Safety Data Sheet Material Name: 408 Media SDS ID: 0611 ()

SECTION 1: Identification

Product identifier Material Name 408 Media Product Description The media contained in this product, when used as designed, under normal operating conditions, and installed and maintained according to product literature, is not expected to be hazardous. Classifications and hazards represented on this Safety Data Sheet are only applicable in the unlikely event that the purifier media is liberated from the purifier housing. The purifier has sieves internal to the housing to prevent the media from escaping during intended use. Product Use UHP Gas Purifier Restrictions on Use None known. Details of the supplier of the safety data sheet Entegris, Inc.

129 Concord Road Building 2 Billerica, MA 01821 USA

Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America)

Supplier Entegris Singapore Pte. Ltd. 31 Kaki Bukit Road 3, Techlink, #06-08/11 Singapore 417818 Telephone: +65-6745-2422 Fax: +65-6745-4477

Emergency # 800-101-2201(CHEMTREC) 1-703-527-3887 (International)

E-mail: [email protected]

SECTION 2: Hazards identification

Singapore Standard SS 586-2:2014 Acute Toxicity - Inhalation - Dust/Mist - Category 3 (38.312% unknown ) Serious Eye Damage/Eye Irritation - Category 2 Germ Cell Mutagenicity - Category 2 Carcinogenicity - Category 1A Specific Target Organ Toxicity - Repeated Exposure - Category 1 ( respiratory system ) Specific Target Organ Toxicity - Repeated Exposure - Category 2 ( Immune system , kidneys , lungs )

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Safety Data Sheet Material Name: 408 Media SDS ID: 0611 (SINGAPORE)

Label elements Hazard symbols

Signal word Danger Hazard statements H331 Toxic if inhaled. H319 Causes serious eye irritation. H341 Suspected of causing genetic defects. H350 May cause cancer. H372 Causes damage to organs through prolonged or repeated exposure. (respiratory system ) H373 May cause damage to organs through prolonged or repeated exposure. (Immune system , kidneys , lungs ) Precautionary statements Prevention P260 Do not breathe dust. P264 Wash thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P271 Use only outdoors or in a well-ventilated area. P270 Do not eat, drink or smoke when using this product. P201 Obtain special instructions before use. P202 Do not handle until all safety precautions have been read and understood. Response P308+P313 IF exposed or concerned: Get medical advice/attention. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P311 Call a POISON CENTER or doctor/physician. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P337+P313 If eye irritation persists: Get medical advice/attention. Storage P403+P233 Store in a well-ventilated place. Keep container tightly closed. P405 Store locked up. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Statement(s) of Unknown Acute Toxicity Inhalation 38.312% of the mixture consists of ingredient(s) of unknown acute toxicity. Other Hazards Which Do Not Result in Classification In normal use, as installed and maintained according to product literature, this material in its final form is not expected to be hazardous. May form combustible dust concentrations in air. This product is a desiccant and generates heat as it adsorbs water.

SECTION 3: Composition / information on ingredients

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Safety Data Sheet Material Name: 408 Media SDS ID: 0611 (SINGAPORE)

CAS Component Name Percent

1318-02-1 Zeolite 60-70

Other components or impurities which will not Not available 20-30 influence the classification of the product

7440-44-0 Carbon 10-20

14808-60-7 Quartz 1-10 Impurities and stabilizing additives contributing to the GHS Classification None

SECTION 4: First aid measures

Inhalation First aid is not expected to be necessary if material is used under ordinary conditions and as recommended. If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. Skin contact First aid is not expected to be necessary if material is used under ordinary conditions and as recommended. Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get medical attention, if needed. Thoroughly clean and dry contaminated clothing and shoes before reuse. Eye contact First aid is not expected to be necessary if material is used under ordinary conditions and as recommended. Flush eyes with plenty of water for at least 15 minutes. Then get immediate medical attention. Ingestion First aid is not expected to be necessary if material is used under ordinary conditions and as recommended. If swallowed, get medical attention. Most Important Symptoms/Effects Acute Toxic if inhaled, eye irritation Delayed cancer, genetic defects, respiratory system damage, immune system damage, kidney damage, lung damage Indication of any immediate medical attention and special treatment needed None known. Note to Physicians For inhalation, consider oxygen. This product is a desiccant and generates heat as it adsorbs water.

