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Japan Information & Control Standards Committee Japan Information & Control Standards Committee Meeting Summary and Minutes Japan Standards Fall Meetings 2012 September 7, 2012, 13:30-17:00 Japan Time Oshima Conference Room 1 & 2, SEMI Japan, Tokyo, Japan Committee Announcements Next Committee Meeting Friday, December 7, 2012, 13:00-17:00 Japan Time Makuhari Messe, Chiba, Japan Table 1 Meeting Attendees Italics indicate virtual participants Co-Chairs: Takayuki Nishimura (Dainippon Screen MFG.), Mitsuhiro Matsuda (Hitachi Kokusai Electric) SEMI Staff: Chie Yanagisawa Attendee: 13 + SEMI: 2 Company Last First Company Last First Algosystem Tanaka Yasuhiro Tokyo Electron Murata Naoko Cannon Anelva Sato Mitsugu Tokyo Electron Sakamoto Mitch Software Technologies Dainippon Screen MFG. Nishimura Takayuki Tokyo Electron Mochizuki Tadashi Software Technologies FB Consult Somei Tadashi Tokyo Seimitsu Sasaki Mie Hitachi High Toyoshima Yuko YOKOGAWA Nakagawa Takashi Technologies Mitsubishi Electric Sambu Ken Tokyo Electron Asakawa Terry SEMI Korea Shim Natalie Tokyo Electron Murakami Takashi SEMI Japan Yanagisawa Chie Table 2 Leadership Changes Group Previous Leader New Leader Predictive Carrier Logistics (PCL) TF --- Terry Asakawa (Tokyo Electron) Table 3 Ballot Results (or move to Section 4, Ballot Review) Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review. Failed ballots and line items were returned to the originating task forces for re-work and re-balloting. Document # Document Title Committee Action None Table 4 Authorized Ballots # When SC/TF/WG Details 5423 Cycle 7 GEM300 TF Line-item Revision to SEMI E40.1-0312 SECS-II Support for Processing Management Standard and SEMI E5-0611E SEMI Equipment Communication Standard 2 Message Content (SECS-II); Add mapping to PPID for RecIDAction Item Review Japan I&C Committee 1 September 7, 2012 Meeting Minutes SEMI Japan Table 5 Authorized Activities # Type SC/TF/WG Details TFOF Predictive New Task Force Carrier Logistics (PCL) TF 5486 SNARF PCL TF SNARF for: New Standard: Specification for Predictive Carrier Logistics Information from Equipment to be used for Predictive Carrier Logistics Management Note: SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF AGENDA 1. Welcome, Self-Introduction, Agenda Review and SEMI Standards Legal Reminders 2. SEMI Staff Report 3. Review and Approval of Previous Meeting Minutes (2012/6/5) 4. Previous Action Item Review 5. Liaison Reports 6. Task Force Reports 7. Old Business 8. New Business 9. Action Item Review 10. Next Meeting 11. Adjournment 1 Welcome, Reminders, and Introductions Takayuki Nishimura (Dainippon Screen MFG.) called the meeting to order at 13:30. 1.1 Self-Introduction Attendees introduced themselves. 1.2 Agenda Review Agenda was reviewed by Takayuki Nishimura (Dainippon Screen MFG.). Chie Yanagisawa (SEMI Japan) proposed to delete “7.1 Report for the previous Action Item JICC120419-3”, because the Action Item was done in the previous meeting on June 6, 2012. 1.3 SEMI Standards Legal Reminder Chie Yanagisawa (SEMI Japan) reminded SEMI standards legal reminder as follows: • Program Membership Requirement • SEMI Antitrust Reminder • Intellectual Property Reminder • International Meeting Guidelines [Attachment: JICC_20120907-01] 2 SEMI Staff Report Chie Yanagisawa (SEMI Japan) presented the SEMI Staff Report. Of note: • Standards Meeting Schedule in Future • SEMICON Japan 2012 • 2012 Critical Dates for SEMI Standards Ballots • SEMI Standards Publications • A&R Recent Review Cycles Japan I&C Committee 2 September 7, 2012 Meeting Minutes SEMI Japan • Introduction of GoToMeeting • JRSC Planning Meeting • Contact Information [Attachment: JICC_20120907-02] 3 Review and Approval of Previous Meeting Minutes (2012/6/5) The committee reviewed the minutes draft of the previous meeting. Motion: To approve the previous meeting minutes as written. By / 2nd: Mitch Sakamoto (Tokyo Electron Software Technologies) / Tadashi Mochizuki (Tokyo Electron Software Technologies) Discussion: None. Vote: 11-0 in favor. Motion passed. [Attachment: JICC_20120907-03] 4 Action Item Review Table 6 Previous Meeting Actions Items Item # Action Item (AI holder) Details JICC120419-2 To encourage SEMI HQ Standards to post tentative Standards Ongoing. Meetings Schedule, for example half a year in advance or as To check if this Action Item to be moved soon as the candidate week is fixed, in order that Standards to JRSC Action Item members could arrange TC schedules. (Chie Yanagisawa / SEMI Japan) Done. This Action Item was moved to JRSC Action Item. JICC120419-4 To collect comments about SNARF pre-distribution rule from all Ongoing. members of Japan Information & Control Committee. This Action Item to be discussed at 7.1 of (Mitsuhiro Matsuda / Hitachi Kokusai Electric and Chie the agenda. Yanagisawa / SEMI Japan) 5 Liaison Reports 5.1 North America Information & Control Committee Liaison Report Reported by Takayuki Nishimura (Dainippon Screen MFG.). Of note: • Leadership • Organization Chart • Meeting Information • Ballot Results • Upcoming Ballots • Task Force Reports • Upcoming Meeting Schedule [Attachment: JICC_20120907-04] 5.2 European Equipment Automation Liaison Report No update. 