Chlorine Trifluoride

MATERIAL SAFETY DATA SHEET Prepared to U.S. OSHA, CMA, ANSI and Canadian WHMIS Standards 1. PRODUCT IDENTIFICATION

CHEMICAL NAME; CLASS: CHLORINE TRIFLUORIDE

SYNONYMS: Chlorine Fluoride CHEMICAL FAMILY NAME: Halogen Fluoride

FORMULA: ClF3

Document Number: 20026 PRODUCT USE: Use as a fluorinator; for cutting oil-well tubes; reprocessing reactor fuels, as an oxidizer in propellants.

SUPPLIER/MANUFACTURER'S NAME: AIR LIQUIDE AMERICA CORPORATION ADDRESS: 2700 Post Oak Drive Houston, TX 77056-8229 EMERGENCY PHONE: CHEMTREC: 1-800-424-9300 BUSINESS PHONE: General MSDS Information 1-713/896-2896 Fax on Demand: 1-800/231-1366

2. COMPOSITION and INFORMATION ON INGREDIENTS

CHEMICAL NAME CAS # mole % EXPOSURE LIMITS IN AIR ACGIH OSHA TLV STEL PEL STEL IDLH OTHER ppm ppm ppm ppm ppm Chlorine Trifluoride 7790-91-2 > 99% NE 0.1, C NE 0.1, C 20 NIOSH REL: 0.1 C ppm DFG MAK: 0.1 ppm, C Maximum Impurities < 1% None of the trace impurities in this product contribute significantly to the hazards associated with the product. All hazard information pertinent to this product has been provided in this Material Safety Data Sheet, per the requirements of the OSHA Hazard Communication Standard (29 CFR 1910.1200) and State equivalents standards.

NE = Not Established C = Ceiling Limit See Section 16 for Definitions of Terms Used. NOTE: all WHMIS required information is included. It is located in appropriate sections based on the ANSI Z400.1-1993 format.

CHLORINE TRIFLUORIDE - ClF3 MSDS EFFECTIVE DATE: JUNE 1, 1998 PAGE 1 OF 9 3. HAZARD IDENTIFICATION

EMERGENCY OVERVIEW: Chlorine Trifluoride is an extremely toxic, corrosive, water-reactive, oxidizing, colorless, liquefied gas, with a suffocating, sweet odor. Chlorine Trifluoride liquefies easily and the liquid is greenish yellow. Chlorine Trifluoride is a powerful, corrosive irritant to skin, eyes and mucous membranes; however, on-set of symptoms may be delayed. Inhalation over-exposure to Chlorine Trifluoride can lead to potentially fatal lung disorders. Although Chlorine Trifluoride is not flammable, it will enhance the burning rate of all combustible materials and may cause spontaneous ignition of such materials. Chlorine Trifluoride is one of the most powerful oxidizing and highly reactive materials known and reacts with nearly all organic and inorganic substances (including concrete). Chlorine Trifluoride is heavier than air, and pockets of this gas can accumulate in low-lying areas. Extreme caution must be used when responding to releases. Persons who respond to releases of this product must protect themselves from inhalation of the Chlorine Trifluoride gas and mists, especially in areas which are downwind of the release.

SYMPTOMS OF OVER-EXPOSURE BY ROUTE OF EXPOSURE: Chlorine Trifluoride is toxic by all routes of HAZARDOUS MATERIAL INFORMATION SYSTEM exposure. Symptoms of exposure by all routes of exposure may be delayed. HEALTH (BLUE) 4 INHALATION: Inhalation of Chlorine Trifluoride can cause severe health effects, even at relatively low concentrations. This gas causes severe irritation of the nose and throat. Other symptoms of over-exposure to Chlorine Trifluoride gas include (RED) 0 coughing, excessive salivary and sputum formation, labored FLAMMABILITY breathing, and sore throat. In some instances, unconsciousness and potentially fatal lung disorders (e.g., chemical pneumonitis and pulmonary edema) may occur. Symptoms of pulmonary (YELLOW) 3 edema can be delayed. Severe inhalation over-exposures can REACTIVITY lead to hypocalcemia, a life-threatening lowering of serum calcium in the body, due to the formation of fluorides upon contact with the moisture in the lungs. Inhalation of this gas may PROTECTIVE EQUIPMENT X be fatal.

