Hazardous Substance Fact Sheet

Right to Know

Synonyms: Silicochloroform; Trichloromonosilane CAS Number: 10025-78-2 Chemical Name: Silane, Trichloro- RTK Substance Number: 1903 Date: March 2009 Revision: October 2010 DOT Number: UN 1295

Description and Use EMERGENCY RESPONDERS >>>> SEE LAST PAGE Trichlorosilane is a colorless liquid with a sharp, choking Hazard Summary odor. It is used to make transistors, and in making Silicone Hazard Rating NJDOH NFPA and Silicon for semiconductors and solar panels. HEALTH - 3 FLAMMABILITY - 4 REACTIVITY - 2W CORROSIVE FLAMMABLE AND REACTIVE POISONOUS GASES ARE PRODUCED IN FIRE Reasons for Citation CONTAINERS MAY EXPLODE IN FIRE DO NOT USE WATER f Trichlorosilane is on the Right to Know Hazardous

Substance List because it is cited by DOT, DEP, NFPA and Hazard Rating Key: 0=minimal; 1=slight; 2=moderate; 3=serious; EPA. 4=severe f This chemical is on the Special Health Hazard Substance

List. f Trichlorosilane can affect you when inhaled. f Trichlorosilane is CORROSIVE and contact can severely irritate and burn the skin and eyes with possible eye damage. f Prolonged or repeated contact can cause skin rash, pain, redness and blisters. f Inhaling Trichlorosilane can irritate the nose and throat causing coughing and wheezing. SEE GLOSSARY ON PAGE 5. f Trichlorosilane can irritate the lungs. Higher exposures may cause a build-up of fluid in the lungs (pulmonary FIRST AID edema), a medical emergency. Eye Contact f Trichlorosilane can cause headache, nausea, vomiting, f Immediately flush with large amounts of water for at least 30 diarrhea and abdominal pain. minutes, lifting upper and lower lids. Remove contact f Trichlorosilane is FLAMMABLE and REACTIVE and a lenses, if worn, while flushing. Seek medical attention DANGEROUS FIRE and EXPLOSION HAZARD. immediately.

Skin Contact Workplace Exposure Limits f Quickly remove contaminated clothing. Immediately wash contaminated skin with large amounts of soap and water. The following exposure limits are for Hydrogen Chloride gas, Seek medical attention. which is produced when Trichlorosilane reacts with WATER or MOISTURE in the air: Inhalation f Remove the person from exposure. OSHA: The legal airborne permissible exposure limit (PEL) is f Begin rescue breathing (using universal precautions) if 5 ppm, not to be exceeded at any time. breathing has stopped and CPR if heart action has stopped. f Transfer promptly to a medical facility. NIOSH: The recommended airborne exposure limit (REL) is f Medical observation is recommended for 24 to 48 hours after 5 ppm, which should not be exceeded at any time. overexposure, as pulmonary edema may be delayed. ACGIH: The threshold limit value (TLV) is 2 ppm, which EMERGENCY NUMBERS should not be exceeded at any time. Poison Control: 1-800-222-1222

CHEMTREC: 1-800-424-9300

NJDEP Hotline: 1-877-927-6337

National Response Center: 1-800-424-8802

TRICHLOROSILANE Page 2 of 6

Determining Your Exposure Reproductive Hazard f According to the information presently available to the New f Read the product manufacturer’s Material Safety Data Jersey Department of Health, Trichlorosilane has not been Sheet (MSDS) and the label to determine product tested for its ability to affect reproduction. ingredients and important safety and health information about the product mixture. Other Effects f Prolonged or repeated contact can cause skin rash, pain, f For each individual hazardous ingredient, read the New redness and blisters. Jersey Department of Health Hazardous Substance Fact f Trichlorosilane can irritate the lungs. Repeated exposure Sheet, available on the RTK website may cause bronchitis to develop with coughing, phlegm, (www.nj.gov/health/eoh/rtkweb) or in your facility’s RTK and/or shortness of breath. Central File or Hazard Communication Standard file. f You have a right to this information under the New Jersey Worker and Community Right to Know Act, the Public Medical Employees Occupational Safety and Health (PEOSH) Act Medical Testing if you are a public worker in New Jersey, and under the If symptoms develop or overexposure is suspected, the federal Occupational Safety and Health Act (OSHA) if you following is recommended: are a private worker. f Consider chest x-ray after acute overexposure f The New Jersey Right to Know Act requires most employers to label chemicals in the workplace and Any evaluation should include a careful history of past and requires public employers to provide their employees with present symptoms with an exam. Medical tests that look for information concerning chemical hazards and controls. damage already done are not a substitute for controlling The federal OSHA Hazard Communication Standard (29 exposure.

