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ATTACHMENT 5 Lrgo-C960965-00-V ATTACHMENT5 4. SHOCIqVIBRATION, AND ACOUSTICSANALYSIS 5. DESIGN GOALS/REQUIREMENTS vtHg-2-0!'5 REV. O SPECIfICATIONS TITLE DOCUMENTNO. REV. EquipmentSpecif cations Main RoughingPurnp Carts v049-2-001 Main TurbomolecularPump Cans v049-2-002 4 Auxiliary TurbomolecularPump Cans v049-2-003 Ion Pumps v049-2-004 2 ll2 and 122cm GateValves v049-2-005 J 10" and 14" GateValves v049-2-006 I VacuumGauges v049-2-007 0 BakeoutBlanlet System v049-2-009 I PortableSoft Wall CleanRooms vM9-2-010 0 CleanAir Supplies v049-2-011 I LN: Dewars v049-2-013 1 VacuumJack*ed Piping v049-2-016 PI BellowsExpansion Joints v049-2-017 I AmbientAir Vaporizers v049-2-055 0 80K PumpRegaroation Heater v049-2-056 0 SmallVacuum Valves v&9-2-059 0 CleanQh Tum Valves v049-2-050 0 CryogenicControl Valves v049-2-062 0 BakeoutCart v049-2-068 2 LrGO-C960965-00-v TITLE DOCUMENTNO. REV. Instrument& Control Specifications InstrumentList v049-l -036 0 E&lConstructionWork v049-2-022 0 PersonalComputers v049-2-049 0 BakeoutSystem Thermocouple v049-2-050 I MeasurementSystem T/C MeasurementPLC Interface v049-2-051 0 BakeoutPLC-TCInterface Soft ware v049-2-053 1 Functionality BakeoutSystem PC-PlC Interface v049-2-057 0 BakeoutSystem PC InterfaceSoftware v049-2-058 0 PitotTubes v049-2-079 0 DifferentialPressure Transmitlers v049-2-088 0 LevelTransmitters v049-2-089 0 PressureTransmitters v049-2-090 0 TemperatureElements v049-2-091 0 Interlocks,Permissives and Software AIarms v049-2-092 0 Material Specifications O-fungs v049-2-045 0 StainlessSteel Vessel Plate v049-2-041 1 StainlessSteel Flange Forgings v049-2-040 4 StainlessSteel Vessel Heads v049-2-039 3 LIGO VACUUM EQUIPMENT FINAL DESIGNREPORT CDRL 03 VOLUME TABLE OF CONTENT VOLUME TITLE VolumeI Project ManagementPlan VolumeII Design VolumeII AuachmentI Calculations VolumeII Attachment2 Calculations VolumeII Attachment3 Calculations Volumell Attachment4 Calculations VolumeII Attachment5 Specifications/Ir,lisc. VolumeIII Fabrication VolumeIV Installation/Commissioning VolumeV Book I MechanicalDrawing Book2 ElectricalDrawing I MEASUREMENTANDANALYSIS OF LIGO VACUUM SYSTEMSHOCK VIBRATION, AND ACOUSTICNOISE (Rev.l) Preparedby: Kyle Martini,Klaus Kleinschmidt, Joel Garrelick, Carina Ting May 6, 1996 ReportU-2379-2041 Preparedfor: ProcessSystems Intemational, Inc. 20 WalkupDrive Westborough,MA 01581-5003 CambridgeAcoustical Associates, Inc. 200Boston Avenue, Suite 2500 Medford.MA02155-4243 CAMBRIDGEACOUSTICAL ASSOCIATES, INC. TABLEOF CONTENTS Pase I. INTRODUCTION AND SUMMARY I II. LIGO SPECIFICATIONS. 2 A. VIBRATION 2 B. NOISE 3 c. sHocK 3 APPROACHTO SPECIFICATIONCOMPLIANCE 3 A. OVERALLPLAN.. ......... 3 B. SOURCESOF EQUPMENT VIBRATION,NOISE, AND SHOCK C. VERIFICATIONTESTING 5 D.VIBRATIONMITIGATION .......... 8 E. NOISEMITIGATION ........ II F. SHOCKMITIGATION ,,,....12 IV. SOURCEMEASUREMENTS .....I3 V. TRANSMSSIONANAIYSIS, ............13 A. VIBRATION ....... 13 B. NOrSE . .. 21 U\n. LIGOCOMMISSION TESTING , .. ... .. 24 REFERENCES . .... ... 26 FrcuRES . .27-39 CAMBRIDGEACOUSTICAL ASSOCIATES, INC, I. INTRODUCTIONANDSI.IMMARY TheLIGO specificationplaces special operational consaaints on the functioningof a numberof devicesthat make up theinterferometer vacuum system' Consideration has beengiven to thesedevices as sources ofnoise, vibration, and shock and their effecton the sensitivityand alignment of theinterferometer. In conjunctionwith ProcessSystems Intemational,[nc. a planwas proposed in PSI'sproposal ofJune 19, 1995to reducethe risksassociated with theseissues. The plan includedselecting the proper equipment, measuringthe noise,vibration and shock of theequipment, designing the fust order mitigationtreatments and analyzing performance with the teatmentin placeto determine the degreeof compliancewith theLIGO specification. At this time thereis no equipmentavailable to obtainactual source strengths and the designofthe vacuumequipment system is just beingfinalized. The analysisis thereforepreliminary using extrapolated data provided by theturbo pump vendor to estimatethe sourcelevel. The focusofthe analysisis theend station. The endstation is the leastcomplicated to model,contains all thesources, and is anticipatedto producethe highestlevels at the receiverbecause of tbeclose proximity between source and receiver with a minimumnumber of discontinuities. The analysisofthe vibrationand shock path utilizes three different models to predictthe receiverresponse over the entirefrequency range. The frst modelis a low frequencyfinite elementbeam and plate model. This model is extendedlarge distances to capturethe primarily low frequencyinfluence of theboundary on thetransmission path. In the frequencyrange where the influenceofthe boundariesis lessimportant but the responseof thepath structure still exhibitsdistinct