Piezoelectric Solutions: Piezo Components & Materials

Piezoelectric Solutions

Part I - Piezo Components & Materials

BAUELEMENTE, TECHNOLOGIE, ANSTEUERUNG Part III - Piezo Actuator Tutorial

PIEZOWWW.PICERAMIC.DE TECHNOLOGY Contents

Part I - Piezo Components & Materials ...... 3

Part II - Piezo Actuators & Transducers ...... 40

Part III - Piezo Actuator Tutorial ...... 73

Imprint PI Ceramic GmbH, Lindenstrasse, 07589 Lederhose, Germany Registration: HRB 203 .582, Jena local court VAT no .: DE 155932487 Executive board: Albrecht Otto, Dr . Peter Schittenhelm, Dr . Karl Spanner Phone +49 36604-882-0, Fax +49-36604-882-4109 info@piceramic .com, www .piceramic .com Although the information in this document has been compiled with the greatest care, errors cannot be ruled out completely . Therefore, we cannot guarantee for the information being complete, correct and up to date . Illustrati- ons may differ from the original and are not binding . PI reserves the right to supplement or change the information provided without prior notice . All contents, including texts, graphics, data etc ., as well as their layout, are subject to copyright and other protective laws . Any copying, modification or redistribution in whole or in parts is subject to a written permission of PI . The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co . KG : PI®, PIC®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PIn- ano®, PIMag® . The following company names or brands are the registered trademarks of their owners: μManager, LabVIEW, Leica, Linux, MATLAB, MetaMorph, Microsoft, National Instruments, Nikon, Olympus, Windows, Zeiss .

WWW.PICERAMIC.COM Product Overview

IN-HOUSE DEVELOPMENT AND PRODUCTION

Piezoelectric Components

! Various different versions in many different geometries such as disks, plates, tubes, customized shapes

! High resonant frequencies to 20 MHz

OEM Adaptations

! Piezo transducers for ultrasonic applications

! Assembly of complete transducer components

! 2D or line arrays

DuraAct Piezo Patch Transducers

! Actuator or sensor, structural health monitoring

! Bendable and robust, preloaded due to lamination

Control Electronics

! Different performance classes

! OEM modules and benchtop devices

PIEZO TECHNOLOGY PICMA® Multilayer Piezo Actuators

! Low piezo voltage to 120 V

! High stiffness

! Travel ranges to 100 µm

PICA High-Load Actuators

! Travel ranges to 300 µm

! Forces to 100 kN

PICMA® Multilayer Bending Actuators

! Bidirectional displacement to 2 mm

! Low operating voltage to 60 V

! Contractors, variable contours

Piezo Actuators with Customized Equipment

! For use in a harsh environment

! Position and temperature monitoring

! For cryogenic temperatures

WWW.PICERAMIC.COM PI Ceramic

LEADERS IN PIEZOELECTRIC TECHNOLOGY

PI Ceramic is one of the world’s market leaders for piezoelectric actuators and sensors . PI Core Competences Ceramic provides everything related to piezo of PI Ceramic

ceramics, from the material and components ! Standard piezo com- right through to the complete integration . ponents for actuators, PI Ceramic provides system solutions for ultrasonic and sensor research and industry in all high-tech mar- applications kets including medical engineering, mechan- ! System solutions

ical engineering and automobile manufac- ! Manufacturing of piezo- ture, or semiconductor technology . electric components of up to several million Materials Research and Development units per year PI Ceramic develops all its piezoceramic Certified Quality ! Development of custom-engineered materials itself . To this end PI Ceramic main- Since 1997, PI Ceramic has been certified solutions tains its own laboratories, prototype manu- according to the ISO 9001 standard, where facture as well as measurement and testing ! High degree of flexibi- the emphasis is not only on product quali- lity in the engineering stations . Moreover, PI Ceramic works with ty but primarily on the expectations of the process, short lead leading universities and research institutions customer and his satisfaction . PI Ceramic times, manufacture of at home and abroad in the field of piezoelec- is also certified according to the ISO 14001 individual units and tricity . (environmental management) and OHSAS very small quantities

18001 (occupational safety) standards, ! All key technologies Flexible Production which taken together, form an Integrated and state-of-the-art In addition to the broad spectrum of standard Management System (IMS) . PI Ceramic is equipment for ceramic products, the fastest possible realization of a subsidiary of Physik Instrumente (PI) and production in-house customer-specific requirements is a top pri- develops and produces all piezo actuators for ! Certified in accordance ority . Our pressing and multilayer technology PI’s nanopositioning systems . The drives for with ISO 9001, ISO 14001 and OHSAS enables us to shape products with a short PILine® ultrasonic piezomotors and NEXLINE® 18001 lead time . We are able to manufacture indi- high-load stepping drives also originate from vidual prototypes as well as high-volume PI Ceramic . production runs . All processing steps are undertaken in-house and are subject to continuous controls, a process which ensures quality and adherence to deadlines .

Company building of PI Ceramic in Lederhose, Thuringia, Germany .

PIEZO TECHNOLOGY Reliability and Close Contact with our Customers

OUR MISSION

Our aim is to maintain high, tested qual- After-Sales Service PI Ceramic provides ity for both our standard products and for Even after the sale has been completed, custom-engineered components . We want ! Piezoceramic materials our specialists are available to you and can (PZT) you, our customers, to be satisfied with the advise you on system upgrades or technical performance of our products . At PI Ceramic, ! Piezoceramic issues . This is how we at PI Ceramic achieve components customer service starts with an initial infor- our objective: Long-lasting business rela- mative discussion and extends far beyond ! Customized and appli- tions and a trusting communication with cation-specific ultrasonic the shipping of the products . customers and suppliers, both of which transducers/transducers are more important than any short-term ® ! PICMA monolithic Advice from Piezo Specialists success . multilayer piezo actuators You want to solve complex problems – we ! Miniature piezo actuators won’t leave you to your own devices . We ® PI Ceramic supplies piezo-ceramic solutions ! PICMA multilayer use our years of experience in planning, to all important high-tech markets: bender actuators developing, designing and the production ! PICA high-load piezo of individual solutions to accompany you ! Industrial automation actuator from the initial idea to the finished product . ! Semiconductor industry ! PT Tube piezo actuators We take the time necessary for a detailed ! Medical engineering ! Preloaded actuators understanding of the issues and work out ! Mechanical and precision engineering with casing a comprehensive and optimum solution at ! Aviation and aerospace ! Piezocomposites – an early stage with either existing or new

DuraAct patch technologies . ! Automotive industry transducers ! Telecommunications

WWW.PICERAMIC.COM Experience and Know-How

STATE-OF-THE-ART MANUFACTURING TECHNOLOGY

Developing and manufacturing piezoceram- particularly high degree of precision . Spe- ic components are very complex processes . cial milling machines accurately shape the PI Ceramic has many years of experience in components when they are still in the “green this field and has developed sophisticated state“, i .e . before they are sintered . Sintered manufacturing methods . Its machines and ceramic blocks are machined with precision equipment are state of the art . saws like the ones used to separate individual wafers . Very fine holes, structured Rapid Prototyping ceramic surfaces, even complex, three- The requirements are realized quickly and dimensional contours can be produced . flexibly in close liaison with the customer . Prototypes and small production runs of Automated Series Production – custom-engineered piezo components are Advantage for OEM Customers available after very short processing times . An industrial application often requires large The manufacturing conditions, i e . . the quantities of custom-engineered compo- composition of the material or the sintering nents . At PI Ceramic, the transition to large temperature, for example, are individually production runs can be achieved in a reliable adjusted to the ceramic material in order to and low-cost way while maintaining the high achieve optimum material parameters . quality of the products . PI Ceramic has the capacity to produce and process medium-sized Precision Machining Technology and large production runs in linked automat- PI Ceramic uses machining techniques from ed lines . Automatic screen printers and the the semiconductor industry to machine the latest PVD units are used to metallize the sensitive piezoceramic elements with a ceramic parts .

Automated processes optimize throughput

PIEZO TECHNOLOGY ˝L Polarisation axis

˝L ˝ L C Polarisation 1 f f (Z) axis m n 3 ˝ L C L 1 C 1 0 (Z) fm fn 6 3 + L o P L1 5 C0 2(Y) 6 + L o R1 4 P 0 V

1 5 Impendanz Z (X) 2(Y) R1 4 Frequenz f 0 V

1 Impendanz Z (X)

Frequenz f 1

ODD 1 (1) TH P 3 (Z) ODD

TH 6 ˝L OD 3 (1) TH P 5 Polarisation ID P 6 3 – – – – 2 (Z) axis TH 6 ˝ L OD – – – – 3 + + + + C L – 1 P 5 – ID P – – – – – – – – + + + + f f 6 (Z) – m n 2 + + – – – – 5 3 + – – – – – 2(Y) + + + + + + + + – + L – + –

P + + + + + L1

– – – – – – C– – – – – – – 4 0 + + + + 1 – – (X) 5 + + + – – – – 6 + + – + L o

2(Y) + – + + + + + + + + + + + + + P – U

+ + + + + +

4 (2) 5 – – – – – – – – – 1 (1) (2) (3) – (X) +

2(Y) + – R + + 1 + + + + + + + 4 – U 0 V ˝L (2) 1 Impendanz Z (X) (1) (2) (3) Polarisation axis Frequenz f

˝L – P C/m2 L ˝ L C Polarisation 1 L P axis (Z) fm fn TH ˝ L W 3 P C/m2 L 1 ˝L Ps C1 TH P Pr L P L C 1 f f (Z) Polarisation 0 m n TH W ODD W 3 6 axis + (1) L o Ps P O2 P TH ˝ L TH P PLr1 C 3 C50 1

6 (Z) Pb f f + TH W + 6 + (Z) m n OD + 3 L o – – 2(Y) R Piezoceramic Components P 3 1

L 5 Ti, Zr O2 4 0 ID V

– – – – L P – 5 – -Ec – TH

6 1 Impendanz Z

2 + + L

+ +

+ (X) 1

Pb – C + TH – + 0 2(Y) + DIMENSIONS –R – – – – ˝L E + + + + 1– L P P L

P c – 6 TH

Ti, Zr 4 L o – 0 W V L – E kV/cm – P – W

+ Frequenz f L 1 + Impendanz Z – – – – – – Polarisation -Ec + P+ – + + TH

W 3 – +

(X) + +

+ + + + – – – – 5 TH 5 axis + – – – 2(Y) + + + + + ˝ L P P – Ec 2(Y) L TH P

+ R W

+ + + + + Frequenz f

C – E kV/cm – 1(r) 1 – W 1

4 Radialschwingung – – – – – + – – + – – 4 W 1 3 – 0 V + f f (X) 1 (Z) -Ps 1 m n Impendanz Z -Pr + (X)

– Disk / Outer diameter OD: 2 to 80 mm 3 + + + + + + + + + U ODD ! P indicates the (2) 1(r) Radialschwingung L L1 Frequenz f rod / cylinder Thickness TH: 0 .15 to 30 mm 1 (1) C0 (1) (2) (3) P poling direction . -Ps -Pr TH 3 Dickenschwingung 6 + L o OD (Z) P – D P TH 6 OD ! The dimensions are L 3 (1) 5 TH P 5 3 1 ID P mutually dependent 6 Dickenschwingung 2(Y) R – – – – TH 6 2 (Z) 1 Plate / block Length L: 1 to 80 mm, P 4 2 0 V OD OD and cannot be 3 P C/m – – – – L D

1 Impendanz Z + + + + L 5 (X) – ID (1) – P Width W: 1 to 60 mm, chosen arbitrarily . P – – – – P TH P L 6 – – – – + + + + 2 – TH 5 3 + + – – – – W Thickness TH: 0 .1 to 30 mm – – –+ – Frequenz f (Z) + + + + – TH 2(Y) 6 P + + + + L ! The minimum – s + OD – –

P 3 + 3 + + + + +

TH P P–r – – – + + – + + 4 5 – – – – – – – – – ID dimensions are 1 3 Längsschwingung + + – –– – – – – – – P

W 5 (X) 6 + + 2 + –

2(Y) + + + + determined by – + Shear plate Length L: max . 75 mm, 2 – + + + + + + + + + + – – – – 1 O 1 3 + 3 + + + + + + + + U L L

4 3(r) – – – – – – – – – – physical and 1 P (2) – – OD Width W: max . 25 mm,

(X) Pb3 + Längsschwingung(1) (2) (3) – – – – + + + + + + + – + TH TH ODD

+ technological limits . Dickenschwingung – – – + – – – – 2 + + + + + + + + + P 5 + Thickness TH: 0 .2 to 10 mm 1(r) – U L (1) 2(Y) Ti, Zr 1 Radialschwingung + + + + P

3 – TH – L + L The thickness or – (2) – 3(r) -E – TH c +

(1) (2)+ + (3) + + + + + OD

3 + + + – – – – – – – – – TH 4 – – wall thickness, for (Z) 1 – TH TH TH 6 (X) 2 Dickenschwingung + P OD P

P 3 Ec 1(r) + L TH P W

– example, is limited – E kV/cm – – + W +Ra+ dialschwingung+ + – + + + + Tube Outer diameter OD: 2 to 80 mm, 5 3 + + 2Dickenschwingung ID UP W – – – – P C/m L 2 6 (2) by the mechanical (1) (2) (3) InnerP diameter ID: 0 .8 to 74 mm, L – – – – + + + + L TH strength of the 1(r) – W Length L: max . 30 mm P Radialschwingung1 – P C/m2 Dickenschwingung L – – – – OD – + + + + P ceramic during – -P s + s -Pr TH 5 P + – – – – P P L + r P machining . – TH 2(Y) 3 + + + + + TH – ID W W 6 +

L TH 1 + + + + + OD – P 4 – – – – – – – – s 2 Ring Outer diameter OD: 2 to 80 mm, 1 5 2 – P C/m L ! TH (X) P O + Pr Maximum thickness

Dickenschwingung2 + P – TH Inner diameter ID: 0 .8 to 74 mm, + 3 + + + + + + + + P

P W L Pb U for polarization: + 6 + ID TH + TH (2) – – Thickness TH: max . 70 mm W O2 Ti, Zr 5 (1) (2) (3) 30 mm

L Ps L – 2 – -Ec – TH

TH P + + Pr

+ +

Pb + + + TH + – – – – – Labeling of the polarity W E L P

L P Längsschwingung Ti, Zr c TH P W

– E kV/cm

–

– W L Bender elements Length L: 3 to 50 mm, – – 2 -Ec – + + TH

3 O + +

+ + W + The surface of the TH – – constructed in Width W: 1 to 25 mm,

Pb P

+ 2 + L

P P C/m Ec + TH P L electrode which is at

– – W

– E kV/cm – Längsschwingung – W 3 + + series / parallel Thickness TH: 0 .4 to 1 .5 mm L 3 1(r) Radialschwingung Ti, Zr P

L W Längsschwingung L the positive potential – 3 – -Ec – TH

-Ps -Pr + + TH

+ Round bender elements on request . + Dickenschwingung + W TH – – during polarization is P 1(r) 1 s 3 E L P L P

TH P P 3(r) Radialschwingung P c TH Preferred dimensions: W marked with a dot or r – E kV/cm OD – L – W -P + + W 3 s -Pr TH TH W Dickenschwingung 2 Dickenschwingung Diameter:P 5 to 50 mm, a cross . Alternatively Dickenschwingung 1(r) 2 Radialschwingung and particularly for L P Radialschwingung O Thickness: 0 .3 to 2 mm 1(r) Radialschwingung

Pb thin-film electrodes + + Dickenschwingung + -Ps – – -Pr P Ti, Zr the direction of

L Radialschwingung Dickenschwingung L – – -Ec – TH

+ + polarization is marked

+ + L + TH – – P by coloring the

P DickenschwingungEc L TH P StandardW tolerances Dimension Tolerance

– E kV/cm

– 1 – W OD W P 3 + + electrode material: 3 Deviation from flatness < 0 .02 mm TH Dimensions, asP fired A reddish color 3 3 Längsschwingung TH 6 ID (slight bending of 1(r) Radialschwingung ± 0 .3 mm resp . ± 3 % indicates the electrode 5 3 1 thin disks or plates L 3(r) 2 -Ps -Pr 3 which was at the 3 Längsschwingung OD TH LengthTH L, width W (dimensions; tolerance) is not taken positive potential 2 Dickenschwingung P L 1 1(r) into account) 3(r) 3 Radialschwingung < 15 mm; ± 0 .15 mm < 40 mm; ± 0 .25 mm L during the polarization . 3 OD Dickenschwingung TH TH < 20 mm; ± 0 .20 mm < 80 mm; ± 0 .30 mm P 2 3 Dickenschwingung Längsschwingung DeviationP < 0 .02 mm Längsschwingung 1(r) Radialschwingung 1 Dickenschwingung3 Outer diameter OD, from L 3(r) OD inner diameter ID TH parallelismTH 2 Dickenschwingung P 1 Dickenschwingung 1(r) Ra(dimensions;dialschwingung tolerance) OD Deviation <_ 0 .4 mm Dickenschwingung < 15 mm; ± 0 .15 mm < 40 mm; ± 0 .25 mmP 3 TH from 3 1 TH 6 < 20OD mm; ± 0 .20 mm < 80 mm; ID± 0 .30 mm 3 5Längsschwingung Dickenschwingung concentricity 2 P 3 TH Thickness TH (dimensions; tolerance) TH 1 6 ID 3(r) Radialschwingung 3 L Frequency ± 5 % (< 2 MHz) 5 1 OD < 10 mm; ± 0 .05 mm < 40 mm; ± 0 .15 mm OD 2 TH TH Dickenschwingung P tolerance ± 10 % (> 2 MHz) 2 < 20 mm; ± 0 .10 mm < 80 mm; ± 0 .20 mm P = 1(r) 3 Radialschwingung TH TH 6 ID Längsschwingung 5 Tolerance of ± 20 % 2 electric capacitance Dickenschwingung Längsschwingung

Dickenschwingung 1 OD Längsschwingung P 3 TH Dickenschwingung TH 6 ID 5 Radialschwingung2 WWW.PICERAMIC.COM Dickenschwingung Radialschwingung

Längsschwingung Radialschwingung

Dickenschwingung

Radialschwingung Standard Dimensions

Components with standard dimensions can values cannot be combined . Geometries  Electrodes: Fired silver be supplied at very short notice on the basis which exceed the standard dimensions are (thick film) or PVD of semi-finished materials in stock . Extreme available on request . (thin film, different materials: e . g . CuNi or Au)

 Disk / rod / cylinder  Disk / rod  Points: Resonant with defined resonant frequency frequency > 1 MHz TH OD in mm Circles: Resonant in mm 3 5 10 16 20 25 35 40 45 50 TH OD in mm frequency < 1 MHz 0 .20 ••••• in MHz 3 5 10 16 20 25 35 40 45 50 Electrodes: Fired silver 10 00. (thick film) or PVD 0 .25 ••••• ••••• (thin film, different 0 .30 •••••• 5 00. •••••• materials: e . g . CuNi or 0 .40 4 00. Au) ••••••• ••••••• 0 .50 ••••••••• 3 00. •••••••• 0 .75 2 00.  Electrodes: Fired silver •••••••••• •••••••• 1 .00 (thick film) or CuNi or Au •••••••••• 1 00. •••••••• (thin film) 2 .00 •••••••••• 0 75. o o o o o o o o 3 00. •••••••••• 0 50. o o o o o o o 4 00. •••••••••• 0 40. o o o o o o 5 00. •••••••••• 10 .00 •••••••••• 0 25. o o o o 20 .00 •••••••••• 0 20. o o o

 Plate / block

TH LxW in mm2 in mm 4 x 4 5 x 5 10 x 10 15 x 15 20 x 20 25 x 20 25 x 25 50 x 30 50 x 50 75 x 25 0 20. ••••• 0 25. ••••• 0 30. ••••••• 0 40. ••••••• 0 50. ••••••••• 0 75. •••••••••• 1 00. •••••••••• 2 00. •••••••••• 3 00. •••••••••• 4 00. •••••••••• 5 00. •••••••••• 10 .00 •••••••••• 20 .00 ••••••••

PIEZO TECHNOLOGY ˝L Polarisation axis ˝ L C1

(Z) fm fn

˝L 3 Polarisation L C 1 axis 0 6 ˝ L + L o P C1 5 (Z) fm fn 3 2(Y) R1 4 0 V L1 1 C Impendanz Z (X) 0 6 + L o P Frequenz f 5 2(Y) R1 4 0 V

1 Impendanz Z 1 (X)

Frequenz f ODD (1) TH P 3 TH 6 (Z) OD 1 3 5 ID P 6 – – – – 2 ODD

– – – – (1) + + + + L – TH P P – – – – – 3 + + + + – (Z) + + – – – – TH 6 5 + OD – 3 2(Y) + + + + – + + 5 + + + + + ID P 6 4 – – – – – – – – – – – – – 2 1 – (X) + + – – – –

+ + – + + + + + + + + + + + L – U P – (2) – – – – + + + + –

+ (1) (2) (3) + – – – – 5 + – 2(Y) + + + + – + +

+ + + + + –

4 – – – – – – – – – 1 – +

(X) ˝L + ˝L

+ – + + + + + + + + Polarisation U (2) Polarisation P C/m2 L axis (1) axis (2) (3) ˝ L P ˝ L L C1 C1 TH – f f W (Z) m n f f (Z) Ps m n 3 TH P Pr 3

W L1 2 C0 L1 P C/m C0 L O2 6 + L o 6 P + L L o P

Pb P TH W + + 5 + – – P 5 L Ti, Zr 2(Y) s

TH P Pr 2(Y) R L

– – 1 -Ec – R TH

4 + + 1 + + + 0 V W TH – – 4 0 V

1 Impendanz Z (X) 1 L Impendanz Z P

P 2 (X) Ec TH P W

O – E kV/cm – – W W 3 + +

Pb Frequenz f + + Frequenz f

– – + Ti, Zr

L 1(r) L – – Radialschwingung -Ec – TH

+ + + +

TH ˝L -Ps + – – -Pr 1 E L P P

P 1 Polarisation c TH W – E kV/cm – – W + + W L 3 axis ODD ˝L ˝ L ODD Dickenschwingung(1) C P Polarisation (1) 1 TH TH P P 1(r) 3 Radialschwingung axis (Z) fm fn (Z) 3 TH 6 (Z) -Ps 3 ˝ L OD TH 3 6 -Pr OD 3 C1 5 L ID P 5 – – – – 1 f f ID 6 (Z) C0 m n P L 2 2 6 – – – – 3 6 + L o – – – – + + + + – – – – L Dickenschwingung P – + + + + L – L – P 1 – P P 5 C – – – – 0 + + + + – – – – – + + + + + + – – – – – 5 6 2(Y) + + + – – – – + 5 L o 3 – R + 2(Y) + + + + 1 – + 2(Y) P 4 – + + + + + + –

3 Längsschwingung + + + + + 0 V

+ 5 + + + + + 4 1 – – – – – – – – – Impendanz Z

1 4 (X) – – – – – – – – – – (X) 1 + –

(X) 1 2(Y) + R +

+ L – 3 1 3(r) + + + + + + + + +

4 + – + + + + + + + + OD Frequenz f U U 0 V

1 Impendanz Z TH TH (2) (2) (X) Dickenschwingung P 2 (1) (2) (3) (1) (2) (3) 3 1(r) Radialschwingung 3 Längsschwingung Frequenz f – – 1 1 3(r) 3 L Dickenschwingung OD ODD P C/m2 TH TH 1 (1) 2 Dickenschwingung P C/m2 TH P LP L 1(r) L 3 Radialschwingung P P (Z)L 1 OD ODD TH TH 6 W OD TH W 3 (1) P Ps P TH TH P TH 5 P 3 P s ID P 3 6 –r – – – ID 2 TH 6 P TH DickenschwingungPr TH W 6 (Z) OD 3 W 5 – – – – 2 + + + + L 5 2 – ID P O 2 – P O – – – – 6 + + + + 2 – 1 + OD

5 Pb + – – – – + + +

Pb – + – – – – + + 2(Y) – + – + + + + + L – – – – P + – TH

L P Ti, Zr 3 + + + + +

Ti, Zr – – – –

L – – L – – – – – – – – –

4 6 – + + + + ID TH

-E –

TH – c L –

1 + + –

+ + – – – – -Ec – TH + +

+ + +

(X) 5 + + + + – + TH – +

Längsschwingung 5 – – – TH 2(Y) – + + + + + + + + + + + + + + 2 – Ec L TH P P

P + U P

+ + + + + Ec L TH P W

– E kV/cm –

P – W W

– – – – – – – – + – – E kV/cm – 4 (2) + – W W 1 3 – + +

(X) W 3 (1) + (2) (3) Disks with special electrodes (wrap-around contacts) + + – + + + + + + + + U – Soldering instructions (2)1(r) Radialschwingung Design OD in mm TH in mm Electrodes: Dickenschwingung 1(r) Radialschwingung (1) (2) (3) for users -Ps -Pr Längsschwingung -Ps -P r 10 / 16 / 20 / 20 / 25 / 40 0 .5 / 1 .0 / 2 .0 Fired silver 2 – All our metallizations L P C/m L L (thick film) can be soldered in L P Radialschwingung Dickenschwingung Dickenschwingung TH W or PVD (thin film) conformance with P P P C/m2 L Dickenschwingung Ps  Disk / rod P RoHS . We recom- TH L P Pr TH W with defined resonant frequency W mend the use of a Ps solder with the com- TH P O2 P Rings r position Sn 95 .5 . Ag

W Radialschwingung Pb + +

– – + Design OD in mm ID in mm TH in mm Electrodes: 3 .8 . Cu 0 .7 . If the Ti,O2 Zr

L 3 L – –

-Ec 3 – TH piezoceramic element

+ +

3 Pb Längsschwingung+

+ + 10 2 .7 0 5/1 .0/2 .0 Fired. silver TH 3 – – + Längsschwingung – – L P is heated throughout

P L Ti, Zr Ec TH P W

– E kV/cm

–

1 – 3 W L 10* 4 .3* L 0 5/1 .0/2 .0 (thick. film) –

– + 3(r) -Ec 1 +– 3 TH L above the Curie

W 3 3(r) + + OD +

+ + OD TH – – TH TH temperature, the 2 Dickenschwingung TH P TH 10* 5* P 0 5/1 .0/2 .0 or CuNi.

P 2 Ec Dickenschwingung L TH P W P

– E kV/cm 1(r)

– 1(r) – RadialschwingungW 1(r) material is depolari- W 3 Radialschwingung + + Radialschwingung 12 .7 5 .2* 0 .5/1 .0/2 .0 (thin film) -Ps -Pr zed, and there is thus 25 16* 0 5/1 .0/2 .0 . a loss of, or reduction 1(r) Radialschwingung L Dickenschwingung Dickenschwingung 38 13* 5 0/6 .0 . in, the piezoelectric -Ps -Pr *Tolerances as fired, Dickenschwingung s . table p . 27 parameters . P 50 19 7* . 5 0/6 .0/9 .5 . L 1 1 OD OD Dickenschwingung P This can be prevented 3 TH TH P P 6 3 ID by adhering to the TH TH 6 Tubes ID 5 5 following conditions 2 2 Design OD in mm ID in mm L in mm Electrodes: under all circum- stances when solde- 3 76 60 50 Inside: 3 Längsschwingung ring: 40 38 40 Fired silver 3 1 L 3(r) Längsschwingung Längsschwingung 3 20 18 30 (thick film) 3 Längsschwingung OD ! All soldered TH TH 2 Dickenschwingung 10 9 P 30 Outside: contacts must be 1 3 1(r) Radialschwingung L 3(r) OD 10 8 30 Fired silver point contacts . TH TH 2 Dickenschwingung P Dickenschwingung Dickenschwingung 6 .35 5 .35 30 (thick film) 1(r) Radialschwingung ! The soldering times Dickenschwingung 3 .2 2 .2 30 or CuNi or Au must be as short 2 .2 1 .0 20 (thin film) as possible (≤ 3 sec) . 1 Dickenschwingung Radialschwingung Radialschwingung OD P ! The specific 3 TH TH 1 6 ODID soldering 5 temperature must 2 Tubes with special electrodesP 3 TH TH 6 ID not be exceeded . 5 Design OD in mm ID in mm L in mm Electrodes: 2 20 18 30 Inside: Längsschwingung 10 9 30 Fired silver 10 8 30 (thick film) Quartered outer Längsschwingung electrodes 6 35 . 5 53 . 30 Outside: Dickenschwingung 3 .2 2 .2 30 Fired silver 2 .2 1 .0 30 (thick film) Dickenschwingung or CuNi or Au Wrap-around (thin film) Radialschwingung contacts

Radialschwingung

WWW.PICERAMIC.COM Material Properties and Classification

Material General description of the material properties Classification in accor- ML-Standard designation “Soft“-PZT dance with EN 50324-1 DOD-STD-1376A

PIC151 Material: Modified Lead Zirconate-Lead Titanate 600 II Characteristics: High permittivity, large coupling factor, high piezoelectric charge coefficient Suitable for: Actuators, low-power ultrasonic transducers, low-frequency sound transducers . Standard material for actuators of the PICA series: PICA Stack, PICA Thru

PIC255 Material: Modified Lead Zirconate-Lead Titanate 200 II Characteristics: Very high Curie temperature, high permittivity, high coupling factor, high charge coefficient, low mechanical quality factor, low temperature coefficient Suitable for: Actuator applications for dynamic operating conditions and high ambient temperatures (PICA Power series), low-power ultrasonic transducers, non-resonant broadband systems, force and acoustic pickups, DuraAct patch transducers, PICA Shear shear actuators

PIC155 Material: Modified Lead Zirconate-Lead Titanate 200 II Characteristics: Very high Curie temperature, low mechanical quality factor, low permittivity, high sensitivity (g coefficients) Suitable for: Applications which require a high g coefficient (piezoelectric voltage coefficient), e .g . for microphones and vibration pickups with preamplifier, vibration measurements at low frequencies

PIC153 Material: Modified Lead Zirconate-Lead Titanate 600 VI Characteristics: extremely high values for permittivity, coupling factor, high charge coefficient, Curie temperature around 185 °C Suitable for: Hydrophones, transducers in medical diagnostics, actuators

PIC152 Material: Modified Lead Zirconate-Lead Titanate 200 II Characteristics: Very high Curie temperature Suitable for: Use at temperatures up to 250 °C (briefly up to 300 °C) .

PIEZO TECHNOLOGY Material General description of the material properties Classification in accor- ML-Standard designation “Hard“-PZT dance with EN 50324-1 DOD-STD-1376A

PIC181 Material: Modified Lead Zirconate-Lead Titanate 100 I Characteristics: Extremely high mechanical quality factor, good temperature and time constancy of the dielectric and elastic values Suitable for: High-power acoustic applications, applications in resonance mode

PIC184 Material: Modified Lead Zirconate-Lead Titanate 100 I Characteristics: Large electromechanical coupling factor, moderate- ly high quality factor, excellent mechanical and electrical stability Suitable for: High-power ultrasound applications, hydroacoustics, sonar technology

PIC144 Material: Modified lead zirconate titanate 100 I Characteristics: Large electromechanical coupling factor, high quality factor, excellent mechanical and electrical stability, high compressive resistance Suitable for: High-power ultrasound applications, hydroacoustics, sonar technology

PIC241 Material: Modified Lead Zirconate-Lead Titanate 100 I Characteristics: High mechanical quality factor, higher permittivity than PIC181 Suitable for: High-power acoustic applications, piezomotor drives

PIC300 Material: Modified Lead Zirconate-Lead Titanate 100 I Characteristics: Very high Curie temperature Suitable for: Use at temperatures up to 250 °C (briefly up to 300 °C) .

