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Safety Data Sheet Material Name: AutoClean SDS ID: 00231763 ()

SECTION 1: Identification

Product identifier Material Name AutoClean Synonyms DIFLUORIDE; XENON (XeF2); XENON(II) FLUORIDE (F2Xe); F2Xe Chemical Family fluoride, inorganic Product Use semiconductor manufacture, general synthetic chemical Restrictions on Use None known. Details of the supplier of the safety data sheet Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA

Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America)

Supplier Entegris Singapore Pte. Ltd. 30A Kallang Place, #13-01 Singapore 339213

Telephone: +65-6745-2422 Fax: +65-6745-4477

Emergency # 800-101-2201 (CHEMTREC Toll Free in country) +(65)-31581349 (CHEMTREC local in country) 1-703-527-3887 (CHEMTREC International) E-mail: [email protected]

SECTION 2: Hazards identification

Singapore Standard SS 586-2:2014 Oxidizing Solids - Category 2 Acute Toxicity - Oral - Category 3 Acute Toxicity - Inhalation - Dust/Mist - Category 2 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific Target Organ Toxicity - Single Exposure - Category 3 ( respiratory system ) Label elements

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Safety Data Sheet Material Name: AutoClean SDS ID: 00231763 (SINGAPORE)

Hazard symbols

Signal word Danger Hazard statements H272 May intensify fire; oxidizer. H330 Fatal if inhaled. H301 Toxic if swallowed. H314 Causes severe skin burns and eye damage. H335 May cause respiratory irritation. Precautionary statements Prevention P210 Keep away from heat. P220 Keep/Store away from clothing/combustible materials. P221 Take any precaution to avoid mixing with combustibles. P260 Do not breathe dust. P264 Wash thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P284 Wear respiratory protection. P270 Do not eat, drink or smoke when using this product. P271 Use only outdoors or in a well-ventilated area. Response P370+P378 In case of fire: Use appropriate media to extinguish. P310 Immediately call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P320 Specific treatment is urgent (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Storage P403+P233 Store in a well-ventilated place. Keep container tightly closed. P405 Store locked up. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Other Hazards Which Do Not Result in Classification May form combustible dust concentrations in air (during handling or processing).

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Safety Data Sheet Material Name: AutoClean SDS ID: 00231763 (SINGAPORE)

SECTION 3: Composition / information on ingredients

CAS Component Name Percent

13709-36-9 XENON DIFLUORIDE 100 Impurities and stabilizing additives contributing to the GHS Classification None

SECTION 4: First aid measures

Inhalation If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. Skin contact Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get immediate medical attention. Thoroughly clean and dry contaminated clothing before reuse. Destroy contaminated shoes. Eye contact Immediately flush eyes with plenty of water for at least 60 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. Ingestion If swallowed, do NOT induce vomiting. Rinse mouth. Get immediate medical attention. Most Important Symptoms/Effects Acute Fatal if inhaled, toxic if swallowed, respiratory tract burns, skin burns, eye burns, mucous membrane burns Delayed No information on significant adverse effects. Indication of any immediate medical attention and special treatment needed None known. Note to Physicians For inhalation, consider oxygen. Avoid gastric lavage or emesis.

SECTION 5: Firefighting measures

Flammable Properties Negligible fire hazard. Oxidizer. May ignite or explode on contact with combustible materials. Avoid generating dust; fine dust dispersed in air in sufficient concentrations, and in the presence of an ignition source is a potential dust explosion hazard. Suitable extinguishing media Water, Large fires: Flood with water. Apply water from a protected location or from a safe distance. Unsuitable Extinguishing Media Do not use dry chemicals or foams. Special Hazards Arising from the Chemical Negligible fire hazard. Oxidizer. May ignite or explode on contact with combustible materials. Avoid generating dust; fine dust dispersed in air in sufficient concentrations, and in the presence of an ignition source is a potential dust explosion hazard. Hazardous combustion products ______Page 3 of 11 Issue date: 2020-05-13 Revision 3.3 Print date: 2020-05-13

