DOCSLIB.ORG

Dépôt De Matériaux À Changement De Phase Par PE-MOCVD À Injection Liquide Pulsée Pour Des Applications Mémoires PCRAM Manuela Aoukar

Total Page：16

File Type：pdf, Size：1020Kb

Download full-text PDF Read full-text
Dépôt De Matériaux À Changement De Phase Par PE-MOCVD À Injection Liquide Pulsée Pour Des Applications Mémoires PCRAM Manuela Aoukar Dépôt de matériaux à changement de phase par PE-MOCVD à injection liquide pulsée pour des applications mémoires PCRAM Manuela Aoukar To cite this version: Manuela Aoukar. Dépôt de matériaux à changement de phase par PE-MOCVD à injection liquide pulsée pour des applications mémoires PCRAM. Micro et nanotechnologies/Microélectronique. Uni- versité Grenoble Alpes, 2015. Français. NNT : 2015GREAT075. tel-01237268 HAL Id: tel-01237268 https://tel.archives-ouvertes.fr/tel-01237268 Submitted on 3 Dec 2015 HAL is a multi-disciplinary open access L’archive ouverte pluridisciplinaire HAL, est archive for the deposit and dissemination of sci- destinée au dépôt et à la diffusion de documents entific research documents, whether they are pub- scientifiques de niveau recherche, publiés ou non, lished or not. The documents may come from émanant des établissements d’enseignement et de teaching and research institutions in France or recherche français ou étrangers, des laboratoires abroad, or from public or private research centers. publics ou privés. THÈSE Pour obtenir le grade de DOCTEUR DE L’UNIVERSITÉ GRENOBLE ALPES Spécialité : Nano-Electronique et Nano-Technologies Arrêté ministériel : 7 août 2006 Présentée par Manuela AOUKAR Thèse dirigée par Christophe VALLÉE et codirigée par Pierre NOÉ préparée au sein du Laboratoire des Technologies de la Microélectronique dans l'École Doctorale Electronique, Electrotechnique, Automatisme et Traitement du Signal Dépôt de matériaux à changement de phase par PE- MOCVD à injection liquide pulsée pour des applications mémoires PCRAM Thèse soutenue publiquement le 22 septembre 2015, devant le jury composé de : Mme Françoise HIPPERT Professeur des Universités, Université Grenoble Alpes, Président Mme Agnès GRANIER Directeur de Recherche, IMN – Nantes, Rapporteur M. Patrice RAYNAUD Directeur de Recherche, Laplace – Toulouse, Rapporteur M. Philippe BOIVIN Ingénieur de Recherche, STMicroelectronics Rousset, Examinateur M. Pierre NOÉ Ingénieur de Recherche, CEA – LETI, Co-encadrant de thèse M. Christophe VALLÉE Professeur des Universités, Université Grenoble Alpes, Directeur de thèse A ma famille, A mon JenJen !! Remerciements Le travail de synthèse que nécessite la rédaction d’une thèse est difficile, mais { présent que je me retrouve face à mes remerciements, je me sens toute aussi impuissante. Mes premiers remerciements vont à mon « Chef », mon directeur de thèse M. Christophe Vallée. Je te remercie Christophe pour ton soutien dans les moments clés, tes conseils, tes nombreuses idées qui m’ont permis d’enrichir mon travail de thèse, ton dynamisme et ta disponibilité malgré un emploi de temps surchargé par tes nombreuses activités. Merci aussi de m’avoir permis de voyager { San Francisco où tu étais un véritable guide touristique !! Je sais que tu es déçu de ne pas être encore invité à mon mariage au Liban mais promis tu seras parmi les premiers invités dès que j’aurai cette fameuse date !! Le remerciement suivant revient à mon co-encadrant de thèse, M. Pierre Noé qui a toujours mis à ma disposition tous les moyens nécessaires au bon déroulement de ma thèse. Un grand merci pour ton soutien, la qualité de tes conseils, toutes les discussions scientifiques ainsi que les relectures qui m’ont permis d’améliorer la qualité de mes travaux. Je souhaite remercier ensuite mes deux rapporteurs Mme Agnès Granier et Mr Patrice Raynaud pour le temps qu’ils ont accordé { la lecture de cette thèse et { l’élaboration de leur rapport. Je remercie également, Mme Françoise Hippert