Safety Data Sheet Material Name: Z2 Series media SDS ID: 0209 ()

SECTION 1: Identification

Product identifier Material Name Z2 Series media Product Description The media contained in this product, when used as designed, under normal operating conditions, and installed and maintained according to product literature, is not expected to be hazardous. Classifications and hazards represented on this Safety Data Sheet are only applicable in the unlikely event that the purifier media is liberated from the filter housing. The purifier has sieves internal to the housing to prevent the media from escaping during intended use. Caution: Some units are provided with a fill port, which is factory sealed with a VCR® fitting and plug, covered with red shrink wrap. This port must never be opened by the end user, since it will potentially result in a release of the media. Product Use Purification of air (XCDA) Restrictions on Use Use only with gases listed in Product Use. Details of the supplier of the safety data sheet Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA

Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America)

Supplier Entegris Singapore Pte. Ltd. 30A Kallang Place, #13-01 Singapore 339213

Telephone: +65-6745-2422 Fax: +65-6745-4477

Emergency # 800-101-2201 (CHEMTREC Toll Free in country) +(65)-31581349 (CHEMTREC local in country) 1-703-527-3887 (CHEMTREC International) E-mail: [email protected]

SECTION 2: Hazards identification

Singapore Standard SS 586-2:2014 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Carcinogenicity - Category 1A Specific Target Organ Toxicity - Single Exposure - Category 2 ( respiratory system )

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Safety Data Sheet Material Name: Z2 Series media SDS ID: 0209 (SINGAPORE)

Specific Target Organ Toxicity - Repeated Exposure - Category 1 ( lungs , respiratory system ) Specific Target Organ Toxicity - Repeated Exposure - Category 2 ( kidneys ) Label elements Hazard symbols

Signal word Danger Hazard statements H314 Causes severe skin burns and eye damage. H350 May cause cancer. H371 May cause damage to organs. (respiratory system ) H372 Causes damage to organs through prolonged or repeated exposure. (lungs , respiratory system ) H373 May cause damage to organs through prolonged or repeated exposure. (kidneys ) Precautionary statements Prevention P260 Do not breathe dust. P280 Wear protective gloves/protective clothing/eye protection/face protection. P264 Wash thoroughly after handling. P201 Obtain special instructions before use. P202 Do not handle until all safety precautions have been read and understood. P270 Do not eat, drink or smoke when using this product. Response P308+P313 IF exposed or concerned: Get medical advice/attention. P310 Immediately call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P321 Specific treatment (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Storage P405 Store locked up. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Other Hazards Which Do Not Result in Classification In normal use, as installed and maintained according to product literature, this material in its final form is not expected to be hazardous.

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Safety Data Sheet Material Name: Z2 Series media SDS ID: 0209 (SINGAPORE)

SECTION 3: Composition / information on ingredients

CAS Component Name Percent

Other components or impurities which will not Not available 50-80 influence the classification of the product

1344-28-1 Aluminum oxide (Al2O3) 10-20

1313-59-3 Sodium oxide (Na2O) 1-10

1309-48-4 Magnesium oxide (MgO) 0-3

14808-60-7 Quartz 0-2 Impurities and stabilizing additives contributing to the GHS Classification None

SECTION 4: First aid measures

Inhalation First aid is not expected to be necessary if material is used under ordinary conditions and as recommended. If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. Skin contact First aid is not expected to be necessary if material is used under ordinary conditions and as recommended. Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get immediate medical attention. Thoroughly clean and dry contaminated clothing before reuse. Destroy contaminated shoes. Eye contact First aid is not expected to be necessary if material is used under ordinary conditions and as recommended. Immediately flush eyes with plenty of water for at least 60 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. Ingestion First aid is not expected to be necessary if material is used under ordinary conditions and as recommended. If swallowed, do NOT induce vomiting. Rinse mouth. Get immediate medical attention. Most Important Symptoms/Effects Acute respiratory tract burns, skin burns, eye burns, mucous membrane burns, respiratory system damage Delayed lung damage, respiratory system damage, kidney damage, cancer Indication of any immediate medical attention and special treatment needed For inhalation, consider oxygen. Avoid gastric lavage or emesis.