Safety Data Sheet Material Name: AutoClean SDS ID: 00231763 (SINGAPORE)

halogenated compounds Fire Fighting Measures Move container from fire area if it can be done without risk. Cool containers with water spray until well after the fire is out. Stay away from the ends of tanks. For fires in cargo or storage area: Cool containers with water from unmanned hose holder or monitor nozzles until well after fire is out. Flood with water. Apply water from a protected location or from a safe distance. Avoid inhalation of material or combustion by- products. Stay upwind and keep out of low areas. Evacuate if fire gets out of control or containers are directly exposed to fire. Evacuation radius: 800 meters (1/2 mile). Special Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure.

SECTION 6: Accidental release measures

Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. Environmental precautions Avoid release to the environment. Methods and Materials for Containment and Cleaning Up In case of fire, use media appropriate for extinction. Stop leak if possible without personal risk. Keep unnecessary people away, isolate hazard area and deny entry. If sweeping of a contaminated area is necessary, use a dust suppressant agent. Avoid contact with combustible materials. Do not touch spilled material. Do not get water inside container. Collect spill using a vacuum cleaner with a HEPA filter or wet and scoop up dry spills. Avoid sweeping spilled dry material. Eliminate ignition sources including sources of electrical, static or frictional sparks. Small spills: Collect spilled material in appropriate container for disposal. Move containers away from spill to a safe area. Large spills: Dike for later disposal.

SECTION 7: Handling and storage

Precautions for safe handling Keep away from heat. Keep/store away from clothing and other combustible materials. Take any precaution to avoid mixing with combustibles. Do not breathe dust. Wear protective gloves/clothing and eye/face protection. Wear respiratory protection. Use only outdoors or in a well-ventilated area. Do not eat, drink, or smoke when using this product. Wash thoroughly after handling. Use methods to minimize dust. Avoid significant deposits of material, especially on horizontal surfaces, which may become airborne and form combustible dust clouds and may contribute to secondary explosions. Conditions for safe storage, including any incompatibilities Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store and handle in accordance with all current regulations and standards. Store under an inert atmosphere. Avoid contact with water or moisture. Keep separated from incompatible substances. Incompatible Materials combustible materials, metals, oxidizing materials, reducing agents

SECTION 8: Exposure controls/personal protection

Exposure Guidelines Component Exposure Limits

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Safety Data Sheet Material Name: AutoClean SDS ID: 00231763 (SINGAPORE)

XENON DIFLUORIDE 13709-36-9

Singapore: 2.5 mg/m3 PEL as F (related to )

ACGIH: 2.5 mg/m3 TWA as F (related to Fluorides) Biological limit value 2 mg/l Medium: urine Time: prior to shift Parameter: Fluoride (background, nonspecific ); 3 ACGIH: mg/l Medium: urine Time: end of shift Parameter: Fluoride (background, nonspecific ) (related to Fluorides) Engineering controls Provide local exhaust or process enclosure ventilation system. Ensure that dust-handling systems (such as exhaust ducts, dust collectors, vessels, and processing equipment) are designed in a manner to prevent the escape of dust into the work area (i.e., there is no leakage from the equipment). Ensure compliance with applicable exposure limits. PERSONAL PROTECTIVE EQUIPMENT Eye/face protection Wear splash resistant safety goggles with a faceshield. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. Protective Clothing Wear appropriate chemical resistant clothing. Glove Recommendations Wear appropriate chemical resistant gloves. Respiratory Protection The following respirators and maximum use concentrations are drawn from NIOSH and/or OSHA. Measurement Element: F. 12.5 mg/m3. Any quarter-mask respirator. 25 mg/m3. Any particulate respirator equipped with an N95, R95, or P95 filter (including N95, R95, and P95 filtering facepieces) except quarter- mask respirators. The following filters may also be used: N99, R99, P99, N100, R100 or P100. Any supplied-air respirator. 62.5 mg/m3. Any supplied-air respirator operated in a continuous-flow mode. Any air-purifying respirator with a high-efficiency particulate filter. May need acid gas sorbent. 125 mg/m3. Any air-purifying, full-facepiece respirator equipped with an R100 or P100 filter. May need acid gas sorbent. Any self-contained breathing apparatus with a full facepiece. Any supplied-air respirator with a full facepiece. 250 mg/m3. Any supplied-air respirator with a full facepiece that is operated in a pressure-demand or other positive-pressure mode. Emergency or planned entry into unknown concentrations or IDLH conditions -. Any self-contained breathing apparatus that has a full facepiece and is operated in a pressure-demand or other positive-pressure mode. Any supplied-air respirator with a full facepiece that is operated in a pressure- demand or other positive-pressure mode in combination with an auxiliary self-contained breathing apparatus operated in pressure-demand or other positive-pressure mode. Escape -. Any air-purifying, full-facepiece respirator equipped with an R100 or P100 filter. May need acid gas sorbent. Any appropriate escape-type, self-contained breathing apparatus.

