ATTACHMENT5
4. SHOCIqVIBRATION, AND ACOUSTICSANALYSIS
5. DESIGN GOALS/REQUIREMENTS vtHg-2-0!'5 REV. O
SPECIfICATIONS
TITLE DOCUMENTNO. REV. EquipmentSpecif cations Main RoughingPurnp Carts v049-2-001 Main TurbomolecularPump Cans v049-2-002 4 Auxiliary TurbomolecularPump Cans v049-2-003 Ion Pumps v049-2-004 2
ll2 and 122cm GateValves v049-2-005 J 10" and 14" GateValves v049-2-006 I VacuumGauges v049-2-007 0 BakeoutBlanlet System v049-2-009 I PortableSoft Wall CleanRooms vM9-2-010 0 CleanAir Supplies v049-2-011 I LN: Dewars v049-2-013 1 VacuumJack*ed Piping v049-2-016 PI BellowsExpansion Joints v049-2-017 I AmbientAir Vaporizers v049-2-055 0 80K PumpRegaroation Heater v049-2-056 0 SmallVacuum Valves v&9-2-059 0 CleanQh Tum Valves v049-2-050 0 CryogenicControl Valves v049-2-062 0 BakeoutCart v049-2-068 2
LrGO-C960965-00-v TITLE DOCUMENTNO. REV. Instrument& Control Specifications InstrumentList v049-l -036 0 E&lConstructionWork v049-2-022 0 PersonalComputers v049-2-049 0 BakeoutSystem Thermocouple v049-2-050 I MeasurementSystem T/C MeasurementPLC Interface v049-2-051 0 BakeoutPLC-TCInterface Soft ware v049-2-053 1 Functionality BakeoutSystem PC-PlC Interface v049-2-057 0 BakeoutSystem PC InterfaceSoftware v049-2-058 0 PitotTubes v049-2-079 0 DifferentialPressure Transmitlers v049-2-088 0 LevelTransmitters v049-2-089 0 PressureTransmitters v049-2-090 0 TemperatureElements v049-2-091 0 Interlocks,Permissives and Software AIarms v049-2-092 0
Material Specifications O-fungs v049-2-045 0 StainlessSteel Vessel Plate v049-2-041 1 StainlessSteel Flange Forgings v049-2-040 4
StainlessSteel Vessel Heads v049-2-039 3 LIGO VACUUM EQUIPMENT FINAL DESIGNREPORT CDRL 03 VOLUME TABLE OF CONTENT
VOLUME TITLE VolumeI Project ManagementPlan
VolumeII Design VolumeII AuachmentI Calculations VolumeII Attachment2 Calculations VolumeII Attachment3 Calculations Volumell Attachment4 Calculations VolumeII Attachment5 Specifications/Ir,lisc.
VolumeIII Fabrication
VolumeIV Installation/Commissioning
VolumeV Book I MechanicalDrawing
Book2 ElectricalDrawing I
MEASUREMENTANDANALYSIS OF LIGO VACUUM SYSTEMSHOCK VIBRATION, AND ACOUSTICNOISE (Rev.l)
Preparedby: Kyle Martini,Klaus Kleinschmidt, Joel Garrelick, Carina Ting
May 6, 1996
ReportU-2379-2041 Preparedfor: ProcessSystems Intemational, Inc. 20 WalkupDrive Westborough,MA 01581-5003
CambridgeAcoustical Associates, Inc. 200Boston Avenue, Suite 2500 Medford.MA02155-4243 CAMBRIDGEACOUSTICAL ASSOCIATES, INC.
TABLEOF CONTENTS Pase
I. INTRODUCTION AND SUMMARY I II. LIGO SPECIFICATIONS. 2 A. VIBRATION 2 B. NOISE 3 c. sHocK 3 APPROACHTO SPECIFICATIONCOMPLIANCE 3 A. OVERALLPLAN...... 3 B. SOURCESOF EQUPMENT VIBRATION,NOISE, AND SHOCK C. VERIFICATIONTESTING 5 D.VIBRATIONMITIGATION ...... 8 E. NOISEMITIGATION ...... II F. SHOCKMITIGATION ,,,....12 IV. SOURCEMEASUREMENTS .....I3 V. TRANSMSSIONANAIYSIS, ...... 13 A. VIBRATION ...... 13 B. NOrSE . . .. 21 U\n. LIGOCOMMISSION TESTING , ...... 24 REFERENCES ...... 26 FrcuRES . . .27-39 CAMBRIDGEACOUSTICAL ASSOCIATES, INC,
I. INTRODUCTIONANDSI.IMMARY TheLIGO specificationplaces special operational consaaints on the functioningof a numberof devicesthat make up theinterferometer vacuum system' Consideration has beengiven to thesedevices as sources ofnoise, vibration, and shock and their effecton the sensitivityand alignment of theinterferometer. In conjunctionwith ProcessSystems Intemational,[nc. a planwas proposed in PSI'sproposal ofJune 19, 1995to reducethe risksassociated with theseissues. The plan includedselecting the proper equipment, measuringthe noise,vibration and shock of theequipment, designing the fust order mitigationtreatments and analyzing performance with the teatmentin placeto determine the degreeof compliancewith theLIGO specification. At this time thereis no equipmentavailable to obtainactual source strengths and the designofthe vacuumequipment system is just beingfinalized. The analysisis thereforepreliminary using extrapolated data provided by theturbo pump vendor to estimatethe sourcelevel. The focusofthe analysisis theend station. The endstation is the leastcomplicated to model,contains all thesources, and is anticipatedto producethe highestlevels at the receiverbecause of tbeclose proximity between source and receiver with a minimumnumber of discontinuities. The analysisofthe vibrationand shock path utilizes three different models to predictthe receiverresponse over the entirefrequency range. The frst modelis a low frequencyfinite elementbeam and plate model. This model is extendedlarge distances to capturethe primarily low frequencyinfluence of theboundary on thetransmission path. In the frequencyrange where the influenceofthe boundariesis lessimportant but the responseof thepath structure still exhibitsdistinct modal peaks, a mid tequencyfinite elementshell model is used.In thehigh frequencyregion where modal overlap is stronga statisticalenergy analysis is performed. Resultsfor the turbopump nearest the beamsplitter indicate that in the low-tomid frequencyrange where modal peaks are dominate, the predicted levels exceed the LIGO specificationby 20-40dB. Thebeam tube manifold between this particularturbo pump andthe beamsplitter does not havea bellowsin contrastto the situationat mostof the otherlocations. It is estimatedthat such a bellowswill reducethe levelsby 20-40dB CAMBRIDGEACOUSTICAL ASSOCIATES, INC.
exceptat thevery low frequencies. A transmissionpatl/room acoustics mode I hasbeen used to estimatethe noise levelin the endstation's vacuum equipment area. This model indicates that l) noisefrom theturbo pump will producea27 dB excessre: NC-20in the 500Hz octaveband frequency;2) noisefrom equipmentin thevacuum support equiPment room will cause levelsto exceedthe NC-20 criteriaby 8 to l0 dB. Thelatter transmission of this noiseis dueto teakagevia thepass door between the two rooms. Transmissionpath analyses are scheduled to becompleted by the endof May 1996.Included in the analyseswill be low andhigh frequencyvibration models and acousticmodels of the comer,mid andend stations. The mid frequencyvibration analysis will be performedfor selectedworst czrse locations in thethree stations' Sourcemeasurements for the turbo pump axescheduled for June,the gatevalves will be testedin Juneand July andthe ion pump,cryo pump and vent and Purge system will betested in August.The equipmentsource levels and measured impedances will be inputto our transmissionmodels to predictthe levels at thevarious receivers. il. LIGO SPECIFICATIONS A. VIBRATION TheLIGO vibrationspecification (Ref. l) for the spectraldensity of theallowable displacement6 on thewalls of anyvacuum chamber or on the floor within I meterof any chamberis shownon Fig. la. This spectraldensity represents the allowablelevel of a tonehaving a bandwidthof I Hertzat any frequencybetween 0.1 Hz and 10kHz' Becauseacceleration sensors are used more cotnmonly than displacement sensors to measureequipment vibrations, it is usefulto recastthe displacementspecification of Fig. la asan accelerationspecification by multiplyingby o2(where r.l is radianfrequency) andexpressing the resultin lrgl\fHz. Theresulting acceleration sPectral density is shown onFig. lb. CAMBRIDGEACOUSTICAT ASSOCIATES, INC
B. NOISE The specifiedacoustic noise limit from all simultaneouslyoperating vacuum equipmentin normal operationat any locationwithin the LIGO vacuumequipment and laserareas is NC-20(Noise Criterion) (Ref. 2). Thisnoise criterion, shown on Fig. 2 is definedin termsof octaveband levels starting at the63 llz centerfrequency band and extendingto the 8 kHz band. C. SHOCK valve acfuationor other intermiffentdevice operation shall induceno morethan 0.01g peak-to-peakacceleration at anypoint within I meterof anyvacuum chamber.
III. APPROACHTO SPECIFICATIONCOMPLTANCE A. OVERAILPLAN A comprehensiveplan has been put in placeto identiff all potentialsources of significantareas ofnoise, vibration, and shock, in thevacuum equipment, to determine the degreeof compliancewith specifications,to designand evaluate control measures proposedin PSI'sproposal, and to testinstalled vacuum equipment operation in theLIGO facility. The objectiveis to achievethe lowestpossible impact on the gravitywave instrumentation.This plan, which is underway, consists of the followingfour parts: l. Vacuumsystem equipment is evaluatedwith respectto vendors'stated vibration,noise, and shock performance and the inherent equipment desigr features that impactthese characteristics. 2. Testswill be madeon selectedoperating equipment in a qualifiedtest facility to veriry vendorclaims and to supplementvendor data wilh detailedmeasurements to cover the full rangeof theLIGO specifications.Because the specified vibration levels are extremelylow, low noiseinstrumentation and specialized equipment mountings will be usedto enhancethe capability to obtainmeasurements over the full frequencyrange specified. CAMBRIDGEACOUSTICAL ASSOCIATES, INC
3. Vibration,noise, and shock mitigation requirements as defined by PSI's proposalwill be implemented.Constraints imposed by the LIGO facilitywill be incorporatedinto the treatnent design. 4. Transmissionof shock,vibration, and sound from thesources to the vacuum chambersand to the laboratoryfloor within onemeter of any vacuumchamber are analyzedmathematically. Estimated levels with first ordertreatment in placeare comparedwith LIGO specifications.Regions where compliance with specificationsis not achievableare identified for furtherreview and assessment.
B. SOURCESoF EQUIPIvIENTVIBRATION NOISE'AND SHOCK l. MechanicalRoughing Pumps Thesefirst stageroughing pumps are not subjectto vibrationsPecifications' 2. TurbomolecularRoughing Pumps Turbomolecularroughing pumps achieve their pumpingcapability by multi- stagevanes rotating at high speed(approx.2?,000 RPM). Pumpshafu are driven by brushlessmotors. Shat bearingdesigrs include ceramic ball andmagnetic. Theprincipal vibration source of thesepumps is the unbalancein the rotorwhich producesa spectrumwith a line at therotational speed and at its oddand even harmonics. Vibrationsat the powerline frequency,typically around I kHz, andits harmonicsresult from magnetostrictiveeffects in thestator pole structure. Finally, with non-magretically levitatedbearings, broadband noise, (e.g., due to the interactionof theballs with the lubricant)is generated. 3. Ion Pumps Ion pumpsoperate without moving parts' Theyare energized by high voltage DC from anAC poweredcontroller. Ion pumpvibration and noise is primarilyassociated with the high voltagepower supply and controller which incorporatecooling fans and transformers. CAMSRIDGEACOUSTICAL ASSOCIATES, INC.
4. Cryogenic80K Pumps Thesepumps consist of exposedsurfaces refrigerated to a cryogenictemperanre uponwhich gasesare condensed. The proposed pumps use liquid nitogen thatboils at atrnosphericpressure at a temperatureof 80"K. Theboiling actionof liquid nitrogen involvescavitation (i.e., vapor bubble formation and collapse) which produces broad spectrumpressure pulses that act on vesseland liquid/air surfacesto producenoise and vibrations. 5. Purgingand Venting Compressors Non-reciprocatingscrew compressors are planned for this purposeand will be locatedin adjacentMechanical Equipment Rooms. 6. GateValves Gatevalves are subject to the shockspecification which limits thepeak vibrationalamplitude induced by theiroperation. Primary mechanisms of shockare decelerationand seating. Both electricand pneumatic valve actuators :re usedfor various LIGO locations. C, \'ERIFICATION TESTING I . TestChambers The backgroundacoustic and vibration levels ofthe testareas must be equalto or lessthan equipment levels being measured. A specialacoustically treated chamber has beenbuilt at PSI to testthe Turbomolecularpump, its backingpump and the ion pump. A prototypebeamsplitter is beingbuilt to testthe short cryopump. The gatevalves with actuatorsand the ventand purge system have higher levels ofnoise and vibration and will betested at the vendors'facilitY. 2. EquipmentMounting Equipmentto be testedwill be suspendedor supportedcompliantly to isolateit from thetest chamber and allow themeasurement quasi-free vibration levels required for CAMBRIDGEACOUSTICAL ASSOCIATES,
the analysis. 3. TestInstrumentation - Sensors a. llibration Whenequipment levels are below the measurement capability of general purposeaccelerometers, high-sensitivity ultra low-noiseaccelerometers will beused to defineequipment vibration levels. Two suchsensors are available to spanthe full frequencyrange of theLIGO specifications.The wilcoxon Researchmodel 731A accelerometer(lov/g,600 gm) hasa usefulbandwidth from 0.1-300Hz. Thewilcoxon Researchmodel 9168T0-l (7.5Y1e,700gm) provides low noisecapability above 300 Hz. Theequivalent acceleration spectral densities comesponding to the electronicnoise floorsofthese sensors are shown on Fig. lb. Abovel0 Hz"the noise floor ofthe model 731A is lowerthan the specified amplitude. Above 300 Hz, the noisefloor of the 9 I 68T0- 1 is belowthe specifiedamplitude. When a measurementequals the sensor's noisefloor, the vibratingamplitude of the t€stdevice is at leasta factorof 3 dB lower thanthe noise amplitude. Low noisemeasurements require limiting the electronicnoise that occurs outside the frequencybandwidth ofinterest by usinghigh-order bandpass filters' b. Noise Operatingequipment noise will bemeasured using a Bruel andKjaer type madel2236Precision sound Level Meter octave band analyzer. Acoustic power measurementswill be madefor usein assessingthe overallsound pressure level in the Laserand Vacuum areas of theLIGO facility. c. Shoe,k shockmeasurements will beperformed at the gatevalve vendor site using small,lower sensitivity accelerometers such as Bruel and Kjaer model 4384 or 4366. CAMBRIDGEACOUSTICAL ASSOCIATES. INC,
4. TestInstrumentation Data Anal)'sis and Processing a. Vibration Vibrationsignals will beacquired on a digitalrecorder and processed to obtainfrequency spectra in the form of spectraldensities. Acquisition and processing of thesesignals will beperformed using a CAA'scomputer-based SIGNAL system. The durationof the signalacquired must be sufficientlylong to insureconfidence in the measuredspectral amplitudes. Sigrralduration criteria for autospectraldensity functionsare given in Ref. 3. Thevariance ofthe €stimatedautospectral density function (GQ))for a band-limitedGaussian noise signal is relatedto theresolution bandwidth B in Hertzand the total sigral durationT in secondsas follows:
GrA VarlGtfl - (l) BT whereG(fl is the actualautospectral density. Therefore, a time-bandwidthproduct (BT) of unity yieldsa varianceequal to the actualfunction. For purposesof estimating testrequirements, we selecta time-bandwidthproduct of 10. Thisyields signal acquisitionrequirements of 100seconds for a 0.1Hz bandwidthand 10 secondsfor I Hz resolution.During theseacquisition times, the equipment would have to be stablein its operation,and the test would haveto be freefrom outsideinterference' b. Noise Acousticmeasurements will be madeusing a Bruel andKjaertype 2236 precisionsound level meter. Noise levels in theoctave bands between 63 Hz and8 kHz will be recorded.This meterhas a noisefloor correspondingto lessthan NC-10. c. Shock Measurementsof shock-inducedvibration due to operationof theSate valveswill be madeby recordingthe output of accelerometersoriented in three CAMBRIDGEACOUSTICAT ASSOCIATES, INC
orthogonaldirections and mounted on the gatevalve fixture. Thesigral will be recorded duringthe entireduration of the closingevent, and the peak acceleration amplitude will be obtained. D. VIBRATIONMTIGATION l. DesignApproach The overallapproach to mitigatingequipment induced vibration encompasses boththe equipmentsource and the vibration transmission paths to the LIGO test hardware.In the initial reviewof vendor-suppliedinformation, recommendations w€re providedfor treatmentsthat areeasily applied to theequipment. Vibration hansmission pathsare treated using the approachesdescribed in the followingsub-sections. The equipmentvibration measurements will be usedto characterizethe source levels.The LIGO specificationlimits thevibration level at thereceiver, on the chamberor on the groundwithin I meterof anychamber. To determinethe extent of the mitigation requiredanalyses are performed to predictthe vibration level at thereceiver. Whenthe sourcecan be effectivelyisolated, the equipment vibrations characterize the sourceoutput. Whenthe path from the equipmentto thereceiver is not capableof beingeffectivety isolated, it will benecessary to supplementthe vibration levels measuredon the equipmentwith estimatesor measurementsof the strucfuralimpedance of the equipmentat its attachment.Estimates of vibrationtransmission will thenmake useof an equivatentvibration source using Thevenin or Nortonequivalent system representations(Ref. 5). Themethod of modelingthe path between the source and receiver is determined by its complexityand the frequencyrange of interest.For simplepaths analytical models areused. For morecomplex paths, frrite elementmethods are used at the low-mid frequencieswhere the modes ofvibration are well separated.Statistical energy analysis (SEA) methodsare used for thehigher frequencies where modal overlap is strong. CAMBRIDGEACOUSTICAL ASSOCIATES, INC
Becausevibration limits arespecified over a broadfrequency range (i.e., 5 decades),multiple strategies may be necessaryto reduceequipment vibration across the entire range. Structuralelements having low stiffiressrelative to their mating sructures provideeffective vibration isolation at frequenciesbelow the rangewhere the elements becomeresonant or wave-bearingstructures. Compound equipment mounts obtained by connectingmultiple isolator stages in seriescan be used to enhancevibration isolation effectiveness.Use of compoundmounts is primarilylimited by spaceavailability. Abovethe frequencyrange where isolators behave as simple compliant elements, vibrationenergy is transmittedalong these elements in the formofpropagating structural waves.This modeof enerrytransmission can be reducedwith a combinationof "blocking"masses and damping. The concept of blockingmasses is to Providean impedancediscontinuity along the energytransmission path to reflectpropagating waves' Sincethis approachdoes not dissipatestructural energy, damping treatments are added to the isolator.Damping treatments using viscoelastic materials applied to the external surfacesofthe isolatorcan be desigrredin the form ofboth unconshainedand constrained layers. - 2. Mitigationfor SpecificEquipment a. Main TurbomolecularPumps Eachof themain turbomolecular pumps is separatedfrom its backingpump. Theturbopump is placedon its own cartand separated from the interGrometerby a sofi bellows.The turbopump/cartis anchoredto the floor to preventthe bellows from compressingaxially dueto the extemalpressure. High frequencyisolators in the form of rubberbushings and washers isolate the turbopumpfrom the cart. The backingpump, which is a muchgreater source of vibrationthan the turbopump,is placedon its own cartand located in theMechanical Equipment Room. Thebacking pump cart has its own vibrationisolators.
