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Vacuum Capacitors Combining Expertise and Technology 2 Vacuum Capacitors Vacuum Capacitors 3 Led by experience. Driven by curiosity. Vacuum Capacitors Combining expertise and technology 2 Vacuum Capacitors Vacuum Capacitors 3 Table of contents We empower new technologies 4 Advanced technologies 7 Variable Vacuum Capacitors 12 Fixed Vacuum Capacitors 30 Trimmer Vacuum Capacitor 38 Motorized Capacitors 42 Customized solutions 48 Series overview 50 Service Bulletins 54 Contacts 56 4 Vacuum Capacitors Vacuum Capacitors 5 We empower new technologies Comet is a leading expert in RF power delivery and a global innovation partner of RF related business- es for more than 50 years. Our products have earned a global reputation for quality and reliabili- ty over a broad variety of applications. By exploring the mysteries of plasma behavior Comet is contributing to the evolution of the semiconductor industry. With the goal to provide our customers with the most precise tools we “We create solutions engineer and manufacture the most advanced RF power systems and diagnostic tools to master that respond both to plasma processes. today’s trends and Comet’s profound know-how in RF circuit modeling tomorrow’s needs.” and design has its origin in the development of vacuum capacitors. A broad range of capacitors Michael Kammerer for all needs guarantees you highest performance, President Comet repeatability and reliability of your tools. Besides Plasma Control Technologies that, the unique modular and customized design allows a high degree of flexibility in production and guarantees the delivery of special types on short notice. To improve the performance of our Imped- ance Matching Networks exclusively Comet Vaccum Capacitors are used. In this catalog you will learn more about the broadest selection of capacitance, power, voltage and drive systems in the market. Our experts are looking forward to support you in finding the right solution for your specific needs. 6 Vacuum Capacitors Vacuum Capacitors 7 Advanced technologies XtraVolt Vacuum Capacitors 8 High current, compact Vacuum Capacitors 9 Ultra-Life Vacuum Capacitor Drive Systems 10 8 Vacuum Capacitors Vacuum Capacitors 9 XtraVolt product range versus XtraVolt standard product range High current, compact Vacuum Standard product Vacuum Capacitors XtraVolt product Max. power dissipation Capacitors IArms = 2 C Upw Conduction Convection Conduction ] Convection s Higher rm voltage [A bene�it max I For low frequency applications With hybrid-cooling technology The semiconductor industry is transforming: High Critical freq. will change with voltage and capacitance Semiconductor industry is going through a big power density in processing modules is a require- 0.1 1.0 10.0 100.0 transformation requiring high current density ment of many RF matchbox designers. With the Frequency [MHz] current diagram processing modules. In order to meet this chal- XtraVolt low frequency vacuum capacitor product lenge, Comet has introduced a new high current range Comet meets these needs with higher voltage compact vacuum capacitor. capability compared to standard products. This allows significant higher voltage in a compact size Combining the most useful features of Comet’s vacuum capacitor keeping the same form factor. Comparison of XtraVolt and standard types vacuum capacitors, along with a new special for Mini-Cap, Uni-Con and Hexa-Con series cooling technology. This allows the use of high The XtraVolt low frequency product line – recom- current in a compact size vacuum capacitor. mended for frequencies below 4 MHz – makes you 25 benefit from the high-power design and increases Comet hybrid-cooling technology has been devel- power density by more than 40%. 20 oped as an extension of the well-known Hexa-Con product range. The first hybridcooled, small size The XtraVolt technology is applicable to most of 15 capacitor series offers users the best of both the existing capacitor series. worlds: the compact size allows the use of higher 10 power and users benefit from not having to increase footprint and hence lower cost of owner- Peak test voltage kV 5 ship at the same time. When comparing diameter versus power density, the Hexa-Con series with 0 500 1000 2800 4000 hybrid-cooling tech nology is best in class. Capacitance pF XtraVolt Standard Comparison of Cooling Types Benefits Current curve of a XtraVolt Mini-Cap Benefits • 20 to 100% increased voltage (below 4 MHz), depending on • High current (Hexa-Con series) vacuum capacitor types CFMN-100*AC/15-AE-G Standard product • Long lifetime • High power density CFMN-100HAC/20-AE-G LF • Low torque •E fficient use of matchbox space •M ore than 40% power improvement 250 225 •I ncreased design flexibility for your RF match architecture •E fficient use of matchbox space 100 •H igher voltage & higher current in standard size