Lead-Free Materials PIC050 Material: Spezial crystalline material Characteristics: Excellent stability, Curie temperature >500 °C Suitable for: High-precision, hysteresis-free positioning in open-loop operation, Picoactuator®

PIC700 Material: Modified Bismuth Sodium Titanate Characteristics: Maximum operation temperature 200 °C, low density, high coupling factor of the thickness mode of vibration, low planar coupling factor Suitable for: Ultrasonic transducers > 1MHz

WWW.PICERAMIC.COM Material Data

SPECIFIC PARAMETERS OF THE STANDARD MATERIALS

Lead-free Soft PZT materials Hard PZT materials materials

Unit PIC151 PIC255/ PIC155 PIC153 PIC152 PIC181 PIC184 2) PIC144 2) PIC241 PIC300 PIC110 PIC7002) PIC2521) Physical and dielectric properties Density ρ g/cm3 7 80. 7 80. 7 80. 7 .60 7 .70 7 .80 7 .75 7 .95 7 80. 7 80. 5 .50 5 .6

3) Curie temperature Tc °C 250 350 345 185 340 330 295 320 270 370 150 200

Relative permittivity in the polarization direction ε33Τ / ε0 2400 1750 1450 4200 1350 1200 1015 1250 1650 1050 950 700

to polarity ε11Τ / ε0 1980 1650 1400 1500 1250 1500 1550 950 Dielectric loss factor tan δ 10-3 20 20 20 30 15 3 5 4 5 3 15 30 Electromechanical properties

Coupling factor kp 0 62. 0 62. 0 62. 0 62. 0 .48 0 .56 0 .55 0 .60 0 .50 0 .48 0 .30 0 .15

kt 0 53. 0 47. 0 48. 0 .46 0 .44 0 .48 0 .46 0 .43 0 .42 0 .40

k31 0 38. 0 35. 0 35. 0 .32 0 .30 0 .30 0 .32 0 .25 0 .18

k33 0 69. 0 69. 0 69. 0 .58 0 .66 0 .62 0 .66 0 .64 0 .46

k15 0 66. 0 .63 0 .65 0 .63 0 .32

Piezoelectric charge coefficient d31 -210 -180 -165 -120 -100 -110 -130 -80 -50

d -12 500 400 360 600 300 265 219 265 290 155 120 120 33 10 C/N

d15 550 475 418 265 155

Piezoelectric voltage coefficient g31 -11 .5 -11 3. -12 9. -11 2. -11 1. -10 1. -9 8. -9 5. 10-3 Vm/N g33 22 25 27 16 25 25 24 .4 25 21 16 -11 9. Acousto-mechanical properties

Frequency coefficients Np 1950 2000 1960 1960 2250 2270 2195 2180 2190 2350 3150

N1 1500 1420 1500 1640 1590 1590 1590 1700 2300 Hz·m N3 1750 1780 2010 1930 1550 1700 2500

Nt 1950 2000 1990 1960 1920 2110 2035 2020 2140 2100

E Elastic compliance coefficient S11 15 .0 16 1. 15 6. 11 .8 12 .7 12 .4 12 .6 11 .1 -12 2 E 10 m /N S33 19 .0 20 7. 19 7. 14 .2 14 .0 15 .5 14 .3 11 .8

D 10 2 Elastic stiffness coefficient C33 10 N/m 10 0. 11 .1 16 .6 14 .8 15 .2 13 8. 16 4.

Mechanical quality factor Qm 100 80 80 50 100 2000 400 1000 400 1400 250 Temperature stability

Temperature coefficient of εΤ33 ε -3 (in the range -20 °C to +125 °C) TK 33 10 /K 6 4 6 5 2 3 5 2 Time stability (relative change of the parameter per decade of time in %)

Relative permittivity Cε -1 0. -2 0. -4 0. -5 0.

Coupling factor CK -1 0. -2 0. -2 0. -8 0.

PIEZO TECHNOLOGY Lead-free Recommended operating temperature: Soft PZT materials Hard PZT materials materials 50 % of Curie temperature .

Unit PIC151 PIC255/ PIC155 PIC153 PIC152 PIC181 PIC184 2) PIC144 2) PIC241 PIC300 PIC110 PIC7002) 1) Material for the Multilayer tape PIC2521) technology . Physical and dielectric properties 2) Preliminary data, subject to change 3 Density ρ g/cm 7 .80 7 .80 7 .80 7 .60 7 70. 7 80. 7 75. 7 .95 7 .80 7 .80 5 .50 5 6. 3) Maximum operating temperature 3) Curie temperature Tc °C 250 350 345 185 340 330 295 320 270 370 150 200

Relative permittivity in the polarization direction ε33Τ / ε0 2400 1750 1450 4200 1350 1200 1015 1250 1650 1050 950 700 The following values are valid approxima- tions for all PZT materials from to polarity ε11Τ / ε0 1980 1650 1400 1500 1250 1500 1550 950 PI Ceramic: Dielectric loss factor tan δ 10-3 20 20 20 30 15 3 5 4 5 3 15 30 Electromechanical properties Specific heat capacity: WK = approx . 350 J kg-1 K-1

Coupling factor kp 0 .62 0 .62 0 .62 0 .62 0 48. 0 56. 0 55. 0 .60 0 .50 0 .48 0 .30 0 15. Specific thermal conductivity : k 0 .53 0 .47 0 .48 0 46. 0 44. 0 .48 0 .46 0 .43 0 .42 0 40. t WL = approx . 1 .1 W m-1 K-1 k31 0 .38 0 .35 0 .35 0 32. 0 30. 0 .30 0 .32 0 .25 0 .18 Poisson‘s ratio (lateral contraction): k 0 .69 0 .69 0 .69 0 58. 0 66. 0 62. 0 .66 0 .64 0 .46 33 σ = approx . 0 .34 k 0 .66 0 63. 0 65. 0 .63 0 .32 15 Coefficient of thermal expansion: -6 -1 Piezoelectric charge coefficient d31 -210 -180 -165 -120 -100 -110 -130 -80 -50 α3 = approx . -4 to -6 × 10 K (in the polarization direction, shorted) d -12 500 400 360 600 300 265 219 265 290 155 120 120 33 10 C/N α1 = approx . 4 to 8 × 10-6 K-1 d 550 475 418 265 155 15 (perpendicular to the polarization direction,

Piezoelectric voltage coefficient g31 -11 .5 -11 .3 -12 .9 -11 .2 -11 .1 -10 .1 -9 .8 -9 .5 shorted) 10-3 Vm/N g 22 25 27 16 25 25 24 .4 25 21 16 -11 9. 33 Static compressive strength: Acousto-mechanical properties > 600 MPa

Frequency coefficients Np 1950 2000 1960 1960 2250 2270 2195 2180 2190 2350 3150 The data was determined using test pieces with the geometric dimensions laid N1 1500 1420 1500 1640 1590 1590 1590 1700 2300 down in EN 50324-2 standard and are typical N Hz·m 1750 1780 2010 1930 1550 1700 2500 3 values . N 1950 2000 1990 1960 1920 2110 2035 2020 2140 2100 t All data provided was determined 24 h to Elastic compliance coefficient S E 15 .0 16 .1 15 .6 11 8. 12 7. 12 .4 12 .6 11 .1 11 48 h after the time of polarization at an am- -12 2 E 10 m /N S33 19 .0 20 .7 19 .7 14 2. 14 0. 15 .5 14 .3 11 .8 bient temperature of 23 ±2 °C .

D 10 2 Elastic stiffness coefficient C33 10 N/m 10 .0 11 .1 16 6. 14 8. 15 .2 13 .8 16 .4 A complete coefficient matrix of the individual materials is available on request . If you Mechanical quality factor Qm 100 80 80 50 100 2000 400 1000 400 1400 250 have any questions about the interpretation Temperature stability of the material characteristics please contact εΤ Temperature coefficient of 33 PI Ceramic (info@piceramic .com) . ε -3 (in the range -20 °C to +125 °C) TK 33 10 /K 6 4 6 5 2 3 5 2 Time stability (relative change of the parameter per decade of time in %)

Relative permittivity Cε -1 .0 -2 .0 -4 0. -5 .0

Coupling factor CK -1 .0 -2 .0 -2 0. -8 .0

WWW.PICERAMIC.COM Temperature Dependence of the Coefficients

Temperature curve of the   capacitance C ∆ C/C (%) ∆ C/C (%)  Materials: PIC151, PIC255 and PIC155

 Materials: PIC181, PIC241 and PIC300

Temperature curve of the   resonant frequency of the ∆ fs / fs (%) ∆ fs / fs (%)

transverse oscillation fs

 Materials: PIC151, PIC255 and PIC155

 Materials: PIC181, PIC241 and PIC300

Temperature curve of the  

coupling factor of the ∆ k31 / k31 (%) ∆ k31 / k31 (%)

transverse oscillation k31

 Materials: PIC151, PIC255 and PIC155

 Materials: PIC181, PIC241 and PIC300

PIEZO TECHNOLOGY   Temperature curve of the piezoelectric charge d / d (%) ∆ d31 / d31 (%) ∆ 31 31 coefficient d31

 Materials: PIC151, PIC255 and PIC155

 Materials: PIC181, PIC241 and PIC300

Specific Characteristics isotropic . The coefficient of expansion is Thermal properties using the example of approximately linear with a TK of approx -6 the PZT ceramic PIC255 2 · 10 / K .

! The effect of successive temperature ! The thermal strain exhibits different changes must be heeded particularly in behavior in the polarization direction and the application . Large changes in the cur- perpendicular to it . ve can occur particularly in the first tem- ! The preferred orientation of the domains perature cycle . in a polarized PZT body leads to an anisotropy . This is the cause of the varying ! Depending on the material, it is possib- thermal expansion behavior . le that the curves deviate strongly from those illustrated . ! Non-polarized piezoceramic elements are

Thermal strain in the polarization direction Thermal strain perpendicular to the polarization ∆ L/L (%) direction ∆ L/L (%)

1. Heating1. Heating 1. Heating1. Heating CoolingCooling CoolingCooling 2. Heating2. Heating 2. Heating2. Heating

WWW.PICERAMIC.COM ˝L Polarisation axis ˝ L C1

(Z) fm fn 3

L1 C0 6 + L o P 5 2(Y) R1 4 0 V

Piezoelectric 1Effect and Piezo Technology Impendanz Z (X)

Frequenz f

Piezoelectric materials convert electrical ener- Piezoelectric Ceramics … ODD (1) gy into mechanical energy and vice versa . TH P 3 The piezoelectric effect of natural mono TH 6 (Z) The piezoelectric effect is now used in many OD 3 crystalline materials such as Quartz, Tour- 5 everyday products such as lighters, loud- ID maline and Seignette– – – – salt is relatively small . P 2 6 speakers and signal transducers . Piezo actua- Polycrystalline ferroelectric ceramics– – – – such as + + + + L – P tor technology has also gained acceptance – Barium Titanate –(BaTiO– – – ) and Lead Zirconate + + + + – 3 + + – – – – 5 in automotive technology, because piezo- + Titanate– (PZT) exhibit larger displacements 2(Y) + + + + – + +

controlled injection valves in combustion + + + + +

4 or induce– larger– electric– – – voltages– – – – . PZT pie- 1 –

(X) engines reduce the transition times and signi- + + zo ceramic– materials are available in many ficantly improve the smoothness and exhaust + + + + + + + + + U (2) modifications and are most widely used (1) (2) (3) gas quality . for actuator or sensor applications . Special dopings of the PZT ceramics with e .g . Ni, Bi, – From the Physical Effect to Industrial Use Sb, Nb ions make it possible to specifically The word “piezo“ is derived from the Greek optimize piezoelectricP C/m2 and dielectric parame- L ˝L L ters . P Polarisation word for pressure . In 1880 Jacques and Pier- TH W axis P re Curie discovered that pressure˝ L generates s TH P Pr C1 … with Polycrystalline Structure W electrical charges in a number of crystals (Z) fm fn 3 O2 such as Quartz and Tourmaline; they called At temperatures below the Curie tempera-

L Pb this phenomenon the “piezoelectric effect“ . ture, the lattice structure of the PZT crystal-

+ 1 + C + 0 – –

L 6 Ti, Zr Later they noticed that electrical fields can lites becomes deformed and asymmetric . +

L o L – – -Ec – TH

P + +

+ + deform piezoelectric materials . This effect is This brings about+ the formation of dipoles TH 5 – – P

P Fig . 1 . called the “inverse piezoelectric effect“ . The and the rhombohedral andE ctetragonal cry- L TH P W

2(Y) – E kV/cm – R – W 1 3 + + W 4 (1) Unit cell with symmetrical, industrial breakthrough came0 with piezo- stalliteV phases which are of interest for pie-

1 Impendanz Z (X) cubic Perovskite structure, 1(r) electric ceramics, when scientists discovered zo technology . The ceramic exhibits spon- T >TC Radialschwingung Frequenz f that Barium Titanate assumes piezoelectric-P taneous polarization (see Fig . 1) . Above the (2) Tetragonally distorted unit s -Pr characteristics on a useful scale when an Curie temperature the piezoceramic material cell, T

4 – – – – – – – – – TH TH 1 – 2 ces an oscillation,Dickenschwingung i .e . a periodic change of P (X) + + tric field, which produces a corresponding 1(r) Radialschwingung + – + + + + + + + + U the geometry, for example the increase or (2) electric voltage . This direct piezoelectric (1) (2) (3) reduction of the diameter of a disk . If the effect is also called the sensor or generator body is clamped, i e. . free deformation is Dickenschwingung – effect . constrained, a mechanical stress or force 1 is generated . This effect is frequently also OD 2 Inverse Piezoelectric Effect P C/m called Lthe actuator or motor effect . P 3 TH L 6 P ID When an electricTH voltage is applied to an TH 5 W Ps unrestrained piezoceramic2 component it TH P Pr W O2

Pb + +

– – + Längsschwingung Ti, Zr

L L – – -Ec – TH

+ + + +

TH + – – P

P Ec L TH P W

– E kV/cm – – W 3 + + W 17 Dickenschwingung

1(r) Radialschwingung

-Ps -Pr Radialschwingung L PIEZO TECHNOLOGY Dickenschwingung P

3 3 Längsschwingung

1 3 L 3(r) OD TH TH 2 Dickenschwingung P 1(r) Radialschwingung

Dickenschwingung

1 OD P 3 TH TH 6 ID 5 2

Längsschwingung

Dickenschwingung

Radialschwingung ˝L Polarisation axis ˝ L C1

(Z) fm fn 3

L1 C0 6 + L o P 5 2(Y) R1 ˝L 4 0 V

1 Impendanz Z Polarisation (X) axis ˝ L C1 Frequenz f

(Z) fm fn 3 L C 1 1 0 6 + L o P OD 5 D (1) 2(Y) TH P R1 3 4 0 V

(Z) 1 Impendanz Z TH 6 (X) OD 3 Ferroelectric Domain Structure which is degraded again when the mecha- 5 ID P – – – – Frequenz f 2 6 nical, thermal and electrical limit values of

One effect of the spontaneous polarization – – – – + + + + L the material are exceeded (see Fig . 3) . The – P – is that the discrete PZT crystallites become – – – – + + + + – 1 ceramic now exhibits piezoelectric pro- + + – – – – 5 + piezoelectric . Groups of unit cells with the – 2(Y) + + + + +

perties and will change dimensions when – ODD

+ + + + + +

4 same orientation are called ferroelectric – – – – – – – – – 1 (1) – TH P (X) an electric voltage is applied . Some PZT + 3 domains . Because of the random distribu- +

+ – + + + + + + + + TH 6 (Z) ceramics must be poled at an elevated tem- U OD 3 tion of the domain (2)orientations in the cera- 5 perature . (1) (2) (3) ID P 2 6 mic material no macroscopic piezoelectric – – – –

– – – – + + + + – L – P behavior is observable . Due to the ferro- When the permissible operating– tempe- – – – – + + + + – electric nature of the material, it is possible to rature is exceeded, the polarized+ ceramic+ – – – – 5 + – 2(Y) + + + + – + + force permanent reorientation and alignment depolarizes . The degree of depolarization+ is + + + + P C/m2 L

4 – – – – – – – – – 1 – (X) + P L of the different domains using a strong elec- depending on the Curie temperature+ of the + – + + + + + + + + U TH W tric field(2) . This process is called poling (see material . (1) (2) (3) Ps TH P Fig . 2) . Pr W An electric field of sufficient strength can Fig . 2 . Electric dipoles in – domains: O2 reverse the polarization direction (see Fig . Polarization of the Piezoceramics (1) unpolarized,

Pb 4) . The link between mechanical and electri-2 + + P C/m + L ferroelectric ceramic,– – The poling process resultsTi, Zr in a remnant P

LL cal parameters is of crucial significance for L – – TH (2) during-Ec and – TH

+ + W + +

TH polarization Pr which coincides with a the widespread technical utilization of piezo Ps + – – TH P Pr (3) after the poling L P

P remnant expansion of the material and Ec TH P W – E kV/cm – ceramics . – W (piezoelectric ceramic)+ . WW 3 + O2

Pb + 1(r) +

Radialschwingung – – + Ti, Zr -P

L s -Pr L – –

P -Ec – TH

P + + + +

TH + – – E L P

P L Ps S Ps c THS P W

– E kV/cm – – W 3 + + W Pr Dickenschwingung Pr P 1(r) Radialschwingung

-Ps -Pr

L Dickenschwingung P -E -Ec c 3 3 Längsschwingung Ec Ec E E 1 3 L 3(r) OD TH TH 2 Dickenschwingung P 3 1(r) Radialschwingung 3 Längsschwingung E E 1 3 L 3(r) OD -P -Pr TH DickenschwingungTH r 2 Dickenschwingung P -Ps -Ps 1(r) Radialschwingung

1 OD Fig . 3 . The butterfly curve shows the typical Fig . 4 . An opposing electric field will only Dickenschwingung P deformation of a ferroelectric “soft“ piezo ceramic depolarize the material if it exceeds the3 TH TH 6 ID material when a bipolar voltage is applied . coercivity strength E . A further increase in the c 5 The displacement of the ceramic here is based opposing1 field leads to2 repolarization, but in OD exclusively on solid state effects, such as the ali- the opposite direction . P 3 TH gnment of the dipoles . The motion produced TH 6 ID 5 is therefore frictionless and non-wearing . 2

Längsschwingung

Längsschwingung Dickenschwingung

Dickenschwingung

Radialschwingung

WWW.PICERAMIC.COM Electromechanics

FUNDAMENTAL EQUATIONS AND PIEZOELECTRIC COEFFICIENTS

Polarized piezoelectric materials are charac- Examples D electric flux density, terized by several coefficients and relation- or dielectric T ships . In simplified form, the basic relation- ε33 permittivity value in the polarizati- displacement ships between the electrical and elastic on direction when an electric field is T mechanical stress properties can be represented as follows : applied parallel to the direction of the polarity (direction 3), under conditions E electric field D = d T + εT E of constant mechanical stress (T = 0: S = sE T + d E “free“ permittivity) . S mechanical strain These relationships apply only to small elec - S d piezoelectric charge ε11 permittivity if the electric field and coefficient trical and mechanical amplitudes, so-called dielectric displacement are in direc- small signal values . Within this range the tion 1 at constant deformation (S = 0: T ε dielectric permittivity relationships between the elastic deformati- “clamped“ permittivity) . (for T = constant) on (S) or stress (T) components and the com-

˝L E ponents of the electric field E or the electric s elastic coefficient Piezoelectric Charge or Strain Coefficient, Polarisation (for E = constant) flux density D are linear . axis Piezo Modulus d ij ˝ L C Assignment of Axis 1 The piezo modulus is the ratio of induced (Z) fm fn 3 The directions are designated by 1, 2, and electric charge to mechanical stress or of L C 1 achievable mechanical strain to electric field 3, corresponding0 to axes X, Y and Z of the 6 + L o applied (T = constant) . P classical right-hand orthogonal axis set . The 5 rotational axes are designated with 4, 5 and 6 2(Y) R (see Fig . 5) . The direction of polarization1 (axis Example 4 0 V

1 Impendanz Z (X) 3) is established during the poling process d mechanical strain induced per unit of by a strong electrical field applied between 33 Fig . 5 . Orthogonal electric field applied inFrequenz V/m for charge coordinate system to the two electrodes . Since the piezoelectric density in C/m2 per unit pressure in N/ describe the properties material is anisotropic, the corresponding m2, both in polarization direction . 1 of a poled piezoelectric physical quantities are described by tensors . ceramic . The polarization The piezoelectric coefficients are therefore ODD vector is parallel to the Piezoelectric Voltage Coefficient gij (1) 3 (Z)-axis . indexed accordingly . TH P 3 The piezoelectric voltage coefficient g is TH 6 (Z) OD 3 Permittivity the ratio of electric field E to the effective 5 ε ID P 2 6 – – – – mechanical stress T . Dividing the respec-

The relative permittivity, or relative– dielec– – – - + + + + tive piezoelectric charge coefficient d by L – ij P – tric coefficient, ε is the ratio– – – of– the absolute + + + + –

+ the corresponding permittivity gives the + – – – – 5 + permittivity– of the ceramic material and the 2(Y) + + + + – corresponding g coefficient . + + ij

+ +-12+ + +

4 permittivity in – vacuum (ε–0 =– 8– 85. – x 10– – F/m),– – 1 – (X) + where the absolute+ permittivity is a measu- + – + + + + + + + + Example U (2) re of the polarizability . The dependency of (1) (2) (3)

the permittivity from the orientation of the g31 describes the electric field induced in electric field and the flux density is described direction 3 per unit of mechanical stress – by indexes . acting in direction 1 . Stress = force per P C/m2 unit area, not necessarily orthogonal . L L P TH W Ps TH P Pr W O2

Pb + +

– – + Ti, Zr

L L – – -Ec – TH

+ + + +

TH + – – P

P Ec L TH P W

– E kV/cm – – W W 3 + + 19 1(r) Radialschwingung

-Ps -Pr

L Dickenschwingung PIEZO TECHNOLOGY P

3 3 Längsschwingung

1 3 L 3(r) OD TH TH 2 Dickenschwingung P 1(r) Radialschwingung

Dickenschwingung

1 OD P 3 TH TH 6 ID 5 2

Längsschwingung

Dickenschwingung

Radialschwingung Elastic Compliance sij NP is the frequency coefficient of the The elastic compliance coefficient s is the planar oscillation of a round disk . ratio of the relative deformation S to the Nt is the frequency coefficient of the mechanical stress T . Mechanical and elec- thickness oscillation of a thin disk trical energy are mutually dependent, the polarized in the thickness direction . electrical boundary conditions such as Mechanical Quality Factor Q the electric flux density D and field E must m The mechanical quality factor Q character- therefore be taken into consideration . m izes the “sharpness of the resonance“ of Examples a piezoelectric body or resonator and is primarily determined from the 3 dB band- E s33 the ratio of the mechanical strain in width of the series resonance of the system direction 3 to the mechanical stress which is able to oscillate (see Fig . 7 typical in the direction 3, at constant electric impedance curve) . The reciprocal value field (for E = 0: short circuit) . of the mechanical quality factor is the mechanical loss factor, the ratio of effecti- s D the ratio of a shear strain to the 55 ve resistance to reactance in the equivalent effective shear stress at constant circuit diagram of a piezoelectric resonator at dielectric displacement (for D = 0: open resonancem (Fig . 6) . electrodes) . Coupling Factors k The often used elasticity or Young’s mo The coupling factor k is a measure of how dulus Y corresponds in a first approximati- ij the magnitude of the piezoelectric effect is on to the reciprocal value of the correspon- (n o t an efficiency factor!) . It describes the ding elasticity coefficient . ability of a piezoelectric material to convert Frequency Coefficient N electrical energy into mechanical energy and i vice versa . The coupling factor is determi- The frequency coefficient N describes ned by the square root of the ratio of stored the relationship between the geometrical mechanical energy to the total energy ab- dimension A of a body and the corresponding sorbed . At resonance, k is a function of the (series) resonance frequency . The indices corresponding form of oscillation of the designate the corresponding direction of piezoelectric body . oscillation N = fs A . Examples Examples k33 the coupling factor for the longitudinal oscillation . N3 describes the frequency coefficient

for the longitudinal oscillation of a k31 the coupling factor for the transverse slim rod polarized in the longitudinal oscillation . direction . kP the coupling factor for the planar radial

N1 is the frequency coefficient for the oscillation of a round disk . transverse oscillation of a slim rod kt the coupling factor for the thickness polarized in the 3-direction . oscillation of a plate .

N5 is the frequency coefficient of the k15 the coupling factor for the thickness thickness shear oscillation of a thin shear oscillation of a plate . disk .

WWW.PICERAMIC.COM Dynamic Behavior

OSCILLATION MODES OF PIEZOCERAMIC ELEMENTS ˝L Polarisation The electromechanical behavior of a piezo axis ˝ L ˝L electric element excited to oscillations can C1 Polarisation be represented by an electrical equivalent f f axis (Z) m n 3 circuit diagram (s . Fig . 6) . C0 is the capaci- ˝ L C1 3 OD L1 tanceC0 of the dielectric . The2 seriesTH circuit, conU P- OD >> TH (Z) fm fn 6 3 OD + L o 3 sisting of C , L , and R ,1 describes the change P 3 OD 1 1 1 2 TH U P OD >> TH 2 TH U P OD >> TH 5 L1 in the mechanical properties, such as elastic C0 1 1 6 2(Y) R + L o deformation, effective mass 1 (inertia) and P 4 0 V

1 OD Impedance Z 5 (X) 3 mechanical losses3 resultingOD from internal 2 TH U P OD >> TH 2 TH U P OD >> TH 2(Y) R friction . This description of the oscillatory 1 1 1 4 Frequency f 0 V

1 circuit canImpendanz Z only be used for frequencies (X) in the vicinity of the mechanical intrinsic Fig . 7 . Typical impedance curve Frequenz f 1 resonance .

Most piezoelectric material parameters are ODD Fig . 6 . Equivalent circuit diagram OD (1) 3 OD 3 TH P 1 determined by means of2 impedanceTH mea-U P OD >> TH 3 of a piezoelectric resonator2 TH U P OD >> TH TH 6 (Z) 1 surements on special1 test bodiesL according ODD 3 3 U OD (1) 5 to the European Standard2 EN L50324-2 atP L >> W >> TH TH P ID 6 – – – – TH 3 2 L 1 3 U P (Z) 3 resonanceU . 2 P L >> W >> TH TH 6 – – – – OD 3 2 P L >> W >> TH + + + + W L – TH 5 P – 3 1 OD ID TH – – – – P – – – – + + + + 1 OD – 6 3 + 2 TH W U P OD >> TH 2 5 + – – – – 2 W + TH L U P OD– >> TH L 2(Y) – – – – 1 + + + + + Shape + + + + – Oscillations Electrically L Mechanically

3 U + U – + 3 – 1 + + + +

P 2 P L >> – W >> TH – – – – – – – – 4 – – – – 2 P L >> W >> TH 1 + + + + – induced induced – + (X) + + TH – – – – TH 5 + 1 + 1

– Type Mechanical Series resonance displacement voltage – + + + + + + + + 2(Y) + + + + + + – W W U + (2) + + + + + deformation frequency (small signal) (small signal)

4 – – – – – – – – – 1 – (1) (2) 3 (3) OD (X) + + 2 TH U P OD >> TH

+ – + + + + + + + + 1 U N – (2) TH ƒ = P (1) (2) (3) radial s OD OD 3 LOD 3 3 THL Thin disk 2 TH2 L UU P OD >> TH 32 THTH U UP OD >> TH 23 L >> W >> TH– P L >> W >> TH P C/m 2 P L >> W >> TH L 1 2 1 1 3 N 3 TH TH2 ƒ = t P L 1 thicknessL U P L >> W >> TH s 1 2 L U P L >> W >> TH TH TH W 1 W W 2 1 W P C/m TH TH Ps L TH P P r W P L 3 3 W W L TH W 2 LL U P L >> W >> TH 3 2 L UU P L >> W >> TH Ps N O2 3 U 2 P L >> W >> TH 1 TH P Plate P 1 1 transverse ƒs = r 2 P L >> W >> TH TH L

Pb 1 + + W TH + 1 W – – W W 2 Ti, Zr

L O W L – – -Ec – TH

+ + + +

TH Pb + – – + +

– – + P

P TH ELc L TH P W

– E kV/cm – L Ti, Zr TH – W

+ +3 U L

– 3 – W -Ec – TH

+ + 2 P L >> W >> TH

+ 3 + + 3 TH – – TH 2 L U P 11 2 L U P L >> W >> TH P P Rod Ec L >> W >> TH L L TH P N3

longitudinal ƒs = W

1(r) – E kV/cm – Radialschwingung – 1 WL L W + + 1 L 3 U L ˜ W >> TH L W 3 13 TH U 3 -PsU -P2r L W 1 2 P L >> W >> TH 2 P L >> W >> TH L 3 L U L ˜ W >> TH TH W L TH W 1(r) 1 3 U L ˜ W >> TH 21 TH L W L Radialschwingung 2 TH TH W W W P -Ps -P TH Dickenschwingung r 3 L 1 L 1 P 3 L 2 L L UP P L >> W >> TH L 2 L P L U P L >> W >> TH L N 3 U L ˜ W >> TH 1 3 U L ˜ W >> TH ƒ = 5 Shear plate 2 TH THthickness shear s Dickenschwingung 1 W 2 W TH P L W L TH W TH P P OD 3 TH TH ID 2 L OD U P L >> W >> TH 3 N1 OD 1 transversal ƒs ≈ 3 TH Längsschwingung1 TH ID P L 1 ID 1 3 L >> OD >> TH L L Tube 3 21 3 L L P U 1 3 1 L U L ˜ W >> TH 3 W U L ˜ W >>3 TH W L 3(r) 3 2 THP TH2 LTH U P L >> W >> TH 2 THL U WP L >> W >> TH 2 3 W L >> OD >> TH OD 3 Längsschwingung3 OD L >> OD >> TH 21 ODL U N TH TH 1 Dickenschwingung ƒ t 2 2 L U thicknessL s ≈ P IDL ID 1(r) TH 1 Radialschwingung 3(r) 3 P L 1 WP 1 W OD 21 P P TH TH 2 Dickenschwingung3 L >> OD >> TH 1 L >> OD >> TH P 1(r) 3 L 1 2 L U L URadialschwingung L 23 L U L ˜ W >> TH Dickenschwingung 3 L U L ˜ W >> TH 2 TH W 2 TH W 1 L TH L TH Dickenschwingung OD OD P OD P PIEZO TECHNOLOGY TH P 3 ID TH 6 ID 1 ID 1 L OD 5 1 2 1 P 3 PL U L ˜ W >> TH TH P 3 3 L >> OD >> TH 2 3 WL >> OD >> TH TH L U TH 6 2 L U 2 ID 1 1 TH L 5 L L 2 TH L 3 L U L ˜ W >> TH 3 OD P U L ˜ W >> TH OD TH 2 TH W 2 ID W Längsschwingung ID L L 1 P 1 P P 3 P L >> OD >> TH L U Längsschwingung 3 L >> OD >> TH 2 2 L U TH Dickenschwingung OD ID 1 TH Dickenschwingung TH P OD 3 OD L >> OD >> TH Radialschwingung L U ID 2 ID 1 1 P P Radialschwingung 3 L >> OD >> TH 3 L >> OD >> TH L 2 L U 2 U Figure 7 illustrates a typical impedance cur-

ve . The series and parallel resonances, fs and

fp, are used to determine the piezoelectric parameters . These correspond to a good ap-

proximation to the impedance minimum fm

and maximum fn .

