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Semiconductor Memories

Prof. MacDonald Types of Memories

l Volatile Memories

– require power supply to retain information

– dynamic memories

l use charge to store information and require refreshing

– static memories

l use feedback (latch) to store information – no refresh required

l Non-Volatile Memories

– ROM (Mask)

– EEPROM

– FLASH – NAND or NOR

– MRAM

100pS RF 100’s of L1 1nS SRAM 10’s of Kbytes

10nS L2 100’s of Kbytes SRAM L3 100’s of 100nS DRAM Mbytes 1us Disks / Flash Gbytes Memory Hierarchy l Large memories are slow l Fast memories are small l Memory hierarchy gives us illusion of large memory space with speed of small memory.

– temporal locality

– spatial locality Register Files l Fastest and most robust memory array l Largest cell size l Basically an array of large latches l No sense amps – provide full rail out l Often multi-ported (i.e. 8 read ports, 2 write ports) l Often used with ALUs in the CPU as source/destination l Typically less than 10,000 bits

– 32 32-bit fixed point registers

– 32 60-bit floating point registers SRAM l Same process as logic so often combined on one die l Smaller bit cell than register file – more dense but slower l Uses sense amp to detect small bit cell output l Fastest for reads and writes after register file l Large per bit area costs

– six (single port), eight transistors (dual port) l L1 and L2 on CPU is always SRAM l On-chip Buffers – (Ethernet buffer, LCD buffer) l Typical sizes 16k by 32 Static

Wordline

T1 T3

True Complement Bit Bit Line T5 T6 Line

T2 T4 Example Chip LCD Frame Buffer SRAM

SRAM cache

Register file SRAM Interface l Dirt simple

– clk – only required if registered inputs and/or outputs

– csn – usually negatively active chip select

– wen – usually negatively active write enable

– a – address – logarithmically related to number of locations

– d – data in bus – inputs used during writes

– q – data out bus – outputs used during reads l read – csn active / wen inactive

– data in the located by A bus launches out Q bus l write – csn active / wen active

– D bus value is loaded into memory location determined by A SRAM Operation Dual Port SRAM Operation l Two complete single port interfaces

– can read two locations simultaneously

– can write two different locations simultaneously

– can not write one location with two different ports

– Typically requires 2 additional transistors per bit

l (6 to 8 for 33% increase)

– Typically requires 4 bit lines and 2 word lines

l double the global routing than single port Dual Port SRAM Interface l Two merged SRAM interfaces

– clk – if registered inputs and/or outputs

– csnA / csnB – usually negatively active chip select

– wenA / wenB – usually negatively active write enable

– aA / aB – address bus – logarithmically related to number of locations

– dA / dB – data in bus – inputs used during writes

– qA / aB – data out bus – outputs used during reads Two Port Memory Cell

Word Line Port 0

True T1 T2 Complement Bit Bit Line Line Port 0 T5 T6 Port 0

T7 T8

T3 T4 True Word Complement Bit Line Bit Line Port 1 Line Port 1 Port 1 Memory Compilers

l ASIC library providers give logic designers:

– Standard cells - ANDs, NANDs, FLIP-FLOPs, etc

– Chip IOs

– Memory compilers

l single port SRAM,

l dual port SRAM, and

l register files.

l Dial in size and generates verilog, layout, timing.

l DRAM, FLASH not supported architecture

Dynamic RAM

l Most dense RAM (1 Gbit chips available)

l Historically, different process so built on a separate die

l L3 Cache (old days) and main memory

l Requires refresh of data due to leakage

l New push to combine DRAM and logic

– embedded DRAM, eDRAM

– business case hard to close – yields drop DRAM Bit Cells (1T)

DRAM used since the early 70s Destructive Read Highest density

bitline

wordline

Cbl Cb DRAM Bit Cells (3T)

DRAM used in the early 70s read Non-destructive read bitline

write bitline write wordline

read wordline DRAM Cross Section DRAM Array DRAM Interface Evolution l Asynch DRAM – up until early 90’s l Synch DRAM – add a clock l (DDR) SDRAM l DDR2 SDRAM – Faster l Others

supported – dead except for PS3

– graphics versions – specifically for frame buffers

– Mobile SDRAM – low power, good for palm pilots DRAM Read Timings

RAS

CAS

Addr RA1 CA1 RA CA

Addr data 1 data 2 DRAM Read Timings (EDO)

