M-545 XY Microscope Stage with Ultrasonic Linear Drives High Stability, Low Profile, High Speed, Direct Position Measurement

Limit and Reference Switches For the protection of your equip- ment, non-contact Hall-effect limit Ordering Information and reference switches are in- XY Microscope Stage System stalled. The direction-sensing with Closed-Loop PILine® reference switch supports ad- Piezomotor Drives, 25 x 25 mm, vanced automation applications 0.5 µm Linear Encoder, Includes with high precision. C-867.260 2 Axis Controller and Joystick. Advantages of PILine® Mi- cropositioning Systems MD5422LOU The ultrasonic piezoceramic for Olympus Microscopes drives used in PILine® microposi- MD5422LNU for Nikon Microscopes tioners have a number of ad- MD5422LZU vantages over classical drives: for Zeiss Microscopes The M-545.2P microscope stage with closed-loop ultrasonic piezo motors provides 25 x 25 mm travel range and very high stability  Higher Acceleration, Speed The following PI stages can be used with the M-545:  Smooth Motion,  Integrated Closed-Loop Linear Piezomotor Drives Provide no Vibrations P-545 PInano™: all versions Smooth Motion and High Speed to 50 mm/s P-5x7 & P-528: all versions  Travel Ranges 25 x 25 mm  Small Form Factor P-561 & P-562: all versions  Integrated Linear Encoders with 0.5 µm Resolution P-541 & P-542: all versions  Self-Locking when P-736 PInano™-Z: Adapter  Compact Design: 30 mm Profile Height, Powered Down, no Dither, P-736.AP1 required  Mounts Directly to Microscopes no Energy Consumption Ask about custom designs  Self-Locking at Rest, with no Servo Dither  No Shafts, Gears or Other  Compatible with PI Piezo Nanopositioning / Scanning Rotating Parts Application Examples Stages  Non-Magnetic , Vacuum  BiotechnologyPreliminary Specs Compatible Drive Principle  Microscopy M-545.2P piezomotor stages are employed in traditional stages  Scanning microscopy mainly designed for automated obsolete. In addition, the piezo-  Confocal microscopy positioning applications in mi- motors are self-locking at rest  Semiconductor testing croscopy. The form factor of the and hold the stage in a stable  Handling M-545 is optimized for a low position without generating heat. profile height of 30 mm only; the mounting pattern is compatible Compatibility to PI Nanoposi- with many PI piezo nanoposition- tioning and Scanning Stages ing stages. A number of standard PI piezo

flexure stages can be mounted Space Saving Piezomotors on the M-545 stage. Depending Compared to conventional mo- on the application, these highly torized translation stages, the specialized, ultra-precise na- M-545 provides a lower profile nopositioning systems are availa- and smaller footprint. The com- ble as fast XYZ scanners (for pact PILine® piezoelectric linear fluorescence microscopy), as motors and linear encoders make vertical Z positioners (3D imag- both, the lead screw duct and the ing), or with up to 6 degrees of flanged, bulky stepper motors freedom.

PInano™ XYZ piezo scanner mounted on a M-545.2P Microscope stage. The XYZ piezo nanopositioning stage provides <1 nm resolution and 200x200x200µm scanning range. The high sta bility and autolocking feature of M-545 provides significant advantages over other microscope stage designs when using fast piezo scanning stages.

The two-channel C-867.260 controller

video at: http://www.youtube.com/watch?v=eT617ackIOw

Preliminary Specs

Model M-545.2P Active axes XY Travel range 25 x 25 mm Integrated sensor Linear encoder Sensor resolution 0.5 µm (no dither at rest) Min. incremental motion 1 µm Unidirectional repeatability 1 µm Bidirectional repeatability 2 µm Max. velocity 50 mm/s Load Capacity 50*N Max. push/pull force 5 N Max. lateral force 4 N Motor type PILine® U-164 Operating voltage 67 V (RMS)*** Electrical power 10 W / Axis** Operating temperature range 10 to +30 °C Material Aluminum (black anodized) Mass 3.2 kg Cable length 1.7 m Connector 2 x MDR connector, 14-pin Controller/driver C-867.260 2-a xis Controller/Driver