9 CAMBRIDGEACOUSTICAL ASSOCIATES, INC.
b. Ion PumpPower Supplies The sourceof vibrationwith theion pumpsare the power supplies. For the largeion pumpsthe power supplies are located in theMechanical Equipment Room. Vibrationisolators will be usedif needed.The small ion pumps'powersupplies are Iocatedin the VacuumEquipment Room and rest on vibrationisolators. The cablewill be flexibleand incorporate "drip loops"to enhanceflexibility. c. CryogenicPumps The 80K pumpswill producevibrations due to the formationand collapse of bubblesin the liquid nitrogen.An experimentusing air andwater to simulatethe two phaseflow of the nitrogen enteringthe 80K pumpshowed that the generationof large bubblesvia the inlet pipe canbe reduced by bringingthe stratifiedflow fiom the inlet pipe abovethe liquid reservoir.The incoming liquid flows gentlydown a chuteinto the reservoirwhile the gasescapes without bubbling through the liquid. The bubbles generatedfrom theboiling liquid in thereservoir are smaller and generate higher frequencies.Vibration transmission into theinterferometer resulting from this actionis reducedby low frequencyisolators. An additionalsource ofvibration fromthe 80 K pumpoperation is dueto vibration in thesupply and retum lines. Flex linesare used to attenuatethe vibration. d. Purgingand Venting Compressors Thevent andpurge system will be skiddedand placed inside the Mechanical EquipmentRoom. The skid is mountedon vibrationisolators. The discharge and suction sideof the systemin the comerstation have mufflers or soundattenuators. The mid and endstation's systems are not operatedduring interferometer operation. e. EquipmentLocated in AdjacentMechanical Equipment Rooms Theturbomolecular backing pumps, vent and purge compressor skids' and the ion pumpcontrollers are located in MechanicalEquipment rooms. Theserooms are
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locatedadjacent to the vacuumequipment area on separatefloor slabs. All lines going from themechanical room to thevacuum equipment area will haveflex connectors. E. NOISEMITIGATION l. DesignApproach Noiseradiated by operatingpumps and elecfonics can be mitigatedby reducingthe vibrations of the extemalstructural surfaces of theequipment. Measures to accomplishthis includeextemally applied structural damping treatments. Vibration isolationmay also be requiredas a componentofnoise control. 2. Implementation A computermodel of thevacuum equipment areas is utilizedto predictthe combinednoise levels in the specifiedNC contouroctave bands from 63 Hz to I kllz from the variousvacuum pumps and auxiliary equipmentlocated in theseareas. The inputto this modelis the acousticpower measurements performed on the operating equipment.Any remotelylocated equipment that could contribute to the noisevia transmissionthrougb walls, doors, ductwork, and other flanking paths is alsoincluded' The modelincludes the soundabsorption and scaftering effects of majorequipment such aschambers, beam tubes, large diameter piping, and other large objects, as well asthe soundabsorbing properties ofthe roomboundaries. Equipment identified by the model asexceeding the NC-20 noise specification will be evaluatedfor 2ndorder noise reductiontreatment (if authorizedby LIGO). Noisemeasurements on representativevacuum system components will be made eitherat PSI,a vendor'sfacility, if suitable,or at a commercialacoustical laboratory. Measurementswill includeoctave or third octaveband over the NC frequencyrange. Dependingon the testfacility, eithersound pressure at a givendistance and at various positionsaround the sourceor soundpower will bemeasured. From this data andthe roommodel discussed above an initial predictionoftotal noiseat various locationsin
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the Laserand Vacuumarea will be made. Specific noisecontrol secondorder options for the vacuumsystem components are indicatedbelow (notethese options are not includedin the currentcontract). a. Main TurbomolecularPumps If necessarythe pumpand motor housing will be shroudedwith loadedvinyl sheetlaminated to op€ncell foam.Damping fteatrnents, discussed above, can also be used to reducesound radiation from supportstructures. b. Cryogenic80K Pumps The magnitudeof acousticnoise emissionsof theboiling nitrogeninside the shroudneeds to be measured.It is anticipatedthat the insulatingvessel required for the shroudmay be sufficientto precludethe need for furthernoise reduction. c. EquipmentLocated in AdiacentMechanical Equipment Rooms The turbomolecularbacking pumps, vent and purge compressor skids' and the ion pumpcontrollers are located in MechanicalEquipment rooms. These units can take advantageof the noisecontrol provisions required to adequatelyisolate auxiliary equipment(e.g., fans, chillers, pumps) located in theserooms from thevacuum equipmentareas. Airbome noise isolation required for mechanicalequipment to achieve theproject noise goal in the vacuumequipment areas through walls, doors, windows, ducts,and rooflceiling design is assumedto be adequatefor isolationofthe vacuum equipmentto be locatedin the MechanicalEquipment rooms as well. If authorizedby LIGO, supplementarynoise control treatments, recommendations of the vacuum equipmentcan be provided should the noise isolation in the MechanicalRooms be found to be inadequatefor meetingthe project noise goals in thevacuum equipment areas. F. SHOCKMTIGATION The gatevalves are located in ctoseproximity to the chambers.With the excePtion of addinga shortflexible bellows, blocking the shock path is not an option. In this regard
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thereforewe haverequired the valve manufactureto reducethe shockat the source. The valveswill be compliantlysupported from belowto isolatethem from the facility floor. ry. SOURCEMEASIJREMENTS At this time thereis no equipmentavailable to obtainsource measurements- The turbomolecularpump vendor provided vibration data for a similarpump. This will be usedto estimatevibration levels at the endstation. The vibration levels used for the analysisis shovmin Figure3. For theacoustic analysis, estimates ofsound levels were obtainby eithermeasurements on similarequipment at vendorsfacility or from experience.
V. TRANSMISSIONANALYSIS A. VIBRATION The modelingof thetransmission path between the sourceand receiver is divided into threefrequency regions, low, mid andhigh. In the low frequencyor largestructural wavelengthsregion the vacuum equipment and connecting manifolds are model with beamfinite elements,the foundationslab is representedby plateelements and lossy springsrepresents the soil. The modelcan be extended large distances and captures the primarily low frequencyinfluence of theboundary on thetransmission path' The transitionfrom the low to mid frequencyregion begins when the structural behavioris no longercompact and circumferential shell modes exist in the equipmentor the manifold.In the mid frequencyregion the hansmission path is modeledwith axisymmetricfinite elements.The model assumes the structureis symmetricbut applied loads,boundary conditions and displacements need not be axisymmetric'The mid frequencymodel is limitedby sizeof themodel and the influenceof the boundaries wherethe modelis artificiallyterminated. Typically boundaries become less impodant with increasingfrequency. By varyingthe boundaryconditions, the impactof the
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boundaryis determinein the analysis. The limitation of CAA's computerand the Nastran finite elementprogam determinesupper frequency limit of themid range.Above this frequencystatistical energfanalysis is performed.With thistechnique the strucfire is dividedinto subsystems andthe power flow betweensubsystems is calculatedbased on couplingloss factors- Transmissionpath models ofthe vacuumsystem are currently being developed. The following sectionsdescribe preliminary models and results for the vacuum equipmentin the endstation (Figure 4). l. Low Frequenc]'Model A Nastran[6] frniteelement beam reprresentation of the equipmentis plottedin Figure5. Beamcross sectional properties are calculate for all the equipmentand their supports.Stiffeners, flanges and non-structural parts are modeled as mass. The 30" concretefloor is modelwith plateelements and the soil is modelas lossy springs. The soil propedieswere obtain from Parsonsreport [7]. Theupper frequency limit ofthis modelis approximately50 Hz. Abovethis frequencycircumferential shell modes occur. Below this frequencythe body of equipmentand the manifoldsbehave as a rigid masson the flexibility of the supportsand bellows. Unit forcesin eachofthree directionsare applied at thetwo turbopump locations, the floor belowthe turbocart and at thecryopump. Observation locations were with I meterof thebeamsplitter on boththe manifold and the concreteslab. Largehansmission lossesare observed across the bellowsand via theconcrete slab path. Estimatesfor sourcelevels are available for only theturbomolecular pump (see Figure3). Norton theoremis usedto convertthe accelerationlevels to forces.The pump is connectedto the manifoldtube by a softbellows. The bellows axial spring rate (60 lb/in) is muchless than the stiffrressof thepump. Thepump then can be considerapure
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velocity sourceand a force acrossthe spring into the manifold canbe computed.Results arelisted in section4. 2. Mid FrequencyModel Thepurpose of this sectionis to describethe finite elementanalysis that we performedto studythe mid-frequencybehavior ofa portionofthe end-stationstucture adjacentto the beam-splitter.Figure 4 is a sketchof theportion of theLIGO vacuum equipmentthat we referto asthe end-stationstructure. We developeda finite element modelof a portionof end-stationstructure, indicated in Figure6, for a preliminarystudy of thevibration levels produced near the beam splitter due to mid-fiequencyvibrations from the turbopump. The Nastrancomputer plot of the model is shownin Figure 7. The mid-frequencymodel consists of Nastranaxisymmetic conical shell and trapezoidalsolid elements.These Nastran elements can only in themselvesmodel axisymmetricstructures; however, the appliedloads and displacements need not be axisymmetric,as the elementformulations use a Fourierexpansion about the azimuthal coordinate[6]. The conicatshell element, used primarily to modelthe thin shelVplating that predominatesthe structure,includes both membraneand bending flexibility (with the possibleinclusion oftransverse shear flexibility). Thenon-axisymmetric features ofthe structure,such as the ion pump andsupports, are not modeledin this stagein the analysis, but it would be a straightforwardtask in the futureto modelsome of thesefeatures via concentratedloads simulating lumped impedances, such as simple inertia or compliance. The attachmentof themanifold tube to thebeam splitter is modeledat thistime asa fixed boundarycondition. Future models would possiblyinclude other boundary conditions at the beamsplitter end or the useof a terminatingstructure simulating the impedanceseen by the manifoldtube at the splitter, Thebellows, on theother end of the structure,is modeledwith coriicalshell elements fixed at thefar endwith propertiesassigned to give an effectiveaxial stiffnessof 6514lb/in (specifiedby bellowsmanufacturer) and a
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negligiblebending stiffiiess. Thevibration of theturbo-pump w.rs simulated by point loadsin theradial, axial, circumferentialdirection appliedat the centerpoint of the locationof the turbo-pump. The Nastrandirect frequencyformulation was used for thesecalculations. The analysis wasperformed to 500I{2. Higherfrequencies will be computedin the future. We obtainedthe radial, axial and tangential components of the acceleration responseof the modelat variousazimuthal locations and axial locations within I meterof the splitterend. We examinedthese results and present those that appear to representthe "worst"cases ofvibration transmissionin Section4. 3. High FrequencyModel a. Introduction In this sectionwe presenta high frequencyanalysis of structurebomenoise propagationalong an end sectionstructure from a gatevalve to the beamsplitter. For the thin shell andplated box-like structuresalong this path the predominanthiglt frequency wavemotion tends to be fle>arral.By highfrequency we meanfrequencies at which the flexuralwavelengths are small relative to thestructural scales, such as the lengthsand diametersof the tubularsections. For thin steelplating the flexuralwavelength is given by
),r: 2n/k, = 6*10'r/h(inYf(H4 (2)
whereh is theplating thickness and f is frequency.To illustrate,with l/4 in. platingat I WIz., l'r-lZ.in Structurebomenoise levels will attenuateas they propagate from a noisesource to a receiver.The overallattenuation is theresult of botha spreadingof the vibrationenergy and its dissipation,that is conversionto heat. Along two dimensional -rl2 platedstructures the spreadingis cylindricalwith accelerationlevels decreasing as r
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wherer is the distance(range) along the plating from sourceto receiver.Dissipation associatedwith flexuralwave propagation is convenientlyexpressed in termsofa structuralloss factor q . Herethe associatedattenuation is ofthe form exp( k71/4) exp( nlr/2),). Dissipationmay also be associatedwith parallel propagationpaths that do not measurablycouple to thereceiver. For examplefor the problemof interest,the vibrational energy transmitted to the concreteslabs and in tum the groundvia the manifold tube supportsis believedto fall into this category' Statisticalenergy analysis (SEA) is an analyticalformulation that capturesthe phenomenadescribed above and allows one to estimateabsolute levels at receiver locations,e.g., the beamsplitter, in termsofthe noisesource strength (input power). The techniqueis briefly outlinedbelow and applied to theend station in the following section. b. StatisticalEnergtr Analysis (SEA) Concepts With this techniquethe structureto be analyzedis dividedinto subsystemseach "j" "large',in termsofthe characteristicwavelengths. For eachsubsystem a steadystate powerbalance is imposed n; Ei ltri, (3)
dissipatesand the wheretrj is powerinput to the subsystem,{ it *t. powerit {, power,,lost" to neighboringsubsystems. A fundamentalSEA concept is thatthe above dissipatedand "coupled" powers are proportional to the space-averagedstored energy of the subsystem,
TIi a\i
and
l'7 -
CAMBRIDGEACOUSTICAT ASSOCIATES, INC.
