Micro-Fabrication of Ceramics: Additive Manufacturing and Conventional Technologies
Journal of Advanced Ceramics 2021, 10(1): 1–27 ISSN 2226-4108 https://doi.org/10.1007/s40145-020-0422-5 CN 10-1154/TQ Review Micro-fabrication of ceramics: Additive manufacturing and conventional technologies Hany HASSANINa,*, Khamis ESSAb, Amr ELSHAERc, Mohamed IMBABYd,e, Heba H. EL-MONGYd,f, Tamer A. EL-SAYEDd,f aSchool of Engineering, Canterbury Christ Church University, Canterbury, CT1 1QU, UK bUniversity of Birmingham, Edgbaston, B15 2TT, UK cKingston University London, Penrhyn Road, Kingston Upon Thames, Surrey, KT1 2EE, UK dDepartment of Mechanical Design, Faculty of Engineering, Mataria, Helwan University, P. O. Box. 11718, Cairo, Egypt eJubail University College, Mechanical Engineering, Kingdom of Saudi Arabia fCenter for Applied Dynamics Research (CADR), School of Engineering, University of Aberdeen, Aberdeen, AB24 3UE, UK Received: June 7, 2020; Revised: August 31, 2020; Accepted: September 9, 2020 © The Author(s) 2020. Abstract: Ceramic materials are increasingly used in micro-electro-mechanical systems (MEMS) as they offer many advantages such as high-temperature resistance, high wear resistance, low density, and favourable mechanical and chemical properties at elevated temperature. However, with the emerging of additive manufacturing, the use of ceramics for functional and structural MEMS raises new opportunities and challenges. This paper provides an extensive review of the manufacturing processes used for ceramic-based MEMS, including additive and conventional manufacturing technologies. The review covers the micro-fabrication techniques of ceramics with the focus on their operating principles, main features, and processed materials. Challenges that need to be addressed in applying additive technologies in MEMS include ceramic printing on wafers, post-processing at the micro-level, resolution, and quality control.
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