SECTION 9: Physical and chemical properties

white crystalline Appearance Physical State solid powder Odor Not available Color white

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Safety Data Sheet Material Name: AutoClean SDS ID: 00231763 (SINGAPORE)

Odor Threshold Not available pH Not available 129 - 140 °C Boiling Point Not available Boiling Point Range Not available Freezing point Not available Evaporation Rate Not available Flammability (solid, gas) Not flammable Autoignition (Not applicable Not available Flash Point Temperature ) Lower Explosive Not available Decomposition temperature >800 °C Limit Upper Explosive 3.8 mmHg @ Not available Limit 21 °C Vapor 5.9 Specific Gravity (water=1) 3.13 - 4.32 (air=1) Partition coefficient: n- Water Solubility (Reacts ) Not available octanol/water Viscosity Not available Kinematic viscosity Not available Solubility (Other) Not available Density Not available Physical Form crystalline powder Sublimation 114 °C

Molecular Formula Xe-F2 Molecular Weight 169.29 triple point 129.03 °C

SECTION 10: Stability and reactivity

Reactivity May react on contact with water. Releases toxic and/or corrosive gases. Chemical stability May react on contact with water. Releases toxic and/or corrosive gases. Possibility of hazardous reactions Will not polymerize. Conditions to avoid Avoid accumulation of airborne dusts. Avoid contact with combustible materials. Minimize contact with material. Avoid contact with water or moisture. Materials to Avoid (Incompatibilities) combustible materials, metals, oxidizing materials, reducing agents Hazardous decomposition products halogenated compounds Water or Moisture

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Safety Data Sheet Material Name: AutoClean SDS ID: 00231763 (SINGAPORE)

SECTION 11: Toxicological information

Information on Likely Routes of Exposure Inhalation: Fatal if inhaled, burns Skin contact burns Eye contact burns Ingestion Toxic if swallowed, burns Component Analysis - LD50/LC50 The components of this material have been reviewed in various sources and no selected endpoints have been identified. Acute Toxicity Estimate Inhalation - Dust and Mist 0.06 mg/L

Oral 100 mg/kg Immediate Effects Fatal if inhaled, toxic if swallowed, respiratory tract burns, skin burns, eye burns, mucous membrane burns Delayed Effects No information on significant adverse effects. Irritation/Corrosivity Data respiratory tract burns, skin burns, eye burns, mucous membrane burns Respiratory Sensitization No data available. Dermal Sensitization No data available. Carcinogenicity Component Carcinogenicity XENON 13709-36-9 DIFLUORIDE

ACGIH: A4 - Not Classifiable as a Human Carcinogen (related to Fluorides)

Supplement 7 [1987] (used in drinking-water ); Monograph 27 [1982] (related IARC: to Fluorides, inorganic) (Group 3 (not classifiable)) Mutagenic Data No data available. Reproductive Effects Data No data available. Tumorigenic Data No data available. Specific Target Organ Toxicity - Single Exposure respiratory system Specific Target Organ Toxicity - Repeated Exposure No data available.

