Cleanroom Facilities: Experience from an user Mark Ming-Cheng Cheng Electrical and Computer Engineering Wayne State University Detroit MI USA
[email protected] WAYNE STATE UNIVERSITY Cheng Cleanroom 8/2 Thin Micro/NanoFilm Deposition Fabrication Microfabrication is the term that describes processes of fabrication of miniature structures, of mironmeter sizes and smaller. Historically the earliest microfabrication processes were used for integrated circuit fabrication, also known as “ semiconductor manufacturing ”, ” microelectronic fabrication ”, ” VLSI technology ”. 65nm 2 cores; Introduced 2006 291 millions transistors 1.8 ~3GHz Die size 111mm 2; 65W WAYNE STATE UNIVERSITY Cheng Cleanroom Thin Micro/NanoFilm Deposition Fabrication In the last two decades, microfabrication has been used in many research fields, including * Micro Electromechanical System (MEMS) * RF MEMS (resonators, filters, switches, phase shifters) * Microfluidics/ Lab-on-Chip * Bio MEMS * Solar cells * Flat panel display * NEMS WAYNE STATE UNIVERSITY Cheng Cleanroom EnablingThin Film Deposition Technology in iPhone Microphone Accelerometer GPU (graphic processor) 45nm WAYNE STATE UNIVERSITY Cheng Cleanroom ThinHow Film Deposition to Make Sandwiches? Add bread Cut bread Cut vegetables Place vegetables … METHOD AND APPARATUS FOR MAKING A SANDWICH International Publication Number WO 2006/068865 AW Section (54) WAYNE STATE UNIVERSITY Cheng Cleanroom How to Make Devices? /etching pMOS Deposition Module Photolightography Module (Pattern Transfer) Etching Module WAYNE STATE UNIVERSITY Cheng Cleanroom Materials Semiconductor Insulator Metal (Si, C, SiC, GaAs ) (SiO 2, Si 3N4,glass, (Au, Pt, Al, Cr, Ti, Ni..) polymer, ceramics) WAYNE STATE UNIVERSITY Cheng Cleanroom Thin Film Deposition (overview) 0 I. Furnace (Few hundred~1100 C, atmosphere): SiO 2, P++ II. Low Pressure Chemical Vapor Deposition System (LPCVD): polycrystalline Si, amorphous SiO 2 III.