* 10 N for max. velocity. ** For drive electronics *** Piezomotor drive voltage; controller requires 12 VDC

M-545 dimensions in mm, Olympus version shown, call for other versions

MD5422LZU for Zeiss Microscopes

270

Cable, 1.7 m 1 each for X and Y axes 270 17.5

3.8 12.5

25 Travel

84 12.5 25 Travel

12.5 12.5 42 Focal Point 125 215 134 228

4x M6x1.0

16x M4x0.7 100 2 x M4 x0.7 3x C’Bore Hole for 149 M4 Pan Head Screw 166 + 184 + 201 Travel Direction M-545 Manual XY Microsope Stage w/ Motor Upgrade Option Long-Range Motion for Sample Positioning

The M-545, 25 x 25 mm micro- Ordering Information scope stage, is designed to provide a stable platform for piezo M-545.2MO XY Microscope Stage, 25 x 25 mm, scanning stages of the P-545 Micrometer Drive, High Stability, PInano™ series. These high- Compatible with PI Piezo Stages, speed, high-resolution XY / XYZ for Olympus Microscopes piezo stages allow nanometer- M-545.2MN precision adjustment of the spec- XY Microscope Stage, 25 x 25 mm, imen holder in up to three Micrometer Drive, High Stability, dimensions over 200 µm. The Compatible with PI Piezo Stages, M-545 is also compatible with for Nikon Microscopes the following capacitive-feed- M-545.2ML back type piezo stages: P-733, XY Microscope Stage, 25 x 25 mm, Micrometer Drive, High Stability, P-5x7, P-5x8, P-54x and P-56x Compatible with PI Piezo Stages, (s. p. 2-72). for Leica Microscopes M-545 manual XY microscopy stage with 25 x 25 mm The basic M-545 model is M-545.2MZ travel shown with optional PInano™ piezo nanopositioner equipped with manual microme- (200 µm motion in X, Y und Z) on top. The M-545 stage was XY Microscope Stage, 25 x 25 mm, designed to provide a stable basis for piezo stages, especially ters. Micrometer Drive, High Stability, when the highest step-and-settle performance is required Compatible with PI Piezo Stages, Motorizing for for Zeiss Microscope Automated Tasks Versions for other microscopes on ࡯ Stable Platform for P-545 PInano™ The M-545 XY-stage can be sup- request. plemented with motorized actu- Piezo Nanopositioning Systems Accessories ators M-229 (s. p. 1-44). The ࡯ Low Profile for Easy Integration: 30 mm M-545.USC product number M-545.USC ࡯ 25mmx25mmTravelRange Factory Installed Stepper-Mike comprises the complete package Upgrade for M-545 XY Microscope ࡯ Micrometer Screws, Motor Upgrade Available of two stepper linear actuators Stages: Includes Stepper-Mikes, ࡯ For Nikon, Zeiss, Leica and Olympus Mikroscopes with controller and joystick. Joystick and Controller M-545.USG includes two stepper M-545.USG linear actuators with mounting Factory Installed Stepper-Mike Upgrade for M-545 XY Microscope Stages: Includes Stepper-Mikes, Joystick

M-545.SHP Adapter Plate for Sample Holders for M-545 XY Microscope Stages

Accommodates the following PI nanopositioning stage series: P-517/ 518/ 527/ 528, P-541/ 542, P-560 PIMars and P-545 PInano™

Adapter available for P-733 nanopositioners:

P-733.AP1 Adapter Plate for Mounting of P-733 Piezo Stages on M-545 XY Microscope Stage

Additional accessories on request.

