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Development of an Electrochemical Micromachining (Μecm) Machine

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Development of an Electrochemical Micromachining (Μecm) Machine Development of an Electrochemical Micromachining (µECM) machine A Thesis Submitted for the Degree of doctor of Philosophy By Alexandre SPIESER College of Engineering, Design and Physical Sciences Brunel University London, United Kingdom March 2015 i ABSTRACT Electrochemical machining (ECM) and especially electrochemical micromachining (µECM) became an attractive area of research due to the fact that this process does not create any defective layer after machining and that there is a growing demand for better surface integrity on different micro applications such as microfluidics systems and stress- free drilled holes in the automotive and aerospace sectors. Electrochemical machining is considered as a non-conventional machining process based on the phenomenon of electrolysis. This process requires maintaining a small gap - the interelectrode gap (IEG) - between the anode (workpiece) and the cathode (tool-electrode) in order to achieve acceptable machining results (i.e. accuracy, high aspect ratio with appropriate material removal rate and efficiency). This work presents the design of a next generation µECM machine for the automotive, aerospace, medical and metrology sectors. It has 3 axes of motion (X, Y and Z) and a spindle allowing the tool-electrode to rotate during machining. The linear slides for each axis use air bearings with linear DC brushless motors and 2nm- resolution encoders for ultra-precise motion. The control system is based on the Power PMAC motion controller from Delta Tau. The electrolyte tank is located at the rear of the machine and allows the electrolyte to be changed quickly. A pulse power supply unit (PSU) and a special control algorithm have been implemented. The pulse power supply provides not only ultra-short pulses (50ns), but also plus and minus biases as well as a polarity switching functionality. It fulfils the requirements of tool preparation with reversed ECM on the machine. Moreover, the PSU is equipped with an ultrafast over current protection which prevents the tool-electrode from being damaged in case of short-circuits. Two different process control algorithms were made: one is fuzzy logic based and the other is adapting the feed rate according to the position and time at which short-circuits were detected. The developed machine is capable of drilling micro holes in hard-to-machine materials but also machine micro-styli and micro-needles for the metrology (micro CMM) and medical sectors. This work also presents drilling trials performed with the machine with an orbiting ii tool. Machining experiments were also carried out using electrolytes made of a combination of HCl and NaNO aqueous solutions. The developed machine was used to fabricate micro tools out of 170µm WC-Co alloy shafts via micro electrochemical turning and drill deep holes via µECM in disks made of 18NiCr6 alloy. Results suggest that this process can be used for industrial applications for hard-to-machine materials. The author also suggests that the developed machine can be used to manufacture micro-probes and micro-tools for metrology and micro-manufacturing purposes. Keywords — Micro ECM, PECM, micromanufacturing, micro ECM machines, electrochemical micromachining (EMM) iii ACKNOWLEDGEMENTS I would like to express my deepest gratitude to the people who have helped and guided in working to realize this research project. Firstly, I would like to thank my supervisor, Dr. Atanas IVANOV, for his guidance, assistance, time, effort and never ending patience to make this project a success. Not forgetting Andreas Rohrmeier, Rebecca Leese, Martin Santl and Paul Yates for their support and help through one-on-one or group meetings. I also would like to thank the Delta Tau support team who took the time to answer my questions. I would like also thank Brunel University and the European Commission for financing my PhD studies. I am thankful to the EU FP7 Micro-ECM and EU FP7 MIDEMMA projects’ partners for the constructive discussions. I would also like to express my gratitude to my family for supporting me and providing me endless encouragement and my girlfriend for her support and motivation. Lastly, I would like to thank my friends and colleagues for all their help and support. This project is dedicated to those mentioned above. iv TABLE OF CONTENT ABSTRACT .............................................................................................................................. II ACKNOWLEDGEMENTS ...................................................................................................... IV TABLE OF CONTENT .............................................................................................................. V LIST OF FIGURES ................................................................................................................. XII LIST OF TABLES ................................................................................................................... XX LIST OF ABBREVIATIONS................................................................................................. XXI LIST OF SYMBOLS ........................................................................................................... XXIV CHAPTER 1: INTRODUCTION ............................................................................................. 1 1.1. From ECM to µECM ............................................................................................................. 1 1.2. Justification, Aims and Objectives ......................................................................................... 2 1.2.1. Justification ................................................................................................................. 2 1.2.2. Aims ........................................................................................................................... 4 1.2.3. Objectives ................................................................................................................... 4 1.3. Methodology ......................................................................................................................... 5 1.3.1. Identification of gaps in research and key requirements for µECM............................... 5 1.3.2. Development of a simulation programme to investigate the µECM process behaviour . 7 1.3.3. Development of a novel pulse PSU architecture for the needs of µECM....................... 7 1.3.4. Component selection and machine system integration .................................................. 8 1.3.5. Development of an innovative control strategy for the µECM process ......................... 9 1.3.6. Development of an intelligent HMI ........................................................................... 10 1.3.7. Experimental validation ............................................................................................. 10 1.4. Description of chapters ........................................................................................................ 10 1.5. Key contributions ................................................................................................................ 12 CHAPTER 2: LITERATURE REVIEW ............................................................................... 15 2.1. Introduction ......................................................................................................................... 15 2.2. ECM Fundamentals ............................................................................................................. 17 v 2.2.1. Basic ECM setup ....................................................................................................... 17 2.2.2. The chemical reaction ................................................................................................ 18 2.2.3. The material removal rate (MRR) .............................................................................. 19 2.2.3.1. MRR for pure materials (non-alloy) .................................................................. 19 2.2.3.2. MRR for alloys in ECM .................................................................................... 21 2.3. Machining process............................................................................................................... 21 2.3.1. Review and analysis of the ECM and µECM machines available on the market ......... 21 2.3.2. Design requirements and constraints for µECM systems ............................................ 23 2.3.2.1. Ultra-precision motion for tool-positioning........................................................ 23 2.3.2.1. High dynamics and frictionless motion .............................................................. 24 2.3.2.2. Workpiece clamping and tool holder constraints ................................................ 24 2.3.3. Process monitoring and control .................................................................................. 25 2.3.3.1. Interelectrode gap control and optimization algorithms ...................................... 26 2.3.3.2. The electrical double layer (EDL) effect in µECM ............................................ 31 2.3.3.3. Control of the voltage at the electrodes .............................................................. 35 2.3.4. Machining strategies .................................................................................................. 36 2.4. Pulse power supply unit (PSU) considerations ..................................................................... 38 2.5. Electrode and
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