Repeated Chlorine Trifluoride over-exposures by inhalation can EYES RESPIRATORY HANDS BODY result in emphysema and erosion of teeth and a condition known as fluorosis. See Section 8 CONTACT WITH SKIN or EYES: Direct exposure to the skin from the gas or liquid can cause severe burns in seconds. Burns For routine industrial applications may not be immediately painful or visible. Depending on the nature of the exposure, the effects can be immediate or delayed. Subcutaneous tissues can be affected by over- exposure, causing tissues to become blanched and bloodless. Gangrene of affected areas may follow. Minor contact with the eyes will cause tearing and irritation as Chlorine Trifluoride is a lachrymator. Severe over- exposure to the eyes will cause burns, resulting in blindness. SKIN ABSORPTION: Chlorine Trifluoride can decompose upon contact with moisture to form hydrofluoric acid, which can penetrate the skin, causing destruction of the deep tissue layers, including bone tissue. This damage to the body’s tissues may continue for days, as the fluoride ion reacts with the calcium in the skin and bone. Severe skin-contact exposures (especially when the skin contamination exceeds 160 cm2) can lead to hypocalcemia, a life-threatening lowering of serum calcium in the body. HEALTH EFFECTS OR RISKS FROM EXPOSURE: An Explanation in Lay Terms. Over-exposure to Chlorine Trifluoride may cause the following health effects: ACUTE: This gas is extremely corrosive, and can burn and damage eyes, skin, mucous membranes, and any other exposed tissue. If inhaled, irritation of the respiratory system may occur, with coughing, and breathing difficulty. Over-exposure to this gas may cause the extremely dangerous condition of pulmonary edema (an accumulation of fluid in the lungs) and may be fatal. Though unlikely to occur during occupational use, ingestion of large quantities may be fatal. Severe exposure to Chlorine Trifluoride can result in hypocalcemia, which can be fatal unless treated. Hypocalcemia is possible in all instances of inhalation or ingestion or whenever exposure has caused large areas of burns.

CHLORINE TRIFLUORIDE - ClF3 MSDS EFFECTIVE DATE: JUNE 1, 1998 PAGE 2 OF 9 3. HAZARD IDENTIFICATION (Continued) CHRONIC: Persistent irritation may result from repeated exposures to this gas. Repeated Chlorine Trifluoride overexposures by inhalation can result in emphysema and erosion of tooth enamel. Though not anticipated to be a significant hazard associated with routine use of this gas, chronic ingestion of high concentrations of fluoride compounds in water supply can cause mottled enamel of teeth and osteosclerosis. Repeated over-exposure can lead to the condition fluorosis, which is a weakening and degeneration of bone structure. Damage may also occur to the heart, central nervous system and gastrointestinal system. TARGET ORGANS: Respiratory system, skin, eyes, skeletal structure, cardiac and central nervous systems. 4. FIRST-AID MEASURES RESCUERS SHOULD NOT ATTEMPT TO RETRIEVE VICTIMS OF EXPOSURE TO THIS PRODUCT WITHOUT ADEQUATE PERSONAL PROTECTIVE EQUIPMENT. At a minimum, Self- Contained Breathing Apparatus and Chemically-Resistant Personal Protective equipment should be worn. Remove victim(s) to fresh air, as quickly as possible. Only trained personnel should administer supplemental oxygen and/or cardio-pulmonary resuscitation, if necessary. SKIN EXPOSURE: If Chlorine Trifluoride gas or liquid contaminates the skin, immediately begin decontamination with running water. Minimum flushing is for 15 minutes. Calcium gluconate gel should be applied to affected areas. Remove exposed or contaminated clothing, taking care not to contaminate eyes. Victim must seek immediate medical attention. EYE EXPOSURE: If liquid is splashed into eyes, or if irritation of the eye develops after exposure to liquid or gas, open victim's eyes while under gentle running water. Use sufficient force to open eyelids. Have victim "roll" eyes. Minimum flushing is for 15 minutes. Administer anesthetic eye drops after one minute of flushing if victim suffers from spasms to the eyes, in order to facilitate irrigation. Because of the special hazard of fluoride compounds, special treatment procedures are administered to victims of exposure to Chlorine Trifluoride. Physicians should refer to Section 11 (Toxicological Information) for specific recommendations to physicians. Victim(s) must be taken for medical attention. Rescuers should be taken for medical attention, if necessary. Take copy of label and MSDS to physician or other health professional with victim(s). 5. FIRE-FIGHTING MEASURES FLASH POINT: Not applicable. AUTOIGNITION TEMPERATURE: Not applicable. FLAMMABLE LIMITS (in air by volume, %): NFPA RATING Lower (LEL): Not applicable. FLAMMABILITY Upper (UEL): Not applicable. FIRE EXTINGUISHING MATERIALS: Use extinguishing agent 0 appropriate for surrounding materials in a fire. Use water spray to keep fire-exposed containers cool. HEALTH 4 3 REACTIVITY UNUSUAL FIRE AND EXPLOSION HAZARDS: Chlorine Trifluoride is W very toxic via inhalation and skin contact; this gas presents an extreme OX health hazard to firefighters. This gas is a powerful oxidizer which will support and accelerate combustion. As a strong oxidizing gas, OTHER Chlorine Trifluoride presents severe reactivity hazards, as it is readily capable of detonation or explosive decomposition or reaction with a wide range of organic and inorganic materials. In the event of fire, cool containers of this product with water to prevent failure. Do not direct water directly onto the Chlorine Trifluoride release, as Chlorine Trifluoride will react with water. Explosion Sensitivity to Mechanical Impact: Not sensitive. Explosion Sensitivity to Static Discharge: Not sensitive. SPECIAL FIRE-FIGHTING PROCEDURES: Incipient fire responders should wear eye protection. Structural fire fighters must wear Self-Contained Breathing Apparatus and full protective equipment. Chemically-resistant clothing may be necessary. Move fire-exposed containers if it can be done without risk to firefighters. Decontaminate all equipment used in fire-response with an appropriate, acid-neutralizing agent. If this product is involved in a fire, run-off water should be contained to prevent possible environmental damage.

