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P020190719558587609057.Pdf microtechnology and mems Springer-Verlag Berlin Heidelberg GmbH microtechnology and mems Series Editor: H. Baltes D. Liepmann The series Microtechnology and MEMS comprises text books, monographs, and state-of-the-art reports in the very active field of microsystems and microtechno- logy. Written by leading physicists and engineers, the books describe the basic science, device design, and applications. They will appeal to researchers, engineers, and advanced students. Mechanical Microsensors By M. Elwenspoek and R. Wiegerink CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications By D. Lange, O. Brand, and H. Baltes Micromachines as Tools for Nanotechnology Editor: H. Fujita H. Fujita (Ed.) Micromachines as Tools for Nanotechnology With 183 Figures 13 Professor I [iroyuki Pujita Th(' Univ('rsity ofTokyo [nstitut(' of [ndustrial Sci('nc(' 4-6-1 Komaba, Meguro-ku Tokyo 153-8505, lapan E-mail: [email protected] Scrics Edilors: Professor Dr, I r. l3altcs ETH Ziirich, Phy~ical Electronics Laboralory ETI 1 [lo('Jlgg('rb('rg, 1[1'T -l [6, 1:\093 llirich, Switz('rland Profcssor Dr. Dorian Licpmann Univ('rsity of California, D('partment of Bioengineering 466 Evan~ Hali, #1762, Berkeley, CA 94720-1762, USA ISSN 1615-8}26 ISBN 978-3-642-62465-0 l.ibrary o f Co ngn'S~ Calaloging_in_Publica tionllata Fujila, Hiroyuki. 1952- Mircromachin<?s as lools for nanolechno[og)' III. !'ujita. p. Cm. __ (Mi rcol~..:bnology and MEMS) Inc!udcs bibliographical referen"'. arul index. ISBN 978-3-642-62465-0 ISBN 978-3-642-55503-9 (eBook) DOI 10.1007/978-3-642-55503-9 1. Nan O I~..:hnol ogy. 2. Mircoek..:tromedanical systcms. 1. Title. II. Seri~'S. TL74.7.1'852003 620'.5-·dClL 200J045497 This work is subject 10 copyright. Al! rights are rcscrw{\, whethcr the whole or pari of the material is concerne<I, specifical!y Lhe righls of trdnslation. reprinting, reusc of iIl llstrdtions, recilalion. broadcasting, reproduction On microfilm or in any Olher way, amI storage in dala bank$. Duplicalion of thi$ publieation or parts thCf<~)f is permill~-d only under the provisions or the German Copyrighll ... w of s.cpk~ nb cr 9, L965 , in ils CUrTenl ,""rsion, and permission for usc mu st always bc oolaincd frOI11 Springer_Verlag. Violations arc !iable for prosecution under Ihe German Copyright Law. hllp:llwww .• p.;nger.de @ Springer-VerlagBerlin Hcidelberg 2OO 3 OriGinall)' pul:>li shc<.ll:>y Sprinl\c,-Vc'r!ay, Ikrli" I-kidclb<-'Jl.\ New Y orl< OI 2003 S<>ftco"cr "'P';'" of the hanlco""" ISI rolhOll ~oo 3 Thc use of gene ..... 1 descripti\'e names, rcgistcrcd names, t ..... dcm~rks, cle. in this publication J oes no t imply, even in Ihe absence ofa specific slatemmt, that sllch naJUcs arc excmpt from the relevant proteetive laws and regulalions and Iherefore frec for general usc. Typ<.'SCuing: Camcra_ re~dy copyby Ihe <"<Ii lor and 1.J;.'1i.:X GbR I.cip1.ig using ~ Springer t'li.:Xm~cro I'roduction: LE-'Ij;X rcJouck, S-chmidt & V()ck lcr GbR, Leipzig Cover concept: eSllIdio Calamar Sicinen Cover produetion: design 6 produC/ion GmbH, HC1(!elberg I'rinlcd on acid.fn'C paper SPIN 110098'8 S7131,,'Yt-}43~ 1 Preface Nanotechnology is the key technology of the 21st century that promises to bring dramatic new developments in electronics, communication networks, biotechnology, medical science and environmental research. The technology is expected to play an essential part in the life of society in the future. Gov- ernments around the world fund and promote major projects for research in nanotechnology while intensive efforts are also made in the private sector. Nanotechnology deals with materials, structures, and devices having sizes of the order of one to hundreds of nanometers. The basic idea lies in as- sembling atoms and molecules into complex arrangements that have novel functionality. While mother nature can build all the complex organs of living creatures from protein and other biomolecules, we are unable to build a whole system from the bottom up. Also a precise understanding of the nanoscopic world is essential before we can make full use of nano phenomena. I believe that miniaturized devices and machines play a key role in bridging the gap between the nanoscopic world and our macroscopic world. This book describes some of the latest developments in micromachining technology based on semiconductor processes for integrated circuits and ap- plied to nanotechnology. The minimum size of transistors has been reduced to almost 100 nanometers thus it becomes possible to fabricate miniatur- ized tools having sizes ranging from 10 to 100 nanometers. These tools are suitable for measuring, observing, handling and controlling nanoscopic ob- jects, namely DNA molecules, proteins, and semiconductors quantum dots. Of course, this is just the beginning of such applications. I even envision hy- brid systems, combining both nanomaterials and micromachined devices, to be developed within the next five to ten years. I hope you share the excite- ment of observing a new field of research in creation. I would like to thank Dr. Claus E. Ascheron for his continuous encour- agement and Mr. Ryuji Yokokawa for his help in editing chapters. Tokyo, Japan Hiroyuki Fujita 22 April, 2003 Contents 1 Micromachining Tools for Nanosystems Hiroyuki Fujita ................................................. 