M-545.2MO, M-545.2MN dimensions in mm. Mounting adapters for Olympus and Nikon microscopes respectively included in delivery M-545.2ML dimensions in mm © Physik Instrumente (PI) GmbHThe & newest Co. release KG for 2009. data Subject sheets to is change available without for notice. download All at data www.pi.ws. are R3 superseded 10/06/09.0 by any new release. M-545.2MZ dimensions in mm

Technical Data

Model M-545.2M Unit Tolerance Active axes XY Motion and positioning Displacement 25 x 25 mm Min. incremental motion 1 µm typ. Min. incremental motion with 1 µm typ. M-229 stepper linear actuators Velocity with M-229 stepper linear actuators 1.5 mm/s max. Mechanical properties Max. load 50 N Preload 10 N Miscellaneous Material Aluminum, stainless steel Mass 4 kg ±5% Find further specifications on M-229 stepper linear actuators in the datasheet (s. p. 1-44) 3. Accessories

The following accessories are available for the M-545 Stage. Accessory kits can be ordered from PI and are supplied with fasteners

P-736.AP1 P-736 Mounting Kit For mounting the high speed P-736 Z slide scanner to the M-545 Stage

M3 x 10mm Screw

P-736.ZR1 or P-736.ZR2

M6 x 8mm Pan Head Screw

M-545 Top Plate

M-545.SHP Sample Holder Adapter For mounting 1x3 microscope slides or 35mm Petri dishes directly to the M-545

M6 x 8mm Pan Head Screw M2 x 3mm Screw

P-545.PD3 or P545.SH3 Sample Holder

M-545 Top Plate 3. Accessories (continued)

P-733.AP1 P-733 Mounting Kit Adaper kit for mounting a P-733 to the M-545.

M4 x 25 mm Socket Head Screw

M6 x 10mm Socket Head Screw

P-733 Stage Body

M545 Stage Top Plate

M5 x 10mm Flat Head Screw

M-545.USG Mounting Kit for M-229 Stepper Motor Actuators (requires controllers) Adapter kit for mounting motorized actuators to the M-545 Stage. Controllers are required and can be ordered separately.

M-229.25S Stepper Motor Actuator Can be mounted in front or rear position Rear position requires factory installation

M-229.25S Stepper Motor Actuator 1. Model Survey The M-545 Series of stages is designed for use with inverted microscopes from the leading manufacturers (Nikon, Olympus, Leica and Zeiss). The stages are designed to allow full rotation of the lense turret throughout the Z motion range of The turret.

M-545. 2 MN | Manufacturer “N” Nikon “O” Olympus “L” Leica | “Z” Zeiss | “M” Manual Micrometer Drive “2” 2 active axes (XY)

2. Compatibility

The M-545 is designed to provide a highly stable mounting platform for the PI nano series of piezo electric nanopositioning stages. The PI nano was designed for microscopy applications and has accessories that facilitate mounting the sample near the bottom surface of the stage and within the focal range of the microscopes.

The M-545 also has mounting holes for a variety of other PI nanopositioning stages.

The following is a list of PI stages that can be used with the M-545:

P-545 PInano™ Series XY and XYZ Stages, all versions

P-736 PInano™ Series Z high speed Z scanner Adapter kit P-736.AP1 required

P-5x7 and PI Multi-Axis Piezo Scanner, all versions P-528

P-561 and PIMars™ XYZ Piezo System, all versions P-562

P-541 and PI Low Profile Nanopositioning Stage, all versions P-542

P-733 Compact, High Precision XYZ nanopositioning stage All versions Adapter kit P-733.AP1 required 5. Mounting

5.1. M-545.2MO Mounting (for Olympus Microscopes)

Spacer plates are used to adapt the M-545 stage to the Olympus microscope base.

The proper hardware sizes are shown below.

4x M4x16 Socket Head Screw

4x M5x16 Socket Head Screws

M545E0006 Spacer

Microscope Base 5.2. M-545.2MN Mounting (for Nikon Microscopes)

Spacer plates are used to adapt the M-545 stage to the Nikon microscope base.

The proper hardware sizes are shown below.

4x M4x16 Socket Head Screw

4x M5x16 Socket Head Screws

M545E0007 Spacer

Microscope Base 5.3. M-545.2ML Mounting (for Leica Microscopes)

No spacers or adapters are required for the Leica DMI Microscope base.