Oscillation States of Piezoelectric Components Oscillation states or modes and the de formation are decided by the geometry of the element, mechano-elastic properties and the orientations of the electric field and the polarization . Coefficients see p . 10, specific values see p . 18 . dimensions see p . 27 . The equations are used to calculate approx imation values .

Shape Oscillations Electrically Mechanically induced induced Type Mechanical Series resonance displacement voltage deformation frequency (small signal) (small signal)

d OD ∆OD =31 U TH

4g33TH ∆TH = d33U U = – F π OD 2 3

d L g ∆L =31 U U = –31 F TH W 1

g33L ∆L = d33U U = – F WTH 3

g 15 TH ∆L = d U U = – F3 15 LW

d L ∆L =31 U TH

∆TH = d33U

WWW.PICERAMIC.COM Material Properties and Classification

PI Ceramic provides a wide selection of Important fields of application for “soft“ piezoelectric ceramic materials based on piezo ceramics are actuators for micro modified Lead Zirconate Titanate (PZT) and positioning and nanopositioning, sensors Barium Titanate . The material properties such as conventional vibration pickups, are classified according to the EN 50324 ultrasonic transmitters and receivers for European Standard . flow or level measurement, for example, object identification or monitoring as well In addition to the standard types described as electro-acoustic applications as sound here in detail, a large number of modifica- transducers and microphones, through tions are available which have been adapted to their use as sound pickups on musical to a variety of applications . instruments .

Internationally, the convention is to divide “Hard“ Piezo Ceramics piezo ceramics into two groups . The terms “soft“ and “hard“ PZT ceramics refer to “Hard“ PZT materials can be subjected to the mobility of the dipoles or domains and high electrical and mechanical stresses . hence also to the polarization and depolar- Their properties change only little under the- ization behavior . se conditions and this makes them particularly ideal for high-power applications . The “Soft“ Piezo Ceramics advantages of these PZT materials are the Characteristic features are a comparably moderate permittivity, large piezoelectric high domain mobility and resulting “soft coupling factors, high qualities and very ferroelectric“ behavior, i e. . it is relatively good stability under high mechanical loads easy to polarize . The advantages of the and operating fields . Low dielectric losses “soft“ PZT materials are their large piezo facilitate their continuous use in resonance electric charge coefficient, moderate per mode with only low intrinsic warming of mittivities and high coupling factors . the component . These piezo elements are used in ultrasonic cleaning (typically kHz frequency range), for example, the machining of materials (ultrasonic welding, bonding, drilling, etc ),. for ultrasonic pro- cessors (e g. . to disperse liquid media), in the medical field (ultrasonic tartar removal, surgical instruments etc ). and also in sonar technology .

2233

PIEZO TECHNOLOGY Lead-Free Materials

Piezoelectric ceramics, which nowadays the market by PI Ceramic . PIC700 is based are based mainly on Lead Zirconate-Lead on Bismuth Sodium Titanate (BNT) and Titanate compounds, are subject to an ex- has very similar characteristics to Barium emption from the EU directive to reduce Titanate materials . PIC700 is suitable for hazardous substances (RoHS) and can there ultrasonic transducers in the MHz range as fore be used without hesitation . PI Ceramic is well as sonar and hydrophone applications . nevertheless aiming to provide high-perfor mance lead-free piezoceramic materials and Characteristics of the Lead-Free Typical dimensions of cur- Piezo Ceramic Material rent PIC 700 components thus provide materials with a guaranteed are diameters of 10 mm and future . PI Ceramic is currently investigating The maximum operating temperature of thicknesses of 0 5. mm . technologies to reliably manufacture the BNT-based ceramic is around 200 °C . lead-free ceramic components in series The permittivity and piezoelectric coupling production . factors of BNT components are lower than those of conventional, PZT materials . Even First Steps Towards Industrial Use though PIC700 is suitable for a number of with PIC700 applications, an across-the-board replace- The PIC700 material, which is currently in ment for PZT piezoelectric elements in laboratory production, is the first lead-free technical applications is not in sight at the piezo ceramic material being offered on moment .

Crystalline Piezo Material for Actuators

Lead-Free and with High Linearity Since it is used in positioning systems the PIC050 material is only supplied as a Piezoceramic actuators exhibit nonlinear translational or shear actuator in predefi- displacement behavior: The voltage applied ned shapes . The standard dimensions are is thus not a repeatable measure for the High-dynamics nanopositioning similar to those of the PICA shear actuators ® position reached . Sensors must therefore system with Picoactuator (see www .piceramic .com) . technology . be used in applications where the position is relevant . The crystalline PIC050 material, in contrast, has a linearity which is significantly improved by a factor of 10 so that a position sensor is not necessary .

PIC050 is used for actuators and nanopositioning systems with the tradename Picoac- tuator® . They have the high stiffness and dynamics of actuators made of PZT material but their displacement is limited: Travel of up to +/-3 µm results with a maximum profile of 20 mm .

Picoactuator® in Nanopositioning In precision positioning technology, Physik Instrumente (PI) uses these actuators precis ely where this small displacement with high dynamics and accuracy is required . The t high linearity means that they can operate The PIC050 crystal forms translucen layers in the Picoactuator® . without position control which otherwise sets an upper limit for the dynamics of the system as a result of the limited control bandwidth .

WWW.PICERAMIC.COM Manufacturing Technology

EFFICIENT PROCESSES FOR SMALL, MEDIUM-SIZED AND LARGE PRODUCTION RUNS

Piezo Components Made by Pressing Manufacture of Piezo Components Technology Using Pressing Technology Piezoceramic bulk elements are manufac- Mixing and grinding tured from spray-dried granular material of the raw materials by mechanical hydraulic presses . The compacts are either manufactured true to size, taking into account the sintering contraction, Pre-sintering (calcination) or with machining excesses which are then reworked to achieve the required precision .

Milling The sintered ceramic material is hard and can be sawn and machined, if required . Screen printing is used to metallize the pie- Granulation, spray drying zo elements and sputtering processes (PVD) are employed for thin metallizing layers . The sintered elements are then polarized . Pressing and shaping Stack Design for Actuators Piezo actuators are constructed by stacking Thermal processing several piezoceramic bulk elements and Sintering at up to 1300 °C intermediate metal foils . Afterwards an outer insulation layer made of polymer mate- Lapping, grinding, surface grinding, rial is applied . diamond cutting

Application of electrodes: Screen printing, PVD processes, e .g . sputtering

Polarization

Assembling and joining technology for actuators, sound transducers, transducers

Final inspection

Piezoceramic disks with center hole

PIEZO TECHNOLOGY Film Technology for Thin Ceramics Co-firing Process / Multilayer Technology / Piezo Components Components inCeramics Tape Technology Thin ceramic layers are produced by tape casting . This process can achieve minimal Fine grinding of the raw materials individual component thicknesses of only 50 µm .

Slurry preparation The electrodes are then applied with special screen printing or PVD processes .

Multilayer Piezo Actuators: PICMA® Tape casting Multilayer co-firing technology is an especially innovative manufacturing process . Application of electrodes The first step is to cast tapes of piezocera- by screen printing mic materials which are then provided with electrodes while still in the green state . The Laminating component is then laminated from individ ual layers . In the following electrodes and ceramic are sintered together in a single Isostatic pressing processing step . The patented PICMA® design comprises an additional ceramic insulation layer which Thermal processing protects the inner electrodes from environ- Binder burn out and sintering mental effects . Any further coatings made of at up to 1100 °C polymer material, for example, are therefore not required . This means that PICMA® piezo Grinding actuators remain stable even when subject to high dynamic load . They achieve a higher reliability and a lifetime which is ten times Application of contact electrodes, longer than conventional multilayer piezo termination actuators with a polymer insulation . After the mechanical post-processing is com- Polarization plete, the multilayer actuators are provided with contact electrodes and are polarized .

Final inspection

PICMA® actuators with patented, meander-shaped external electrodes for up to 20 A charging current

WWW.PICERAMIC.COM Flexibility in Shape and Design

Shaping of Compacts Components such as disks or plates can be manufactured at low cost with a minimum thickness from as low as 0 2. mm . Inboard automatic cutoff saws produce such pieces in large numbers .

Modern CNC technology means the sintered ceramic elements can be machined with the highest precision . Holes with diameters of down to 0 3. mm can be produced . Almost any contours can be shaped with accuracies to one tenth of a millimeter . Surfaces can be structured and the components can be milled to give a three-dimensional fit .

Ultrasonic machining processes are used to manufacture thin-walled tubes with wall thicknesses of 0 .5 mm .

Robot-Assisted Series Production Automated assembly and production lines use fast pick-and-place devices and comput er-controlled soldering processes, for example . An annual production run of several million piezoelectric components and more is thus no problem .

All Possible Shapes Even with Full-Ceramic Encapsulation

PI Ceramic can manufacture almost any Centerless, cylindrical grinding of piezoceramic rods shape of PICMA® multilayer piezo actuator using the latest production technology . Hereby, all surfaces are encapsulated with ceramic insulation . We can manufacture not only various basic shapes, e g. . round or triangular cross- sections, but also insulated center holes on benders, chips or stack actuators, making it easier to integrate them . Special milling machines work the sensitive ceramic films in the green state, i e. . before sintering . The individual layers are then equipped with electrodes and laminated . The co-firing process is used to sinter the ceramic and the internal electrodes together, the same process as with PICMA® standard actuators .

PIEZO TECHNOLOGY PICMA® Multilayer Actuators with Long Lifetime

Automatic soldering machine with PICMA® actuators

The internal electrodes and the ceramic of outgassing and high bake-out temperatures . PICMA® multilayer actuators are sintered PICMA® piezo actuators even operate in the together (co-firing technology) to create a cryogenic temperature range, albeit at re monolithic piezoceramic block . This produced travel . Every actuator is constructed cess creates an encapsulating ceramic lay- exclusively of non-ferromagnetic materials, er which provides protection from humi- giving them extremely low residual magne- dity and from failure caused by increased tism of the order of a few nanotesla . leakage current . PICMA® actuators are there fore far superior to conventional, polymer- Low Operating Voltage insulated multilayer piezo actuators in terms In contrast to most commercially available of reliability and lifetime . The monolithic multilayer piezo actuators, PICMA® actu- ceramic design also gives rise to a high ators achieve their nominal displacement resonance frequency, making the actuators at operating voltages far below 150 V . This ideal for high-dynamic operation . characteristic is achieved by using a partic Large Temperature Range – Optimum ularly fine-grained ceramic material which UHV Compatibility – Minimal Outgassing means the internal layers can be thin . – Neutral in Magnetic Fields The PICMA® actuators are at least partially The particularly high Curie temperature protected by the following patents: of 320 °C gives PICMA® actuators a usa- German Patent No . 10021919 ble temperature range of up to 150 °C, far German Patent No . 10234787 beyond the 80 °C limit of conventional mul- German Patent No . 10348836 tilayer actuators . This and the exclusive use German Patent No . 102005015405 of inorganic materials provide the optimum German Patent No . 102007011652 conditions for use in ultra-high vacuums: No US Patent No . 7,449,077

WWW.PICERAMIC.COM Metallization and Assembling Technology

THE COMPLETE PROCESS IS IN-HOUSE

Thick-Film Electrodes soldering machines at our disposal to solder on miniaturized components and for larger Screen printing is a standard procedure to apply the metal electrodes to the piezoce-ramic production runs . Soldered joints which must elements . Typical film thicknesses here are be extremely reliable undergo special visu- around 10 μm . Various silver pastes are used al inspections . The optical techniques used in this process . After screen printing these for this purpose range from the stereomi- pastes are baked on at tempera-tures above cro-scope through to camera inspection sys- 800 °C . tems .

Thin-Film Electrodes Mounting and Assembling Technology Thin-film electrodes are applied to the The joining of products, e . g . with adhesives, ceramic using modern PVD processes is carried out in the batch production using au- (sputtering) . The typical thickness of the tomated equipment which executes the nec- metallization is in the range of 1 μm . Shear essary temperature-time-regime (e .g . curing elements must be metallized in the polar- of epoxy adhesives) and hence guarantees ized state and are generally equipped with uniform quality . The choice of adhesive and thin-film electrodes . the curing regime are optimized for every product, taking into consideration the mate- PI Ceramic has high-throughput sputtering rial properties and the intended operational facilities which can apply electrodes made of conditions . Specifically devel-oped dosing metal alloys, preferably CuNi alloys and no- and positioning systems are used for com- ble metals such as gold and silver . plex special designs . The piezoceramic stack actuators of the PICA series, high-voltage Soldering Methods bender-type actuators and ultrasonic trans- Ready-made piezo components with ducers are constructed in jointing processes connecting wires are manufactured by and have proved successful many times over specially trained staff using hand solder- in the semi-conductor industry and in medical ing processes . We have the latest automatic engineering thanks to their high reliability .

Fully loaded sputtering equipment

PIEZO TECHNOLOGY Testing Procedures

STANDARDIZED PROCEDURES PROVIDE CERTAINTY

Comprehensive quality management con- sorting categories . Visual peculiarities must trols all production process at PI Ceramic, not negatively affect the functioning of the from the quality of the raw materials through component . to the finished product . This ensures that only released parts that meet the quality The finish criteria relate to: specifications go on for further processing ! surface finish of the electrode and delivery . ! pores in the ceramic Electrical Testing ! chipping of the edges, scratches, etc . Small-Signal Measurements Quality Level The data for the piezoelectric and dielectric All tests are carried out in accordance with properties such as frequencies, impedanc- the DIN ISO 2859 standardized sampling es, coupling factors, capacitances and loss method . The AQL 1 0. level of testing ap- factors is determined in small-signal mea- plies for the electrical assessment, for ex- surements . ample . A special product specification can be agreed for custom-engineered products . Large-Signal Measurements This includes the relevant release records, DC measurements with voltages of up plots of the measured values or individual to 1200 V are carried out on actuators to de- measured values of certain test samples termine the strain, hysteresis and dielectric through to the testing of each individual strength in an automated routine test . piece, for example . Geometric and Visual Testing Processes Measurement of Material Data For complex measurements, image processing measurement devices and white- The data is determined using test pieces light interferometers for topographical with the geometric dimensions laid down examinations are available . in accordance with the EN 50324-2 standard and are typical values (see p . 14 ff) . Visual Limit Values Con-formance to these typical parameters Ceramic components must conform to is documented by continual testing of the certain visual specifications . PI Ceramic has individual material batches before they are set its own criteria for the quality assess- released . The characteristics of the individ- ment of the surface finishes, which follow ual product can deviate from this and are the former MIL-STD-1376 . A large variety determined as a function of the geometry, of applications are taken into account, for varia-tions in the manufacturing processes special requirements there are graduated and measuring or control conditions .

WWW.PICERAMIC.COM Integrated Components, Sub-Assemblies

FROM THE CERAMIC TO THE COMPLETE SOLUTION

Ceramics in Different Levels of Integration logy and thus provide a symmetric displacement . PI Ceramic integrates piezo ceramics into the customer’s product . This includes both Piezo actuators can be equipped with the electrical contacting of the elements ac- sensors to measure the displacement and cording to customer requirements and the are then suitable for repeatable position- mounting of components provided by the ing with nanometer accuracy . Piezo actua- customer, i . e . the gluing or the casting of tors are often integrated into a mechanical the piezoceramic elements . For the custom system where lever amplification increases er, this means an accelerated manufacturing the travel . Flexure guiding systems then process and shorter lead times . provide high stiffness and minimize the lateral offset . Sensor Components – Transducers PI Ceramic supplies complete sound trans- Piezo Motors ducers in large batches for a wide variety Piezo ceramics are the drive element for of application fields . These include OEM as- piezomotors from Physik Instrumente (PI), semblies for ultrasonic flow measurement which make it possible to use the special technology, level, force and acceleration characteristics of the piezo actuators over measurement . longer travel ranges as well . Piezo Actuators PILine® piezo ultrasonic motors allow for The simplest form for a piezo actuator is very dynamic placement motions and can a piezo disk or plate, from which stack be manufactured with such a compact form actuators with correspondingly higher that they are already being used in many displacement can be constructed . As an new applications . alternative, multilayer actuators are manufactured in different lengths from piezo Piezo stepping drives provide the high films with layer thicknesses below 100 μm . forces which piezo actuators generate over Shear actuators consist of stacks of shear several millimeters . The patented NEXLINE® plates and are polarized such that they have and NEXACT® drives from PI with their a displacement perpendicular to the field complex construction from longitudinal, applied . Bender actuators in different ba- shear and bender elements and the nec- sic forms are constructed with two layers essary contacting are manufactured com- (bimorph) by means of multilayer techno pletely at PI Ceramic .

PIEZO TECHNOLOGY Application Examples for Piezo Ceramic Products

VERSATILE AND FLEXIBLE

Acousto-Electrical Transducers

! Sound and ultrasound receivers, e .g . microphones, level and flow rate measurements

! Noise analysis

! Acoustic Emission Spectroscopy

Inverse Piezoelectric Effect The piezo element deforms when an electric voltage is applied; mechanical motions or oscillations are generated .

Electro-Mechanical Transducers Actuators, such as translators, bender elements, piezo motors, for example:

! Micro- and nanopositioning .

! Laser Tuning

! Vibration damping

! Micropumps Medical engineering, biotechnology, me- ! Pneumatic valves chanical engineering or production technology through to semiconductor technology Electro-Acoustic Transducers – countless fields benefit from the piezoelectric characteristics of the components . ! Signal generator (buzzer) Both the direct and the inverse piezoelectric ! High-voltage sources / transformers effect have industrial applications . ! Delay lines ! High-powered ultrasonic generators: Direct Piezoelectric Effect Cleaning, welding, atomization, etc . The piezo element converts mechanical Ultrasonic signal processing uses both quantities such as pressure, strain or accel effects and evaluates propagation times, eration into a measureable electric voltage . reflection and phase shift of ultrasonic wa- Mechano-Electrical Transducers ves in a frequency band from a few hertz right up to several megahertz . ! Sensors for acceleration and pressure Applications are e . g . ! Vibration pickups, e .g . for the detection of

imbalances on rotating machine parts or ! Level measurement

crash detectors in the automotive field ! Flow rate measurement

! Ignition elements ! Object recognition and monitoring

! Piezo keyboards ! Medical diagnostics

! Generators, e . g . self-supporting energy ! High-resolution materials testing

sources (energy harvesting) ! Sonar and echo sounders

! Passive damping ! Adaptive structures

WWW.PICERAMIC.COM Pumping and Dosing Techniques with Piezo Drives

Increasing miniaturization places conti- In the automotive industry, fuel injection nuously higher demands on the components systems driven by multilayer stack actuators used, and thus on the drives for microdosing are also microdosing valves . systems as well . Piezoelectric elements provide the solution here: They are reliable, fast Peristaltic Pumps, Jet Dispensers and precise in operation and can be shaped So-called peristaltic pumps are ideal in to fit into the smallest installation space . At cases where liquids or gases are to be the same time their energy consumption is dosed accurately and also as evenly and low, and they are small and low-cost . The with as little pulsing as possible . The dosing quantities range from milliliter, mi- external mechanical deformation of the croliter, nanoliter right down to the picoliter tube forces the medium to be transported range . through this tube . The pumping direction is determined by the control of the individual The fields of application for piezoelectric actuators . pumps are in laboratory technology and Air bubble detectors check for smooth The drive element consists of flat piezo bend flow during dialysis and transfusions medical engineering, biotechnology, chemi- (Image: Sonotec) cal analysis and process engineering which er elements, compact piezo chip actuators frequently require reliable dosing of minute or piezo stack actuators, depending on the amounts of liquids and gases . power and size requirements . Bender actuators are suitable mainly for applications Micro-Diaphragm Pumps, with low backpressure, e g. . for liquids with Microdosing Valves low viscosity .

The drive for the pump consists of a pie- Piezo actuators are better able to cope with zo-electric actuator connected to a pump higher backpressure and are suitable for diaphragm, usually made of metal or sili- dosing substances with higher viscosity, but con . The deformation of the piezo element require more space . changes the volume in the pump chamber, the drive being separated from the medium Piezoelectric Microdispensers, to be pumped by the diaphragm . Depen- Drop-on-Demand ding on the drop size and the diaphragm lift Piezoelectric microdispensers consist of a thus required, and also the viscosity of the liquid-filled capillary which is shaped into medium, they can be driven directly with pie- a nozzle and a surrounding piezo tube . zo disks, piezo stack actuators or by means of levered systems . When a voltage is applied, the piezo tube contracts and generates a pressure wave Their compact dimensions also make the- in the capillary . This means that individual se dosing devices suitable for lab-on-a-chip drops are pinched off and accelerated to a applications . velocity of a few meters per second so that they can travel over several centimeters . Piezo drives are also used for opening and Precision dosing of droplets and printing closing valves . The range here is from a The volume of the drop varies with the microarrays thanks to highly dynamic simple piezo element or bender actuator for properties of the medium transported, the piezo-based pipetting technology a diaphragm valve, preloaded piezo stack ac- dimensions of the pump capillaries and the (Image: Biofluidix, Bernd Müller Fotografie tuators for large dynamics and force through control parameters of the piezo actuator . to piezo levers which carry out fine dosing Micro-channels etched into silicon can also even at high backpressure . be used as nozzles .

PIEZO TECHNOLOGY Ultrasound Applications in Medical Engineering

The piezoelectric effect is used for a lar- The principle is always similar and works ge number of applications in the life sci- just like ultrasonic material machining: ences: For example, for imaging in medical Piezoceramic composite systems made of diagnostics, in therapy for the treatment of ring disks clamped together are integrated pain, for aerosol generation or the remo- in a sonotrode in the form of a medical in val of tartar from teeth, for scalpels in eye strument . This transmits vibration amplitu- surgery, for monitoring liquids, such as in des in the μm range at operating frequen- the detection of air bubbles in dialysis, or cies of around 40 kHz . also as a drive for dispensers and micropumps . Ultrasound Imaging – Sonography The big advantage of sonography is the If high power densities are required, as is harmlessness of the sound waves, which is the case with ultrasonic tartar removal or for why the method is widely used . The ultra surgical instruments, for example, “hard“ sonic transmitter contains a piezo element, PZT materials are used . which generates ultrasonic waves and also detects them again . The ultrasonic trans- Ultrasonic Instruments in Surgical and mitter emits short, directional sound wave Cosmetic Applications pulses which are reflected and scattered by Nowadays, instruments with ultrasonic the tissue layers to different degrees . By drives allow minimally invasive surgical measuring the propagation time and the techniques in eye and oral surgery, for ex- magnitude of the reflection an image of the ample . Devices for liposuction are also of- structure under investigation is produced . ten based on ultrasonic technology . Piezo elements have long been used as ultrasonic generators to remove mineral deposits on human teeth .

Instruments for the removal of tartar with ultrasound, OEM product

. .

WWW.PICERAMIC.COM Ultrasound Therapy Aerosol Production This method involves irradiating the tissue Ultrasound makes it possible to nebulize with ultrasonic waves by means of an ultra- liquids without increasing the pressure or sonic transmitter . On the one hand, mechan the temperature, a fact which is of crucial ical, longitudinal waves generate vibrations importance particularly for sensitive sub- in the tissue, on the other, they convert part stances such medicines . of the ultrasonic energy into heat . The process is similar to high-frequency Typical working frequencies are in the ran- ultrasonic cleaning – a piezoceramic disk ge 0 8. to over 3 MHz, both continuous wave fixed in the liquid container and oscillating and pulsed wave ultrasonic techniques in resonance generates high-intensity ultra- being used in the application . The vibrati- sonic waves . The drops of liquid are created on amplitudes transmitted are in the range near the surface by capillary waves . around 1 µm . The diameter of the aerosol droplets is determined by the frequency of the ultra Different effects are achieved depending sonic waves: The higher the frequency, the The finest and particularly homogenous on the energy of the radiation . High-energy smaller the droplets . aerosols are created with the help of shock waves are used to destroy kidney ultrasound stones, for example . Low-energy shock wa- For direct atomization, where the piezo (Image: Pari Pharma GmbH) ves effect a type of micro-massage, and are element oscillating at high frequency is in used for the treatment of bones and tissue direct contact with the liquid, the piezo sur- and in physiotherapy among other things . face is specially treated against aggressive substances . In cosmetic applications ultrasonophoresis, i e. . the introduction of drugs into the skin, is becoming increasingly important .

Ultrasonic Sensors: Piezo Elements in Metrology

Flow Rate Measurement The measurement of the propagation time In many areas the measurement of flow is based on the transmitting and receiving rates is the basis for processes operating of ultrasonic pulses on alternating sides in a controlled way . In modern building in the direction of flow and in the opposi- services, for example, the consumption te direction . Here, two piezo transducers of water, hot water or heating energy is operating as both transmitter and receiver recorded and the supply as well as the are arranged in a sound section diagonally billing is thus controlled . to the direction of flow .

In industrial automation and especially in The Doppler effect is used to evaluate the the chemical industry, volume measurement phase and frequency shift of the ultraso- can replace the weighing of substance nic waves which are scattered or reflected quantities . by particles of liquid . The frequency shift between the emitted wave front and the Not only the flow velocity, but also the reflected wave front received by the same concentration of certain substances can be piezo transducer is a measure of the flow 35 detected . velocity .

PIEZO TECHNOLOGY Ultrasonic Sensors: Piezo Elements in Metrology

Level Measurement Detection of Particles and Air Bubbles For propagation time measurements the The ultrasonic bubble sensor provides a piezo transducer operates outside the reliable control of liquid transport in tubes . medium to be measured as both transmit- The sensor undertakes non-contact detec- ter and receiver . It emits an ultrasonic pulse tion of the air and gas bubbles in the liq- in air which is reflected by the content . The uid through the tube wall, and thus allows propagation time required is a measure of continuous quality monitoring . the distance travelled in the empty part of the container . The application possibilities are in the medical, pharmaceutical and food technol This allows non-contact measurements ogy fields . The sensors are used to mon- whereby the level of liquids, and also solids, itor dialysis machines, infusion pumps or in silos for example, can be measured . transfusions . Industrial applications include control technology, such as the monitoring The resolution or accuracy depends on how of dosing and filling machines, for example . well the ultrasonic pulse is reflected by the respective surface . Acceleration and Force Sensors, Force Transducer Submersible transducers, or tuning fork The key component of the piezoelectric sensors, are almost exclusively used as lev- acceleration sensor is a disk of piezoelec- el switches; several of these sensors at dif- tric ceramic which is connected to a seismic ferent heights are required to measure the mass . If the complete system is accelerated, level . The piezo transducer excites a tuning this mass increases the mechanical defor- fork at its natural frequency . When in con- mation of the piezo disk, and thus increases tact with the medium to be measured, the the measurable voltage . The sensors detect resonance frequency shifts and this is eval- accelerations in a broad range of frequencies uated electronically . This method works re- and dynamics with an almost linear char- liably and suffers hardly any breakdowns . acteristic over the complete measurement Moreover, it is independent of the type of range . material to be filled . Piezoelectric force sensors are suitable for the measurement of dynamic tensile, compression and shearing forces . They can be designed with very high stiffness and can also measure high-dynamic forces . A very high resolution is typical .

Example of a tuning fork for level measurement, OEM product

WWW.PICERAMIC.COM Vibration Control

If a mechanical system is knocked off and jolts caused by footfall, fans, cooling balance, this can result in vibrations which systems, motors, machining processes etc . adversely affect plants, machines and sen- can distort patterns e .g . when micromachin- sitive devices and thus affect the quality of ing to such an extent that the result is un- the products . In many applications it is not usable . possible to wait until environmental influences dampen the vibration and bring it to Active Vibration Insulation a halt; moreover, several interferences usually overlap in time, resulting in a quite con- In this process, counter-motions compen- fusing vibration spectrum with a variety of sate or minimize the interfering vibrations, frequencies . and they do this as close to the source as possible . To this end a suitable servo loop The vibrations must therefore be insulated must initially detect the structural vibrations in order to dynamically decouple the ob- before the counter-motions are actively ject from its surroundings and thus reduce generated . the transmission of shocks and solid- borne sound . This increases the precision Adaptive materials, such as piezoceram- of measuring or production processes ic plates or disks, can act as both sensors and the settling times reduce significant- and actuators . The frequency range and the ly, which means higher throughputs are mass to be damped determine the choice of possible . Piezoelectric components can suitable piezo actuators . This also requires dampen vibrations particularly in the low- an external voltage source and suitable er frequency range, either actively or pas- control electronics . sively . Multilayer ceramic construction produces Passive Vibration Insulation increased efficiency . Multilayer piezoelectric actuators, such as the PICMA multilayer Elastic materials absorb the vibrations and translators, for example, can be used any- reduce them . Piezo elements can also be where where precisely dosed alternating used for this: They absorb the mechani- forces are to act on structures . cal energy of the structural vibrations and convert it into electrical energy at the same The main application fields are in aero- time . This is subsequently converted into nautics and aerospace, where fuel must heat by means of parallel electrical resistors, be saved, for example, or the oscillations for example . of lattice constructions for antennas are to Passive elements are installed as close to be damped . One of the objectives when the object to be decoupled as possible . building vehicles and ships is to minimize noise in the interior . In mechanical engineer The conventional passive methods of vibra- ing for example, the vibrations of rotating tion insulation are no longer sufficient for drives are increasingly being insulated and many of today’s technologies . Movements actively suppressed .

PROMISING TECHNOLOGIES Research and development of new solutions for current and future applications is taking place in many fields of industry. For example, users expect haptic feedback not only from displays but also from new surfaces that are designed to be multi functional. Adaptive systems such as focusing systems adapt their function to the changing ambient conditions. Piezo elements can ensure a decentralized energy supply to sensors or radio transmitters at locations that are difficult to access (Energy Harvesting).

37 Multifunctional surfaces supply perceptible signals as feedback for the user (Image: istock)

PIEZO TECHNOLOGY Adaptive Systems, Smart Structures Industrial Applications of the Future changed environmental conditions such as impact, pressure or bending loads and react The development of adaptive systems is to them . increasing in significance for modern industry . Intelligent materials are becoming Piezo ceramics belong to this group of more and more important here, so-called adaptive materials . The piezoelectric Dura “smart materials“ which possess both sen- Act patch transducers provide a compact sor and actuator characteristics . They detect solution . They are based on a thin piezoceramic film which is covered with electrically conducting material to make the FF electrical contact and are subsequently embedded in an elastic polymer composite . The piezoceramic element, which is brittle U U in itself, is thus mechanically preloaded and electrically insulated and is so robust that it can even be applied to curved surfaces with A deformation of the substrate gives rise to an bending radii of only a few millimeters . electrical signal . The DuraAct transducer can therefore detect deformations with precision The transducers are simply glued to the cor- and high dynamics . responding substrate or already integrated into a structure during manufacture, where they detect or generate vibrations or contour deformations in the component itself . The size of the contour change here is strong- FFly dependent on the substrate properties and ranges from the nanometer up into the millimeter range . U U Even under high dynamic load the construction guarantees high damage tolerance, reliability and a lifetime of more than 109 cycles . The DuraAct patch transducer contracts when a voltage is applied . Attached to a substrate it acts They have low susceptibility to wear and as a bender element in this case . defects because the transducers are solid state actuators and thus do not contain any moving parts . STRUCTURAL MONITORING Piezo transducers are used for condition monitoring and adaptive systems. They generate and acquire surface waves that detect changes in structure be fore financial damage occurs.