5.3 Taiwan Information & Control Committee Liaison Report No update. Japan I&C Committee 3 September 7, 2012 Meeting Minutes SEMI Japan 5.4 Korea Liaison Report Reported by Chie Yanagisawa (SEMI Japan). Of note: • Leadership • Organization Chart • Meeting Information Natalie Shim (SEMI Korea) gave a summary of Korea GEM300 TF meeting on August 29, 2012. One point is that TF did not reach the agreement on either “add extendibility in #4946” or “agree upon development of comprehensive standard”. The other point is the discussion was raised about the voting at previous NA GEM300 TF meeting Natalie Shim (SEMI Korea) also added a comment that no decision related to EPT document was made. [Attachment: JICC_20120907-05] 6 Task Force Reports and other meeting reports (TF Leader) 6.1 AMHS TF (Hiroshi Kondo / Murata Machinery, Mitsumasa-Ago / Daifuku) Chie Yanagisawa (SEMI Japan) conveyed a message form Hiroshi Kondo (Murata Machinery) that there was no activity about the TF. 6.2 GEM300 TF (Tadashi Mochizuki / Tokyo Electron Software Technologies, Yoshihisa Takasaki / Dainippon Screen MFG.) Tadashi Mochizuki (Tokyo Electron Software Technologies) presented the GEM300 TF report as attached. The key items were as follows: • Discussion and communications on the Korea document 4946 (Revision to E87). • Activities about #5367, #5423, #5454 and #5481. [Attachment: JICC_20120907-06] 6.3 Equipment Information System Security (EISS) TF (Mitch Sakamoto / Tokyo Electron Software Technologies) Mitch Sakamoto (Tokyo Electron Software Technologies) presented the Equipment Information System Security (EISS) TF report as attached. [Attachment: JICC_20120907-07] 6.4 Sensor Bus TF (Hideaki Ogihara / MKS Japan) No update. 7 Old Business 7.1 Report for the previous Action Item JICC120419-4: To collect comments about SNARF pre-distribution rule from all members of Japan Information & Control Committee. Ongoing. 8 New Business 8.1 Proposal for Ballot Submission: Doc. #5423 Line-item Revision to SEMI E40.1-0312 SECS-II Support for Processing Management Standard and SEMI E5-0611E SEMI Equipment Communication Standard 2 Message Content (SECS-II); Add mapping to PPID for RecIDAction Item Review (GEM300 TF) Tadashi Mochizuki (Tokyo Electron Software Technologies) presented a ballot draft for Doc. #5423 Line-item Revision to SEMI E40.1-0312 SECS-II Support for Processing Management Standard and SEMI E5-0611E SEMI Japan I&C Committee 4 September 7, 2012 Meeting Minutes SEMI Japan Equipment Communication Standard 2 Message Content (SECS-II); Add mapping to PPID for RecIDAction Item Review from GEM300 TF, which was reviewed by Japan Information & Control committee. Motion: To approve the submission of #5423 ballot to Cycle 7-2012 By / 2nd: Tadashi Mochizuki (Tokyo Electron Software Technologies) / Terry Asakawa (Tokyo Electron) Discussion: PPID will be written in text in SEMI E40.1 but is written in binary or ASCII in SEMI E5. Is it OK that the description method is inconsistent between SEMI E40.1 and SEMI E5? SEMI E40.1 refers to SEMI E5. Vote: 9-0 in favor. Motion passed. 8.2 Proposal for TFOF and SNARF: TFOF for Predictive Carrier Logistics (PCL) TF and New SNARF for New Standard: Specification for Predictive Carrier Logistics Information from Equipment to be used for Predictive Carrier Logistics Management Terry Asakawa (Tokyo Electron) presented a TFOF for Predictive Carrier Logistics (PCL) TF and a SNARF for New Standard: Specification for Predictive Carrier Logistics Information from Equipment to be used for Predictive Carrier Logistics Management, which was reviewed by Japan Information & Control Committee. Motion: To approve a TFOF for Predictive Carrier Logistics (PCL) TF and a SNARF for New Standard: Specification for Predictive Carrier Logistics Information from Equipment to be used for Predictive Carrier Logistics Management By / 2nd: Terry Asakawa (Tokyo Electron) / Naoko Murata (Tokyo Electron) Discussion: The TFOF and the SNARF were distributed to the global I&C GCS members and to the NA, Korea and Japan GEM300 TF members. The feedback to the TFOF and the SNARF from HyungSu Kim (Samsung Electronics), Chul Hong AHN (SK Hynix) and David Bricker (Applied Materials) were introduced at the Japan Information & Control Committee meeting. Regulation
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