et Mr Philippe Boivin d’avoir accepté de faire partie de mon jury de thèse et d’avoir examiné mon travail. Je tiens aussi à remercier M. Olivier Joubert et Mme Jumana Boussey, directeur et directrice adjointe du LTM, pour m’avoir accueilli dans leur laboratoire. Je remercie également tous les permanents du LTM en particulier ceux de l’équipe matériaux : Thierry B., Bassem, Patrice, Martin, Laurence, Ahmad, Franck, Bernard, Mika, Jérémy, Thierry L. et Jean Raoul. Un grand merci à Pierre David Szkutnik pour son aide, ses conseils ainsi que pour les longues discussions autour de notre chère AltaCVD mais aussi au téléphone !! C’était vraiment un grand plaisir de travailler avec toi PDS. Merci encore une fois !! Un grand merci aussi à Dominique Jourde, notre expert de maintenance !! Merci pour ta gentillesse et d’être toujours disponible pour remédier la machine ;) !! Je souhaite remercier aussi toutes les personnes au LCM et au SDEP pour leur gentillesse ainsi que pour leurs conseils et leur aide. Merci à Véronique Sousa (c’était un réel plaisir de discuter avec toi les matins lorsqu’on se croisait dans le tram), Luca Perniola, Carine Jahan, Alain Persico, Rémy Gassilloud, Anne Roule, Chiara Sabbione, Guillaume Veux, Mathieu Bernard. Un grand merci à Gabriele pour les heures passées devant son pc pour créer les lots électriques PCM CVD sous Eyelit, pour le suivi de ces lots étape par étape et pour toutes les discussions sur les résultats électriques obtenus. Enfin, je souhaite remercier mes compagnons de route : les thésards. Un grand merci à Cédric, Salomé, Romain F., Pauline, Priyanka, et les futurs docteurs du LTM : John, Virginie, Romain C., Mathilde, Mouawad et Reynald. Merci pour toutes les pauses café, les sorties bar durant lesquelles nous avons partagé les bonnes et mauvaises nouvelles. Tous ces moments ont rendu ces trois années plus agréables. Merci aussi { Maxime d’avoir supporté tous mes appels téléphoniques au 83615. Merci à Philippe, mon successeur, bon courage pour la suite et ne stresse pas trop tu vas faire une très bonne thèse, j’en suis sûre . Merci à Laurent, Melek, Mohamad, Fares, Ahmad et Tarik pour les longues discussions dans mon bureau, je vous souhaite tous une bonne continuation. Pour finir, j’ai quelques remerciements plus personnels { formuler, { ma famille tout d’abord. Un très grand merci { mes parents que j’admire, qui sans leur soutien et leur confiance, je n’aurais pas pu accompli tout ce travail. Merci encore d’être venu { ma soutenance et de me partager ces moments inoubliables. Merci aussi à mes très chères sœurs Célestina et Graziela et mon handsome bro Doumith qui malgré les distances qui nous séparent étaient pour moi un grand support. Je vous aime fort. Merci à tous mes amis libanais, franco-libanais et français au Liban et en France. Merci à toi Jess pour toutes les pauses entre midi et deux (friends that buy you food are friends for ever lol), les relectures, le dossier M sur ton bureau et pour tout le soutien ces 3 dernières années mais surtout pendant les longs mois de rédaction. Courage plus qu’un mois futur docteur. Merci à Jihane, la personne avec qui je partage tous mes petits secrets, merci de me partager des moments très difficiles. Zouzou ces 3 années de thèse et { Grenoble m’ont permis de te connaitre, un VRAI ami malgré tes petits défauts que je ne vais pas quand même publier mais tu sais de quoi je parle ;) !! Merci à Mira, Betta, Mr et Mme Abou diwan, je suis vraiment chanceuse d’avoir des amis comme vous. Merci à Joe et Charboul, bon courage et bonne chance pour vous deux dans votre « Amercian Dream ». Un grand merci à Mylène, notre organisatrice de première, merci pour ton soutien mais aussi pour toutes les soirées et les sorties qui me font oublier les milliers de km qui me séparent du Liban. Merci à Pauline, Chady et tous les amis que j’ai connu { Grenoble et qui sont pour moi