Piezo sensors monitor structures at locations which are difficult to access such as offshore, pipelines or wind turbines (Image: istock)

WWW.PICERAMIC.COM Ultrasonic Machining of Materials

Ultrasonic applications for the machining and copper and their alloys . This principle is of materials are characterized mainly by used by wire bonders in the semiconductor their high power density . The applications industry and ultrasonic welding systems, for typically take place in resonance mode in or- example . der to achieve maximum mechanical power at small excitation amplitude . The ultrasonic energy is generated primarily via mechanically strained piezo ring disks, The ferroelectric “hard“ PZT materials are amplified by means of a so-called sonotro- particularly suitable for these high-power de and applied to the bond . The friction of ultrasonic machining applications . They the bonding partners then generates the exhibit only low dielectric losses even in heat required to fuse, or weld, the materials continuous operation, and thus consequent- together around the bond . ly only low intrinsic warming . Shaping by Machining Their typical piezoelectric characteristics are particularly important for the high me- Apart from the welding processes, the ul- chanical loads and operating field strengths: trasonic processing of hard mineral or cry- Moderate permittivity, large piezoelectric stalline materials such as ceramic, graphite coupling factors, high mechanical quality or glass, especially by ultrasonic drilling or factors and very good stability . machining, like vibration lapping, is increas ingly gaining in importance . Ultrasound for Bonding: This makes it possible to produce geometri- Joining Techniques cally complex shapes and three-dimensional Ultrasonic bonding processes can be used contours, with only a small contact pressure to bond various materials such as thermo being required . Specially shaped sonotrodes plastics, and metallic materials like aluminum are also used here as the machining tool .

Sonar Technology and Hydroacoustics

Sonar technology systems (sonar = sound sonars, systems are used for depth measu- navigation and ranging) and hydroacou- rements, for locating shoals of fish, for sub- stic systems are used for measuring and surface relief surveying in shallow waters, position-finding tasks especially in mari- underwater communication, etc . time applications . The development of A diverse range of piezo components is high-resolution sonar systems, which used, ranging from the simple disk or was driven by military applications, is now plate and stacked transducers through increasingly being replaced by civil applica- to sonar arrays which make it possible tions . to achieve a linear deflection of the directivi- Apart from still used submarine positioning ty pattern of the ultrasonic wave .

Energy from Vibration – Energy Harvesting

To dispense with the need for batteries and of the substrate cause a deformation of the the associated servicing work, it is possible DuraAct patch transducer and thus gener- to use energy from the surrounding environ- ate an electrical signal . Suitable transducer ment . Piezo elements convert kinetic energy and storage electronics can thus provide a from oscillations or shocks into electrical decentralized supply for monitoring systems energy . installed at locations which are difficult to The robust and compact DuraAct trans- access . 39 ducers can also be used here . Deformations

PIEZO TECHNOLOGY Part II - Piezo Actuators & Transducers

BAUELEMENTE, TECHNOLOGIE, ANSTEUERUNG

WWW.PICERAMIC.COMWWW.PICERAMIC.DE PICMA® Stack Multilayer Piezo Actuators

CeraMiC-insuLaTed HiGH-POWer aCTuaTOrs

P-882 – P-888

 Superior lifetime

 High stiffness

 UHV-compatible to 10-9 hPa

 Microsecond response

 Sub-nanometer resolution

 Large choice of designs .pi.ws. 12/04/24.0

Patented PICMA® Stack Multilayer Piezo Actuators with Suitable Drivers High Reliability E-610 Piezo Amplifi er / Controller Operating voltage -20 to 120 V. Ceramic insulation, poly- E-617 High-Power Piezo Amplifi er mer-free. Humidity resistance. UHV-compatible to 10-9 hPa, E-831 OEM Piezo Amplifi er Module no outgassing, high bakeout temperature. Encapsulated versions for operation in splash water or oil Valid Patents German Patent No . 10021919C2 Custom Designs with Modifi ed Specifi cations German Patent No . 10234787C1  For high operating temperature up to 200°C German Patent No . 10348836B3  Special electrodes for currents of up to 20 A German Patent No . 102005015405B3  Variable geometry: Inner hole, round, rectangular German Patent No . 102007011652B4  Ceramic or metal end pieces in many versions US Patent No . 7,449,077  Applied SGS sensors for positional stability Japan Patent No. 4667863 Fields of Application China Patent No. ZL03813218.4 Research and industry. Cryogenic environment with reduced displacement. For high-speed switching, precision

41 positioning, active and adaptive systems Physik Instrumente (PI) GmbH & Co. KG 2012. Subject to change without notice. Latest releases available at www

WWW.PiCeraMiC.COMPIEZO TECHNOLOGY Order number* Dimensions Nominal Max. Blocking force Stiffness Electrical Resonant A x B x L [mm] displacement displacement [N] (0 – 120 V) [N/µm] capacitance frequency [µm] (0 – 100 V) [µm] (0 – 120 V) [µF] ±20% [kHz] ±20% P-882 .11 3 × 2 × 9 6 .5 ±20% 8 ±20% 190 24 0 .15 135 P-882 .31 3 × 2 × 13 .5 11 ±20% 13 ±20% 210 16 0 .22 90 P-882 .51 3 × 2 × 18 15 ±10% 18 ±10% 210 12 0 .31 70 P-883 .11 3 × 3 × 9 6 .5 ±20% 8 ±20% 290 36 0 .21 135 P-883 .31 3 × 3 × 13 .5 11 ±20% 13 ±20% 310 24 0 .35 90 P-883 .51 3 × 3 × 18 15 ±10% 18 ±10% 310 18 0 .48 70 P-885 .11 5 × 5 × 9 6 .5 ±20% 8 ±20% 800 100 0 .6 135 P-885 .31 5 × 5 × 13 .5 11 ±20% 13 ±20% 870 67 1 .1 90 P-885 .51 5 × 5 × 18 15 ±10% 18 ±10% 900 50 1 .5 70 P-885 .91 5 × 5 × 36 32 ±10% 38 ±10% 950 25 3 .1 40 P-887 .31 7 × 7 × 13 .5 11 ±20% 13 ±20% 1700 130 2 .2 90 P-887 .51 7 × 7 × 18 15 ±10% 18 ±10% 1750 100 3 .1 70 P-887 .91 7 × 7 × 36 32 ±10% 38 ±10% 1850 50 6 .4 40 P-888 .31 10 × 10 × 13 .5 11 ±20% 13 ±20% 3500 267 4 .3 90 P-888 .51 10 × 10 × 18 15 ±10% 18 ±10% 3600 200 6 .0 70 0.05

P-888 .91 10 × 10 × 36 32 ±10%L 38 ±10% 3800 100 13 .0 40

* For optional solderable contacts, AWG 32 (Ø 0 .49 mm); P-885, P-887, Resonant frequency at 1 Vpp, Operating temperature change order number extension to .x0 P-888: AWG 30 (Ø 0.61 mm). unloaded, free on both sides. range: -40 to 150°C. (e . g . P-882 .10) . Recommended preload for dynamic The value is halved for unilate- Custom designs or different Piezo ceramic type: PIC252. operation: 15 MPa. ral clamping. specifi cations on request.

Standard electrical interfaces: PTFE-in- Maximum preload for constant force: Capacitance at 1 Vpp, 1 kHz, RT . sulated wire leads, 100 mm, P-882, P-883: 30 MPa . Operating voltage: -20 to 120 V. 0.05 L 0.3 A < A+2.0

B 0.2

PICMA® Stack actuators, L, A, B see table 0.3 A < A+2.0

B 0.2

WWW.PICERAMIC.COMPieZOTeCHnOLOGY Custom Designs

PiCMa® sTaCK PieZO aCTuaTOrs

Variety of Tips Spherical tips. PI Ceramic has suitable tips with standard dimensions in stock and mounts them prior to delivery. Application-specifi c tips can be manufactured on request.

PICMA® Actuators for Maximum Dynamics For high-dynamics applications, the multilayer actuators are equipped with electrodes for especially high currents of up to 20 A. Together with a high-performance switching driver such as the E-618, high operating frequencies in the kHz range can be attained. The rise times for the nominal displacement are a few tens of microse- conds.

PICMA® Multilayer Actuators with Ceramic-Insulated Inner Hole A new technology allows multilayer piezo actuators to be manufactured with an inner hole. Using special manufacturing methods the holes are already made in the unsintered actuator. As with the PICMA® standard actuators, the co-fi ring process of the ceramics and the internal electrodes is used to create the ceramic encapsulation which protects the piezo actuator against humidity and considerably increases its lifetime compared to conventional polymer-insulated piezo actuators. PICMA® stack actuators with an inner hole are ideally suited for applications such as fi ber stretching. PICMA® actuators with holes are manufactured on request.

High Operating Temperature of up to 200°C For especially high-dynamics applications or high ambient temperatures, there are PICMA® multilayer actuator versions that can reliably function at temperatures of up to 200°C. 43

WWW.PiCeraMiC.COMPIEZO TECHNOLOGY Encapsulated PICMA® Stack Piezo Actuators

FOr TOuGH indusTriaL envirOnMenTs

P-885 • P-888

 Splash-resistant full encapsulation

 Superior lifetime

 High stiffness

 UHV-compatible to 10-9 hPa

 Microsecond response

 Sub-nanometer resolution

 Large choice of designs

Encapsulated PICMA® Stack Multilayer Piezo Order Dimensions Nominal Max. Blocking Stiff- Electrical Resonant Actuators with Inert Gas Filling num- OD x L displace- displace- force ness capacit- frequency Operating voltage -20 to 120 V. UHV-compatible ber* [mm] ment [µm] ment [µm] [N] (0 – [N/ ance [kHz] ±20% to 10-9 hPa. Version for operation in environ- (0 – 100 V) (0 – 120 V) 120 V) µm] [µF] ±20% ments where exposure to splash water, high P-885 .55 11 .2 × 22 .5 14 ±10% 17 ±10% 850 50 1 .5 60 humidity or oil occurs P-885 .95 11 .2 × 40 .5 30 ±10% 36 ±10% 900 25 3 .1 35 P-888 .55 18 .6 × 22 .5 14 ±10% 17 ±10% 3400 200 6 .060

Piezo ceramic type: PIC252. clamping. Capacitance at 1 Vpp, 1 kHz, RT . Standard electrical interfaces: PTFE-insulated Operating voltage: -20 to 120 V.Operating wire leads, 100 mm, AWG 30 (Ø 0.61 mm). temperature range: -40 to 150°C.

Resonant frequency at 1 Vpp, unloaded, free on Ask about custom designs! both sides. The value is halved for unilateral

Encapsulated PICMA® Stack actuators can also be used when the application environment is characterized by oil, splash water or continuously high humidity. The piezo actuators are surrounded Encapsulated PICMA® actuators, dimensions in mm by inert gas

WWW.PICERAMIC.COMPieZOTeCHnOLOGY ® Round PICMA® Stack Multilayer Piezo Actuator HiGH BLOCKinG FOrCe HiGH BLOCKinG FOrCe

P-088 P-088  Superior lifetime  Superior lifetime  Ideal for dynamic operation  Ideal for dynamic operation  Flexible, adaptable overall height  Flexible, adaptable overall height  OEM versions available without  stranded OEM versions wires available without stranded wires

Multilayer stack actuators Possible modifi cations Multilayer stack actuators Possible modifi cations The actuators are easily scaled, thanks to the stacked Different heights, easy to mount on customer request. construction,The actuators fl are exible easily adaptation scaled, thanks of the to travel the stackedrange is VarietyDifferent of heights, shapes. easyPrecision-ground to mount on customerend plates request. for re- possible.construction, The flannular exible crossadaptation section of ensuresthe travel easy range inte- is ducedVariety tolerances of shapes. Spherical Precision-ground end pieces end plates for re- gration.possible. Versions The annular with crosssolderable section contacts ensures are easy also inte- UHV- duced tolerances Spherical end pieces compatiblegration. Versions to 10-9 with hPa. solderable The actuators contacts do not are outgas also UHV- -9 compatibleand can be bakedto 10 outhPa. at The high actuators temperatures. do not outgas and can be baked out at high temperatures.

PICMA® piezo linear actuators Fields of application PICMA® piezo linear actuators Fields of application Low operating voltage -20 to 100 V. Ceramic insulation. Industry and research. For laser tuning, microdispens- Low operating voltage -20 to 100 V. Ceramic insulation. Industry and research. For laser tuning, microdispens- High reliability and long lifetime ing, life sciences 16/09/01 .0 without notice. Latest releases available at www.pi.ws. Subject to change Instrumente (PI) GmbH & Co. KG 2016. ©Physik

45 High reliability and long lifetime ing, life sciences 16/09/01 .0 without notice. Latest releases available at www.pi.ws. Subject to change Instrumente (PI) GmbH & Co. KG 2016. ©Physik

www .PI.w s PIEZOwww TECHNOLOGY .PI.w s P-088.721 P-088.741 P-088.781 Unit Tolerance P-088.721 P-088.741 P-088.781 Unit Tolerance Dimensions OD × L 16 x 16 16 x 36 16 x 77 mm Dimensions OD × L 16 x 16 16 x 36 16 x 77 mm Nominal travel range 14 32 70 µm -10 % / + 20 % Nominal travel range 14 32 70 µm -10 % / + 20 % Blocking force 7500 7500 7500 N Blocking force 7500 7500 7500 N Stiffness 535 235 105 N/µm Stiffness 535 235 105 N/µm Electrical capacitance 13 30 68 µF ±20 % Electrical capacitance 13 30 68 µF ±20 % Resonant frequency 68 35 17 kHz ±20 % Resonant frequency 68 35 17 kHz ±20 % Nominal travel range, blocking force and stiffness at 0 to 100 V. StandardNominal travel connections: range, blocking 100 mm forcePTFE- and insulated stiffness stranded at 0 to 100wires, V. AWG 28 (Ø 0.69 mm).Optional: For solderable contacts without stranded wires, changeStandard the connections: last digit of 100the ordermm PTFE- number insulated to 0. stranded wires, AWG 28 (Ø 0.69 mm).Optional: For solderable contacts without stranded wires, change the last digit of the order number to 0. Piezo ceramic type: PIC252. ceramic end plates made of Al2O3.

Piezo ceramic type: PIC252. ceramic end plates made of Al2O3. Recommended preload for dynamic operation: 15 MPa. MaximumRecommended preload preload for constant for dynamic force: operation: 30 MPa. 15 MPa. Maximum preload for constant force: 30 MPa. Axial resonant frequency: measured at 1 Vpp, unloaded, unclamped. The value is halved for unilateral clamping.

Axial resonant frequency: measured at 1 Vpp, unloaded, unclamped. The value is halved for unilateral clamping.

Electrical capacitance: measured at 1 Vpp, 1 kHz, RT

Electrical capacitance: measured at 1 Vpp, 1 kHz, RT Operating voltage: -20 to 100 V. Operating temperaturevoltage: -20 to range: 100 V. -40 to 150 °C. Operating temperature range: -40 to 150 °C. Ask about custom designs! Ask about custom designs!

P-088 PICMA Stack Multilayer Piezo Actuator, dimensions in mm 16/09/01 .0 without notice. Latest releases available at www.pi.ws. Subject to change Instrumente (PI) GmbH & Co. KG 2016. ©Physik ®

P-088 PICMA Stack Multilayer Piezo Actuator, dimensions in mm 16/09/01 .0 without notice. Latest releases available at www.pi.ws. Subject to change Instrumente (PI) GmbH & Co. KG 2016. ©Physik

www .PI.w s WWW.PICERAMIC.COMwww .PI.w s ® PICMA® Stack Multilayer Ring Actuator WiTH inner HOLe WiTH inner HOLe

PICMA® Stack Multilayer Ring Actuator

With inner hole

P-080 P-080 ■ Inner Inner hole hole for for preload preload or or as as  aperture Inneraperture hole for for for optical optical preload applica- applica- or as tionsaperturetions for optical applications ■ SuperiorSuperior lifetime lifetime  Superior lifetime ■ Ideal for dynamic operation  Ideal for dynamic operation ■ MicrosecondMicrosecond response response  Microsecond response ■  Sub-nanometerSubnanometer resolutionresolution  Sub-nanometer resolution

Multilayer Stack Actuators Available Options Multilayer Stack Actuators Available Options Flexible travel range up to 30 µm. Annular cross-section Different heights, easy to mount on customer request. forFlexible easy travelintegration. range up to 30 µm. Annular cross-section VarietyDifferent of heights, shapes. easyPrecision-ground to mount on customerend plates request. for UHV-compatiblefor easy integration. to 10 -9 hPa, high bakeout temperature reducedVariety of tolerances shapes. Precision-ground end plates for UHV-compatible to 10-9 hPa, high bakeout temperature reduced tolerances PICMA® Piezo Linear Actuators Fields of Application PICMA® Piezo Linear Actuators Fields of Application Low operating voltage -20 to 100 V. Ceramic insulation. Research and industry. For laser tuning, micro- Low operating voltage -20 to 100 V. Ceramic insulation. Research and industry. For laser tuning, micro- High reliability and long lifetime dispensing, life sciences R2 15/06/01 .0 without notice. Latest releases available at www.pi.ws. Subject to change Instrumente (PI) GmbH & Co. KG 2015. ©Physik

47 High reliability and long lifetime dispensing, life sciences R2 15/06/01 .0 without notice. Latest releases available at www.pi.ws. Subject to change Instrumente (PI) GmbH & Co. KG 2015. ©Physik

Multilayer Stack Actuators Available Options Flexible travel range up to 30 µm. Annular cross-section Different heights, easy to mount on customer request. www .PI.w s for easy integration. PIEZOwww TECHNOLOGY .PI.wVariety s of shapes. Precision-ground end plates for UHV-compatible to 10-9 hPa, high bakeout temperature reduced tolerances

PICMA® Piezo Linear Actuators Fields of Application Low operating voltage -20 to 100 V. Ceramic insulation. Research and industry. For laser tuning, micro-

10 High reliability and long lifetime dispensing, life sciences R1 13/10/02 .0 without notice. Latest releases available at www.pi.ws. Subject to change Instrumente (PI) GmbH & Co. KG 2013. ©Physik

w w wwww .pic er .PI a.w mic s .c o m Preliminary data P-080.311 P-080.341 P-080.391 Unit Dimensions OD × ID × L 8 × 4.5 × 8.5 8 × 4.5 × 16 8 × 4.5 × 36 mm × mm × mm Nominal travel range 5.5 ±20 % 11 ±20 % 25 ±10 % µm PreliminaryBlocking force data P-080.311800 P-080.341825 P-080.391850 UnitN DimensionsStiffness OD × ID × L 8145 × 4.5 × 8.5 875 × 4.5 × 16 834 × 4.5 × 36 mmN/µm × mm × mm NominalElectrical travel capacitance range 5.50.86 ± 20 % 111.7 ± 20 % 254.0 ±10 % µmµF BlockingResonant force frequency 800135 ±20 % 82585 ±20 % 85040 ±20 % NkHz AllStiffness data at 0 to 100 V. 145 75 34 N/µm Standard connections: PTFE-insulated stranded wires, 100 mm, AWG 30 (Ø 0.61 mm). Electrical capacitance 0.86 1.7 4.0 µF For optional solderable contacts without stranded wires, change order number extension to 0.

PiezoResonant ceramic frequency type PIC252. Ceramic end plates made of Al2O1603. 85 40 kHz Recommended preload for dynamic operation: 15 MPa. AllMaximum data at 0preload to 100 V.for constant force: 30 MPa.

StandardAxial resonant connections: frequency: PTFE-insulated measured at stranded 1 Vpp, unloaded, wires, 100 unclamped. mm, AWG 30 (Ø 0.61 mm). ForThe optional value is solderablehalved for unilateralcontacts without clamping. stranded wires, change order number extension to 0.

PiezoElectrical ceramic capacitance: type PIC252. Tolerance Ceramic ±20%, end measured plates made at 1 of Vpp Al, 21O kHz,3. RT. RecommendedOperating voltage: preload -20 to for 100 dynamic V. operation: 15 MPa. MaximumOperating temperaturepreload for constant range: -40 force: to 150°C. 30 MPa.

AxialAsk about resonant custom frequency: designs! measured at 1 Vpp, unloaded, unclamped. The value is halved for unilateral clamping.

Electrical capacitance: Tolerance ±20%, measured at 1 Vpp, 1 kHz, RT.

Operating voltage: -20 to 100 V. ±0,5 Operating temperature range: -40 to 150°C. L Ask about custom designs!

+ ±0,5 L

max. 9 +0,5 8 -0,3 0 4,4 -0,3

+ max. 10,5

P-080, dimensions in mm

max. 9 +0,5 8 -0,3 0 4,4 -0,3 max. 10,5

P-080.390, dimensions in mm R2 15/06/01 .0 without notice. Latest releases available at www.pi.ws. Subject to change Instrumente (PI) GmbH & Co. KG 2015. ©Physik

©Physik Instrumente (PI) GmbH & Co. KG 2013. Subject to change without notice. Latest releases available at www.pi.ws. R1 13/10/02 .0 without notice. Latest releases available at www.pi.ws. Subject to change Instrumente (PI) GmbH & Co. KG 2013. ©Physik 11 www .PI.w s WWW.PICERAMIC.COM

piezwww o t ech .PI n.w ol s o g y Round PICMA® Chip Actuators

MiniaTure MuLTiLaYer PieZO aCTuaTOr WiTH and WiTHOuT inner HOLe

Pd0xx

 Superior lifetime

 Ultra-compact: From 5 mm Ø

 Ideal for dynamic operation

 Microsecond response

 Subnanometer resolution

Piezo linear actuator with PICMA® multilayer technology Possible modifi cations Operating voltage -20 to 100 V. Ceramic insulation, poly- PTFE-insulated wire leads. Various geometric shapes, inner mer-free. Humidity resistance. UHV-compatible to 10-9 hole. Precision-ground ceramic end plates hPa, no outgassing, high bakeout temperature. Fields of application Flexible thanks to numerous designs. Versions with rectan- Industry and research. For laser tuning, microdispensing, gular, round or annular cross section life sciences

PD050.3x PD080.3x PD120.3x PD150.3x PD160.3x PD161.3x Unit Tolerance ID 5 ±0 .2 8 ±0 .3 12 ±0 .4 15 ±0 .3 16 ±0 .5 16 ±0 .5 mm OD 2 .5 ±0 .15 4 .5 ± 0 .15 6 ±0 .2 9 ± 0 .15 8 ±0 .25 – mm TH 2 .5 ±0 .05 2 .5 ±0 .05 2 .5 ±0 .05 2 ±0 .05 2 .5 ±0 .05 2.5±0.05 mm Travel 2 2 2 1 .8 2 2 .3 µm ±20 % range*

Blocking force >400 >1000 >2500 >3300 >4400 >6000 N Electrical 110 300 900 1000 1700 2400 nF ±20 % capacitance** Axial resonant >500 >500 >500 >500 >500 >500 kHz frequency***

Standard connections: PDxxx.31: PTFE-insulated wire leads, 100 mm, AWG 32, Ø 0.49 mm; PDxxx.30: Solderable contacts Blocking force: At 0 to 100 V *** At 0 to 100 V. The values refer to the unattached component and can be lower when glued on.

*** measured at 1 Vpp, 1 kHz, RT

*** measure at 1 Vpp, unloaded, open on both sides. The value is halved for unilateral clamping. Lateral resonant frequencies can be lower than the axial ones, depending on the installation situation.

49 Ask about custom designs! 16/08/30.0 without notice. L atest releases available at www.pi.ws. Subject to change Instrumente (PI) GmbH & Co. KG 2015. © Physik

PIEZOWWW.Pi.Ws TECHNOLOGY PICMA® Chip Actuators

MiniaTure MuLTiLaYer PieZO aCTuaTOrs

PL0xx

 Superior lifetime

 Ultra-compact: From 2 mm × 2 mm × 2 mm

 Ideal for dynamic operation

 Microsecond response

 Subnanometer resolution

Piezo linear actuator with PICMA® multilayer technology Available Options Operating voltage -20 to 100 V. Ceramic insulation, poly- PTFE-insulated wire leads. Various geometric shapes, inner mer-free. Humidity resistance. UHV-compatible to 10-9 hole. Precision-ground ceramic end plates hPa, no outgassing, high bakeout temperature. Fields of Application Large choice of designs. Versions with rectangular or Research and industry. For laser tuning, micro-dispensing, annular cross-section life sciences

PL022.30 PL033.30 PL055.30 PL088.30 Unit Dimensions A × B × TH 2 × 2 × 2 3 × 3 × 2 5 × 5 × 2 10 × 10 × 2 mm x mm x mm Displacement 2 .2 2 .2 2 .2 2 .2 µm Blocking force >120 >300 >500 >2000 N Electrical capacitance 25 85 250 1100 nF Resonant frequency >600 >600 >600 >600 kHz

Travel range: at 0 to 100 V, tolerance ±20 %. The values refer to the free component and can be lower when glued on. Blocking force: at 0 to 100 V. Electrical capacitance: Tolerance ±20 %, measured at 1 Vpp, 1 kHz, RT.

Axial resonant frequency: measured at 1 Vpp, unloaded, unclamped. The value is halved for unilateral clamping. Lateral resonant frequencies can be lower than the axial ones, depending on the installation situation.

Piezo ceramic type: PIC252. Standard connections: PLxxx.31: PTFE-insulated wire leads, 100 mm, AWG 32, Ø 0.49 mm; PLxxx.30: Solderable contacts Operating voltage: -20 to 100 V. Operating temperature range: -40 to 150 °C. Recommended preload for dynamic operation: 15 MPa. Maximum preload for constant force: 30 MPa.

Ask about custom designs! 16/08/30.0 without notice. L atest releases available at www.pi.ws. Subject to change Instrumente (PI) GmbH & Co. KG 2015. © Physik

WWW.PICERAMIC.COMWWW.Pi.Ws PICMA® Bender Piezo Actuator

aLL-CeraMiC Bender aCTuaTOrs WiTH HiGH disPLaCeMenT

PL112 – PL140 • Pd410 L 0.5  Displacement to 2 mm 0.2

3 ID 3

0.2 Fast response in the ms range 2 2 0.5 W

1 OD  Nanometer1 resolution

LF  Low operating voltage .pi.ws. R2 16/08/26.0 0.1 0.1 TH TH

PICMA® Multilayer Bender Elements with High Reliability Operating voltage 0 to 60 V. Bidirectional displacement. Ceramic insulation, polymer-free. UHV-compatible to 10-9 hPa, no outgassing, high bakeout temperature. Reliable even under extreme conditions Displacement of the PICMA® bender actuator Fields of Application Research and industry, vacuum. For medical technology, laser technology, sensor systems, automation tasks, +60 V (+30 V) pneumatic valves 3

Vin Vout 2 0 ... +60 V (-30 ... +30 V)

GND (-30 V) Suitable Drivers PICMA® Bender actuators require full differential-voltage control

51 E-650 Piezo Amplifi er for Multilayer Bender Actuators ©Physik Instrumente (PI) GmbH & Co. KG 2012. Subject to change without notice. Latest releases available at www

WWW.PiCeraMiC.COMPIEZO TECHNOLOGY Rectangular bender actuators Order Operating Displacement Free length Dimensions Blocking force Electrical Resonant number voltage [V] [µm] ±20% L [mm] L × W × TH [mm] [N] ±20% capacitance [µF] ±20% frequency Hz] ±20% number voltage [V] [µm] ±20% Lf [mm] L × W × TH [mm] [N] ±20% capacitance [µF] ±20% frequency Hz] ±20% PL112 .10* 0 - 60 (±30) ±80 12 18 .0 × 9 .6 × 0 .65 ±2 .0 2 * 1 .1 2000 PL122 .10 0 - 60 (±30) ±250 22 25 .0 × 9 .6 × 0 .65 ±1 .1 2 * 2 .4 660 PL127 .10 0 - 60 (±30) ±450 27 31 .0 × 9 .6 × 0 .65 ±1 .0 2 * 3 .4 380 PL128 .10* 0 - 60 (±30) ±450 28 36 .0 × 6 .3 × 0 .75 ±0 .5 2 * 1 .2 360 PL140 .10 0 - 60 (±30) ±1000 40 45 .0 × 11 .0 × 0 .6 ±0 .5 2 * 4 .0 160

Round bender actuators Order Operating Displacement Free length Dimensions Blocking force Electrical Resonant number voltage [V] [µm] ±20% L [mm] OD × ID × TH [mm] [N] ±20% capacitance [µF] ±20% frequency Hz] ±20% number voltage [V] [µm] ±20% Lf [mm] OD × ID × TH [mm] [N] ±20% capacitance [µF] ±20% frequency Hz] ±20% PD410 .10* 0 - 60 (±30) ±240 – 44 × 7 × 0 .65 ±16 2 * 10 .5 1000

For optional 100 mm PTFE-insulated wire leads, AWG 32 (Ø 0.49 mm), change order number extension to 1 (e. g. PL112.11). Piezo ceramic type: PIC251, *PIC252. Standard connections: Solderable contacts. Resonant frequency at 1 V , clamped on one side with free length L , without mass load. For PD410.10: Restraint with rotatable mounting on the outer Resonant frequency at 1 Vpp, clamped on one side with free length Lf, without mass load. For PD410.10: Restraint with rotatable mounting on the outer circumference . Capacitance at 1 V , 1 kHz, RT . Capacitance at 1 Vpp, 1 kHz, RT . Operating temperature range: -20 to 85°C; * -20 to 150°C. Recommended mounting: Epoxy resin adhesive. All specifi cations depend on the real clamping conditions and on the applied mechanical load.

Custom designs or different specifi cations on request.

L 0.5 L 0.5 0.2 3 0.2 0.2 0.2 ID 2 3 ID 3 W W 0.2

1 0.2 1 0.5 2 2 0.5 W W

1 OD

1 OD LFF 1

LF 0.1 0.1 TH TH 0.1 0.1 0.1 0.1 TH TH TH TH

PL112 – PL140.10, dimensions in mm. PD410 round PICMA® Bender Piezo Actuator, dimensions L, L , W, TH see data table in mm. ID, OD, TH see data table L, LF, W, TH see data table in mm. ID, OD, TH see data table

Multilayer contracting plates can be manufactured in a Multilayer bender actuators can be manufactured in Benders with unidirectional displacement consist of a variety of shapes, e. g. rectangular or disk-shaped, and almost any shape. The manufacturing process allows, single active piezoceramic layer that is glued together with are available on request. These plates can be applied among other things, inner holes with an all-ceramic a substrate of AI O ceramics or stainless steel. In compar- are available on request. These plates can be applied among other things, inner holes with an all-ceramic a substrate of AI2O3 ceramics or stainless steel. In compar- e. g. to metal or silicon substrates, in order to realize insulation. The height of the active layers can be varied ison with the bimorph structure, these actuators achieve bender or pump elements with low control voltages. from a minimum height of 15 µm so that control voltag- a higher stiffness and a greater displacement, which only es of only 10 V can be used. takes place in one direction, however.