CFR 1910.1200) and the PEOSH Hazard Communication Request copies of your medical testing. You have a legal right Standard (N.J.A.C. 12:100-7) require employers to provide to this information under the OSHA Access to Employee similar information and training to their employees. Exposure and Medical Records Standard (29 CFR 1910.1020).

This Fact Sheet is a summary of available information Mixed Exposures regarding the health hazards that may result from exposure. f Smoking can cause heart disease, lung cancer, Duration of exposure, concentration of the substance and other emphysema, and other respiratory problems. It may worsen factors will affect your susceptibility to any of the potential respiratory conditions caused by chemical exposure. Even if effects described below. you have smoked for a long time, stopping now will reduce your risk of developing health problems.

Health Hazard Information Acute Health Effects The following acute (short-term) health effects may occur immediately or shortly after exposure to Trichlorosilane:

f Contact can severely irritate and burn the skin and eyes with

possible eye damage. f Inhaling Trichlorosilane can irritate the nose and throat causing coughing and wheezing. f Trichlorosilane can irritate the lungs causing coughing and/or shortness of breath. Higher exposures may cause a

build-up of fluid in the lungs (pulmonary edema), a medical emergency, with severe shortness of breath. f Trichlorosilane can cause headache, nausea, vomiting, diarrhea and abdominal pain.

Chronic Health Effects

The following chronic (long-term) health effects can occur at some time after exposure to Trichlorosilane and can last for months or years:

Cancer Hazard f According to the information presently available to the New Jersey Department of Health, Trichlorosilane has not been tested for its ability to cause cancer in animals.

TRICHLOROSILANE Page 3 of 6

Workplace Controls and Practices f All protective clothing (suits, gloves, footwear, headgear) should be clean, available each day, and put on before work. Very toxic chemicals, or those that are reproductive hazards or sensitizers, require expert advice on control measures if a less toxic chemical cannot be substituted. Control measures Eye Protection include: (1) enclosing chemical processes for severely f Wear non-vented, impact resistant goggles when working irritating and corrosive chemicals, (2) using local exhaust with fumes, gases, or vapors. ventilation for chemicals that may be harmful with a single f Wear indirect-vent, impact and splash resistant goggles exposure, and (3) using general ventilation to control when working with liquids. exposures to skin and eye irritants. For further information on f Wear a face shield along with goggles when working with workplace controls, consult the NIOSH document on Control corrosive, highly irritating or toxic substances. Banding at www.cdc.gov/niosh/topics/ctrlbanding/. f Do not wear contact lenses when working with this substance. The following work practices are also recommended: Respiratory Protection f Label process containers. Improper use of respirators is dangerous. Respirators f Provide employees with hazard information and training. should only be used if the employer has implemented a written f Monitor airborne chemical concentrations. program that takes into account workplace conditions, f Use engineering controls if concentrations exceed requirements for worker training, respirator fit testing, and recommended exposure levels. medical exams, as described in the OSHA Respiratory f Provide eye wash fountains and emergency showers. f Wash or shower if skin comes in contact with a hazardous Protection Standard (29 CFR 1910.134). material. f Always wash at the end of the workshift. f At any detectable concentration, use a NIOSH approved f Change into clean clothing if clothing becomes supplied-air respirator with a full facepiece operated in a contaminated. pressure-demand or other positive-pressure mode. For f Do not take contaminated clothing home. increased protection use in combination with an auxiliary f Get special training to wash contaminated clothing. self-contained breathing apparatus operated in a pressure- f Do not eat, smoke, or drink in areas where chemicals are demand or other positive-pressure mode. being handled, processed or stored. f Exposure to 50 ppm (as Hydrogen Chloride) is immediately f Wash hands carefully before eating, smoking, drinking, dangerous to life and health. If the possibility of exposure applying cosmetics or using the toilet. above 50 ppm exists, use a NIOSH approved self-contained breathing apparatus with a full facepiece operated in a In addition, the following may be useful or required: pressure-demand or other positive-pressure mode equipped with an emergency escape air cylinder. f Before entering a confined space where Trichlorosilane may be present, check to make sure that an explosive concentration does not exist. Fire Hazards f Where possible, transfer Trichlorosilane from cylinders or If employees are expected to fight fires, they must be trained other containers to process containers in an enclosed and equipped as stated in the OSHA Fire Brigades Standard system. (29 CFR 1910.156).