une deuxième famille !! Sans oublier mes meilleurs amies Mona et Sally qui me suivent depuis longtemps maintenant et qui méritent plus d’une ligne de remerciement. Merci pour tout, nos longues discussions me manquent vraiment !! Une autre amie m’est très chère, ma belle sœur « to be » Josiane qui m’écoute, me comprend et essaye toujours de me relever le moral quand ça ne va pas. Un grand merci et bonne chance dans ta nouvelle aventure. Mes derniers remerciements vont à mon amour, mon ami, mon JenJen !! Un Giga merci pour ton amour, ton soutien quotidien, tes encouragements et pour ta patience. Merci d’être toujours { mes côtés, sans toi l’achèvement de ce travail aurait été beaucoup plus dur. Je t’aime très fort Habibi !!! Manuela AOUKAR Mon PC ne RAME plus avec les PCRAM !!! Table des matières Introduction Générale ........................................................................................................................................ 1 Chapitre 1 : Les mémoires à changement de phase : principe, applications et limitations, procédés de dépôt ...... 4 I- Contexte ................................................................................................................................................................. 4 I.1- La technologie des mémoires Flash : principe de fonctionnement et limitations ......................................... 4 I.2- Les mémoires non volatiles émergentes ....................................................................................................... 5 I.2.1- Les mémoires ferroélectriques ............................................................................................................... 6 I.2.2- Les mémoires magnétiques MRAM........................................................................................................ 8 I.2.3- Les mémoires résistives RRAM ............................................................................................................... 9 II- Technologie des mémoires à changement de phase .......................................................................................... 12 II.1- Fonctionnement d’une
Load more

Recommended publications
  • P020190719572604117959.Pdf
    Springer Series in advanced microelectronics 27 Springer Series in advanced microelectronics Series Editors: K. Itoh T. Lee T. Sakurai W.M.C. Sansen D. Schmitt-Landsiedel The Springer Series in Advanced Microelectronics provides systematic information on all the topics relevant for the design, processing, and manufacturing of microelectronic devices. The books, each prepared by leading researchers or engineers in their fields, cover the basic and advanced aspects of topics such as wafer processing, materials, device design, device technologies, circuit design, VLSI implementation, and subsys- tem technology. The series forms a bridge between physics and engineering and the volumes will appeal to practicing engineers as well as research scientists. 18 Microcontrollers in Practice By I. Susnea and M. Mitescu 19 Gettering Defects in Semiconductors By V.A. Perevoschikov and V.D. Skoupov 20 Low Power VCO Design in CMOS By M. Tiebout 21 Continuous-Time Sigma-Delta A/D Conversion Fundamentals, Performance Limits and Robust Implementations By M. Ortmanns and F. Gerfers 22 Detection and Signal Processing Technical Realization By W.J. Witteman 23 Highly Sensitive Optical Receivers By K. Schneider and H.K. Zimmermann 24 Bonding in Microsystem Technology By J.A. Dziuban 25 Power Management of Digital Circuits in Deep Sub-Micron CMOS Technologies By S. Henzler 26 High-Dynamic-Range (HDR) Vision Microelectronics, Image Processing, Computer Graphics Editor: B. Hoefflinger 27 Advanced Gate Stacks for High-Mobility Semiconductors Editors: A. Dimoulas, E. Gusev, P.C. McIntyre, and M. Heyns Volumes 1–17 are listed at the end of the book. A. Dimoulas E. Gusev P.C. McIntyre M.
