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United States Patent (10) Patent No.: US 7,190,052 B2 Lindgren (45) Date of Patent: Mar
US0071900.52B2 (12) United States Patent (10) Patent No.: US 7,190,052 B2 Lindgren (45) Date of Patent: Mar. 13, 2007 (54) SEMICONDUCTOR DEVICES WITH OXIDE 5,516,721 A 5/1996 Galli et al. COATINGS SELECTIVELY POSITONED 5,683,946 A 1 1/1997 Lu et al. OVER EXPOSED FEATURES INCLUDING 5,776,829 A 7/1998 Homma et al. SEMCONDUCTOR MATERAL 6,022,814 A 2/2000 Mikoshiba et al. 6,045,877 A 4/2000 Gleason et al. (75) Inventor: Joseph T. Lindgren, Boise, ID (US) 6,174,8246,130,116 AB1 10/20001/2001 MichaelSmith et etal. al. 6, 197,110 B1 3/2001 Lee et al. (73) Assignee: Micron Technology, Inc., Boise, ID 6,251,753 B1 6/2001 Yeh et al. (US) (*) Notice: Subject to any disclaimer, the term of this (Continued) patent is extended or adjusted under 35 OTHER PUBLICATIONS U.S.C. 154(b) by 0 days. Schreiber, S.J. et al., “Low Temperature Deposition of Microcrystal line Silicon For Thin Film Transistors,' CUED Electronic Devices (21) Appl. No.: 10/454.256 and Materials Group, http://www2.eng.cam.ac.uk/~www-edm/ (22) Filed: Jun. 3, 2003 projects/lowtempdepf1.htm, prior to Sep. 2000, 2 pages. e as (Continued) (65) Prior Publication Data Primary Examiner T. N. Quach US 2004/OO33682 A1 Feb. 19, 2004 (74) Attorney, Agent, or Firm TraskBritt Related U.S. Application Data (57) ABSTRACT (62) Division of application No. 10/218.268, filed on Aug. 13, 2002, now Pat. No. 6,593,221. A semiconductor device structure includes a passivation layer through which only non-silicon-comprising structures (51) Int. -
Hydrofluoric Acid Reduction Project – TURI Grant 2017
Hydrofluoric Acid Reduction Project – TURI Grant 2017 Sponsored by: Toxics Use Reduction Institute 126 John St Lowell, MA 01854 TURI Report 2018-001 Authors: Tyler DeFosse David Demarey Supervisor: Paul Watson Special Thanks to: Joy Onasch – Toxics Use Reduction Institute John Raschko – Massachusetts Office of Technical Assistance and Technology 1 Table of Contents 1.0 Executive Summary .......................................................................................................................... 3 2.0 Background ....................................................................................................................................... 5 2.1 Introduction ......................................................................................................................................... 5 2.2 Literature Searches .......................................................................................................................... 6 2.2.1 Diffusion Dialysis ...................................................................................................................... 6 2.2.2 Reverse Osmosis ....................................................................................................................... 7 2.2.3 Hydrofluoric Acid Wastewater Recycling Method ............................................................... 7 2.2.4 Issues Regarding the Etching of Silicon Dioxide ................................................................. 8 2.3 Alternative Strategies ..................................................................................................................... -
Fluorosilicic Acid CAS No