WWW.PICERAMIC.COMPieZOTeCHnOLOGY DuraAct Patch Transducer

BendaBLe and rOBusT

P-876

 Use as actuator, sensor or energy generator

 Cost-effective

 Min. bending radii of down to 12 mm .pi.ws. 12/04/030

Patch Transducer Functionality as actuator and sensor component. Nominal operating voltage from 100 up to 1000 V, depending on the active layer height. Power generation for self-suffi cient systems possible up to the milliwatt range. Can also be applied to curved surfaces

Robust, Cost-Effective Design Laminated structure consisting of a piezoceramic plate, electrodes and polymer materials. Manufactured with bubble-free injection method. The polymer coating simultaneously serves as a mechanical preload as well as an electrical insulation, which makes the DuraAct bendable Design principle of the transducer Custom DuraAct Patch Transducers  Flexible choice of size  Flexible choice of thickness and thus bending ability  Flexible choice of piezoceramic material  Variable design of the electrical connections  Combined actuator/sensor applications, even with several piezoceramic layers  Multilayer piezo elements Valid Patents  Arrays German Patent No . 10051784C1 US Patent No . 6,930,439 Fields of Application Research and industry. Can also be applied to curved Suitable Drivers surfaces or used for integration in structures. For adaptive E-413 DuraAct and PICA Shear Piezo Amplifi er

53 systems, energy harvesting, structural health monitoring E-835 DuraAct Piezo Driver Physik Instrumente (PI) GmbH & Co. KG 2012. Subject to change without notice. Latest releases available at www

WWW.PiCeraMiC.COMPIEZO TECHNOLOGY Order Operating Min. lateral Rel. lateral Blocking Dimensions Min. Piezo Electrical Number voltage [V] contraction contraction force [N] [mm] bending ceramic capacitance [µm/m] [µm/m/V] radius [mm] height [µm] [nF] ±20% P-876 .A11 -50 to +200 400 1 .6 90 61 × 35 × 0 .4 12 100 150 P-876 .A12 -100 to +400 650 1 .3 265 61 × 35 × 0 .5 20 200 90 P-876 .A15 -250 to +1000 800 0 .64 775 61 × 35 × 0 .8 70 500 45 P-876 .SP1 -100 to +400 650 1 .3 n .a . 16 × 13 × 0 .5 - 200 8

Piezo ceramic type: PIC255 Standard connections: Solder pads Operating temperature range: -20 to 150°C Custom designs or different specifi cations on request.

When a voltage is applied, the DuraAct patch transducer contracts laterally.

P-876 DuraAct patch transducers use the so-called d31 effect, where the applied fi eld is orthogonal with respect to the polarization of the piezo element.

P-876.A (left), P-876.SP1 (right), dimensions in mm

Electronic modules for sensor data processing, controlling the DuraAct actuator or harvesting energy can be connected close to the transducer

When arranged in an array, DuraAct patch transducers allow, for example, the reliable monitoring of larger areas DuraAct patch transducers can be manufactured in various shapes

WWW.PICERAMIC.COMPieZOTeCHnOLOGY DuraAct Power Patch t ransducer

HIGH EFFICIENCY aND rOBusT

P-878

 Useable as actuator, sensor or energy generator

 Low voltages to 120 V

 Compact design

 Individual solutions

Patch Transducer Custom DuraAct Patch Transducers Functionality as actuator and sensor component. Nomi-  Flexible choice of size nal operating voltages of -20 to 120 V. Power generation  Variable design of the electrical connections for self-suffi cient systems possible up to the milliwatt  Combined actuator/sensor applications, even with range. Can also be applied to curved surfaces. several active piezoceramic layers In longitudinal direction, the DuraAct Power uses the  Arrays

high-effi ciency d33 effect

Robust, Cost-Effective Design Laminated structure consisting of PICMA® multilayer piezo Fields of Application element, electrodes and polymer materials. Manufactured Research and industry. Can also be applied to curved with bubble-free injection method. The polymer coating surfaces or used for integration in structures. simultaneously serves as electrical insulation and as For adaptive systems, energy harvesting, structural

55 mechanical preload, which makes the DuraAct bendable health monitoring 13/08/29 .0 without notice. Latest releases available at www.pi.ws. Subject to change Instrumente (PI) GmbH & Co. KG 2013. ©Physik

PIEZOwww TECHNOLOGY .PI.w s Preliminary data P-878.A1 Unit Min . axial strain 1200 µm/m Rel . axial strain 10 µm/V Min . lateral contraction 250 µm/m Rel . lateral contraction 1 .2 µm/V Blocking force 44 N Dimensions 27 mm × 9 .5 mm × 0 .5 mm Min. bending radius 24 mm Active element 15 mm × 5.4 mm Electrical capacitance 150 nF

Electrical capacitance: Tolerance ±20 %, measured at 1 Vpp, 1 kHz, RT . Piezo ceramic type: PIC 252. Standard connections: Solderable contacts. Operating voltage: -20 to 120 V. Operating temperature range: -20 to 150°C.

Custom designs or different specifi cations on request.

DuraAct Power Multilayer Patch Transducers use the

longitudinal or d33 effect, which describes an elongation parallel to the electric fi eld E and the polarization direc-

tion P of the piezo actuator. The d33 piezoelectric charge coeffi cients for longitudinal displacement are consi-

derably higher than the d31 coeffi cients for transversal displacement, used by all-ceramic patch transducers. P-878.A1, dimensions in mm (Source: Wierach, DLR) 13/08/29 .0 without notice. Latest releases available at www.pi.ws. Subject to change Instrumente (PI) GmbH & Co. KG 2013. ©Physik

www .PI.w s WWW.PICERAMIC.COM Pt Piezo tube s

HiGH-dYnaMiCs OPeraTiOn WiTH LOW LOads

PT120 – PT140

 Radial, lateral and axial displacement

 Sub-nanometer resolution

 Ideal for OEM applications

 Large choice of designs .pi.ws. R1 13/08/23.0

Piezo Actuator / Scanner Tube Operating voltage of up to 1000 V or bipolar up to ±250 V. Monolithic piezoceramic actuator with minimal geometric tolerances. Radial and axial contraction, low load capacity. UHV-compatible versions with multi-segmented electrodes

Custom Designs with Modifi ed Specifi cations  Materials  Operating voltage range, displacement  Tolerances  Applied sensors  Special high / low temperature versions  Geometric shapes: Rectangular, inner hole  Segmentation of the electrodes, wrap-around electrodes, circumferential insulating borders Special versions of the PT Piezo Scanner Tubes with multi-segmented outer electrodes and wrap-around electrodes  Non-magnetic

Possible Dimensions  Length L max . 70 mm Fields of Application  Outer diameter OD 2 to 80 mm Research and industry, UHV environment up to 10-9 hPa .  Inner diameter ID 0.8 to 74 mm For microdosing, micromanipulation, scanning microscopy

57  Min . wall thickness 0 .30 mm (AFM, STM, etc.), fi ber stretching ©Physik Instrumente (PI) GmbH & Co. KG 2012. Subject to change without notice. Latest releases available at www

WWW.PiCeraMiC.COMPIEZO TECHNOLOGY Order Number Dimensions Max. operating Electrical capacitance Max. change in Max. diameter [mm] L × OD × ID voltage [V] [nF] ±20% contraction [µm] contraction [µm] PT120 .00 20 × 2 .2 × 1 .0 500 3 5 0 .7 PT130 .90 30 × 3 .2 × 2 .2 500 12 9 0 .9 PT130 .10 30 × 6 .35 × 5 .35 500 18 9 1 .8 PT130 .20 30 × 10 .0 × 9 .0 500 36 9 3 PT130 .40 30 × 20 .0 × 18 .0 1000 35 9 6 PT140 .70 40 × 40 .0 × 38 .0 1000 70 15 12

Max. displacement data refers to respective max. operating voltage. Piezo ceramic type: PIC151

Capacitance at 1 Vpp, 1 kHz, RT . Inner electrode on positive potential, fi red-silver electrodes inside and outside as standard. Option: Outer electrode thin fi lm (CuNi, Au).

Scanner Tubes Quartered electrodes for XY defl ection, UHV-compatible to 10-9 hPa Order Number Dimensions Max. operating Electrical capacitance Max. change Max. XY displacement [mm] L × OD × ID voltage [V] [nF] ±20% in length [µm] [µm] PT230 .94 30 × 3 .2 × 2 .2 ±250 4 × 2 .1 ±4 .5 ±35 PT230 .14 30 × 6 .35 × 5 .35 ±250 4 × 4 .5 ±4 .5 ±16 PT230 .24 30 × 10 .0 × 9 .0 ±250 4 × 6 .9 ±4 .5 ±10

Max. displacement data refers to respective max. operating voltage. Max. XY displacement for simultaneous control with +250 / -250 V at opposite electrodes. Piezo ceramic type: PIC255. Operating temperature range: -20 to 85°. Bakeout temperature up to 150°C.

Capacitance at 1 Vpp, 1 kHz, RT . Quartered electrodes for XY defl ection. Outer electrode thin fi lm (CuNi, Au), inner electrodes fi red-silver. 0.2 L

0.1 A 0.05 0.05 ID OD

A PT Piezo Tube actuators, dimensions in mm. L, OD, ID see data table

WWW.PICERAMIC.COMPieZOTeCHnOLOGY PICA Stack Piezo Actuators

HiGH FOrCes, HiGH disPLaCeMenT, FLeXiBLe PrOduCTiOn

P-007 – P-056

 Travel ranges to 300 µm

 High load capacity

 Force generation up to 80 kN

 Extreme reliability: >109 cycles

 Microsecond response

 Sub-nanometer resolution

 Large choice of designs .pi.ws. R1 12/08/23.0

Stacked Piezo Linear Actuator Operating voltage 0 to 1000 V. Long lifetime without derating. High specifi c displacement. High forces. Operating temperature range -20 to 85°C

Available Options  SGS sensors for positional stability  PZT ceramic material  Operating voltage range, displacement, layer thickness  Load capacity, force generation  Geometric shapes: Round, rectangular  Mechanical interfaces: Flat, spherical, metal, ceramic, glass, sapphire, etc.  Integrated piezoelectric detector layers Special high / low temperature versions, temperature Custom actuator with special end piece and applied SGS sensors. The protective  polymer layer can be dyed in different colors. Standard versions are delivered with sensor stranded wires and are covered in black  Non-magnetic versions  Extra-tight length tolerances Suitable Drivers Fields of Application E-464 PICA Piezo Driver Research and industry. For high-load positioning, precision E-481 PICA High-performance Piezo Driver / Controller

59 mechanics / -machining, switches E-470 • E-472 • E-421 PICA Controller © Physik Instrumente (PI) GmbH & Co. KG 2012. Subject to change without notice. Latest releases available at www

WWW.PiCeraMiC.COMPIEZO TECHNOLOGY Order number Displacement (0–1000 V) Diameter OD Length L Blocking force Stiffness Capacitance Resonant [µm] -10/+20% [mm] [mm] ±0,5 (0–1000 V) [N] [N/µm] [nF] ±20% frequency [kHz] P-007 .00 5 7 8 650 130 11 126 P-007 .10 15 7 17 850 59 33 59 P-007 .20 30 7 29 1000 35 64 36 P-007 .40 60 7 54 1150 19 130 20 P-010 .00 5 10 8 1400 270 21 126 P-010 .10 15 10 17 1800 120 64 59 P-010 .20 30 10 30 2100 71 130 35 P-010 .40 60 10 56 2200 38 260 20 P-010 .80 120 10 107 2400 20 510 10 P-016 .10 15 16 17 4600 320 180 59 P-016 .20 30 16 29 5500 190 340 36 P-016 .40 60 16 54 6000 100 680 20 P-016 .80 120 16 101 6500 54 1300 11 P-016 .90 180 16 150 6500 36 2000 7 P-025 .10 15 25 18 11000 740 400 56 P-025 .20 30 25 30 13000 440 820 35 P-025 .40 60 25 53 15000 250 1700 21 P-025 .80 120 25 101 16000 130 3400 11 P-025 .90 180 25 149 16000 89 5100 7 P-025 .150 250 25 204 16000 65 7100 5 P-025 .200 300 25 244 16000 54 8500 5 P-035 .10 15 35 20 20000 1300 700 51 P-035 .20 30 35 32 24000 810 1600 33 P-035 .40 60 35 57 28000 460 3300 19 P-035 .80 120 35 104 30000 250 6700 11 P-035 .90 180 35 153 31000 170 10000 7 P-045 .20 30 45 33 39000 1300 2800 32 P-045 .40 60 45 58 44000 740 5700 19 P-045 .80 120 45 105 49000 410 11000 10 P-045 .90 180 45 154 50000 280 17000 7 P-050 .20 30 50 33 48000 1600 3400 32 P-050 .40 60 50 58 55000 910 7000 19 P-050 .80 120 50 105 60000 500 14000 10 P-050 .90 180 50 154 61000 340 22000 7 P-056 .20 30 56 33 60000 2000 4300 32 P-056 .40 60 56 58 66000 1100 8900 19 P-056 .80 120 56 105 76000 630 18000 10 P-056 .90 180 56 154 78000 430 27000 7

Piezo ceramic type: PIC151 Maximum preload for constant force: Operating voltage: 0 to 1000 V. Outer surfaces: Polyolefi n shrink Standard electrical interfaces: 30 MPa . Operating temperature range: -20 sleeving, black. Custom designs

FEP-insulated wire leads, 100 mm, Resonant frequency at 1 Vpp, unloaded, to 85°C. or different specifi cations on AWG 24 (Ø 1 .15 mm) . free on both sides. The value is halved Standard mechanical interfaces: Steel request. Recommended preload for for unilateral clamping. or titanium plates, 0.5 to 1.0 mm thick dynamic operation: 15 MPa. Capacitance at 1 Vpp, 1 kHz, RT . (depends on model).

< 12 0.3 0.05 D2.1 < OD+3 < OD+1 < OD+0.4

< OD+5 L 0.5

PICA Stack, dimensions in mm. L, OD see data table

WWW.PICERAMIC.COMPieZOTeCHnOLOGY PICA Power Piezo Actuators

FOr HiGH-dYnaMiCs aPPLiCaTiOns

P-010.xxP – P-056.xxP

 Operating temperature up to 150°C  High operating frequencies  High load capacity  Force generation up to 70 kN  Microsecond response  Sub-nanometer resolution  Large choice of designs .pi.ws. R2 13/08/23.0

Stacked Piezo Linear Actuator Fields of Application Operating voltage 0 to 1000 V. Long lifetime without perfor- Research and industry. For active damping of oscillations, mance loss. Large displacement, low electrical capacitance. precision mechanics / -machining, active structures Integrated temperature sensor to prevent damage from (adaptive systems technology) overheating. Extreme reliability: >109 cycles Suitable Drivers Available Options E-481 PICA High-performance Piezo Driver / Controller  Bipolar control E-470 • E-472 • E-421 PICA Controller  SGS sensors for positional stability E-464 PICA Piezo Driver  PZT ceramic material  Operating voltage range, displacement, layer thickness  Load capacity, force generation  Geometric shapes: Rectangular, inner hole  Mechanical interfaces: Flat, metal, ceramic, glass, sapphire, etc.  Integrated piezoelectric detector layers  Operating temperature of up to 200°C  UHV-compatible to 10-9 hPa  Non-magnetic versions

61  Extra-tight length tolerances ©Physik Instrumente (PI) GmbH & Co. KG 2012. Subject to change without notice. Latest releases available at www

WWW.PiCeraMiC.COMPIEZO TECHNOLOGY Order number Displacement [µm] Diameter OD Length L Blocking force Stiffness Capacitance Resonant (0–1000 V) -10/+20% [mm] [mm] ±0.5 (0–1000 V) [N] [N/µm] [nF] ±20% frequency [kHz] P-010 .00P 5 10 9 1200 240 17 129 P-010 .10P 15 10 18 1800 120 46 64 P-010 .20P 30 10 31 2100 68 90 37 P-010 .40P 60 10 58 2200 37 180 20 P-010 .80P 120 10 111 2300 19 370 10 P-016 .10P 15 16 18 4500 300 130 64 P-016 .20P 30 16 31 5400 180 250 37 P-016 .40P 60 16 58 5600 94 510 20 P-016 .80P 120 16 111 5900 49 1000 10 P-016 .90P 180 16 163 6000 33 1600 7 P-025 .10P 15 25 20 9900 660 320 58 P-025 .20P 30 25 33 12000 400 630 35 P-025 .40P 60 25 60 13000 220 1300 19 P-025 .80P 120 25 113 14000 120 2600 10 P-025 .90P 180 25 165 14000 80 4000 7 P-035 .10P 15 35 21 18000 1200 530 55 P-035 .20P 30 35 34 23000 760 1200 34 P-035 .40P 60 35 61 26000 430 2500 19 P-035 .80P 120 35 114 28000 230 5200 10 P-035 .90P 180 35 166 29000 160 7800 7 P-045 .20P 30 45 36 36000 1200 2100 32 P-045 .40P 60 45 63 41000 680 4300 18 P-045 .80P 120 45 116 44000 370 8800 10 P-045 .90P 180 45 169 45000 250 13000 7 P-056 .20P 30 56 36 54000 1800 3300 32 P-056 .40P 60 56 63 66000 1100 6700 18 P-056 .80P 120 56 116 68000 570 14000 10 P-056 .90P 180 56 169 70000 390 21000 7

Piezo ceramic type: PIC255. Maximum preload for constant force: Operating voltage: 0 to 1000 V. sleeving (outside); epoxy resin Standard electrical interfaces: FEP- 30 MPa . Operating temperature range: -20 (inside). insulated wire leads, 100 mm, AWG 24 Resonant frequency at 1 Vpp, unloaded. to 150°C. Standard mechanical inter- Custom designs or different (Ø 1.15 mm). PT1000 temperature sensor. The value is halved for unilateral faces: Steel or titanium plates, 0.5 to specifi cations on request. Recommended preload for dynamic clamping. 1.0 mm thick (depends on model). operation: 15 MPa. Capacitance at 1 Vpp, 1 kHz, RT . Outer surfaces: FEP, transparent shrink

< 12 0.3 0.05 D2.1 < OD+3 < OD+1 < OD+0.4

< OD+5 L 0.5

PICA Power, dimensions in mm. L, OD see data table

WWW.PICERAMIC.COMPieZOTeCHnOLOGY PICA thru Ring Actuators

HiGH-LOad PieZO aCTuaTOrs WiTH inner HOLe

P-010.xxH – P-025.xxH

 High load capacity

 Extreme reliability: >109 cycles

 Microsecond response

 Sub-nanometer resolution

 Large choice of designs .pi.ws. R1 13/08/23.0

Stacked Piezo Linear Actuator Operating voltage 0 to 1000 V. Long lifetime without performance loss. High specifi c displacement. A mechanical preload can be attached via inner holes

Available Options  SGS sensors for positional stability  PZT ceramic material  Operating voltage range, displacement, layer thickness  Load capacity, force generation  Geometric shapes: Round, rectangular, various cross sections PICA Thru are manufactured in various sizes. Standard versions are  Mechanical interfaces: Flat, spherical, metal, ceramic, delivered with stranded wires and are covered in black. Custom designs glass, sapphire, etc. are available on request  Integrated piezoelectric detector layers  Special high / low temperature versions  UHV-compatible to 10-9 hPa  Non-magnetic versions  Extra-tight length tolerances Suitable Drivers Fields of Application E-464 PICA Piezo Driver Research and industry. For optics, precision mechanics/ E-481 PICA High-performance Piezo Driver / Controller

63 machining, laser tuning E-462 PICA Piezo Driver ©Physik Instrumente (PI) GmbH & Co. KG 2012. Subject to change without notice. Latest releases available at www

WWW.PiCeraMiC.COMPIEZO TECHNOLOGY Order Numbers Displacement [µm] Diameter OD Diameter ID Length L Blocking force Stiffness Capacitance Resonant (0–1000 V) -10/+20% [mm] [mm] [mm] ±0.5 [N] (0–1000 V) [N/µm] [nF] ±20% frequency [kHz] P-010 .00H 5 10 5 7 1200 230 15 144 P-010 .10H 15 10 5 15 1700 110 40 67 P-010 .20H 30 10 5 27 1800 59 82 39 P-010 .40H 60 10 5 54 1800 29 180 21 P-016 .00H 5 16 8 7 2900 580 42 144 P-016 .10H 15 16 8 15 4100 270 120 67 P-016 .20H 30 16 8 27 4500 150 230 39 P-016 .40H 60 16 8 52 4700 78 490 21 P-025 .10H 15 25 16 16 7400 490 220 63 P-025 .20H 30 25 16 27 8700 290 430 39 P-025 .40H 60 25 16 51 9000 150 920 22 P-025 .50H 80 25 16 66 9600 120 1200 17

Piezo ceramic type: PIC151 Maximum preload for constant force: Operating voltage: 0 to 1000 V. Outer surfaces: Polyolefi n shrink Standard electrical interfaces: FEP- 30 MPa . Operating temperature range: sleeving, black (outside); epoxy insulated wire leads, 100 mm, AWG 24 Resonant frequency at 1 Vpp, unloaded, -20 to 85°C. resin (inside). (Ø 1 .15 mm) . free on both sides. The value is halved Standard mechanical interfaces: Cera- Custom designs or different Recommended preload for dynamic for unilateral clamping. mic rings (passive PZT). specifi cations on request. operation: 15 MPa. Capacitance at 1 Vpp, 1 kHz, RT .

< OD+0.4 0.5 L < 12

< OD+1 < OD+3 >ID-1 < OD+5

PICA Thru, dimensions in mm

WWW.PICERAMIC.COMPieZOTeCHnOLOGY PICA Shear Actuators

COMPaCT MuLTi-aXis aCTuaTOrs

P-111 – P-151

 X, XY, XZ and XYZ versions

 Displacement to 10 µm

 Extreme reliability: >109 cycles

 Picometer resolution

 Microsecond response

 Large choice of designs .pi.ws. R1 16/08/26.0

Piezo Shear Actuators Operating voltage -250 to 250 V. Lateral motion is based on the piezoelectric shear effect. Excellent dynamics with minimum electric power requirement. Versions with inner holes or for use in cryogenic and UHV environments up to 10-9 hPa

Available Options  PZT ceramic material  Non-magnetic versions  Operating voltage range, displacement, layer thickness, cross-sectional dimension Axis and lead assignmnet for PICA Shear actuators. GND: 0 V, +: ±250 V  Load capacity, force generation  Mechanical interfaces: Flat, spherical, metal, ceramic, glass, sapphire, etc. Δ L  Extra-tight length tolerances

Fields of Application Research and industry, low-temperature/vacuum versions to 10-9 hPa. For scanning applications, microscopy, precision mechanics, switches X, Y

Suitable Drivers E-413 DuraAct and PICA Shear Piezo Amplifi er Principle of shear motion. ∆L refers to the displacement

65 E-508 PICA Piezo Driver Module ©Physik Instrumente (PI) GmbH & Co. KG 2012. Subject to change without notice. Latest releases available at www

WWW.PiCeraMiC.COMPIEZO TECHNOLOGY L Z Δ Order Active Displacement [µm] (-250 to Cross section Length L Max. shear Axial stiff- Capacitance Axial resonant number axes +250 V) -10/+20% A × B / ID [mm] [mm] ±0.3 load [N] ness [N/µm] [nF] ±20% frequency [kHz] P-111.01 X 1* 3 × 3 3.5 20 70 0.5 330 P-111.03 X 3* 3 × 3 5.5 20 45 1.5 210 P-111.05 X 5 3 × 3 7.5 20 30 2.5 155 P-121.01 X 1* 5 × 5 3.5 50 190 1.4 330 P-121.03 X 3* 5 × 5 5.5 50 120 4.2 210 P-121.05 X 5 5 × 5 7.5 40 90 7 155 P-141.03 X 3* 10 × 10 5.5 200 490 17 210 P-141.05 X 5 10 × 10 7.5 200 360 28 155 P-141.10 X 10 10 × 10 12 200 230 50 100 P-151.03 X 3* 16 × 16 5.5 300 1300 43 210 P-151.05 X 5 16 × 16 7.5 300 920 71 155 P-151.10 X 10 16 × 16 12 300 580 130 100 P-112.01 XY 1 × 1* 3 × 3 5 20 50 0.5 / 0.5 230 P-112.03 XY 3 × 3* 3 × 3 9.5 10 25 1.5 / 1.5 120 P-122.01 XY 1 × 1* 5 × 5 5 50 140 1.4 / 1.4 230 P-122.03 XY 3 × 3* 5 × 5 9.5 40 70 4.2 / 4.2 120 P-122.05 XY 5 × 5 5 × 5 14 30 50 7 / 7 85 P-142.03 XY 3 × 3* 10 × 10 9.5 200 280 17 / 17 120 P-142.05 XY 5 × 5 10 × 10 14 100 190 28 / 28 85 P-142.10 XY 10 × 10 10 × 10 23 50 120 50 / 50 50 P-152.03 XY 3 × 3* 16 × 16 9.5 300 730 43 / 43 120 P-152.05 XY 5 × 5 16 × 16 14 300 490 71 / 71 85 P-152.10 XY 10 × 10 16 × 16 23 100 300 130 / 130 50 P-123.01 XYZ 1 × 1 x 1* 5 × 5 7.5 40 90 1.4 / 1.4 / 2.9 155 P-123.03 XYZ 3 ×3 × 3* 5 × 5 15.5 10 45 4.2 / 4.2 / 7.3 75 P-143.01 XYZ 1 × 1 × 1* 10 × 10 7.5 200 360 5.6 / 5.6 / 11 155 P-143.03 XYZ 3 × 3 × 3* 10 × 10 15.5 100 170 17 / 17 / 29 75 P-143.05 XYZ 5 × 5 × 5 10 × 10 23 50 120 28 / 28 / 47 50 P-153.03 XYZ 3 × 3 × 3* 16 × 16 15.5 300 450 43 / 43 / 73 75 P-153.05 XYZ 5 × 5 × 5 16 × 16 23 100 300 71 / 71 / 120 50 P-153.10 XYZ 10 × 10 × 10 16 × 16 40 60 170 130 / 130 / 230 30 Versions with inner hole P-153.10H XYZ 10 × 10 × 10 16 × 16 / 10 40 20 120 89 / 89 / 160 30 P-151.03H X 3* 16 ×16 / 10 5.5 200 870 30 210 P-151.05H X 5 16 × 16 / 10 7.5 200 640 49 155 P-151.10H X 10 16 × 16 / 10 12 200 400 89 100 Versions for use in cryogenic and UHV environments P-111.01T X 1* 3 × 3 2.2 20 110 2 × 0.25 530 P-111.03T X 3* 3 × 3 4.4 20 55 6 × 0.25 260 P-121.01T X 1* 5 × 5 2.2 50 310 2 × 0.70 530 P-121.03T X 3* 5 × 5 4.4 50 150 6 × 0.70 260

* Tolerances ±30% . unilateral clamping. Versions for cryogenic and UHV environ- room temperature. Reduced values at low

Piezo ceramic type: PIC255 Capacitance at 1 Vpp, 1 kHz, RT . ments temperatures. Standard electrical interfaces: PTFE- Operating voltage: -250 to 250 V. Operating temperature range: -269 to 85°C. Standard mechanical interfaces: Ceramic insulated wire leads, 100 mm, AWG 32 Operating temperature range: -20 to 85°C. Temporary short-term bakeout to 150°C (Al2O3, 96% purity). / / (Ø 0 .49 mm) . Standard mechanical interfaces: only when short-circuited. Outer surface: Epoxy resin. / / Axial resonant frequency at 1 Vpp, unloa- Ceramics (passive PZT). Standard electrical interfaces: Ta. contac- Custom designs or different specifi cations ded, unclamped. The value is halved for Outer surface: Epoxy resin. ting possible with conductive adhesive on request.

$ $ or welding. Displacement measured at % % / / % !,' / % % !,' % / $ $ $ $ % $ $ $ $EHL4XHUVFKQLWW[ $ $EHL4XHUVFKQLWW[ % PICA Shear Actuators, A, B, L see table, dimensions in mm. The number of axes and wires depends on the type. % !,' Left: P-1xx.xx and P-1xx.xxH (with inner hole), right: P-1xx.xxT, *

$ % !,' $ % $

$ $EHL4XHUVFKQLWW[ $ $

$EHL4XHUVFKQLWW[ WWW.PICERAMIC.COMPieZOTeCHnOLOGY Picoactuator®

MuLTi-aXis aCTuaTOrs WiTH HiGHLY Linear disPLaCeMenT

P-405

 Lead-free, crystalline actuator material  High dynamics  Ideal for operation without position control  Low electrical power consumption  Minimal length tolerances .pi.ws. 12/06/08.0

Order Active Dimen- Max. Axial Max. Electri- Axial Stack Actuator number axes sions displace- stiff- shear cal resonant Bipolar operating voltage up to ±500 V. Nearly hysteresis- A × B × L ment * ness load capaci- frequen- [mm] (-500 to [N/µm] [N] tance cy free motion (<0.2%). No creep. Picoactuators®, as longitu- +500 V) [nF] [kHz] dinal and shear actuators, are confi gurable up to heights of [µm] ±10% 20 mm and maximum travel of ±3 µm Longitudinal actuators P-405.05 Z 5 × 5 × 12.5 1 140 10 0.95 160 Available Options P-405.08 Z 10 × 10 × 12 .5 1 550 100 3 .75 160  UHV-compatible to 10-9 hPa Shear actuators  Inner hole  End pieces P-405.15 X 5 × 5 × 7.5 1 230 20 0.7 – P-405.18 X 10 × 10 × 7 .5 1 900 150 2 .75 – Fields of Application XZ actuators Research and industry. Vacuum. For high-dynamics, open- P-405.28 XZ 10 × 10 × 19 1 / 1 350 50 2 .75 / 105 loop scanning applications, compensation of undesired 3 .75 transverse motions with nanopositioning systems * Tolerances ±20% . („out-of-plane“ and „out-of-line“) Piezo material PIC 050 . Standard electrical interfaces: PTFE-insulated wire leads, 100 mm, AWG 32 (Ø 0.76 mm).

Axial resonant frequency measured at 1 Vpp, unloaded, unclamped. The value is halved for unilateral clamping.

Capacitance at 1 Vpp, 1 kHz, RT . Operating voltage: -500 to 500 V. Operating temperature range: -20 to 85°C. Standard mechanical interfaces: Ceramics. Outer surfaces: Epoxy resin. Ask about custom designs!

® 67 P-405, dimensions in mm. A, B, L see table Picoactuators can be produced in different confi gurations ©Physik Instrumente (PI) GmbH & Co. KG 2012. Subject to change without notice. Latest releases available at www

WWW.PiCeraMiC.COMPIEZO TECHNOLOGY Integrated Components

FrOm THE CEramIC TO THE COmPLETE sOLuTION

Ceramics in Different Levels of Integration What they all have in common is motion resolution in the nanometer range, long PIC integrates piezo ceramics into the lifetimes and outstanding reliability. The customer’s product. This includes both combination of PICMA® actuators, flexure the electrical contacting of the elements guiding and precision measurement sys- according to customer requirements and tems produces nanopositioning devices in the mounting of components provided by the highest performance class. PICMA® piezo bending actuators the customer, and the gluing or the casting with applied SGS sensors for of the piezo ceramics. For the customer, Piezomotors measuring the displacement this means an accelerated manufacturing process and shorter lead times. Piezo ceramics are the drive element for piezomotors from Physik Instrumente (PI), Sensor Components – Transducers which make it possible to use the special characteristics of the piezo actuators PI Ceramic supplies complete sound trans- over longer travel ranges as well. PILine® ducers in large batches for a wide variety piezo ultrasonic motors allow very dynamic of application fields. These include OEM placement motions and can be manu- assemblies for ultrasonic flow measure- factured with such a compact form that ment technology, level, force and accelerati- they are already being used in many new on measurement . applications. Piezo stepping drives provide the high forces which piezo actuators Assembled Piezo Actuators generate over several millimeters. The Piezo actuators can be equipped with patented NEXLINE® and NEXACT® drives sensors to measure the displacement and from PI with their complex construction are then suitable for repeatable positioning from longitudinal, shear and bender with nanometer accuracy . Piezo actuators elements and the necessary contacting are are often integrated into a mechanical manufactured completely at PI Ceramic. system where lever amplification increases Lever amplified system the travel. Flexure guiding systems then provide high stiffness and minimize the lateral offset .