    [Show full text]
  • Reactive Sputtering of Complex Multi-Component Nitride Thin Films
    Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology 1852 Reactive Sputtering of Complex Multi-component Nitride Thin Films KRISTINA VON FIEANDT ACTA UNIVERSITATIS UPSALIENSIS ISSN 1651-6214 ISBN 978-91-513-0744-2 UPPSALA urn:nbn:se:uu:diva-392704 2019 Dissertation presented at Uppsala University to be publicly examined in Polhemssalen, Ångströmslaboratoriet, Lägerhyddsvägen 1, Uppsala, Friday, 25 October 2019 at 09:15 for the degree of Doctor of Philosophy. The examination will be conducted in English. Faculty examiner: Professor Jean-Francois Pierson (University of Lorraine). Abstract von Fieandt, K. 2019. Reactive Sputtering of Complex Multi-component Nitride Thin Films. Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology 1852. 71 pp. Uppsala: Acta Universitatis Upsaliensis. ISBN 978-91-513-0744-2. The ever-increasing demand on improvement of protective nitride thin films has led to an expansion of the research field into multi-element based materials. The work in this thesis has focused on exploring new complex, multi-component nitride thin films based on three different material systems: Al-Ge-N, Hf-Nb-Ti-V-Zr-N and Al-Cr-Nb-Y-Zr-N. All films were synthesised by reactive dc magnetron sputtering and characterised with regard to structure and material properties, in particular the mechanical, optical and corrosion properties. The Al-Ge-O-N coatings exhibited amorphisation of the structure upon oxygen addition, via the formation of a crystalline (Al1-xGex)(N1-yOy) solid solution phase for low O contents. The mechanical properties were improved, and hardness values up to 29 GPa were achieved for low O and Ge concentrations, most likely due to nanocomposite hardening.
    [Show full text]
  • Ternary Nitride Materials: Fundamentals and Emerging Device Applications Arxiv:2010.08058V1 [Cond-Mat.Mtrl-Sci] 15 Oct 2020
    Ternary Nitride Materials: Fundamentals and Emerging Device Applications Ann L. Greenaway,1 Celeste L. Melamed,2;1 M. Brooks Tellekamp,1 Rachel Woods-Robinson,3;4;1 Eric S. Toberer,2 James R. Neilson5 and Adele C. Tamboli1* 1Materials and Chemistry Science and Technology Directorate, National Renewable Energy Laboratory, Golden, Colorado, United States, 80401 email: [email protected] 2Department of Physics, Colorado School of Mines, Golden, Colorado, United States, 80401 3Applied Science and Technology Graduate Group, University of California at Berkeley, Berkeley, California, United States, 97402 4Energy Technologies Area, Lawrence Berkeley National Laboratory, Berkeley, California, United States, 94720 5Department of Chemistry, Colorado State University, Fort Collins, Colorado, United States, 80523 Keywords ternary nitride, structural chemistry, metastability, nitride synthesis, optoelectronics, battery Abstract Interest in inorganic ternary nitride materials has grown rapidly over the past few decades, as their diversity of chemistries and structures make them appealing for a variety of applications. Due to synthetic challenges posed by the stability of N2, the number of predicted ni- tride compounds dwarfs those that have been synthesized, offering a breadth of opportunity for exploration. This review summarizes the fundamental properties and structural chemistry of ternary nitrides, leveraging metastability and the impact of nitrogen chemical potential. A discussion of prevalent defects, both detrimental and beneficial, is followed by a survey of synthesis techniques and their interplay with arXiv:2010.08058v1 [cond-mat.mtrl-sci] 15 Oct 2020 metastability. Throughout the review, we highlight applications (such as solid-state lighting, electrochemical energy storage, and electronic devices) in which ternary nitrides show particular promise. 1 Contents 1.
    [Show full text]
  • Characterization of Iii-Nitride Thin Films
    ABSTRACT PARK, JI-SOO. Growth and Characterization of GaN and AlGaN Thin Films and Heterostructures and the Associated Development and Evaluation of Ultraviolet Light Emitting Diodes. (Under the direction of Professor Robert F. Davis) AlGaN-based thin film heterostructures have been grown and fabricated into ultraviolet light emitting diodes with and without p-type and/or n-type AlGaN carrier- blocking layers at the top and the bottom of the quantum wells, respectively, and having the principal emission at 353 nm. The highest values of this peak intensity and light output power were measured in the devices containing p-type carrier-blocking layers. Growth of an n-type carrier-blocking layer had an adverse effect on these device characteristics. A broad peak centered at ~540nm exhibited yellow luminescence and was present in the spectra acquired from all the devices. This peak is attributed to absorption of the ultraviolet emission by and re-emission from the p-GaN and/or to the luminescence from the AlGaN within quantum wells by current injection. Individual AlxGa1-xN films (x<0≤1) have been grown on Si- and C-terminated 6H-SiC{0001} substrates and characterized for electron emission applications. The large range in the values of x was achieved by changing the fraction of Al in the gas phase from 0 to 0.45. The ionized donor concentration in the n-type, Si-doped AlxGa1-xN films decreased as the mole fraction of Al was increased due to the reduction in the donor energy level and compensation. The use of the SiH4 flow rate, which yields a Si concentration of ~1 x 1019 cm-3 in GaN, established the upper limit of the mole fraction of Al wherein n-type doping could be achieved at ~0.61.