Product Safety Summary Fluorosilicic Acid CAS No. 16961-83-4 This Product Safety Summary is intended to provide a general overview of the chemical substance. The information in the summary is basic information and is not intended to provide emergency response information, medical information or treatment information. The summary should not be used to provide in-depth safety and health information. In-depth safety and health information can be found in the Safety Data Sheet (SDS) for the chemical substance. Names Fluorosilicic acid (FSA) Hexafluorosilicic acid (HFA or HFS) Sand acid Silicate(2-), hexafluoro- hydrogen (1:2) Silicofluoride Fluosilicic acid Hydroflurosilicic acid Silicofluoric acid Silicon hexafluoride dihydride Silicate(2-), hexafluoro-, dihydrogen Product Overview Solvay Fluorides, LLC does not sell fluorosilicic acid solutions directly to consumers. Most fluorosilicic acid is used in industrial or municipal applications/processes. Concentrated fluorosilicic acid solution (FSA) is used for water fluoridation, as a metal surface treatment and cleaner and for pH adjustment in industrial textile processing or laundries. It can also be used in the processing of hides, for hardening masonry and ceramics and in the manufacture of other chemicals. FSA can only exist as a liquid. There is no solid form. Fluorosilicic acid solutions are corrosive and contact can severely irritate and burn the skin and eyes causing possible permanent eye damage. Breathing concentrated fluorosilicic acid solutions can severely irritate and burn the nose, throat, and lungs, causing nosebleeds, cough, wheezing and shortness of breath. Many of the symptoms described are due to the hydrogen fluoride present as an impurity. Page 1 of 7 Copyright 2010-2013, Solvay America, Inc. -
Hexafluorosilicic Acid
Sodium Hexafluorosilicate [CASRN 16893-85-9] and Fluorosilicic Acid [CASRN 16961-83-4] Review of Toxicological Literature October 2001 Sodium Hexafluorosilicate [CASRN 16893-85-9] and Fluorosilicic Acid [CASRN 16961-83-4] Review of Toxicological Literature Prepared for Scott Masten, Ph.D. National Institute of Environmental Health Sciences P.O. Box 12233 Research Triangle Park, North Carolina 27709 Contract No. N01-ES-65402 Submitted by Karen E. Haneke, M.S. (Principal Investigator) Bonnie L. Carson, M.S. (Co-Principal Investigator) Integrated Laboratory Systems P.O. Box 13501 Research Triangle Park, North Carolina 27709 October 2001 Toxicological Summary for Sodium Hexafluorosilicate [16893-85-9] and Fluorosilicic Acid [16961-83-4] 10/01 Executive Summary Nomination Sodium hexafluorosilicate and fluorosilicic acid were nominated for toxicological testing based on their widespread use in water fluoridation and concerns that if they are not completely dissociated to silica and fluoride in water that persons drinking fluoridated water may be exposed to compounds that have not been thoroughly tested for toxicity. Nontoxicological Data Analysis and Physical-Chemical Properties Analytical methods for sodium hexafluorosilicate include the lead chlorofluoride method (for total fluorine) and an ion-specific electrode procedure. The percentage of fluorosilicic acid content for water supply service application can be determined by the specific-gravity method and the hydrogen titration method. The American Water Works Association (AWWA) has specified that fluorosilicic acid contain 20 to 30% active ingredient, a maximum of 1% hydrofluoric acid, a maximum of 200 mg/kg heavy metals (as lead), and no amounts of soluble mineral or organic substance capable of causing health effects. -
Chemical Name Federal P Code CAS Registry Number Acutely
