INSTITUTE OF SMART STRUCTURES AND SYSTEMS (ISSS) JOURNAL OF ISSS J. ISSS Vol. 3 No. 2, pp. 39-59, Sept. 2014. REVIEW ARTICLE A Technology Overview and Applications of Bio-MEMS Nidhi Maheshwari+, Gaurav Chatterjee+, V. Ramgopal Rao. Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai, India-400076. Corresponding Author:
[email protected] + Both the authors have contributed equally. Keywords: Abstract Bio-MEMS, immobilization, Miniaturization of conventional technologies has long cantilever, micro-fabrication, been understood to have many benefits, like: lower cost of biosensor. production, lower form factor leading to portable applications, and lower power consumption. Micro/Nano fabrication has seen tremendous research and commercial activity in the past few decades buoyed by the silicon revolution. As an offset of the same fabrication platform, the Micro-electro-mechanical- systems (MEMS) technology was conceived to fabricate complex mechanical structures on a micro level. MEMS technology has generated considerable research interest recently, and has even led to some commercially successful applications. Almost every smart phone is now equipped with a MEMS accelerometer-gyroscope system. MEMS technology is now being used for realizing devices having biomedical applications. Such devices can be placed under a subset of MEMS called the Bio-MEMS (Biological MEMS). In this paper, a brief introduction to the Bio-MEMS technology and the current state of art applications is discussed. 1. Introduction Generally, the Bio-MEMS can be defined as any The interdisciplinary nature of the Bio-MEMS research is system or device, which is fabricated using the highlighted in Figure 2. This highlights the overlapping of micro-nano fabrication technology, and used many different scientific disciplines, and the need for a healthy for biomedical applications such as diagnostics, collaborative effort.