1 1.1 Introduction............................................... 1 1.2 Bottom–UpandTop–DownApproaches....................... 2 1.3 Combining the Two Approaches to Nanosystems ............... 4 1.4 Micro- and Nanomachining .................................. 7 1.5 ExamplesofMicromachinedNanodevices...................... 9 1.5.1 Microprobe Arrays for Ultrahigh Density Data Storage . 9 1.5.2 Multiple Nanoprobes .................................. 12 1.5.3 Microfluidic Devices Incorporating Biomaterial ........... 14 1.6 Organization of the Book .................................... 17 References..................................................... 18 2 Microsystems for Single-Molecule Handling and Modification Masao Washizu ................................................. 21 2.1 Stretch-and-Positioning of DNA .............................. 23 2.2 MolecularSurgeryofDNA .................................. 26 2.2.1 LaserSurgery........................................ 26 2.2.2 Mechanical Surgery with an AFM Tip ................... 27 2.2.3 Molecular Surgery with an Enzyme-Labeled Probe . 30 2.2.4 UseofLocalTemperatureRise......................... 38 2.3 A Microfabricated Probe for Molecular Surgery . 40 2.4 Conclusion ................................................ 42 References..................................................... 43 3 Manipulation of Single DNA Molecules Akira Mizuno .................................................. 45 3.1 ManipulationofGiantDNAMolecules........................ 47 3.1.1 CharacteristicsofGlobularDNA ....................... 48 3.1.2 Suppression of Fragmentation by Globular Transition ..... 49 3.1.3 Laser Trapping of Single DNA .......................... 53 3.2 StretchingaGiantDNAMolecule............................ 57 3.2.1 Observation and Fixation of Single DNA . 57 VIII Contents 3.2.2 Stretching and Fixing DNA Via the Globule–Coil Transformation . ................... 57 3.3 Mapping Stretched Single DNA Molecules ..................... 60 3.3.1 HybridizationwithaProbe............................ 60 3.3.2 RestrictionMap...................................... 63 3.4 CuttingStretchedDNA..................................... 63 3.4.1 Localizing Enzyme Activity byLocalTemperatureControl.......................... 64 3.4.2 Cutting DNA by Controlling Ionic Concentration . ....... 68 3.5 RecoveryofDNAFragments................................. 70 3.6 MicroreactorsforDNAManipulation ......................... 72 3.6.1 ProductionofMicroreactorsinOil...................... 73 3.6.2 Manipulation and Fusion of Microreactors . 73 3.6.3 Indirect Manipulation of Globular DNA Molecules . ....... 74 3.6.4 Chemical Reaction in the W/O Microreactor System ...... 75 3.6.5 PCRAmplificationofDNAFragments.................. 76 3.7 Conclusion ................................................ 78 References..................................................... 78 4 Near-Field Optics in Biology Patrick Degenaar, Eiichi Tamiya .................................. 83 4.1 BreakingtheDiffractionBarrier.............................. 85 4.2 SNOAMProbeDesign...................................... 87 4.3 SNOAM Configurations ..................................... 90 4.4 Feedback Mechanisms for SNOAM ........................... 92 4.5 SNOAMinAqueousEnvironments........................... 94 4.6 SNOAMSystemDesign..................................... 95 4.7 Calibration................................................ 98 4.8 FluorescenceImagingwithSNOAM .......................... 99 4.9 SNOAMImagingofFluorescentBeads........................ 101 4.10FluorescenceProfiling....................................... 102 4.11SNOAMImagingofChromosomes............................ 103 4.12 SNOAM Imaging of Recombinant Bacterial Cells Containing a Green Fluorescent Protein Gene . 105 4.13ImagingofNeurons......................................... 108 4.14FutureDevelopmentofSNOAM.............................. 111 4.14.1AperturelessSNOAM................................. 112 4.14.2VibrationalSpectroscopy.............................. 112 4.14.3CompetitionforSNOAM.............................. 113 4.15Conclusion ................................................ 113 References....................................................
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