Acutely / Extremely Hazardous Waste List Federal P CAS Registry Acutely / Extremely Chemical Name Code Number Hazardous 4,7-Methano-1H-indene, 1,4,5,6,7,8,8-heptachloro-3a,4,7,7a-tetrahydro- P059 76-44-8 Acutely Hazardous 6,9-Methano-2,4,3-benzodioxathiepin, 6,7,8,9,10,10- hexachloro-1,5,5a,6,9,9a-hexahydro-, 3-oxide P050 115-29-7 Acutely Hazardous Methanimidamide, N,N-dimethyl-N'-[2-methyl-4-[[(methylamino)carbonyl]oxy]phenyl]- P197 17702-57-7 Acutely Hazardous 1-(o-Chlorophenyl)thiourea P026 5344-82-1 Acutely Hazardous 1-(o-Chlorophenyl)thiourea 5344-82-1 Extremely Hazardous 1,1,1-Trichloro-2, -bis(p-methoxyphenyl)ethane Extremely Hazardous 1,1a,2,2,3,3a,4,5,5,5a,5b,6-Dodecachlorooctahydro-1,3,4-metheno-1H-cyclobuta (cd) pentalene, Dechlorane Extremely Hazardous 1,1a,3,3a,4,5,5,5a,5b,6-Decachloro--octahydro-1,2,4-metheno-2H-cyclobuta (cd) pentalen-2- one, chlorecone Extremely Hazardous 1,1-Dimethylhydrazine 57-14-7 Extremely Hazardous 1,2,3,4,10,10-Hexachloro-6,7-epoxy-1,4,4,4a,5,6,7,8,8a-octahydro-1,4-endo-endo-5,8- dimethanonaph-thalene Extremely Hazardous 1,2,3-Propanetriol, trinitrate P081 55-63-0 Acutely Hazardous 1,2,3-Propanetriol, trinitrate 55-63-0 Extremely Hazardous 1,2,4,5,6,7,8,8-Octachloro-4,7-methano-3a,4,7,7a-tetra- hydro- indane Extremely Hazardous 1,2-Benzenediol, 4-[1-hydroxy-2-(methylamino)ethyl]- 51-43-4 Extremely Hazardous 1,2-Benzenediol, 4-[1-hydroxy-2-(methylamino)ethyl]-, P042 51-43-4 Acutely Hazardous 1,2-Dibromo-3-chloropropane 96-12-8 Extremely Hazardous 1,2-Propylenimine P067 75-55-8 Acutely Hazardous 1,2-Propylenimine 75-55-8 Extremely Hazardous 1,3,4,5,6,7,8,8-Octachloro-1,3,3a,4,7,7a-hexahydro-4,7-methanoisobenzofuran Extremely Hazardous 1,3-Dithiolane-2-carboxaldehyde, 2,4-dimethyl-, O- [(methylamino)-carbonyl]oxime 26419-73-8 Extremely Hazardous 1,3-Dithiolane-2-carboxaldehyde, 2,4-dimethyl-, O- [(methylamino)-carbonyl]oxime. -
Sodium Silicofluoride MSDS
He a lt h 2 0 Fire 0 2 0 Re a c t iv it y 0 Pe rs o n a l Pro t e c t io n E Material Safety Data Sheet Sodium silicofluoride MSDS Section 1: Chemical Product and Company Identification Product Name: Sodium silicofluoride Catalog Codes: SLS4021 CAS#: 16893-85-9 RTECS: VV8410000 TSCA: TSCA 8(b) inventory: Sodium silicofluoride CI#: Not available. CHEMTREC (24HR Emergency Telephone), call: Synonym: Sodium Silicofluoride; Sodium 1-800-424-9300 hexafluorosilicate; Sodium fluosilicate; Sodium hexafluosilicate; Sodium silicon fluoride; Silicon sodium International CHEMTREC, call: 1-703-527-3887 fluoride; Disodium silicofluoride; Disodium hexafluorosilicat (2-); Disodiuim silicofluoride Chemical Name: Silicate (2-), hexafluoro-, disodium Chemical Formula: Na2SiF6 Section 2: Composition and Information on Ingredients Composition: Name CAS # % by Weight Sodium silicofluoride 16893-85-9 100 Toxicological Data on Ingredients: Sodium silicofluoride: ORAL (LD50): Acute: 125 mg/kg [Rat]. 70 mg/kg [Mouse]. Section 3: Hazards Identification Potential Acute Health Effects: Hazardous in case of skin contact (irritant), of eye contact (irritant), of ingestion, of inhalation. Severe over-exposure can result in death. Potential Chronic Health Effects: CARCINOGENIC EFFECTS: A4 (Not classifiable for human or animal.) by ACGIH, 3 (Not classifiable for human.) by IARC. MUTAGENIC EFFECTS: Not available. TERATOGENIC EFFECTS: Not available. DEVELOPMENTAL TOXICITY: Not available. Repeated exposure to a highly toxic material may produce general deterioration of health by an accumulation in one or many human organs. Section 4: First Aid Measures p. 1 Eye Contact: Check for and remove any contact lenses. In case of contact, immediately flush eyes with plenty of water for at least 15 minutes. -
