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SCIENTIFIC CIRCULATIONS LTD. Ill ica$ti>oifrn London, WJL A TEXT-BOOK OF INORGANIC CHEMISTRY VOLUME VI. PART III. In ELBVBN VOLUMES. Medium 8vo. Cloth. Prices are net. Postage extra. A TEXT-BOOK OF INORGANIC CHEMISTRY. EDITED BT J. NEWTON FEIBND, D.Sc., PH.D., F.I.C., Carnegie Gold Medallist. An Introduction to Modern Inorganic Chemistry. By J. NEWTON H. F. V. B.So. FRIEND, D.Sc. (B'ham), Ph.D. (Wurz) ; LITTLE, to Ltd. W. E. S. VOLUME I. (Lond.), A.R.C.S., Chief Chemist Thorium, ; H. V. A. TURNER, D.Sc. (Lond.). The Inert Grases, By BRISCOE, D.Sc. (Lond.), A.R.C.S. A. JAMIESON WALKER, f" The Alkali Metals and their Congeners. By VOLUME II. B.A. F.I.C. i-xxvi +379. 20s. { Ph.D. (Heid.), (Q.U.B.), Pp. I. The Alkaline Earth Metals. By MAY SYBIL BURR (n&e 346. 20s. LESLIE), D.Sc. (Leeds). Pp. i-xxvi + JOSHUA 0. VOLUME III. PART II. Beryllium and its Congeners. By GREGORY, SYBIL D.Sc. B.Sc. (Lond.), F.I.C., and MAY BURR, (Leeds). (PARTPp. i-xxvi + 320. 18s. the Bare Earth Metals. ( Aluminium and its Congeners, including B.Sc. A.R.C.S., Chief Chemist to VOLUME IV. \ By H. F. V. LITTLE, (Lond.), 485. | Thorium, Ltd. Second Petition. Pp. xxviii + 18s. Carbon and its Allies. By B, M. CAVEN, D.Sc. (Lond.), F.LO. V, / VOLUME Edition. i-xxi +468. 18s. I Second Pp. PART I. Nitrogen. By E. B. R. PRIDEAUX, M.A., D.So., F.I.C., and H. LAMBOURNE, M.A., M.Sc., F.I.C. Pp.i-xxviii+242. 18s. PART II. Phosphorus and its Congeners. By E. B. R. PRIDEAUX, VOLUME VI. M.A., D.Sc., F.I.O., B. D. SHAW, B.Sc., Ph.D., and W. E. THORNEYCROFT, B.Sc. In Preparation. PART III. Vanadium, Niobium, and Tantalum. By SYDNEY MARKS, M.Sc., A.I.C. Pp. i-xxvi +222. TART I. Oxygen. By J. NEWTON FRIEND, D.Sc., and DOUGLAS F. Twiss, D.Sc., F.LC. Pp. i-xxvi +370, 18a. PART II. Sulphur, Selenium, and Tellurium. By REECE H. VALLANOE, M.Sc., DOUGLAS F. Twiss, D.Sc., and Miss A. R. VOLUME VII. RUSSELL, B.Sc. In Preparation. PABT III. Chromium and its Congeners. ByREEOEH. VALLANOB, M.Sc., A.I.C., and ARTHUR A. ELDRIDGE, B.Sc., F.LC. Pp. i-xxvi +380. 18s. Halogens and their Allies. By GEOFFREY MARTIN, D.Sc., VOLUME VIII. /The 1 Ph.D., and ERNEST A. DANOASTER, B.Sc. (Lond.). I. Cobalt, Nickel, and the Elements of the Platinum Group. By J. NEWTON FRIEND, D.Sc. (B'ham). Second Edition. VOLUME IX. Pp. i-xxvi +367. 18s. PART II. Iron and its Compounds. By J. NEWTON FRIEND, {PARTD.Sc. Pp. i-xxvi + 265, 18s. Metal-Ammines, with a General Introduction to the Theory VOLUME X. of Complex Inorganic Substances. By Miss M. M. J. SUTHER- {TheLAND, D.Sc., F.I.C. Pp. i-xxvi +260. 18s. Organometallic Compounds. PART I. Derivatives of the Elements of Groups I to IV. By ARCHIBALD E. GODDARD, M.Sc,, A.I.C., and DOROTHY GODDARD, M.Sc. Pp. i-xxviii +418. 25s. VOLUME XI PART II. Derivatives of Arsenic. By ARCHIBALD E. GODDARD, M.Sc. s A.I.C. In Preparation. PART III. Derivatives of the Elements of Groups V to Vm (excluding Arsenic). By ARCHIBALD E. GODDARD, M.Sc., A.I.O. In Preparation. LONDON: CHARLES GRIFFIN <fe CO., LTD., 42 DRURY LANE, W.0.2, Text-book of Inorganic Chemistry, 7ol. FJ., Part HL] [Frontispiece. 0) SoS in to (M I i s coO SP^ I all i i o d ** a as o 7 TJ * 00 7 o^*v S os for CO fi O 861 CO ! I g -a Orrj A TEXT-BOOK OF INORGANIC CHEMISTRY. EDITED BY J. NEWTON FRIEND, D.So., PH.D., F.I.C., CARNEGIE GOLD MEDALLIST. VOLUME VI. PAET III YANADIUM, NIOBIUM, AND TANTALUM. BY SYDNEY MARKS, M.So., A.I.C. OF r : CMMEGIE ItiSiii'Jit ui lia LIBRARY LONDON: CHARLES GRIFFIN & COMPANY, LIMITED, 42 DBUEY LANE, W.0.2. 1929. [All rights reserved.'] Printed in Great Britain by NEILL & Co, LTD., EDINBURGH. GENERAL INTRODUCTION TO THE SERIES. DURING the past few years the civilised world has begun to realise the advantages accruing to scientific research, with the result that an ever- increasing amount of time and thought is being devoted to various branches of science. No study has progressed more rapidly than chemistry. This science be may divided roughly into several branches : namely. Organic, Physical, Inorganic, and Analytical Chemistry. It is impossible to write any single text-book which shall contain within its two covers a thorough treatment of any one of these branches, owing to the vast amount of information that has been accumulated. The need is rather for a series of text-books dealing more or less comprehensively with each branch of chemistry. This has already been attempted by enterprising firms, so far as physical and analytical chemistry are concerned; and the present series is designed to meet the needs of chemists. inorganic