Chemraz® Subfab (SFX) Designed Specifically for Subfab Applications

Data Sheet

Chemraz® SubFAB (SFX) Designed Specifically for Subfab Applications

FFKM Increases Manufacturing Productivity Chemraz® SubFAB (SFX), a perfluoroelastomer, is specifically designed to withstand the highly corrosive environ- ments that are commonly seen in Subfab applications. Specifically in the exhaust areas of the Subfab including pumps, abatement systems, and piping fittings, Chemraz® SubFAB addresses application challenges typically found in the Subfab where temperatures and chemical exposures are high and increasing.

As device sizes continue to shrink, the processes used to make the device features are evolving. Atomic layer Features and Benefits processing and 3D device architectures are a few things driving changes in process chemistries and temperatures, • Broad chemical resistance to typical Subfab as well as longer processing times. The more aggres- effluents, including Fluorine and Oxygen sive nature of these new processes also leads to more • 300°C operating temperature capability aggressive effluent gases that need to be handled in the • Low cost of ownership, whether upgrading Subfab. These changes often challenge the convention- from FKM or looking to lower costs. al sealing materials used in the Subfab to handle these • Patent Pending, optimal high-temperature- seal process effluents. design accounts for the limitations of the KF fittings that can lead to elevated stress in the seal materials Chemraz® SubFAB is intended to upgrade systems using and premature failures. conventional sealing materials such as fluoroelastomers • Optimized physical properties for long life in static and others that can no longer handle the temperatures vacuum fittings. and/or chemical exposure found in the Subfab applica- • Color to distinguish it from typical perfluoroelastomers tions. Chemraz® SubFAB is intended to lower the & fluorocarbon elastomers. overall cost of ownership of the Subfab by matching performance with application. Applications • ISO-KF vacuum fittings. Including typical sizes:

Note: Color variations and dark spots that might be observed in Chemraz® – KF10, KF16, KF25, KF40, KF50, ISO63, ISO80, parts are considered cosmetic and an inherent result of the polymer curing ISO100, ISO160, ISO200, and ISO250 process. They are not foreign matter and not anticipated to adversely affect the performance of the part in service. Please contact a Greene Tweed • Interconnecting vacuum piping in the Subfab applications engineer for additional information. • Rough pumps • Gas abatement systems/scrubbers • Subfab valves

Contact Us Statements and recommendations in this publication are based on our experience and knowledge of typical applications of this Greene Tweed Tel: 0 +1.215.256.9521 product and shall not constitute a guarantee of performance nor modify or alter our standard warranty applicable to such products. Kulpsville, PA, USA Fax:0 +1.215.256.0189 © 2018, Greene Tweed all rights reserved. All trademarks are property of their respective owners. 09/18-GT DS-US-SC-134

www.gtweed.com Chemraz® SubFAB (SFX) Sealing Solutions

Compound No./Material Name: Material Description: Manufacturing Method: Chemraz® SubFAB Grey Perfluoroelastomer Compression Molded

Description Typical Physical Properties (ASTM Standard) Color Grey Specific Gravity (D792) 2.3 Hardness, Shore A (D2240) 80 Mechanical Properties (ASTM Standard) Tensile Strength @ Break ** (D1414) 1700 psi (11.7 MPa) Elongation ** (D1414) 190% Modulus @ 50% Elongation ** (D1414) 460 psi (3.2 MPa) Modulus @ 100% Elongation ** (D1414) 870 psi (6.0 MPa) Compression Set, 70 Hours @ 200°C ** (D395) 21% Compression Set, 70 Hours @ 300°C ** (D395) 45% Thermal Properties - Coefficient of Thermal Expansion 70°F (21°C) to 212°F (100°C) (831-14) 334.6 in./in./° C x 10-6 212°F (100°C) to 392°F (200°C) (831-14) 350.4 in./in./° C x 10-6 392°F (200°C) to 572°F (300°C) (831-14) 397.5 in./in./° C x 10-6 Vacuum Properties - Helium Permiability cm3•cm 21°C (D1434-82) 9.00 x 10-12 cm2•s•Pa cm3•cm 100°C (D1434-82) 1.39 x 10-11 cm2•s•Pa cm3•cm 200°C (D1434-82) 2.72 x 10-11 cm2•s•Pa Organic Outgassing Total - 30 Minutes @ 212°F (100°C) 0.2 ppmw Total - 30 Minutes @ 392°F (200°C) 1.1 ppmw Total - 30 Minutes @ 572°F (300°C) 6.0 ppmw

www.gtweed.com Recommended for applications involving effluents from Etch, Deposition, Diffusion, Ashing and other processes. Chemical Compatibility Chart: E= Excellent, G = Good, P= Poor

Chemraz® Chemraz® Chemical FKM Chemical FKM Subfab Subfab

Ammonium Fluoride NH4F E G Hydrogen Chloride HCI G E

Acetylene C2H2 E E Hydrogen Fluoride HF E P

Ammonia NH3 E P Hydrogen Selenide H2Se E F

Argon Ar E E Hydrogen Sulfide H2S G P

Arsenic Chloride AsCI E P Methyl Chloride CH3CI E E

Arsenic Trichloride AsCI3 E P Monomethylamine CH5N G F

Arsine AsH3 E F Nitrogen N2 E E

Boron Tribromide BBr3 E E Nitrogen Trifluoride NF3 E G

Boron Trichloride BCI3 E E Nitrous Oxide N2O E E

Boron Trifluoride BF3 G E Oxygen O2 E P

Bromine Br G E Ozone O3 E E

Carbon Dioxide CO2 E G Perfluoro-propane C3F8 G P

Carbon Tetrachloride CCI4 G E Phosphine PH3 E F

Carbon Tetrafluoride CF4 G E Phosphorous Trifluoride PF3 E E

Chlorine CI2 G E Potassium Hydroxide KOH F P

Chloropenta C2F5CI G E Silane SiH4 E G

Dichloro Difluoro CCI2F2 G G Silicon Tetrachloride SiCI4 G G

Dichloro Silane SiH2CI2 E G Silicon Tetrafluoride SiF4 G P

Dimethylamine (DMA) (CH3)2NH G P Silicon Trifluoride SiF3 G P

Disilane Si2H6 E G Sodium Hydroxide NaOH F G

Difluoro Ethane CH3CHF2 G P Sulfur Hexafluoride SF6 G F

Fluorine F2 E G Tetraethylorthosilicate (TEOS) E E

Fluoroform (F-23) CHF3 E P Tetrafluoromethane (F-14) CF4 E E

Germanium GeH4 E G Trichloroethane C2H3CI3 E E

Helium He E E Trichlorosilane SIHCI3 E E

Hexachloro Disilane Si2CI6 E G Trifluoromethane CHF3 E G

Hexafluoro Ethane C2F6 G G Trimethylamine (CH3)3N G P

Hydrogen H2 E E Trisilane SI3H6 E G

Hydrogen Bromide HBr E E Tungsten Hexafluoride WF6 E F