tr;i: r[tt;r.Er> - \u
here a 2nf andq, and ,1j,t *" dehnedas dissipation and coupling loss factors. For structurebornenoise
where(#r.> is the subsystemspace-averaged squared acceleration and M, the subsystem mass.The analysis is executedby definingthe appropriate subsystems, using Eq- 2 to formulatea set of simultaneousequations in the unknownstored energies, obtaining the requiredloss factors [9], definingthe source strength(s) solving the equationsand finally usingEq. 5 to obtainthe desired response. This is describedbelow for the endsection structurepictured in Fig 8. c. SEA Modelof LIGO End SectionStructure The sectionbeing analyzed is shownin Fig 8. Thereare twelve subsystems in our SEA representation,each a uniformsection of thetubular manifold. Power is coupled amongthem across structural discontinuities ofvarious types, viz., stiffeningribs modeledby their inertia,bellows characterized by theircompliance, and section radius changes.Power may also be transmittedthrough the suPPodsand lost to the floor slab. "lost" In additionit propagatesbeyond the modeledsections where it is to thebeam splitteron oneend and the continuationof themanifold on theother. As is commonpractice with this approach,we obtainthe required coupling loss "canonical", factorexpressions from the anallical solutionsto highly idealized,so called problems.For couplingfrom onemanifold section (i) to anotherfi) we takeall such problemsto be one-dimensionalwith a lossfactor of the form 6\ij f i/Mfv:>
t8 CAMBRIDGEACOUSTICAL ASSOCIATES-
where
: mi rtf t/ z(kb"t/@)2 ReIYjl/
wherefrrr, Ko"fLna, andm, M fTna, arerespectively the springconstant of the bellowsand the total massof subsystemi both per unit distancearound the circumference.II, (Zr)t l(t i)a(ph/k)/21-r is theadmittance of the subsystemj platingtaken to be semi-infinitein exlentwitn k, y 1/lA6iolch the flexuralwavenumber in theplating, c is the materialsound speed and h theplating thickness [10]' The factor y [l O+]1/4is introducedto accountfor thestiffening of a tubeowing to its curvature asthe frequencyapproaches its ring frequencyfrom above[l l]. Couplingacross a rib or a flangeat a sectionradius change, modeled via their mass per circumferentialdistance (m,,u),is analyzedsimilarly as shown in Fig 9b. Herethe couplingloss factor is givenby
oorl,j lZprlZ,,ul2RelY)lm.
with Zr,u iamr,u andagain we haveassumed a strongdiscontinuity and hence weak coupling. Finally,in Fig 9c we sketchthe model for estimatingthe couplingloss factor from manifoldplating into the floor slabvia a support.The plating and slab are mode led as
l9 CAMSRIDGEACOUSTICAL ASSOCIATES, INC.
effectivelyinfinite plates and the (point) support is masslessand rigid. Theplating discontinuityprovided by the supportnulls the motion at the interfaceand in so doing generatesa force that is transmittedto the slabwhere the energydissipates. Here the couplingloss factor becomes
6Tlrout - z(Zpr,slM)(7eusl Zrrob (e) whereZr* (4/rf3@ch2), is thedrive point impedanceof the manifoldplating assumed to be of infinite extent!21 andZ*/2,^ (pch2)/(pch2)"*<1. is the ratioof platingto slabpoint impedances. For this preliminaryevaluation, I . we let q, 0.04 for all subsystemstypical of fabricatedstructures, and 2. the parallelpath through the concreteslab is igrrored. Our excitationsource is theturbomolecular pump located in subsystem5' The inputpower is takento be that for a compactradial force, Frrlri, driving the tubeplating as if of infinite extent,P, flor/Zog. In the following sectionresults are presented for the meansquared accelerations in thedriven section (5) anddownstream in Section1, closestto thebeam-splitter. 4. Results In the implementationof all threemodels a forceis appliedto the turbomolecularpump's connection to themanifold tube in theradial direction. The drive point acceleranceat this location,or the averageddrive compartment accelerance in the high frequencyrange, is plottedin Figure10. Thedata from thethree models collapse at the drivepoint. Thetransfer function accelerance from the drivepoint to locationswithin onemeter of the beamsptitteris plottedin FigureI l. In the low to mid frequencyrange thereis a 10-20dB reductionfrom the drivepoint location.In thehigh frequencyrange the discontinuitiesin the system,as modeled, produce much greater reductions. Theturbo pump source leve ls shownin Figure3 havebeen applied to the models
20 CAMBRIDGEACOUSTICAL ASSOCIATES, INC.
andthe estimatedaccelerations near the beamsplitter computed. These levels are comparedto the LIGO specificationlevels in Figure12. In the low- to mid-frequency rangewhere the sourcelevels can only be roughly approximatedfrom the available information,the predictedlevels exceed the LIGO specificationby 2040 dB. B. NOISE L AcousticalModelling for AirbomeNoise in LVEA's Overview Thepurpose ofthe acousticalmodels is to predictthe noiselevel at specific receptorlocations in the variousLaser vacuum EquipmentAreas of the LIGO End station at the washinglon site generatedby vacuumpumps and auxiliary equipment providedto LIGO by PSIto whichthe project specified operational noise criterion spectrumof NC-20 applies.Noise from otherventilation and other machinery or personnelis not includedin this acousticalanalysis. Theelements incorporated in themodel include the following: NoiseSources - soundpower [or equivalentsound pressure and distance] in octave bandsfrom 3 1.5to 8 kHz centerAequencies. RoomAcoustics of VacuumSupport Equipment Rooms IVSERI - The End Stationhas a roomdedicated to vacuumpump support equipment' NoiseReduction of Envelopeof vsER - partition,door, and other components of VSER'scontributing to airbomesound transmission to theLVEA" RoomAcoustics of LVEA - acousticaltreatment of ceilingand sound absorption ofother surfaces;effect ofscattering by largeequipment; distances between sourcesand recePtors. Thesemodel elements are handled by spreadsheetcomPuter programs potus 123] customizedfor this project. Sourcenoise ouputs are based on eithermanufacturers' data, measurementsperformed by CAA / PSIas described in the statementof work, or estimates basedon informationin our files of theclosest equivalent equipment where information is
2l CAMBRIDGEACOUSTICAL A.SSOCIATES, INC not availableat thetime of the initial computations. 2. EquipmentIncluded in theAcoustic Models As previouslystated, the sourcesincluded in the acousticalmodels are vacuum pumpsand auxiliary equipmentmanufactured or procuredby PSI for the LIGO project to which theproject specified operational noise criterion spectrum ofNC-20 applies.In Comer stationsa segmentof theLIGO systemmay be in operationwhile anotheris sealedoff temporarily from the operationalsegment for repairsor modifications. In suchsituations the Vent andPurge Equipment would be in operationand it's noise sources must be includedin determiningthe acousticlevels at critical operationalvacuum components. segments. It is assumed,initialty for lack of completenoise level information,that the Smalllon PumpControllers produce no sigrificantnoise; that the Cryopump produces a noise spectrumthat matchesthe ambientnoise level, and that the Vent andPurge compressor noiseequals that of a specificSiemens Side Channel Compressor [2CH4] having a capacity similarto that of the compressorin ttreselected system. For theLarge Ion PumpController a haystackspectrum of modestlevel similar to typicalfan cooledelectronic equipment is used.The TMP is assumedto be operating,however, the calculationcan be repeated withoutits contribution,to modelthe more typical condition. 3. RoomAcoustical Models a. Model of vacuumsupport equipment rooms The acousticalmodel of theseequipment spaces assume that there is no specialsound absorbing treatment installed and that all roomsurfaces have very low soundabsorption coeffrcients over the frequencyrange of themodel [31.5 Hz to 8 kHz, octaveband center frequencies]. However, due to the closelyspaced array of equipmentthere is considerablediffirsion and multiple reflection of soundwaves resultingin an effectivesound absorption coefficient for thenominal room boundary surfaces,i.e., floor,ceiling/roof, and walls, that is typicallyfound to behigher than that for surface.The modeluses absorption coefficients that lie betweenl0 and20%,
22 CAMBRIDGEACOUSTICAT ASSOCIATES, INC. varying with frequency. If a particularmachine or the dominantnoise source of a machineis closeto a wall thereis no reductiondue to rOomreverberatiOn and, in fact, a small enhancementof the soundpressure on sucha surfacemay occur' Basically,the soundpower ofeach source is reducedby the effectiveabsorption characteristicof theequipment room, taking note of anynon-qualising machine locations.It is furtherreduced by thecombined sound transmission loss of theroom envelopecomponents in commonwith thereceMng space, the LVEA. The resulting soundpressure is assumedto radiatefrom the envelopeinto the LVEA with an equivalentacoustic power in proportionto theassociated radiating area' b. Model of endstation laser vacuum equipment areas The most critical receiverlocations in the LVEA s are Beam Splitter Chambervessels and beam tubes or beammanifolds which interceptthe airbome soundand transmitthem [as structurebomesound or vibrations]to nearbysensitive opticalcomponents in theLIGO system.The sound sources include the envelope elementsof the VSER aswell asequipment located directly in the LVEA' including SmallIon PumpControllers, 80K Cryopumps. The acousticalnature ofthe largerLVEA' s, especially the corner stations, have larger volumeswhich contributeto longerreverberation times, however, this undesirableeffect is largelycancelled oul by thesound absorbing ceilings which have relativelyhigh absorptioncoeffrcients [averaging around 60%]' Acoustictevels from sourcesthat are not directlyadjacent to the sensitive receptorswill decreasesubstantially with distance,primarily because ofthe absorptive ceilingbut alsobecause the largevacuum equipment will providethe scatteringand multiplereflection effects described above for theVSER's. The roomcorrections in eachoctave band and for eachsource - receiverpair incorporateboth the distanceand soundabsorption factors as well assmall adjustments, as appropriate, based on experience.
23 CAMBRIDGEACOUSTICAL ASSOCIATES, INC,
4. SoundTransmission Calculations The primary pathsof soundtransmission from VSER to the LVEA are the commonpartition and the singleaccess door. Theirconstruction, e.9., thickness and type of material,e.g, gypsumlvall board [GWB] determinesthe tansmission loss versusfrequency obtainedthrough laboratorymeasurements of specificpartitions. Using information on thesepartitions obtained from the RalphM. ParsonsCo., the facilitydesigter' we can determinethe neededinformation even ifthe exactconstruction does not preciselyduplicate any ofthe testedpanitions using our priorjob files anda largequantity ofpublished information on this subject. For the door, a standardoffice door that is fully gasketedis assumedand, as will be seen,a specialacoustically rated door may be desirablefor meeting the noisecriterion. 5. Resultsof Initial Calculations The resultsofthe noiseanalysis for endstation is shownin Figure13' The calculationsindicate that 1)the TMP cartcreates sound levels at thevacuum vessel or beam tubewhich it is servicingthat exceed the noise criterion by asmuch as 27 dB [in the 500Hz OctaveBandl and 2) that noisefrom supportequipment in the VSER exceedsthe criterion by 8 to 10dB in mostoctave bands. The latter transmission is, however,dominated by leakagevia thepass door between the VSER and the LVEA.
VI. LIGO COMMSSION TESTING Duringthe commissioningprocess of the installationsin Hanford,WA and Livingston,LA, measurementsofvibration andnoise generated by vacuumsystem equipmentwill be conducted,Vibration measurements will bemade on oneeach of the following chambers:horizontal access module;rbeam splitter module; (WA siteonly). At eachchamber, normal vibration (i.e., single axis) measurements will be madeat onelocation on the floor within I meterof the chamber'Tri-axis measurements will be madeat two locationson eachchamber. Measurements will be madewith and withoutoperating auxiliary equipment for thepurpose of establishingambient levels-
ai L'l CAMBRIDGEACOUSTICAL ASSOCIATES, INC,
Additionally,sound pressure levels will be measuredin thevicinity of eachchamber with all vacuumsystem components in normal operation. Shockmeasurements will be madeon representativ€chambers during the operation ofrhe gatevalves. For thebaseline tests, the beam-splitter chamber located at thevertex will be instrumentedfor tri-axisshock measurements during the operationof the 35 and 15 cm gatevalves on the chamberand ofthe nearby122 cm gatevalve. Tri-axisshock measurementswill alsobe madeon the following:(l) onemid or endstation chamber during the operationof a nearbY I I 2 cm eatevalve.
25 CAMBRIDGEACOUSTICAL ASSOCIATES,
REFERENCES VacuumEquipment Specification. LIGO Facilitv,LIGO-894-0002-01-V, Rev. I, 28 March1995, p. I I . C.M. Harris,Handbook of AcousticalMeasurements and Noise Control, (3rd Ed., McGraw-HillBook Co., NY, l99l)pp. 43.4-43.5. J.S.Bendat and A.G. Piersol,Engineering Applications of Correlation andSpectral Analysis, (John Wiley & Sons,NY, 1980)pp.264-270. Summaryof Conceptsand Reference Design for LIGO, Cal.Instit. of Tech, February1992. C.M. Harrisand C.E. Crede (Ed), Shock and Vibration Handbook. Vol. l, (McGraw-HillBook Co.,NY, I 96I )pp. 10.24-10.25. TheNASTRAN" TheoreticalManual. NASA SP-221(04),National Aeronautics andSpace Administration, Washington, DC (1977). LIGO TechnicalFoundation Anal)'ses Executive Summary and Discussions- TheRalph M. ParsonsCompany Contract Number: PPl50969, December 4, 1995. 8. fuchardH. Lyon, StatisticalEnergy Analysis of DynamicalSystems, The MT Press' Cambridge,MA, 1975. 9. S. H. Crandalland R. Lotz, On theCoupling Loss Factor in StatisticalEnergy Analysis,J. Acoust. Soc. Am., 49,352-356(1971). Also, J' Garrelick,Dynamic Responseof CoupledSystems: A ComparisonBetween Statistical Enerry and DeterministicSystems, CAA TechnicalReport U-392-213 prepared for TheOffice of NavalResearch under Contract N-0001 4-69-C-0056 , StructuralMechanics Program' September1972. 10. L. Cremer,M. Heckl andE.E. Ungar, Structure-bome Sound, Springer-Verlag, Berlin,1973, Ch V. ll. Miguel C. Jungerand David Feit, Sound, Structures and their Interaction,The MIT Press,Cambridge, MA 1986,Ch 7. 12. ibid,Eq 7.80cwith r v 0. . n_l IU notion'Lajitas'
.n{ ilStiilrl"fl:?i IU
( 10- N -
.n{ E IU 1
(o 10'
10'
10{ 10' 10' 102 FRE0UENCY,t-iz (u) DisP'l acenent
100
10'
wR 731A -5- e LO" .l-N
10- u)-l
10-{
10'
.n{tu
FREOUENCY,HZ (b) Acce'lerati on accelerationspecificat'ions Fig. I - LlG0 Displacementand (equivalent)
27 o L :1 o ss0 o L fo T' dto o J o L = o :tt o o L o- at c a,ea 'o c o -o bu o o o
t25 250 500 1,000 21000 OcLovebond Centen Frequencg Hz
sounil levels' Ei-:g. 2 Noise criterion-20 (NC-20) octave bandl Pressure
28 102
(\I i10 - u) E Rotational 45O Ez :E o _g (Jo () F10 L
As sumed Background Level
-1
10 .,1 I 10 10 1ot 102 103 10 FrequencY(Hz)
Fig- 3 Estimated source level of turbomolecular pump. {, m
19 /i {) o0 v, E
at,
ag vt OJ '{J +J E q)
q)
E o o!
c
.{J
4J
o
.lJ o x o '-{ OJ
F
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I
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0 lr |+i ! F.l r+.1
+J '-l
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'rl
31 h
o t+ () qr (, x ri c) ,rm,
e, .A q) q) .E !!