Fits Leica Models DMI 4000, DMI 5000 and DMI 6000.

The proper hardware sizes are shown below.

4x M4x16 Socket Head Screw

3x M4x10 Pan Head Machine Screws

Microscope Base 5.4. M-545.2MZ Mounting (for Zeiss Microscopes)

No spacers or adapters are required for the Zeiss Observer Microscope base.

Fits Zeiss Axio Observer Models A1, D1 and Z1.

The proper hardware sizes are shown below.

4x M4x16 Socket Head Screw

3x M4x10 Pan Head Machine Screws

Microscope Base 6.0. Focal Point Location

PI has designed the P-545 stage to be easily integrated to commercial microscopes through the use of the M-545 stage. M-545 stages are available for Nikon, Olympus, Zeiss and Leica inverted microscopes. These stages mount directly to the microscope base and accept the P-545.3R2 and P-545.2R2 as well as several other PI stages. The M-545 stages can be manually driven through micrometers or using PI’s precision motorized actuators. Contact your PI sales representative for details.

When used in a microscope application, the focal plane for the microscope is located near the bottom of the stage. It is for this reason that the stage has a lower mounting surface. The figure below shows the nominal location of the focal plane. Vertical travel of the objective varies based on the microscope used.

A series of accessories is available from PI to assist with mounting a sample holder to the stage. The P- 545.SH1 is available to hold standard 1”x 3” (25mm x 75mm) microscope slides and the P-545.PD1 is offered for holding 35mm Petri Dishes.

Upper Focal Plane approx. 3 mm above mounting surface M-545 Stage

Bottom of Objective travel Approx. 10 mm Microscope Objective Varies by microscope M-545k Manual Microscope Stage For Bread-Board Mount / PI Piezo Stages

M-545k manual microscopy stages are deigned to accom- Ordering Information modate the P-545 PInano™ M-545k001 Manual Translation series of XY / XYZ Pie zo stages Stage, 25 mm, stackable as w ell as the P-5x7, P-5x8, Ask about custom designs P-56x and P-541/2 series stages. Application Examples

 Biotechnology

 Micromanipulation  Microscopy  R&D

 Quality assurance testing

Stack of two M-545k manual stages

 For P-545 PI nano™ and all P-5xx Nanopositioning Stages  25 mm Travel

 Motor Mike Upgrade with M-232 Actuators and C-863 Controllers  For Bread Board Mount on 1/4-20 -1" Centers

Stack of two M-545k manual stages with P-545 PInano™ Piezo Stage (not included) Preliminary Specs S

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Integrated sensor Piezoresistive Piezoresistive XY/XYZXY / XYZ Closed-loop travel 200 x 200 200 x 200 x 200 µm StageStagess *Resolution <1 <1 nm typ. 6-Axis Linearity +/- 0.1 +/- 0.1 % typ. Stages Repeatability <5 <5 nm typ. Actuators / Mechanical properties Linear Motors Push/pull force capacity in motion direction 100 / 30 100 / 30 N Max. Max. payload 500 500 g Max. Piezo Controllers Drive properties Ceramic type PICMA® P-885 PICMA® P-885 News & Applications Electrical capacitance per axis 6 6 (X, Y), 12 (Z) µF ±20% Miscellaneous Recommended operating temperature range 20 to 30 20 to 30 °C Material Aluminum Aluminum Mass 1 1.2 kg ±5% Cable length 1.7 1.7 m ±10 mm Sensor / voltage connection Sub-D 25 Sub-D 25 *Resolution of PI Piezo Nanopositioners is not limited by friction or stiction. Value given is noise equivalent motion measured with interferometer.

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The P-545 piezo stage can be mounted on the optional M-545 manual XY stage. This high-stability stage is recommended as a basis for the piezo stage, especially when the highest step-and- settle performance is required. It is available for Olympus, Nikon, Zeiss and Leica microscopes and can also be upgraded with motorized micrometers.