    [Show full text]
  • Thermally Induced Irreversibility in the Conductivity of Germanium Nitride MARK and Oxynitride films ⁎ N
    Materials Science in Semiconductor Processing 74 (2018) 57–63 Contents lists available at ScienceDirect Materials Science in Semiconductor Processing journal homepage: www.elsevier.com/locate/mssp Thermally induced irreversibility in the conductivity of germanium nitride MARK and oxynitride films ⁎ N. Pintoa,b, , F. Caprolia, G. Maggionic, S. Carturanc, D.R. Napolid a Scuola di Scienze e Tecnologie, sezione di Fisica, Università di Camerino, Camerino, Italy b INFN, sezione di Perugia, Perugia, Italy c INFN, Laboratori Nazionali di Legnaro, Legnaro, PD, Italy d Dipartimento di Fisica e Astronomia, Università di Padova, Padova, Italy ARTICLE INFO ABSTRACT Keywords: We report the evidence for irreversible changes in the conductivity, σT(), of a-Ge3Nx (3.7<<x 4.6) and quasi- Germanium nitride stoichiometric a-Ge2OyNx thin films occurring at T ≳ 630 K, under high vacuum conditions. We have found that Germanium oxynitride σT()curves not only depend on the material properties but also on the thermal history undertaken by films. The Thermal annealing irreversibility in σT(), during heating in vacuum, is correlated to the transformation of the native GeO2 into Electrical conductivity volatile GeO. Thermal annealing in N2 atmosphere, on the contrary, results to extend film stability up to 973 K. At higher T, domes and pits are formed onto the film surface, due to the strong effusion of N-rich volatile species. Unstable N-Ge bonds can explain both the nitrogen thermodynamic instability and the Ge nano-crystallisation process occurring in a-Ge3Nx films, upon heating until 1023 K. Compared to a-Ge3Nx, quasi-stoichiometric a- Ge2OyNx is both more insulating and more stable upon heating up to 1023 K under N2 flow, that makes it a suitable passivating layer material for the fabrication of electronic devices.
    [Show full text]
  • Turbine Engine Component Comprising a Ceramic Matrix
    (19) TZZ¥_¥ _T (11) EP 3 138 829 B1 (12) EUROPEAN PATENT SPECIFICATION (45) Date of publication and mention (51) Int Cl.: of the grant of the patent: C04B 35/56 (2006.01) C04B 35/565 (2006.01) 23.05.2018 Bulletin 2018/21 C04B 35/58 (2006.01) C04B 35/80 (2006.01) C04B 35/628 (2006.01) F01D 5/28 (2006.01) (2006.01) (2006.01) (21) Application number: 16185085.4 F23R 3/00 F23M 5/00 (22) Date of filing: 22.08.2016 (54) TURBINE ENGINE COMPONENT COMPRISING A CERAMIC MATRIX COMPOSITE INCLUDING SILICON CARBIDE FIBERS IN A CERAMIC MATRIX COMPRISING A MAX PHASE COMPOUND TURBINENMOTORKOMPONENT ENTHALTEND EINEN VERBUNDWERKSTOFF MIT KERAMISCHER MATRIX MIT SILICIUMCARBIDFASERN IN EINER KERAMISCHEN MATRIX MIT EINER MAX-PHASE-VERBINDUNG COMPOSANT DE MOTEUR DE TURBINE COMPRENANT UN COMPOSITE À MATRICE CÉRAMIQUE COMPRENANT DES FIBRES DE CARBURE DE SILICIUM DANS UNE MATRICE EN CÉRAMIQUE COMPRENANT UN COMPOSÉ DE PHASE MAX (84) Designated Contracting States: (72) Inventors: AL AT BE BG CH CY CZ DE DK EE ES FI FR GB • Harris, Stephen GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO Long Beach, CA 90803 (US) PL PT RO RS SE SI SK SM TR • Shinavski, Robert Mission Viejo, CA 92691 (US) (30) Priority: 28.08.2015 US 201562211326 P (74) Representative: Rolls-Royce plc (43) Date of publication of application: Intellectual Property Dept SinA-48 08.03.2017 Bulletin 2017/10 PO Box 31 Derby DE24 8BJ (GB) (73) Proprietor: Rolls-Royce High Temperature Composites Inc (56) References cited: Huntington Beach, CA 92648 (US) CN-A- 101 508 591 CN-A- 104 628 407 US-A1- 2010 009 143 US-A1- 2011 170 653 US-A1- 2015 008 613 Note: Within nine months of the publication of the mention of the grant of the European patent in the European Patent Bulletin, any person may give notice to the European Patent Office of opposition to that patent, in accordance with the Implementing Regulations.
