Safety Data Sheet Material Name: AutoClean SDS ID: 00231763 (SINGAPORE) SECTION 1: Identification Product identifier Material Name AutoClean Synonyms XENON DIFLUORIDE; XENON FLUORIDE (XeF2); XENON(II) FLUORIDE (F2Xe); F2Xe Chemical Family fluoride, inorganic Product Use semiconductor manufacture, general synthetic chemical Restrictions on Use None known. Details of the supplier of the safety data sheet Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America) Supplier Entegris Singapore Pte. Ltd. 30A Kallang Place, #13-01 Singapore 339213 Telephone: +65-6745-2422 Fax: +65-6745-4477 Emergency # 800-101-2201 (CHEMTREC Toll Free in country) +(65)-31581349 (CHEMTREC local in country) 1-703-527-3887 (CHEMTREC International) E-mail: [email protected] SECTION 2: Hazards identification Singapore Standard SS 586-2:2014 Oxidizing Solids - Category 2 Acute Toxicity - Oral - Category 3 Acute Toxicity - Inhalation - Dust/Mist - Category 2 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific Target Organ Toxicity - Single Exposure - Category 3 ( respiratory system ) Label elements ____________________________________________________________ Page 1 of 11 Issue date: 2020-05-13 Revision 3.3 Print date: 2020-05-13 Safety Data Sheet Material Name: AutoClean SDS ID: 00231763 (SINGAPORE) Hazard symbols Signal word Danger Hazard statements H272 May intensify fire; oxidizer. H330 Fatal if inhaled. H301 Toxic if swallowed. H314 Causes severe skin burns and eye damage. H335 May cause respiratory irritation. Precautionary statements Prevention P210 Keep away from heat. P220 Keep/Store away from clothing/combustible materials. P221 Take any precaution to avoid mixing with combustibles. P260 Do not breathe dust. P264 Wash thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P284 Wear respiratory protection. P270 Do not eat, drink or smoke when using this product. P271 Use only outdoors or in a well-ventilated area. Response P370+P378 In case of fire: Use appropriate media to extinguish. P310 Immediately call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P320 Specific treatment is urgent (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Storage P403+P233 Store in a well-ventilated place. Keep container tightly closed. P405 Store locked up. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Other Hazards Which Do Not Result in Classification May form combustible dust concentrations in air (during handling or processing). ____________________________________________________________ Page 2 of 11 Issue date: 2020-05-13 Revision 3.3 Print date: 2020-05-13 Safety Data Sheet Material Name: AutoClean SDS ID: 00231763 (SINGAPORE) SECTION 3: Composition / information on ingredients CAS Component Name Percent 13709-36-9 XENON DIFLUORIDE 100 Impurities and stabilizing additives contributing to the GHS Classification None SECTION 4: First aid measures Inhalation If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. Skin contact Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get immediate medical attention. Thoroughly clean and dry contaminated clothing before reuse. Destroy contaminated shoes. Eye contact Immediately flush eyes with plenty of water for at least 60 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. Ingestion If swallowed, do NOT induce vomiting. Rinse mouth. Get immediate medical attention. Most Important Symptoms/Effects Acute Fatal if inhaled, toxic if swallowed, respiratory tract burns, skin burns, eye burns, mucous membrane burns Delayed No information on significant adverse effects. Indication of any immediate medical attention and special treatment needed None known. Note to Physicians For inhalation, consider oxygen. Avoid gastric lavage or emesis. SECTION 5: Firefighting measures Flammable Properties Negligible fire hazard. Oxidizer. May ignite or explode on contact with combustible materials. Avoid generating dust; fine dust dispersed in air in sufficient concentrations, and in the presence of an ignition source is a potential dust explosion hazard. Suitable extinguishing media Water, Large fires: Flood with water. Apply water from a protected location or from a safe distance. Unsuitable Extinguishing Media Do not use dry chemicals or foams. Special Hazards Arising from the Chemical Negligible fire hazard. Oxidizer. May ignite or explode on contact with combustible materials. Avoid generating dust; fine dust dispersed in air in sufficient concentrations, and in the presence of an ignition source is a potential dust explosion hazard. Hazardous combustion products ____________________________________________________________ Page 3 of 11 Issue date: 2020-05-13 Revision 3.3 Print date: 2020-05-13 Safety Data Sheet Material Name: AutoClean SDS ID: 00231763 (SINGAPORE) halogenated compounds Fire Fighting Measures Move container from fire area if it can be done without risk. Cool containers with water spray until well after the fire is out. Stay away from the ends of tanks. For fires in cargo or storage area: Cool containers with water from unmanned hose holder or monitor nozzles until well after fire is out. Flood with water. Apply water from a protected location or from a safe distance. Avoid inhalation of material or combustion by- products. Stay upwind and keep out of low areas. Evacuate if fire gets out of control or containers are directly exposed to fire. Evacuation radius: 800 meters (1/2 mile). Special Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. SECTION 6: Accidental release measures Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. Environmental precautions Avoid release to the environment. Methods and Materials for Containment and Cleaning Up In case of fire, use media appropriate for extinction. Stop leak if possible without personal risk. Keep unnecessary people away, isolate hazard area and deny entry. If sweeping of a contaminated area is necessary, use a dust suppressant agent. Avoid contact with combustible materials. Do not touch spilled material. Do not get water inside container. Collect spill using a vacuum cleaner with a HEPA filter or wet and scoop up dry spills. Avoid sweeping spilled dry material. Eliminate ignition sources including sources of electrical, static or frictional sparks. Small spills: Collect spilled material in appropriate container for disposal. Move containers away from spill to a safe area. Large spills: Dike for later disposal. SECTION 7: Handling and storage Precautions for safe handling Keep away from heat. Keep/store away from clothing and other combustible materials. Take any precaution to avoid mixing with combustibles. Do not breathe dust. Wear protective gloves/clothing and eye/face protection. Wear respiratory protection. Use only outdoors or in a well-ventilated area. Do not eat, drink, or smoke when using this product. Wash thoroughly after handling. Use methods to minimize dust. Avoid significant deposits of material, especially on horizontal surfaces, which may become airborne and form combustible dust clouds and may contribute to secondary explosions. Conditions for safe storage, including any incompatibilities Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store and handle in accordance with all current regulations and standards. Store under an inert atmosphere. Avoid contact with water or moisture. Keep separated from incompatible substances. Incompatible Materials combustible materials, metals, oxidizing materials, reducing agents SECTION 8: Exposure controls/personal protection Exposure Guidelines Component Exposure Limits ____________________________________________________________ Page 4 of 11 Issue date: 2020-05-13 Revision 3.3 Print date: 2020-05-13 Safety Data Sheet Material Name: AutoClean SDS ID: 00231763 (SINGAPORE) XENON DIFLUORIDE 13709-36-9 Singapore: 2.5 mg/m3 PEL as F (related to Fluorides) ACGIH: 2.5 mg/m3 TWA as F (related to Fluorides) Biological limit value 2 mg/l Medium: urine Time: prior to shift Parameter: Fluoride (background, nonspecific ); 3 ACGIH: mg/l Medium: urine Time: end of shift Parameter: Fluoride (background, nonspecific ) (related to Fluorides) Engineering controls Provide local exhaust or process enclosure ventilation system. Ensure that dust-handling systems (such as exhaust ducts, dust collectors, vessels, and processing equipment) are designed in a manner to prevent the escape of dust into the work area (i.e., there is no leakage from the equipment).