Preloaded Actuators – Levers – Nanopositioning PICMA® piezo actuators from PI Ceramic are the key component for nanopositioning systems from Physik Instrumente (PI) . They are supplied in different levels of integration: As simple actuators with position sensor as an optional extra, encased with or without preload, with lever amplification for increased travel, right through to high-performance nanopositioning systems where piezo actuators drive up to six axes by means of zero-wear and frictionless flexure guides. Actuator modules for NEXLINE® and NEXACT® piezo stepping motors

WWW.PICERAMIC.COM Piezo Drivers, Amplifiers & Controllers

Piezo Electronics for Stability and Dyna- This is why for stable displacement particu- mics of Piezo Actuators larly low-noise amplifiers are required. The drive electronics plays a key role in the performance of piezoelectric actuators. Piezo controllers offer repeatable posi- Piezo electronics are offered in flexible tioning in a closed servo loop: Since the designs: as OEM board for integration, displacement of piezo actuators is subject as "Plug&Play" bench-top device or in to drift and is non-linear, an additional po- modular design for controlling almost any sition sensor and suitable control are requi- number of motion axes . red for reaching a position repeatably and stably holding it. Piezo controllers equip- High-Power Amplifiers for High-Speed ped with a closed servo loop are available Switching Operations as an OEM module, as a bench-top device For fields of application that require high or as a modular device. dynamics, users can choose from a series of suitable solutions. For high-speed, low- Applications Outside Piezo Actuator Piezo amplifiers and controllers as frequency switching operations, amplifiers Technology: Sensor Electronics and Energy miniature OEM modules and bench-top with high charge current are available. This Harvesting device results in fast displacement of the piezo ac- In addition to amplifiers for actuator tuator and fast step-and-settle at the target control, electronics for energy harvesting position. Overtemperature protection for are also available. Sensor applications are electronics and piezo is available. highly specialized, making it necessary to adapt the electronics to each individual Dynamic Piezo Amplifiers for Scanners and case. Thus, for example, OEM customers Shutters requesting solutions for applications in Switching amplifiers, designed for con "Structural Health Monitoring" (SHM) or tinuous operation and exhibiting much excitation of ultrasonic transducers benefit lower power consumption than linear from optimized solutions. amplifiers, allow high-frequency operation. Linear amplifiers are used for dynamic scanning operations. If linear displacement behavior is crucial, charge-controlled amplifiers are available, which compensate the deviation from linearity of the piezo actuators .

Low-Noise Voltage Amplifiers for Stable Displacement Due to their high resolution of motion and dynamics, piezo actuators are capable of adjusting to minimal changes in voltage.

The Energy Harvesting Evaluation Kit contains DuraAct piezo transducers plus the required transducer and storage electronics and cabling

PIEZO TECHNOLOGY Model Overview

DrIvErs FOr PIEZO sTaCk aCTuaTOrs: CLassIFICaTIONs, mODEL ExamPLEs aND CusTOmIZaTION OPTIONs

Amplifier Linear amplifier, Linear amplifier, High-power piezo Linear amplifier, Linear amplifier, classification voltage-control, voltage-control, amplifier with energy voltage-control charge-control high current, high current recovery, class D continuous operation (switching amp) Model examples For PICMA® Stacks E-618 E-505.10 E-617 E-505.00 E-506.10 E-504 E-503 E-610 E-663 E-831 E-836 For PICA Stacks – E-421, E-470 E-481 E-464 – E-508 E-482 E-462 Amplifier bandwidth, small signal ++ ++ + + + Relative rise time ++ + O O O Ripple / noise, O + O ++ ++ 0 to 100 kHz Linearity + + + + ++ Power consumption O + ++ + + Adequate for … Precision positioning O O O ++ -- High-dynamics O O O O ++ scanning w/ high linearity Fast switching, low cycles, low + ++ ++ + O currents Dynamic scanning, continuous + + ++ + + operation Dynamic scanning, high loads, high ++ + + + + currents, continuous operation

O average; + good; ++ best

Customization of Drive Electronics OEM Shaker Electronics for Ultrasonic In addition to universal drive electronics Transducers that are highly suitable for most fields of ap- The voltage range can be adjusted to the plication, PI offers a wide range of piezo am- required stroke. plifiers geared towards particular purposes.  Small dimensions: This comprises: 35 mm x 65 mm x 50 mm  The complete product range from elec  Bandwidth up to 20 kHz tronic components and complete devices  24/7 Operation as an OEM circuit board through to the modular encased system Driving Micropumps  Production of small batches and large Piezo elements are ideal drives for mini- series aturized pumping and dosing system.  Product development according to special  Compact OEM electronics product standards (national or market-  Suitable for installation on circuit boards specific standards such as the Medical (lab-on-a-chip) Device Act, for example) and the corres-  Frequency and amplitude control ponding certification  Adaptation of the systems to special Piezo Amplifier with High Bandwidth environmental conditions (vacuum, space,  For low actuator capacitances, typ. up to clean room) a few 100 nF  Copy-exactly agreements  Max. output voltage range -100 to +350 V  Max. continuous output power 15 W  Bandwidth to 150 kHz

WWW.PICERAMIC.COM Piezo Drivers for PICMA® Piezo Actuators

OuTPuT vOLTaGE raNGE -30 TO 130 v

E-610 Single-Channel Controller E-500 Plug-in Modules  Cost-effective single-channel OEM The E-500 modular piezo controller system solution features low-noise amplifiers in a 9.5- or  Open-loop versions or closed-loop 19-inch-rack . versions for SGS & capacitive sensors  E-505: 2 A peak current  Notch filter for higher bandwidth  E-505.10: 10 A peak current, peak output  180 mA peak current power of up to 1000 W  E-503: 3 channels, peak current 3 × 140 mA  E-506.10: Highly Linear Amplifier Module with Charge Control, 280 W peak output power

E-831 Miniature Modules E-836 OEM Module or Bench-Top Device  Open-loop control  Cost-effective, low-noise, for dynamic  Separate power supply for up to three piezo actuator operation electronics with up to -30 / +130V output  Peak current up to 100 mA voltage  24 V operating voltage  Bandwidth up to several kHz  For capacities of up to 20 μF  For further miniaturization: extremely small OEM variants

E-617 Switching Amplifier E-618 High-Power Piezo Amplifier with Energy Recovery  Peak current of up to 20 A  Peak current of up to 2 A  Continuous current of up to 0.8 A  High average current up to 1 A  Bandwidth of up to 15 kHz  Bandwidth of up to 3.5 kHz  Integrated processing for temperature  Low heat/power dissipation sensor  Optionally with digital interfaces

PIEZO TECHNOLOGY Other Piezo Drivers

FOR PICA, BENDING AND SHEAR ACTUATORS, DURAACT TRANSDUCERS

Piezo Amplifier E-650 for Multilayer Bender Actuators  Specifically designed to drive multilayer bimorph actuators without position sensor  Output voltage range 0 to 60 V  Two-channel tabletop* version or OEM version for soldering on a p.c.b.  300 mA peak current

Piezo Amplifier E-413 for DuraAct and E-835 OEM Module: Bipolar Operation Pica Shear for Piezoelectric DuraAct Patch  Output voltage range up to -100 up to Transducers +400 V or ± 250V  120 mA peak current  100 mA peak current  Output voltage range -100 to +250 V  OEM module / bench-top for PICA shear  Compact: 87 mm x 50 mm x 21 mm actuators  High bandwidth of up to 4 kHz and more  OEM module for piezoelectrical DuraAct  Sensor electronics on request patch transducers

High-Power Piezo Amplifier / Controller  E-481, E-482 Switching amplifier  Output voltage to 1100 V or bipolar  E-421, E-471 Modular design  Peak current up to 6 A  E-508 Driver module  Bandwidth to 5 kHz  E-462 compact, for static applications  Overtemp protection  Optional: position control, digital interfaces

WWW.PICERAMIC.COM Part III - Piezo Actuator Tutorial

BAUELEMENTE, TECHNOLOGIE, ANSTEUERUNG

PIEZOWWW.PICERAMIC.DE TECHNOLOGY Fundamentals of Piezo Technology

Basic Principles of Piezoelectricity Page 75 Piezoelectric Effect – Ferroelectric Polarization – Expansion of the Polarized Piezo Ceramic

Piezoelectric Actuator Materials Page 76

Displacement Modes of Piezoelectric Actuators Page 77

Manufacturing of Piezo Actuators Page 82 Multilayer Tape Technology – Pressing Technology – Piezo Tube Actuators – DuraAct

Properties of Piezoelectric Actuators Page 85 Displacement Behavior Page 85 Nonlinearity – Hysteresis – Creep – Position Control

Temperature-Dependent Behavior Page 88

Forces and Stiffnesses Page 90 Preload and Load Capacity – Stiffness – Force Generation and Displacement

Dynamic Operation Page 94 Resonant Frequency – How Fast Can a Piezo Actuator Expand – Dynamic Forces

Electrical Operation Page 95 Electrical Capacitance – Power Consumption – Continuous Operation – Pulse-Mode Operation

Ambient Conditions Page 98 Vacuum Environment – Inert Gases – Magnetic Fields – Gamma Radiation – Environments with High Humidity – Liquids

Reliability of PICMA® Multilayer Actuators Page 99 Lifetime when Exposed to DC Voltage – Lifetime in Dynamic Continuous Operation

Amplifiers: Piezo Electronics for Operating Piezo Actuators Page 101 Characteristic Behavior of Piezo Amplifiers Page 101 Power Requirements – Amplifier Frequency Response Curve – Setting the Control Input Voltage

Solutions for High-Dynamics 24/7 Operation Page 102 Switched Amplifiers with Energy Recovery – Overtemperature Protection – Charge Control

Handling of Piezo Actuators Page 104 Mechanical Installation – Electrical Connection – Safe Operation

WWW.PICERAMIC.COM ˝L Polarisation ˝L axis Polarisation ∆ L axis C1 f f ∆ L (Z) C m n 3 1 (Z) fm fn 3 L1 C0 6 L + L o C 1 P 0 6 5 + L o P Basic Principles of Piezoelectricity 2(Y) 5 4 0 V 1 2(Y) Impendanz Z (X) 4 0 V 1 Impendanz Z (X) Frequenz f Frequenz f

1 1 ODD The Piezoelectric Effect Ferroelectric Polarization (1) TH ODD P OD 3 (Z) (1) TH P THPressure generates6 charges on the surface of To minimize the internal energy of the material, ODIDID 3 3 – – – – TH 5 6 (Z) IDID piezoelectric materials. This so-called3 6 direct ferroelectric domains form in the crystallites of 2 – – – – – – – – 5 + + + + P – 6 – piezoelectric2 effect, also called the generator the ceramic (fig. 2). Within these volume areas, – – – – – – – – + + + + + + + + P – L P – + + – – – – – + – – – – – or sensor effect, converts mechanical5 energy the orientations of the spontaneous polariza + + + + + + + + P – – L 2(Y) + + – – – – + +

+ + + + + +

– – – – – – – – – – 5 + + + + to electrical energy. The inverse4 piezoelectric tion are the same. The different orientations of – –

1 2(Y) + +

+ + + + + +

(X) +

– – – – – – – – – 4 + – – + + + + + + + + effect in contrast causes this1 type of materials bordering domains are separated by domain + U

(X) + (2) – + + + + + + + + + to change in length when an electrical voltage walls. A ferroelectric polarization process is (1) (2) (3) U (2) (1) (2) (3) is applied. This effect converts electrical energy required to make the ceramic macroscopically – into mechanical energy and is thus employed piezoelectric as well. – L in actuator technology. P C/m2 L P

L ˝L ˝L 2 For this purpose, a strong electric field of sever P C/m TH W L P The piezoelectric effect occurs in monocrysPolarisationPolarisational kV/mm is applied to create an asymmetry Ps TH TH P axisaxis W Ps ∆ ∆L L TH talline materialsW Pas well as in polycrystalline in the previously unorganized ceramic com- C1C1 2 P W O r ferroelectric ceramics. In single crystals, an pound. The electric field(Z) (Z)causes a reorientation fmfm fn fn

Pb2 Pr + + 3 3 O + asymmetry in the structure of the unit cells of of the spontaneous polarization. At the same – –

L PbTi, Zr

+ L L + L

+ TH

– 1 1 –

C C -Ec – – – Ec

0 0 + +

+ + the crystal lattice, i.e. a polar axis that forms time, domains with a favorable orientation + TH Ti, Zr – –

L L TH – – 6 6 –

+ + -E E L L o o c c

+ L TH P

P ˝L +

+ P + +

– E kV/cm – below the CurieTH temperature T , is a sufficient to the polarity fieldP P direction grow and those – – – W W c + + W 3 Fig. 1 L

P Polarisation 5 5 TH P P

– E kV/cm –

prerequisite for the effect to occur. with an unfavorable orientation shrink. The + – + W W W axis 2(Y)2(Y) 3 (1) Unit cell with symmetrical, 1(r) ∆ L 4 4 Radialschwingung 0 0 V V domain walls are shifted in the crystal lattice. cubic structure above the Impendanz Z Impendanz Z C1 1 1 -Ps Pr Piezoelectric ceramics also have a sponta- (X)(X) 1(r) Radialschwingung f f After(Z) polarization, most of the reorientations Curie temperature TC m n -Ps P neousL polarization, i.e. the positive and nega- 3 r are preserved even without the application of (2) Tetragonally distorted FrequenzFrequenz f f L L C 1 Dickenschwingung tive charge concentration of the unit cells are 0 unit cell below the Curie P an electric field (see fig. 3). However, a small 6 Dickenschwingung + L o temperature T with spon- separate fromP each other. At the same time,P number of the domain walls are shifted back C 1 1 the axis of the unit cell extends in the direction 5 taneous polarization and to their original2(Y) position, e.g. due to internal spontaneous strain ODDODD of the spontaneous polarization and a sponta- 4 0 V (1)(1) 1 mechanical stresses. Impendanz Z THTH P P (X) 3 ODOD 3 3 neous strain occurs (fig. 1). 3 THTH 6 6 (Z)(Z) 3 3 Längsschwingung IDIDIDID 3 3 3(r) – –– –– –– – Frequenz f 5 5 Expansion of the Polarized Piezo Ceramic 1 Längsschwingung 3 L 6 6 3(r) 2 2 – – – – – – OD + ++ ++ ++ + 1 3 TH TH P P The ceramic expands, whenever an electric – – Dickenschwingung L – – OD P – –– –– –– – 2 1(r) + + + ++ + + + Radialschwingung 1 P P – – TH L L TH field is applied, which is less strong than the + + + + – – – – – – – Dickenschwingung P + + 2 1(r) – – Radialschwingung 5 5 + ++ ++ ++ + ODD

2(Y)2(Y) original polarization field. Part of this effect is – – + + + +

+ + ++ + + + + –

(1) – – –– –– –– – – –– – – – – Dickenschwingung 4 4 – – TH P

1 1 due to the piezoelectric shift of the ions in the + + 1 OD +

3 (X)(X) + Dickenschwingung – TH 6 (Z) + + – + ++ ++ ++ + + + + + + + + 1 ID crystal lattice and is called the intrinsic effect. U U ID OD 3 – – – – 5 (2)(2) OD 6 (1)(1) (2)(2) (3)(3) 3 TH P 2 – – – – The extrinsic effect is based on a reversible+ + + + 6 P ID – TH 3 P – – – TH – – – – 6 + + + + ID P ferroelectric reorientation of the unit– cells. It L + TH + – – – – 5 + – 5 + + + + 2 2(Y) increases along with the strength of the– dri- 5 + +

+ + + + + 2 2 L L

– – – – – – – – – P C/mP C/m 2 4 ving field and is responsible for– most of the 1 + P P (X) L L + Längsschwingung

– THTH nonlinear hysteresis and drift characteristics+ of+ + + + + + + + U WW (2) Längsschwingung PsPs THTH P P ferroelectric piezoceramics. (1) (2) (3) WW Dickenschwingung – O2O2 Fig. 3 Pr Pr Dickenschwingung

PbPb

+ + + + + Orientation of the sponta- + – – – L L L Fig. 2: A cross-sectional view of a ferroelectricTi,Ti, Zr Zr ceramic P C/m2

neous polarizationRadialschwingung within a L L THTH

– – – – – -E-Ec c – EcEc

clearly shows the differently polarized domains within + + + + P

+ + + + + L + THTH piezo ferroelectricRadialschwingung ceramic– – – – TH L L

P P the individual crystallites THTH P P W P P

–

– E kV/cmE kV/cm – – – (1) Unpolarized ceramic,Ps – WW WW 3 3 + + + + TH P WW (Source: Fraunhofer Institute for Ceramic Technologies (2) Ceramic during polari- W and Systems IKTS, Dresden, Germany) zation and (3) ceramic after 2 1(r)1(r) RadialschwingungRadialschwingung Pr O polarization -P-Ps s P P

Pb r r + +

– – + Ti, Zr

L L L L TH – – -Ec – Ec

+ + + +

TH DiDickckenschwingungenschwingung – + – L

P P P TH P P

– E kV/cm – – W W W 3 + + 75 1(r) Radialschwingung

-Ps Pr 3 3 L 3 3 Dickenschwingung LängsschwingungLängsschwingung P 3(r)3(r) PIEZO TECHNOLOGY 1 1 3 3 L L ODOD THTH THTH DickenschwingungDickenschwingung P P 2 2 1(r)1(r) RaRadialschwingungdialschwingung

3 3 DicDickekensnschchwingungwingung 1 1 Längsschwingung 3(r) ODOD 1 3 L OD TH TH P P Dickenschwingung3 3 THTH P 2 6 6 1(r) IDID THTH Radialschwingung

5 5 2 2 Dickenschwingung 1

OD LängsschwingungLängsschwingung 3 TH P 6 ID TH

DickenschwingungDickenschwingung 5 2

Längsschwingung RadialschwingungRadialschwingung

Dickenschwingung

Radialschwingung Piezoelectric Actuator Materials

Basic Principles of Piezoelectricity ˝L Polarisation axis ∆ L C1 f f (Z) Commercially available piezoceramic materials Ferroelectrically hard PZT mmaterials,n such 3 are mostly based on the lead-zirconate-lead- as PIC181 and PIC300, are primarily used in L C 1 titanate material0 system (PZT). By adding other high-power ultrasound applications. They 6 + L o P materials the properties of the PZT composi have a higher polarity reversal resistance, 5 tions can be influenced. high mechanical quality factors as well as 2(Y) low hysteresis values at reduced piezoelectric 4 0 V 1 Ferroelectrically soft piezoceramics with low Impendanz Z ® (X) deformation coefficients. The Picoactuator polarity reversal field strengths are used series is based on the monocrystalline material Fig. 4 for actuator applications since the extrinsic PIC050, which has a highly linear, Frequenzhysteresis- f Orthogonal system to domain contributions lead to high overall describe the properties of free characteristic, but with small piezoelectric piezo moduli. This includes the piezoceramics a polarized piezo ceramic. coefficients. 1 Axis 3 is the direction of PIC151, PIC153, PIC255, PIC252 and PIC251. ODD polarization Actuator Materials from PI Ceramic (1) TH P OD 3 PIC151 Modified PZT ceramic with balanced TH 6 (Z) actuator characteristics. High piezo- IDID 3 5 PIC151 PIC153 PIC255/252– – – – PIC050 electric coupling, average permittivity, 6 2 – – – – + + + + relatively high Curie temperature. P – Physical and Dielectric Properties – – – – – + + + + P – L + + – – – – Standard material for the PICA Stack, + 5 3 – Density [g/cm ] 7.80 7.60 7.80 + + + + 4.70 PICA Thru and piezo tube product lines.

2(Y) ρ – +

+ + + + + +

– – – – – – – – – 4 – 1 Curie temperature Tc [°C] 250 185 350+ >500 PIC153 Modified PZT ceramic for large dis-

(X) +

+ – + + + + + + + + placements. U (2) Relative permittivity Τ (1) (2) (3) High piezoelectric deformation coeffi in polarization direction ε33 /ε0 2 400 4 200 1 750 60 perpendicular to polarization 1 980 1 650 85 cients, high permittivity, relatively low – ε11/ε0 Curie temperature.

Dielectric loss factor Special material for the PICA Stack and L -3 P C/m2 tan δ [10 ] 20 30 20 <1 PICA Thru product lines as well as for L P glued bending actuators. TH Electro-Mechanical Properties W Ps TH P PIC255 Modified PZT ceramic that is especial- Piezoelectric deformation coef- W ficient, piezo modulus* ly suited to bipolar operation, in shear O2 Pr d31 [pm/V] - 210 - 180 actuators, or with high ambient tem-

Pb d [pm/V] 500 600 400 40 + + 33 + peratures. d [pm/V] – – Ti, Zr 15 550 80

L L TH – – High polarity reversal field strength -Ec – Ec

+ + + +

TH Acousto-Mechanical Properties – + – (>1 kV/mm), high Curie temperature. L

P TH P P

– E kV/cm

– – Standard material for the PICAW Power, W W 3 Elastic + +

compliance coefficient PICA Shear, piezo tube and DuraAct

1(r) E -12 2 product lines Radialschwingung s11 [10 m /N] 15.0 16.1 E -12 2 s [10 m /N] 19.0 -Ps P 20.7 33 r PIC252 Variant of the PIC255 material with a lower sintering temperature for use in L Mechanical quality factor Qm 100 50 80 Dickenschwingung the multilayer tape process. For explanations and further data, see the catalog "Piezoceramic Materials and Components" P Standard material for the PICMA® Stack, * The deformation coefficient corresponds to the charge coefficient used with piezo components. ® ® The value depends on the strength of the driving field (fig. 22, p. 50). The information in the table PICMA Chip and PICMA Bender refers to very small field strengths (small signal) product lines as well as some DuraAct products.

3 3 PIC050 Crystalline material for linear, hyste- PI Ceramic offers a wide range of further materials, includingLängsschwingung lead-free resis-free positioning with small dis- 3(r) placements in an open servo loop. piezoceramics that are currently1 mainly used as ultrasonic transducers. 3 L OD Excellent stability, high Curie tempera- TH TH For application-specific properties, actuators can be manufacturedDickenschwingung from P 2 ture. 1(r) special materials, although the technical implementation has to be indi- Radialschwingung ® vidually checked. www.piceramic.com Standard material for the Picoactuator product line. Dickenschwingung 1

OD WWW.PICERAMIC.COM 3 TH P 6 ID TH

5 2

Längsschwingung

Dickenschwingung

Radialschwingung Displacement Modes of Piezoelectric Actuators

Basic Principles of Piezoelectricity

2 Longitudinal Stack Actuators 30 N/mm in relation to the cross-sectional area L Longitudinal trans of the actuator. Values of up to several 10 000 ΔLlong In longitudinal piezo actuators, the electric displacement [m] Newton can thus be achieved in the actuator. field in the ceramic layer is applied parallel to Longitudinal d33(GS) the direction of polarization. This induces an piezoelectric large- V V Longitudinal stack actuators are excellently expansion or displacement in the directionF+ of signal deformation P E V P E suited for highly dynamic operation due to GND V P E bend coefficient [m/V] polarization. Individual layers provideF- relative- their high resonant frequencies. A mechani- ly low displacements. In order to achieve tech- n Number of stacked cal preloading of the actuator suppresses ceramic layers nically useful displacement values, stack actua- dynamically induced tensile forces in brittle V Operating tors are constructed, where many individual ceramic material, allowing response times in voltage [V] layers are mechanically connected in series the microsecond range and a high mechanical and electrically connected in parallel+VF (fig. 5). P E performance. V V P E -V P E P E F P E Longitudinal stack actuators are highly effi- GND V P E P E GND cient in converting electrical to mechanical P E energy. They achieve nominal displacements of around 0.1 to 0.15% of the actuator length. The

nominal blocking forces are on the order of shear lo ng V GND P E P E P E P E P E V P E P E P E V GND GND P E In addition to the expansion in the direc- P E P E V P E V P E GND tion of polarization, which is utilized with GND P E P E P E P E P E longitudinal actuators, a contraction P E always occurs in the piezo actuator that +V F P E is orthogonal to its polarization when it is Fig. 5 V -V P E operated with an electric field parallel to (Equation 1) F ∆Llong = n d33(GS) V the direction of polarization.

This so-called transversal piezoelectric effect is used by contracting actuators, tube actuators, or bending actuators. radial

lateral Examples of longitu-

dinal stack actuators axial E are the multilayer P piezo actuators PICMA® Stack, En - capsulated PICMA®, ® PICMA Chip, as GND V well as the stacked actuators PICA Stack, PICA Power, PICA Thru that are glued P P +V GND -V P together from indi- V GND E vidual plates, and the crystalline Picoactuator®.

PIEZO TECHNOLOGY Furthermore, shear stresses cannot be com- A typical application pensated by a mechanical preload. Both, limit for shear actuators the practical stacking height of shear stacks. are drive elements

for so-called stick- L trans Shear actuators combined with longitudinal slip motors. actuators yield very compact XYZ stacks with high resonant frequencies.

Shear actuatorsV V F+ P E V P E from GNDPI Ceramic are ®

bend Picoactuator Technology V P E F- offered as product Picoactuator® longitudinal and shear actua- lines PICA LShear und trans tors are made of the crystalline piezoelectric Picoactuator®. material PIC 050. The specific displacement is Shear Actuators ±0.02% (shear actuators) or ±0.01% (longitudi- +VF V V P E V F+ V P E P E In piezoelectric shear actuators, the electric nal piezo actuators) of the actuator length and V P E -V P E GND P E F bend P E V P E GND V P E F- P E field in theGND ceramic layer is applied orthogo- is thus 10 times lower than for classic piezo P E nally to the direction of polarization and the actuators made of lead zirconate - lead titanate displacement in the direction of polarization (PZT). The displacement here is highly linear is utilized. The displacements of the individual with a deviation of only 0.2%. shear layers add up in stacked actuators here as well +VF P E V V P E V -V P E P E P E (fig. 6). F P E GND GND V P E P E GND P E P E TheP shearE deformation coefficients d are P E 15 V P E P E V normally the largestGND piezoelectric coefficients. GND P E P E WhenP E controlled with nominal voltages, shear P E PIC ceramics achieve d15(GS) values of up to V +V 2000 pm/V. The permissible controlling field GND P E F P E V strength is limited in order to prevent a rever- P E P E -VF P E P E sal of the vertically oriented polarization. V P E P E V GND GND P E P E P E When lateral forces act on the actuator, the P E shear motion is additionally superimposed by

+V a bending. The same effect occurs in dynamic Fig. 7 F P E radial V Fig. 6 operation near the resonant frequency. Measured nonlinearity of a Picoactuator® lateral -V P E F

∆Lshear = n d15(GS) V axial E

(Equation 2) P lo ng

radial lateral GND V

P E P E axial E P E P E V V P E GND GND P E P P E P P P E +V GND -V P

lo ng P E V GND E

GND V

P E P E P E P E V V P E GND GND P E P E P P P E P E +V GND -V P V GND E

WWW.PICERAMIC.COM Tube Actuators Tube actuators are radially polarized. The electrodes are applied on the outer surfaces, so that the field parallel to the polarization also runs in a radial direction. Tube actuators use the transversal piezoelectric effect to gener ate displacements. Axial displacements or changes in length (fig. 8), lateral motions such as changes in the radius (fig. 9), as well as bending (fig. 10) are possible.

In order to cause a tube to bend, the outer Axial displacement ΔL Shear electrode is segmented into several sections. shear displacement [m] When the respectively opposite electrodes are ΔL = d l V axial 31(GS) d Piezoelectric large- t 15(GS) driven, the tube bends in a lateral direction. signal shear defor- (Equation 3) mation coefficient Undesirable tilting or axial motions that occur L [m/V] trans during this process can be prevented by more n Number of complex electrode arrangements. For exam stacked ceramic V V ple, an eight-electrodeF+ arrangement creates a layers P E V P E GND V P E bend counter F-bending and overall achieves a lateral V Operating displacement without tilting. voltage [V] Axial tube dis- ΔLaxial PI Ceramic offers precision tube actuators in placement [m] the piezo tube product line. +VF P E V ΔL Radial tube dis- V Fig. 8 P E radial -V P E P E F P E GND placementV [m] P E P E GND Lateral tube dis-P E Radial displacement ΔLlateral placement [m] (radius change) d Transversal piezo The following estimation 31(GS) shear electric large- applies for large radii: V signal deformation GND P ID+E t ∆L ≈ d V coefficient [m/V] P E radial 31(GS) P E 2t P E l V Tube length [m] P E Tube actuators are often used in scanning P E V GND GND P E Internal tube dia- P E probe microscopes to provide dynamic ID P E (Equation 4) P E scanning motions in open-loop operation, meter [m] +V t Tube wall thick- and as fiber stretchers. F P E V ness (=(OD-ID)/2) -V P E Further application examples are micro- F [m] dosing in the construction of nanoliter For all equations, ID >> t. All tube dimensions, see pumps or in inkjet printers. Fig. 9 data sheet

radial

Bending actuators, lateral

XY scanning tubes axial E 2 l P ∆Llateral = 0.9 d31(GS) V (ID + t)t lo ng

(Equation 5) GND V P E P E P E P E V V P E GND GND P E P E P P P E P E +V GND -V P V GND E Fig. 10 79

PIEZO TECHNOLOGY Transversal dis- ΔLtrans placement [m] Transversal d31(GS) piezoelectric large- signal deformation coefficient [m/V] l Length of the piezo ceramic in the direction of displacement [m] h Height of a ceramic layer [m] n Number of stacked ceramic layers V Operating voltage [V] Bending ΔLbend displacement [m] Contracting Actuators As a result of the contraction, tensile stresses Free bender lf Typically, piezo contracting actuators are low- occur that can cause damage to the brittle length [m] profile components. Their displacement occurs piezo ceramic. A preload is therefore recom- Height piezo hp mended. ceramic element perpendicularly to the polarization direction [m] and to the electric field. The displacement of For the patch actuators of the DuraAct product l f contracting actuators is based on the transver- group, a piezo contractor is laminated into a P E hP P E sal piezoelectric effect whereby up to approx. polymer. This creates a mechanical preload 20 µm is nominally achieved. that protects the ceramic against breakage. Ratio of the Rh heights of the sub- Multilayer elements offer decisive advantages Multilayer contracting actuators can be re strate (hs) and over single-layer piezo elements in regard to quested as special versions of the PICMA® piezoceramic ele- technical realization: Due to the larger cross- ment (h ) in a Bender product line. p sectional area, they generate higher forces and composite bender L can be operated with a lower voltage (fig. 11). trans (Rh=hs/hp) Ratio of the elasti RE city modulus of the substrate (E ) V V s F+ P E V P E and the piezo GND V P E bend ceramic element F- Fig. 11 (Ep) in in a com posite bender d l (Equation 6) ΔLtrans = 31 (GS) V (R =E /E ) E s p h L trans Fixed voltage for VF bender actuator +V F control [V] (V and V P E V V canP be super-E -V P E F V P E V F GND P E P E F+ imposed with an P E V GND V P E GND P E P E bend offset voltage) P E VF-

shear

V +V P E F GND P E V V P E -V P E P E P E F P E P E GND V P E P E GND P E P E V P E P E V GND GND P E P E P E P E

shear +V F P E V V GND P E P E -VF WWW.PICERAMIC.COMP E P E P E V P E P E V GND GND P E P E P E P E

radial +V F P E lateral V P E -VF axial E

P lo ng

radial GND V

P E lateral P E P E P E V V P E GND axial E GND P E P E P P P E P E +V GND -V P P V GND E lo ng

GND V

P E P E P E P E V V P E GND GND P E P E P P P E P E +V GND -V P V GND E /

/ :

,' /) :

/) 7+ 7+ 7+ 7+

change in length into a large bending displacement vertical to the contraction. Depending on the geometry, translation factors of 30 to 40 are attainable, although at the cost of the conversion efficiency and the force generation.