=4t 6t !o e.= e o gEo {r
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o
Fi t)
r|{
o lr r! I
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.rt +r Ll
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-'E
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{J ao "j ="'d2
vi ( inc. I ,-+
Subsysten Coupling Through Bellosrs tJ"" <\^ Fi vi (refl. I
-rNP vi(inc-)
Subsystem Coupling Across a Rib or Radius Change Flange vi 1refl. )
vPltg'
Subsystern Coupling Through a Support to F. The Floor Slab J l-
F.:F. J lr +\-^ n-,+ vslab
Fig- 9 l{odets for computing subsystem coupling loss factors.
35 0
-zu il*ii!t' Eigh Frequency iv^ {f .D P40 Y to iit (D Frequency I E -60 .,,,.,'\'" -9 o o o * .= -80 o Low Frequency -100
-120 4 1oo 101 102 103 10 Frequency(Hz)
Fig. 10 Drive point acce l-erance at turbomolecular pump (radial ilirection
36 -20
i'1 . ivrir ii i x'u til .o -60 t B Ir i to r! o o E -80 -9 I c) luid Frequency <) o
Low F -100 t,' r Frequency Ei,gh' frequency
-'t20
-140 1 1oo .lol 10 103 10 Frequency(Hz)
Fig. 11 Transfer accelerance from turbo pump to beam splitter. 10
10 Low Freguency 7O Prediction 10 nl !- Ji =10 o, o .9 910 c .9 ft, LIGO Spec. b10 ()o Eigh Frequency () Precliction ---__; 10
10
10 -1 10 FrequencY(Hz)
Fig. 12 Predicted acceleration levels at beam sPlitter compared to LIGO spec.
38 OCTAVEBANO FREQ. H:: G} 125 N 5OO 1K 2K 4K 8K
SOURCESIN VSER
Lw of Edward6QP€O Backng Pum A2 66 63 79 79 79 81 73
Lw qf Lerge lon Pump Contoller 60 62 64 65 66 66 65 d)
CombinedLD on Surfacaot VSERin 59,1 38.8 fi.7 34 3 30 6 30.2 3O-8 l8'7 commonwith LVEA
SOURCESIN LVEA iO Lw ot Tu.bornoleculatPump 65 60 55 60 53 ils I
Lw of Cryopump 59 {a 41 U 30 n 25 21
SOUNDPRESSURE LEVELS g 3s s 33 0 Lp @ BEAMSPLITTER CHAMBER 61.5 52.9 47 52.9 45.8 38 5 DUETO ALLSOURCES '19 Lp Criterion,NC-2O| 51 4 33 fr 2 17 16 exceEoaNce 11 13 15 27 24 t9 2 17
OctaveBand Freq.,Hz 63 125 2fi 5@ lk 2k 4k 8k
Lw = SoundPower Level in dB re 10 -12 wEtt
Lp = SoundPr€ssura Level in dB re 20 mictoPascal
Fig. 13 Predicted noise level in end station'
39 Title: DESIGNGOALS/REQUIREMENTSPROCEDURE
I'ESIGN GOALS /REQUIREMENTS PROCEDURE
FOR
LIGO VACUUM EQUIPMENT
Hanford, Washington and Livingston,Louisiana
QUALITY ASSURANCE:
TECHNICAL DIRECTOR:
PROJECTMANAGERI
lnformation containedin this specificationand its attachmentsis proprietary in natureand shall be kept confidential. It shall be usedonly as requiredro respondto the specificationrequirements, and shall not be disclosedto any otlrcr party.
'D d l" r'<'s4 /{t6 b/r/;' lssaFD PtP bF6 O/iz tA/? FEZ REVLTR, BY.DATE APPD DATE DESCRIPTIONOF CHANGE PROCESSSYSTEMS INTERNATIONAL. INC. SPEGIFICATION PREPARED DATE APPROVED DATE IN]TIAL NumberAV0494-095 Rev. 0 APPROVALS .) )^ tq) 6-/-q4 rtqc s//ta
PageI of 7? PROJECT DESIGN PROCEDURE T|IIE GOALS/REQUIREMENTS
19 PURPoSE
Thepurpose of thisprocedure is to defineinstructions for preparingthe Design Goalsff,equirementsForm for the LIGO project.
2.0 GENERAL
As partofthe LIGO projectmanagement plan, PSI hascommitted to generatedesign criteriafor for eachsubsystem and major component. The design criteria is to be listedon the DesignGoals/ Requirements form, TheDesign Goals/ Requirements form is to be completedas an initialactivity and serves as a baselinedocument against which the design is developed.The purpose ofthe DesignGoals/ Requirements form is to assurethat the resultingdesign is compliantwith all ofthe requirementsof the Contract,Statement of Work, TechnicalSpecification , and good engineering/design practice.
A projectDesign Goals/ Requirements master file is maintainedby the technicaldirector. As with otherdocuments the DesignGoals/ Requirements Form shouldbe datedand if changesare madethey should be notedby the revisionlevel.
3.0 RESPONSIBILITY
It is theresponsibility ofthe cognizantengineer to prepareand issue the DesignGoals/ Requirementsform. Theform is to be reviewedby thetechnical director prior to issue. Eachelement of theDesign Goals/ Requirements form shouldbe signedoff whenthe requirementhas been completed by incorporationinto lowerlevel project documents includingcalculations, specifications, drawings, manufacturing, test, and installation procedures.The Design Goals/ Requirements form is to bereviewed, updated and issuedas part of eachdesign review meeting minutes.
ATTACIIMENTS
Attachedis a list of componentVsubsystemsfor which a DesignGoals/ Requirements form is issued. SPECIFICATION
P.gc --i-- ot o (ttct o-
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G o (! ts od '--= 0) o (E 't uJ (o< ! o o (, o @ 7;- .g .s a o E -9 o E (! ID o =s?! o E 'r @ E o F o, o T o o o 3ct e q, .J (! -o @ .J o) E FE.EU<@ o = o ll) iJ>JN t e 5 o c E I _s, 0t n;n ri (l) E o o lz co J- t c! ta) () 0l a o - x.9 CI ts ]A tj) rJ) o L !i;iE E o o iEEE hi -g (, (, E ()o o o) tu (! ltt d) G o E d] o () q, o, a (l) (l) o q) o q' o o q, Q' q) o o ID o it) o o lt) iD ltt -o 6 iD -o -o -o E c) E _9 E E E '- E E E E E E E E E E E E E E E E E E E E E E E E E o o o o E -e |E I .9 .9 .2 .9. .9 .9. .t!) o o E ! ! E i ; E E . - o a o G .! .q .q .E .g .q () q (J (J u o t-: () E () t o z u) dl co o ci tr ci ci ci o a ci ci tr t o E d cri F .t! {) o,) {t) 6 E n e E - = $l b b o @ 'a '6 6 t b .' '6 .E .; (l) E E ; ; - Q) o 0) o (! a) o E o E o o o o o (! o o) o o N o o .) c -> 2 .> o {, o q) E 6 Y .g e ' .E 3 o 6 '= - o E E E '- E lt qt l (ll -g o o ID o o o ) t! q) E 'F ,9 F F o o Cl (, E 0, N ' I o (E 0, (, o ; o G d) o E d) 6 o 6 ,E (! _q o () o (E tr () E o o E o 0t '6 -qt 'o o (E (E 3 .) T d) .) ID o) o a) o g uJ o o 0) 6 E ot o) o o, o o o l o o o o o t l z z a f 3 o tt IL E. t o 3 E (tl G fil od o cd o ao .q c = ct o) o (D ID {! u) o o () G z E ll, o 6 o f (! G t! a? t E tl) .e 6 I o ra, n) E .) f ot c a) o i) o 3 G o '- c E G o rl. (L {) (, q) a, o CD o q) (, '6 ) 'E lu E o q) (E i! o .= {) q) o o o o) uJ oo o N o o .E a ID c .9 € o (! o m a o I 0t o @ c a) E q) o E F ID {) o (, G q) tr (! G E @ E o o -q U' 6 @ o o tr uJ o IL IL o E E ' = !s g (l o o I q} l! B tl, E 5 I 'o o o q a o (\ |l) c0 F \ ': .' I It) () tr U) ttd lr) ri ui o o_ E = (J 0) |a o ot o) d) (l) o o o q, o, ot o g o 6 g ID E E E E E E E E E E E E @ (o C" ut l{) rr) E E (l o o .4 - E (E .q .! .q (E o .q o) at) uJ E d E tr E & U) ^ tr o o '6 o (t o E E o .= 'a E z ()E q) z o '6 ID j (1, E 0) o () _9 c) .4 ll) 5 E ct) G o ID o : o i @ o o (! E tl o .9 (! E ll) (1, .; o -> LL C\I 6 ct o o q, a = .e o E o _g g E + ID o o o (! i {) 'E + () o o) -g rD o E (! G {t) o o E E t- C, l! cl l o il) .= I o ; :2 il, o o E o o {) E E N G o = o (! E q) F o E oa .5 E 0) 6 E .E (5 il) o o E E g o .9 I (o q) E F c 'tr o ,! o) (, e E {, .d lE '6 = .E.E E o - .9 - o .E .N o o E o oo ll, o -q _9 o E = 'F o 5 = CI .E o E uJ := c (! 0 E ': o c! E ': o '6 o (! .: .. E E g o E O llJ o o (.{ (o 0i = I '6 ql o (l) o o E a0 o o) C' d, .) IL .\l : @ o o @ E (rrF E ortr ;9)x, .e16 o_9f o oiroo w ';r N (! \ o t- .f- I N o ot q t ) N c{ o \ q ,q o "\ c! o o l., N (, d (\'l o Ntr'.r 6i ni .n 6t (D .\ t t t i^t \ N c! o .! o F ..J o' 6l N c\l (\l \. o o, o' 9_ 0t qt +- \R (J 3 t o (! .be o o N o o q) u LIJ t! UJ IJJ UJo E9 (! (\'l N (\'l N ry o oo o o CD o .rl 6 a t u)T L< { L IL o \| o (Uc't o tr (o uJ o E o- t z uJ I t @ tr oF = tr z L :) z |- I = 2 = = tr E $ ]U fi o o UJ J 0- t I t F x z tr F Iu i l! tt E. co {, a p E E. z E v UJ E F uJ o N t! o t: ul L E F tl x lrl o : o z UJ r!) tv z 1! F uto (L z F F -j o o LU o z o z F = U' E Lrj IIJ = l! tlj t q tr 8r P F tr T c!- = J E IJJ x F = E. z oq o ul F q- gz o lr- ff lf tt '6 ui UJ o l! lrJ I ! !) z z f, LIJ t UJ o 0) = J tr : o E a\l F = E5* .E F F_ o 6 l! b_ F F o o) z F I o E D E. d F U z ul uJu, tr .2 3 E = lJ- E x E g o 5 J V z o tiJ = |- EE :3':,== o 5 ul o o (J E z t 3 U' o uJ uJ L o- '5E 65 e{ 0- E : E F lo q I l = J ; (L ul 6 l ; o o o- J U !o f, o o u- z F N ul tLi o F E I e99.93 c'|Po '6ot v o o $gFo a o EI N (o q .! a\ tt o ,3 ii ? ^E o E c 8,iE P (, o = S-PpBer x o 6 t! v, 3 o E QE E 'o6=.r6 o irtsF o xiHo6 o o (, t q' t N o r! o rt t -t', V II o N 11 tr- I a t a? I ry N: (Yt c! c.i E c! 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J o E JJ J 6 a rl) o E E :z g f E Y z o UJ A t z E a F LIJ o X d ul o c F JJ x o- o F IY x.u.t 5 l I t ) .g *lqf,;= t) z z = o z N t = N a, q) o :gg9".P3 = E'P0, '6 = O;H0a N It) l) o ni "i (J E Zfrv, !.i (l) ii E 6 r€ E o .!L:r ; '9 E o CL o E o o o J F-sts*-$pfiF () 6 o o (o-3 E QX E .r,5=ial>t o irtfF o rlrof ciEaoo o ,9 t) I : c {, N -i E E! t tl, (r o Nl d o (o ry \tt\a: c! c! o N C! .s4 o \ I 6 c B'B' o Eq t) p9 IU c, oo o c'r qo io- (, 6 a!< "I a\l 0) ot a z J t ztr irJ z o F t U' z L g o- ul (E = E llJ d z o o x, u- z Pz 9 F z t V. F ' { o Y Eg o o o = o uJ (9 E=s -B qI Y , U> o t rJ.l EF tU J EEH o v. @ o F uJ E x J F E. o_ .g *Srf,!= I z E J a o o :ggg^P3o ot 9Htro O;do (.) o) o a N o E=Eo o c p" o (r E,:EE o q) c = F-stp.Fefix co{ tNO EF * ! Ei. SE=$S\:!..'\ AB t' tl 5 E; u..E[F .= >, Ef5 iE .: a? n n ...: c! a.; ..i a.; d; c.; E I o (.) 0) !) .J c, 0,, (D + + OE (\ c\l c.l c\l N (-.l c.l (\ + rf \t s r+ OED ir 0) E c u b! ox a) I q) (u '= ,!J ' > q) o0 .F o a it) I OJ ==E o) os q.) ,o .tiqtr .0, o >o\Elrro 0,) tqr q) aXa g: tI. () xx= i.: xv €) \JF\-/ -: (.) ' .n Ct cal t! q e) f,>XrubE U z 2 c.i c.! c! c! cl c'l q) E (.1 I a.l cl cl cl Gi c\ c\ ti .? o .{) ciE(|) oo c.l c{ cl N c.l a-l c..l at) ZE 0) o :.E I o s . c.! n - c.l c.i cl c\ c.; q) rL) i,) !t) o o) o) t s otr ot N f\l (-.1 c\| ..l c.l AE $d 9 cBx O.i o. ra) >a: >: I a Eq,) F od (t b0 o !1, a! = o) ,xaq bI) (t Q.) c) ;5: Rid =ox RXE C) c, > o\ lrl '^ 4 av) Q.t E o3o Ei {) €) r'1 O\ /'1 - tr xv B |) ;:x (d o -l>'lotca< I jj q t a o q) al cl (\ c.l (\ c..l I ,a; ,.i ,.i n dE e! ZE c't c.t al c\ c.l c.t e.l o c) rO 3.E ? o + + $ $ $ 6 t) ..zE a tr.l t! 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E o I ID I a E q) o tr q) E o (D o () o = () 3 = oAgEe-gH o v cE cE '6 9E 0- o Y Q) ct E9FG o o 9 I N a ,q q (D ..8 6 at o |J) () ra) (J) ro r') |n o E E :E b aD (L *H8E..,.,5 c{ u, ct IS @ E o o J nlct N CD F E o t E g E o o o E .E o o E o tt) rt) E = o o o o (J F lt u- o = = = o t t ci t t E. .E & o- .L t ci ci o o 3 .o .: o (, o o ID E x tl,) o N c a) OJ .t .9 tr (t o o () o q) E o o o) !) o o q) (u o o E E o o o o 3 o .! c) ilJ t: o o E 0 (! Y t (9 a (, E N o = o o iJ o o = o o t o a! (g o z z o ' at) l.L u- U- IL l! t! lL l! F = !0 o e Y a o o E EI o o € -o () c q) @ o 0) q) cl E -c ()c) q) o ' q) q) E o o e '6 I e E o) z tt o {D E E E (J o f E (o o o (! t (E .!! :F .E 'E E.e 6 E E tl E q) (l) ) o q) o ; E ao a) o o 3 N E o q) q) o o e q, -5 !) (! E ) or .E q) E o o * E q) i: o o o) E (! o (D tu .! o q) : q) 0) o o o (! r[ o x gt o o o .; o o e o .e (l) c q) q) rt c 0) E q) '6 E = o X F I o c) (l) o c P 9) {) .g o -g o o I o E .: o tf lu CJ (l) o l! 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'6 ll' E =5 E tt (J 0) cDl () o v, n) o u ot o I E o E', ol (o o .= o o rt c (! o t, llJ I 0, E ; E o fllsf,?I q) q o o c ' (|) s c ol o o o, o .9 n) N UJ : z ;9gs^€5ri .9 c co ol N tg ! 9 \f c) a) n (..l cl .1 crl F-, C.l c'.l a'l c\t c\t q.) c.i T r.i + .+ tri € s h c.l (.1 N cl| c! o.l N N c.l c..l N e.l o.l c'.l <- $ i * r+ $ sf Oh! Eg z € o0 o.) n) b0 '= gt) Q o € (.) q) cd a I 0) .9'' (.) GI c.l ol J q) (|) -c.tE c 6I) !Ps I a a) (.) l=.v) E d () b0 oo x U dv,h !3. rd F tB01 F J o) al e U bo o :+: 3 t lr tsl (J i (u a.l v q.) I 0) o0 !q ol 4 U (d !4 I UHU ='-: fl F B ot) 6t co .>' .a€ olJ>J..rcac0 Q a.l g o.l (..1 N U a.t ij v'l v'l v') v') ol I ..,?.{? ..? el .: o \ cit uDl ZE N c,.l e.l a.l et c.l e.l c.l a.l N c.l N eDl a; AI I 3.E-d ? { s i s s + s x $ SPECIFICATION FOR ROUGHING PUMP CARTS FOR LIGO VACUUM EQUIPMENT Hanford,Washington and Livingston,Louisiana PREPAREDBY: QUALITYASSURANCE: TECHNICAL DIRECTOR: PROJECT MANAGER: Information containedin this specificationand its attachmentsis proprietaryin natureand shall be kept confidential. It shall be usedonly asrequired to respondto the specificationrequirements, and shall not be disclosedto anyother party. 4 -> ln lto/ct ,\tu) 3.za'?L P{L/ISrD A{c OEo O t o<> -2. Z /ttr''h,h, 1^^r.-r -) - r ar 4{utsro Fuz P4nalrJE nto Ca3+ 'b pEP ,dn tt/q/qr L .{tJ '^ 'a c\' PE SEo aLt[Nr /_o,^.r/.rEE OEO ooE -/tt ./taiq: -D.h/!0to-?9.