capacitor Conduction 20 W 189 200 • Same voltage specification in smaller size capacitor 13.56 MHz Features 160 Convection • Hybrid cooling technology ] 132 Conduction 20 W s 150 •H igh power design rm 13.56 MHz [A • 40% higher power density than standard product ] s Convection max 100 • Small form factor I rm 10 • Ultra-life drive system [A 50 max I 10 13.56 MHz 40 MHz Standard frequency app. @ Upt = 15kV Cooling XtraVolt app. @ Upt = 20kV 1 Conduction 0.1 1.0 10.0 Hybrid Frequency [MHz] current diagram 10 Vacuum Capacitors Vacuum Capacitors 11 Ultra-Life Vacuum Capacitor Drive Systems Lifetime up to 100 million turns Increase the reliability and useful lifetime of your impedance matching network with the best choice of vacuum capacitors along with the latest drive system technology. The expected lifetime of a vacuum capacitor is determined by the drive system and bellows design. Comet’s field proven bellows has been recognized as the leading design for RF stability and lifetime. With the introduction of Ultra Life, the drive system components now last at least three times longer. Avoid system breakdowns Friction in the drive system may cause particle formations, increased torque, leading to binding and finally result in failure. Comet Ultra Life drive systems increase capacitor and matching network lifetime by three or more times over existing products. Comet improvements ensure trouble free operation and lifetime up to 100 million turns. Benefits Drive System Lifetime Comparison •D esigned for 600 and 1200 RPM for fast match tuning (Hexa-Con series) •L ifetime up to 100 million turns • RoHS compliant • Available for most Comet capacitors 0.45 • Customized types available 0.40 0.35 ] 0.30 failed at Comparison Nm [ 1.18M cycles completed at 0.25 3.1M cycles, no wear detected 0.20 0.15 Peak torque 0.10 0.05 0.00 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 Number of cycles in millions Spec-Limit Standard Ultra-Life 12 Vacuum Capacitors Vacuum Capacitors 13 Series overview Variable Vacuum Capacitors Variable vacuum capacitors Li-Con 14 The graph below classifies all Comet variable vacuum capacitors according to three key techni- Basic-Con 15 cal features: current [A], capacitance [pF] and voltage [kV]. Dual-Con 16 All capacitors of one series share a characteristic Uni-Select 17 charge ([pF x kV]). The envelope of capacitor series increases with their charge. Uni-Con 18 Power-Con 19 1000 400 Hexa-Con 20 200 Maxi-Con 21 100 Nami-Con 22 Maximum Current [A] Maximum Current 80 Sami-Con 23 60 10 1 4 5 6 7 8 9 10 11 12 16 34 35 37 38 50 60 70 104 Hiper-con 24 Charge [μ Coulomb] ([pF x kV]) Supra-Con 25 MAMi-Con 26 LAMi-Con 27 Semiconductor & Flat Panel Display Broadcast and others HAMi-Con 28 14 Vacuum Capacitors Vacuum Capacitors 15 Li-Con Basic-Con Display Panel Flat & Semiconductor Smallest size Wide tuning range • Smallest size and rugged design • Designed for various semiconductor appli cations •V ery high self-resonant frequency • Popular and widely used •L owest Cmin values and low torque •C ompact and cost effective design Semiconductor & Flat Panel Display Panel Flat & Semiconductor •H igh voltage relative to small size •W ide tuning range up to 175:1 from Cmax to Cmin • Available with integrated flanges and flange mount • Integrated flanges for easy installation Broadcast & others & Broadcast •A ntimagnetic lead screws for research or medical applications •L ow torque allows for high tuning speed like nuclear magnetic resonance imaging systems Broadcast & others & Broadcast Technical Features Technical Features Cmax Range [pF] 30 – 125 Cmax Range [pF] 170 – 1400 Upt Range [kV] 5 – 20 Upt Range [kV] 3 – 15 Irms Range [Arms] 16 – 36 Irms Range [Arms] 55 – 64 Inductance [nH] ≤ 8 Inductance [nH] ≤ 9 Diameter [mm] 35 Diameter [mm] 55 Height [mm] 99 – 108 Height [mm] 103 – 154 Cooling System Convection Cooling System Convection RoHS conform Available RoHS conform Available Product Overview Product Overview Capacitance Voltage Current Inductance Cooling Capacitance Voltage Current Inductance Cooling Cmin Cmax Upt @ 13.56 MHz @ Cmax System Cmin Cmax Upt @ 13.56 MHz @ Cmax System pF pF kV Arms nH pF pF kV Arms nH 3 30 15 16 ≤ 8 Convection 5 170 15 64 ≤ 9 Convection 5 125 8 36 ≤ 8 Convection 5 250 15 57 ≤ 8 Convection 5 500 5 57 ≤ 9 Convection 5 500 7 57 ≤ 9 Convection 50 1000 5 55 ≤ 9 Convection 8 1400 3 57 ≤ 9 Convection Visit pct.comet.tech for the full product portfolio and individual data sheets Visit pct.comet.tech for the full product portfolio and individual data sheets 16 Vacuum Capacitors Vacuum Capacitors 17 Dual-Con Uni-Select Display Panel Flat & Semiconductor Rugged For low to medium power • Designed for high vibration and shock applications • Designed for low power and general industrial applications • Rugged double bearing construction • Rugged design
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