Lecture 27
Semiconductor Memory: DRAM and Non-Volatile Memory
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Administrivia
l Today: Project phase 3 announcement. l Poster Session Tu 5/8 1-4pm » Location BWRC, 2108 Allston Way l Last lecture on Th 5/3 will cover issues in IC design
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1 Lectures
Last l ROM and SRAM Today l Introducing the project phase III l DRAM and Non-volatile
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Project Phase III
A proposed SRAM cell! w/ Control Circuit
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2 Tasks
l Explain the behavior of the cell in its global contents. Provide transient simulations to illustrate. l Identify weakness of the cell in terms of signal integrity and power dissipation. Quantify your statements. l Propose an implementation that improves power dissipation.
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Report l Report » Comparison, Selection, Electrical Design » Cell Layout, Timing Waveforms in SRAM, Simulation » Power and Estimation and Proposal for SRAM power reduction l 3 slides on poster, each of which represents one of the tasks of the previous slide » Explanation of cell operation, comparison, design » Cell Operation in SRAM, Waveforms, Simulation » Proposal of improved SRAM implementation (from a power perspective)
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3 SEMICONDUCTOR MEMORIES
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3-Transistor DRAM Cell
BL1 BL2
WWL WWL
RWL RWL
X X M3 VDD-VT M2 M1 VDD BL1 CS
BL2 VDD-VT DV
No constraints on device ratios Reads are non-destructive Value stored at node X when writing a “1” = VWWL-VTn
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4 3T-DRAM — Layout
BL2 BL1 GND
RWL M3
M2
WWL M1
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1-Transistor DRAM Cell
BL WL Write "1" Read "1" WL
1 M C X S GND VDD-VT
V BL DD
VDD/2 VDD/2 CBL sensing
Write: CS is charged or discharged by asserting WL and BL. Read: Charge redistribution takes places between bit line and storage capacitance
CS DV= VBL– VPRE = (VBIT– VPRE)------CS + CBL Voltage swing is small; typically around 250 mV.
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5 DRAM Cell Observations
1T DRAM requires a sense amplifier for each bit line, due to charge redistribution read-out. DRAM memory cells are single ended in contrast to SRAM cells. The read-out of the 1T DRAM cell is destructive; read and refresh operations are necessary for correct operation. Unlike 3T cell, 1T cell requires presence of an extra capacitance that must be explicitly included in the design. When writing a “1” into a DRAM cell, a threshold voltage is lost. This charge loss can be circumvented by bootstrapping the
word lines to a higher value than VDD.
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1-T DRAM Cell
Capacitor
Metal word line M1 word line SiO2 poly Field Oxide n+ n+ Inversion layer poly Diffused induced by bit line plate bias Polysilicon Polysilicon plate (a) Cross-section gate (b) Layout
Used Polysilicon-Diffusion Capacitance Expensive in Area
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6 SEM of poly-diffusion capacitor 1T-DRAM
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Advanced 1T DRAM Cells
Word line Capacitor dielectric layer Insulating Layer Cell plate
Cell Plate Si
Capacitor Insulator Transfer gate Isolation Refilling Poly Storage electrode
Storage Node Poly
Si Substrate 2nd Field Oxide
Trench Cell Stacked-capacitor Cell
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7 Single-to-Differential Conversion
WL BL x Diff. x
+ S.A. _ cell Vref
y y
How to make good Vref?
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Open bitline architecture
EQ
R L1 L0 R0 R1 L
VDD SE
BLL BLR
...... CS CS CS SE CS CS CS
dummy dummy cell cell
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8 DRAM Read Process with Dummy Cell
6.0
) 4.0 t l o
V BL (
V 2.0 BL 5.0 0.0 4.0 WL
0 1 2 3 4 5 ) t t (nsec) l 3.0 SE o V
(a) reading a zero ( 2.0 EQ V 6.0 1.0 0.00 1 2 3 4 5 )
t 4.0
l (c) control signals
o BL V (
V 2.0 BL
0.00 1 2 3 4 5 t (nsec) (b) reading a one
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Memory Timing: Definitions
Read Cycle
READ
Read Access Read Access Write Cycle
WRITE
Write Access Data Valid
DATA
Data Written
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9 Memory Timing: Approaches
MSB LSB
Address Row Address Bus Column Address
RAS Address Address Bus
Address transition CAS initiates memory operation
RAS-CAS timing
DRAM Timing SRAM Timing Multiplexed Adressing Self-timed
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Address Transition Detection
VDD
DELAY A0 td ATD ATD
DELAY A1 td
... DELAY
AN-1 td
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10 DRAM Timing
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Floating-gate transistor (FAMOS)
Floating gate Gate D Source Drain
tox G
tox S n+ p n+ Substrate
(a) Device cross-section (b) Schematic symbol
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11 Floating-Gate Transistor Programming
20 V 0 V 5 V
20 V 0 V 5 V 10 V® 5 V -5 V -2.5 V
S D S D S D
Avalanche injection. Removing programming voltage Programming results in leaves charge trapped. higher VT.
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FLOTOX EEPROM
Floating gate Gate I Source Drain
20-30 nm -10 V VGD 10 V + + n Substrate n p 10 nm (a) Flotox transistor (b) Fowler-Nordheim I-V characteristic
BL
WL
VDD
(c) EEPROM cell during a read operation
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12 Flash EEPROM
Control gate
Floating gate
erasure Thin tunneling oxide
+ n+ source n drain programming
p-substrate
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Cross-sections of NVM cells
Flash EPROM Courtesy Intel Digital Integrated Circuits Interconnect © Prentice Hall 2000
13 Characteristics of State-of-the-art NVM
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Sense Amplifiers
make DV as small C × DV as possible tp = ------Iav
large small Idea: Use Sense Amplifer
small transition s.a.
input output
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14 Differential Sensing - SRAM
VDD VDD V PC V DD DD y M3 M4 y
x M1 M2 x x x BL BL EQ SE M5 SE
WLi (b) Doubled-ended Current Mirror Amplifier
VDD SRAM cell i y y Diff. x Sense x x x Amp y y D D SE
(a) SRAM sensing scheme. (c) Cross-Coupled Amplifier
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Latch-Based Sense Amplifier
EQ BL BL
VDD SE
SE
Initialized in its meta-stable point with EQ Once adequate voltage gap created, sense amp enabled with SE Positive feedback quickly forces output to a stable operating point.
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15 Single-Ended Cascode Amplifier
VDD
Vcasc
WLC
WL
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16