    [Show full text]
  • 075-613-P1A STM-2 Operating Manual
    OPERATING MANUAL STM-2 Rate and Thickness Monitor PN 074-613-P1A STM-2 Operating ManualPN 074-613-P1ATOC - #1 - # Title Page OPERATING MANUAL STM-2 Rate and Thickness Monitor PN 074-613-P1A ® www.inficon.com [email protected] ©2014 INFICON Trademarks The trademarks of the products mentioned in this manual are held by the companies that produce them. Windows® and Microsoft® are registered trademarks of Microsoft Corporation. Inconel® is a registered trademark of Inco Alloys International, Huntington, WV. LabVIEWTM is a trademark of National Instruments Corporation. Sycon InstrumentsTM is a trademark of INFICON, Inc. All other brand and product names are trademarks or registered trademarks of their respective companies. Disclaimer The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related to the use of this product. Due to our continuing program of product improvements, specifications are subject to change without notice. Copyright ©2014 All rights reserved. Reproduction or adaptation of any part of this document without permission is unlawful. Warranty WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products manufactured by it, or by an affiliated company and sold by it, and described on the reverse hereof, to be, for the period of warranty coverage specified below, free from defects of materials or workmanship under normal proper use and service. The period of warranty coverage is specified for the respective products in the respective Seller instruction manuals for those products but shall not be less than one (1) year from the date of shipment thereof by Seller.
    [Show full text]
  • EAS Abstracts 2016.Indd
    eas.org Analytical ABSTRACT BOOK Chemistry Opens Doors 2016 EASTERN ANALYTICAL SYMPOSIUM & EXPOSITION Garden State Exhibit Center Somerset, NJ November 14–16, 2016 CALL FOR PAPERS ORAL abstract submission POSTER March 1 - May 15 abstracts 2017 submission March 1 - Sept 12 2017 Building Your Analytical Future 2017 Eastern Analytical Symposium & Exposition Crowne Plaza Princeton – Conference Center Plainsboro, NJ November 13 15, 2017 We invite YOU to be a part of the technical program by contributing a paper for oral or poster consideration. Visit www.eas.org for more details eas.org eas.org 10/11/16 1:18 PM 10/11/16 1:18 PM 2016 EAS Abstracts November 2016 2016 EAS Abstracts This volume contains the final abstracts for the oral and poster presentations which take place Monday, November 14, through Wednesday, November 16, 2016. If an abstract is not provided in this volume or the Addendum, then the presenting author did not supply an abstract. For each abstract provided, a complete mailing address for the presenting author is shown. Additional authors are indicated, however, their mailing addresses are not provided. Schedule and meeting room information for the technical sessions, as well as information concerning short courses, exhibitor workshops, and the exposition, are contained in the Final Program Book. More Information To obtain answers to EAS-related questions after the meeting: EAS Hotline 732-449-2280 EAS E-mail [email protected] EAS Web Site www.EAS.org Eastern Analytical Symposium & Exposition, Inc. P.O. Box 185 Spring Lake, NJ 07762 N N A ALY ER T T IC S A A L E S Y N M O P I T O I SI S U PO M & EX Save the Date The 2017 EAS November 13 - 15, 2017 Crowne Plaza Princeton – Conference Center Plainsboro, NJ We want you to be a part of the 56th Eastern Analytical Symposium! 2017 Call for Papers March 1 – May 16, 2017 1 2016 EAS Abstracts November 2016 ABSTRACTS OF TECHNICAL PAPERS 1 Multidimensional Gas Chromatography: Do More Acronyms Really mirrors on each side of a measurement cell, was proposed in 1987.