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Safety Data Sheet Material Name: AutoClean SDS ID: 00231763 (SINGAPORE)

Aspiration hazard No data available. Medical Conditions Aggravated by Exposure eye disorders, respiratory disorders, skin disorders and allergies

SECTION 12: Ecological information

Component Analysis - Aquatic Toxicity No LOLI ecotoxicity data are available for this product's components. Persistence No data available. Bioaccumulative potential No data available. Mobility No data available. Other adverse effects Will decompose on contact with water to form hydrogen fluoride.

SECTION 13: Disposal considerations

Disposal Methods Dispose in accordance with all applicable regulations. Component waste information There is no applicable waste information for this product's components. Contaminated packaging disposal Dispose in accordance with all applicable regulations.

SECTION 14: Transport information

IATA Information: Shipping Name: OXIDIZING SOLID, CORROSIVE, N.O.S. , ( Contains: XENON DIFLUORIDE ) Hazard Class: 5.1 UN#: UN3085 Packing Group: I Required Label(s): 5.1, 8

ICAO Information: Shipping Name: OXIDIZING SOLID, CORROSIVE, N.O.S. , ( Contains: XENON DIFLUORIDE ) Hazard Class: 5.1 UN#: UN3085 Packing Group: I Required Label(s): 5.1, 8

IMDG Information: Shipping Name: OXIDIZING SOLID, CORROSIVE, N.O.S. , ( Contains: XENON DIFLUORIDE ) Hazard Class: 5.1 UN#: UN3085 Packing Group: I Required Label(s): 5.1, 8 ______Page 8 of 11 Issue date: 2020-05-13 Revision 3.3 Print date: 2020-05-13

Safety Data Sheet Material Name: AutoClean SDS ID: 00231763 (SINGAPORE)

International Bulk Chemical Code This material does not contain any chemicals required by the IBC Code to be identified as dangerous chemicals in bulk. Special precautions None

SECTION 15: Regulatory information

Singapore Regulations List of Hazardous Substances No information was found for the substance(s) on the List of Hazardous Substances. Poisons List No information was found for the substance(s) on the List of Hazardous Substances. Hazardous Substance Transport Quantities None of this product's components are on the list. Maritime and Port Authority This product contains no components identified on Singapore's Maritime and Port Authority - Dangerous Goods. Arms and Explosives Act None of this product's components are on the list. Schedule of Chemical Weapons None of this product's components are on the list. Misuse of Drugs Act None of this product's components are on the list. Petroleum and Flammable Materials This product contains no components identified on Singapore's Petroleum and Flammable Materials. Strategic Goods Control This product contains no components identified on Singapore's Strategic Goods Control. Toxic Industrial Wastes This product contains no components identified on Singapore's Toxic Industrial Wastes. Component Analysis - Inventory XENON DIFLUORIDE (13709-36-9) US CA AU CN EU JP - ENCS JP - ISHL KR KECI - Annex 1 KR KECI - Annex 2

Yes NSL Yes No EIN No No Yes No

KR - REACH CCA MX NZ PH TH-TECI TW VN (Draft)

No No Yes Yes No Yes Yes

SECTION 16: Other information

NFPA Ratings Health: 3 Fire: 0 Instability: 1 Other: OX Hazard Scale: 0 = Minimal 1 = Slight 2 = Moderate 3 = Serious 4 = Severe Summary of Changes 4/27/2020 - Update to Section(s) 2, 4, 5, 6, 7, 8, 9, 10, 11, 15.