RAS

CAS

Addr RA1 CA1 CA

Addr data 1 data 2 SDRAM

l Same array as Asynch DRAM

l Add pipelining to data to increase

l Requires new clock signal

l Treats RAS, CAS, WE as command inputs

l Replaced by DDR for high performance apps

l Still alive for mobile applications due to power SDRAM SDRAM Commands Maskable ROM l Most dense ROM l Tie bit high or low at mask level (metallization) l Mistakes take weeks to fix with new

– hold lots at metal layer for quick implementation

SDRAM Timings

command is just the value of CSN, CAS, RAS and WEN together in that cycle

address is usually 9-11 bits plus 2 bits for bank address ROM/EEPROM/FLASH l Metal Mask ROM l Electrically erasable programmable ROM l FLASH is block erasable only EEPROM l EEPROM can be byte-written but requires extra l FLASH may take over the world – replacing disk drives with FLASH drives (no moving parts – more reliable). l Motorola is leader in combining FLASH with logic l Intel leader in NOR Flash l / leaders in NAND Flash EPROM

l Erasable Programmable ROM

l Can be erased by UV light

l Programmed by Hot Carrier Injection

l Obsolete but still mentioned

– only used in EE2369 to provide historical perspective

NOR ROM Structure NOR ROM Structure NAND ROM Structure Flash Cross Section FLASH FLASH

l NOR Flash – less dense (256 Mbit) but provides fast random read access – Erase FN / Program HEI – 100,000 write cycles – Slow erase, fast program and read – SRAM like interface – give an address – get a byte of data – great for code memory ( , boot-up, cell phone, etc) l NAND Flash – More than 2X denser – up to 2Gbit – Erase FN/ Program FN – Fast erase, slow program and read – 1,000,000 write cycles – IO like interface – not as simple as NOR – good for – memory cards, IPODs, USB keydrives Flash Cross Section NOR FLASH NAND Flash Reading Tunneling vs Injection Charge Pumps l Flash and EEPROM architectures need unavailable higher voltage for programming (+10v) l Charge pumps can pump a cap to get high voltage l DC to DC (higher) converter - without inductors l Need to consider Vmax across any gate l Generally cannot provide much power (I*V) l Charge pumps used for a lot of other things like overdrive voltages and PLLs Basic concept Staged Diode Charge Pump Dickson Charge Pump

V 1 V 2 V3 V 4

Vin V out M d1 M d2 M d3 M d4 M d15

C C C C C out

φ

φ Improved versions

V 1 V 2 V3 V 4

M D1 M D2 M D3 M D4 M Do

Vin V out

M s1 M s2 M s3 M s4 M D5 C f C M M N2 M N1 N3 M N4 M M P 2 M M P 1 C P 3 P 4 C C C

_1

_2 Stage 1 Stage 2

VDD N2 N3 N4 N1 P1 P3 P7

Cout

P2 P4 P8

C1 C3

_1 C2 C4

_2 Clock booster

N2b N2

C1b

P2 P1

Outb Out C1 N1b N1

Vo Vob 4 Phase Charge Pump

Clk2 Clk4

Cb1 Cb2

M4 M2

V out Vin M1 M3 M n M 0

C1 C2 C3

Clk1 Clk3 Clk1 CAMs l SRAM structure that will do a parallel compare against the contents to provide a hit signal for each row (value) l Used by caches to find if data is in cache l Also used for translation look-aside buffers l Also used in switches / routers to check destination address in ethernet against list of addresses l Ternary CAMs allow for bit masking the compare Encoders / Decoders

input 0 1 2 3 4 5 6 7 3 to 8 000 1 0 0 0 0 0 0 0 line decode 001 0 1 0 0 0 0 0 0 010 0 0 1 0 0 0 0 0 011 0 0 0 1 0 0 0 0

Encoder 100 0 0 0 0 1 0 0 0 101 0 0 0 0 0 1 0 0 Decoder 110 0 0 0 0 0 0 1 0 111 0 0 0 0 0 0 0 1 Read Only Memories - ROM

Address Data Out 1 2 2 3 4 5 6 7 n 000 1 0 1 0 1 0 0 0 ROM 001 0 1 0 0 0 0 0 1 010 0 0 1 0 0 1 0 0 011 0 0 1 1 0 0 0 0 m 100 0 0 1 0 0 0 1 1

101 1 1 1 0 0 1 1 1 2n addresses addressed 110 1 1 0 0 0 0 1 0 by n bit m output data bits 111 1 1 1 1 0 0 0 1 Read Only Memories - ROM

n n n to 2n 2 decoder Memory array

Address m input word lines

data output ROM memory array

weak pull down

word line 2N-1 pd pd pd pd pd pd

word line 2N-2

word line 2

word line 1

word line 0

programmed “one” bit lines programmed “zero” data m-1 data m-2 data 2 data1 data0 Random Access Memory (RAM)

bitline bitlineN wordline

6 Transistor SRAM cell word lines

n+c n Address n to 2n input decoder sram array of 6-t cells 2n

c peripheral circuits – column mux, sense amps, write circuitry rnw data in m data out m SRAM Organization l Blocks with unity aspect ratio l Rows l Columns l IO Static Memory Cell

Wordline

T1 T3

True Complement Bit Bit Line T5 T6 Line

T2 T4 4D - Static Memory Cell

Wordline

True T C Complement Bit Bit Line Line

Cell SRAM Read Cross-Section!

