University of South Florida Scholar Commons Graduate Theses and Dissertations Graduate School June 2018 Development of 3-D Printed Hybrid Packaging for GaAs-MEMS Oscillators based on Piezoelectrically-Transduced ZnO-on-SOI Micromechanical Resonators Di Lan University of South Florida,
[email protected] Follow this and additional works at: https://scholarcommons.usf.edu/etd Part of the Electrical and Computer Engineering Commons Scholar Commons Citation Lan, Di, "Development of 3-D Printed Hybrid Packaging for GaAs-MEMS Oscillators based on Piezoelectrically-Transduced ZnO- on-SOI Micromechanical Resonators" (2018). Graduate Theses and Dissertations. https://scholarcommons.usf.edu/etd/7690 This Dissertation is brought to you for free and open access by the Graduate School at Scholar Commons. It has been accepted for inclusion in Graduate Theses and Dissertations by an authorized administrator of Scholar Commons. For more information, please contact
[email protected]. Development of 3-D Printed Hybrid Packaging for GaAs-MEMS Oscillators based on Piezoelectrically-Transduced ZnO-on-SOI Micromechanical Resonators by Di Lan A dissertation submitted in partial fulfillment of the requirements for the degree of Doctor of Philosophy Department of Electrical Engineering College of Engineering University of South Florida Major Professor: Jing Wang, Ph.D. Thomas M. Weller, Ph.D. Arash Takshi, Ph.D. Rasim Guldiken, Ph.D. Shengqian Ma, Ph.D. Date of Approval: June 14, 2018 Keywords: Microelectromechanical Systems, Additive Manufacturing, MMIC, Microfabrication Copyright © 2018, Di Lan DEDICATION To my wife, my parents, my advisors, my friends ACKNOWLEDGMENTS First, I would like to state my greatest appreciation to my major advisor and Professor Dr.