SECTION 5: Firefighting measures

Flammable Properties Negligible fire hazard. This product is a desiccant and generates heat as it adsorbs water. Avoid generating dust; fine dust dispersed in air in sufficient concentrations, and in the presence of an ignition source is a potential dust explosion hazard. Suitable extinguishing media Use extinguishing agents appropriate for surrounding fire. Unsuitable Extinguishing Media None known.

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Safety Data Sheet Material Name: 408 Media SDS ID: 0611 (SINGAPORE)

Special Hazards Arising from the Chemical Negligible fire hazard. This product is a desiccant and generates heat as it adsorbs water. Avoid generating dust; fine dust dispersed in air in sufficient concentrations, and in the presence of an ignition source is a potential dust explosion hazard. Hazardous combustion products oxides of carbon Fire Fighting Measures This product will remain stable when housed in the purifier body. Special Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure.

SECTION 6: Accidental release measures

Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. In normal use, as installed and maintained according to product literature, this material in its final form is not expected to be hazardous. Classifications and hazards represented on this Safety Data Sheet are only applicable in the unlikely event that the purifier media is liberated from the purifier housing. The purifier has sieves internal to the housing to prevent the media from escaping during intended use. Environmental precautions Avoid release to the environment. Methods and Materials for Containment and Cleaning Up Keep unnecessary people away, isolate hazard area and deny entry. Avoid accumulation of airborne dusts. Avoid sweeping spilled dry material. If sweeping of a contaminated area is necessary, use a dust suppressant agent. Collect spill using a vacuum cleaner with a HEPA filter or wet and scoop up dry spills. Avoid sweeping spilled dry material. Eliminate ignition sources including sources of electrical, static or frictional sparks.

SECTION 7: Handling and storage

Precautions for safe handling Do not breathe dust. Wash thoroughly after handling. Use only outdoors or in a well-ventilated area. Wear protective gloves/clothing and eye/face protection. Do not eat, drink, or smoke when using this product. Obtain special instructions before use. Do not handle until all safety precautions have been read and understood. Avoid significant deposits of material, especially on horizontal surfaces, which may become airborne and form combustible dust clouds and may contribute to secondary explosions. Conditions for safe storage, including any incompatibilities Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store and handle in accordance with all current regulations and standards. Protect from sunlight. Keep separated from incompatible substances. Incompatible Materials bases, halogens, acids, metal salts, metals, oxidizing materials, combustible materials, peroxides, reducing agents

SECTION 8: Exposure controls/personal protection

Exposure Guidelines Component Exposure Limits ______Page 4 of 11 Issue date: 2019-02-14 Revision 1.0 Print date: 2019-02-14

Safety Data Sheet Material Name: 408 Media SDS ID: 0611 (SINGAPORE)

Quartz 14808-60-7

Singapore: 0.1 mg/m3 PEL respirable dust

ACGIH: 0.025 mg/m3 TWA respirable particulate matter Biological limit value There are no biological limit values for any of this product's components. Engineering controls Provide local exhaust or process enclosure ventilation system. Ensure that dust-handling systems (such as exhaust ducts, dust collectors, vessels, and processing equipment) are designed in a manner to prevent the escape of dust into the work area (i.e., there is no leakage from the equipment). Ensure compliance with applicable exposure limits. PERSONAL PROTECTIVE EQUIPMENT Eye/face protection Wear safety goggles with a faceshield. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. Protective Clothing Wear appropriate chemical resistant clothing. Glove Recommendations Wear appropriate chemical resistant gloves. Respiratory Protection SCBA with full face piece should be available in case of emergency.