f Trichlorosilane is a FLAMMABLE and REACTIVE LIQUID. Personal Protective Equipment f Use only Alcohol-Resistant Aqueous Film Forming Foam (AR-AFFF) at medium expansion. The OSHA Personal Protective Equipment Standard (29 CFR f Apply foam carefully by floating it onto the spill to form a 1910.132) requires employers to determine the appropriate continuous layer. personal protective equipment for each hazard and to train f USE WATER ONLY TO KNOCK DOWN VAPORS. employees on how and when to use protective equipment. f POISONOUS GASES ARE PRODUCED IN FIRE, including Hydrogen Chloride, Phosgene and Chlorosilanes. f CONTAINERS MAY EXPLODE IN FIRE. The following recommendations are only guidelines and may f Use water spray to keep fire-exposed containers cool but not apply to every situation. DO NOT get water inside containers. f Vapor is heavier than air and may travel a distance to cause Gloves and Clothing a fire or explosion far from the source or flash back. f Avoid skin contact with Trichlorosilane. Wear personal f Flow or agitation may generate electrostatic charge. protective equipment made from material which can not be permeated or degraded by this substance. Safety equipment suppliers and manufacturers can provide recommendations on the most protective glove and clothing material for your operation. f The recommended glove materials for Trichlorosilane are Viton and Barrier®. f The recommended protective clothing materials for Trichlorosilane are Tychem® BR and TK, or the equivalent.

TRICHLOROSILANE Page 4 of 6

Spills and Emergencies f Use only non-sparking tools and equipment, especially when If employees are required to clean-up spills, they must be opening and closing containers of Trichlorosilane. f Trichlorosilane may accumulate static electricity. properly trained and equipped. The OSHA Hazardous Waste

Operations and Emergency Response Standard (29 CFR 1910.120) may apply. Occupational Health Information

If Trichlorosilane is spilled or leaked, take the following steps: Resources The New Jersey Department of Health offers multiple services f Evacuate personnel and secure and control entrance to the in occupational health. These services include providing area. informational resources, educational materials, public f Eliminate all ignition sources. f For small spills, absorb liquids in vermiculite, dry sand, earth, presentations, and industrial hygiene and medical or a similar material but DO NOT stack or heap investigations and evaluations. contaminated sorbents (such as vermiculite or spill pillows) as the heat generated may cause auto ignition of Trichlorosilane. For more information, please contact: f USE WATER ONLY to knock down vapors. f Apply AR-AFF Foam on small spills to suppress vapors and blanket release. Carefully float foam onto spill and reapply New Jersey Department of Health as necessary Right to Know f For large spills vapor ignition is possible. PO Box 368 f Ventilate area of spill or leak. Trenton, NJ 08625-0368 f Neutralize spills using Sodium Hydroxide with a 1 to 1 ratio Phone: 609-984-2202 of Sodium Hydroxide to Chlorosilane or use a 2 to 1 ratio of Fax: 609-984-7407 Sodium Bicarbonate to Chlorosilane. E-mail: [email protected] f Keep Trichlorosilane out of confined spaces, such as sewers, because of the possibility of an explosion. Web address: http://www.nj.gov/health/eoh/rtkweb f DO NOT wash into sewer. f It may be necessary to contain and dispose of The Right to Know Hazardous Substance Fact Sheets

Trichlorosilane as a HAZARDOUS WASTE. Contact your are not intended to be copied and sold

state Department of Environmental Protection (DEP) or your for commercial purposes. regional office of the federal Environmental Protection Agency (EPA) for specific recommendations.

Handling and Storage Prior to working with Trichlorosilane you should be trained on its proper handling and storage.

f Trichlorosilane reacts violently with WATER; SOLUTIONS CONTAINING WATER; STEAM; and MOISTURE IN AIR to release heat and flammable and corrosive gases such as

Hydrogen and Hydrogen Chloride. f Trichlorosilane reacts violently with ALCOHOLS;

ACETONE; ORGANIC ACIDS (such as ACETIC ACID);

OXIDIZING AGENTS (such as PERCHLORATES,

PEROXIDES, PERMANGANATES, CHLORATES,

NITRATES, CHLORINE, BROMINE and FLUORINE);

STRONG ACIDS (such as HYDROCHLORIC, SULFURIC

and NITRIC); STRONG BASES (such as SODIUM

HYDROXIDE and POTASSIUM HYDROXIDE); and

AMINES. f Trichlorosilane is incompatible with COMBUSTIBLES and

METALS. f Store in tightly closed containers in a cool, well-ventilated

area away from HEAT and MOISTURE. f Sources of ignition, such as smoking and open flames, are

prohibited where Trichlorosilane is used, handled, or

stored. f Metal containers involving the transfer of Trichlorosilane

should be grounded and bonded. f Use explosion-proof electrical equipment and fittings

wherever Trichlorosilane is used, handled, manufactured,

or stored.