Bending Actuators With piezoelectric bending actuators, displacements of up to several millimeters can be Attached to a substrate, contracting actuators Fig. 17 achieved with response times in the millisec act as bending actuators (fig. 12). For the con- By selecting a two-sided ond range. The blocking forces, however, are restraint with a rotatable struction of all-ceramic benders, two active relatively low. They are typically in the range mounting (bottom) instead of piezoceramic elements are joined and electri- of millinewtons to a few newtons. a single-sided fixed restraint cally controlled. If a passive substrate made of (top), the ratio of the displace- metal or ceramic material, for example, is used, ment and the force of the one speaks of composite benders. The piezo bender can be changed. The displacement is reduced ceramic elements can be designed as individual by a factor of four while the L trans layers or as multilayer elements. blocking force is increased by a factor of four. Especially L Piezoelectric bending actuators function high forces can be attained trans according to the principle of thermostatic when using flat bending V V F+ plates or disks with a restraint P E bimetals. When a flat piezo contracting actua- V P E GND V P E bend on two sides instead of strip- tor is coupled to a substrate, the driving and F- V V F+ shaped benders P E contractionV P oEf the ceramic creates a bending GND V P E bend momentF- that converts the small transversal Fig. 12: Displacement of bending actuators

All-ceramic bending actuator for parallel circuiting PI Ceramic offers all- +VF L P E trans V V ceramic multilayer P E -V P E P E F P E 2 GND V P E l bendingL trans actuators GND +VF 3 f L P E P E ΔL = n d V V (Equation 7) trans P E V bend 2 P E with very low piezo -V P E V P E V F 8 hp P E F+ GND P E voltages in the V P E V P E GND P E GND P E bend ® VF- V P E V V PICMA Bender VF+ Fig. 13 P E VF+ P E GND P E V P E bend GND product line. Com- shear

V bend VF- P E F- All-ceramic bending actuator for serial circuiting posite benders can 2 V lf 3 be manufactured Pas E shear (Equation 8) GND ΔLbend = n d 31(GS) V 8 h 2 special versions, in P E +VF p P E V P E V V +V P E P E multilayer as well F P E -V P E GND P E V P E F +V P E (Operation against the polarization direction only V P E F GND P E -V P E P E V GND +VF P E V V asGND in single-layer F P E V possible with reduced voltage or fieldP Estrength, p. 49 ff.) P E GND ∆L V P E V P E P E trans

-V P E P E bend P E P E -VF P E GND P E P E F P E Fig. 14 V GNDversions or as a ∆L P E P E GND V P E P E GND V P E P E P E drive element with P E V GND P E GND P E P E V P E Two-layer composite bender with one-sided +V DuraAct actuators. +V P E F F GND P E P E V P E +VF V P E GND 2 shear P E P E P E P E displacement -VF -VF P E 3 lf 2RhRE (1+Rh) V ΔL = n d V bend 31(GS) 2 2 shear 2 2 P E V 8 h R R (1+R ) +0.25(1-Rshear R ) -V GND P E p h E h h E F +VF V (Equation 9) P E GNDV P E V P E GND P E ® P E Application DuraAct, PICMAP BenderE P E P E P E -V P E V FV P EV P E F+ V V P E Fig. 15 (customized versions) P E P E P E P E GND P E V P E GND V GND P E P E F- P E P E V P E GND V P E V P PE E GND GND P E V P PE E GND GND P E Fig. 18 Symmetrical three-layer composite bender for parallel circuiting P PE E P E ® P E The products of the PICMA radial P E

+V Bender line are all-ceramic lateral ∆Lshear F P E 2 V+VF bending actuators with two V +V P E 3 lf 1+Rh P E F GND V P P E E ΔLbend = n d31(GS) V piezoceramic elements that radial -VF V 2 2 3 axial E P E 8 hp 1+1.5R +0.75R +0.125R R P E -VF P E h h E h -V each consist of severallateral active P E F P E layers (multilayer actuators) V P E Fig. 16 (Equation 10) P E V P GND GND P E P E axial E P E

81 lo ng P E Equations according to Pfeifer, G.: Piezoelektrische lineare Stellantriebe. Scientific journal series of Chemnitz +V F P E University of Technology 6/1982 V P -V P E radial F radial radial lo ng GND V lateral lateral lateral P E P E PIEZO TECHNOLOGY axial E P E axial P E E

V axial E V P E GND GND V P E GND P P E P E P P P P E P P E P P E +V GND -V ∆L ∆L

lo ng lateral radial P E axial lo ng P E V GND lo ng V ∆L V P E GND P E E GND long E

P E P P ∆L P E P E +VGND GND V GNDV -V P P GND V V GND P P E E P P E E E P E P P E E P E V P E P E P E V P E V P P E E GND V V P E GND P E P E VGND GND GND V P E GND V GND P E V P E GND P E PP PP P E P P E E P P GND P E +V +V GND -V-V P P P E P P E E +V GND -V P V GND P E V V GNDGND P E E E E P GND V GND V E Manufacturing of Piezo Actuators

Basic Principles of Piezoelectricity

Multilayer Tape Technology The inner electrodes of all PICMA® actuators Multilayer Tape Technology ® The technologies for manufacturing piezo are ceramically insulated (fig. 19). PICMA Stack actuators decisively contribute to their func- actuators use a patented structure for this pur- Processing of the pose, in which a thin ceramic insulation tape piezo ceramic powder tion, quality and efficiency. PI Ceramic is pro- ficient in a wide range of technologies, from covers the electrodes without significantly limit Slurry preparation multilayer tape technology for PICMA® stack ing the displacement. and bending actuators, through glued stack The more fine-grained the ceramic material actuators for longitudinal and shear displace- Tape casting used, the thinner the multiple layers that can ments, up to the construction of crystalline be produced. In PICMA® Stack actuators, the Picoactuator® actuators, the DuraAct patch Screen printing of the inner height of the active layers is 60 µm and in electrodes transducers and piezoceramic tubes. PICMA® Bender actuators around 20 to 30 µm, PI Ceramic multilayer actuators, PICMA® for so that the benders can be operated with a Stacking, laminating short, are manufactured in large batches with very low nominal voltage of only 60 V. tape technology. First, the inner electrode pat- Isostatic pressing tern is printed on thin PZT tapes while still unsintered and these are then laminated into Cutting and green shaping a multilayer compound. In the subsequent cofiring process, the ceramic and the inner

Debindering and electrodes are sintered together. The finished sintering (cofiring) monolithic multilayer piezo element has no polymer content anymore. Grinding, lapping Hermetically encapsulated PICMA® were developed for applications in extremely high humidity and in rough industrial environments. They are equipped with corro- Application of the sion-resistant stainless-steel bellows, inert gas filling, termination electrodes glass feedthroughs and laser welding

Polarization

In the past years, the technologies for processing Assembly actuators in an unsintered state have been continuous ly developed. For this reason, round geometries or Final inspection PICMA® actuators with an inner hole can also be manufactured Ceramic insulation layer

0 100µm

Fig. 19 In PICMA® stack actuators, PICMA® multilayer actuators are produced in different shapes. Depending on the application, they can also be a ceramic insulation tape assembled with adapted ceramic or metal end pieces, additional coating, temperature sensors, etc. covers the inner electrodes

WWW.PICERAMIC.COM Pressing Technology Picoactuator® piezo actuators consist of crys Pressing Technology PICA stack actuators such as PICA Stack, talline layers with a thickness of 0.38 mm. Thru or Shear consist of thin piezoceramic In contrast to ceramic, the orientation of the spontaneous polarization is not determined by Processing of the plates with a standard layer thickness of piezo ceramic powder 0.5 mm. For manufacturing, piezoceramic a ferroelectric polarization but by the cutting cylinders or blocks are shaped with press direction in the monocrystal. All other process Mixing the raw materials ing technology, sintered and then separa- ing and mounting steps are similar to those for stacked PICA actuators. ted into plates with diamond wafer saws. Calcination, presintering Metal electrodes are attached with thin or thick film methods depending on the material, and Milling the ceramic is then polarized. Completely assembled stack actuators with a metal endpiece Spray drying Stack actuators are created by gluing the and SGS expansion sensor (left), plates together whereby a thin metal contact with stranded wires, temperature plate is placed between each two ceramic sensor and transparent FEP shrink Pressing and shaping plates in order to contact the attached elec- tubing (right) trodes. The contact plates are connected with Debindering and sintering each other in a soldering step, and the finished stack is then covered with a protective polymer Lapping, grinding, layer and possibly an additional shrink tubing. diamond slicing

Application of electrodes by screen printing or sputtering

Polarization

Mounting and assembling technology: Gluing, poss. ultrasonic drilling for inner hole, soldering, coating

Final inspection

The final processing of the piezoceramic plates manufactured with pressing technology is adapted to their future use. The figure shows different piezo actuator modules

PIEZO TECHNOLOGY DuraAct Patch Actuators and Transducers DuraAct patch actuators use piezoceramic contracting plates as their base product. Depend ing on the piezoceramic thickness, these plates are manufactured with pressing technology (>0.2 mm) or tape technology (0.05 to 0.2 mm). The plates are connected to form a composite using conductive fabric layers, positioning tapes, and polyimide cover tapes.

The lamination process is done in an autoclave in a vacuum, using an injection method. This results in completely bubble-free laminates of the highest quality.

The curing temperature profile of the autoclave Structured electrodes allow specific driving of tube actuators is selected so that a defined internal preload of the piezoceramic plates will result due to the different thermal expansion coefficients of the materials involved.

Piezo Tube Actuators The result of this patented technology are Piezo tube actuators are manufactured from robust, bendable transducer elements that can piezoceramic cylinders that were previously be manufactured in large batches. produced with the pressing technology. The outer diameter and the parallelism of the end- surface are precisely set through centerless cir- cular grinding and surface grinding. The inner hole is drilled with an ultrasonic method.

The metalization then is done with thin- or thick-layer electrodes, possibly accompanied by structuring of the electrodes with a laser ablation method.

In addition to the described procedure for manufacturing precision tubes with very narrow geometric tolerances, the more cost- efficient extrusion method is also available for small diameters.

Different shapes of DuraAct actuators with ceramic Laminated ceramic layers in a DuraAct plates in pressing and multilayer technology transducer arrangement (array)

WWW.PICERAMIC.COM Properties of Piezoelectric Actuators

Displacement Behavior

P S P S

P P rem rem In the PI and PI Ceramic data sheets, the free unipolar unipolar displacements of semi-bipolar semi-bipolar unipolar the actuators are unipolar bipolar bipolar given at nominal semi-bipolar semi-bipolar

S voltage. S rem bipolar rem bipolar -Ec Ec E -Ec Ec E Piezoelectric Defor- mation Coefficient (Piezo Modulus)

E E The gradient ΔS/ΔE E E c c between the two a) b) switchover points of the nonlinear Fig. 20: Displacement of ferroelectric piezo ceramics with different control amplitudes parallel to the hysteresis curves is direction of polarization direction. Large-signal curves as a function of the electrical field strength E defined as the a) electromechanical behavior of the longitudinal strain S, b) dielectric behavior of the polarization P piezoelectric large- signal deformation

Nonlinearity not possible to interpolate linearly from the coefficients d(GS) (fig. The voltage-dependent displacement curves nominal displacement to intermediate posi- 21). As the progres- of piezo actuators have a strongly nonlinear tions with a particular driving voltage. The sive course of the course that is subject to hysteresis due to the electromechanical and dielectric large-signal curves shows, these extrinsic domain contributions. It is therefore curves of piezo ceramics illustrate the charac- coefficients normally teristics (fig. 20). The origin of each graph is increase along with

S defined by the respective thermally depola the field amplitude rized condition. (fig. 22).

The shape of both bipolar large-signal curves is determined by the ferroelectric polar ity reversal process when the coercive field

strength EC is achieved in the opposing field. The dielectric curve shows the very large polarization changes at these switchover points. At the same time, the contraction of the ceramic after reversing the polarity turns into an expansion again, since the ΔS polarization and the field strength have the same orientation once more. This prop

E erty gives the electromechanical curve its ΔE characteristic butterfly shape. Without the electric field, the remnant polarizations

∆S (Equation 11) P /-P and the remnant strain S remain. d(GS) = rem rem rem ∆E Piezo actuators are usually driven unipolarly. A semi-bipolar operation increases the strain Fig. 21: Unipolar and semi-bipolar electromechanical amplitude while causing a stronger nonlinea curves of ferroelectric piezo ceramics and definition of rity and hysteresis which result from the the piezoelectric large-signal deformation coefficient increasing extrinsic domain portions of the d(GS) as the slope between the switchover points of a partial hysteresis curve displacement signal (fig. 21).

PIEZO TECHNOLOGY 2000 d PIC155 bipolar Estimation of the Expected Displacement 15

[pm/V] d15 PIC255 bipolar

(GS) d PIC153 unipolar If the values from fig. 22 are entered into d 33 d PIC151 unipolar the equations 3 to 10 (p. 43 – 45), the 1500 33 d PIC255 unipolar attainable displacement at a particular 33 d33 PIC252 unipolar piezo voltage can be estimated. The field -d31 PIC252 unipolar strength can be calculated from the lay- 1000 er heights of the specific component and

the drive voltage VPP. The layer thickness of the PI Ceramic standard products can be found starting on p. 46. 500

The free displacement of the components that can actually be attained depends on further factors such as the mechanical 0 0,0 0,5 1,0 1,52,0 2,5 preload, the temperature, the control fre- E PP [kV/mm] quency, the dimensions, and the amount of passive material. Fig. 22: Piezoelectric large-signal deformation coeffi

cients d(GS) for different materials and control modes at room temperature and with quasistatic control. With very small field amplitudes, the values of the coefficients match the material constants on p. 40

40%

disp d PIC155 bipolar

H 15 35% d PIC255 bipolar ΔL 15

d33 PIC151 unipolar 30% d33 PIC252/255 unipolar d PIC153 unipolar 25% 33

20%

15% Max Diff ΔL ΔL max 10%

0% U 0,0 0,5 1,0 1,52,0 2,5 E [kV/mm] PP

Fig. 23: The hysteresis value Hdisp is defined as the ratio Fig. 24: Displacement hysteresis Hdisp of various actua- between the maximum opening of the curve and the tor materials in open-loop, voltage-controlled operation maximum displacement for different drive modes at room temperature and with quasistatic control

Hysteresis Especially high values result for shear actua- In open-loop, voltage-controlled operation, the tors or with bipolar control. The reason for displacement curves of piezo actuators show these values is the increasing involvement a strong hysteresis (fig. 24) that usually rises of extrinsic polarity reversal processes in the with an increasing voltage or field strength. overall signal.

WWW.PICERAMIC.COM Fig. 25: Displacement of a piezo actuator when driven Fig. 26: Elimination of hysteresis and creep in a piezo with a sudden voltage change (step function). The creep actuator through position control causes approx. 1% of the displacement change per logarithmic decade

Creep Position Control Creep describes the change in the displace- Hysteresis and creep of piezo actuators can be ment over time with an unchanged drive volt eliminated the most effectively through posi- age. The creep speed decreases logarithmically tion control in a closed servo loop. To build over time. The same material properties that position-controlled systems, the PI Ceramic are responsible for the hysteresis also cause piezo actuators of the PICA Stack and PICA the creep behavior: Power product line can be optionally offered with applied strain gauges.

In applications with a purely dynamic control, ΔL(t) ≈ ΔL 1 + γ lg ( t ) t = 0.1s the hysteresis can be effectively reduced to 0.1s (Equation 12) values of 1 to 2% even with open-loop control by using a charge-control amplifier (p. 67).

t Time [s] ΔL(t) Displacement as a function of time [m]

ΔLt=0.1s Displacement at 0.1 seconds after the end of the voltage change [m] γ Creep factor, depends on the material properties (approx. 0.01 to 0.02, corres ponds to 1% to 2% per decade)

PIEZO TECHNOLOGY Temperature-Dependent Behavior

Properties of Piezoelectric Actuators

S S S

S rem S rem

S rem

E E E E E E c c c

Fig. 27: Bipolar electromechanical large-signal curve of piezo actuators at different temperatures. From left: behavior at low temperatures, at room temperature, at high temperatures

Below the Curie temperature, the temperature The cooler the piezo actuator, the greater the

dependence of the remnant strain and remnant strain Srem and the coercive field

the coercive field strength is decisive for the strength Erem (fig. 27). The curves become temperature behavior. Both the attainable increasingly flatter with decreasing tempera displacement with electric operation and tures. This causes the strain induced by a the dimensions of the piezoceramic element unipolar control to become smaller and change depending on the temperature. smaller even though the total amplitude of the bipolar strain curve hardly changes over wide temperature ranges. The lower the temperature, the greater the remnant strain. All in all, the piezo ceramic has a negative thermal 100% expansion coefficient, i.e., the piezo ceramic unipolar 0 ... 120 V becomes longer when it cools down. In compa- Relative displacement 80% rison: A technical ceramic contracts with a relatively low thermal expansion coefficient upon cooling. This surprising effect is stronger, the 60% more completely the piezo ceramic is polarized. bipolar -120 ... 120 V

40% Displacement as a Function of the Temperature

20% How much a key parameter of the piezo actuator changes with the temperature depends on the distance from the Curie temperature. 0% ® 1 10 100 1000 PICMA actuators have a relatively high Curie Temperature [K] temperature of 350°C. At high operating tem- Fig. 28: Relative decrease in the displacement using the peratures, their displacement only changes by example of a PICMA® Stack actuator in the cryogenic the factor of 0.05%/K. temperature range with different piezo voltages in relation to nominal displacement at room temperature

WWW.PICERAMIC.COM At cryogenic temperatures, the displacement Temperature Operating Range decreases. When driven unipolarly in the The standard temperature operating range of liquid-helium temperature range, piezo actua- glued actuators is -20 to 85°C. Selecting piezo tors only achieve 10 to 15% of the displace- ceramics with high Curie temperatures and ment at room temperature. Considerably high- suitable adhesives can increase this range. er displacements at lower temperatures can be Most PICMA® multilayer products are specified achieved with a bipolar drive. Since the coer- for the extended range of -40 to 150°C. With cive field strength increases with cooling (fig. special solders, the temperature range can be 27), it is possible to operate the actuator with increased so that special models of PICMA® higher voltages, even against its polarization actuators can be used between ‑271°C and direction. 200°C i.e. over a range of almost 500 K.

Dimension as a Function of the Temperature The temperature expansion coefficient of an all-ceramic PICMA® Stack actuator is approxi- 0.08 mately -2.5 ppm/K. In contrast, the additional metal contact plates as well as the adhesive layers in a PICA Stack actuator lead to a non- Thermal strain [%] 0.06 linear characteristic with a positive total coefficient (fig. 29). 0.04

If a nanopositioning system is operated in a 0.02 closed servo loop, this will eliminate tempera- PICMA® Stack ture drift in addition to the nonlinearity, hysteresis, and creep. The control reserve to be kept 0 for this purpose, however, reduces the usable PICA Stack / PICA Power displacement. -0.02

E = 1 kV/mm For this reason, the temperature drift is often no preload passively compensated for by a suitable selec- -0.04

tion of the involved materials, the actuator Measuring sequence types, and the system design. For example, all- -0.06 -100 -80 -60 -40 -20 020406080100 ceramic PICMA® Bender actuators show only a Temp. [°C] minimal temperature drift in the displacement Fig. 29: Temperature expansion behavior of PICMA® and direction due to their symmetrical structure. PICA actuators with electric large-signal control

PIEZO TECHNOLOGY Forces and Stiffnesses

Properties of Piezoelectric Actuators

Preload and Load Capacity Bending actuators, however, have stiffness E* Effective elasticity es of a few Newtons per millimeter, lower by module: The tensile strengths of brittle piezoceramic Linear increase and single-crystal actuators are relatively low, several orders of magnitude. In addition to the of a stress-strain with values in the range of 5 to 10 MPa. It is geometry, the actuator stiffness also depends curve of a sample therefore recommended to mechanically pre- on the effective elasticity module E*. Because body or actuator load the actuators in the installation. The pre- of the mechanical depolarization processes, made of the cor- the shape of the stress-strain curves (fig. 30) responding piezo- load should be selected as low as possible. ceramic material According to experience, 15 MPa is sufficient is similarly nonlinear and subject to hysteresis (fig. 30) to compensate for dynamic forces (p. 58); in as are the electromechanical curves (fig. 21). A Actuator cross- the case of a constant load, 30 MPa should not In addition, the shape of the curve depends on sectional area be exceeded. the respective electrical control conditions, the l Actuator length drive frequency, and the mechanical preload k Actuator stiffness A Lateral forces primarily cause shearing stress so that values in a range from 25 to 60 GPa can ΔL Nominal displace- 0 es in short actuators. In longer actuators with be measured. As a consequence, it is difficult ment a larger aspect ratio, bending stresses are to define a generally valid stiffness value. F Blocking force max also generated. The sum of both loads yield k Load stiffness L the maximum lateral load capacities that are S F Effective force eff given for the PICA shear actuators in the data

sheet. However, it is normally recommended ΔT to protect the actuators against lateral forces T by using guidings. small signal Stiffness large signal ΔS

The actuator stiffness kA is an important param eter for calculating force generation, resonant frequency, and system behavior. Piezoceramic stack actuators are characterized by very high stiffness values of up to several hundred newtons per micrometer. The following equation is used for calculation: Fig. 30: Stress-strain curve of a piezoceramic stack actuator when driven with a high field strength, in E * A (Equation 13) kA Stack = order to prevent mechanical depolarizations. The linear l increase ΔT/ΔS defines the effective large-signal

elasticity module E*(GS). Small-signal values of the elasticity modules are always greater than large-signal values

Limitations of the Preload The actuator begins to mechanically depolarize at only a few tens of MPa. A large-signal control repolarizes the actuator; on the one hand, this causes the induced displacement to increase but on the other hand, the effective capacity and loss values increase as well, which is detrimental to the lifetime of the component.

A pressure preload also partially generates tensile stress (p. 68). For this reason, when very high preloads are used, the tensile strength can locally be exceeded, resulting in a possible reduction of lifetime or damage to the actuator. The amount of the possible preload is not determined by the strength of the ceramic material. Piezo actuators attain compressive strengths of more than 250 MPa.

WWW.PICERAMIC.COM For specifying piezo actuators, the quasistat Typical Load Cases Δl

ic large-signal stiffness is determined with ΔL 0 The actuator stiffness kA can be taken from the simultaneous control with a high field strength working graph (fig. 32): or voltage and low mechanical preload. As a

Fmax (Equation 14) result, an unfavorable operating case is con- kA = sidered, i.e. the actual actuator stiffness in an ∆L0 120 V application is often higher. It corresponds to the inverted slope of the curve. 100 V The actuator makes it possible to attain any The adhesive layers in the PICA actuators only 80 V displacement/force point on and below the 60 V reduce the stiffness slightly. By using opti nominal voltage curve, with a corresponding 40 V mized technologies, the adhesive gaps are only load and drive. 20 V a few micrometers high so that the large-signal

FF stiffness is only approx. 10 to 20% lower than max Displacement without Preload, that of multilayer actuators without adhesive Load with Low Stiffness layers. Fig. 32: Working graph of a If the piezo actuator works against a spring PICMA® stack actuator with The actuator design has a much stronger influ- force, its induced displacement decreases unipolar operation at different ence on the total stiffness, e.g. spherical end because a counterforce builds up when the voltage levels piece with a relatively flexible point contact to spring compresses. In most applications of the opposite face. piezo actuators, the effective stiffness of the

load kL is considerably lower than the stiffness Force Generation and Displacement kA of the actuator. The resulting displacement The generation of force or displacement in ΔL is thus closer to the nominal displacement

the piezo actuator can best be understood ΔL0: from the working graph (fig. 32). Each curve k is determined by two values, the nominal dis- ∆L ≈ ∆L A (Equation 15) 0 k + k placement and the blocking force. A L The displacement/force curve in fig. 31 on the Nominal Displacement right is called the working curve of the actuator/spring system. The slope of the working The nominal displacement ΔL0 is specified in the technical data of an actuator. To determine curve Feff /ΔL corresponds to the load stiffness

this value, the actuator is operated freely, i.e. kL. without a spring preload, so that no force has to be produced during displacement. After the corresponding voltage has been applied, the

displacement is measured. Δl Δl

Blocking Force ΔL 0

The blocking force Fmax is the maximum A ΔL ΔL V force produced by the actuator. This force is 0

achieved when the displacement of the actua- B k k tor is completely blocked, i.e. it works against L L a load with an infinitely high stiffness. VFF V 0 V F F Since such a stiffness does not exist in reality, 0 eff max the blocking force is measured as follows: The l k k actuator length before operation is recorded.O A A The actuator is displaced without a load to the nominal displacement and then pushed back Fig. 31: Load case with low to the initial position with an increasing exter- spring stiffness without preload: A B Drawing, displacement/voltage nal force. The force required for this purpose graph, working graph with amounts to the blocking force. working curve 91

PIEZO TECHNOLOGY Δl Δl Force Generation Without Preload, Load with High Stiffness ΔL ΔL 0 0 When large forces are to be generated, the

A load stiffness kL must be greater than that of

the actuator kA (fig. 33):

k kL L B V ≈ (Equation 16) ΔL ΔL 0 Feff Fmax 0 V k kA + kL V L F V F F 0 eff max The careful introduction of force is especially Fig. 33: The actuator works without a preload against a important in this load case, since large me k k A A load with a high stiffness. From left: Drawing, displace- chanical loads arise in the actuator. In order to ment/voltage graph, working graph with working curve achieve long lifetime, it is imperative to avoid local pull forces (p. 54).

AB Nonlinear Load Without Preload, Opening and Closing of a Valve Δl Δl As an example of a load case in which a nonlinear working curve arises, a valve control is

ΔL0 ΔL0 sketched in fig. 34. The beginning of the dis- A placement corresponds to operation without V ΔL ΔL 0 a load. A stronger opposing force acts near B the valve closure as a result of the fluid flow. When the valve seat is reached, the displacement is almost completely blocked so that only 0 V V F the force increases. V0 Feff Fmax

Fig. 34: Nonlinear load without preload: Drawing, Large Constant Load displacement/voltage graph, working graph with If a mass is applied to the actuator, the weight working curve force FV causes a compression of the actuator. The zero position at the beginning of the sub- AB sequent drive signal shifts along the stiffness Δl Δl curve of the actuator. No additional force occurs during the subsequent drive signal

ΔL0 change so that the working curve approximately corresponds to the course without preload. A V0 ΔL’ 0 An example of such an application is damping B the oscillations of a machine with a great mass.

~ΔL0 V F F m V0 v

0 V F’ F’max

Fig. 35: Load case with large mass: Drawing, displacement/voltage graph, working graph with working curve

A B

Example: The stiffness considerably increases when the actuator is electrically operated with a high impedance, as is the case with charge-control amplifiers (p. 67). When a mechanical load is applied, a charge is generated that cannot flow off due to the high impedance and therefore generates a strong opposing field which increases the stiffness.

WWW.PICERAMIC.COM Spring Preload Δl Δl

ΔL ΔL If the mechanical preload is applied by a rela- 0 0

tively soft spring inside a case, the same shift A takes place on the stiffness curve as when a ΔL’ 0 V mass is applied (fig. 36). With a control volt 0 age applied, however, the actuator generates K F VF L v V k a small additional force and the displace- 0 F L B V ment decreases somewhat in relation to the F’ 0 V F’ F’ case without load due to the preload spring eff max

(Equation 15). The stiffness of the preload Fig. 36: Load case with spring preload: Drawing, spring should therefore be at least one order displacement/voltage graph, working graph with of magnitude lower than that of the actuator. working curve

A B Actuator Dimensioning and Energy Consideration In the case of longitudinal stack actuators, the actuator length is the determining variable for stiffness are equal. The light blue area in the

the displacement ΔL0. In the case of nominal working graph corresponds to this amount. field strengths of 2 kV/mm, displacements of A longitudinal piezo actuator can perform 0.10 to 0.15% of the length are achievable. The approx. 2 to 5 mJ/cm³ of mechanical work and cross-sectional area determines the blocking a bending actuator achieves around 10 times

force Fmax. Approximately 30 N/mm² can be lower values. achieved here. Efficiency and Energy Balance of a Piezo The actuator volume is thus the determining Actuator System parameter for the attainable mechanical energy E =(ΔL F )/2. The calculation and optimization of the total mech 0 max efficiency of a piezo actuator system depends

The energy amount Emech, that is converted on the efficiency of the amplifier electro- from electrical to mechanical energy when nics, the electromechanical conversion, the an actuator is operated, corresponds to the mechanical energy transfer, and the possible area underneath the curve in fig. 37. How energy recovery. The majority of electrical

ever, only a fraction Eout of this total amount and mechanical energies are basically reac can be transferred to the mechanical load. The tive energies that can be recovered minus the mechanical system is energetically optimized losses, e.g. from heat generation. This makes when the area reaches its maximum. This case it possible to construct very efficient piezo occurs when the load stiffness and the actuator systems, especially for dynamic applications.

