<<

Led by experience. Driven by curiosity. Vacuum Combining expertise and technology 2 Vacuum Capacitors Vacuum Capacitors 3

Table of contents

We empower new technologies 4

Advanced technologies 7

Variable Vacuum Capacitors 12

Fixed Vacuum Capacitors 30

Trimmer Vacuum 38

Motorized Capacitors 42

Customized solutions 48

Series overview 50

Service Bulletins 54

Contacts 56 4 Vacuum Capacitors Vacuum Capacitors 5

We empower new technologies

Comet is a leading expert in RF power delivery and a global innovation partner of RF related business- es for more than 50 years. Our products have earned a global reputation for quality and reliabili- ty over a broad variety of applications.

By exploring the mysteries of plasma behavior Comet is contributing to the evolution of the semiconductor industry. With the goal to provide our customers with the most precise tools we “We create solutions engineer and manufacture the most advanced RF power systems and diagnostic tools to master that respond both to plasma processes. today’s trends and Comet’s profound know-how in RF circuit modeling tomorrow’s needs.” and design has its origin in the development of

vacuum capacitors. A broad range of capacitors Michael Kammerer for all needs guarantees you highest performance, President Comet repeatability and reliability of your tools. Besides Plasma Control Technologies that, the unique modular and customized design allows a high degree of flexibility in production and guarantees the delivery of special types on short notice. To improve the performance of our Imped- ance Matching Networks exclusively Comet Vaccum Capacitors are used.

In this catalog you will learn more about the broadest selection of capacitance, power, and drive systems in the market. Our experts are looking forward to support you in finding the right solution for your specific needs. 6 Vacuum Capacitors Vacuum Capacitors 7

Advanced technologies

XtraVolt Vacuum Capacitors 8

High current, compact Vacuum Capacitors 9

Ultra-Life Vacuum Capacitor Drive Systems 10 8 Vacuum Capacitors Vacuum Capacitors 9

XtraVolt product range versus XtraVolt standard product range High current, compact

Vacuum Standard product Vacuum Capacitors XtraVolt product Max. power dissipation Capacitors IArms = 2 C Upw Conduction Convection Conduction

] Convection s Higher

rm voltage

[A bene�it max I

For low frequency applications With hybrid-cooling technology

The semiconductor industry is transforming: High Critical freq. will change with voltage and capacitance Semiconductor industry is going through a big power density in processing modules is a require- 0.1 1.0 10.0 100.0 transformation requiring high current density ment of many RF matchbox designers. With the Frequency [MHz] current diagram processing modules. In order to meet this chal- XtraVolt low frequency vacuum capacitor product lenge, Comet has introduced a new high current range Comet meets these needs with higher voltage compact vacuum capacitor. capability compared to standard products. This allows significant higher voltage in a compact size Combining the most useful features of Comet’s vacuum capacitor keeping the same form factor. Comparison of XtraVolt and standard types vacuum capacitors, along with a new special for Mini-Cap, Uni-Con and Hexa-Con series cooling technology. This allows the use of high The XtraVolt low frequency product line – recom- current in a compact size vacuum capacitor.

mended for frequencies below 4 MHz – makes you 25 benefit from the high-power design and increases Comet hybrid-cooling technology has been devel- power density by more than 40%. 20 oped as an extension of the well-known Hexa-Con product range. The first hybridcooled, small size The XtraVolt technology is applicable to most of 15 capacitor series offers users the best of both the existing capacitor series. worlds: the compact size allows the use of higher 10 power and users benefit from not having to increase footprint and hence lower cost of owner-

Peak test voltage kV 5 ship at the same time. When comparing diameter versus power density, the Hexa-Con series with 0 500 1000 2800 4000 hybrid-cooling tech­nology is best in class.

Capacitance pF XtraVolt Standard

Comparison of Cooling Types Benefits Current curve of a XtraVolt Mini-Cap Benefits • 20 to 100% increased voltage (below 4 MHz), depending on • High current (Hexa-Con series) vacuum CFMN-100*AC/15-AE-G Standard product • Long lifetime • High power density CFMN-100HAC/20-AE-G LF • Low torque •E fficient use of matchbox space •M ore than 40% power improvement 250 •I ncreased design flexibility for your RF match architecture •E fficient use of matchbox space 225 100 •H igher voltage & higher current in standard size capacitor Conduction 20 W 189 200 • Same voltage specification in smaller size capacitor 13.56 MHz Features 160 Convection • Hybrid cooling technology ] 132 Conduction 20 W s 150

•H igh power design rm 13.56 MHz • 40% higher power density than standard product [A ]

s Convection

max 100 • Small form factor I rm 10 • Ultra-life drive system [A 50 max I

10 13.56 MHz 40 MHz Standard frequency app. @ Upt = 15kV Cooling XtraVolt app. @ Upt = 20kV 1 Conduction 0.1 1.0 10.0 Hybrid Frequency [MHz] current diagram 10 Vacuum Capacitors Vacuum Capacitors 11

Ultra-Life Vacuum Capacitor Drive Systems

Lifetime up to 100 million turns Increase the reliability and useful lifetime of your network with the best choice of vacuum capacitors along with the latest drive system technology.

The expected lifetime of a vacuum capacitor is determined by the drive system and bellows design. Comet’s field proven bellows has been recognized as the leading design for RF stability and lifetime. With the introduction of Ultra Life, the drive system components now last at least three times longer.

Avoid system breakdowns Friction in the drive system may cause particle formations, increased torque, leading to binding and finally result in failure.

Comet Ultra Life drive systems increase capacitor and matching network lifetime by three or more times over existing products. Comet improvements ensure trouble free operation and lifetime up to 100 million turns.