One great advantage , of this procedure lies in the fact that our knowledge of the different sections of science does not progress at the same rate. Consequently, as soon as any particular part advances out of proportion to others, the volume dealing with that section may be easily revised or rewritten as occasion requires. Some method of classifying the elements for treatment in this way is clearly essential, and we have adopted the Periodic Classification with slight alterations, devoting a whole volume to the consideration of the elements in each vertical column, as will be evident from a glance at the scheme in the Frontispiece. In the first volume, in addition to a detailed account of the elements of Group 0, the general principles of Inorganic Chemistry are discussed. Particular pains have been taken in the selection of material for this volume, and an attempt has been made to present to the reader a clear account of the principles upon which our knowledge of modern Inorganic Chemistry is based. At the outset it may be well to explain that it was not intended to write a complete text-book of Physical Chemistry. Numerous excellent works have already been devoted to this subject, and a volume on such lines would scarcely serve as a suitable introduction to this series. Whilst Physical Chemistry deals with the general principles applied to all branches of theoretical chemistry, our aim has been to emphasise their application to Inorganic Chemistry, with which branch of the subject this series of text-books is exclusively concerned. To this end practically all the illustrations to the laws and principles discussed in Volume I. deal with inorganic substances. Again, there are many subjects, such as the methods employed in the accurate determination of atomic weights, which are not generally regarded as forming part of Physical Chemistry. Yet these are vii viii VANADIUM, NIOBIUM, AND TANTALUM. of subjects of supreme importance to the student Inorganic Chemistry and are accordingly included in the Introduction. Hydrogen and the ammonium salts are dealt with in Volume II., of the rare earth along with the elements of Group I. The position metals in the Periodic Classification has for many years been a source included in Volume with of difficulty. They have all been IV., along to be the most suitable the Elements of Group III., as this was found place for them. have an claim to be considered Many alloys and compounds equal in two or more volumes of this series, but this would entail unnecessary of and tin be dealt duplication. For example, alloys copper might certain with in Volumes II. and V. respectively. Similarly, double salts such, for example, as ferrous ammonium sulphate might very II. under and in Volume IX. logically be included in Volume ammonium, been overcome under iron. As a general rule this difficulty has by two or more metals or treating complex substances, containing bases, to the in that volume dealing with the metal or base which belongs For the of highest group of the Periodic Table. example, alloys copper and tin are detailed in Volume V. along with tin, since copper occurs ferrous ammonium earlier, namely, in Volume II. Similarly, sulphate in is discussed in Volume IX. under iron, and not under ammonium in IX. Volume II. The ferro-cyanides are likewise dealt with Volume But even with this arrangement it has not always been found easy For in the to adopt a perfectly logical line of treatment. example, chromates and permanganates the chromium and manganese function are to and chlorine as part of the acid radicles and analogous sulphur so that should be treated in the in sulphates and perchlorates ; they in the case volume dealing with the metal acting as base, namely, in Volume II. But the of potassium permanganate, under potassium with one another alkali permanganates possess such close analogies seems desirable. that separate treatment of these salts hardly They are therefore considered in Volume VIII. it is Numerous other little irregularities of a like nature occur, but indexes and cross- hoped that, by means of carefully compiled frequent to the texts of the volumes, the student will referencing separate ^ the information he experience no difficulty in finding requires. Particular care has been taken with the sections dealing with the are not atomic weights of the elements in question. The figures given been necessarily those to be found in the original memoirs, but have the recalculated, except where otherwise stated, using following fundamental values : Hydrogen = 1-00762, Oxygen = 16-000.