+ /{;a:EA AUD tsgaEZ rcL64,7tr,opd Atf?Owt/Da "^q ", ?l 7 : 9-)i-4{ iir vr(r,r Fun iFr,1.1') :)a"1:4r,-,7,""xtDeltd^/ REVLTR,IBY-DATE I APPD.DATEI DESCRIPTIONOF CHANGE PROCESS SYSTEMS INTERNATIONAL. INC. SPECIFICATION PREPARED DATE APPROVED DATE INITIAL .ANumber V049-2-{r0l Rev. APPROVALSZ 3ru\*qe fnlti fltd 7/e"/9s 3 Page I of d rllle spECIFIcATIoN FoR RoucHING puMp cARTS TABLE OF CONTENTS 1.0 Scope 2.0 Schedule 3.0 EquipmentRequirements 4.0 DesignRequirements 5.0 RequiredDocumentation 6.0 ShopTesting 7.0 Inspection 8.0 Warranty lAttachmentA Quality AssuranceRequirements Summary I lAttachmeltB V049-2-033Rev 1 i CeneralEquipment Requirements i.A.ue€hffi€rt+ +049-a4f+R*+t- i Bunpea*+*ang€88€etF z q -o I @ SPECTFTCATtOf{ umberA FeY. vo49-2-ool 7ot t Tille spEcIFIcATroNFoR RoucHrNGpuMp cARTs 1.0 SCOPE This specification covers the minimum requirements for the design, materials, fabrication,assembly, inspection, testing, preparation for shipping,and shipmentof roughing pump carts. Separatecarts shall be providedfor the roots-typepump and for the backingpump. All attachmentsare part of this specification. The specified equipmentis intendedfor use as part of the Vacuum Equipmentsupplied for the Laser InterferometerGravitational-Wave Observatory GIGO). LIGO, which is operatedby Caltechand MIT underan NSF contract"includes two installationsat widely separatedsites: near Hanford, WA andLivingston, LA. Eachinstallation contains laser interferometersin an L shapewith 4 km long arms, a vacuum systemfor the sensitive interferometercomponents and optical beams, and other support facilities. Information containedin this specificationand its attachmentsis proprietaryin natureand shallbe keptconfidential. It shallbe used only asrequired to respondto the specification requirements,and shall not be disclosedto any otherparty. 2.0 SCHEDULE 2.1 Equipmentdelivery (for pairs of carts)shall be as follows: Quantilv Date WashinetonSite: 2 sn/96 LouisianaSite: 2 8/10/97 z 3 TotalRequired 4 o Acceptancesat the sites(the start ofVendor's warra4typeriods) are expected to occuron ll', a staggeredbasis, with final acceptanceto occurno later than 6 monthsafter delivery' I o SPECTFTCATtOI{ NumbcrA vo49-2-oor RGv. 3 P!ge ol SPECIFTCATIONFOR ROUGHING PUMP CARTS EQUIPMENTREQUIREMENTS 5.1 Eachpump cart (set)shall be capableof roughingdown a volumeof 2,000cubic meters from 760 torr to i torr without overheatins. 3-Z Deleted. J.J The minimumrequired pumping speed at the pumpinlet at 1 ton is 500 cfm; at 0.1 ton the minimum requiredpumping speed is 1000cfm. The pump set shall be capableof roughinga volumeof200 cubicmeters from atmosphereto 1 ton in 4 hoursor less. lr.+ Vendorto speciff systemperformance when cart is separated(see paragraph 4.I .1). 4.0 DESIGNREQUIREMENTS Thepumpcarts will be requiredto operateunder two distinctoperating conditions: Beam Tubeevacuation and Vacuum Equipment evacuation. 1 BeamTube Pumping Themain roughingpumps will be usedto evacuatethe 2000-3 b"urntubes. For this casethe roughing pump carts will be separatedby approximatelyl0'. It is the intent of this specificationto allow this cart configurationto be the suppliers standarddesign. The beamtube evacuationwill occur during initial stagesof constructionprior to completion of the Vacuum EquipmentBuilding. During this phase, a temporarystructure will housethe pumping cart system. The pumping carts will be locatedon the BeamTube Anchor Foundation (see Attachment D). VacuumEquipment Pumping For evacuating Vacuum Equipment during installation and maintenance,the pumping cartswill be separatedinto two sections. The first stageblower will be closecoupled to the VacuumEquipment in the VacuumEquipment room. The first stagepumps will dischargeinto a vacuumheader connected to the second stageblower and backingpumps which will be locatedin a separateMechanical EquipmentRoom (to minimize noise and eliminatethe requirementfor supplying large quantitiesof cooling water into the Vacuum EquipmentRoom). The vacuum equipmentsupport structure for the final configuration of the first stage blowerwill beorovided bv PSI. SPECIFICATION Number- A vo49-2-oot old SPECIFICATION FOR ROUGHING PUMP CARTS 4.1 MechanicalRequirements 4.1.1 Eachcart setshall consist ofa roots-typeblower cart backed by oneor moremechanical pumps on a separatecart, and accessoriesdescribed below and on the attachedP&ID Bypassvalves shall be providedif requiredby the vendorsdesign. Initial opemtionwill have the blower and backing pump separatedvia the 10' of flex hose betweenblower dischargeand the backingpump. Futureoperation will havethe cartsseparated via 10' of flex hoseand a vacuumheader. 4.1.2 Each cart shall be a completesysiem mounted on a frame suitablefor operationin a Federal Standard209 Class 50,000 environment(cleanroom). Vibration isolation supportsshall be included.Castors or palletjack accessmust be provided for eachcart. 4.1.3 The designof the cartsshall preclude contamination of the vacuumchambers during the life ofthe equipment,even in the eventof equipmentfailure or operatorerror. 4.1.4 The processinlet to tlre cart shall be suppliedby others. Sealsshall be non-lubricated bakedViton O-rings. 4.1.5 Theprocess outlet fiom the roots-typepump cart shall incorporate a 10' long flex line for cormectionto the backingpump or in the future a vacuumheader. This connectionshall, dependingon therequired tube size, be anISO QuickFlange or LargeFlange with double claw clamps.Seals shall be non-lubricatedbaked Viton O-rings. 4.1.6 Provisionfor sealedconnection to a ductedfacility exhaustsystem shall be providedon the backing pump outlet. 4.1.7 Thereshall be no oil in thepumping path. 4.1.8 Any requiredutility corurections(such as for coolingwater) shall be manifoldedto a singlecormection point andterminated appropriately (such as with an isolationvalve and a 1/2" quickdisconnect fitting). Filtered cooling water will beprovided as follows: SupplyTemperature: 20-25C SupplyPressure: 3. - 5.bara ReturnTemperature: 25 - 30C RetumPressure: 2.- 4.bara Coolingwater hose kits shallbe providedto interconnectthe blowercad andthe backing pump.The hoses shall be l5'long. SPECIFICATION Pege 5 ot Tille SPECIFICATION FOR ROUGHING PUMP CARTS 4.1.9 The rcots pump cart inlet nozzleshall be locatedat as low an elevationas possible. A blind flange with a gaugeconnection and suitablevolume for shopspeed testing shall be provided. 4.1.10 The acousticnoise and vibration requirement detailed in Section5.1 of AttachmentA do not apply to the roughingpump carts. 4.2 ElectricalRequirements 4.2.1 InstrumentationRequirements i 4.2.1.1 Thereshall be Piranivacuum gauges located at eachpump inlet (boththe rootspump and I ttre backing pump). Bakeablevacuum gaugesare required only for the inlet (chamber i side) of the tools blower. A local vacuumgauge readout controlier shall be provided. I The vacuum gauges will remain with the roots blower when the backing pump is I remotelylocated. 4.2.1.2There shall be auxiliary valved (manualvalves) ports to allow cornectionof a leak detector. 4.2.1.3All unusedports shall be fittedwith blankoffflanges. i4.2.1.4A purgegas flow switch(or pressureswitch) shall be providedto shutdownthe cartwhen i thereis insufficientpurge gas flow (or pressure).An adjustable10-60 second delay timer i shallbe includedin the shutdownlogic to preventspurious shutdowns. z 4.2.2 ControlsRequirements 4.2.2.1Controls for local operationshall be provided. The Buyer will intercorurectthe cart wiring when they are installedin the split locationfor VacuumEquipment pumping (terminalsto be providedby the vendor). In addition,provide terminal stips in a junction box to interfacewith the future LIGO control system. The following signals shallbe orovided: o SPECTFTCATTOIrl Numbrr - Rov. A vo49-2-oor 3 Prge of Title SPECIFICATION FOR ROUGHING PUMP CARTS Description SignalType PumpRunning (Each Pump) Dry Contacts Auto. Valve Open Dry Contacts RootsPump Inlet Vacuum 0 - l0 VDC BackingPump Vacuum 0 - l0 VDC iPurgeGas Shutdown Dry Contacts 4.2.2.2The pump carts shall be self-containedso that, underpower failure or pump failure, interlocks shall preventpumped chambers from being ventedor from being exposedto a non-operatingpump. 4.2.2.3A manualgate valve on the chambernozzle will be providedby others. A fail closed pneumaticallyactuated 6" UHV gatevalve (with pilot solenoidand open and closed limit switches)shall be providedon the inlet of the rootspump cart. The controls necessaryto closethis valveon pumpfailure shall be incorporatedinto thecart controls. l+.z.z.t 4.2.2.5Pumps shall be stoppedand startedby pushbuttonswitches located on the blower cart. The backing cart shall be capableof being started and stoppedby a signal from the blowercart. 4.2.2.6Yendormust list in his quotationall safetydevices (such as flow switches,pressure z 3 switches,temperature switches, safety relief valves, etc.) supplied with the systems. o 4.2.2.7Vendor must provide in his quotationa brief descriptionofall operationalsequences such as startup,normal quotation,normal shutdown,safety shutdowns, etc. o f specrrrcnnorl FeY. f.-*A -rr*r-". --3-ot Tllle SPECIFICATION FOR ROUGHING PUMP CARTS 4.2.3 PowerRequirements 4.2.3.i Powerconnection to the cart shall be by an appropriate20' long cord with twist-lock, NEMA type plug configuration(a singlecormection for the cart includingcontrollers when configuredas one assembly).Required controllers and overloadprotection shall be provided on the cart. Vendor must provide specificationsfor the power and control cablesneeded to connectthe separatedcart components.The field wiring cableswill be providedby the Buyer when the blower is remotelylocated. Vendor will providethe cablesneeded when the cartsare locatedtosether. 14.2.4 Purgecas I Clean,dry, air will be suppliedat 80 psigfor useas sealpurge gas for the vacuumpumps I requiringrhis utility. 5.0 RIQLTIREDDOCUMENTATION Documentationrequirements listed in Attachment B and attached Q.A. requirements form, AttachmentA shallbe provided according to theBuyer's schedule. 6.0 SHOP TESTING In addition to the Vendor's standardtests, eachelectrically poweredvacuum pump caxt shall be testedfor speed,ultimate pressue, leakageand operationof protective features. All safety interlocks shall be tested for proper operation by simulating the faulted condition. ?.0 INSPECTION All testingand inspections called for in AttachmentB (SpecificationV049-2-033 General Equipment Requirements)shall be performed by the Vendor. Additional quality z assurancerequriements are listed in Attachment A, AssuranceRequirements 3 Quality o Summary. 8.0 WARRANTY Refer to SpecificationV049-2-034, Equipment Purchase Commercial Requirements for Wananty Requirements I speclrrcerroI "u'*'A ReY. I "-"r"t 3 ol f g. ar trl .i o\ t ol ol g .i A z 2 Q F Fr >:l ttl l) I I z7 F =z D (.)o F -F z z a3 U '.1 l! 2aF z =z gl U) z z J ai Fr >,= F z F q) 5 Fl< z z gl z llt E fax !'t! J F o 7 U a { 5 F t! { q) z D z z o ln o F F O z J E] a o tr Fr Fr =F .i g. 7 qt q.l E F.) z a 3> 9" EI -E;i I EI 7 >tlr Title: SPECIFICATION FOR MAIN TURSOMOLECULAR PUMP CARTS SPECIFICATION FOR MAIN TURBOMOLECULAR CARTS FOR LIGO VACUUM EQUIPMENT Hanford,Washington and Livingston,Louisiana PREPAREDBY: QUALITY ASSURANCEI -D TECHNICAL DIRECTOR: A vu.-ru)!J2u,'*, PROJECT MAITIAGER: Informationcontained in this specificationand its attachmentsis proprietaryin natureand shall be kept confidential. It shallbe usedonly asrequired to respondto the specificationrequirements, and shall not bedisclosed to anyother party. + P4? o/ oo ./n31,/qt I l.- r L{, /?:r,sto 0Z'o /n /z/st/q, V 1"" ,.t, t -2-+ P€t'tsFoFoR Pqnc/tlsE DEooo3+ z ,4A tt/1/cr REL,t sED PFR CLtL.Nf .a,'tq{/J i\ aL'c 20ii -o- ,/a t,/r/cr REutsrunrlnehuf/Jrc Pg Z o uo+q otl To P2 -b. a_ ./a rblJr h LLt /o-4-g< ArusFt 4 ts TABLE OF CONTENTS 1.0 Scope 2.0 Schedule 3.0 EquipmentRequirements 4.0 DesignRequirements 5.0 RequiredDocumentation 6.0 ShopTesting 7.0 Inspection 8.0 Wananty AttachmentA Quality AssuranceRequirement Summary AttachmentB V049-2-033Rev. 1 GeneralEquipment Requirements i.ertta+nrctt+ \r0affifl:Rrrr# -++mega*+*angemen+- 3 ,o SPECtFTCAT|OT{ Numb.iA R!r. V049-2-002 'f Lol Tllle SpECIFICATI0NFoR MArN TURBOM0LECULARpuMp cARTs 1.0 SCOPE This specificationcovers the minimum requirementsfor the design, materials, fabrication, assembly,inspection, testing, preparationfor shipping, and shipmentof the main turbomolecularpump carts(and backing pump carts). All attachmentsare pan of this specification. The specified equipmentis intendedfor use as part of the Vacuum Equipmentsupplied for the Laser InterferometerGravitational-Wave Observatory GIGO). LIGO, which is operatedby Caltechand MIT underan NSF contract,includes two installationsat widely separatedsites: near Hanford, WA and Livingston, LA. Each installation containslaser interferometersin an L shape with 4 km arms, a vacuum system for the sensitive interferometercomponents and optical beams,and other supportfacilities. Information containedin this specificationand its attachmentsis proprietaryin natureand shallbe keptconfidential. It shallbe usedonly asrequired to respondto the specification requirements,and shall not be disclosedto any other party. SCHEDULE 2.1 Equipmentdelivery (for pairsof carts)shall be asfollows: Ouantitv Date PSI (Westboro,MA) 2 4/r/96 WashingtonSite 4 8/1t96 LouisianaSite 4 8/10197 Total Required 10 z 5 2,5 Acceptancesat the sites(the start ofVendor's wa.rrantyperiods) are expectedto occur on a staggeredbasis, within 6 monthsof delivery. SPECTFICATIOI{ "u"'A uon'-t-oot Rcv. | I+ ol Tllle SPECIFICATION FOR MAIN TURBOMOLECULAR PUMP CARTS 3.0 EQUIPMENTREQUIREMENTS Themain turbpmolecular pump carts are to be usedto pumpdown largevolumes from 1 ton to I x l0-" torr. Theminimum speed at the inlet port shallbe 1,400l/s for nitrogenat I x l0-r ton. The pump set shallbe capableofa throughputof ai least5 ton-litersper secondat a backingpressure of I ton. The pump set stlall be capableof pumpinga volumeofat least2,000 cubic meters (from I torr to I x l0- torr) wilhoutoverheating. The backing pump will be usedto rough pump volumesup to 70 rn' frorn atmosphere. The cart shall be equippedwith a bypassline andmanual valving to allow the turbo pump to be bypassedduring early stagesof pumpdown. Vendor to specify system performance(speed vs. pressurecurve) when the cart is I separated(see paragraph 4.1.1). 