SECTION 5: Firefighting measures

Flammable Properties Negligible fire hazard. Suitable extinguishing media dry chemical, carbon dioxide

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Safety Data Sheet Material Name: Z2 Series media SDS ID: 0209 (SINGAPORE)

Unsuitable Extinguishing Media Do not use water Special Hazards Arising from the Chemical Negligible fire hazard. Hazardous combustion products oxides of silicon, metal oxides Fire Fighting Measures This product will remain stable when housed in the filter body. Move container from fire area if it can be done without risk. Dike for later disposal. Do not scatter spilled material with high-pressure water streams. Fight fire from maximum distance or use unmanned hose holders or monitor nozzles. Do not get water inside container. Cool containers with water spray until well after the fire is out. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. ALWAYS stay away from tanks engulfed in fire. Special Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure.

SECTION 6: Accidental release measures

Personal precautions, protective equipment and emergency procedures In normal use, as installed and maintained according to product literature, this material in its final form is not expected to be hazardous. Classifications and hazards represented on this Safety Data Sheet are only applicable in the unlikely event that the purifier media is liberated from the filter housing. The purifier has sieves internal to the housing to prevent the media from escaping during intended use. Wear personal protective clothing and equipment. Environmental precautions Avoid release to the environment. Methods and Materials for Containment and Cleaning Up Eliminate all ignition sources if safe to do so. Do not touch spilled material. Stop leak if possible without personal risk. Prevent entry into waterways, sewers, basements, or confined areas. Absorb with earth, sand or other non-combustible material and transfer to container. Do not get water inside container.

SECTION 7: Handling and storage

Precautions for safe handling Do not breathe dust. Wear protective gloves/protective clothing/eye protection/face protection. Wash thoroughly after handling. Obtain special instructions before use. Do not handle until all safety precautions have been read and understood. Do not eat, drink, or smoke when using this product. Conditions for safe storage, including any incompatibilities Store locked up. Store and handle in accordance with all current regulations and standards. Store in a well-ventilated place. Keep container tightly closed. Keep separated from incompatible substances. Incompatible Materials halogens, halocarbons, acids, bases, combustible materials, metals, metal salts, oxidizing materials

SECTION 8: Exposure controls/personal protection

Exposure Guidelines Component Exposure Limits

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Safety Data Sheet Material Name: Z2 Series media SDS ID: 0209 (SINGAPORE)

Aluminum oxide (Al2O3) 1344-28-1

Singapore: 10 mg/m3 PEL

Magnesium oxide (MgO) 1309-48-4

Singapore: 10 mg/m3 PEL fume

ACGIH: 10 mg/m3 TWA inhalable particulate matter

Quartz 14808-60-7

Singapore: 0.1 mg/m3 PEL respirable dust

ACGIH: 0.025 mg/m3 TWA respirable particulate matter Biological limit value There are no biological limit values for any of this product's components. Engineering controls Provide local exhaust or process enclosure ventilation system. Ensure compliance with applicable exposure limits. PERSONAL PROTECTIVE EQUIPMENT Eye/face protection Wear splash resistant safety goggles with a faceshield. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. Protective Clothing Wear appropriate chemical resistant clothing. Glove Recommendations Wear appropriate chemical resistant gloves. Respiratory Protection Respirators depend on exposure level. SCBA with full face piece recommended during change outs and available in case of emergency.

SECTION 9: Physical and chemical properties

Appearance solid Physical State solid Odor odorless Color Not available Odor Threshold Not available pH Not available

Melting Point Not available Boiling Point Not available Boiling Point Range Not available Freezing point Not available Non- Evaporation Rate Not available Flammability (solid, gas) flammable Autoignition Not available Flash Point Not available Temperature

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Safety Data Sheet Material Name: Z2 Series media SDS ID: 0209 (SINGAPORE)

Lower Explosive Not available Decomposition temperature Not available Limit Upper Explosive Not available Vapor Pressure Not available Limit Vapor Density Not available Specific Gravity (water=1) Not available (air=1) Partition coefficient: n- Water Solubility (reacts ) Not available octanol/water Viscosity Not available Kinematic viscosity Not available Solubility (Other) Not available Density 0.7 g/mL pellets , beads , Physical Form Molecular Weight Not available extrudates Other information No additional information is available.