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    (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (10) International Publication Number (43) International Publication Date WO 2016/074683 Al 19 May 2016 (19.05.2016) W P O P C T (51) International Patent Classification: (81) Designated States (unless otherwise indicated, for every C12N 15/10 (2006.01) kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, (21) International Application Number: BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, PCT/DK20 15/050343 DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, (22) International Filing Date: HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, 11 November 2015 ( 11. 1 1.2015) KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, (25) Filing Language: English PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, (26) Publication Language: English SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (30) Priority Data: PA 2014 00655 11 November 2014 ( 11. 1 1.2014) DK (84) Designated States (unless otherwise indicated, for every 62/077,933 11 November 2014 ( 11. 11.2014) US kind of regional protection available): ARIPO (BW, GH, 62/202,3 18 7 August 2015 (07.08.2015) US GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, (71) Applicant: LUNDORF PEDERSEN MATERIALS APS TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, [DK/DK]; Nordvej 16 B, Himmelev, DK-4000 Roskilde DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, (DK).
  • (12) United States Patent (10) Patent No.: US 9,048,183 B2 Ganguli Et Al

    (12) United States Patent (10) Patent No.: US 9,048,183 B2 Ganguli Et Al

    USOO9048183B2 (12) United States Patent (10) Patent No.: US 9,048,183 B2 Ganguli et al. (45) Date of Patent: Jun. 2, 2015 (54) NMOSMETAL GATE MATERIALS, (52) U.S. Cl. MANUFACTURING METHODS, AND CPC .......... HOIL 21/28008 (2013.01); C23C I6/06 EQUIPMENT USING CVD AND ALD (2013.01); C23C 16/32 (2013.01); PROCESSES WITH METAL BASED (Continued) PRECURSORS (58) Field of Classification Search (71) Applicant: Applied Materials, Inc., Santa Clara, None CA (US) See application file for complete search history. (56) References Cited (72) Inventors: Seshadri Ganguli, Sunnyvale, CA (US); Srinivas Gandikota, Santa Clara, CA U.S. PATENT DOCUMENTS (US); Yu Lei, Belmont, CA (US); Xinliang Lu, Fremont, CA (US); Sang 5,055,280 A 10/1991 Nakatani et al. Ho Yu, Cupertino, CA (US); Hoon Kim, 6,139,922 A 10/2000 Kaloyeros et al. Santa Clara, CA (US); Paul F. Ma, Santa (Continued) Clara, CA (US); Mei Chang, Saratoga, CA (US); Maitreyee Mahajani, FOREIGN PATENT DOCUMENTS Saratoga, CA (US); Patricia M. Liu, Saratoga, CA (US) KR 2003OOO9093. A 1, 2003 s OTHER PUBLICATIONS (73) Assignee: APPLIED MATERIALS, INC., Santa International Search Report PCT/US2011/033820 dated Jan. 5, Clara, CA (US) 2012. (*) Notice: Subject to any disclaimer, the term of this (Continued) patent is extended or adjusted under 35 Primary Examiner — Yasser A Abdelaziez U.S.C. 154(b) by 0 days. (74) Attorney, Agent, or Firm — Patterson & Sheridan, LLP (21) Appl. No.: 14/147,291 (57) ABSTRACT Embodiments provide methods for depositing metal-contain (22) Filed: Jan. 3, 2014 ing materials. The methods include deposition processes that form metal, metal carbide, metal silicide, metal nitride, and (65) Prior Publication Data metal carbide derivatives by a vapor deposition process, including thermal decomposition, CVD, pulsed-CVD, or US 2014/O12O712 A1 May 1, 2014 ALD.