Benefits Drive System Lifetime Comparison •D esigned for 600 and 1200 RPM for fast match tuning (Hexa-Con series) •L ifetime up to 100 million turns • RoHS compliant • Available for most Comet capacitors 0.45

• Customized types available 0.40

0.35 ] 0.30 failed at Comparison Nm 1.18M cycles completed at 0.25 3.1M cycles, no wear detected 0.20

0.15

Peak torque [ 0.10

0.05

0.00 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 Number of cycles in millions

Spec-Limit Standard Ultra-Life 12 Vacuum Capacitors Vacuum Capacitors 13

Series overview Variable Vacuum Capacitors

Variable vacuum capacitors Li-Con 14 The graph below classifies all Comet variable vacuum capacitors according to three key techni- Basic-Con 15 cal features: current [A], capacitance [pF] and voltage [kV]. Dual-Con 16

All capacitors of one series share a characteristic Uni-Select 17 charge ([pF x kV]). The envelope of capacitor series increases with their charge. Uni-Con 18

Power-Con 19

1000

400 Hexa-Con 20

200 Maxi-Con 21

100 Nami-Con 22

Maximum Current [A] Maximum Current 80 Sami-Con 23 60

10 1 4 5 6 7 8 9 10 11 12 16 34 35 37 38 50 60 70 104 Hiper-con 24 Charge [μ Coulomb] ([pF x kV]) Supra-Con 25

MAMi-Con 26

LAMi-Con 27 Semiconductor & Flat Panel Display Broadcast and others HAMi-Con 28 14 Vacuum Capacitors Vacuum Capacitors 15

Li-Con Basic-Con Semiconductor & Flat Panel Display Smallest size Wide tuning range

• Smallest size and rugged design • Designed for various semiconductor appli­cations •V ery high self-resonant frequency • Popular and widely used

•L owest Cmin values and low torque •C ompact and cost effective design Semiconductor & Flat Panel Display Panel Flat & Semiconductor •H igh voltage relative to small size •W ide tuning range up to 175:1 from Cmax to Cmin • Integrated flanges for easy installation • Available with integrated flanges and flange mount Broadcast & others •A ntimagnetic lead screws for research or medical applications •L ow torque allows for high tuning speed like nuclear magnetic resonance imaging systems Broadcast & others & Broadcast

Technical Features Technical Features

Cmax Range [pF] 30 – 125 Cmax Range [pF] 170 – 1400

Upt Range [kV] 5 – 20 Upt Range [kV] 3 – 15

Irms Range [Arms] 16 – 36 Irms Range [Arms] 55 – 64

Inductance [nH] ≤ 8 Inductance [nH] ≤ 9

Diameter [mm] 35 Diameter [mm] 55

Height [mm] 99 – 108 Height [mm] 103 – 154

Cooling System Convection Cooling System Convection

RoHS conform Available RoHS conform Available

Product Overview Product Overview

Capacitance Voltage Current Inductance Cooling Capacitance Voltage Current Inductance Cooling

Cmin Cmax Upt @ 13.56 MHz @ Cmax System Cmin Cmax Upt @ 13.56 MHz @ Cmax System

pF pF kV Arms nH pF pF kV Arms nH

3 30 15 16 ≤ 8 Convection 5 170 15 64 ≤ 9 Convection

5 125 8 36 ≤ 8 Convection 5 250 15 57 ≤ 8 Convection

5 500 5 57 ≤ 9 Convection

5 500 7 57 ≤ 9 Convection

50 1000 5 55 ≤ 9 Convection

8 1400 3 57 ≤ 9 Convection

Visit pct.comet.tech for the full product portfolio and individual data sheets Visit pct.comet.tech for the full product portfolio and individual data sheets 16 Vacuum Capacitors Vacuum Capacitors 17

Dual-Con Uni-Select Semiconductor & Flat Panel Display Rugged For low to medium power

• Designed for high vibration and shock applications • Designed for low power and general industrial applications • Rugged double bearing construction • Rugged design with standardized 42 mm quadratic mounting •I ntegrated bearing system affords reduced height and flange Semiconductor & Flat Panel Display Panel Flat & Semiconductor compact design •O ptimized drive system for fast tuning

•W ide tuning range up to 125:1 from Cmax to Cmin •F requency range up to 60 MHz Broadcast & others •L ong lifetime due to optimized drive system •F ully RoHS compliant •L ow torque allows for very high tuning speed • Available as a motorized and non motorized vacuum capacitor • Standardized 42 mm quadratic mounting flange •U sed in small matching units for semiconductor applications and aviation tuners Broadcast & others & Broadcast

Technical Features Technical Features

Cmax Range [pF] 500 – 1200 Cmax Range [pF] 100 – 1500

Upt Range [kV] 3 – 10 Upt Range [kV] 3 – 15

Irms Range [Arms] 63 – 65 Irms Range [Arms] 54 – 57

Inductance [nH] ≤ 8 Inductance [nH] ≤ 9

Diameter [mm] 46 Diameter [mm] 54

Height [mm] 90 – 128 Height [mm] 134

Cooling System Convection Cooling System Convection

RoHS conform Available RoHS conform Yes

Product Overview Product Overview

Capacitance Voltage Current Inductance Cooling Capacitance Voltage Current Inductance Cooling

Cmin Cmax Upt @ 13.56 MHz @ Cmax System Cmin Cmax Upt @ 13.56 MHz @ Cmax System

pF pF kV Arms nH pF pF kV Arms nH

5.6 500 5 63 ≤ 7 Convection 10 100 15 54 ≤ 6 Convection

8 650 5 63 ≤ 8 Convection 25 250 15 57 ≤ 7 Convection

30 650 8 63 ≤ 8 Convection 50 500 8 57 ≤ 9 Convection

8 1000 3 65 ≤ 8 Convection 100 1000 5 57 ≤ 8 Convection

50 1200 5 64 ≤ 7 Convection 150 1500 3 57 ≤ 8 Convection

Visit pct.comet.tech for the full product portfolio and individual data sheets Visit pct.comet.tech for the full product portfolio and individual data sheets 18 Vacuum Capacitors Vacuum Capacitors 19

Uni-Con Power-Con Semiconductor & Flat Panel Display The semiconductor standard Powerful

• Designed for typical semiconductor applications around 5 kW • Designed for typical flat panel and high power •O ptimized bellows design for high power operations semiconductor (LCD, FPD) and other applications requiring a •O ptimized drive system for fast tuning frequency from 2 MHz to 60 MHz Semiconductor & Flat Panel Display Panel Flat & Semiconductor •F requency range up to 162 MHz • Low inductance •H igh current capability relative to small size • High current capability to support 10 kW applications Broadcast & others • Interchangeable due to uniform size • Available with water cooling • Standardized 42 mm quadratic mounting flange • Rugged construction • Available as a motorized and non motorized vacuum capacitor • Standardized six hole mounting flanges • Available as a motorized and non motorized vacuum capacitor Broadcast & others & Broadcast

