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CSEM Scientific and Technical Report 2014 CSEM Alpnach Untere Gründlistrasse 1 CH-6055 Alpnach Dorf CSEM Landquart Bahnhofstrasse 1 CH-7302 Landquart SCIENTIFIC AND CSEM Muttenz Tramstrasse 99 CH-4132 Muttenz TECHNICAL REPORT CSEM Neuchâtel Jaquet-Droz 1 2014 CH-2002 Neuchâtel CSEM Zurich Technoparkstrasse 1 CH-8005 Zurich www.csem.ch [email protected] [email protected] CSEM SA CSEM is a private Swiss research and technology organization that delivers advanced technologies and unique R&D services to industry. Targeting emerging, strategic, high-impact technologies, CSEM plays a central role in national innovation ecosystems, bridging the gap between industry and academia in order to develop technologies that feed directly into new goods, processes, and services. A 440 strong workforce, with an extremely impressive academic background and often industrial experience, dedicates its passion to this mission. Thus, CSEM can effectively contribute to the process of innovation and diffusion that requires increasingly close interaction between the world of science and technology and the marketplace. What makes CSEM special is its high level of expertise in integration and industrialization, and its multidisciplinary, system-oriented approach, operating through five strategic programs — microsystems, systems, ultra-low-power integrated systems, surface technologies, and photovoltaics & energy management — corresponding to domains in which the center has acquired, over the years, a national and international reputation. Research activities are the cornerstone of our success, certainly, but we never forget the overriding importance of the customers who provide us with invaluable insights into the global marketplace. Based on extensive market research and evolution of technological insight, our strategy allows us to develop, today, technologies needed tomorrow. Even if this report is only the “tip of the iceberg” of our accomplishments—since we have to respect our customers’ confidentiality requirements—we hope you enjoy reading it and that doing so gives you a real sense of how CSEM engineers and researchers can, by using their creativity and innovative prowess, help industry and society, day after day, to prepare for the future. 1 2 CONTENTS Combined Inspection Solutions for Advanced Packages: PREFACE 7 Leak Tests and X-ray Imaging 39 EVITA Project: Characterization of a New X-ray Phase Contrast Imaging Demonstrator for Aeronautical MULTIDISCIPLINARY INTEGRATED Composite Structures 40 PROJECTS – MIPS 9 Low Temperature Hermetic Sealing of Sapphire Substrates 41 SMAC+ – Assembly Processes for a Miniature Atomic Jetting Technology for Advanced Packaging Solutions 42 Clock 11 Wafer-level Galvanic Deposition for Hermetic TLP EagleEye – an Automated Audiovisual Platform for Bonding 43 Quality Control of Watch Pieces 12 Micropump Integration into Dolomite Laboratory HybSi – Hybridization of Silicon Micro-components 13 Package 44 IMBIM – Ubiquitous Deployment of Photovoltaics in Air Pretreatment Platform for Indoor Air Quality Residential Buildings: a Micro-grid Approach 14 Monitoring 45 MEMSPlant – Active MEMS-based Implantable Devices 15 Optical Cochlear Implant 46 MicroMS – New Electrostatic Resonator Ion Trap with Osmotic Textile Clothing and Medical Applications 47 Multiple Inductive Charge Detection for Mass Spectrometry 16 Large Stroke and Large Force Microactuator Array for Tactile Display 48 MOFETs – MHz-operating Organic Field Effect Transistors 17 MONIMIP – Wearable EIT System with Cooperative SURFACE ENGINEERING 49 Sensors 18 Rapid Sensing of Cancer 53 nanoPV – Flexible PV for Low-illumination Applications 19 A Bioreactor to Test Bone Scaffolds 54 RomaSOL II – Roll-to-roll Organic Photovoltaics for Lab-in-a-Pipette-Tip (LIPT) 55 Mobile Application 20 microSALIVAsense – an Oral Sensor System for In- Surface Functionalization of Multiwell Plates 56 mouth Monitoring 21 Assessing Hepatic Cytotoxicity in a Hepatic Microfluidic Bioreactor by Application of Electrochemical Sensors 57 Electrochemical Sensors for Monitoring LDH in Milk 58 MICROSYSTEMS 23 Droplet-in-a-Pipette-Tip (DropIT) and Droplet Interfaces 59 Infra-red Filters for Thermal Photovoltaic Applications 25 Conceptual Design and Numerical Simulation of a Micro-patterned Silicon Substrates and 3D Distributed Bragg Grating Resonator Waveguide Heteroepitaxy for X-ray Detectors 26 Biosensor 60 MEMS Reliability Approach at CSEM 27 On-site Sample Preparation Platform for the Monitoring Characterization of Thin Films by X-ray Reflectometry 28 of Emerging Pollutants in Water 61 Fabrication and X-ray Analysis of Microfluidic Devices Experimental Characterization of the Sensitivity of with Integrated Heaters for High Pressure Particles Waveguide Grating-based Biosensors and Comparison Detector Cooling 