CHLORINE TRIFLUORIDE - ClF3 MSDS EFFECTIVE DATE: JUNE 1, 1998 PAGE 3 OF 9 6. ACCIDENTAL RELEASE MEASURES LEAK RESPONSE: Uncontrolled releases should be responded to by trained personnel using pre-planned procedures. Proper protective equipment should be used. Minimum Personal Protective Equipment should be Level A: triple-gloves (rubber gloves and nitrile gloves, over latex gloves), fully-encapsulating chemically resistant suit and boots, hard-hat, and Self Contained Breathing Apparatus. Small releases of Chlorine Trifluoride can be detected by means of an atomizer or squeeze bottle filled with aqueous ammonia. A white cloud will show the location of the leak. Monitor the surrounding area for Chlorine Trifluoride and oxygen levels. The atmosphere must have at least less than the PEL (PEL = 0.1 ppm, C) of Chlorine Trifluoride and 19.5 percent oxygen before personnel can be allowed in the area without Self-Contained Breathing Apparatus. Attempt to close the main source valve prior to entering the area. If this does not stop the release (or it is not possible to reach the valve), allow the gas to release in place or remove it to a safe area and allow the gas to be released there. If necessary neutralize areas and items contaminated with hydrofluoric acid mist with sodium bicarbonate or another neutralizer appropriate for acids. DO NOT USE SAND, CLAY OR OTHER SILICATE- BASED CLEAN-UP MATERIALS. Decontaminate all equipment used in the response thoroughly. THIS IS AN EXTREMELY TOXIC, WATER-REACTIVE, CORROSIVE GAS. Protection of all personnel and the area must be maintained. All responders must be adequately protected from exposure. 7. HANDLING and USE WORK PRACTICES AND HYGIENE PRACTICES: All areas where Chlorine Trifluoride is used should be monitored with very sensitive gas detection instruments. Detection of concentrations below 50% of the PEL (PEL = 0.1 ppm, C) should trigger immediate response and corrective action. Detection of higher levels should initiate an alarm calling for evacuation of all personnel with the potential to be exposed. Due to the extreme corrosivity and toxicity of Chlorine Trifluoride and hydrofluoric acid (which can be generated from this gas), all contaminated clothing should be removed and placed in a sealed container for proper disposal. Avoid all contact with this gas. All employees who handle this material should be trained to handle it safely. It is highly suggested that persons work with Chlorine Trifluoride in pairs within sight and sound of each other, but in different areas. Avoid breathing the gas or sprays or mists generated by Chlorine Trifluoride. Wash hands after handling chemicals. Do not eat or drink while handling chemicals. All work practices should minimize the release of Chlorine Trifluoride. · Workers who handle Chlorine Trifluoride should wear protective clothing, as listed in Section 8 (Exposure Controls and Personal Protection). · Instant-acting showers should be available in the event of an emergency. · Special eye-wash fountains or similar equipment should be available for eye irrigation. · Proper respiratory protection equipment must be provided and workers using such equipment must be carefully trained in its operation and limitations. · Precautions must always be taken to prevent suck-back of foreign materials into the cylinder by using a check-valve, or vacuum break, since suckback may cause dangerous pressure changes within the cylinder. · Sodium bicarbonate should be available in areas where liquefied Chlorine Trifluoride is used to absorb any spill and to combat any secondary fires. STORAGE AND HANDLING PRACTICES: Cylinders should be stored upright and be firmly secured to prevent falling or being knocked-over. Cylinders can be stored in the open, but in such cases, should be protected against extremes of weather and from the dampness of the ground to prevent rusting. Cylinders should be stored in dry, well-ventilated areas away from sources of heat, ignition and direct sunlight. Keep storage area clear of materials which can burn. Do not allow area where cylinders are stored to exceed 52°C (125°F). Store containers away from heavily trafficked areas and emergency exits. Store away from process and production areas, away from elevators, building and room exits or main aisles leading to exits. Protect cylinders against physical damage. Cylinders of Chlorine Trifluoride should be stored away from organic or combustible materials. Personnel using Chlorine Trifluoride should be protected by a gas cabinet enclosure or barricade and remote control valves, operated from outside the barrier or enclosure. Use only compatible materials for cylinders, process lines, and other Chlorine Trifluoride-handling equipment. Lines should be purged with dry nitrogen both before and after maintenance activity. Use a check valve or other protective device in the discharge line to prevent hazardous backflow. Never tamper with pressure relief valves and cylinders. Periodic inspections of process equipment by knowledgeable persons should be made to ensure that the equipment is used appropriately and the system is kept in suitable operating condition. Emergency equipment suitable for fluoride materials should be available near the point of use. Keep the smallest amount necessary on-site at any one time. Full and empty cylinders should be segregated.

