © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. Cat120E Inspirations2009 08/10.18 oos&DrivesFundamentals & Motors rv Screws Drive Motor DC ActiveDrive™ hsdsg rvdsseveral case. provides advantages: motor design the This in and amplifier driver (pulse modulation) PWM width a considerably, integrating cost by this reduces system ActiveDrive™ The motor. stepper a for that than higher high-per- generally however,is a amplifier, of formance cost The low tion. vibra- rpm, low and low dissipation heat at torque high response, fast performance, dynamic good are drives motor oeo h datgso DC- of advantages the of Some lsi rv Systems(Stepper&ServoMotors) Drive Classic m eouinfrlonger for ranges. to revolution travel mm/ up 1 or and mm/revolution, 0.4 between 0.5 pitch a leadscrews have and Typical power, velocity, lifetime. motor on required pre- effect the dictable with ballscrews, recirculating exhibit than friction but higher self-locking to Leadscrews are preloaded backlash. spring nut reduce The be stage. the can of to sled coupled the nut a with motor-driv- screw en a of leadscrew very consists drive A and motion. smooth resolutions very high provide can Leadscrews Leadscrews mrvdreliability, improved and system, compact more- cost, Reduced motor and amplifier the between losses power eliminating by efficiency, Increased ig iesedrneand range speed wide run- are smooth ning, vibration, servo-motors of DC lack of tics Characteris- (servo-loop). system closed-loop is a that in motor operated current direct A Servo-Motor DC h datgso Cmotor DC of of advantages Some the mandatory. set- is filter tings and algorithm tive) deriva- integral, (proportional, PID with a controller motor performance, good optimum torque. For low-speed good very r aneac re eyeffi- very free, maintenance are but self-locking, not are screws Ball- ratio. ball- to-thread-diameter proper the selecting by ed eliminat- be pas- can Backlash closed-circuit sage. a in and nut screw balls the the the of between of number riding a sled and the stage, to housing) motor-driven coupled (ball nut a a with screw of consists drive ballscrew recirculating A with friction friction. rolling sliding re- place they because than leadscrews, friction less significantly have ballscrews Recirculating Ballscrews Recirculating eas oetra driver external no because rotcllna encoders. linear optical or rotary either with assured case shielded cally electri- single a in together motor and amplifier the ing mount- by radiation noise er amplifi- PWM of Elimination oiinn cuayis accuracy Positioning n aln r required are cabling and oqe hycnb operated be can low They high torque. and with consumption factor power form resolution, small angular high very Drive Gearhead / DC-Motor heat low vibration. low rpm, and dissipation low at torque otmdl s preloaded use revolution. models per Most counts to up 4000 with opti- encoders and range rotary watt cal 3 to 2 in the power various maximum uses with types PI exter- amplifier. an nal without such C-843 the boards as controller PC by DC- are of drives advantages motor/gearhead few A oini iceeangular discrete in providing motor motion electric An Motor Stepper backlash. eliminate to gearheads rvsaego yai per- dynamic good are drives omne atrsos,high response, fast formance, aaseto ahproduct. the each of in sheet noted data is type screw The or mm/revolution. 1 2 0.5, of ball- pitches have PI screws continuous Standard in operation. lifetime long and speeds high offer and cient Cmtr ftesm size, same the of motors closed-loop DC to Compared electronics. control simple the in to is opposed as positioning required where predictable applications especially for are suited and lifetimes long very have motors Stepper oos hc r eycost- very effective. are which PI 2-phase motors, operation. microstepped offers state in steady especially heat, more sipate dis- and performance dynamic poorer provide motors stepper lies advantage Another ation. acceler- extreme and response tp,wtottene fposi- of need the without steps, insno rservo-loop. or sensor tion fast Piezo Drives Ultrasonic Piezomotors It is important to distinguish Ultrasonic piezomotors are between different types of direct-drive systems; they do piezo drives: classical piezo not use leadscrews or gear- actuators (direct acting), flex- heads and are backlash-free. In ure amplified actuators, and addition, they neither create, piezo linear motors. Direct- nor are influenced by, magnet- drive piezo actuators offering ic fields. The drive consists of a resolutions of under one nano- stator, containing a piezoce- meter can be combined with ramic oscillator and a slider classical motorized actuators (friction bar), which is attached and stages to form coarse/fine to the moving part of the stage. systems or the more advanced With PI ultrasonic piezomotors hybrid systems (p. 4-132). speeds of up to 500 mm/s and Piezo linear motors provide resolutions of 0.1 μm in closed- Working principle of an ultrasonic linear piezomotor drive basically unlimited travel loop are possible. They are ranges. PI offers two types: also extremely compact, self- Ultrasonic (high-speed) motors locking and have lifetimes of translation stages like the ics, albeit with relatively low and PiezoWalk® (high-force, over 20,000 hours. PI piezo- M-661, M-662, M-663 and holding force. They are used high resolution) motors. Piezo motors are used in miniature M-664 series, and in XY stages primarily in scanning applica- actuators can achieve extreme- like the M-686. tions with travel ranges in the ly high accelerations of many millimeter to low centimeter thousands of g’s, are friction- Voice-Coil Linear Drives range. PI offers voice coil less and backlash-free. These friction-free electromag- drives in the V-106 stages, as netic linear drives are charac- well as in custom-designed terized by their good dynam- systems.