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GLOSSARY

3 ACGIH is the American Conference of Governmental Industrial mg/m means milligrams of a chemical in a cubic meter of air. Hygienists. They publish guidelines called Threshold Limit It is a measure of concentration (weight/volume). Values (TLVs) for exposure to workplace chemicals. A mutagen is a substance that causes mutations. A mutation Acute Exposure Guideline Levels (AEGLs) are established is a change in the genetic material in a body cell. Mutations by the EPA. They describe the risk to humans resulting from can lead to birth defects, miscarriages, or cancer. once-in-a lifetime, or rare, exposure to airborne chemicals. NFPA is the National Fire Protection Association. It classifies Boiling point is the temperature at which a substance can substances according to their fire and explosion hazard. change its physical state from a liquid to a gas. NIOSH is the National Institute for Occupational Safety and A carcinogen is a substance that causes cancer. Health. It tests equipment, evaluates and approves respirators, conducts studies of workplace hazards, and The CAS number is unique, identifying number, assigned by proposes standards to OSHA. the Chemical Abstracts Service, to a specific chemical. NTP is the National Toxicology Program which tests chemicals CFR is the Code of Federal Regulations, which are the and reviews evidence for cancer. regulations of the United States government. OSHA is the federal Occupational Safety and Health A combustible substance is a solid, liquid or gas that will burn. Administration, which adopts and enforces health and safety standards. A corrosive substance is a gas, liquid or solid that causes destruction of human skin or severe corrosion of containers. Protective Action Criteria (PAC) are values established by the Department of Energy and are based on AEGLs and DEP is the New Jersey Department of Environmental ERPGs. They are used for emergency palnning of chemical Protection. release events.

DOT is the Department of Transportation, the federal agency PEOSHA is the New Jersey Public Employees Occupational that regulates the transportation of chemicals. Safety and Health Act, which adopts and enforces health and safety standards in public workplaces. EPA is the Environmental Protection Agency, the federal agency responsible for regulating environmental hazards. Permeated is the movement of chemicals through protective materials. ERG is the Emergency Response Guidebook. It is a guide for emergency responders for transportation emergencies ppm means parts of a substance per million parts of air. It is a involving hazardous substances. measure of concentration by volume in air.

Emergency Response Planning Guideline (ERPG) values A reactive substance is a solid, liquid or gas that releases provide estimates of concentration ranges where one energy under certain conditions. reasonably might anticipate observing adverse effects. STEL is a Short Term Exposure Limit which is usually a 15- A fetus is an unborn human or animal. minute exposure that should not be exceeded at any time during a work day. A flammable substance is a solid, liquid, vapor or gas that will ignite easily and burn rapidly. A teratogen is a substance that causes birth defects by damaging the fetus. The flash point is the temperature at which a liquid or solid gives off vapor that can form a flammable mixture with air. UEL or Upper Explosive Limit is the highest concentration in air above which there is too much fuel (gas or vapor) to begin a IARC is the International Agency for Research on Cancer, a reaction or explosion. scientific group. Vapor Density is the ratio of the weight of a given volume of Ionization Potential is the amount of energy needed to one gas to the weight of another (usually Hydrogen), at the remove an electron from an atom or molecule. It is measured same temperature and pressure. in electron volts. The vapor pressure is a force exerted by the vapor in IRIS is the Integrated Risk Information System database on equilibrium with the solid or liquid phase of the same human health effects that may result from exposure to various substance. The higher the vapor pressure the higher chemicals, maintained by federal EPA. concentration of the substance in air.

LEL or Lower Explosive Limit, is the lowest concentration of a combustible substance (gas or vapor) in the air capable of continuing an explosion.