    [Show full text]
  • Applied Surface Science Germanium Nitride and Oxynitride Films For
    Applied Surface Science 393 (2017) 119–126 Contents lists available at ScienceDirect Applied Surface Science journal homepage: www.elsevier.com/locate/apsusc Full Length Article Germanium nitride and oxynitride films for surface passivation of Ge radiation detectors a,b,∗ a,b b,c d,e d,e b G. Maggioni , S. Carturan , L. Fiorese , N. Pinto , F. Caproli , D.R. Napoli , f f M. Giarola , G. Mariotto a Dipartimento di Fisica e Astronomia G. Galilei, Università di Padova, Via Marzolo 8, I-35131 Padova, Italy b Laboratori Nazionali di Legnaro, Istituto Nazionale di Fisica Nucleare, Viale dell’Universita’2, I-35020 Legnaro, Padova, Italy c Dipartimento di Ingegneria dei Materiali e delle Tecnologie Industriali, Università di Trento, Via Mesiano 77, I-38050 Povo, Trento, Italy d Scuola di Scienze e Tecnologie, Sezione di Fisica, Università di Camerino, Via Madonna delle Carceri 9, Camerino, Italy e INFN, Sezione di Perugia, Perugia, Italy f Dipartimento di Informatica—Università di Verona, Strada le Grazie 15, I-37134 Verona, Italy a r t i c l e i n f o a b s t r a c t Article history: This work reports a detailed investigation of the properties of germanium nitride and oxynitride films Received 6 June 2016 to be applied as passivation layers to Ge radiation detectors. All the samples were deposited at room Received in revised form 9 September 2016 temperature by reactive RF magnetron sputtering. A strong correlation was found between the deposition Accepted 2 October 2016 parameters, such as deposition rate, substrate bias and atmosphere composition, and the oxygen and Available online 4 October 2016 nitrogen content in the film matrix.
    [Show full text]
  • Advanced Germanium Complementary-Metal-Oxide-Semiconductor Technologies
    ADVANCED GERMANIUM COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR TECHNOLOGIES A DISSERTATION SUBMITTED TO THE DEPARTMENT OF ELECTRICAL ENGINEERING AND THE COMMITTEE ON GRADUATE STUDIES OF STANFORD UNIVERSITY IN PARTIAL FULFILLMENT OF THE REQUIREMENTS FOR THE DEGREE OF DOCTOR OF PHILOSOPHY Chi On Chui August 2004 © Copyright by Chi On Chui 2004 All Rights Reserved ii I certify that I have read this dissertation and that, in my opinion, it is fully adequate in scope and quality as a dissertation for the degree of Doctor of Philosophy. __________________________________________ Krishna C. Saraswat (Principal Advisor) I certify that I have read this dissertation and that, in my opinion, it is fully adequate in scope and quality as a dissertation for the degree of Doctor of Philosophy. __________________________________________ Yoshio Nishi I certify that I have read this dissertation and that, in my opinion, it is fully adequate in scope and quality as a dissertation for the degree of Doctor of Philosophy. __________________________________________ Paul C. McIntyre Approved for the University Committee on Graduate Studies __________________________________________ iii This thesis is dedicated to my family iv Abstract Drive current saturation in scaled Si MOSFETs is fundamentally limiting the prospect of future scaling. To overcome this scaling bottleneck and allow further improvements on short-channel MOSFET drive current, Ge MOSFET channel with high carrier mobility and source injection velocity should be incorporated. However, the unstable Ge native oxide for gate insulation and field isolation, together with the high diffusivity and low solubility of n-type Ge dopants for source and drain junction formation are the two classical problems that have obstructed CMOS device realization in Ge for four decades.