CHLORINE TRIFLUORIDE - ClF3 MSDS EFFECTIVE DATE: JUNE 1, 1998 PAGE 4 OF 9 7. HANDLING and USE (Continued) STORAGE AND HANDLING PRACTICES (continued) Use a first-in, first-out inventory systems to prevent full containers from being stored for long periods of time. It is very important that all equipment used in service with Chlorine Trifluoride be thoroughly cleaned and all traces of grease, scale, pipe dope or other contaminants be removed. Degreasing and cleaning should be done with a non-aqueous solvent such as acetone, trichoroethylene or carbon tetrachloride. After cleaning, the system should be purged with nitrogen. After purging with Nitrogen has been completed, the system should be passivated by evacuating the dry nitrogen from the system and slowly bleeding a small amount of Chlorine Trifluoride into the system. Due to the low vapor pressure of Chlorine Trifluoride, the vapor should be left in the system for about an hour to ensure a passivation film has been built-up. SPECIAL PRECAUTIONS FOR HANDLING GAS CYLINDERS: Compressed gases can present significant safety hazards. The following rules are applicable to work situations in which cylinders are being used. Before Use: Move cylinders with a suitable hand-truck. Do not drag, slide or roll cylinders. Do not drop cylinders or permit them to strike each other. Secure cylinders firmly. Leave the valve protection cap (where provided) in-place until cylinder is ready for use. During Use: Use designated CGA fittings and other support equipment. Do not use adapters. Do not heat cylinder by any means to increase the discharge rate of the product from the cylinder. Do not use oils or grease on gas-handling fittings or equipment. Immediately contact the supplier if there are any difficulties associated with operating cylinder valve. Never insert an object (e.g., wrench, screwdriver, pry bar, etc.) into valve cap openings. Doing so may damage valve, causing a leak to occur. Use an adjustable strap wrench to remove over-tight or rusted caps. Never strike an arc, on a compressed gas cylinder or make a cylinder part of and electric circuit. After Use: Close main cylinder valve. Replace valve protection cap. Mark empty cylinders “EMPTY”. NOTE: Use only DOT or ASME code containers designed for water-reactive, oxidizing, corrosive storage. Close valve after each use and when empty. STANDARD VALVE CONNECTIONS FOR U.S. AND CANADA: Use the proper CGA connections, DO NOT USE ADAPTERS: THREADED: CGA 350 PIN-INDEXED YOKE: Not applicable. ULTRA HIGH INTEGRITY: Not applicable. PROTECTIVE PRACTICES DURING MAINTENANCE OF CONTAMINATED EQUIPMENT: Follow practices indicated in Section 6 (Accidental Release Measures). Make certain application equipment is locked and tagged- out safely. Purge gas handling equipment with inert gas (i.e. argon) before attempting repairs. Always use product in areas where adequate ventilation is provided. 8. EXPOSURE CONTROLS - PERSONAL PROTECTION VENTILATION AND ENGINEERING CONTROLS: Use with adequate ventilation. A hood with forced ventilation is preferable. Because of the high hazard associated with Chlorine Trifluoride, stringent control measures such as a gas cabinet enclosure or isolation may be necessary. Ductwork should be constructed of non-metallic material, or should be lined to resist corrosion. If appropriate, install automatic monitoring equipment to detect the level of Chlorine Trifluoride. RESPIRATORY PROTECTION: Maintain exposure levels of Chlorine Trifluoride below the levels listed in Section 2 (Composition and Information on Ingredients) and oxygen levels above 19.5% in the workplace. Use supplied air respiratory protection if Chlorine Trifluoride levels exceed exposure limits or during emergency response to a release of this product. If respiratory protection is required, follow the requirements of the Federal OSHA Respiratory Protection Standard (29 CFR 1910.134), or equivalent State standards. The following NIOSH respiratory protection recommendations are for Chlorine Trifluoride. CONCENTRATION RESPIRATORY EQUIPMENT Up to 2.5 ppm: Supplied Air Respirator (SAR) operated in continuous-flow mode. Up to 5 ppm: Full-facepiece SCBA, or full-facepiece Supplied Air Respirator (SAR). Up to 20 ppm: Positive-pressure, full-facepiece Supplied Air Respirator (SAR). Emergency or Planned Entry into Unknown Concentration or IDLH Conditions: Positive-pressure, full facepiece SCBA or positive pressure, full-facepiece SAR with an auxiliary positive pressure SCBA. Escape Gas mask or mouth-piece respirator with Chlorine Trifluoride cartridges or escape-type SCBA should be used. The IDLH concentration for Chlorine Trifluoride is 20 ppm.