4.0 DESIGN REQUIREMENTS The main turbo pump carts will be required to operateunder two distinct operating conditions:Beam Tube Evacuation and Vacuum Equipment Evacuation. 1. BeamTube Pumping The main turbomolecularpumps will be usedinitially to evacuatethe 2000 m3 Beam Tube. For t}ris caseall of the vacuumpump componentswill be mounted on a single cart (or'two frames bolted together). It is the intent of this specificationto allow this cartconfiguration to be the suppliersstandard design. The Beam Tube evacuation will occur prior to completion of the Vacuum Equipment Building. During this phase,a temporary structure will house the pumping cart. The pumping cart will be locatedon the Beam Tube Anchor Foundation(see Attachment D). z 2. VacuumEquipment Pumping o For evacuatingthe Vacuum Equipmentduring installation and maintenance,the pumping cartswill be separatedinto two sections(by the buyer). The turbo molecularpump will be closecoupled to the VacuumEquipment in the Vacuum EquipmentRoom. It will dischargeinto a vacuumheader connected to dry backingpump which will be locatedin a separateMechanical Equipment Room (to minimizenoise and vibration). The turbomolecularcart will be modifiedby PSI to reducevibration transmission o into the vacuumvessels and into thefloor. { xmr.'a ncY, I volr_z-ooz I Tllle spECIFIcATIoN FoRMAIN TURBOMoLECULARpuMp cARTs 4.1 MechanicalReouirements 4.1.1 Each turbomolecularpump set shall consistof a 'hide range"magnetically levitated turbomolecularpump backedby an oil-free pump (diaphragm,piston or scroll pump) on separatecarts. Also included on t}re cartsare t}e accessoriesdescribed below and on the attachedP&ID. Initial operationwill require the turbo cart to be mountedon top of the backing cart. Futureoperation will havethe turbopumpand backingpumps separated via the following vacuumheader: 240' of 4" diameterpipe, (6) 90 degreeelbows, (l) 45 degreeelbow, (1) tee (branch),10' of 1 712"flex hosebetween turbopump discharge and header. 4.1.2 Each cart shall be a complete systemmounted on a frame suitable for operation in a . Federal Standard209 Class 50,000 environment(cleanroom). Vibration isolation supportsshall be included. 4.1.3 The designof the cartsshall preclude contamination of the vacuumchambers during the life ofthe equipment,even in the eventof equipmentfailure or operatorerror. i4.1.4 The inlet connectionto the turbomolecularpump will be a 12" O.D. conflat. I Turbomolecularpumps shall be suppliedwith protectiveinlet screens. '4.1.5I The processoutlet from the turbo purnpcart shall incorporatea l0' long flex line for connectionto a vacuum header. This connectionshall, dependingon the required tube size,be an ISO Quick Flangeor LargeFlange with doubleclaw clamps. Sealsshall be nonlubricatedbaked Viton O-rings. 14.1.6 Provisionfor sealedcormection hom the backingpump outlet to a ductedfacility exhaust provided. I systemshall be I 4.1.7 Thereshall be no oil in the pumpingpath. Any required utility connections(such as for cooling water) shall be manifolded to a single connectionpoint and terminatedappropriately (such as with an isolation valve and z a 1/2" quick disconnectfitting). Filteredcooling water will be providedas follows: = l.,'Supply Temperature: 20 -25C SupplyPressue: 3. - 5. bara Retum Temperatue: 2s-30c Retum Pressure: 2. - 4.bua I I sPEcrFrc4lrot{ l"n% v049-2-002 F.Y.+ P.ge of Tllle SPECIFICATION FOR MAIN TURBOMOLECULAR PUMP CARTS 4.1 The turbo pump shall be portableand connectedto the pumpcartby 10ft. long flex line for vacuum,power, and cooling water. For pumping of the BeamTube the TMP will be mountedhorizontally and hard piped to an isolation valve mountedon top of the Beam Tube. A blind flange with a gaugeconnection and suitablevolume for shopspeed testing shallbe orovided. 4.1l0 Insulated heating jackets with temperaturecontrollers for the turbo pumps and inlet piping (flex) up to the turbo inlet flangeswill be providedby the buyer. The heatersshall be capableof temperatureconhol up to 120C. A1 Electrical InstrumentationReouirements 4.2.1 InstrumentationReouirements 4.2.1.1There shall be vacuumgauges located at eachpump inlet (boththe flubomolecularpump and the backing pump). The inlet to the turbomolecularpump shall have both a Pirani gaugeand a cold cathodegauge, and the inlet to the backing pump shall have a Pirani gauge. All vacuum gaugesremain with the turbomolecularpump when the backing pump is remotely located.Bakeable (to 250C) vacuumgauges are required_only for the inlef (chamber side) of the turbopump. A local vacuum gauge controller shall be providedwith eachcart. 4.2.1.2Thereshall be auxiliary valved,(manual valves) ports to allow comection of a leak detector. 4.2.1.3 All unusedports shall be fittedwith blankoffflanges. i4.2.1.4A purgegas flowswitch (or pressureswitch) shall be providedto shutdownthe cart when I ttreieii iisufficient purgegai flo* (or pressure).An adjustable10-60 second delay timer z i shall be includedin the shutdownto preventspurious shutdowns. I o G SPECTFTCATTOIrl l{umbfi - AeT A v049-2-002 t Prg. ol Tille SPECIFICATION FOR MAIN TURBOMOLECULAR PUMP CARTS 4.2.2 ControlsRequirements 4.2.2.1Controls for local ooerationshall be provided. The buyer will interconnecttlle cart wiring when they aie installed in the split location for vacuumequipment pumping (terminalsto be provided by the vendor). In addition, provide terminal sfips in a iunctionbox to interfacewith the future LIGO confiol system. The following signals ihall beorovided: Description SignalT)'pe PumpRunning @ach Pump) Dry Contacts Auto. Valve Open& Closed Dry Contacts Turbo PumpInlet Vacuum(2) 0 - 10vDC (2) Backing PumpVacuum O. 10VDC PurgeGas Shutdown Dry Contacts 4.2.2.2Ttre pump carts shall be self-containedso that, under power failure or pump failure, interlocks shall preventpumped chambers from being ventedor from being exposedto a non-operatingpump. 4.2.2.3 Amanualgate valve on the chambernozzle will be providedby others. A fail closed pneumaticallyactuated valve (with pilot solenoidand openand closelimit switches)shall be provided on the outlet of the roots pump cart. The controls necessaryto close this valve on pump failure shall be incorporatedinto the cart controls. z 4-2.2.4 c = 4.2.2.5Pumps shall be stoppedand started by pushbuttonswitches located on theturbo cart. The o backing cart shall be capableofbeing startedand stoppedby a signal from the turbo cart. The control system must include a safety permissivethat requires the turbomolecular pump foreline pressureto be < 2 ton beforethe turbo pump is allowed to start. 4.2.2.6Vendor must list in his quotationall safetydevices (such as flow switches,pressure switches,temperatwe switches, safety relief valves, etc.) supplied with the systems. 4.2.2.7Vendor must provide in his quotationa brief descriptionof all operationalsequences such as startup,normal operation,normal shutdown,safety shutdowns, etc. o SPECTFTCATTOT{ Number - ReY. A v049-2-002 of rlllc spEcIFICATIoNFoR MAIN TURBOMOLECULARpuMp CARTS 4.2.3 PowerRequirements 4.2.4 PurgeGas .Clean.dry, air will be suppliedat 15psig for useas seal purge gas for the vacuumpumps requiringthis utility. 4.2.3.1Power connection to the cart shall be by an appropriate20' long cord with twist-lock, NEMA type plug configuration(a singleconnection for the cart, includingcontrollers when configuredas one assemblyand two cardsand plugs when separatedinto two sections). Requiredcontrollers and overloadprotection shall be providedon the cart. Vendormust providespecifications for the power and controlcables needed to connect the separatedcart components. Field wiring cableswill be providedby buyerwhen the turbopumpis remotely located. Vendor will provide the cablesneeded when the turbopumpis locatedon the cart. REQUIRED DOCUMENTATION Documentationrequirements listed in AttachmentB and the QA requirementsform, AttachmentA, shallbe providedaccording to theBuyer's schedule. 6.0 SHOPTESTING In additionto the Vendor'sstandard tests, each electrically powered vacuum pump cart shall be testedfor speed,acoustic noise, ultimatepressure, leakage and operationof protectivefeatures. All safety interlocks shall be tested for proper operationby simulatingthe faultedcondition. 7.0 INSPECTION z 3 All testing and inspectionscalled for in AttachmentB (SpecificationV049-2-033, GeneralEquipment Requirements) shall be performedby the Vendor. Additionalqualiry assurancerequirements are listed in AttachmentA, Quality AssuranceRequirements bummary. WARRANTY Referto Specificationy049-2-034, Equipment Purchase Commercial Requirements for I WarrantyRequirements. (! { ncY.+ ot F] A .l as ol o\ UI .i z d z ci z H E H g 9.) 9) x )?l E w43 T1 FI elll s,rly{ zl X X X X qtl urproceu X X X X X X >l f .1 SPECIFICATION FOR AUXILIARY TURBOMOLECULAR PUMP CARTS FOR LIGO VACUUM EQUIPMENT Hanford, Washinglon and Livingston,Louisiana PREPAREDBY: QUALITY ASSURANCE: --b. TECHNICAL DIRECTOR: & PROJECT MANAGER: Information containedin this specificationand is attachmentsis proprietaryin natureand shall be kept confidential. It shall be usedorly asrequired to respondto the specificationrequirements, and shall not be disclosedto any oth€rparty. J ./n? 3/rr/% L r.-|a, 3-O.51.Fen35a F4 f4"eaftr4 4€0 Oloz) L 4n /'hr/f, 4(nstr1 fr/z PqncH,rs€ OE6 oo3+ ,/*,4shr P(utsFo PEp cLsrD 4n? CDM\I{NfS lfo oo/ !' n .lrrt hlc/rt REtn) y' /ssaFD tz otooottTe, SPECIFICATION TABLE OF CONTENTS 1.0 Scope 2.0 Schedule 3.0 EquipmentRequirements 4.0 DesignRequirements 5.0 RequiredDocumentation 6.0 ShopTesting 7.0 Inspection 8.0 Warranty I AttachmentA Quality AssuranceRequirements Summary I lAttachmentB V049-2-033Rev. I GeneralEquipment Requirements @iagraffi z (D { I tlr.b.r - BaY. I A volq-zoor 3 Pqa --J-- ot J- nte SPECIFICATION FOR AUXILIARY TURBOMOLECULAR PUMP CARTS 1.0 scoPE This specificationcovers the minimum requirementsfor the design, materials, fabrication,assembly, inspection, testing, preparation for shipping,and shipmentof the auxiliaryturbomolecular pump carts. The Vendorshall quote 1) completepackages and 2) individualcomponents. All attachmentsare part of this specification. The specified equipmentis intendedfor use as part of the Vacuum Equipmentsupplied for the LaserInterferometer Gravitational-Wave Observatory GIGO). LIGO, which is operatedby Caltechand MIT underan NSF contract,includes two installationsat widely separatedsites; near Hanford, WA and Livingston, LA. Each installation containslaser interferometersin an L shape with 4 km arms, a vacuum system for the sensitive interferometercomponents and optical beams,and other supportfacilities. Information containedin this specificationand its attachmentsis proprietaryin natureand shallbe keptconfidential. It shallbe usedonly asrequired to respondto the specification requirements,and shall not be disclosedto anyother party. 2.0 SCHEDULE 2.1 Equipmentdelivery shall be asfollows: Quantit)' Date PSI (Westboro,MA) 2 4ll/96 WashingtonSite: 2 8ll/96 LouisianaSite: 2 8/10197 z o WashingtonSite: 3 9ll/97 LouisianaSite: | 3/1198 TotalRequired l0 o SPECTFICATIOI{ ncv. J e dZ rille spEcIFIcATIoNFoR AUxILIARyruRBoMoLEcuLAR puMp cARTs 2.2 Acceptancesat the sites (the start of Vendor's waranty periods)are expectedto within 6 monthsof delivery. EQUIPMENT REQUIREMENTS The auxiliary turbomolecularpump carts are to be used to rough pump annular spaces betweenflange sealsin various components.The minimum speedat the inlet port of the turbo pump shall be 50 l/s for nitrogen. (Oncethe annularspace is roughedto, it will be maintainedby an ion pump suppliedby others.) DESIGN REQUIREMENTS 4.1 MechanicalRequirernents 4.1.1 Eachturbomolecular pump set shall consist ofa turbomolecularpump backed by an oil- free pump (diaphragm, piston or scroll pump). Also included on the carts are the accessodesdescribed below and on the attachedP&ID. Ifa manualbypass around the TMP is necessaryto permit operationfrom atmospherepressure, it shall be provided by the vendor. 4.1.2 Each cart shall be a completesystem mounted on a fiame suitablefor operationin a Federal Standard209 Class 50,000 environment(cleanroom). Vibration isolation supportsshall be included. 4.1.3 The designof the cart shallpreclude contamination of the vacuumchambers during the life of the equipment,even in the eventof equipmentfailure or operatorenor. z 4.1.4 Deleted. 