Technical Features Technical Features

Cmax Range [pF] 30 – 2000 Cmax Range [pF] 100 – 2000

Upt Range [kV] 3 – 20 Upt Range [kV] 5 – 15

Irms Range [Arms] 54 – 94 Irms Range [Arms] 45 – 136

Inductance [nH] ≤ 9 Inductance [nH] ≤ 7

Diameter [mm] 55, 64 and 75 Diameter [mm] 88

Height [mm] 133 – 142 Height [mm] 130 – 181

Cooling System Convection Cooling System Convection, Water

RoHS conform Available RoHS conform Available

Product Overview Product Overview

Capacitance Voltage Current Inductance Cooling Capacitance Voltage Current Inductance Cooling

Cmin Cmax Upt @ 13.56 MHz @ Cmax System Cmin Cmax Upt @ 13.56 MHz @ Cmax System

pF pF kV Arms nH pF pF kV Arms nH

2 30 37 40 ≤ 8 Convection 12 100 15 54 ≤ 4 Convection

10 100 15 54 ≤ 8 Convection 50 250 5 45 ≤ 5 Convection

10 100 20 72 ≤ 8 Convection 30 300 15 136 ≤ 5 Water

25 250 15 93 ≤ 8 Convection 50 500 15 123 ≤ 6 Convection

50 500 5 90 ≤ 8 Convection 70 500 15 129 ≤ 6 Water

50 500 8 92 ≤ 8 Convection 80 500 15 118 ≤ 6 Convection

50 500 12 94 ≤ 10 Convection 80 500 15 129 ≤ 6 Water

100 1000 5 89 ≤ 9 Convection 30 1500 5 131 ≤ 7 Water

100 1000 10 91 ≤ 9 Convection 30 1500 5 127 ≤ 7 Convection

150 1500 4 85 ≤ 8 Convection 90 1500 5 131 ≤ 7 Water

150 1500 7 88 ≤ 8 Convection 300 2000 5 131 ≤ 6 Water

200 2000 3 86 ≤ 9 Convection

Visit pct.comet.tech for the full product portfolio and individual data sheets Visit pct.comet.tech for the full product portfolio and individual data sheets 20 Vacuum Capacitors Vacuum Capacitors 21

Hexa-Con Maxi-Con Semiconductor & Flat Panel Display High frequency, long lifetime High capacitance and voltage

• Reduced electrical losses and inductance of bellows enable high • Designed for high power flat panel (LCD, FPD), currents even at frequencies ≥ 60 MHz semiconductor and other applications over 20 kW • Available with water cooling • High voltage and high current capability Semiconductor & Flat Panel Display Panel Flat & Semiconductor • Rugged construction • Typical frequency range between 2 MHz and 40 MHz • Standardized six hole mounting flanges • Available with water cooling Broadcast & others • Very accurate C-curve available • Standardized six hole mounting flanges • Mostly used for high power semiconductor applications • Available as a motorized and non motorized vacuum capacitor • Available as a motorized and non motorized vacuum capacitor Broadcast & others & Broadcast

Technical Features Technical Features

Cmax Range [pF] 80 – 2000 Cmax Range [pF] 250 – 2000

Upt Range [kV] 10 – 25 Upt Range [kV] 8 – 25

Irms Range [Arms] 57 – 152 Irms Range [Arms] 123 – 182

Inductance [nH] ≤ 6 Inductance [nH] ≤ 11

Diameter [mm] 85 Diameter [mm] 117

Height [mm] 155 – 169 Height [mm] 152 – 166

Cooling System Convection, Water, Hybrid Cooling System Convection, Water

RoHS conform Available RoHS conform Available

Hybrid–cooling Yes, see page 9 Hybrid–cooling Yes, see page 9

Product Overview Product Overview

Capacitance Voltage Current Inductance Cooling Capacitance Voltage Current Inductance Cooling

Cmin Cmax Upt @ 13.56 MHz @ Cmax System Cmin Cmax Upt @ 13.56 MHz @ Cmax System

pF pF kV Arms nH pF pF kV Arms nH

8.6 80 20 57 ≤ 5 nH Convection 20 250 25 175 ≤ 6 Convection

8.6 80 25 72 ≤ 5 nH Convection 50 500 25 170 ≤ 7 Convection

12.8 200 15 108 ≤ 5 nH Water 50 500 25 182 ≤ 7 Water

12.8 200 15 108 ≤ 5 nH Convection 100 1000 15 133 ≤ 9 Convection

25 200 30 170 ≤ 6 nH Convection 100 1000 15 151 ≤ 9 Water

25 330 10 119 ≤ 6 nH Convection 150 1500 8 182 ≤ 10 Water

25 330 10 119 ≤ 6 nH Convection 200 2000 8 171 ≤ 10 Convection

35 350 20 153 ≤ 6 nH Convection 200 2000 8 182 ≤ 11 Water

50 500 15 152 ≤ 6 nH Convection 300 3000 8 123 ≤ 11 Convection

Advanced technology

12.8 200 25 180 ≤ 5 nH Hybrid

7 250 25 225 ≤ 5 nH Hybrid

Visit pct.comet.tech for the full product portfolio and individual data sheets Visit pct.comet.tech for the full product portfolio and individual data sheets 22 Vacuum Capacitors Vacuum Capacitors 23

NAMi-Con SAMi-Con Semiconductor & Flat Panel Display Broadcast applications Broadcast applications

• Designed for typical AM/MW broadcast applications • Most popular capacitor in broadcast application •M ainly used in broadcast and communication trans­mitters • Designed for typical AM/MW applications from 2 to 20 kW • Used in from 10 kW to 50 kW Semiconductor & Flat Panel Display Panel Flat & Semiconductor •S mall size relative to high voltage • Forced air cooling allows high current applications • High capacitance and high voltage values support a wide range • Compact design Broadcast & others of different applications like coastal transmitters, combiners, • Available for applications like coastal transmitters, networks and industrial RF generators combiners, antenna networks and industrial RF generators • Available as a motorized and non motorized vacuum capacitor • Available as a motorized and non motorized vacuum capacitor Broadcast & others & Broadcast