CHLORINE TRIFLUORIDE - ClF3 MSDS EFFECTIVE DATE: JUNE 1, 1998 PAGE 5 OF 9 8. EXPOSURE CONTROLS - PERSONAL PROTECTION (Continued) EYE PROTECTION: Splash goggles or safety glasses and face shield. HAND PROTECTION: Wear leather gloves when handling cylinders of this product. Wear chemically resistant gloves appropriate for use with Chlorine Trifluoride for industrial use. Gloves should have a resistance to breakthrough greater than 8 hours, such as Teflon™, or Responder™. Natural rubber, neoprene, nitrile rubber, or polyethylene, polyvinyl chloride are not recommended. Use triple gloves for spill response (see Section 6, Accidental Release Measures). BODY PROTECTION: Use body protection appropriate for task. An apron, or other impermeable body protection is suggested. Safety shoes are recommended when handling cylinders. Full-body chemical protective clothing is recommended for emergency response procedures. 9. PHYSICAL and CHEMICAL PROPERTIES GAS DENSITY @ 20°C (68°F) and 101.325 air = 1: 0.243 lb/ft3 (3.863 kg/m3) LIQUID DENSITY @ 0°C (32°F): 117 lb/ft3 (1.885 kg/l) FREEZING/MELTING POINT (triple point): -76.3°C (-105.4°F) BOILING POINT: 11.75°C (53.2°F) GAS SPECIFIC GRAVITY @ 101.325 and 20°C (68°F)air = 1: 2.46 pH: Not applicable. ODOR THRESHOLD: Not available. MOLECULAR WEIGHT: 92.46 SOLUBILITY IN WATER: Decomposes. EXPANSION RATIO: Not applicable. EVAPORATION RATE (nBuAc = 1): Not applicable. SPECIFIC VOLUME (ft3/lb): 4.2 LIQUID SPECIFIC GRAVITY @ 100°C (212°F) water -= 1: 1.825 VAPOR PRESSURE (air = 1): 3.2 COEFFICIENT WATER/OIL DISTRIBUTION: Not applicable. APPEARANCE AND COLOR: Chlorine Trifluoride is a colorless gas at room temperature and pressure, or greenish-yellow liquid; both have a suffocating, sweet odor. HOW TO DETECT THIS SUBSTANCE (warning properties): The odor and its lacrymation properties can be distinctive warning properties associated with this product. Monitoring systems must be used for detection of this gas. 10. STABILITY and REACTIVITY STABILITY: Reacts with water or moisture in the air to form hydrogen fluoride, hydrofluoric acid and chlorine. DECOMPOSITION PRODUCTS: When heated to decomposition or in reaction with water, Chlorine Trifluoride gas emits hydrogen fluoride, hydrogen chloride, and a variety of other chlorine and fluorine compounds; liquefied Chlorine Trifluoride decomposes to hydrofluoric acid and other fluoride and chloride compounds. MATERIALS WITH WHICH SUBSTANCE IS INCOMPATIBLE: Chlorine Trifluoride reacts explosively with water, bis(trifluoromethyl)sulfide or -disulfide, polychlorotrifluoroethylene, trifluoromethanesulfenyl chloride and hydrogen containing compounds such as ammonia, coal gas, hydrogen, hydrogen sulfide, methane, acetic acid, benzene, ether, cotton, paper and wood. Chlorine Trifluoride will form shock-sensitive mixtures with highly chlorinated compounds and nitroaryl compounds. In reaction with ammonium fluoride or ammonium hydrogen fluoride, Chlorine Trifluoride forms explosive gaseous products. Chlorine Trifluoride reacts vigorously with most oxidizable substances at room temperature, frequently with ignition. Chlorine Trifluoride will ignite upon contact with boron-containing materials, iodine, asbestos, glass wool, sand, tungsten carbide and fluorinated polymers. Chlorine Trifluoride forms fluorides with all elements, except helium, neon and argon. Chlorine Trifluoride can dissolve metals containing silica. Chlorine Trifluoride also reacts with many other materials such as acids, chlorides, hydrides, metal iodides, metal borides, metal acetylides, metal carbides, metal cyano complexes, metals, metal salts, metal silicides, alkali metals, metal oxides, non-metals, non-metals oxides, polymides, phenol-formaldehyde resins, alkenes, silicides, silicates, alkyl benzenes, alkaline earths, sodium dicyanamides, oxygenated organic compounds, ceramic materials, covalent halides, halogens, gaseous hydrocarbons, sulfides, nitrogenous bases, and halogen acids. Chlorine Trifluoride dissolves glass, ceramics, metals containing silica, natural rubber, leather and plastics. These materials should never be used for the storage of Chlorine Trifluoride, in Chlorine Trifluoride systems or for personal protective equipment worn during the use of Chlorine Trifluoride. HAZARDOUS POLYMERIZATION: Will not occur. CONDITIONS TO AVOID: Contact with incompatible materials and exposure to moisture. Cylinders exposed to high temperatures or direct flame can rupture or burst.

