Piezoelectric Solutions Part I - Piezo Components & Materials Part II - Piezo Actuators & Transducers BAUELEMENTE, TECHNOLOGIE, ANSTEUERUNG Part III - Piezo Actuator Tutorial PIEZOWWW.PICERAMIC.DE TECHNOLOGY Contents Part I - Piezo Components & Materials .......... .3 Part II - Piezo Actuators & Transducers . .40 Part III - Piezo Actuator Tutorial ........ .73 Imprint PI Ceramic GmbH, Lindenstrasse, 07589 Lederhose, Germany Registration: HRB 203 .582, Jena local court VAT no .: DE 155932487 Executive board: Albrecht Otto, Dr . Peter Schittenhelm, Dr . Karl Spanner Phone +49 36604-882-0, Fax +49-36604-882-4109 info@piceramic .com, www .piceramic .com Although the information in this document has been compiled with the greatest care, errors cannot be ruled out completely . Therefore, we cannot guarantee for the information being complete, correct and up to date . Illustrati- ons may differ from the original and are not binding . PI reserves the right to supplement or change the information provided without prior notice . All contents, including texts, graphics, data etc ., as well as their layout, are subject to copyright and other protective laws . Any copying, modification or redistribution in whole or in parts is subject to a written permission of PI . The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co . KG : PI®, PIC®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PIn- ano®, PIMag® . The following company names or brands are the registered trademarks of their owners: μManager, LabVIEW, Leica, Linux, MATLAB, MetaMorph, Microsoft, National Instruments, Nikon, Olympus, Windows, Zeiss . WWW.PICERAMIC.COM Product Overview IN-HOUSE DEVELOPMENT AND PRODUCTION Piezoelectric Components ! Various different versions in many dif- ferent geometries such as disks, plates, tubes, customized shapes ! High resonant frequencies to 20 MHz OEM Adaptations ! Piezo transducers for ultrasonic applications ! Assembly of complete transducer components ! 2D or line arrays DuraAct Piezo Patch Transducers ! Actuator or sensor, structural health monitoring ! Bendable and robust, preloaded due to lamination Control Electronics ! Different performance classes ! OEM modules and benchtop devices 3 PIEZO TECHNOLOGY PICMA® Multilayer Piezo Actuators ! Low piezo voltage to 120 V ! High stiffness ! Travel ranges to 100 µm PICA High-Load Actuators ! Travel ranges to 300 µm ! Forces to 100 kN PICMA® Multilayer Bending Actuators ! Bidirectional displacement to 2 mm ! Low operating voltage to 60 V ! Contractors, variable contours Piezo Actuators with Customized Equipment ! For use in a harsh environment ! Position and temperature monitoring ! For cryogenic temperatures WWW.PICERAMIC.COM PI Ceramic LEADERS IN PIEZOELECTRIC TECHNOLOGY PI Ceramic is one of the world’s market lead - ers for piezoelectric actuators and sensors . PI Core Competences Ceramic provides everything related to piezo of PI Ceramic ceramics, from the material and components ! Standard piezo com- right through to the complete integration . ponents for actuators, PI Ceramic provides system solutions for ultrasonic and sensor research and industry in all high-tech mar- applications kets including medical engineering, mechan- ! System solutions ical engineering and automobile manufac- ! Manufacturing of piezo- ture, or semiconductor technology . electric components of up to several million Materials Research and Development units per year PI Ceramic develops all its piezoceramic Certified Quality ! Development of custom-engineered materials itself . To this end PI Ceramic main- Since 1997, PI Ceramic has been certified solutions tains its own laboratories, prototype manu- according to the ISO 9001 standard, where facture as well as measurement and testing ! High degree of flexibi- the emphasis is not only on product quali- lity in the engineering stations . Moreover, PI Ceramic works with ty but primarily on the expectations of the process, short lead leading universities and research institutions customer and his satisfaction . PI Ceramic times, manufacture of at home and abroad in the field of piezoelec- is also certified according to the ISO 14001 individual units and tricity . (environmental management) and OHSAS very small quantities 18001 (occupational safety) standards, ! All key technologies Flexible Production which taken together, form an Integrated and state-of-the-art In addition to the broad spectrum of standard Management System (IMS) . PI Ceramic is equipment for ceramic products, the fastest possible realization of a subsidiary of Physik Instrumente (PI) and production in-house customer-specific requirements is a top pri- develops and produces all piezo actuators for ! Certified in accordance ority . Our pressing and multilayer technology PI’s nanopositioning systems . The drives for with ISO 9001, ISO 14001 and OHSAS enables us to shape products with a short PILine® ultrasonic piezomotors and NEXLINE® 18001 lead time . We are able to manufacture indi- high-load stepping drives also originate from vidual prototypes as well as high-volume PI Ceramic . production runs . All processing steps are undertaken in-house and are subject to con- tinuous controls, a process which ensures quality and adherence to deadlines . Company building of PI Ceramic in Lederhose, Thuringia, Germany . 