Technical Features Technical Features

Cmax Range [pF] 25 – 1000 Cmax Range [pF] 250 – 2300

Upt Range [kV] 15 – 65 Upt Range [kV] 15 – 40

Irms Range [Arms] 58 – 80 Irms Range [Arms] 106 – 138

Inductance [nH] ≤ 18 Inductance [nH] ≤ 22

Diameter [mm] 116 Diameter [mm] 146

Height [mm] 136 – 206 Height [mm] 250

Cooling System Convection Cooling System Convection

RoHS conform No RoHS conform No

Product Overview Product Overview

Capacitance Voltage Current Inductance Cooling Capacitance Voltage Current Inductance Cooling

Cmin Cmax Upt @ 13.56 MHz @ Cmax System Cmin Cmax Upt @ 13.56 MHz @ Cmax System

pF pF kV Arms nH pF pF kV Arms nH

11 25 65 58 ≤ 17 Convection 15 250 40 138 ≤ 13 Convection

10 75 60 78 ≤ 17 Convection 25 450 40 138 ≤ 15 Convection

15 750 15 79 ≤ 18 Convection 25 500 20 137 ≤ 17 Convection

15 1000 10 80 ≤ 18 Convection 30 1000 25 106 ≤ 20 Convection

35 1500 15 108 ≤ 21 Convection

30 2300 15 106 ≤ 22 Convection

Visit pct.comet.tech for the full product portfolio and individual data sheets Visit pct.comet.tech for the full product portfolio and individual data sheets 24 Vacuum Capacitors Vacuum Capacitors 25

Hiper-Con Supra-Con Semiconductor & Flat Panel Display High voltage, high current High power

•D esigned for high power flat-panel (LCD, FPD) •D esigned for the high power application in RF industries (up to applications over 50 kW over 100 kW at 1 – 40 MHz) • High voltage and high current capabilities •P atented triplex-water-cooling allows the use of industry water Semiconductor & Flat Panel Display Panel Flat & Semiconductor •E nhanced water cooling system allows industry water with up to 6 bars without compromising the bellows

pressure up to 6 bars •W ide tuning range up to 100:1 from Cmax to Cmin Broadcast & others •T ypical frequency range between 2 MHz and 40 MHz •I mproved RoHS compliant drive system for long lifetime over 1 • Standardized mounting flanges million cycles •L ong bellows lifetime • Available as a motorized and non motorized vacuum capacitor •D rive system with lead-screw-coating for lifetime over 1 million cycles

Broadcast & others & Broadcast • Available as a motorized and non motorized vacuum capacitor

Technical Features Technical Features

Cmax Range [pF] 350 – 2500 Cmax Range [pF] 350 – 2500

Upt Range [kV] 15 – 40 Upt Range [kV] 20 – 55

Irms Range [Arms] 300 Irms Range [Arms] 443

Inductance [nH] ≤ 15 Inductance [nH] ≤ 21

Diameter [mm] 143 Diameter [mm] 183

Height [mm] 255 Height [mm] 295

Cooling System Water Cooling System Water

RoHS conform Available RoHS conform Available

Product Overview Product Overview

Capacitance Voltage Current Inductance Cooling Capacitance Voltage Current Inductance Cooling

Cmin Cmax Upt @ 13.56 MHz @ Cmax System Cmin Cmax Upt @ 13.56 MHz @ Cmax System

pF pF kV Arms nH pF pF kV Arms nH

20 350 40 300 ≤ 15 Water 20 350 55 443 ≤ 18 Water

50 500 40 300 ≤ 15 Water 50 500 55 443 ≤ 20 Water

100 1000 20 300 ≤ 15 Water 250 2500 20 443 ≤ 21 Water

200 2500 15 300 ≤ 15 Water

Visit pct.comet.tech for the full product portfolio and individual data sheets Visit pct.comet.tech for the full product portfolio and individual data sheets 26 Vacuum Capacitors Vacuum Capacitors 27

MAMi-Con LAMi-Con Semiconductor & Flat Panel Display Broadcast applications Broadcast applications

• Designed for typical MW/SW broadcast applications • Designed for SW broadcast applications •W idely used in broadcast transmitters from •W idely used in high power broadcast transmitters from 500 100 kW to 500 kW kW to 1000 kW Semiconductor & Flat Panel Display Panel Flat & Semiconductor •H igh voltage relative to the capacitance level •F orced air cooling or highly efficient water cooling allow for •F orced air cooling or water cooling allows for higher current very high current capability Broadcast & others applications • Wide tuning range from Cmax to Cmin •W ide range supports different applications like industrial (up to 30:1) for different applications like wood drying and generators, combiners and antenna networks industrial generators • Available as a motorized and non motorized vacuum capacitor • Available as a motorized and non motorized vacuum capacitor Broadcast & others & Broadcast

Technical Features Technical Features

Cmax Range [pF] 250 – 1500 Cmax Range [pF] 1000 – 2000

Upt Range [kV] 35 – 70 Upt Range [kV] 35 – 50

Irms Range [Arms] 136 – 832 Irms Range [Arms] 136 – 891

Inductance [nH] ≤ 32 Inductance [nH] ≤ 39

Diameter [mm] 183 Diameter [mm] 211

Height [mm] 216 – 447 Height [mm] 372 – 640

Cooling System Air, Convection, Water Cooling System Air, Convection, Water

RoHS conform No RoHS conform No

Product Overview Product Overview

Capacitance Voltage Current Inductance Cooling Capacitance Voltage Current Inductance Cooling