CHLORINE TRIFLUORIDE - ClF3 MSDS EFFECTIVE DATE: JUNE 1, 1998 PAGE 6 OF 9 11. TOXICOLOGICAL INFORMATION TOXICITY DATA: The following information is for Chlorine Trifluoride.

Eye effects-Rat 21 ppm/12 hours-Intermittent Inhalation-Human LCLo: 50 ppm Inhalation-Mouse LC50: 178 ppm/1 hour Eye effects-Dog, adult 21 ppm/12 hours- Inhalation-Rat LCLo: 400 ppm/30 minutes ibl-Monkey LC50: 230 ppm/1 hour Intermittent SUSPECTED CANCER AGENT: Chlorine Trifluoride is not found on the following lists: FEDERAL OSHA Z LIST, IARC, NTP, CAL/OSHA, and therefore is not considered to be, nor suspected to be a cancer-causing agent by these agencies. IRRITANCY OF PRODUCT: Chlorine Trifluoride is severely irritating to contaminated tissue. SENSITIZATION TO THE PRODUCT: Chlorine Trifluoride is not known to be a sensitizer to humans upon prolonged or repeated contact. REPRODUCTIVE TOXICITY INFORMATION: Listed below is information concerning the effects of Chlorine Trifluoride on the human reproductive system. Mutagenicity: No human mutagenic effects have been described for Chlorine Trifluoride. Embryotoxcity: No human embryotoxic effects have been described for Chlorine Trifluoride. Teratogenicity: No human teratogenic effects have been described for Chlorine Trifluoride. Reproductive Toxicity: No human reproductive effects have been described for Chlorine Trifluoride. A mutagen is a chemical which causes permanent changes to genetic material (DNA) such that the changes will propagate through generation lines. An embryotoxin is a chemical which causes damage to a developing embryo (i.e. within the first eight weeks of pregnancy in humans), but the damage does not propagate across generational lines. A teratogen is a chemical which causes damage to a developing fetus, but the damage does not propagate across generational lines. A reproductive toxin is any substance which interferes in any way with the reproductive process. MEDICAL CONDITIONS AGGRAVATED BY EXPOSURE: Pre-existing dermatitis, other skin conditions, and respiratory disorders may be aggravated by over-exposure to Chlorine Trifluoride. Additionally, over-exposures may aggravate dental problems, heart conditions, bone disorders, and eye problems. RECOMMENDATIONS TO PHYSICIANS: For Inhalation Exposure: Administer 100% oxygen at half-hour intervals for three to four hours for victims of minor inhalation exposure. For serious inhalation exposure, 100% oxygen administration should begin immediately, under positive pressure (<4 cm) for half-hour periods for at least six hours until breathing is easy and the color of the skin and mucous membranes is normal. For Skin Contact: For skin contamination, all areas of exposure should be flushed with copious quantities of water, followed by an iced aqueous or alcoholic solution of 0.13% benzalkonium chloride, iced 70% alcohol, or an ice-cold saturated solution of magnesium sulfate. If the area of burn cannot be drenched or immersed in solution, apply cold compresses containing the materials of the solution. After the iced solution treatment, application of a paste of powdered magnesium oxide and glycerin should be administered. The paste should be applied daily for several days. The prevention of serious burns can be prevented by infiltration of the skin and subcutaneous tissues with a 10% calcium gluconate solution, along with a local anesthetic. Care should be taken to see that all medical personnel providing treatment wear chemically-impervious gloves. In cases of severe over-exposure (more than 160 cm2), there is a potential for hypocalcemia. Therefore, systemic administration of calcium gluconate may be necessary. Frequent monitoring of serum calcium, cardiac, renal, and hepatic functions is necessary. For Eye Contact: Exposed eyes should be flushed for 15 minutes, and the following additional treatment be provided: Treat with a continuous drip of 1 percent calcium gluconate in normal, sterile saline. No oils or ointments should be used. BIOLOGICAL EXPOSURE INDICES (BEIs): Biological Exposure Indices (BEIs) are applicable for Fluorides, as follows.