Acutely / Extremely Hazardous Waste List
Acutely / Extremely Hazardous Waste List Federal P CAS Registry Acutely / Extremely Chemical Name Code Number Hazardous 4,7-Methano-1H-indene, 1,4,5,6,7,8,8-heptachloro-3a,4,7,7a-tetrahydro- P059 76-44-8 Acutely Hazardous 6,9-Methano-2,4,3-benzodioxathiepin, 6,7,8,9,10,10- hexachloro-1,5,5a,6,9,9a-hexahydro-, 3-oxide P050 115-29-7 Acutely Hazardous Methanimidamide, N,N-dimethyl-N'-[2-methyl-4-[[(methylamino)carbonyl]oxy]phenyl]- P197 17702-57-7 Acutely Hazardous 1-(o-Chlorophenyl)thiourea P026 5344-82-1 Acutely Hazardous 1-(o-Chlorophenyl)thiourea 5344-82-1 Extemely Hazardous 1,1,1-Trichloro-2, -bis(p-methoxyphenyl)ethane Extemely Hazardous 1,1a,2,2,3,3a,4,5,5,5a,5b,6-Dodecachlorooctahydro-1,3,4-metheno-1H-cyclobuta (cd) pentalene, Dechlorane Extemely Hazardous 1,1a,3,3a,4,5,5,5a,5b,6-Decachloro--octahydro-1,2,4-metheno-2H-cyclobuta (cd) pentalen-2- one, chlorecone Extemely Hazardous 1,1-Dimethylhydrazine 57-14-7 Extemely Hazardous 1,2,3,4,10,10-Hexachloro-6,7-epoxy-1,4,4,4a,5,6,7,8,8a-octahydro-1,4-endo-endo-5,8- dimethanonaph-thalene Extemely Hazardous 1,2,3-Propanetriol, trinitrate P081 55-63-0 Acutely Hazardous 1,2,3-Propanetriol, trinitrate 55-63-0 Extemely Hazardous 1,2,4,5,6,7,8,8-Octachloro-4,7-methano-3a,4,7,7a-tetra- hydro- indane Extemely Hazardous 1,2-Benzenediol, 4-[1-hydroxy-2-(methylamino)ethyl]- 51-43-4 Extemely Hazardous 1,2-Benzenediol, 4-[1-hydroxy-2-(methylamino)ethyl]-, P042 51-43-4 Acutely Hazardous 1,2-Dibromo-3-chloropropane 96-12-8 Extemely Hazardous 1,2-Propylenimine P067 75-55-8 Acutely Hazardous 1,2-Propylenimine 75-55-8 Extemely Hazardous 1,3,4,5,6,7,8,8-Octachloro-1,3,3a,4,7,7a-hexahydro-4,7-methanoisobenzofuran Extemely Hazardous 1,3-Dithiolane-2-carboxaldehyde, 2,4-dimethyl-, O- [(methylamino)-carbonyl]oxime 26419-73-8 Extemely Hazardous 1,3-Dithiolane-2-carboxaldehyde, 2,4-dimethyl-, O- [(methylamino)-carbonyl]oxime. -
Orca Corrosion Chart
Unsaturated Polyester Vinylster (Epoxy Acrylate Resins) CHEMICAL Conc Resins NO ISO BIS Novolac Bromine ENVIRONMENT % 511/512 301 585 570 545/555 A 1 Acetaldehyde 20 NR 40 40 40 2 Acetic Acid 10 80 100 100 100 3 Acetic Acid 15 60 100 100 100 4 Acetic Acid 25 60 100 100 100 5 Acetic Acid 50 - 80 80 80 6 Acetic Acid 75 NR 65 65 65 7 Acetic Acid, Glacial 100 NR NR 40 NR 8 Acetic Anhydride 100 NR NR 40 NR 9 Acetone 10 NR NR 80 80 10 Acetone 100 NR NR NR NR 11 Acetonitrile 20 - 40 40 40 12 Acetyl Acetone 20 - 40 50 40 13 Acrolein (Acrylaldehyde) 20 - 40 40 40 14 Acrylamide 50 NR 40 40 40 15 Acrylic Acid 25 NR 40 40 40 16 Acrylic Latex All - 80 80 80 17 Acrylonitrile Latex Dispersion 2 NR 25 25 25 Activated Carbon Beds, Water 18 - 80 100 80 Treatment Adipic Acid(1.5g solution in 19 23 - 80 80 80 water at 25℃, sol in hot water) 20 ALAMINE amines - 65 80 65 21 Alkyl(C8-10) Dimethyl Amine 100 - 80 100 80 22 Alkyl(C8-10) Chloride All - 80 100 95 23 Alkyl Benzene Sulfonic Acid 90 NR 50 50 50 Alkyl Tolyl Trimethyl 24 - - 40 50 40 Ammonium Chloride 25 Allyl Alcohol 100 NR NR 25 NR 26 Allyl Chloride All NR 25 25 25 27 Alpha Methylstyrene 100 NR 25 50 25 28 Alpha Oleum Sulfates 100 NR 50 50 50 29 Alum Sat'd 80 100 120 100 30 Aluminum Chloride Sat'd 80 100 120 100 31 Aluminum Chlorohydrate All - 100 100 100 32 Aluminum Chlorohydroxide 50 - 100 100 100 33 Aluminum Fluoride All - 25 25 25 34 Aluminum Hydroxide 100 80 80 95 80 35 Aluminum Nitrate All 80 100 100 100 36 Aluminum Potassium Sulfate Sat'd 80 100 120 100 37 Aluminum Sulfate Sat'd 80 100 120 100 -