Right to Know Hazardous Substance Fact Sheet

Common Name: TRICHLOROSILANE Synonyms: Silicochloroform; Trichloromonosilane CAS No: 10025-78-2 Molecular Formula: SiHCl3 RTK Substance No: 1903 Description: Colorless liquid with a sharp, choking odor HAZARD DATA Hazard Rating Firefighting Reactivity FLAMMABLE and REACTIVE LIQUID Trichlorosilane reacts violently with WATER; SOLUTIONS 3 - Health Use only Alcohol-Resistant Aqueous Film Forming Foam CONTAINING WATER; STEAM; and MOISTURE IN AIR to 4 - Fire (AR-AFFF) at medium expansion. release heat and flammable and corrosive gases such as Apply foam carefully by floating it onto the spill to form a Hydrogen and Hydrogen Chloride. 2W - Reactivity continuous layer. Trichlorosilane reacts violently with ALCOHOLS; ACETONE; ORGANIC ACIDS (such as ACETIC ACID); OXIDIZING DOT#: UN 1295 USE WATER ONLY TO KNOCK DOWN VAPORS. POISONOUS GASES ARE PRODUCED IN FIRE, AGENTS (such as PERCHLORATES, PEROXIDES, ERG Guide #: 139 including Hydrogen Chloride, Phosgene and PERMANGANATES, CHLORATES, NITRATES, CHLORINE, Chlorosilanes. BROMINE and FLUORINE); STRONG ACIDS (such as Hazard Class: 4.3 CONTAINERS MAY EXPLODE IN FIRE. HYDROCHLORIC, SULFURIC and NITRIC); STRONG BASES (such as SODIUM HYDROXIDE and POTASSIUM (Water Reactive/ Use water spray to keep fire-exposed containers cool but HYDROXIDE); and AMINES. Dangerous When Wet) DO NOT get water inside containers. Vapor is heavier than air and may travel a distance to Trichlorosilane is incompatible with COMBUSTIBLES and cause a fire or explosion far from the source or flash METALS. back. Flow or agitation may generate electrostatic charge. SPILL/LEAKS PHYSICAL PROPERTIES

Isolation Distance: Odor Threshold: Sharp, choking odor Small Spill: 30 meters (100 feet) Flash Point: -18o to 7oF (-28o to -14oC) Large Spill: 60 meters (200 feet) LEL: 1.2% Fire: 800 meters (1/2 mile) UEL: 90.5% For small spills, absorb liquids in vermiculite, dry sand or earth. o o DO NOT stack or heap contaminated sorbents as the heat Auto Ignition Temp: 220 F (104 C) generated may cause auto ignition. Vapor Density: 4.7 (air = 1) Apply AR-AFF Foam on small spills to suppress vapors and blanket o o Vapor Pressure: 20.4 mm Hg at 70 F (21 C) release. Carefully float foam onto spill and reapply as necessary. For large spills vapor ignition is possible. Specific Gravity: 1.34 (water = 1) Use only non-sparking tools and equipment, and ground and bond Water Solubility: Reacts (Violent decomposition) all containers when transferring liquid. Boiling Point: 90oF (32oC) Neutralize spills using Sodium Hydroxide with a 1 to 1 ratio of Sodium Hydroxide to Chlorosilane or use a 2 to 1 ratio of Sodium Freezing Point: -196oF (-127oC) Bicarbonate to Chlorosilane. Critical Temp: 403oF (206oC) Keep Trichlorosilane out of confined spaces, such as sewers, because of the possibility of an explosion. Molecular Weight: 135.5 EXPOSURE LIMITS PROTECTIVE EQUIPMENT OSHA/NIOSH: 5 ppm, Ceiling (as Hydrogen Chloride) Gloves: Viton and Barrier® (>8-hr breakthrough for Organo-Silicon compounds) ACGIH: 2 ppm, Ceiling (as Hydrogen Chloride) IDLH: 50 ppm (as Hydrogen Chloride) Coveralls: Tychem® BR and TK (>8-hr breakthrough) >10% of the LEL use flash protection or turn out gear The Protective Action Criteria values are: PAC-1 = 0.6 ppm PAC-2 = 7.3 ppm PAC-3 = 33 ppm Respirator: SCBA HEALTH EFFECTS FIRST AID AND DECONTAMINATION Eyes: Severe irritation, burns and possible eye damage Remove the person from exposure. Skin: Severe irritation, burns and blisters Flush eyes with large amounts of water for at least 30 minutes. Remove Inhalation: Nose, throat and lung irritation with coughing, contact lenses if worn. Seek medical attention immediately. wheezing and severe shortness of breath Quickly remove contaminated clothing and wash contaminated skin with large (pulmonary edema) amounts of soap and water. Seek medical attention. Headache, nausea, vomiting, diarrhea and Begin artificial respiration if breathing has stopped and CPR if necessary. abdominal pain Transfer promptly to a medical facility. Medical observation is recommended as symptoms may be delayed. October 2010