CHEMICAL DETERMINANT SAMPLING TIME BEI FLUORIDES ·Fluorides in urine · Prior to shift ·3 mg/g creatinine · End of shift · 10 mg/g creatinine 12. ECOLOGICAL INFORMATION ENVIRONMENTAL STABILITY: Chlorine Trifluoride will react in water to form chlorine and hydrofluoric acid. All work practices should be aimed at eliminating environmental contamination.

CHLORINE TRIFLUORIDE - ClF3 MSDS EFFECTIVE DATE: JUNE 1, 1998 PAGE 7 OF 9 12. ECOLOGICAL INFORMATION (Continued) EFFECT OF MATERIAL ON PLANTS or ANIMALS: Due to the corrosive nature of this product, animals exposed to this product will experience tissue damage, burns, and may be killed. Plants contaminated with this product may be adversely affected or destroyed. EFFECT OF CHEMICAL ON AQUATIC LIFE: Chlorine Trifluoride will form hydrofluoric acid in water, and even low concentrations in water will be detrimental to aquatic life. If a release this product occurs near a river or other body of water, the release has the potential to kill fish and other aquatic life. 13. DISPOSAL CONSIDERATIONS PREPARING WASTES FOR DISPOSAL: Waste disposal must be in accordance with appropriate Federal, State, and local regulations. Return cylinders with any residual product to Air Liquide. Do not dispose of locally. 14. TRANSPORTATION INFORMATION THIS MATERIAL IS HAZARDOUS AS DEFINED BY 49 CFR 172.101 BY THE U.S. DEPARTMENT OF TRANSPORTATION. PROPER SHIPPING NAME: Chlorine trifluoride HAZARD CLASS NUMBER and DESCRIPTION: 2.3 (Toxic Gas) UN IDENTIFICATION NUMBER: UN 1749 PACKING GROUP: Not applicable. DOT LABEL(S) REQUIRED: Poison Gas, Oxidizer, Corrosive NORTH AMERICAN EMERGENCY RESPONSE GUIDEBOOK NUMBER (1996): 124 SPECIAL PROVISION: Chlorine Trifluoride is poisonous by inhalation. Shipments must be properly described as “Poison Inhalation Hazard - ZONE B”. MARINE POLLUTANT: Chlorine Trifluoride is not classified by the DOT as a Marine Pollutant (as defined by 49 CFR 172.101, Appendix B). SPECIAL SHIPPING INFORMATION: Cylinders should be transported in a secure position, in a well-ventilated vehicle. The transportation of compressed gas cylinders in automobiles or in closed-body vehicles present serious safety hazards and should be discouraged. NOTE: Shipment of compressed gas cylinders which have not been filled with the owners consent is a violation of Federal law (49 CFR, Part 173.301 (b). TRANSPORT CANADA TRANSPORTATION OF DANGEROUS GOODS REGULATIONS: THIS MATERIAL IS CONSIDERED AS DANGEROUS GOODS. Refer to the following information for Canadian Shipments. NOTE: 102 (Poison-Inhalation Hazard). 15. REGULATORY INFORMATION SARA REPORTING REQUIREMENTS: Chlorine Trifluoride is not subject to the reporting requirements of Sections 302, 304 and 313 of Title III of the Superfund Amendments and Reauthorization Act. SARA THRESHOLD PLANNING QUANTITY: Not applicable. TSCA INVENTORY STATUS: Chlorine Trifluoride is listed on the TSCA Inventory. CERCLA REPORTABLE QUANTITY (RQ): Not applicable. OTHER U.S. FEDERAL REGULATIONS: • Chlorine Trifluoride (as Fluoride) is subject to the reporting requirements of CFR 29 1910.1000. Chlorine Trifluoride is listed on Table Z.1. • Chlorine Trifluoride is not subject to the reporting requirements of Section 112(r) of the Clean Air Act. • Depending on specific operations involving the use of Chlorine Trifluoride, the regulations of the Process Safety Management of Highly Hazardous Chemicals may be applicable (29 CFR 1910.119). Chlorine Trifluoride is listed in Appendix A of this regulation. The threshold quantity for Chlorine Trifluoride under this regulation is 1,000 lbs. • Chlorine Trifluoride does not contain any Class I or Class II ozone depleting chemicals (40 CFR part 82). • Chlorine Trifluoride is not listed as a Regulated Substance, per 40 CFR, Part 68, of the Risk Management for Chemical Release Prevention. OTHER CANADIAN REGULATIONS: Chlorine Trifluoride is categorized as a Controlled Product, Hazard Classes A, D1A, C, and E, as per the Controlled Product Regulations.