Cmin Cmax Upt @ 13.56 MHz @ Cmax System Cmin Cmax Upt @ 13.56 MHz @ Cmax System

pF pF kV Arms nH pF pF kV Arms nH

10 250 50 420 ≤ 32 Water 40 1000 50 221 ≤ 39 Air

10 250 55 137 ≤ 32 Convection 40 1000 50 136 ≤ 39 Convection

18 250 70 219 ≤ 32 Air 65 1000 50 521 ≤ 39 Water

15 450 50 419 ≤ 32 Water 85 1000 50 525 ≤ 39 Water

15 450 55 137 ≤ 32 Convection 100 1000 50 843 ≤ 39 Water

30 650 55 137 ≤ 24 Convection 40 1300 50 797 ≤ 34 Water

30 650 55 238 ≤ 32 Air 100 1600 40 633 ≤ 36 Water

25 650 50 467 ≤ 31 Water 100 2000 35 136 ≤ 39 Convection

20 750 40 138 ≤ 32 Convection

35 1000 40 138 ≤ 25 Convection

30 1200 40 420 ≤ 32 Water

100 1500 40 136 ≤ 32 Convection

Visit pct.comet.tech for the full product portfolio and individual data sheets Visit pct.comet.tech for the full product portfolio and individual data sheets 28 Vacuum Capacitors Vacuum Capacitors 29

HAMi-Con Broadcast applications

• Designed for highest power SW broadcast applications • Used in broadcast transmitters or industrial generators up to 1000 kW Semiconductor & Flat Panel Display Panel Flat & Semiconductor • Highly efficient water cooling provides current capability over 1000 A • High capacitance relative to voltage •H igh voltage and capacitance values for the most demanding applications • Available as a motorized and non motorized vacuum capacitor Broadcast & others & Broadcast

Technical Features

Cmax Range [pF] 1600 – 2600

Upt Range [kV] 40 – 60

Irms Range [Arms] 753 – 870

Inductance [nH] ≤ 44

Diameter [mm] 313

Height [mm] 459 – 609

Cooling System Water

RoHS conform No

Product Overview

Capacitance Voltage Current Inductance Cooling

Cmin Cmax Upt @ 13.56 MHz @ Cmax System

pF pF kV Arms nH

100 1600 60 870 ≤ 44 Water

100 2050 50 753 ≤ 43 Water

100 2600 40 812 ≤ 43 Water

Visit pct.comet.tech for the full product portfolio and individual data sheets 30 Vacuum Capacitors Vacuum Capacitors 31

Series overview Fixed Vacuum Capacitors

Fixed vacuum capacitors Mini-Cap 32 The graph below shows all Comet fixed vacuum capacitors according to three key technical fea- Nami-Cap 34 tures: current [A], capacitance [pF], and voltage [kV]. Capacitance and voltage are represented by Sami-Cap 35 their product charge. Within one series, different capacitor envelopes (height and diameter) have a Mami-Cap 36 specific geometry-letter. The envelope of capaci- tors increases with their charge. Lami-Cap 37

1000

W 400

200 Maximum Current [A] Maximum Current

100 3 4 57 8 9 18 19 20 22 23 25 30 37 38 40 50 75 80 90 105 110

Charge [μ Coulomb] ([pF x kV])

Mini-Cap NAMi-Cap SAMi-Cap MAMi-Cap LAMi-Cap 32 Vacuum Capacitors Vacuum Capacitors 33

Mini-Cap Semiconductor & Flat Panel Display Compact, covering wide range of capacitance and

•H igh quality and reliable capacitor for both high and low Technical Features Semiconductor & Flat Panel Display Panel Flat & Semiconductor current applications • Low internal inductance for operation in excess of 100 MHz Broadcast & others

•V ery compact and uniform size Cmax Range [pF] 10 – 4000 • Unique rugged and cost effective design •W idely used in different applications like matching networks, Upt Range [kV] 3 – 35 DC blocking and RF sealing Irms Range [Arms] 7 – 168 •D elivered with mounting kit for easy installation

Broadcast & others & Broadcast Diameter [mm] 35, 49, 64, 76

Height [mm] 52 – 87

Cooling System Convection

RoHS conform Yes

Product Overview Outline A Outline D

Capacitance C Voltage Upt Current @ 13.56 MHz Cooling System

pF kV Arms

50 15 27 Convection 73 Ø 48 63 50 30 54 Convection Ø 49 52

100 15 54 Convection

100 30 108 Convection

100 35 126 Convection

120 15 65 Convection Outline B Outline E

150 15 81 Convection

175 35 168 Convection

180 15 97 Convection

200 15 107 Convection Ø 64 200 25 143 Convection 87 Ø 76 52 210 15 113 Convection

250 15 134 Convection

350 15 132 Convection Outline C Outline G 500 12 126 Convection

750 10 116 Convection

1000 8 115 Convection

2000 5 121 Convection 62 49 52 4000 5 121 Convection Ø Ø 35 43

Visit pct.comet.tech for the full product port­folio and individual data sheets 34 Vacuum Capacitors Vacuum Capacitors 35

NAMi-Cap SAMi-Cap Semiconductor & Flat Panel Display Broadcast applications Broadcast applications

•D esigned for typical AM/MW broadcast and industrial • Designed for typical MW/SW broadcast applications applications • Used in communication transmitters from 10 kW to 100 kW •S mall size relative to voltage level •H igh capacitance supports a wide range of different applicati- • Wide range of capacitance and voltage ons like antenna networks, output filters and industrial RF Semiconductor & Flat Panel Display Panel Flat & Semiconductor •E asy to install through a simple flange mounting system generators

• Wide variety of applications for broadcast and • Very flat and compact design Broadcast & others communication transmitters, antenna network systems, •L ow inductance results in high self-resonant frequency output-filters, coupling capacitors, industrial • Standardized solution for any medium power application RF generators and nuclear research • Low inductance results in high self-resonant frequency Broadcast & others & Broadcast

Technical Features Technical Features

Cmax Range [pF] 125 – 1000 Cmax Range [pF] 350 – 2500

Upt Range [kV] 40 – 60 Upt Range [kV] 15 – 25

Irms Range [Arms] 162 – 271 Irms Range [Arms] 171 – 271

Diameter [mm] 116 Diameter [mm] 117, 143

Height [mm] 137 – 230 Height [mm] 86 – 100

Cooling System Convection Cooling System Convection

RoHS conform Yes RoHS conform Available

Product Overview Product Overview

Capacitance C Voltage Upt Current @ 13.56 MHz Cooling System Capacitance C Voltage Upt Current @ 13.56 MHz Cooling System

pF kV Arms pF kV Arms

500 40 215 Convection 750 25 217 Convection

750 40 176 Convection 1000 15 171 Convection

1000 40 162 Convection 1000 25 271 Convection

125 60 271 Convection 1500 15 226 Convection

1500 15 171 Convection

2000 15 226 Convection

2500 15 224 Convection

Visit pct.comet.tech for the full product portfolio and individual data sheets Visit pct.comet.tech for the full product portfolio and individual data sheets 36 Vacuum Capacitors Vacuum Capacitors 37