Chemifloc Ltd. SAFETY DATA SHEET Fluorosilicic Acid 10.9%
Chemifloc Ltd. SAFETY DATA SHEET Fluorosilicic Acid 10.9% Conforms to Regulation (EC) No. 1907/2006 (REACH), Annex II Section 1: Identification of the substance and of the company/undertaking Identification of the substance or mixture Product Name: Fluorosilicic Acid 10.9% Chemical Name: Hexafluorosilicic acid Registration Number: 01-2119488906-19 Synonyms: Hydrofluorosilicic Acid, Fluosilicic Acid Date of first issue: 17 January 2011 Version number 04 Revision date: 24-03-2016 Supersedes date: 04-03-2016 Relevant identified uses of the substance or mixture and uses advised against: Identified uses Use in the treatment of raw water in the supply of either potable water or industrial process water Uses advised against None Details of the supplier of the safety data sheet Manufacturer: Chemifloc Ltd Smithstown, Shannon, Co. Clare, Rep. of Ireland. Tel: 00353 61 708699 Fax: 00353 61 708698 e-mail: [email protected] Emergency Telephone Number: National Poison Information Centre, 00353 1 8379964 Section 2: Hazards Identification Classification of the substance The substance has been assessed and/or tested for its physical, health and environmental hazards and the following classificatory applies. Classification according to Regulation (EC) no 1272/2008 as amended Health hazards Serious eye damage/eye irritation Category 1B H314 – Causes severe skin burns and eye damage. Hazard summary Physical hazards Not classified for physical hazards. Health hazards Causes burns. Environmental hazards Not classified for hazards to the environment. Specific hazards Not available Main symptoms Not available. Page 1of 8 Label elements Label according to Regulation (EC) No. 1272/2008 as amended Contains: Hexafluorsilicic Acid Signal word Danger Hazard statements H314 - Causes severe skin burns and eye damage. -
Ixom Material Safety Data Sheet Sodium Silicofluoride
Safety Data Sheet 1. IDENTIFICATION OF THE MATERIAL AND SUPPLIER Product Name: SODIUM FLUOROSILICATE Other name(s): Disodium hexafluorosilicate; Sodium silicon fluoride; Sodium silicofluoride. Recommended Use: Water fluoridation, wood and leather preservative, etchant for opalescent glass. Supplier: Orica New Zealand Limited Street Address: Orica Chemnet House Level four, 123 Carlton Gore Road Newmarket, Auckland New Zealand Telephone Number: +64 9 368 2700 Facsimile: +64 9 368 2710 Emergency Telephone: 0 800 734 607 (ALL HOURS) 2. HAZARDS IDENTIFICATION Classified as a Dangerous Good according to NZS 5433:2007 Transport of Dangerous Goods on Land. Classified as hazardous according to criteria in the HS (Minimum Degrees of Hazard) Regulations 2001. Subclasses: Subclass 6.1 Category C - Substances which are acutely toxic. Subclass 6.4 Category A - Substances that are irritating to the eye. Subclass 9.3 Category B - Substances that are ecotoxic to terrestrial vertebrates. 3. COMPOSITION/INFORMATION ON INGREDIENTS Components / CAS Number Proportion Risk Phrases Sodium fluorosilicate 100% R23/24/25 16893-85-9 4. FIRST AID MEASURES For advice, contact a Poisons Information Centre (Phone eg. Australia 131 126; New Zealand 0 800 764766) or a doctor at once. Urgent hospital treatment is likely to be needed. Inhalation: Remove victim from area of exposure - avoid becoming a casualty. Remove contaminated clothing and loosen remaining clothing. Allow patient to assume most comfortable position and keep warm. Keep at rest until fully recovered. If patient finds breathing difficult and develops a bluish discolouration of the skin (which suggests a lack of oxygen in the blood - cyanosis), ensure airways are clear of any obstruction and have a qualified person give oxygen through a face mask. -