SECTION 9: Physical and chemical properties

black, tan Appearance Physical State solid solid Odor odorless Color black , tan Odor Threshold Not available pH Not available Melting Point Not available Boiling Point Not available Boiling Point Range Not available Freezing point Not available Not Evaporation Rate Not available Flammability (solid, gas) flammable Autoignition Not available Flash Point Not available Temperature Lower Explosive Limit Not available Decomposition temperature Not available Upper Explosive Limit Not available Vapor Pressure Not available Vapor Density (air=1) Not available Specific Gravity (water=1) Not available Partition coefficient: n- Water Solubility Not available Not available octanol/water Viscosity Not available Kinematic viscosity Not available

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Safety Data Sheet Material Name: 408 Media SDS ID: 0611 (SINGAPORE)

Solubility (Other) Not available Density <2 g/cm3 Physical Form solid Molecular Weight Not available

SECTION 10: Stability and reactivity

Reactivity No dangerous reaction known under conditions of normal use. Chemical stability Stable at normal temperatures and pressure. Possibility of hazardous reactions Will not polymerize. Conditions to avoid Avoid accumulation of airborne dusts. Avoid contact with incompatible materials. Materials to Avoid (Incompatibilities) bases, halogens, acids, metal salts, metal, oxidizing materials, combustible materials, peroxides, reducing agents Hazardous decomposition products oxides of carbon

SECTION 11: Toxicological information

Information on Likely Routes of Exposure Inhalation: Toxic if inhaled, cancer, respiratory system damage, lung damage Skin contact irritation Eye contact irritation Ingestion gastrointestinal irritation Acute and Chronic Toxicity In normal use, as installed and maintained according to product literature, this material in its final form is not expected to be hazardous. Component Analysis - LD50/LC50 The components of this material have been reviewed in various sources and the following selected endpoints are published: Zeolite (1318-02-1) Oral LD50 Rat 5000 mg/kg Dermal LD50 Rabbit >2000 mg/kg Inhalation LC50 Rat 2.4 mg/L 1 h Carbon (7440-44-0) Oral LD50 Rat >10000 mg/kg Acute Toxicity Estimate Dermal > 2000 mg/kg

Inhalation - Dust and Mist 0.6 mg/L

Oral > 2000 mg/kg

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Safety Data Sheet Material Name: 408 Media SDS ID: 0611 (SINGAPORE)

Immediate Effects Toxic if inhaled, eye irritation Delayed Effects genetic defects, cancer, respiratory system damage, immune system damage, kidney damage, lung damage Irritation/Corrosivity Data eye irritation Respiratory Sensitization No data available. Dermal Sensitization No data available. Carcinogenicity Component Carcinogenicity Zeolite 1318-02-1

Monograph 68 [1997] (other than erionite clinoptilolite phillipsite mordenite non-fibrous IARC: Japanese zeolite synthetic zeolites ) (Group 3 (not classifiable))

Quartz 14808-60-7

ACGIH: A2 - Suspected Human Carcinogen

IARC: Monograph 100C [2012] ; Monograph 68 [1997] (Group 1 (carcinogenic to humans))

NTP: Known Human Carcinogen

DFG: Category 1 (causes cancer in man ;inhalable fraction )

OSHA: Present

NIOSH: potential occupational carcinogen Mutagenic Data Suspected of causing genetic defects. Reproductive Effects Data No data available for the mixture. Tumorigenic Data No data available for the mixture. Specific Target Organ Toxicity - Single Exposure No data available. Specific Target Organ Toxicity - Repeated Exposure respiratory system, immune system, kidneys, lungs Aspiration hazard No data available. Medical Conditions Aggravated by Exposure respiratory disorders

SECTION 12: Ecological information

Component Analysis - Aquatic Toxicity Zeolite 1318-02-1

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Safety Data Sheet Material Name: 408 Media SDS ID: 0611 (SINGAPORE)