SECTION 10: Stability and reactivity

Reactivity May react with evolution of heat on contact with water. Chemical stability May react with evolution of heat on contact with water. Possibility of hazardous reactions Will not polymerize. Conditions to avoid Avoid generating dust. Avoid heat, flames, sparks and other sources of ignition. Dangerous gases may accumulate in confined spaces. May ignite or explode on contact with combustible materials. Materials to Avoid (Incompatibilities) halogens, halocarbons, acids, bases, combustible materials, metals, metal salts, oxidizing materials Hazardous decomposition products Thermal decomposition products oxides of silicon, metal oxides

SECTION 11: Toxicological information

Information on Likely Routes of Exposure Inhalation: burns, respiratory system damage, lung damage Skin contact burns Eye contact burns Ingestion burns Component Analysis - LD50/LC50 The components of this material have been reviewed in various sources and the following selected endpoints are published: ______Page 6 of 11 Issue date: 2020-01-14 Revision 2.0 Print date: 2020-01-14

Safety Data Sheet Material Name: Z2 Series media SDS ID: 0209 (SINGAPORE)

Aluminum oxide (Al2O3) (1344-28-1) Oral LD50 Rat >5000 mg/kg Magnesium oxide (MgO) (1309-48-4) Oral LD50 Rat 3990 mg/kg (females ) Acute Toxicity Estimate Dermal > 2000 mg/kg

Inhalation - Dust and Mist > 5 mg/L

Oral > 2000 mg/kg Immediate Effects respiratory tract burns, skin burns, eye burns, mucous membrane burns, respiratory system damage Delayed Effects respiratory system damage, lung damage, kidney damage, cancer Irritation/Corrosivity Data respiratory tract burns, skin burns, eye burns, mucous membrane burns Respiratory Sensitization No data available. Dermal Sensitization No data available. Carcinogenicity Component Carcinogenicity Aluminum oxide 1344-28-1 (Al2O3)

DFG: Category 2 (considered to be carcinogenic for man ;fibre dust )

Magnesium oxide 1309-48-4 (MgO)

ACGIH: A4 - Not Classifiable as a Human Carcinogen

DFG: Category 4 (no significant contribution to human cancer ;inhalable fraction )

Quartz 14808-60-7

ACGIH: A2 - Suspected Human Carcinogen

Monograph 100C [2012] ; Monograph 68 [1997] (Group 1 (carcinogenic to IARC: humans))

NTP: Known Human Carcinogen

DFG: Category 1 (causes cancer in man ;inhalable fraction )

OSHA: Present

NIOSH: potential occupational carcinogen Mutagenic Data ______Page 7 of 11 Issue date: 2020-01-14 Revision 2.0 Print date: 2020-01-14

Safety Data Sheet Material Name: Z2 Series media SDS ID: 0209 (SINGAPORE)

No data available for the mixture. Reproductive Effects Data No data available for the mixture. Tumorigenic Data No data available for the mixture. Specific Target Organ Toxicity - Single Exposure respiratory system Specific Target Organ Toxicity - Repeated Exposure respiratory system, lungs, kidneys Aspiration hazard No data available. Medical Conditions Aggravated by Exposure eye disorders, kidney disorders, liver disorders, respiratory disorders, skin disorders and allergies

SECTION 12: Ecological information

Ecotoxicity Harmful to aquatic life with long lasting effects. Component Analysis - Aquatic Toxicity No LOLI ecotoxicity data are available for this product's components. Persistence No data available for the mixture. Bioaccumulative potential No data available for the mixture. Mobility No data available for the mixture. Other adverse effects None known.