3 o |4.1 .s I I 4.1.6 There shall be no oil in the pumping path. I o Fspecrnceirol{ Rev. m 3 P.9e ol 1 TiIIe SPECIFICATIONFoRAUXILIARYTURB0MOLECULARPUMPCARTS Any required utility connections(such as for cooling water) shall be manifolded to a single connectionpoint and terminatedappropriately (such as with an isolation valve and a l/2" quickdisconnect fitting). Filteredcooling water will be providedas follows: Supply Temperature: 20 -25C SupplyPressure: 3.- 5.bara ReturnTemperature: 5-30C Refum Pressure: 2. - 4. bara 41.8 The processinlet to the cart shall includea flex line or bellowsfor connectionto the roughingports (ISO QuickFlange or LargeFlange with clamshell closure, depending on the requiredtube sizeto meetthe requiredpumping speed). Sealsshall be nonJubricated bakedViton O-rings. Other cormectiontypes shall be as indicatedon the attachedP&ID. 4.1.9 The Buyer will supply insulatedheating jackets with temperaturecontrollers for heating the turbo pumps. 4.2 ElectricalRequirenrents 4.2.1 InstrumentationRequirements i4.2.r.1Thereshall be vacuumgauges located at eachpump inlet (both the turbomolecularpump I and the backing pump). The inlet to the turbomolecularpump shall have both a Pirani gaugeand a cold cathodegauge, and the inlet to the backing pump shall have a Pirani I gauge. Bakeableyacuum gaugesare required only for the inlet (chamberside) of the I turbopump(to 250"C). A local vacuumgauge readout conholler shall be suppliedwith = eachcart. (D I 4.2.1.2Therc shall be auxiliary valved (manualvalves) ports to allow cornectionof a leak detectorto the inlet and oulet of the TMP. 4.2.1.3All unusednorts shall be fittedwith blankoffflanees. o I seecirrcerlot{ ttumorrO Rev, I v049-2-003 of rltle SPECIFICATI0NFoRAUXTLIARYTURBOMOLECULARpUMpCARTS 4.2.2 ControlsRequirements 4.2.2.1Controls for local operationshall be provided. In addition,provide terminal strips in a junction box to interface with the future LIGO control system. The following signals shallbe provided: Description SignalType PumpRunning (Each Pump) Dry Contacts Auto. Valve Open Dry Contacts RootsPump Inlet Vacuum 0 - l0 VDC Turbo PumpInlet Vacuum(2) 0 - l0 VDC (2) 4.2.2.2Thepump cart shall be self-containedso that, under power failure or pump failwe, interlocksshall prevent pumped volumes from beingvented or from beingexposed to a non-operatingpump, 4.2.2.3A manualgate valve on the chambernozzle will be providedby olhers. A fail closed pneumaticallyactuated valve (with pilot solenoid) shall be provided on the inlet of the TMP. The controls necessaryto close this valve on pump failure shall be incorporated into the cart controls. An automaticvent valve and associatedcontols shall be provided to properly vent the TMP during a shutdown. 4.2.2.4 4.2.2.5Pumps shall be stoppedand started by pushbuttonswitches located on the cart. 4.2.2.6Y endormust list in his quotationall safetydevices (such as flow switches,pressue switches,temperature switches, safety relief valves, etc.) supplied with the systems. z 4.2.2.7Vendor must provide in his quotationa brief descriptionofall operationalsequences such startup, twist-lock, NEMA type plug configuration normal 3 as normal, operation, o shutdown,safety shutdowns, etc. 4.2.3 PowerRequirements Power connectionto the cart shall be by an appropriate20' long cord with (a single connectionfor the cart, including controllers). Requiredcontrollets and overload protectionshall be providedon thecart. .5.0 REQUIREDDOCUMENTATION I I Documentationrequirements listed in AttachmentB and the Q.A. requirementform, I euactrmentA, shallbe providedaccording to the Buyer'sschedule. I I I specrncarroi{ "u'*'A Rev. | 3 ol 7 Tltle SPECIFICATION FOR AUXILIARY TURBOMOLECULAR PUMP CARTS 6.0 SHOP TESTING In additionto the Vendor'sstandard tests, each electrically powered vacuum pump cart shall be testedfor speed,acoustic noise, ultimate pressure,leakage and operati-onof protective features. All safety interlocks shall be tested for proper operation by simulatingthe faultedcondition. 7.0 INSPECTION All testing and inspectionscalled for in AttachmentB (SpecificationV049-2-033, GeneralEquipment Requirements) shall be performedby the Vendor. Additional quality assurancerequirements are listed in Attachment A, Quality AssuranceRequirements Summary. 8.0 WARRANTY I Referto SpecificationV049-2-034, Equipment Purchase Commercial Requirements for I Wan"dnryRequirements. I z .D o tqgs331=qq'"{ot{ *"'o'? Fcv. f uno,,r* 3 P.gi ol 7 E. a1 iil t.J tsl o\ EI iil o .i 7 A z .; z ; R U' I !)l I ql u1f, n r-l aill s,rJll z X X X X X X X X x X Etl urprocsu >l ,l z^ 7 z 7 7 & F!i El F tr.1 z qrO Fl U v) 7 |- t! p an 4 s Fl * F .i a z (J z F F rl] z J v> lt) 7 z, O tr Fr z 7 -l Ill 3 J z t! a q.l J th ,l (.) e Title: SPECIFICATION FOR ION PUMPS SPECIFICATION FOR ION PUMPS FOR LIGO VACUUM EQUIPMENT Hanford,Washinglon and Livingston,Louisiana PREPAREDBY: QUALITY ASSURANCE: TECHNICAL DIRECTOR: PROJECT MANAGER: Information containedin this specificationand its attachmentsis proprietaryin natureand shall be kept confidential. It shall be usedonly asrequired to respondto the specificationrequirements, and shall not be disclosedto anyother party. 3- 13-16 /12o Zapnsrnfu,t- hruxm; ?€-r,-bEo-e oo9} goq I 2- tA-crl" (rB lf lrr:. ri Foe P, rr:'r.ri Pen OAo o //-/L'iZ- E€L € kA-.?z> €oe APP /?oL' a Le/ aLnne rtzt,rz H O{O (DE ,h-tq-.'''i r'126 per aOOS PI Relea-seJ'U?n/r1 DEO q-)t.1( t. "'it (t P( itt\ _-T i B Fun ft1;',,1,Fcn, Dtt&ru REVLTR.I BY-DATE I APPD.DATE I DESCRIPTIONOF CHANGE PROCESSSYSTEMS INTERNATIONAL,INC. I SpeCIFtCATtON I PREPARED DATE APPROVED DATE Rev. INITIAL Number V049-2-004 .A 4 APPROVALS F,mw 6f'+111 /ft6 ilu/rt ou PageI of ? TiUe SPECIFICATION F'ORION PUMPS SPECIFICATION TABLE OF CONTENTS 1.0 Scope 2.0 Schedule 3.0 EquipmentRequirements 4.0 DesignRequirements 5.0 RequiredDocumentation 6.0 ShopTesting 7.0 Inspection 8.0 Wananty AttachmentA LIGO QA RequirementsSummary AttachmentB GeneralEquipment Requirements PSI SpecificationV049-2-033, Rev. 2 z 3 (D (D SPECTFTCATtOTI NumberA 8eY. rrn,.n ,' nn,. & Prg. ot Tllle SPECIFICATION FOR ION PUMPS 1.0 SCOPE This specificationcovers the minimum requirementsfor the desigrr, materials, fatrication, assembly,inspection, testing, preparation for shipping,shipment and delivery of the ion pumps for the LIGO vacuumsystem. The ion pumpswill be usedto perform the following functions: a) Maintain an ultra high vacuum in the equipment at the comer, mid and end stationsof the LIGO interferometer(main ion pumps). b) Maintain an ultra high vacuumin the annularspaces between dual-sealed flanges on the chambers(chamber annulus ion pumps). c) Maintain an ultra high vacuum in the annular spacesbetween the double gate sealsand dual seal flangesof the large gate valves which isolate sectionsof the interferometerfrom eachother (valve annulusion pumps). All attachmentsare incorporatedherein by referenceand madea part ofthis specification. The specifiedequipment is intendedfor use as part of the Vacuum Equipment supplied for the Laser InterferometerGravitational-Wave Observatory (LIGO). LIGO, which is operated by Caltech and MIT under an NSF grant, includes two sites (Hanford Reservation,near Richland, WA and Livingston, LA). Each site contains laser interferometersin an L shape with 4 km arms, a vacuum system for the sensitive interferometercomponents and optical beams,and other supportfacilities. Information containedin this specificationand its attachmentsis proprietaryin natureand shallbe keptconfidential. It shallbe used only asrequired to respondto the specification requirements,and shall not be disclosedto any otherparty. z a o o SPECTFTCATTOTrl NumbcrA ReY. L Page of Tille SPECIFICATIONFOR ION PUMPS 2.0 SCHEDULE 2.1 Equipmentdelivery shall be asfollows: Main Ion Pumos(2500 l/s) Description PSI Lot Qty. Delivery Part # r$ Date l8 2500l/s Noble Diode Pump w/2 v0492004Pl LI I 7/1/96 electricallyisolated sections controlledby 2 individual feedthroughs L2 t2 5/1197 L3 5 ll ll197 r8 2-3/4"CF RoughingPort v0492004P2 LI I 7/|96 L2 l2 5^t97 L3 5 tt/t/91 l8 8" CF AdditionalPort v0492004P3 It I 7nt96 L2 t2 51v97 L3 5 ly1l97 20 150'HV Cables v0492004P4 LO 2 5/t/96 LZ l0 5/t/97 L3 8 n/v97 250' HV Cables v0492004P5 L2 t2 5/t t97 L3 4 lvt197 18 Multivacbase unit w/Remote v0492004P6 LO 2 5/1/96 Interface/SetoointBoard z L4 l6 5n/97 3 o 36 Large HV Card w/programmable v0492004P7 LO 4 5/l/96 voltage L4 s/t/97 I] RackAdapter Kit v0492004Pl3 LO I 5^t96 I L4 t2 5ilt97 I o SPECIFICATION Prge ol SPECIFICATIONFOR ION PUMPS iCONTROLLERS CHAMBER AND BEAM MANIFOLD ANNI,JLUS ION PUM?S I AND 75I/s ION PUMP i Total 75 l/s Noble DiodePumo 43 2-3/4"CF RoughingPort 43 5^196 5/1/97 1l/l t97 MinivacPower Supply v0492004PtO i VALVE ANNULUS ION PUMPS AND CONTROLLERS 25 l/s ION PLMP i Total 25 l/sNoble Diode Pumo v0492004Pll 32 2-314"CF Roughing Port 5/t/97 fitv97 32 Minivac PowerSupply v0492004Plo 5/V91 tlv97 I v0492004Pt2 L0 = PSISite; 5/l/96 Ll : PSISire:'7ll196 L2: WashingtonSite; 5i l/97 L3 : LouisianaSite; lli l/97 L4 = PSISite; 5/l /97 SPECIFICATI Tltle SPECIFICATION FOR ION PUMPS Above is for pumpsand cables. All main ion pump controllerswill be shippedto PSI (Westboro,MA) on specifieddates listed aboveexcept for Lot I . Lot I (Qty l) and Lot 3 (Qty l) will be shippedon 5ll/96. Remainingcontrollers from Lot 3 will be shippedas specified above. |.2.2 Acceptancesat the sitesare expectedto occur on a staggeredbasis, with final acceptance I at Washingtonexpected to occurabout May 31, 1998,and about November 30, 1998in I Louisiana. I 3.0 EQUIPMENTREQUIREMENTS 3.I Main Ion Pumps 3.1.1 The main ion pumpsshall have minirpum nominal pumping speeds at the pump inlet of 2,500liter/sec for nitrogenat I x l0-" ton and 4,700liters/sec for hydrogenat I x l0-" torr. The minimum guaranteedpumping speedsfor other gasesat the partial presswes specifiedin Table l rshallbe stated,^The pumpingspeed for nitrogenfor total pressues rangingfrom I x 10-"ton to I x 10-'"ton shallbe stated. TableI Species Partial PressurefTorrl Min. RequiredPumping Speed Huo 5 x l0-e 2940Us H2 5 x l0-e 4700l/s N2 5.xl0-lo 2500Vs CO 5 x l0-ro 2350l/s CO: 2 x l0-ro 2940Us CHt 2 x 10-ro 2150l/s z 3 He 5 x 10'ro 295Us (D AI 5 x 10-ro 590Vs 3.1.2 A singlelarge pump shall be provided. 3.1.3 Noblegas diode-type iop pumpswith a minimumlife of 40,000hours or more operatingpressure of l0-" torr shallbe used. o L q.c,FrcAnor{ RGY. m 2 P.e. ol SPECIFICATION FOR ION PUMPS 3.1.4 Main Ion Prrmps(cell dqign and feedthroughs)shall be designedro allow startingat pressuresof at leastI x l0-" tbn (two feedttroughs). For this requirement,the vendorshall provide a designthat electricallyconnects one half of the pump to one feedtlru, while-the remainin! cells are conn'ectedto the other feedthru. 3.1.5 The vendor shall supply a controllerfor eachmain ion pump with suffrcientcurent capabilityto startthe pumpat a prefsweof at leastlxl0-o to; and run all cells of the pumpunder normal operation (l x l0-" torr andlower). 3.1.6 Dual cablingshall be provided from controllerto pump. 3.2 ChamberAnnulus Pumps 3.2.1 Noble gasdiode ion pumps,each with a capacityof 75 Vs of air at I x 10-6ton, shallbe provided for eachchamber to maintainthe annularvacuum for dual-sealedflanges. 3.2.2 The vendor shall supply a controller for each annulusion pump with sufticient current capabilityto startthe pumpat a pressureofat least5x10* torr. 3.3 ValveAnnulus Ion Pumps 3.3'l Noble gas diode ion pumpsshall be providedfor eachlarge gatevalve to maintainthe arurularvacuum at the valve flange dual sealannuli, as well as the dual gate sealswhen the valvesare closed. 3.3.2 Eachvalve annulus ion pumpshall have a capacityof 25l/s ofair at I x 10-6torr.. 3.3.3 The vendor shall supply a controller for each annulusion pump with sufficient current capabilityto startthe pump at a pressureofat least5xl0-b torr. 4.0 DESIGNRXQUIREMENTS 4.1 MechanicalRequirements 4.1.1 The mainion pumpshall be a singlepump. Thepump will be suppliedwith a 14" O.D. tube on whicli a 16.5"Conflat ftange (CFl is mo'unted.The -pipe - or manifoldon which the ion pumpmounts will be theresponsibility of theBuyer. SPECIFICATION olt Tltle SPECIFICATION FOR ION PUMPS l4.r.zThe chamberannulus ion pumpswill be suppliedwith a 2.5" O.D. tube whch I on a 4.5" I CF is mounted. ,'t.l.J The valve annulusion pumpswill be suppliedwith a 1.5" O.D. tube on which a2 3/4" I I CF is mounted. I 4.1.4 Elecrricalfeedthroughs shall be protected from mechanicaldamage. 41.5. All annuluspgnps shall havea minimumlife of 40,000hours or more at an operating oressureof 10'. 4.1.6 The vendorshall provide mounting or internalsupports for the mainpump (if necessary) to allow the pump to be mountedvertically from the CF. Lifting lugs shall be provided. Seeattached drawine. i4.1.7All ion pumpshalls be suppliedwith a 2 3/4" CF roughingport. i4.1.8 All main ion pumpsshall be suppliedwith an additional3" ConflatFlange (CF) afld 8" i CF blank. ' 4.2 ElectricalRequirements 4.2.1 InstrumentationRequirements 14.2.1.1The cablesto interconnectthe main ion pumpsand controllersshall be provided. 