    [Show full text]
  • Denton Infinity 22 E-Beam Evaporation Users Manual
    Denton Infinity 22 E-beam Evaporation Users Manual Coral name: E-beam Evap 2 Model: Infinity 22 Location: CNST NanoFab, Building 215, Room B104 Contact: [email protected] Version: 1.0 Page | Coral Name: E-Beam 2 Equipment Information Sheet CNST NanoFab Denton Electron Beam Evaporator #2 TOOL CONTACT INFORMATION Phone Extension Email Process: Gerard Henein x5645 [email protected] Process: Jerry Bowser x8187 [email protected] Maintenance: Bill Young x4467 [email protected] Maintenance: Larry Buck x2242 [email protected] Training: Gerard Henein x5645 [email protected] APPLICATIONS Vacuum deposition of metallic and dielectric thin films SYSTEM 6-pocket electron gun turret Oxygen ion gun for ion-assisted deposition and native oxide removal Base vacuum: 1E-7 Torr Pumpdown from atmosphere to 3E-6 Torr in ~ 20 minutes SAFETY No unusual hazards during normal operation Do not attempt to unjam turret if stuck. Contact NanoFab staff for help. MATERIAL RESTRICTIONS No high vapor pressure materials (Bi, Pb, Sn, Zn, Cd, etc.). No In, Li. Maximum thickness per layer 200nm. Any exception must be approved by NanoFab staff REQUIREMENTS Only qualified users may operate MUST LOGIN TO CORAL AND ENABLE TOOL BEFORE OPERATING Fill out logbook Make sure materials are loaded in correct pockets Make sure beam is centered in pocket (LED indicators and direct view) PROHIBITIONS Never touch any internal part on the tool with bare hands or contaminated gloves Contact staff before depositing any new material OTHER INFORMATION Page | Always check the material file parameters in film deposition controller prior to evaporation Report problem to the maintenance staff and leave a note on Coral Always leave tool pumped down when you are finished Overview This tool is an electron beam evaporator (also referred to as “electron gun” or “e-beam”).
    [Show full text]
  • Structural, Electronic, and Thermodynamic Properties of Tetragonal T-Sixge3−Xn4
    materials Article Structural, Electronic, and Thermodynamic Properties of Tetragonal t-SixGe3−xN4 Chenxi Han 1, Changchun Chai 1, Qingyang Fan 1,*, Jionghao Yang 2 and Yintang Yang 1 1 Key Laboratory of Ministry of Education for Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi’an 710071, China; [email protected] (C.H.); [email protected] (C.C.); [email protected] (Y.Y.) 2 Xi’an Institute of Applied Optics, Xi’an 710065, China; [email protected] * Correspondence: [email protected]; Tel.: +86-29-88202507 Received: 23 January 2018; Accepted: 4 March 2018; Published: 7 March 2018 Abstract: The structural, mechanical, anisotropic, electronic, and thermal properties of t-Si3N4, t-Si2GeN4, t-SiGe2N4, and t-Ge3N4 in the tetragonal phase are systematically investigated in the present work. The mechanical stability is proved by the elastic constants of t-Si3N4, t-Si2GeN4, t-SiGe2N4, and t-Ge3N4. Moreover, they all demonstrate brittleness, because B/G < 1.75, and v < 0.26. The elastic anisotropy of t-Si3N4, t-Si2GeN4, t-SiGe2N4, and t-Ge3N4 is characterized by Poisson’s ratio, Young’s modulus, the percentage of elastic anisotropy for bulk modulus AB, the percentage of elastic anisotropy for shear modulus AG, and the universal anisotropic index U A . The electronic structures of t-Si3N4, t-Si2GeN4, t-SiGe2N4, and t-Ge3N4 are all wide band gap semiconductor materials, with band gaps of 4.26 eV, 3.94 eV, 3.83 eV, and 3.25 eV, respectively, when using the Heyd-Scuseria-Ernzerhof (HSE06) hybrid functional.
    [Show full text]