5 PIEZO TECHNOLOGY Reliability and Close Contact with our Customers OUR MISSION Our aim is to maintain high, tested qual- After-Sales Service PI Ceramic provides ity for both our standard products and for Even after the sale has been completed, custom-engineered components . We want ! Piezoceramic materials our specialists are available to you and can (PZT) you, our customers, to be satisfied with the advise you on system upgrades or technical performance of our products . At PI Ceramic, ! Piezoceramic issues . This is how we at PI Ceramic achieve components customer service starts with an initial infor- our objective: Long-lasting business rela- mative discussion and extends far beyond ! Customized and appli- tions and a trusting communication with cation-specific ultrasonic the shipping of the products . customers and suppliers, both of which transducers/transducers are more important than any short-term ® ! PICMA monolithic Advice from Piezo Specialists success . multilayer piezo actuators You want to solve complex problems – we ! Miniature piezo actuators won’t leave you to your own devices . We ® PI Ceramic supplies piezo-ceramic solutions ! PICMA multilayer use our years of experience in planning, to all important high-tech markets: bender actuators developing, designing and the production ! PICA high-load piezo of individual solutions to accompany you ! Industrial automation actuator from the initial idea to the finished product . ! Semiconductor industry ! PT Tube piezo actuators We take the time necessary for a detailed ! Medical engineering ! Preloaded actuators understanding of the issues and work out ! Mechanical and precision engineering with casing a comprehensive and optimum solution at ! Aviation and aerospace ! Piezocomposites – an early stage with either existing or new DuraAct patch technologies . ! Automotive industry transducers ! Telecommunications WWW.PICERAMIC.COM Experience and Know-How STATE-OF-THE-ART MANUFACTURING TECHNOLOGY Developing and manufacturing piezoceram- particularly high degree of precision . Spe- ic components are very complex processes . cial milling machines accurately shape the PI Ceramic has many years of experience in components when they are still in the “green this field and has developed sophisticated state“, i .e . before they are sintered . Sintered manufacturing methods . Its machines and ceramic blocks are machined with precision equipment are state of the art . saws like the ones used to separate indi- vi dual wafers . Very fine holes, structured Rapid Prototyping ceramic surfaces, even complex, three- The requirements are realized quickly and dimen sional contours can be produced . flexibly in close liaison with the customer . Prototypes and small production runs of Automated Series Production – custom-engineered piezo components are Advantage for OEM Customers available after very short processing times . An industrial application often requires large The manufacturing conditions, i e . the quantities of custom-engineered compo- composition of the material or the sintering nents . At PI Ceramic, the transition to large temperature, for example, are individually production runs can be achieved in a reliable adjusted to the ceramic material in order to and low-cost way while maintaining the high achieve optimum material parameters . quality of the products . PI Ceramic has the ca- pacity to produce and process medium-sized Precision Machining Technology and large production runs in linked automat- PI Ceramic uses machining techniques from ed lines . Automatic screen printers and the the semiconductor industry to machine the latest PVD units are used to metallize the sensitive piezoceramic elements with a ceramic parts . Automated processes optimize throughput 7 PIEZO TECHNOLOGY ˝L Polarisation axis ˝L ˝ L C Polarisation 1 f f (Z) axis m n 3 ˝ L C L 1 C 1 0 (Z) fm fn 3 6 Z + L o P L1 5 C0 2(Y) 6 Z + L o R1 4 P 0 V 1 5 Impendanz (X) 2(Y) R1 4 Frequenz f 0 V 1 Impendanz (X) Frequenz f 1 ODD 1 (1) TH P 3 (Z) ODD TH 6 ˝L OD 3 (1) TH P 5 Polarisation ID P 6 3 – – – – 2 (Z) axis TH 6 ˝ L OD – – – – 3 + + + + C L – 1 P 5 – ID P – – – – – – – – + + + + f f 6 (Z) – m n 2 + + – –