LC50 96 h Brachydanio rerio 1800 mg/L [semi-static ]; LC50 96 h Oryzias latipes 3200 - Fish: 5600 mg/L [semi-static ]; LC50 96 h Poecilia reticulata 1800 - 3200 mg/L [semi-static ]

Algae: EC50 96 h Desmodesmus subspicatus 18 mg/L IUCLID

Invertebrate: EC50 48 h Daphnia magna 1000 - 1800 mg/L IUCLID Persistence No information available for the mixture. Bioaccumulative potential No information available for the mixture. Mobility No information available for the mixture. Other adverse effects No data available.

SECTION 13: Disposal considerations

Disposal Methods Dispose in accordance with all applicable regulations. Component waste information There is no applicable waste information for this product's components. Contaminated packaging disposal Dispose in accordance with all applicable regulations.

SECTION 14: Transport information

IATA Information: UN#: Not regulated

IMDG Information: UN#: Not regulated

ICAO Information: UN#: Not regulated International Bulk Chemical Code This material does not contain any chemicals required by the IBC Code to be identified as dangerous chemicals in bulk. Special precautions None

SECTION 15: Regulatory information

Singapore Regulations List of Hazardous Substances No information was found for the substance(s) on the List of Hazardous Substances. Poisons List No information was found for the substance(s) on the List of Hazardous Substances. Hazardous Substance Transport Quantities None of this product's components are on the list.

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Safety Data Sheet Material Name: 408 Media SDS ID: 0611 (SINGAPORE)

Maritime and Port Authority This product contains no components identified on Singapore's Maritime and Port Authority - Dangerous Goods. Arms and Explosives Act None of this product's components are on the list. Schedule of Chemical Weapons None of this product's components are on the list. Misuse of Drugs Act None of this product's components are on the list. Petroleum and Flammable Materials This product contains no components identified on Singapore's Petroleum and Flammable Materials. Strategic Goods Control This product contains no components identified on Singapore's Strategic Goods Control. Toxic Industrial Wastes This product contains no components identified on Singapore's Toxic Industrial Wastes. Component Analysis - Inventory Zeolite (1318-02-1) US CA AU CN EU JP - ENCS JP - ISHL KR KECI - Annex 1 KR KECI - Annex 2

No No Yes Yes EIN No No Yes No

KR - REACH CCA MX NZ PH TH-TECI TW VN (Draft)

No No Yes Yes Yes Yes Yes

Other components or impurities which will not influence the classification of the product (Not available) US CA AU CN EU JP - ENCS JP - ISHL KR KECI - Annex 1 KR KECI - Annex 2

No No No No No No No No No

KR - REACH CCA MX NZ PH TH-TECI TW VN (Draft)

No No No No No No No

Carbon (7440-44-0) US CA AU CN EU JP - ENCS JP - ISHL KR KECI - Annex 1 KR KECI - Annex 2

Yes DSL Yes Yes EIN No No Yes No

KR - REACH CCA MX NZ PH TH-TECI TW VN (Draft)

No Yes Yes Yes Yes Yes Yes

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Safety Data Sheet Material Name: 408 Media SDS ID: 0611 (SINGAPORE)

Quartz (14808-60-7) US CA AU CN EU JP - ENCS JP - ISHL KR KECI - Annex 1 KR KECI - Annex 2

Yes DSL Yes Yes EIN Yes Yes Yes No

KR - REACH CCA MX NZ PH TH-TECI TW VN (Draft)