SECTION 13: Disposal considerations

Disposal Methods Dispose in accordance with all applicable regulations. Component waste information There is no applicable waste information for this product's components. Contaminated packaging disposal Dispose in accordance with all applicable regulations.

SECTION 14: Transport information

IATA Information: UN#: Not regulated

ICAO Information: UN#: Not regulated

IMDG Information: UN#: Not regulated International Bulk Chemical Code

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Safety Data Sheet Material Name: Z2 Series media SDS ID: 0209 (SINGAPORE)

This material does not contain any chemicals required by the IBC Code to be identified as dangerous chemicals in bulk. Special precautions None

SECTION 15: Regulatory information

Singapore Regulations List of Hazardous Substances No information was found for the substance(s) on the List of Hazardous Substances. Poisons List No information was found for the substance(s) on the List of Hazardous Substances. Hazardous Substance Transport Quantities None of this product's components are on the list. Maritime and Port Authority This product contains no components identified on Singapore's Maritime and Port Authority - Dangerous Goods. Arms and Explosives Act None of this product's components are on the list. Schedule of Chemical Weapons None of this product's components are on the list. Misuse of Drugs Act None of this product's components are on the list. Petroleum and Flammable Materials This product contains no components identified on Singapore's Petroleum and Flammable Materials. Strategic Goods Control This product contains no components identified on Singapore's Strategic Goods Control. Toxic Industrial Wastes This product contains no components identified on Singapore's Toxic Industrial Wastes. Component Analysis - Inventory Other components or impurities which will not influence the classification of the product (Not available) US CA AU CN EU JP - ENCS JP - ISHL KR KECI - Annex 1 KR KECI - Annex 2

No No No No No No No No No

KR - REACH CCA MX NZ PH TH-TECI TW VN (Draft)

No No No No No No No

Aluminum oxide (Al2O3) (1344-28-1) US CA AU CN EU JP - ENCS JP - ISHL KR KECI - Annex 1 KR KECI - Annex 2

Yes DSL Yes Yes EIN Yes Yes Yes No

KR - REACH CCA MX NZ PH TH-TECI TW VN (Draft)

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Safety Data Sheet Material Name: Z2 Series media SDS ID: 0209 (SINGAPORE)

No Yes Yes Yes Yes Yes Yes

Sodium oxide (Na2O) (1313-59-3) US CA AU CN EU JP - ENCS JP - ISHL KR KECI - Annex 1 KR KECI - Annex 2

Yes DSL Yes Yes EIN Yes Yes Yes No

KR - REACH CCA MX NZ PH TH-TECI TW VN (Draft)

No Yes Yes Yes No Yes Yes

Magnesium oxide (MgO) (1309-48-4) US CA AU CN EU JP - ENCS JP - ISHL KR KECI - Annex 1 KR KECI - Annex 2

Yes DSL Yes Yes EIN Yes Yes Yes No

KR - REACH CCA MX NZ PH TH-TECI TW VN (Draft)

No Yes Yes Yes Yes Yes Yes

Quartz (14808-60-7) US CA AU CN EU JP - ENCS JP - ISHL KR KECI - Annex 1 KR KECI - Annex 2

Yes DSL Yes Yes EIN Yes Yes Yes No

KR - REACH CCA MX NZ PH TH-TECI TW VN (Draft)

No Yes Yes Yes Yes Yes Yes

SECTION 16: Other information

NFPA Ratings Health: 3 Fire: 0 Instability: 2 Hazard Scale: 0 = Minimal 1 = Slight 2 = Moderate 3 = Serious 4 = Severe Summary of Changes 1/14/2020 - Update to Section(s) 1, 2, 11, 15. Preparation and Revision Date 5/24/2016 Revision date 1/14/2020 Key / Legend ACGIH - American Conference of Governmental Industrial Hygienists; ADR - European Road Transport; AU - Australia; BOD - Biochemical Oxygen Demand; C - Celsius; CA - Canada; CA/MA/MN/NJ/PA - ______Page 10 of 11 Issue date: 2020-01-14 Revision 2.0 Print date: 2020-01-14