MAMi-Cap LAMi-Cap Semiconductor & Flat Panel Display Broadcast applications Broadcast applications

• Designed for typical MW/SW broadcast applications •D esigned for high power MW/SW broadcast applications •W idely used in transmitters from 100 kW to 1000 kW •U sed in transmitters from 500 kW to 1000 kW • High capacitance values available for demanding •H igh voltage relative to capacitance – low inductance results in applications high self-resonant frequency Semiconductor & Flat Panel Display Panel Flat & Semiconductor •A vailable with water cooling for higher current applications

•L ow inductance results in high self-resonant frequency Broadcast & others •I deal solution for medium and high power applications Broadcast & others & Broadcast

Technical Features Technical Features

Cmax Range [pF] 400 – 5000 Cmax Range [pF] 2000

Upt Range [kV] 10 – 70 Upt Range [kV] 45 – 55

Irms Range [Arms] 227 – 459 Irms Range [Arms] 283

Diameter [mm] 183 Diameter [mm] 208

Height [mm] 88 – 195.4 Height [mm] 183 and 212

Cooling System Convection, Water Cooling System Convection

RoHS conform Yes RoHS conform Available

Product Overview Product Overview

Capacitance C Voltage Upt Current @ 13.56 MHz Cooling System Capacitance C Voltage Upt Current @ 13.56 MHz Cooling System

pF kV Arms pF kV Arms

400 50 459 Water 2000 55 283 Convection

450 70 339 Convection 2000 45 282 Convection

1000 50 296 Convection

1500 35 303 Convection

2000 35 266 Convection

2000 40 259 Convection

2500 30 246 Convection

3000 35 236 Convection

5000 10 227 Convection

Visit pct.comet.tech for the full product portfolio and individual data sheets Visit pct.comet.tech for the full product portfolio and individual data sheets 38 Vacuum Capacitors Vacuum Capacitors 39

Trimmer Vacuum Capacitor

Mini-Tune 40 40 Vacuum Capacitors Vacuum Capacitors 41

Mini-Tune Semiconductor & Flat Panel Display Fine tuning precision Semiconductor & Flat Panel Display Panel Flat & Semiconductor Trimmer capacitors are vacuum capacitors be- Technical Features tween fixed and variable, providing a solution to Broadcast & others the demand for very accurate fixed capacitors. It is Cnominal Range [pF] 15 – 440 used where small adjustments are needed to meet U Range [kV] 15 – 34 an individual circuit tolerance or to compensate for pt

Irms Range [Arms] 14 – 175 Broadcast & others & Broadcast slight differences per tool and tool “drift” over

time. As the Mini-Tune series is a modified version Diameter [mm] 48, 64 of our Mini-Caps in the C-, D- and E-geometries, Height [mm] 52 – 87 the same body sizes allow easy interchangeability with the corresponding standard Mini-Caps. Cooling System Convection RoHS conform Yes

Customer Benefits •A bility to compensate for small, but critical, impedance differences from match to match • Compensate for tool “drift” over time • Tool for fine tuning during design and development phase Product Overview •U sable for a very precise voltage divider • Less expensive than an automatic solution Capacitance Cnominal Voltage Upt Current @ 13.56 MHz Cooling System

Technical Advantages pF kV Arms •T unable with a no. 3 hex key • Self-locking screw 15 34 21 Convection •E xactly and precisely adjustable +/– 1.7 turns for +/– 5 pF 21 15 14 Convection •E ven trimmable after mounting in the match • Other C-values available on request 25 30 32 Convection

30 30 37 Convection

35 30 43 Convection

48 15 28 Convection

50 30 59 Convection

60 30 70 Convection

74 30 85 Convection

85 30 97 Convection

90 15 51 Convection

100 30 113 Convection

115 30 101 Convection

120 15 67 Convection

200 20 101 Convection

270 25 175 Convection

320 25 170 Convection

360 25 162 Convection

400 25 159 Convection

440 25 156 Convection

Visit pct.comet.tech for the full product portfolio and individual data sheets 42 Vacuum Capacitors Vacuum Capacitors 43

Motorized Vacuum Capacitors

Motorized Capacitors 44 44 Vacuum Capacitors Vacuum Capacitors 45

Motorized Capacitors Semiconductor & Flat Panel Display Integrated drive solutions

Comet Motorized Capacitors offer the latest High-level commands Semiconductor & Flat Panel Display Panel Flat & Semiconductor integrated drive technology for vacuum capacitors •T he module can be controlled from a PC or a control Product Functions (Capacitor tuning) board using high-level commands (RS232, RS485). The Broadcast & others at the best price-performance ratio. A single communication protocol allows the execution of the following Using a stepper-motor, the capacitance of the communication protocol for RS232 and RS485 commands: variable capacitor can be tuned precisely between provides flexibility in a wide range of ­applications. •P recise motion control by setting full-step, micro-step or user selectable limits. capacitance position Motorized Capacitors are the ideal solution for •S et idle and drive current, speed and slave address within