Federal Register/Vol. 85, No. 117/Wednesday, June 17, 2020
Federal Register / Vol. 85, No. 117 / Wednesday, June 17, 2020 / Rules and Regulations 36483 other person (except an airman serving 1C350 is amended by adding twenty- program. The AG periodically reviews as an airman) not operating an aircraft four precursor chemicals, as well as items on its control list to enhance the for the transportation of passengers or mixtures in which at least one of these effectiveness of participating property for compensation. For chemicals constitutes 30 percent or governments’ national controls and to violations that occurred after November more of the weight of the mixture, to achieve greater harmonization among 2, 2015, $13,910 per violation, up to a ECCN 1C350.d. ECCN 1C351 is these controls. total of $556,419 per civil penalty amended to add Middle East respiratory Amendments to the CCL Based on the action, in the case of any other person syndrome-related coronavirus (MERS- February 2020 AG Intersessional (except an airman serving as an airman) related coronavirus). ECCN 2B352 is Recommendations not operating an aircraft for the amended by adding a Technical Note to transportation of passengers or property indicate that cultivation chamber ECCN 1C350 (Chemical Weapons for compensation. holding devices controlled in Precursors) (3) For violations that occurred on or 2B352.b.2.b include single-use This final rule amends Export Control before November 2, 2015, $25,000 per cultivation chambers with rigid walls. Classification Number (ECCN) 1C350 on violation, up to a total of $400,000 per The items addressed by this final rule the Commerce Control List (CCL) civil penalty action, in the case of a were not previously listed on the CCL (Supplement No. -
List of Lists
United States Office of Solid Waste EPA 550-B-10-001 Environmental Protection and Emergency Response May 2010 Agency www.epa.gov/emergencies LIST OF LISTS Consolidated List of Chemicals Subject to the Emergency Planning and Community Right- To-Know Act (EPCRA), Comprehensive Environmental Response, Compensation and Liability Act (CERCLA) and Section 112(r) of the Clean Air Act • EPCRA Section 302 Extremely Hazardous Substances • CERCLA Hazardous Substances • EPCRA Section 313 Toxic Chemicals • CAA 112(r) Regulated Chemicals For Accidental Release Prevention Office of Emergency Management This page intentionally left blank. TABLE OF CONTENTS Page Introduction................................................................................................................................................ i List of Lists – Conslidated List of Chemicals (by CAS #) Subject to the Emergency Planning and Community Right-to-Know Act (EPCRA), Comprehensive Environmental Response, Compensation and Liability Act (CERCLA) and Section 112(r) of the Clean Air Act ................................................. 1 Appendix A: Alphabetical Listing of Consolidated List ..................................................................... A-1 Appendix B: Radionuclides Listed Under CERCLA .......................................................................... B-1 Appendix C: RCRA Waste Streams and Unlisted Hazardous Wastes................................................ C-1 This page intentionally left blank. LIST OF LISTS Consolidated List of Chemicals