Hybrid Drives (Coarse / Fine)

Classic Combinations becoming activated after the Combinations of different drive motorized positioner has come concepts are called hybrid to a complete stop. Because drives. PI’s micropositioning separate position sensors are systems realize stacked sys- used. the absolute accuracy (not tems of piezo and manual or the resolution) is limited by the motorized stages, where a precision of the motorized long- motor/screw drive combina- range positioner. tion provides a long travel range and a piezo drive adds fine positioning accuracy and Novel Hybrid Concept exceptional responsiveness A novel concept is implement- over small ranges. For exam- ed in the M-511.HD and M-714 ple, PI offers a fiber-scanning Hybrid Translation Stages and C-702 Hybrid Controllers, that and coupling system compris- Different types of combined motorized and piezo positioning systems: ing a 6-DoF micropositioner evaluate a nanometer-preci- a) Serially stacked drives with individual integrated position sensors (F-206) mounted beside a sion, long-range, sensor and b) PI Hybrid drive with integrated, internal, high-resolution sensor, for use with highly specialized controller multi-axis piezo system (P-611 provide nanometer accuracy Nanocube®) with high position over the whole travel range. resolution. The motor-leadscrew and the tages of both the motorized makes hybrid systems ideal for piezo actuator are fully inte- actuator and the piezo actuator applications where the position The servo-control algorithms grated to form one motion sys- from startup to settling.The of an incident needs to be read with stacked systems like these tem, and act simultaneously at result is immediate starting, and repositioned precisely, or generally operate independent- all times. Thus every move be- smoothness of motion, and a where an externally specified ly, with the piezo system only nefits from the specific advan- highly constant velocity. This target position needs to be hit © Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. Cat120E Inspirations2009 08/10.18 reuaiisi h oinof motion the the in out irregularities smooth actively ators actu- piezo The actuators. piezo response fast stiff, frictionless and flexures by motor-spindle-drive micropositioner’s the from the stage of positioning platform hybrid motion decoupling the by is this accomplished side, mechanical the On or inspection surface metrology. in such as nanometers, a few within

Hybrid piezoelectric / motor actuator system Velocity up to :250µm/s power dissipation). Positioncommand bandwidth:1kHz. Low 900N. to of zero range Force RMS. 2nm than less error does error does not exceed 1.7nm. of 0.125nm.shortterminterpolation The resolution ina ofandresults factor interpolation 2000 an for stability and phase amplitude allowssolid It’s sensor. optical high precision a via measured is position The noe)wt calculated, a trajectory. smooth with linear integrated encoder) (by the position reading platform unit actual the drive compare single continuously and one as combination piezo and treat motor algorithms the control The range. sensor the down to pro- capability move to full the vide train by drive caused motorized platform the

tracing within positioning and accurate extremely 15mm and Travel range resolution. extremely high range and travel along with actuator system torque) motor (brushless piezoelectric and Hybrid hybrid system Principle of Principle okn rnil fteM51H.Tepafr sdecou- is platform The M-511.HD. the of principle Working ldfo h oo rv ri ytepeoatao and actuator piezo the by train drive motor the from pled

h lxr uds hsas eue h nri fthe of inertia the reduces also This guides. flexure the iz-rvnpafr n losfrrpdresponse rapid for allows and platform piezo-driven USA (East) & CANADA USA (West) & MEXICO Program Overview Piezo Ceramic Actuators & Motors PI (Physik Instrumente) L.P. PI (Physik Instrumente) L.P. 16 Albert St. 5420 Trabuco Rd., Suite 100 Piezo Nanopositioning Systems and Scanners Auburn, MA 01501 Irvine, CA 92620 Active Optics / Tip-Tilt Platforms Tel: +1 (508) 832 3456 Tel: +1 (949) 679 9191 Capacitive Nanometrology Sensors Fax: +1 (508) 832 0506 Fax: +1 (949) 679 9292 Piezo Electronics: Amplifiers and Controllers [email protected] [email protected] www.pi-usa.us www.pi-usa.us Hexapod 6-Axis Positioners / Robots Micropositioning Stages & Actuators JAPAN Photonics Alignment Systems, Solutions for PI Japan Co., Ltd. PI Japan Co., Ltd. Telecommunications Akebono-cho 2-38-5 Hanahara Dai-ni Building, #703 Motor Controllers Tachikawa-shi 4-11-27 Nishinakajima, Ultrasonic Linear Motors J-Tokyo 190 Yodogawa-ku, Osaka-shi Tel: +81 (42) 526 7300 J-Osaka 532 Fax: +81 (42) 526 7301 Tel: +81 (6) 6304 5605 [email protected] Fax: +81 (6) 6304 5606 www.pi-japan.jp [email protected] www.pi-japan.jp Request or download the complete CHINA UK&IRELAND PI Nanopositioning & Piezo Actuator Physik Instrumente PI (Physik Instrumente) Ltd. (PI Shanghai) Co., Ltd. Trent House Catalog Building No. 7-301 University Way, Longdong Avenue 3000 Cranfield Technology Park, 201203 Shanghai, China Cranfield, Tel: +86 (21) 687 900 08 Bedford MK43 0AN Fax: +86 (21) 687 900 98 Tel: +44 (1234) 756 360 [email protected] Fax: +44 (1234) 756 369 www.pi-china.cn [email protected] www.physikinstrumente.co.uk

FRANCE ITALY PI France S.A.S Physik Instrumente (PI) S.r.l. 244 bis, avenue Max Dormoy Via G. Marconi, 28 92120 Montrouge I-20091 Bresso (MI) Tel: +33 (1) 55 22 60 00 Tel: +39 (02) 665 011 01 Fax: +33 (1) 41 48 56 62 Fax: +39 (02) 873 859 16 [email protected] [email protected] www.pi-france.fr www.pionline.it

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