Broadcast & others & Broadcast high-precision operation. Besides ensuring highest allowed range accuracy, motorized capacitors simplify procurement •R ead out of actual full-step, micro-step and capacitance with an easy-to-install subsystem. position Product Specifications •R ead out of actual full-step, micro-step and capacitance position •R ead out of characteristic capacitance curve (C-Curve) Supply voltage +24 VDC •R ead out of various parameters such as firmware version, serial Features number and all customer and factory limits < 0.9 Apeak (ID-400) •O ne driver PCB for new Integrated Drives (ID-400 and • Comprehensive RX responses (ACK, NAK): Supply current < 2.0 Apeak (ID-1200) ID-1200) - ACK for all commands Full-step angle 1.8 ° •S ame communication Comet protocol RS232 and RS485 - ACK for “movement-started“ resp. “movement completed“ •F lexible baud rate between 9.600 and 115.200 Bd - NAK e.g. check-sum error, index out of range Motor speed up to 600 rpm •C onnect up to 32 modules in RS485 mode •B aud rate can be set within 9.600 to 115.200 Bd •R eadout of full-step, micro-step and capacitance position •S et user limits (Cmin and Cmax) within factory limits Micro-stepping 16 micro-steps •C apacitance table with higher resolution on request • Store up to 10 user selectable positions Operating temperature 0 – +50 °C

Benefits Available interfaces RS232, RS485 • Accurate alignment of variable vacuum capacitor and stepper-motor and a durable, backlash-free coupling result in Address range (RS485) 0 x 21 – 0 x 40 long, consistent lifetime Baud rate 9.600 – 115.200 Bd •A ssembled solution for easy installation for higher system uptime and productivity Typical application areas Semicon, flat panel display • Highly accurate repeatability of capacitance positions •L ower total cost of ownership 46 Vacuum Capacitors Vacuum Capacitors 47

Capacitor series with integrated drive Semiconductor & Flat Panel Display Panel Flat & Semiconductor

Two sizes of integrated drive systems are available for different capacitor series. Here our recommen-

Broadcast & others & Broadcast dations:

ID-400 ID-400 ID-1200 ID-1200 Uni-Con Uni-Select Hexa-Con Maxi-Con 48 Vacuum Capacitors Vacuum Capacitors 49

Customized solutions

If your required product solution is not within our standard portfolio, we have the expertise to design and manufacture the RF Power control systems and components that meet your specific needs.

Vacuum Capacitors Comet offers the broadest selection and ranges of capacitance, power voltage, and drive systems:

• Frequencies from DC to 200 MHz • Power up to 1 MW • Voltage up to 90 kV • Current up to 1200 A 50 Vacuum Capacitors Vacuum Capacitors 51

Series overview

Variable vacuum capacitors All capacitors of one series share a characteristic Each capacitor series has certain specifications Fixed capacitor series include capacitors with The graph below classifies all Comet variable charge ([pF x kV]). The envelope of capacitor series which are almost the same for all ­members. The different form factors. For ­example the Mini-Cap vacuum capacitors according to three key technical increases with their charge. Product Overview provides the specifications of series has six different designs, therefore six features: current [A], capacitance [pF] and voltage several series members. See pct.comet.tech for full different bodies (form factors). [kV]. product port­folio and optional features. Important is that all members of one fixed capaci- The characteristics of a variable capacitor are tor series are produced with the same production 1000

400 determined by the size of the capacitor. The size is process and have in general the same ceramic

200 defined by the envelope diameter and height. envelope diameter.

100

Maximum Current [A] Maximum Current 80

60 Technical Features Example on Hexa-Con Series

10 All three variable vacuum capacitors of this example 1 4 5 6 7 8 9 10 11 12 16 34 35 37 38 50 60 70 104 Cmax Range [pF] 80 pF to 500 pF have the same geometry and are therefore in the same Charge [μ Coulomb] ([pF x kV]) series. The general ­specifications of a variable vacuum Upt Range [kV] 10 kV to 25 kV capacitor series are listed in “Technical Features“. Irms Range [Arms] 57 Arms to 152 Arms

Inductance [nH] ≤ 5 – ≤ 6

Semiconductor & Flat Panel Display Diameter [mm] 85 mm Broadcast and others Height [mm] 132 mm – 155 mm

Fixed vacuum capacitors their product charge. Within one series, different Cooling System Convection, Water Overall Height Block The graph below shows all Comet fixed vacuum capacitor envelopes (height and diameter) have a RoHS conform Available Height capacitors according to three key technical fea- specific geometry-letter. The envelope of capaci- Hybrid-cooling Yes, see page 9 tures: current [A], capacitance [pF], and voltage tors increases with their charge. [kV]. Capacitance and voltage are represented by Envelope Diameter

1000

W 400 Product Overview

200

Capacitance Cmin Voltage Upt Current @ 13.56 MHz Cooling System Maximum Current [A] Maximum Current pF kV Arms

80 25 72 Convection 100 3 4 57 8 9 18 19 20 22 23 25 30 37 38 40 50 75 80 90 105 110 200 15 108 Convection

Charge [μ Coulomb] ([pF x kV]) 500 15 152 Convection

Mini-Cap NAMi-Cap SAMi-Cap MAMi-Cap LAMi-Cap 52 Vacuum Capacitors Vacuum Capacitors 53

Series overview

Variable vacuum capacitors

Basic-Con Dual-Con HAMI-Con * Hexa-Con Hiper-Con* LAMi-Con* Li-Con MAMi-Con Maxi-Con* Mini-Tune NAMi-Con

Cmax Range [pF] 170 – 1400 500 – 1200 1600 – 2600 80 – 2000 350 – 2500 1000 – 2000 30 – 125 250 – 1500 250 – 2000 15 – 440 25 – 1000

Upt Range [kV] 3 – 15 3 – 10 40 – 60 10 – 25 15 – 40 35 – 50 5 – 20 35 – 70 8 – 25 15 – 34 15 – 65

Irms Range [Arms] 55 – 64 63 – 65 753 – 870 57 – 152 300 136 – 891 16 – 36 136 – 832 123 – 182 14 – 175 58 – 80

Diameter [mm] 55 46 313 85 143 211 35 183 117 48, 64 116

Height [mm] 103 – 154 90 – 128 459 – 609 155 – 169 255 372 – 640 99 – 108 216 – 447 152 – 166 52 – 87 136 – 206

Cooling System Convection Convection Water Convec., Water, Hybrid Water Air, Convection, Water Convection Air, Convection, Water Convection, Water Convection Convection

RoHS conform Available Available No Available Available No Available No Available Yes No

Hybrid-cooling Yes, see page 9 Yes, see page 9

Fixed vacuum capacitors

Power-Con* SAMi-Con Supra-Con* Uni-Con* Uni-Select LAMi-Cap MAMi-Cap Mini-Cap NAMi-Cap SAMi-Cap