CHLORINE TRIFLUORIDE - ClF3 MSDS EFFECTIVE DATE: JUNE 1, 1998 PAGE 8 OF 9 15. REGULATORY INFORMATION (Continued) STATE REGULATORY INFORMATION: Chlorine Trifluoride is covered under specific State regulations, as denoted below: Alaska - Designated Toxic and Hazardous Massachusetts - Substance List: Chlorine Pennsylvania - Hazardous Substance List: Substances: Chlorine Trifluoride. Trifluoride. Chlorine Trifluoride. California - Permissible Exposure Limits Michigan - Critical Materials Register: No. Rhode Island - Hazardous Substance List: for Chemical Contaminants: Chlorine Minnesota - List of Hazardous Chlorine Trifluoride. Trifluoride. Substances: Chlorine Trifluoride. Texas - Hazardous Substance List: Florida - Substance List: Chlorine Missouri - Employer Information/Toxic Chlorine Trifluoride. Trifluoride. Substance List: Chlorine Trifluoride. West Virginia - Hazardous Substance Illinois - Toxic Substance List: Chlorine New Jersey - Right to Know Hazardous List: Chlorine Trifluoride. Trifluoride. Substance List: Chlorine Trifluoride. Wisconsin - Toxic and Hazardous Kansas - Section 302/313 List: No. North Dakota - List of Hazardous Substances: Chlorine Trifluoride. Chemicals, Reportable Quantities: No. CALIFORNIA PROPOSITION 65: Chlorine Trifluoride is not on the California Proposition 65 lists. 16. OTHER INFORMATION MIXTURES: When two or more gases or liquefied gases are mixed, their hazardous properties may combine to create additional, unexpected hazards. Obtain and evaluate the safety information for each component before you produce the mixture. Consult an Industrial Hygienist or other trained person when you make your safety evaluation of the end product. Remember, gases and liquids have properties which can cause serious injury or death. Further information can be found in the following pamphlets published by: Compressed Gas Association Inc. (CGA), 1725 Jefferson Davis Highway, Suite 1004, Arlington, VA 22202-4102. Telephone: (703) 412-0900. P-1 “Safe Handling of Compressed Gases in Containers” AV-1 “Safe Handling and Storage of Compressed Gases” “Handbook of Compressed Gases” PREPARED BY: CHEMICAL SAFETY ASSOCIATES, Inc. 9163 Chesapeake Drive, San Diego, CA 92123-1002 619/565-0302 Fax on Demand: 1-800/231-1366

This Material Safety Data Sheet is offered pursuant to OSHA’s Hazard Communication Standard, 29 CFR, 1910.1200. Other government regulations must be reviewed for applicability to this product. To the best of Air Liquide America Corporation’s knowledge, the information contained herein is reliable and accurate as of this date; however, accuracy, suitability or completeness are not guaranteed and no warranties of any type, either express or implied, are provided. The information contained herein relates only to this specific product. If this product is combined with other materials, all component properties must be considered. Data may be changed from time to time. Be sure to consult the latest edition.

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