29 with Numerical Simulations 62 A MEMS-based Gas Chromatograph 30 Development of an Integrated, Label-free, Waveguide Grating-based Biosensor Platform for Onsite PVD Sputtering Technology of Complex Thin Films for Measurements and Online Monitoring of Toxins and MEMS 31 Pollutants in Food Production Processes and in the 2D MEMS Large Micro-mirror Array for High Power Aquatic Environment 63 Application 32 Electronics and Sensors to Help Patients with Ulcers 64 Laser Scanner with Integrated Piezoresistive Strain Colorimetric pH Sensing with Mesoporous Indicators 65 Sensors 33 Ultrathin Silicon Nitride Membranes for Improved Wafer Level Assembly Technology 34 Biosensing Kinetics 66 High Aspect Ratio, Large Area Gratings for X-ray Phase Anti-icing and Anticontamination Nanocoatings for Safer Contrast Imaging 35 and More Eco-friendly Aircraft 67 High Precision Mechanic Parts Fabricated with Ultra- Manufacturing of High-added Value Micro- short Pulsed Lasers 36 nanostructured Plastic Components 68 MEMS-based Tunable Quantum Cascade Laser for Miniaturized Field-flow Fractionation Cartridge for the Gas Sensing 37 Analysis of Complex Nanoparticle-containing Samples 69 Wavelength Combining and Stabilization in High Power Diode Laser Applications 38 3 Multi-angle Light Scattering Sensor for Engineered Wrist Device for Automatic Sleep Staging and Quality Nanoparticles 70 Monitoring 101 Imaging in Ultra-flat Environments with a Diffractive Activity-specific Energy Expenditure Models Dedicated Periscope 71 to Multi-modal Platforms 102 Design Considerations on Next Generation Si-based Development and Validation of the Long-term Medical Immersed Gratings for Spaceborne Atmospheric Survey System for Antarctica 103 Spectroscopy 72 Blood Pressure Monitoring via EIT: Optimizing the Large-scale Fabrication of Nanoimprinted Plasmonic Technology 104 Nanostructures 73 Blood Analysis for Patients with Chronic Liver Disease Magical Watch Dial – Subwavelength Polarizing at Home 105 Nanostructures for Appealing Color Effects 74 Dynamic, Wireless Body Motion Tracking for Medical Secured and Self-verifying Medicines – Tackling Purposes 106 Counterfeit Medicines and Related Criminal Networks 75 A Hypodermic Needle with Embedded Tissue Large-area Solid State Intelligent Efficient Luminaires 76 Identification Based on Ultrasonic Pulse-echo Analysis 107 Organic Thin-film Transistors: from Technologies to Real-time Pressure Distribution Sensor for Automotive Circuits 77 Aerodynamics Testing 108 Miniaturized Electrical Motor Controller for Harsh PV-CENTER & ENERGY Environments: Test Results 109 Plug & Produce: Automatic Detection and Configuration MANAGEMENT 79 of Industrial Devices 110 High-efficiency Silicon Heterojunction Solar Cell Accurate Robotic Milling with Real-time Position Platform 81 Correction 111 Plating on Thin Conductive Oxides for Silicon Turbisc Pump with an Integrated Flowsensor for Heterojunction Solar Cells 82 Closed-loop Operation 112 Silicon Heterojunction Solar Cells with Plated Contacts Miniaturized Fluidic and Electrical Rotary Feedthrough 113 for Low Concentration Photovoltaics 83 Compact, Pressure-based Flow System for Sequential White Solar Modules: the Revolution for Building Actuation of Fluids with Integrated Flow Monitoring 114 Integration 84 Deployment of a 7 kWp Multi-technology Photovoltaic Monitoring Station for Energy Yield Assessment and ULTRA-LOW-POWER INTEGRATED Comparison 85 SYSTEMS 115 Photovoltaics for Hydrogen Production 86 Design and Optimization of a Sub-threshold Standard Systems for Ultra-high Performance Photovoltaic Cell Library 117 Energy Harvesting 87 Multicore Architectures in Near-threshold Regime 118 Development of High Transparency / High Conductivity Sensor Interface for a Resonant Accelerometer 119 Electrodes for Organic and Consumer Electronic ASIC for the Monitoring of Physiological Signals with Applications 88 Cooperative Sensors 120 Solution Processed OPV Tandem Cells 89 A 14-bit 1 Msample/s ADC with On-chip Calibration 121 Maintenance of PV Power Plants: Impact of Soiling and A 256 x 256 Pixels 4000 Frames/s Image Sensor 122 Cleaning in Switzerland 90 ROIC for High Performance Low Cost Monolithic Energy Storage Research Center: Rationale and Uncooled THz Focal Plane Array 123 Research Needs 91 Embedded Infrared Angular Tracker 124 Concepts for Energy Management at District and Building 92 A Descending Stairs Detector for Safety Applications 125 Non-intrusive Load Monitoring via Sparse Embedded Convolutional Neural Network for Object Decomposition 93 Classification 126 icyTRX-65, a 2.4 GHz Silicon RF IP Optimized for Low- power Bluetooth Low Energy 127 SYSTEMS 95 A 700 pJ/bit, 2.4 GHz, Narrowband, PLL-free Burst Meteosat 3rd Generation, Corner Cube Mechanisms 97 Mode Transmitter Based on an FBAR 128 High-performance
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