No Yes Yes Yes Yes Yes Yes

SECTION 16: Other information

NFPA Ratings Health: 2 Fire: 0 Instability: 0 Hazard Scale: 0 = Minimal 1 = Slight 2 = Moderate 3 = Serious 4 = Severe Preparation and Revision Date 02/14/2019 Key / Legend ACGIH - American Conference of Governmental Industrial Hygienists; ADR - European Road Transport; AU - Australia; BOD - Biochemical Oxygen Demand; C - Celsius; CA - Canada; CA/MA/MN/NJ/PA - California/Massachusetts/Minnesota/New Jersey/Pennsylvania*; CAS - Chemical Abstracts Service; CERCLA - Comprehensive Environmental Response, Compensation, and Liability Act; CFR - Code of Federal Regulations (US); CLP - Classification, Labelling, and Packaging; CN - ; CPR - Controlled Products Regulations; DFG - Deutsche Forschungsgemeinschaft; DOT - Department of Transportation; DSD - Dangerous Substance Directive; DSL - Domestic Substances List; EC – European Commission; EEC - European Economic Community; EIN - European Inventory of (Existing Commercial Chemical Substances); EINECS - European Inventory of Existing Commercial Chemical Substances; ENCS - Existing and New Chemical Substance Inventory; EPA - Environmental Protection Agency; EU - European Union; F - Fahrenheit; F - Background (for Venezuela Biological Exposure Indices); IARC - International Agency for Research on Cancer; IATA - International Air Transport Association; ICAO - International Civil Aviation Organization; IDL - Ingredient Disclosure List; IDLH - Immediately Dangerous to Life and Health; IMDG - International Maritime Dangerous Goods; ISHL - Japan Industrial Safety and Health Law; IUCLID - International Uniform Chemical Information Database; JP - Japan; Kow - Octanol/water partition coefficient; KR KECI Annex 1 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL); KR KECI Annex 2 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL) , KR - Korea; LD50/LC50 - Lethal Dose/ Lethal Concentration; LEL - Lower Explosive Limit; LLV - Level Limit Value; LOLI - List Of LIsts™ - ChemADVISOR’s Regulatory Database; MAK - Maximum Concentration Value in the Workplace; MEL - Maximum Exposure Limits; MX – Mexico; Ne- Non-specific; NFPA - National Fire Protection Agency; NIOSH - National Institute for Occupational Safety and Health; NJTSR - New Jersey Trade Secret Registry; Nq - Non-quantitative; NSL – Non-Domestic Substance List (Canada); NTP - National Toxicology Program; NZ - New Zealand; OSHA - Occupational Safety and Health Administration; PEL- Permissible Exposure Limit; PH - Philippines; RCRA - Resource Conservation and Recovery Act; REACH- Registration, Evaluation, Authorisation, and restriction of Chemicals; RID - European Rail Transport; SARA - Superfund Amendments and Reauthorization Act; Sc - Semi-quantitative; STEL - Short-term Exposure Limit; TCCA – Korea Toxic Chemicals Control Act; TDG - Transportation of Dangerous Goods; TLV - Threshold Limit Value; TSCA - Toxic Substances Control Act; TW – ; TWA - Time Weighted Average; UEL - Upper Explosive Limit; UN/NA - United Nations

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Safety Data Sheet Material Name: 408 Media SDS ID: 0611 (SINGAPORE)

/North American; US - United States; VLE - Exposure Limit Value (Mexico); VN (Draft) - Vietnam (Draft); WHMIS - Workplace Hazardous Materials Information System (Canada). Other Information Disclaimer: The information in this (Material) Safety Data Sheet ("(M)SDS") is believed to be current and accurate as of the time of shipment of the product by Entegris. Entegris makes no warranties, express or implied, with respect to such information, including, without limitation, the implied warranties of merchantability and fitness for a particular purpose. Entegris assumes no liability for any loss or injury which may result from the use of the information contained in this (M)SDS. The chemical, physical and toxicological properties of the Entegris product described in this (M)SDS have not been thoroughly investigated. Users are responsible for exercising due care in using the Entegris product, and for conducting their own investigation to determine whether the product is fit for their particular purpose and suitable for their method of use or application. It is the user's responsibility to ensure that its activities comply with all applicable laws and regulations. Entegris is a registered trademark of Entegris Inc. or an affiliated company. © 2015 Entegris Inc. or affiliated company. All rights reserved.

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