20 i cableswill be 150' long. Theremaining 16 will be250' long. ; 14.l.l-2 The cablesto interconnectthe annulusion pumpsand controllers shall be provided. The cablelength pump. I is approximatelyl0 feetfor each I 4.2.1.3Unused ports shall be fittedwith blankoffflanges. 14.2.1.aThe vendor will submitfull loadpower requirements for eachcontroller. I z 3 (D 4.2.2 ControlsRequirements te.Z.Z: fne main ion pumpcontrollers shall be rackmountable in standard19 inch rackconsoles i (suppliedby others).These consoles may be locatedup to 250 feet (cablelength) away i from thepumps. Rack mount hardware should be includedwith thepower supplies. I t,+.Z.Z.ZXtmain ion pumpcontrollers shall be suppliedwith (2) HV cardsinstalled by the vendor i thatwill providea combinedcapacity of 800MA. I SPECTFtCATTOTrl NumbcrA Rev. rr^/n rr nn/ 2 Paee ot SPECIFICATION FOR ION PUMPS 14.2.2.3All mainion pumpcontrollers shall have remote capabilities that include the following: Run Status Dry ContactOutput PumpFail Dry ContactOutput CurrentTrip Dry ContactOutput StandbyMode Dry ContactInput Start Dry ContactInput Stop Dry ContactInput 0-10VDC analogoutput proportionalto ion pump current. 0-10VDCanalog output proportional to ion pumpvoltage. 4.2.2.4All annuluspump conhollerswill havea single0-I0VDC analogoutput proportional to the ion pump current. 4.2.2.5,\ll annuluspump controllersare not requiredto be rack mountableand will be located within 10 feetof thepumps. 4.2.2.6Vendor shall provide max. starting pressures for all controller/pumpcombinations. 5.0 REQUIREDDOCUMENTATION Documentationrequirements listed in AttachmentB shall be provided accordingto the Buyer'sschedule (schedule later). 6.0 SHOP TESTING In additionto the Vendor'sstandard tests, the first lot (Lot #1) of pumpsshall be tested for speed,ultimate pressure,leakage and normal operation,referencing Table #l located in Section3.1.1 of this soecification.All safetvintedocks shall be tested. 7.0 INSPECTION The inspectionscalled for in AttachmentA & B shall be performedby the Vendor. Each pump shall be inspectedfor dimensionalionformance to approvedassy. drwings. 8.0 WARRANTY Refer to RFQ for warrantyrequirements. SPECIFICATION Pagc I ol o\ u ;d a)t q z A z r'i z B I a X & +4 B 0l ul {4 etll s/]y! X X X X X X X X X X X qlA urpJocau ig selll lsd rol p,begserdog c.l a.l (.t ('.l N eil (.,| N (\| tct Fi lrl Ei ^q Efr tsd X X X X X X 3enq le^orddv o (J Aq v) v) 7 € -l vi o z E,z () z z q1 i'r F F tq z ;,a\ 7 J (.) ah A t! Fr v) 2 z Y i al Ill I z 14 U7 a a 'J o-LJ ci nr t\ I c e o cL., c q li,'irlii; o r.l Title: SPECIFICATION FOR 112AND 122CM GATE VALVES SPECIFICATION FOR I12 AND I22CIM GATE VALVES FOR LIGO VACUUM EQUIPMEI\T Hanford,Washington and Livingston,Louisiana PREPAREDBY: QUALITY ASSTJRANCE: ^b, TECTINICALDIRECTOR: rv Wtc-tJti,luor.-, PROJECTMAITIAGER: Informaiion containedin this specificationand its attachmentsis proprietaryin natureand shall be kept confidential. It shall be usedonly asrequired to respondto the specificationrequirements, and shall not be disclosedto any otherparty. 7n,9,i-)i.i R€",5€6vFLb S7. s Ra-a,./a..^ri-^.-,,7; n D(c Tdr,,S!;.LGt 14 tz/th Kf vlJd D r, '. /i'., r-.r,.r p..ir D;o aoj ) /t.?'Y: La tr+q9 R,p",51, P;n (,yon; \ G-,nr^r Rcren(rl An ) Ltut *26-q5 i?tvtsn A*r Fl.ft Atot/ttror /2,,au"s1 Releose-Jpe,-DEO eOS 7/'\t q;( .qi g"-",1r04n 1'14t-, g P,t., ',. -aa> REVLTR.I BY-DATE I APPD.DATE DESCRIPTIONOF CHANGE ROCESSSYSTEMS INTERNATIONAL, INC. SPECIFICATION Number ieO 7/ac/1 A PageI of ) fltre SPECIFICATIONFOR 112CM AND 122CM GATE VALVES SPECIFICATION TABLE OF CONTENTS 1.0 Scope 2.0 Schedule 3.0 EquipmentRequirements 4.0 DesignRequirements 5.0 RequiredDocumentation 6.0 ShopTesting 7.0 Inspection 8.0 Wananty AttachmentA LIGO QA RequirementsSummary AttachmentB MatingFlange Details PSIDrawings y049-4-017 & -018,Rev. Pl Attachment C GeneralEquipment Requirements PSI SpecificationV049-2-033, Rev. 2 Attachment D Deleted z o (D { f-? uoon-r-uu. 7ol Tllle SPECIFTCATIONFOR ll2 CM AND 122CM GATE VALVES 1.0 SCOPE This specificationcovers the minimum requirementsfor the design, materials, fabrication,assembly, inspection, testing, preparalion for shipping,shipment and deliver, of the 112cm and122 cm gatevalves for theLIGO vacuumsystem. 'All attachmentsare incorporated herein by referenceand made a partof this specification. The specifiedequipment is for use as part of the VacuumEquipment supplied for the LaserInterferometer Gravitational-Wave Observatory (LIGO). LIGO, which is operated by Caltechand MIT underan NSF grant,includes two sites(Hanford Reservation, near Richland,WA and Livingston,LA). Each site containslaser interferometersin an L shapewith 4 km arms,a vacuumsystem for the sensitiveinterferometer components and opticalbeams, and other support facilities. Informationcontained in this specificationand its attachmentsis proprietaryin natureand shallbe keptconfidential. It shallbe used only asrequired to respondto the specification requirements,and shall not be disclosedto anyother party. SCHEDULB 2.1 Equipmentdelivery shall be asfollows: Tvoe Deliven'Site Ouantity Ends 112 cm Valves(Electric) Washington t) BWFIg &t16t96 6 Flg/Flg 9t19t97 Louisiana 2 BWFIg 8t10t97 2 Flg/Flg 3t1t98 Total l6 z 112 cm Valves (Pneumatic) Washington 2 BW,GIg 8t16/96 2 Flg/Flg 9t1t97 Louisiana 2 BW,TIg 8t10/97 2 FlgTlg 3/1/98 Total 8 122cm Valves (Electric) Washington 4 Flg/Flg 9t1197 Louisiana 2 Bw/BW 8t10/97 2 Flg/Flg 3/1t98 Total { I "-"'--'Axutttbt, l unoo-'-nn. Prgc 3 ot ? flile SPECIFICATIONFOR 112CM AND 122CM GATEVALVES Acceptancesat the sitesare expected to occuron a staggeredbasis, with final acceptance at Washingtonexpected to occurabout May 31, 1998,and aboutNovember 30, 1998in Louisiana. "first 2.3 A article" valve shall be manufacturedand tested (per Section 6.0 of this specification)as early as possibleto allow designchanges to be incorporatedin the productionlol of valves. Additionalvalves shall not be manufactureduntil the Buver acceptsthe design ofthe first articlevalve after testing. 3.0 EQUIPMENT REQUIREMENTS The 122 cm gate valves (mating to beam tubes)are used to isolate sectionsof the interferometervacuum envelope from one another. The 112 cm gatevalves serve the samefunction but arelocated near the 80K cryopumps. 4.0 DESIGNREQUIREMENTS 4.1 MechanicalRequirements 4.1.1 Gatevalves shall be stainlesssteel (304L or 3l6L) with flangeconnections designed -or for doubleO-ring sealswith groovesin the mating flangessupplied by others, weld flttilgs a9 specified. Valvesshall also have SS metal bello*s stemfeedthroughs, and shallbe designedto sealin bothdirections. 4.1.2 Only non-contaminatingand non-migratorylubrication shall be used on the intemal mechanisrns. 4.1.3 Valve body and flangeleakage shall be measuredto be lessthan 10-t0torr liter/secof heliumbefbre shipment. Body flangefaces shall be flat to within 0.010". 4.1.4 Gatevalves shall have double viton gateseals and bonnet seals. Annular soaces between gate sealsand boruretseals shall bJisolatableand designedto be purnpedwith an ion pugtp (suppliedby others). Gateseals and bonnet seals shall be leak free to a level of 10-'ton liter/secofhelium. SealO-ring andannulus groove designs shall be subjectto Buyeracceptance. 4.1.5 Valvesof the samesize and type shall be identicalto minimizethe numberof required spareparts. Valvesshall be ratedfor 10,000cycles before service is required. 4.1.6 Valvesshall be installedvertically with the actuatorson top. Provisionshall be madefor supportingthe valvesfrom below. It is anticipatedthat four attachmentpoints will be reoulreo. 4.1.7 Valvesshall be bakeableto 150C +l- 20 C ( I 70 C marimum SPECIFICATION ot? Ttile SPECIFICATIONFOR 112CM AND 122CM GATE VALVES 4.1.8 Thevalves (including their actuators)are exempted from the acousticnoise and vibration requirementsof paragraphs5.1.4,5.1.5 and 5.2.1.3 of AttachmentC of thisspecification. 4.1.9 Valve actuationshall induceno morethan 0.019peak-to-peak acceleration at any point on the valvemounting flanges or weld stubs. 4.1.10 Gatevalves shall have a positive,padlockable device to preventopening or closing. The valve shall be designedso that no damageoccurs to the valve or to its actuatorif valve actuationis attemptedwhile thevalve is lockedopen or closed. 4.1.11 Valve endconnections shall be flangedor butt weldedas denotedin Section2.1, above. For valves with at least one end Ianged, the valve shall be designedwith ihe gare adjustmentsystem facing a flangedend (accessiblefrom that end when the valve is closed). For butt weldedvalve connections,the weld stub shall be 49.12"+/-0.02" lD with a 0.127"+l-0.007" wall thicknessand a 10" length. For the two valvesfor shipment 8ll0l97 to Louisiana.the lengthof the weld stubsslall be equaland sizedto providea total end-to-enddimension of I meter. The endsshall be souarebutt with the surface perpendicularto the tube axis and flat within 0.001". The surfacesshall be cylindrical andunobstructed for 6" from the endon the ouside,and for 2" on the inside. The sulfur contentofthe weld stubmaterial shall not exceed0.02 oercenl. 4.1.12 Gatevalves shall be capableof strokingfrom fully opento sealedin 5 minutesor less, andfrom sealedto fully openin 5 minutesor less. 4.1.13 Valvesshall be electricallyor pneumaticallyactuated as denoted in Section2.1, above. 4.1.14 NotwithstandingParagraph 4.1.11, above, valves shall be designedto maintainthe gate sealwith vacuumor atmosphericpressure on eitherside ofthe gate. Thevalves shall also be designedfor a pipingload of 21,000pounds in additionto the pressureload of vacuum on eitherside ofthe gate. 4.1.15 The clearaperture through the valve shallbe not lessthan the nominal size(1 12 cm or 122 cm). 4.1.16 For flangedvalves. the flange shall be consistentwith the mating flangesshown in AttachmentB. Theflanee face that mates with the O-rins sealsshall be machinedto a 32 microinchfinish usingi circularlay. Final flangema-ting details shall be subjectto Buyer'sacceptance. 4.1.17 Final assemblyand cleaning of valvesshall take placein a FederalStandard 209 Class 100cleanroom environment. 4.2 ElectricalRequirements 4.2.1 InstrumentationRequirements Valvesshall be providedwith limit switchesto indicatethe fully openedand fully closed positions. SPECIFICATION Pege ( q1 ? rltle SPECIFICATIONFOR l12 CM AND 122CM GATE,VALVES 4.2.2 ControlsRequirements Eachvalve shallbe providedwith a controllerfor local open,close and stopoperations. In addition,provide terminal strips in a junction box to interfacewith the futureLIGO controlsystem for remoteopen, close and stopoperations. A bracketshall be provided for mountingof requiredcontrollers (e.g., speedcontrollers) at working height (exact location later). Controls shall be completelyassembled, wired and testedprior to snlpment. 4.2.3 PowerRequirements: See Attachment C. 5.0 REQUIRED DOCUMENTATION In addition to the documentationlisted in Attachment C, the following documentation shallbe providedprior to shipment: . Leaktest procedure and report (including data). r Shocktest procedure and report (including data) o Manufacturer'sstandard QA reports(including final functionaltest reports) 6.0 SHOPTESTING 6l Operationofeach valvefor 20 cyclesshall be demonstrated.This shallbe doneprior to final gateseal leak testing. b.z Each valve shall be testedfor leakageper Paragraph4.1.4 (using oil-free pumping equipmentand leak detector) prior to shipmentfrom the manufacturer.Each valve shall be bakedat 150C prior to leak checking. For dual gateseals and end seals,each seal shallbe individuallytested. For the endseals, the Vendor'stest fixture shallallow testing of eachseal individually. An RGA with calibratedleak shallbe usedin performingthe Ieaktesting. 6.3 Onevalve of eachsize and type of actuationshall be testedfor shock. Thevalve shall be testedin the verticalposition resting on a pad that deflectsat least0.1" underthe static load of the valve,so as not to simulatea "hard mount". Testingshall be doneboth at atmosphericpressure and with the valve under vacuum. An accelerometershall be mountednear a connectingflange (or weld stub)on the valvehousing or nearthe edgeof oneofthe flangecovers. Separatemeasurements shall be takenin eachof the threeaxes. The Buverreserves the risht to conductan indeoendentshock test. SPECIFICATION ol? rltle SPECIFICATIONFOR l12 CM AND 122CM GATE VALVES 7.0 INSPECTION 7.l The inspectionscalled for in AttachmentC shallbe performed by theVendor. 7.2 Also, eachvalve shall be inspectedfor cleanlinessby black light and RGA prior to .'hydrocarbonsshipment.Valves shall be recleangflif any contaminationis found. Parlialpressures of greaterthan 2.0 x l0-'" Ton for any speciesshall be causefor rejection. 7.3 All valvesshall be inspectedfor dimensionalconformance to approvedassembly drawings. 8.0 WARRANTY Refer to SpecificationV049-2-034, Purchased Equipment Commercial Requirements (attachedto theRequest for Quotation),for warrantyrequirements. z 1 l { I tt.mb.r - I ncv. I A vnao_r_nns l3 Prgc 7 ol ? o\ 6 N rl ol H iil ol z -i z z (-) B E 3