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Safety Data Sheet Material Name: AutoClean SDS ID: 00231763 (SINGAPORE)

Preparation and Revision Date 3/26/2012 Revision date 4/27/2020 Key / Legend ACGIH - American Conference of Governmental Industrial Hygienists; ADR - European Road Transport; AU - Australia; BOD - Biochemical Oxygen Demand; C - Celsius; CA - Canada; CA/MA/MN/NJ/PA - California/Massachusetts/Minnesota/New Jersey/Pennsylvania*; CAS - Chemical Abstracts Service; CERCLA - Comprehensive Environmental Response, Compensation, and Liability Act; CFR - Code of Federal Regulations (US); CLP - Classification, Labelling, and Packaging; CN - ; CPR - Controlled Products Regulations; DFG - Deutsche Forschungsgemeinschaft; DOT - Department of Transportation; DSD - Dangerous Substance Directive; DSL - Domestic Substances List; EC – European Commission; EEC - European Economic Community; EIN - European Inventory of (Existing Commercial Chemical Substances); EINECS - European Inventory of Existing Commercial Chemical Substances; ENCS - Existing and New Chemical Substance Inventory; EPA - Environmental Protection Agency; EU - European Union; F - Fahrenheit; F - Background (for Venezuela Biological Exposure Indices); IARC - International Agency for Research on Cancer; IATA - International Air Transport Association; ICAO - International Civil Aviation Organization; IDL - Ingredient Disclosure List; IDLH - Immediately Dangerous to Life and Health; IMDG - International Maritime Dangerous Goods; ISHL - Japan Industrial Safety and Health Law; IUCLID - International Uniform Chemical Information Database; JP - Japan; Kow - Octanol/water partition coefficient; KR KECI Annex 1 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL); KR KECI Annex 2 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL) , KR - Korea; LD50/LC50 - Lethal Dose/ Lethal Concentration; KR REACH CCA - Korea Registration and Evaluation of Chemical Substances Chemical Control Act; LEL - Lower Explosive Limit; LLV - Level Limit Value; LOLI - List Of LIsts™ - ChemADVISOR’s Regulatory Database; MAK - Maximum Concentration Value in the Workplace; MEL - Maximum Exposure Limits; MX – Mexico; Ne- Non-specific; NFPA - National Fire Protection Agency; NIOSH - National Institute for Occupational Safety and Health; NJTSR - New Jersey Trade Secret Registry; Nq - Non-quantitative; NSL – Non-Domestic Substance List (Canada); NTP - National Toxicology Program; NZ - New Zealand; OSHA - Occupational Safety and Health Administration; PEL- Permissible Exposure Limit; PH - Philippines; RCRA - Resource Conservation and Recovery Act; REACH- Registration, Evaluation, Authorisation, and restriction of Chemicals; RID - European Rail Transport; SARA - Superfund Amendments and Reauthorization Act; Sc - Semi-quantitative; STEL - Short-term Exposure Limit; TCCA – Korea Toxic Chemicals Control Act; TDG - Transportation of Dangerous Goods; TH-TECI - Thailand - FDA Existing Chemicals Inventory (TECI); TLV - Threshold Limit Value; TSCA - Toxic Substances Control Act; TW – ; TWA - Time Weighted Average; UEL - Upper Explosive Limit; UN/NA - United Nations /North American; US - United States; VLE - Exposure Limit Value (Mexico); VN (Draft) - Vietnam (Draft); WHMIS - Workplace Hazardous Materials Information System (Canada). Other Information Disclaimer: The information in this (Material) Safety Data Sheet ("(M)SDS") is believed to be current and accurate as of the time of shipment of the product by Entegris. Entegris makes no warranties, express or implied, with respect to such information, including, without limitation, the implied warranties of merchantability and fitness for a particular purpose. Entegris assumes no liability for any loss or injury which may result from the use of the information contained in this (M)SDS. The chemical, physical and toxicological properties of the Entegris product described in this (M)SDS have not been thoroughly investigated. Users are responsible for exercising due care in using the Entegris product, and for conducting their own investigation to determine whether the product is fit for their particular purpose and suitable for their method of use or application. It is ______Page 10 of 11 Issue date: 2020-05-13 Revision 3.3 Print date: 2020-05-13

Safety Data Sheet Material Name: AutoClean SDS ID: 00231763 (SINGAPORE)

the user's responsibility to ensure that its activities comply with all applicable laws and regulations. Entegris is a registered trademark of Entegris Inc. or an affiliated company. © 2015 Entegris Inc. or affiliated company. All rights reserved.

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