Δl Fig. 37: Mechanical energy amounts in the working graph of a piezo actua-

tor with spring load: Emech converted ΔLo mechanical energy and Eout output mechanical energy

ΔL

Eout

Emech

F F F 93 eff max

PIEZO TECHNOLOGY Dynamic Operation

Properties of Piezoelectric Actuators

This behavior is desired especially in dynamic applications, such as scanning microscopy, image stabilization, valve controls, generat ing shockwaves, or active vibration damping. When the control voltage suddenly increases, a piezo actuator can reach its nominal displacement in approximately one third of the period

of its resonant frequency f0 (fig. 38). Fig. 38: Displacement of an undamped piezo system after a voltage jump. The nominal 1 displacement is attained after around one third of the period length Tmin ≈ (Equation 19) 3f 0 In this case, a strong overshoot occurs which can be partially compensated for with corre- Resonant frequency m Mass of the piezo sponding control technology. actuator The resonant frequencies specified for longitu- Example: A unilaterally clamped piezo actuator M Additional load dinal stack actuators apply to operation when with a resonant frequency of f0 = 10 kHz can φ Phase angle not clamped on both sides. In an arrangement reach its nominal displacement in 30 μs. [degree] with unilateral clamping, the value has to be f Resonant frequen- 0 divided in half. Dynamic Forces cy without load [Hz] The reducing influence of an additional load on With suitable drive electronics, piezo actuators Resonant frequen- can generate high accelerations of several ten f0' the resonant frequency can be estimated with cy with load [Hz] the following equation: thousand m/s². As a result of the inertia of pos- Dynamic force [N] Fdyn sible coupled masses as well as of the actua- m Effective mass of meff eff f ‘ = f (Equation 17) tors themselves, dynamic pull forces occur that the piezo stack 0 0√ m ‘ eff have to be compensated for with mechanical actuator [kg] preloads (p. 54 ff). meff' Effective mass of In positioning applications, piezo actuators the piezo stack are operated considerably below the resonant In sinusoidal operation, the maximum forces actuator with load frequency in order to keep the phase shift [kg] can be estimated as follows: between the control signal and the displace- ΔL Displacement ment low. The phase response of a piezo 2 ΔL 2 (Equation 20) (peak-peak) [m] Fdyn ≈ ±4π meff' f system can be approximated by a second 2 f Control frequency [Hz] order system: Example: The dynamic forces at 1 000 Hz,

f 2 μm displacement (peak-to-peak) and 1 kg ≈ 2 arctan (Equation 18) φ mass are approximately ±40 N. f0 How Fast Can a Piezo Actuator Expand? M Fast response behavior is a characteristic feature of piezo actuators. A fast change in the operating voltage causes a fast position change. m m

m m 3 3 meff ≈ / meff '≈ / + M

Fig. 39: Calculation of the pi_120137_2xneue_illus.indd effective1 masses meff and meff’ 30.03.12 13:40 of a unilaterally clamped piezo stack actuator without and with load

WWW.PICERAMIC.COM Electrical Operation

Properties of Piezoelectric Actuators

Operating Voltage large-signal conditions, it is often sufficient to add C Capacitance [F] PI Ceramic offers various types of piezo actua- a safety factor of 70% of the small-signal capaci tance (fig. 40). n Number of ceramic tors with different layer thicknesses. This layers in the actuator results in nominal operating voltages from T Permittivity = The small-signal capacitance C of a stack ε33 60 V for PICMA® Bender actuators to up to ε /ε (cf. table actuator can be estimated as for a capacitor: 33 0 1 000 V for actuators of the PICA series. p. 40) [As/Vm] A Actuator cross- C = n ε T A (Equation 21) 33 sectional area [m²] Electrical Behavior h L l Actuator length [m] At operating frequencies well below the reso- Layer thickness in the With a fixed actuator length l the following hL nant frequency, a piezo actuator behaves like actuator [m] holds true with n ≈ l/hL: a capacitor. The actuator displacement is pro- I Current [A] T A (Equation 22) portional to the stored electrical charge, as a C = l ε 33 Q Charge [C, As] 2 first order estimate. hL V Voltage on the piezo Accordingly, a PICMA® stack actuator with a actuator [V] The capacitance of the actuator depends on layer thickness of 60 µm has an approx. 70 t Time [s] the area and thickness of the ceramic as well as times higher capacitance than a PICA stack the material properties. In the case of actuators actuator with the same volume and a layer that are constructed of several ceramic layers thickness of 500 µm. The electric power con- electrically connected in parallel, the capaci- sumption P of both types is roughly the same tance also depends on the number of layers. due to the relationship P ~ C V2 since the oper In the actuators there are leakage current ating voltage changes proportionally to the losses in the μA range or below due to the high layer thickness. internal resistance. Positioning Operation, Static and with Low Dynamics

Electrical Capacitance Values ˝L When electrically charged, the amount of Polarisation axis The actuator capacitance values indicated energy stored in a piezo actuator is around ∆ L C1 1 2 f f in the technical data tables are small-signal E = CV . Every change in the charge (and (Z) m n 2 3 values, i.e. measured at 1 V, 1 000 Hz, 20°C, therefore in displacement) is connected with L1 C0 unloaded. The capacitance of piezoceramics a charge transport that requires the following 6 + L o P changes with the voltage amplitude, the tem- current I: 5 perature and the mechanical load, to up to 2(Y) 4 0 V 1 Impendanz Z 200% of the unloaded, small-signal, room- I = dQ = C · dV (Equation 23) (X)

temperature value. For calculations under dt dt Frequenz f

Slow position changes only require a low cur- 1 rent. To hold the position, it is only necessary Fig. 41: Structure and con- ODD to compensate for the very low leakage cur- tacting of a stacked piezo (1) TH P OD 3 rents, even in the case of very high loads. The translator TH 6 (Z) IDID 3 5 power consumption is correspondingly low. – – – – 6 2 – – – – + + + + P – Even when suddenly disconnected from the – – – – – + + + + P – L + + – – – – electrical source, the charged actuator will not + – 5 + + + + 2(Y) – + + make a sudden move. The discharge and thus + + + + +

– – – – – – – – – 4 – 1 +

(X) + the return to zero position will happen con – + + + + + + + + + U (2) tinuously and very slowly. (1) (2) (3)

–

L P C/m2 L P TH W Ps TH P W O2 Pr ®

Fig. 40: Relative change of capacitance of a PICMA Pb + +

– – + 95 Stack actuator measured at 1 kHz unipolar sine signal. Ti, Zr

L L TH – – -Ec – Ec

+ + + +

The electrical capacitanceTH increases along with the – + – L

P TH P P

– E kV/cm – operating voltage and temperature – W W W 3 + +

1(r) Radialschwingung

PIEZO TECHNOLOGY -Ps Pr

L Dickenschwingung P

3 3 Längsschwingung 3(r) 1 3 L OD TH TH Dickenschwingung P 2 1(r) Radialschwingung

Dickenschwingung 1

3 TH P 6 ID TH

5 2

Längsschwingung

Dickenschwingung

Radialschwingung Operation with Position Control cooling measures may be necessary. For The average current, peak these applications, PI Ceramic also offers piezo current and small-signal In closed-loop operation, the maximum safe bandwidth for each piezo operating frequency is also limited by the actuators with integrated temperature sensors amplifier from PI can be phase and amplitude response of the system. to monitor the ceramic temperature. found in the technical Rule of thumb: The higher the resonant fre- Continuous Dynamic Operation data. quency of the mechanical system, the higher P Power that is To be able to operate a piezo actuator at the converted into the control bandwidth can be set. The sensor desired dynamics, the piezo amplifier must heat [W] bandwidth and performance of the servo (digi- meet certain minimal requirements. To assess tan δ Dielectric loss tal or analog, filter and controller type, band- these requirements, the relationship between factor (ratio of width) also limit the operating bandwidth of amplifier output current, operating voltage of active power to the positioning system. reactive power) the piezo actuator, and operating frequency f Operating has to be considered. frequency [Hz] Power Consumption of the Piezo Actuator C Actuator In dynamic applications, the power consump- Driving with Sine Functions capacitance [F] tion of the actuator increases linearly with The effective or average current I of the ampli- Driving voltage a Vpp the frequency and actuator capacitance. A (peak-to-peak) [V] fier specified in the data sheets is the crucial compact piezo translator with a load capaci- parameter for continuous operation with a sine ty of approx. 100 N requires less than 10 Watt wave. Under the defined ambient conditions, of reactive power with 1 000 Hz and 10 μm the average current values are guaranteed stroke, whereas a high-load actuator (>10 kN without a time limit. load) requires several 100 Watt under the same (Equation 25) conditions. Ia ≈ ƒ · C · Vpp

Heat Generation in a Piezo Element in Equation 26 can be used for sinusoidal single Dynamic Operation pulses that are delivered for a short time only. The equation yields the required peak current Since piezo actuators behave like capacitive for a half-wave. The amplifier must be capable loads, their charge and discharge currents of delivering this peak current at least for half increase with the operating frequency. The of a period. For repeated single pulses, the thermal active power P generated in the actua- time average of the peak currents must not tor can be estimated as follows: exceed the permitted average current. π 2 (Equation 24) P ≈ · tanδ · ƒ · C · Vpp (Equation 26) 4 Imax ≈ ƒ · π · C · Vpp For actuator piezo ceramics under small-signal conditions, the loss factor is on the order of 0.01 to 0.02. This means that up to 2% of the electrical power flowing through the actuator is converted into heat. In the case of large- signal conditions, this can increase to consid

erably higher values (fig. 42). Therefore, the 0,30 tan δ maximum operating frequency also depends PIC255 Scher bipolar PIC255 longitudinal bipolar on the permissible operating temperature. 0,25 PIC151 longitudinal unipolar At high frequencies and voltage amplitudes, PIC252/255 longitudinal unipolar 0,20

Fig. 42: Dielectric loss factors tan δ for different 0,15 materials and control modes at room temperature and with quasistatic control. The conversion between 0,10 voltage and field strength for specific actuators is done with the layer thicknesses that are given starting on 0,05 p. 46. The actual loss factor in the component depends on further factors such as the mechanical preload, the 0,00 temperature, the control frequency, and the amount of 0,0 0,5 1,0 1,5 2,0 2,5 [kV/mm] passive material. EPP

WWW.PICERAMIC.COM

pi_120137_illu_10.indd 1 11.04.12 08:24 Driving with Triangular Waveform Switching Applications, Pulse-Mode I Average current Operation a Both the average current and the peak current of the amplifier of the amplifier are relevant for driving a piezo The fastest displacement of a piezo actuator (source / sink) [A]

actuator with a symmetrical triangular wave- can occur in 1/3 of the period of its resonant Imax Peak current of the form. The maximum operating frequency of an frequency (p. 58). Response times in the amplifier (source / amplifier can be estimated as follows: microsecond range and accelerations of more sink) [A] f Operating frequency 1 I than 10 000 g are feasible, but require particu- a [Hz] f ≈ · (Equation 27) larly high peak current from the piezo ampli- max f Maximum operating C V max pp fier. frequency [Hz] A secondary constraint that applies here is that C Actuator capaci- This makes fast switching applications such as the amplifier must be capable of delivering at tance, large signal injection valves, hydraulic valves, switching least I = 2 I for the charging time, i.e. for half [Farad (As/V)] max a relays, optical switches, and adaptive optics V Driving voltage of the period. If this is not feasible, an appro- pp possible. (peak-to-peak) [V] priately lower maximum operating frequency t Time to charge piezo should be selected. For amplifiers which can- For charging processes with constant current, actuator to Vpp [s] not deliver a higher peak current or not for a the minimal rise time in pulse-mode operation The small-signal band- sufficient period of time, the following equa can be determined using the following equa- width, average current and peak current for each tion should be used for calculation instead: tion: piezo amplifier from PI can

1 I V be found in the technical a pp f max≈ · (Equation 28) t ≈ C · (Equation 29) data. 2 · C V I pp max Signal Shape and Bandwidth As before, the small-signal bandwidth of the amplifier is crucial. The rise time of the ampli- In addition to estimating the power of the fier must be clearly shorter than the piezo piezo amplifier, assessing the small-signal response time in order not to have the ampli- bandwidth is important with all signal shapes fier limit the displacement. In practice, as a that deviate from the sinusoidal shape. rule-of-thumb, the bandwidth of the amplifier The less the harmonics of the control signal should be two- to three-fold larger than the are transferred, the more the resulting shape resonant frequency. returns to the shape of the dominant wave, i.e. Advantages and Disadvantages of Position the sinusoidal shape. The bandwidth should Control therefore be at least ten-fold higher than the A closed-loop controller always operates in the basic frequency in order to prevent signal bias linear range of voltages and currents. Since the resulting from the nontransferred harmonics. peak current is limited in time and is therefore In practice, the limit of usable frequency por- nonlinear, it cannot be used for a stable selec- tions to which the mechanical piezo system tion of control parameters. As a result, posi can respond is the mechanical resonant fre- tion control limits the bandwidth and does not quency. For this reason, the electrical control allow for pulse-mode operation as described. signal does not need to include clearly higher In switching applications, it may not be pos- frequency portions. sible to attain the necessary positional stability and linearity with position control. Lineariza- Fig. 43: PICMA® actuators tion can be attained e.g. by means of charge- with patented, meander- controlled amplifiers (p. 67) or by numerical shaped external electrodes for correction methods. up to 20 A charging current

PIEZO TECHNOLOGY Ambient Conditions

Properties of Piezoelectric Actuators

Piezo actuators are suitable for operation in Magnetic Fields In case of questions very different, sometimes extreme ambient regarding use in spe- Piezo actuators are excellently suited to be conditions. Information on use at high tem cial environments, used in very high magnetic fields, e.g. at cryo- peratures of up to 200°C as well as in cryo ® please contact genic temperatures as well. PICMA actuators genic environments is found starting on p. 52. are manufactured completely without ferro- [email protected] or magnetic materials. PICA stack actuators are [email protected] Vacuum Environment optionally available without ferromagnetic Dielectric Stability components. Residual magnetisms in the range of a few nanotesla have been measured According to Paschen's Law, the breakdown for these products. voltage of a gas depends on the product of the pressure p and the electrode gap s. Air has Gamma Radiation very good insulation values at atmospheric ® pressure and at very low pressures. The mini- PICMA actuators can also be operated in high- mum breakdown voltage of 300 V corresponds energy, short-wave radiation, which occurs, for to a ps product of 1000 Pa mm. PICMA® Stack example, with electron accelerators. In long- actuators with nominal voltages of consider term tests, problem-free use with total doses ably less than 300 V can therefore be operated of 2 megagray has been proven. at any intermediate pressure. In order to prevent breakdowns, PICA piezo actuators with Environments with High Humidity nominal voltages of more than 300 V, however, When piezo actuators are operated in dry envi- should not be operated or only be driven at ronments, their lifetime is always higher than strongly reduced voltages when air is in the in high humidity. When the actuators are oper pressure range of 100 to 50 000 Pa. ated with high-frequency alternating voltages, they self-heat, thus keeping the local moisture Outgassing very low. The outgassing behavior depends on the Continuous operation at high DC voltages in a design and construction of the piezo actuators. damp environment can damage piezo actua- PICMA® actuators are excellently suited to use tors (p. 63). This especially holds true for the in ultrahigh vacuums, since they are manu actuators of the PICA series, since their active factured without polymer components and can electrodes are only protected by a polymer be baked out at up to 150°C. UHV options with coating that can be penetrated by humidity. minimum outgassing rates are also offered for The actuators of the PICMA® series have an different PICA actuators. all-ceramic insulation, which considerably improves their lifetime in damp ambient con- Inert Gases ditions compared to polymer-coated actuators Piezo actuators are suitable for use in inert (p. 63). gases such as helium, argon, or neon. How ever, the pressure-dependent flashover Liquids resistances of the Paschen curves must also Encapsulated PICMA® or specially encased be observed here as well. The ceramic-insu PICA actuators are available for use in liquids. lated PICMA® actuators are recommended for For all other actuator types, direct contact with this use, since their nominal voltage is below liquids should be avoided. Highly insulating the minimum breakdown voltages of all inert liquids can be exceptions to this rule. Normal- gases. For PICA actuators with higher nomi- ly, however, the compatibility of the actuators nal voltages, the operating voltage should be with these liquids must be checked in lifetime decreased in particular pressure ranges to tests. reduce the flashover risk.

WWW.PICERAMIC.COM Reliability of PICMA® Multilayer Actuators

Properties of Piezoelectric Actuators

Lifetime when Exposed to DC Voltage In nanopositioning applications, constant voltages are usually applied to the piezo actuator for extended periods of time. In the DC operating mode, the lifetime is influenced mainly by atmospheric humidity.

If the humidity and voltage values are very high, chemical reactions can occur and release hydrogen molecules which then destroy the ceramic composite by embrittling it.

All-Ceramic Protective Layer The patented PICMA® design suppresses these reactions effectively. In contrast to coat ing made just of polymer, the inorganic ceram ic protective layer (p. 46) prevents the internal electrodes from being exposed to water mol ecules and thus increases the lifetime by sever al orders of magnitude (fig. 44). Fig. 44: Results of an accelerated lifetime test with increased humidity (test conditions: PICMA® Stack and polymer-coated actuators, dimensions: 5 x 5 x 18 mm³, 100 V DC, 22 °C, Quasi-static Conditions: Accelerated Lifetime 90% RH) Test Due to their high reliability, it is virtually im Calculation of the Lifetime when Exposed to Important: possible to experimentally determine the DC Voltage Decreasing voltage lifetime of PICMA® actuators under real Elaborate investigations have been done to values are associated application conditions. Therefore, tests under develop a model for calculation of the lifetime with exponential extreme load conditions are used to estimate of PICMA® Stack actuators. The following fac- increases of the lifetime. the lifetime: Elevated atmospheric humidity tors need to be taken into account under actual The expected lifetime at and simultaneously high ambient tempera application conditions: Ambient temperature, 80 V DC, for example, is 10 times higher than at tures and control voltages. relative atmospheric humidity, and applied 100 V DC. voltage. Fig. 44 shows the results of a test that was This calculation can also be used to optimize a conducted at a much increased atmospheric The simple formula new application with humidity of 90% RH at 100 V DC and 22°C. The (Equation 30) regard to lifetime as MTTF = AU · AT · AF extrapolated mean lifetime (MTTF, mean time early as in the design allows the quick estimation of the average to failure) of PICMA® actuators amounts to phase. A decrease in the lifetime in hours. The factors A as a function driving voltage or con- more than 400000 h (approx. 47 years) while U of the operating voltage, A for the ambient trol of temperature and comparative actuators with polymer coating T temperature and A for the relative atmos atmospheric humidity by have an MTTF of only approx. one month F protective air or encap- pheric humidity can be read from the diagram under these conditions. sulation of the actuator (fig. 45). can be very important in Tests under near-realistic conditions confirm or this regard. even surpass these results.

PIEZO TECHNOLOGY Fig. 45: Diagram for calculat ing the lifetime of PICMA® stack actuators when exposed to DC voltage. For continuous operation at 100 V DC and 75% atmospheric humidity (RH) and an ambient tempera ture of 45°C, the following values can be read from the diagram: AF=14 (humidity, blue curve), AT=100 (tempera ture, red curve), and AU=75 (operating voltage, black curve). The product results in a mean lifetime of 105 000 h, more than 11 years

Lifetime in Dynamic Continuous Operation ment. In recent performance and lifetime tests Cyclic loads with a rapidly alternating electrical carried out by NASA, PICMA® actuators still field and high control voltages (typically produced 96% of their original performance >50 Hz; >50 V) are common conditions for after 100 billion (1011 ) cycles. Therefore, they applications such as valves or pumps. Piezo were chosen among a number of different actuators can reach extremely high cycles-to- piezo actuators for the science lab in the Mars Fig. 46: The patented PICMA® failure under these conditions. rover "Curiosity". (Source: Piezoelectric multi actuator design with its defined slots preventing The most important factors affecting the life- layer actuator life test. IEEE Trans Ultrason uncontrolled cracking due time of piezo actuators in this context are the Ferroelectr Freq Control. 2011 Apr; Sherrit et al. to stretching upon dynamic Jet Propulsion Laboratory, California Institute control is clearly visible electrical voltage and the shape of the signal. The impact of the humidity, on the other hand, of Technology, Pasadena, CA, USA) is negligible because it is reduced locally by the warming-up of the piezo ceramic. Patented Design Reduces the Mechanical Stress Ready for Industrial Application: PICMA® actuators utilize a special patented 1010 Operating Cycles design. Slots on the sides effectively prevent Tests with very high control frequencies excessive increases of mechanical tensile demonstrate the robustness of PICMA® piezo stresses in the passive regions of the stack actuators. Preloaded PICMA® actuators with and the formation of un-controlled cracks (fig. dimensions of 5 × 5 × 36 mm3 were loaded at room temperature and compressed air cooling 46) that may lead to electrical breakdowns and with a sinusoidal signal of 120 V unipolar volt thus damage to the actuator. Furthermore, the age at 1157 Hz, which corresponds to 108 cycles patented meander-shaped design of the exter- daily. Even after more than 1010 cycles, there nal contact strips (fig. 43) ensures all internal was not a single failure and the actuators electrodes have a stable electrical contact even showed no significant changes in displace- at extreme dynamic loads.

WWW.PICERAMIC.COM Piezo Electronics for Operating Piezo Actuators

Characteristic Behavior of Piezo Amplifiers

Fast step-and-settle or slow velocity with high constancy, high positional stability and resolution as well as high dynamics – the requirements placed on piezo systems vary greatly and need drivers and controllers with a high degree of flexibility. The control electronics play a key role in the performance of piezoelectric actuators and nanopositioning systems. Ultra-low-noise, high-stability linear amplifiers are essential for precise positioning, because piezo actuators respond to the smallest changes in the control voltage with a displacement. Noise or drifting must be avoided as much as possible. The prerequisite for the high-dynamics displacement of the actuator is for the voltage source to provide sufficient current to charge the capacitance. amplifier does not overheat, which could cau- Fig. 47: Amplifier frequency se distortions of the sine wave. The amplifier response curve, determined with different piezo loads, Power Requirements for Piezo Operation continuously provides the output voltage even capacitance values in µF. The operating limit of an amplifier with a given over a long time. This amplifier response curve Control signal sine, operation piezo actuator depends on the amplifier power, cannot be used for peak values that are only period >15 min, 20°C the amplifier design and the capacitance of available for a short period. the piezo ceramics (cf. p. 60 – 61). In high- The curves refer to open-loop operation; in dynamics applications, piezo actuators require closed-loop operation, other factors limit the high charge and discharge currents. The peak dynamics. current is of special importance, particularly for sinusoidal operation or pulse operation. Piezo Setting the Operating Voltage amplifiers from PI are therefore designed so After the operating limit of the amplifier has that they can output and sink high peak cur- been reached, the amplitude of the control rents. If an amplifier is operated with a capaci voltage must be reduced by the same propor- tive load and frequency at which it can no tion as the output voltage falls, if the frequen- longer produce the required current, the out- cies continue to increase. This is important put signal will be distorted. As a result, the full because the current requirement continuously displacement can no longer be attained. increases along with the frequency. Otherwise, Amplifier Frequency Response Curve the output signal will be distorted. The operating limits of each amplifier model Example: The E-503 (E-663) amplifier can drive are measured with different piezo loads a 23 µF piezo capacitance with a voltage depending on the frequency and output volta- swing of 100 V and a maximum frequency of ge and are graphically displayed as amplifier approximately 15 Hz (with sine wave excita response curves to make the selection easier. tion). At higher frequencies the operating limit The measurements are performed after 15 decreases, e.g. to 80 V at 20 Hz. In order to minutes of continuous operation (piezo and obtain a distortion-free output signal at this amplifier) at room temperature. In cold condi- frequency, the control input voltage must be tion after power up, more power can be briefly reduced to 8 V (voltage gain = 10). available.

The power amplifier operates linearly within its operating limits so that the control signal is amplified without distortion. In particu- 101 lar, no thermal limitation takes place, i.e. the

PIEZO TECHNOLOGY Solutions for High-Dynamics Operation

Piezo Electronics for Operating Piezo Actuators

Switching Amplifiers with Energy Recovery a piezo is discharged and makes the energy Piezo actuators are often used for an especially available again for the next charging operation. precise materials processing, for example in This permits energy savings of up to 80% to be mechanical engineering for fine positioning in realized. Furthermore, the amplifier does not milling and turning machines. These require heat up as much and thus influences the actual high forces as well as dynamics. The piezo application less. actuators are correspondingly dimension Unlike conventional class D switching ampli- ed for high forces; i.e. piezo actuators with a fiers, PI switching amplifiers for piezo elements high capacity are used here. Particularly high are current- and voltage-controlled. Product currents are required to charge and discharge examples are the E-617 for PICMA® actuators them with the necessary dynamics. The control and E-481 for the PICA actuator series. of valves also requires similar properties. Protection of the Piezo Actuator through Energy Recovery Minimizes the Energy Con- sumption in Continuous Operation Overtemperature Protection Since these applications frequently run around In continuous operation, the heat development the clock, seven days a week, the energy con- in the piezo actuator is not negligible (p. 60). sumption of the amplifier is particularly impor- Corresponding electronics can therefore evalu- tant. For this purpose, PI offers switching ate the signals of a temperature sensor on the amplifier electronics with which the pulse piezo. This protects the ceramic from overheat width of the control signal is modulated (PWM) ing and depolarization. and the piezo voltage is thereby controlled. This results in an especially high efficiency. Valid patents In addition, a patented circuitry for energy German patent no. 19825210C2 recovery is integrated: this stores part of the International patent no. 1080502B1 returning energy in a capacitive store when US patent no. 6617754B1

Fig. 48: Piezo 25 actuator in a case with connections for temperature 80 20 sensor and cool ing air 60 15

40 10 Efficiency in % Efficiency in

20 Power consumption in W 5

0 0 020406080100 0 500 1000 1500 2000 Output power, relative to max. in % Frequency in Hz Switching amplifier Linear amplifier Switching amplifier Linear amplifier

Fig. 49: Thanks to their patented energy recovery Fig. 50: Power consumption of a piezo amplifier with system, PI amplifiers only consume approx. 20% of linear and switched-mode amplifier at the piezo out- the power required by a corresponding linear amplifier put, capacitive load 1 µF. The measured values clearly with the same output power show that the pulse width modulated amplifier allows significantly higher dynamics than the classic linear amplifier. The linear amplifier reaches the upper limit of its power consumption at frequencies of up to approx. 700 Hz, the switching amplifier does not reach the limit until far beyond 2 kHz

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Linearized Amplifiers for Piezo Displacement Without Hysteresis

Piezo Electronics for Operating Piezo Actuators

Charge Control Charge and Displacement For dynamic A typical application for piezo actuators or Charge control is based on the principle that applications: nanopositioning systems is dynamic scanning. the displacement of piezo actuators is much This involves two different methods: step-and- more linear when an electrical charge is Active vibration settle operation with precise and repeatable applied instead of a voltage. The hysteresis is damping position control on the one hand, and ramp only 2% with electrical charges, whereas it is Adaptronics operation with especially linear piezo displace- between 10 and 15% with open-loop control High-speed ment on the other. The first method requires a voltages (fig. 51). Therefore, charge control can mechanical closed servo loop which ensures that positions often be used to reach the required precision switches can be approached precisely and repeatedly even without servo loop. This enhances the Valve control with constant step sizes. dynamics and reduces the costs. Charge con- (e.g. pneumatics) trol is not only of advantage as regards highly Of course, ramp operation with linear piezo dynamic applications but also when it comes Dispensing displacement is also possible using position to operation at very low frequencies. However, feedback sensors and a servo loop. However, charge control is not suitable for applications in this case, the servo loop will determine the where positions need to be maintained for a dynamics of the entire system which some longer period of time. times significantly limits the number of cycles per time unit. This can be avoided by means of an alternative method of amplification: charge control.

The charge-controlled E-506.10 power amplifier offers highly linear, dynamic control for PICMA® piezo actuators

Δl Δl

ΔV Q

Fig. 51: Typical expansion of piezo actuators in relation to the applied voltage (left) and the charge (right). Control- ling the applied charge significantly reduces the hysteresis

103

PIEZO TECHNOLOGY Tensile Tensile Tensile Tensile stressesstresses stressesstresses FRAGILEFRAGILE

Tensile Tensile stresses Handling of Piezo Actuators stresses FRAGILE

Piezo actuators are subject to high mechani- Mechanical Installation (fig. 52, 53, 54) cal and electrical loads. Moreover, the brittle Avoid torques and lateral forces when ceramic or crystalline materials require careful Tensile Tensile mounting and operating the actuator by stresses stresses handling. using suitable structures or guides. FRAGILE Avoid mechanical shocks to the actuator, When the actuator is operated dynamically: which can occur if you drop the actuator, Install the actuator so that the center of for example. mass of the moving system coincides with the actuator axis, and use a guiding for Fig. 52: Avoiding lateral forces Do not use metal tools during installation. very large masses. and torques Avoid scratching the ceramic or polymer Establish contact over as large an area as Unbenannt-2Unbenannt-2 1 1 coating and the end surfaces during instal- 30.03.12 30.03.12 16:56 16:56 lation and use. possible on the end surfaces of a stack actuator. Prevent the ceramic or polymer insulation fromTensile coming into contactTensile with conductive Select opposing surfaces with an evenness stresses stresses liquids (such as sweat) or metal dust. of only a few micrometers. FRAGILE If the actuator is operated in a vacuum: Gluing Observe the information on the permissible If the mounting surface is not even, use piezo voltages for specific pressure ranges epoxy resin glue for gluing the actuators. (p. 62). Cold-hardening, two-component adhesives Fig. 53: Prevention of torques If the actuator could come into contact with are well suited for reducing thermo- Unbenannt-2 1 30.03.12 16:56 insulating liquids such as silicone or mechanical stresses. hydraulic oils: Contact [email protected]. Maintain the operating temperature range If the actuator has accidently become dirty, specified for the actuator during hardening carefully clean the actuator with isopropa- and observe the temperature expansion nol or ethanol. Next, completely dry it in a coefficients of the involved materials.

drying cabinet. Never use acetone for Tensile Tensile TensileTensile TensileTensile stresses Uneven mounting surfaces are found, for stressesstresses stresses cleaning. When cleaning in an ultrasonicstressesstresses example, with PICMA® Bender and PICMA® FRAGILEFRAGILE FRAGILE bath, reduce the energy input to the neces- Chip actuators, since these surfaces are not sary minimum. ground after sintering (fig. 55). Fig. 54: Avoiding tensile Recommendation: Wear gloves and protec- stresses by means of a tive glasses during installation and start- Applying a Preload (fig. 54) mechanical preload up. Create the preload either externally in the DuraAct patch actuators and encapsulated mechanical structure or internally in a case. PICMA® piezo actuators have a particularly Apply the preload near the axis within the robust construction. They are partially exempt core cross-section of the actuator. from this general handling information. If the actuator is dynamically operated and Unbenannt-2 1 30.03.12 16:56 the preload is created with a spring: Use a spring whose total stiffness is approximately one order of magnitude less than that of the actuator. Fig. 55: Mounting of a one- sidedly clamped bending actuator by gluing

Unbenannt-2 1 30.03.12 16:56

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Unbenannt-2 1 30.03.12 16:56 Unbenannt-2Unbenannt-2 1 1 30.03.1230.03.12 16:56 16:56 Tensile Tensile stresses stresses FRAGILE

Tensile Tensile Tensile Tensile Tensile Tensile Tensile Tensile stresses stresses stresses stresses stresses stresses stresses stresses FRAGILE FRAGILE FRAGILEFRAGILE

Introducing the Load Evenly (fig. 56) The parallelism tolerances of the mechanical system and the actuator result in an irregular load distribution. Here, compressive stress Tensile Tensile es may cause tensile stresses in the actua- stresses stresses FRAGILE tor. Regarding the even application of a load, there are diverse design solutions that differ from each other in axial stiffness, separability of the connection and rotatability in operation, Fig. 56: Avoiding an irregular load application e.g. in the case of lever amplification.

Gluing the actuator (cf. gluing section) Electrically insulate the actuator against the Hardened spherical end piece with point peripheral mechanics. At the same time, contact to even opposing surface observe the legal regulations for the Hardened spherical end piece with ring respective application. contact to a spherical cap Observe the polarity of the actuator for Connection via a flexure joint connection. If the actuator is coupled in a milling Only mount the actuator when it is short- circuited. pocket, make sure that there is full-area Fig. 57: Full-area contact of contact on the end surface of the actuator. When the actuator is charged: Discharge the actuator For this purpose, select the dimensions of the actuator in a controlled manner with a the milling pocket correspondingly or make 10 kΩ resistance. Avoid directly short-circui- free cuts in the milling pocket (fig. 57). ting the terminals of the actuator. If a point load is applied to the end piece Do not pull out the connecting cable of the Unbenannt-2 1 30.03.12 16:56 of the actuator: Dimension the end piece amplifier when voltage is present. The

so that its thickness corresponds to half mechanical impulse triggered by this couldTensile Tensile stresses stresses the cross-sectional dimensionUnbenannt-2 in 1 order to damageUnbenannt-2 the 1 actuator. Unbenannt-2Unbenannt-2 1 1 30.03.12 16:56 30.03.12 16:56 30.03.12 30.03.12 16:56 16:56 FRAGILE prevent tensile stresses on the actuator Safe Operation (fig. 58). Reduce the DC voltage as far as possible Fig. 58: Proper dimensioning Electrical Connection (fig. 59) during actuator operation (p. 63). You can of the end pieces in the case From an electrical point of view, piezo actua- decrease offset voltages with semi-bipolar of point contact tors are capacitors that can store a great operation. amount of energy. Their high internal resist Always power off the actuator when it is ances lead to very slow discharges with time not needed. constants in the range of hours. Mechanical or Avoid steep rising edges in the piezo volt thermal loads electrically charge the actuator. Tensile Tensile age, since they can trigger strong dynamic stresses stresses Connect the case or the surrounding forces when the actuator does not have a FRAGILE mechanics to a protective earth conductor preload. Steep rising edges can occur, for Unbenannt-2 1 in accordance with the standards. example, when digital wave generators are 30.03.12 16:56 switched on. Fig. 59: Mechanical loads electrically charge the actuator. Mounting only when short-circuited

105

PIEZO TECHNOLOGY

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