modal peaks, a mid tequencyfinite elementshell model is used.In thehigh frequencyregion where modal overlap is stronga statisticalenergy analysis is performed. Resultsfor the turbopump nearest the beamsplitter indicate that in the low-tomid frequencyrange where modal peaks are dominate, the predicted levels exceed the LIGO specificationby 20-40dB. Thebeam tube manifold between this particularturbo pump andthe beamsplitter does not havea bellowsin contrastto the situationat mostof the otherlocations. It is estimatedthat such a bellowswill reducethe levelsby 20-40dB CAMBRIDGEACOUSTICAL ASSOCIATES, INC. exceptat thevery low frequencies. A transmissionpatl/room acoustics mode I hasbeen used to estimatethe noise levelin the endstation's vacuum equipment area. This model indicates that l) noisefrom theturbo pump will producea27 dB excessre: NC-20in the 500Hz octaveband frequency;2) noisefrom equipmentin thevacuum support equiPment room will cause levelsto exceedthe NC-20 criteriaby 8 to l0 dB. Thelatter transmission of this noiseis dueto teakagevia thepass door between the two rooms. Transmissionpath analyses are scheduled to becompleted by the endof May 1996.Included in the analyseswill be low andhigh frequencyvibration models and acousticmodels of the comer,mid andend stations. The mid frequencyvibration analysis will be performedfor selectedworst czrse locations in thethree stations' Sourcemeasurements for the turbo pump axescheduled for June,the gatevalves will be testedin Juneand July andthe ion pump,cryo pump and vent and Purge system will betested in August.The equipmentsource levels and measured impedances will be inputto our transmissionmodels to predictthe levels at thevarious receivers. il. LIGO SPECIFICATIONS A. VIBRATION TheLIGO vibrationspecification (Ref. l) for the spectraldensity of theallowable displacement6 on thewalls of anyvacuum chamber or on the floor within I meterof any chamberis shownon Fig. la. This spectraldensity represents the allowablelevel of a tonehaving a bandwidthof I Hertzat any frequencybetween 0.1 Hz and 10kHz' Becauseacceleration sensors are used more cotnmonly than displacement sensors to measureequipment vibrations, it is usefulto recastthe displacementspecification of Fig. la asan accelerationspecification by multiplyingby o2(where r.l is radianfrequency) andexpressing the resultin lrgl\fHz. Theresulting acceleration sPectral density is shown onFig. lb. CAMBRIDGEACOUSTICAT ASSOCIATES, INC B. NOISE The specifiedacoustic noise limit from all simultaneouslyoperating vacuum equipmentin normal operationat any locationwithin the LIGO vacuumequipment and laserareas is NC-20(Noise Criterion) (Ref. 2). Thisnoise criterion, shown on Fig. 2 is definedin termsof octaveband levels starting at the63 llz centerfrequency band and extendingto the 8 kHz band. C. SHOCK valve acfuationor other intermiffentdevice operation shall induceno morethan 0.01g peak-to-peakacceleration at anypoint within I meterof anyvacuum chamber. III. APPROACHTO SPECIFICATIONCOMPLTANCE A. OVERAILPLAN A comprehensiveplan has been put in placeto identiff all potentialsources of significantareas ofnoise, vibration, and shock, in thevacuum equipment, to determine the degreeof compliancewith specifications,to designand evaluate control measures proposedin PSI'sproposal, and to testinstalled vacuum equipment operation in theLIGO facility. The objectiveis to achievethe lowestpossible impact on the gravitywave instrumentation.This plan, which is underway, consists of the followingfour parts: l. Vacuumsystem equipment is evaluatedwith respectto vendors'stated vibration,noise, and shock performance and the inherent equipment desigr features that impactthese characteristics. 2. Testswill be madeon selectedoperating equipment in a qualifiedtest facility to veriry vendorclaims and to supplementvendor data wilh detailedmeasurements to cover the full rangeof theLIGO specifications.Because the specified vibration levels are extremelylow, low noiseinstrumentation and specialized equipment mountings will be usedto enhancethe capability to obtainmeasurements over the full frequencyrange specified. CAMBRIDGEACOUSTICAL ASSOCIATES, INC 3. Vibration,noise, and shock mitigation requirements as defined by PSI's proposalwill be implemented.Constraints imposed by the LIGO facilitywill be incorporatedinto the treatnent design. 4. Transmissionof shock,vibration, and sound from thesources to the vacuum chambersand to the laboratoryfloor within onemeter of any vacuumchamber are analyzedmathematically. Estimated levels with first ordertreatment in placeare comparedwith LIGO specifications.Regions where compliance with specificationsis not achievableare identified for furtherreview and assessment. B. SOURCESoF EQUIPIvIENTVIBRATION NOISE'AND SHOCK l. MechanicalRoughing
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