Cmax Range [pF] 100 – 2000 250 – 2300 350 - 2500 30 - 2000 100 - 1500 2000 400 – 5000 10 – 4000 125 – 1000 350 – 2500

Upt Range [kV] 5 – 15 15 – 40 20 - 55 3 - 20 3 - 15 45 – 55 10 – 70 3 – 35 40 – 60 15 – 25

Irms Range [Arms] 45 – 136 106 – 138 443 54 - 94 54 - 57 283 227 – 459 7 – 168 162 – 271 171 – 271

Diameter [mm] 88 146 183 55, 64 and 75 54 208 183 35, 49, 64, 76 116 117 – 143

Height [mm] 130 – 181 250 295 133 - 142 134 183 and 212 88 – 195.4 52 – 87 137 – 230 86 – 100

Cooling System Convection, Water Convection Water Convection Convection Convection Convection, Water Convection Convection Convection

RoHS conform Available No Available Available Available No Yes Yes Yes Available

Hybrid-cooling

* Also available with integrated drive. 54 Vacuum Capacitors Vacuum Capacitors 55

Service Bulletins

In order to facilitate communication with our Subjects of our Service Bulletins include: customers world wide, Comet is using serially • General Information numbered Service Bulletins, i.e. SB-01. • Handling, Installation and Maintenance • Capacitor Series Service Bulletins are available at Comet, your local • Cooling System representative or on our website • Drive System pct.comet.tech/service-bulletins • Technical Background Information

SB-No. Subject Category SB-01 Introduction of Service Bulletin General Information SB-04 Mechanical Dimensions of Vacuum Capacitors Technical Background Information SB-05 Variable Capacitor Water Cooling Cooling System SB-06 Vacuum Component Fundamentals Technical Background Information SB-07 Serial No. on Vacuum Capacitors and Packaging General Information SB-08 FAT and Certificate of Compliance General Information SB-10 Service Report Form General Information SB-11 X-Ray Radiation experienced with Vacuum Capacitors Technical Background Information SB-12 Variable Vacuum Capacitors - An Introduction to their Design, Rating and Installation Technical Background Information SB-13 Disposal of Vacuum Capacitors Handling, Installation, Maintenance SB-16 Integral Flange Capacitor Series SB-17 Measuring of self-resonance Frequency Technical Background Information SB-18 Self Lubricating System for Air Cooled Capacitors Drive System SB-19 Improved drive system for high current Variable Vacuum Capacitors Drive System SB-20 Barcode Marking of Vacuum Capacitors General Information SB-21 Maintenance / Repair of Water Chamber of Water Cooled Variable Vacuum Capacitors Cooling System SB-22 Various Vacuum Capacitor Noises Technical Background Information SB-24 Airbag Packaging for small Semiconductor Vacuum Capacitors General Information SB-25 Handling of Vacuum Capacitors Handling, Installation, Maintenance SB-26 Liquid Cooling System and Water Purity Requirements Cooling System SB-27 Installation of Vacuum Capacitors Handling, Installation, Maintenance SB-28 Recommendations for Storage, Testing and Maintenance of Vacuum Capacitors Handling, Installation, Maintenance SB-30 X-CapTM SlimLine (A Variable Gas Capacitor) Capacitor Series SB-31 Drying of Water Cooled Vacuum Capacitors Cooling System SB-32 Optical Sensor for Vacuum Capacitors Technical Background Information SB-33 Analysis of Failed Vacuum Capacitors General Information SB-34 N-Cap Series (Technical Recommendations and General Information) Capacitor Series SB-35 Vacuum Capacitor Refurbishment Handling, Installation, Maintenance SB-42 Environmental and Life Cycle Testing of the Comet CTMN Series Technical Background Information SB-44 Technical Background Information Technical Background Information SB-47 Improved drive system for Variable Vacuum Capacitors Drive System SB-52 Technical Recommendations and General Instructions for Vacuum Capacitors General Information SB-53 Mechanical Shock and Drop Test of a Variable Vacuum Capacitor Handling, Installation, Maintenance SB-55 Type Designation for Vacuum and Gas Capacitors General Information SB-56 Technical Information - Vacuum Capacitor lifetime General Information SB-60 Overview Integrated Drives Motorized Capacitors SB-63 Electrical Installation ID-400 Motorized Capacitors SB-64 Electrical Installation ID-1200 Motorized Capacitors SB-68 Software Protocol Interface RS-232 Motorized Capacitors SB-69 Universal ID Interface Protocol RS232-RS485 Motorized Capacitors SB-70 Interface Protocol Universal ID with Encoder and RS 485 Motorized Capacitors SB-72 Safety Aspects Integrated Drive Motorized Capacitors 56 Vacuum Capacitors

Providing solutions near you

Switzerland (Head Office) South Korea Comet AG Comet Technologies Korea Co., Ltd. Herrengasse 10 Suwon Venture Plaza Bldg, Room 402 CH-3175 Flamatt 48, Samsung-ro, 168 beon gil, T +41 31 744 95 00 Yeongtong-gu Suwon-si, Gyeonggi-do, ZIP 16676 United States T +82 (0)70 4337 1282 Comet Technologies USA, Inc. Plasma Control Technologies Malaysia 2360 Bering Drive Comet Technologies Malaysia Sdn Bhd San José, CA 95131 PMT 761 Persiaran Cassia Selatan 3 T +1 408 325 8770 Taman Perindustrian Batu Kawan 14110 Bandar Cassia China Penang Comet Mechanical Equipment Co. Ltd. 2777 East Jinxiu Road, Building 36, 8th floor Taiwan Pudong, Shanghai 201206 Comet Solutions Taiwan Ltd. T +86 21 6879 9000 1F., No. 120, Guangming Rd. Qionglin Township Germany Hsinchu County 307001 Yxlon International GmbH T +886 3 592 2398 Plasma Control Technologies Kellershaustrasse 22 DE-52078 Aachen T +49 241 936870 0

pct.comet.tech | [email protected] © 2021 by Comet AG, Switzerland | V01/2021 | Switzerland AG, Comet by © 2021