DRAMs precharge! TSA! to half Vdd so PFET enable CSA! required as well!

Set! Bit ! Sense! Line ! Isolation! Amp! Isolation Circuit! Bit ! Line! Precharge ! Circuit! Precharge!

Wordline!

TBL! CBL! T

Cell! SRAM Isolation & Pre-charge Circuits!

Sense Amp!

Bit ! Bit Switch Circuit! Line ! Isolation!

Pre-charge ! Circuit! Bit ! Line ! Pre-charge!

Cells! SRAM Sense Amplifier Circuit!

DRAMs precharge! to half Vdd so TSA! PFET enable required as well!

CSA!

Set! Sense! Amp!

Bit Switch! SRAM Internal Memory Waveforms !

Clock

Word line Isolation Set Sense Amp Sense Amp Output Data SRAM Write Head Circuit!

Bit Line! Bit Line! True! Complement!

Write! Enable!

Data! SRAM Decode Circuit!

WL0! WL1! WL2! WL3!

Clock!

W0C! W0T! W0C! W0T!

W1C! W1T! SRAM Cell with Center GND Contact

Vdd

PFET diffusion

Ground NFET diffusion Word line (Polysilicon)

Bit line contacts SRAM Cell with Shared Vdd Contact

PFET diffusion

Vdd

Ground

NFET diffusion Word line (Polysilicon) Bit line contacts Split Word Line SRAM Cell

Bit line contact PFET diffusion Word line (Polysilicon)

NFET diffusion

Bit line contact Ground Vdd Bit Cell Analysis – Read Disturb

Wordline

T1 T3 precharged to 1.8v

True Complement Bit Bit Line T5 T6 Line

starts at 0v but will jump up. T4 If it jumps too high, can flip T2 the bit. T6 is often not min L to keep the jump low. Bit Cell Analysis – Read Disturb

If low, right data node (Vrd) cannot exceed the threshold of T2 or bit may flip.

(Kn6 / 2) (Vdd – Vrd – Vtn)2 = (Kn5 / 2) ( 2 ( Vdd – Vtn)*Vrd – Vrd2)

Kn6/Kn5 < (2(Vdd – 1.5 Vtn) Vtn) / (Vdd – 2*Vtn)2 Bit Cell Analysis - Write l Must ensure that write head circuit can over power cell by the end of the write cycle. l The side of the bit cell with a 0 dominates the write transaction as the pass transistor is an NFET. l When the word line asserts the write head circuit drives a zero on one of the two sides. l The bit data in the cell must be brought below the threshold of the cross-coupled inverter to flip the bit. Bit Cell Analysis – Soft Error

l Radiation (particularly in space – but occasionally on Earth) causes the generation of charge in circuits.

l SOI technology helps as it shields transistors from charge in the bulk silicon.

l The bit cell node has a capacitance and introduced charge will change the voltage at the node.

l If the voltage swing exceeds the threshold of the cross- coupled inverter, the bit will flip (i.e. soft error)

l Qcrit is charge required to flip bit.

l Data is bad, but the bit cell still works (thus soft error). Bit Cell Analysis – Soft Error

Wordline

T1 T3

True Complement Bit Bit Line T5 T6 Line

constant current T2 T4 source turned on for time t Qcrit = I * t Redundancy and Repair l DRAM and SRAMs often have extra rows, columns, IOs and / or Blocks to replace those that are bad. l Two dimensional redundancy (i.e. rows and columns) provides good coverage with minimized. l Rule of thumb (which changes over time) is currently that 2 Mbit memories and above will benefit in terms of yield if redundancy is included. Redundancy and Repair Built-In Self Test l Many register files and embedded SRAMs in ASICs now come with wrapper logic that will test the memory. l The BIST includes muxes that all the test logic access to the ports of the memory. l A BIST state machine generates address and data and writes to the ram, followed by reads and compares of the data. l Some BIST also implement redundancy if necessary – This is often referred to as Built-In Self Repair.