Safety Data Sheet Material Name: Z2 Series media SDS ID: 0209 (SINGAPORE)

California/Massachusetts/Minnesota/New Jersey/Pennsylvania*; CAS - Chemical Abstracts Service; CERCLA - Comprehensive Environmental Response, Compensation, and Liability Act; CFR - Code of Federal Regulations (US); CLP - Classification, Labelling, and Packaging; CN - ; CPR - Controlled Products Regulations; DFG - Deutsche Forschungsgemeinschaft; DOT - Department of Transportation; DSD - Dangerous Substance Directive; DSL - Domestic Substances List; EC – European Commission; EEC - European Economic Community; EIN - European Inventory of (Existing Commercial Chemical Substances); EINECS - European Inventory of Existing Commercial Chemical Substances; ENCS - Existing and New Chemical Substance Inventory; EPA - Environmental Protection Agency; EU - European Union; F - Fahrenheit; F - Background (for Venezuela Biological Exposure Indices); IARC - International Agency for Research on Cancer; IATA - International Air Transport Association; ICAO - International Civil Aviation Organization; IDL - Ingredient Disclosure List; IDLH - Immediately Dangerous to Life and Health; IMDG - International Maritime Dangerous Goods; ISHL - Japan Industrial Safety and Health Law; IUCLID - International Uniform Chemical Information Database; JP - Japan; Kow - Octanol/water partition coefficient; KR KECI Annex 1 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL); KR KECI Annex 2 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL) , KR - Korea; LD50/LC50 - Lethal Dose/ Lethal Concentration; LEL - Lower Explosive Limit; LLV - Level Limit Value; LOLI - List Of LIsts™ - ChemADVISOR’s Regulatory Database; MAK - Maximum Concentration Value in the Workplace; MEL - Maximum Exposure Limits; MX – Mexico; Ne- Non-specific; NFPA - National Fire Protection Agency; NIOSH - National Institute for Occupational Safety and Health; NJTSR - New Jersey Trade Secret Registry; Nq - Non-quantitative; NSL – Non-Domestic Substance List (Canada); NTP - National Toxicology Program; NZ - New Zealand; OSHA - Occupational Safety and Health Administration; PEL- Permissible Exposure Limit; PH - Philippines; RCRA - Resource Conservation and Recovery Act; REACH- Registration, Evaluation, Authorisation, and restriction of Chemicals; RID - European Rail Transport; SARA - Superfund Amendments and Reauthorization Act; Sc - Semi-quantitative; STEL - Short-term Exposure Limit; TCCA – Korea Toxic Chemicals Control Act; TDG - Transportation of Dangerous Goods; TLV - Threshold Limit Value; TSCA - Toxic Substances Control Act; TW – ; TWA - Time Weighted Average; UEL - Upper Explosive Limit; UN/NA - United Nations /North American; US - United States; VLE - Exposure Limit Value (Mexico); VN (Draft) - Vietnam (Draft); WHMIS - Workplace Hazardous Materials Information System (Canada). Other Information Disclaimer: The information in this (Material) Safety Data Sheet ("(M)SDS") is believed to be current and accurate as of the time of shipment of the product by Entegris. Entegris makes no warranties, express or implied, with respect to such information, including, without limitation, the implied warranties of merchantability and fitness for a particular purpose. Entegris assumes no liability for any loss or injury which may result from the use of the information contained in this (M)SDS. The chemical, physical and toxicological properties of the Entegris product described in this (M)SDS have not been thoroughly investigated. Users are responsible for exercising due care in using the Entegris product, and for conducting their own investigation to determine whether the product is fit for their particular purpose and suitable for their method of use or application. It is the user's responsibility to ensure that its activities comply with all applicable laws and regulations. Entegris is a registered trademark of Entegris Inc. or an affiliated company. © 2015 Entegris Inc. or affiliated company. All rights reserved.

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